Vacuum adsorption device

Abstract

The invention relates to the technical field of silicon wafer processing, and discloses a vacuum adsorption device which comprises an adsorption disc, a plurality of adsorption grooves are formed in the surface of one side, in the first direction, of the adsorption disc, and openings are formed in the outward sides of the adsorption grooves; the transmission cavity is located in the adsorption disc, the first end of the transmission cavity communicates with the adsorption groove, and the second end of the transmission cavity communicates with the vacuum generation device; the switching assembly is located in the transmission cavity, the transmission cavity comprises an upper cavity body and a lower cavity body, the upper cavity body is communicated with the adsorption tank, the lower cavity body is communicated with the vacuum generation device, and the transmission assembly is in transmission connection with the switching assembly so as to drive the switching assembly to move in the transmission cavity; the upper cavity and the lower cavity are disconnected under the blocking of the switching assembly; in the communication state, the upper cavity and the lower cavity are connected under communication of the switching assembly. The invention provides the vacuum adsorption device capable of automatically realizing the plugging and communication of the adsorption tank.

Description

Technical Field

[0001] The present invention relates to the field of silicon wafer processing, and in particular to a vacuum adsorption device. Background Art As the market share of silicon wafer products increases, silicon wafers of different diameters have also appeared in the market. In order to adsorb silicon wafers of different sizes, the existing vacuum adsorption device will be provided with adsorption slots of different sizes on the vacuum adsorption device, and the adsorption slots are connected to the vacuum generating device at the same time. Furthermore, in order to accurately adsorb the silicon wafer, it is necessary to open the adsorption slot that matches the size of the silicon wafer, and at the same time close the adsorption slots of other sizes. The unused adsorption slots are usually manually closed with screws to block the flow of gas. However, the manual closing of the adsorption slot has the problems of cumbersome operation and low efficiency. Summary of the invention

[0002] The present application mainly solves the technical problem that the manual closing of the adsorption tanks in the prior art multi-adsorption tank vacuum adsorption device is troublesome and inefficient, and provides a vacuum adsorption device that can automatically block and connect the adsorption tanks.

[0003] In order to solve the above technical problems, the present application provides a vacuum adsorption device, characterized in that the vacuum adsorption device comprises: An adsorption plate, wherein a plurality of adsorption grooves are arranged on a surface of one side of the adsorption plate along the first direction, and an opening is arranged on an outward side of the adsorption groove; A transmission cavity, wherein the transmission cavity is located in the adsorption plate, a first end of the transmission cavity is communicated with the adsorption groove, and a second end of the transmission cavity is communicated with a vacuum generating device; A switching component and a transmission component, wherein the switching component is located in the transmission cavity, the transmission cavity includes an upper cavity and a lower cavity, the upper cavity is connected to the adsorption groove, the lower cavity is connected to the vacuum generating device, and the transmission component is connected to the switching component to drive the switching component to move in the transmission cavity and form a blocked state and a connected state of the adsorption groove; wherein, In the blocking state, the upper cavity and the lower cavity are disconnected under the blocking of the switching component; In the connected state, the upper cavity and the lower cavity are connected to each other under the connection of the switching component.

[0004] In one embodiment, the transmission assembly includes: A driving member and a transmission member, wherein the driving member is in transmission connection with the transmission member, the switching component is located on one side of the driving member, the driving member is used to drive the transmission member to rotate, and the transmission member converts the rotational motion into a linear motion of the switching component along a first direction in the transmission cavity to form a switch between the blocking state and the connecting state.

[0005] In one embodiment, the transmission member includes: A transmission rod, wherein a rotation input structure is arranged on the transmission rod, and a plurality of rotating rings are arranged on the transmission rod at intervals along the second direction, wherein the outer surface of the rotating ring in the circumferential direction is a driving surface, and a second driving groove is formed by radially inwardly recessing from the driving surface on the rotating ring, and the second driving groove is provided with an opening outward, and the projections of the second driving grooves of each rotating ring on the bottom surface of the transmission rod along the second direction do not intersect with each other; wherein, The connecting state is formed when the switching component abuts against the second driving groove, and the blocking state is formed when the switching component abuts against the driving surface.

[0006] In one embodiment, the vacuum adsorption device further includes a limiter, and the limiter includes: The limiting ring, one or more limiting rings are arranged on the transmission rod along the second direction, and a plurality of limiting surfaces are formed on the outer surface of the limiting ring in the circumferential direction, and the limiting surfaces are arranged corresponding to the second driving groove; A limit block and a first elastic member, wherein the limit block and the first elastic member are located on one side of the limit ring along the first direction, and the first elastic member is used to drive the limit block to abut against the outer surface of the limit ring in the circumferential direction. When the limit ring rotates, the limit block sequentially abuts against each of the limit surfaces in the rotation direction.

[0007] In one possible implementation, the switching component includes: A fixing member, the fixing member comprising a first fixing section and a second fixing section sequentially arranged along a first direction, the first fixing section being connected to the second fixing section, a first air hole being arranged through the first direction in the first fixing section, a second air hole being arranged through the second fixing section along the first direction, the first air hole being connected to the second air hole, and an interface being formed between the first air hole and the second air hole, the first fixing section being located in the upper cavity, and the first air hole being communicated with the upper cavity, the second fixing section being located in the lower cavity, and the second air hole being communicated with the lower cavity; A moving part and a blocking plate, wherein the first end of the moving part abuts against the transmission part, the second end of the moving part is located in the first air hole, and the second end of the moving part is provided with a blocking plate, and the blocking plate completely covers the second air hole when abutting against the interface; The second elastic member is respectively connected to the moving member and the fixed member, and the second elastic member drives the first end of the moving member to always abut against the transmission member, and under the rotation of the transmission member, the blocking plate abuts against or separates from the interface to form a switch between the blocking state and the connecting state.

[0008] In one embodiment, the moving part includes: An abutment joint, wherein the abutment joint is provided with an abutment surface on a side close to the transmission member, the abutment joint abuts against the second driving groove or the driving surface through the abutment surface, and the abutment joint can enter and exit the second driving groove; A first connecting member, the abutment joint is connected to the sealing plate through the first connecting member, a first accommodating cavity is provided in the first connecting plate from the abutment joint to the sealing plate, a plurality of first driving grooves are radially penetrated on the first connecting member, and the first driving grooves are connected to the first accommodating cavity.

[0009] In one embodiment, the fixing member includes: an abutment plate, the abutment plate being disposed in the first air hole and being disposed close to the abutment head; The second connecting member is arranged between the abutment plate and the first fixed section. After the second connecting member is connected to the first fixed section, it passes through the first driving groove and is connected to the abutment plate. The second elastic member is arranged in the first accommodating cavity between the abutment plate and the sealing plate. The second elastic member always gives the sealing plate a driving force close to the abutment plate.

[0010] In one possible implementation, the switching component includes: a first sealing member, wherein the first sealing member is sleeved on the periphery of the second air hole, the first sealing member at least partially protrudes from the interface to form a first protrusion, and the first protrusion is arranged toward the blocking plate; The second sealing member is sleeved on the periphery of the second fixing section, and the second sealing member at least partially protrudes from the outer surface of the second fixing section.

[0011] In one embodiment, the moving part includes: An abutment joint, wherein the abutment joint is provided with an abutment surface on a side close to the moving part, the abutment joint abuts against the second driving groove or the driving surface through the abutment surface, and the abutment joint can enter and exit the second driving groove; A first connecting member and a third elastic member, the abutment joint is connected to the sealing plate through the first connecting member, the third elastic member is arranged between the first connecting member and the sealing member, a first accommodating cavity is arranged in the first connecting plate from the abutment joint to the sealing plate, a first driving groove is arranged on one side of the first connecting member close to the abutment joint, and the first driving groove is respectively connected to the first accommodating cavity and the lower cavity.

[0012] In one embodiment, the second elastic member is sleeved outside the first connecting member, the second elastic member is respectively connected to the abutting head and the first fixing section, the second elastic member always gives the abutting head a driving force away from the first fixing section, and a venting groove is provided between the blocking plate and the side wall of the first air hole; a first sealing member, wherein the first sealing member is sleeved on the periphery of the second air hole, the first sealing member at least partially protrudes from the interface to form a first protrusion, and the first protrusion is arranged toward the blocking plate; The second sealing member is sleeved on the periphery of the second fixing section, and at least half of the second sealing member protrudes from the outer surface of the second fixing section.

[0013] Compared with the prior art, the transmission cavity is connected to the adsorption groove on the adsorption disk and the vacuum generating device respectively, the switching component is arranged in the transmission cavity, and the transmission component is connected to the switching component in a transmission manner to drive the switching component to move in the transmission cavity, thereby forming a blocked state and a connected state of the vacuum adsorption device. In the blocked state, the transmission cavity is disconnected from the adsorption groove, and the adsorption groove does not produce adsorption. In the connected state, the transmission cavity is connected to the adsorption groove, and the adsorption groove produces adsorption. In this way, the automatic control of whether the adsorption groove is connected or not is realized, which can provide its control efficiency compared with manual control.

[0014] Therefore, the present application has the characteristics of reasonable structure and convenient use. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Attached Figure 1 It is a structural schematic diagram of the vacuum adsorption device of the present application; Attached Figure 2 It is another structural schematic diagram of the vacuum adsorption device of the present application; Attached Figure 3 It is a structural schematic diagram of the transmission component of the present application; Attached Figure 4 It is a structural schematic diagram of the rotating ring of the present application; Attached Figure 5 It is another structural schematic diagram of the rotating ring of the present application; Attached Figure 6 This is a structural schematic diagram of the limit ring of the present application; Attached Figure 7 For attachment Figure 2 A partial enlarged view of the A in the middle; Attached Figure 8 It is a structural diagram of the switching component of this application; Attached Fig. 9 It is a structural schematic diagram of the switching component of the present application in a blocked state; Attached Fig.10 It is a structural schematic diagram of the switching component of the present application in a connected state; Attached Fig.11 It is another structural schematic diagram of the switching component of the present application in a blocked state; Attached Fig.12 This is another structural schematic diagram of the switching component of the present application in a connected state.

[0016] Description of the numbers in the figure: X, first direction; Y, second direction; 10. Vacuum adsorption device; 100, adsorption plate; 110, upper plate; 120, middle plate; 130, lower plate; 131, second accommodating cavity; 140, adsorption groove; 150, first fixing hole; 160, second fixing hole; 170, third sealing member; 200, transmission cavity; 210, upper cavity; 211, first cavity; 212, second cavity; 220, lower cavity; 230, air inlet cavity; 300, switching assembly; 310, fixing member; 311, first fixing section; 312, second fixing section; 313, first air hole; 314, second air hole; 315, interface; 316, abutment plate; 317, second connecting member; 318, third elastic member; 320, moving member; 321, blocking plate; 321-1, air-permeable groove; 322, second elastic member; 323, abutment head; 323-1, abutment surface; 324, first connecting member; 324-1, first accommodating cavity; 324-2, first driving groove; 330, first sealing member; 340, second sealing member; 400, transmission assembly; 500, driving member; 510, driving structure; 520, intermediate structure; 600, transmission member; 610, transmission rod; 620, rotating ring; 621, driving surface; 622, second driving groove; 630, input structure; 700, limiting member; 710, limiting ring; 711, limiting surface; 720, limiting block; 730, first elastic member; 740, third accommodating cavity. DETAILED DESCRIPTION

[0017] In order to make the purpose, features, and advantages of the present application more obvious and easy to understand, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0018] In the prior art, there are technical problems that the operation of manually closing the adsorption tanks in the multi-adsorption tank vacuum adsorption device is complicated and inefficient.

[0019] To this end, the present application provides a vacuum adsorption device, characterized in that the vacuum adsorption device comprises: An adsorption plate, wherein a plurality of adsorption grooves are arranged on a surface of one side of the adsorption plate along the first direction, and an opening is arranged on an outward side of the adsorption groove; A transmission cavity, wherein the transmission cavity is located in the adsorption plate, a first end of the transmission cavity is communicated with the adsorption groove, and a second end of the transmission cavity is communicated with a vacuum generating device; A switching component and a transmission component, wherein the switching component is located in the transmission cavity, the transmission cavity includes an upper cavity and a lower cavity, the upper cavity is connected to the adsorption groove, the lower cavity is connected to the vacuum generating device, and the transmission component is connected to the switching component to drive the switching component to move in the transmission cavity and form a blocked state and a connected state of the adsorption groove; wherein, In the blocking state, the upper cavity and the lower cavity are disconnected under the blocking of the switching component; In the connected state, the upper cavity and the lower cavity are connected to each other under the connection of the switching component.

[0020] Embodiment 1: Please refer to the attached Figure 1 To Attachment Fig.10 As shown, a specific implementation of the vacuum adsorption device 10 of the present application is shown. The vacuum adsorption device 10 of the present application realizes vacuum adsorption of the adsorbed object, and the vacuum adsorption device 10 of the present application is applied to the field of silicon wafer processing. In one embodiment, the vacuum adsorption device 10 of the present application is applied to the adsorption of silicon wafers.

[0021] Please refer to the attached Figure 1 To Attachment Fig.10As shown, the first direction X of the present application refers to the height direction of the vacuum adsorption device 10, that is, the direction from top to bottom of the vacuum adsorption device 10 of the present application or the direction from bottom to top of the vacuum adsorption device 10. In the present application, the upper plate 110 is arranged above the lower plate 130, and in the present application, the lower plate 130 is arranged below the upper plate 110. The second direction Y of the present application refers to the length direction of the vacuum adsorption device 10, that is, the direction from left to right of the vacuum adsorption device 10 of the present application or the direction from right to left of the vacuum adsorption device 10 of the present application. In the application, the rotating ring 620 is arranged to the left of the driving structure 510, and in the present application, the driving structure 510 is arranged to the right of the rotating ring 620.

[0022] Attached Figure 1 1 is a schematic diagram of the structure of the vacuum adsorption device 10 of the present application. Figure 2 This is another schematic diagram of the structure of the vacuum adsorption device 10 of the present application. Figure 1 And attached Figure 2 As shown, the vacuum adsorption device 10 of the present application includes an adsorption plate 100, which is the main structure of the vacuum adsorption device 10 of the present application. The remaining components of the vacuum adsorption device 10 are installed in the adsorption plate 100. One side of the adsorption plate 100 along the first direction X is the adsorption surface. The adsorption plate 100 is also provided with a plurality of adsorption grooves 140 along the first direction X. The adsorption grooves 140 extend downward from the adsorption surface to the inside thereof. The adsorption grooves 140 are provided with openings facing outward, and the adsorption grooves 140 realize vacuum adsorption of silicon wafers through the openings.

[0023] In one embodiment, the adsorption groove 140 is an annular structure, and the adsorption groove 140 is arranged around the center of the adsorption plate 100. Further, a plurality of adsorption grooves 140 are arranged radially at intervals, and the adsorption groove 140 is a circular structure. The diameter of the adsorption groove 140 is 200 mm to 600 mm.

[0024] In one embodiment, the adsorption plate 100 is a cylindrical structure, and the adsorption plate 100 and each adsorption slot 140 are coaxially arranged.

[0025] Please refer to the attached Figure 1 And attached Figure 2 As shown, the adsorption plate 100 of the present application includes an upper plate 110, a middle plate 120 and a lower plate 130 sequentially arranged along a first direction X, the middle plate 120 is arranged between the upper plate 110 and the lower plate 130, and the adsorption groove 140 and the adsorption surface of the present application are arranged on the upper plate 110. The upper plate 110 is provided with a first fixing hole 150, the middle plate 120 is provided with a first fixing hole 150 and a second fixing hole 160, and the lower plate 130 is provided with a second fixing hole 160. The first fixing member connects the upper plate 110 with the middle plate 120 through the first fixing hole 150, and the second fixing member connects the middle plate 120 with the lower plate 130 through the second fixing hole 160.

[0026] In one embodiment, the upper plate 110, the middle plate 120 and the lower plate 130 are all cylindrical structures, and the diameters of the upper plate 110, the middle plate 120 and the lower plate 130 are consistent. Further, in the present application, the upper plate 110, the middle plate 120 and the lower plate 130 are coaxially arranged.

[0027] Please refer to the attached Figure 1 And attached Figure 2 As shown, the adsorption plate 100 of the present application also includes a transmission cavity 200, which is located in the adsorption plate 100, and the first end of the transmission cavity 200 is connected to the adsorption groove 140, and the second end of the transmission cavity 200 is connected to the vacuum generating device. In the present application, the vacuum generating device is a vacuum pump, and the vacuum pump realizes negative pressure in the adsorption groove 140 through the transmission cavity 200, thereby further realizing vacuum adsorption of the silicon wafer on the adsorption surface.

[0028] In one embodiment, the transmission chamber 200 is arranged along the first direction X. Further, the transmission chamber 200 includes an upper chamber 210 and a lower chamber 220 arranged along the first direction X, the upper chamber 210 is communicated with the lower chamber 220, and the upper chamber 210 is communicated with the adsorption tank 140, and the lower chamber 220 is communicated with the vacuum generating device, and then the vacuum generating device realizes negative pressure in the adsorption tank 140 through the transmission chamber 200, and further realizes vacuum adsorption of the silicon wafer.

[0029] Among them, the upper cavity 210 includes a first cavity 211 and a second cavity 212 arranged along the first direction X, the first cavity 211 is located in the upper plate 110, the upper cavity 210 and the adsorption groove 140 pass through the upper plate 110 together, the second cavity 212 is located in the middle plate 120, the second cavity 212 passes through the middle plate 120, the lower cavity 220 is located in the lower plate 130, and the lower cavity 220 is formed by extending from the upper surface of the lower plate 130 to the lower edge thereof.

[0030] In the present application, the number of transmission cavities 200 corresponds to the number of adsorption slots 140, that is, a transmission cavity 200 is disposed at the bottom of each adsorption slot 140. For the convenience of subsequent control, multiple transmission cavities 200 are arranged on the same straight line.

[0031] Please refer to the attached Figure 1 And attached Figure 2 As shown, the adsorption disk 100 of the present application further includes an air inlet cavity 230, and the vacuum generating device is connected to the lower cavity 220 via the air inlet cavity 230. Further, when there are multiple lower cavities 220, the lower cavities 220 are connected to each other, so as to ensure that after the air inlet cavity 230 is connected to one of the lower cavities 220, the remaining lower cavities 220 can also be connected to the air inlet cavity 230. In one embodiment, the air inlet cavity 230 is disposed along the second direction Y.

[0032] Please refer to the attached Figure 1 And attached Figure 2 As shown, the vacuum adsorption device 10 of the present application includes a third seal 170, and the third seal 170 is provided between the upper plate 110 and the middle plate 120 and between the middle plate 120 and the lower plate 130. Further, the third seal 170 sets the transmission cavity 200 inside. When the upper plate 110 and the middle plate 120 are against each other, the sealing of the first cavity 211 and the second cavity 212 can be ensured when they are connected. When the middle plate 120 and the lower plate 130 are against each other, the sealing of the second cavity 212 and the lower cavity 220 can be ensured when they are connected.

[0033] In one embodiment, the third sealing member 170 is made of rubber material.

[0034] Please refer to the attached Figure 1 And attached Figure 2 As shown, a second accommodating cavity 131 is further provided in the lower plate 130 of the present application, and the second accommodating cavity 131 is communicated with the lower cavity 220 .

[0035] Please refer to the attached Figure 1 And attached Figure 2 As shown, the vacuum adsorption device 10 of the present application includes a switching component 300 and a transmission component 400. The switching component 300 is located in the transmission cavity 200. Further, the main body of the switching component 300 is located in the upper cavity 210. The connection between the switching component 300 and the first cavity 211 is a sealed connection to ensure that the communication and blocking between the upper cavity 210 and the lower cavity 220 can only be performed through the switching component 300. The transmission component 400 is located in the transmission cavity 200. Further, the main body of the transmission component 400 is located in the lower cavity 220. The transmission component 400 is connected to the switching component 300 in a transmission manner to drive the switching component 300 to move in the transmission cavity 200 and form a blocked state and a connected state of the vacuum adsorption device 10. In the blocked state, the upper cavity 210 and the lower cavity 220 are disconnected under the blocking of the switching component 300. At this time, the vacuum generating device cannot form a negative pressure in the adsorption tank 140 through the transmission cavity 200. In the connected state, the upper cavity 210 and the lower cavity 220 are connected to each other by the switching assembly 300 . At this time, the vacuum generating device forms a negative pressure in the adsorption tank 140 through the transmission cavity 200 .

[0036] Furthermore, any transmission cavity 200 can be opened by driving the transmission assembly 400 , and the remaining transmission cavities 200 can be kept in the disconnected state, thereby realizing the automatic control of the on and off of the adsorption slot 140 .

[0037] Attached Figure 3 This is a schematic diagram of the structure of the transmission assembly 400 of the present application. Figure 3As shown, the transmission component 400 of the present application includes a driving member 500 and a transmission member 600, the driving member 500 is connected to the transmission member 600, the driving member 500 is used to drive the transmission member 600 to rotate, the switching component 300 is arranged on one side of the driving member 500, and the transmission member 600 is connected to the switching component 300, thereby converting the rotational movement of the transmission member 600 into a linear movement of the switching component 300 along the first direction X in the transmission cavity 200 to form a switch between a blocked state and a connected state.

[0038] In one embodiment, the driving member 500 includes a driving structure 510 and an intermediate structure 520, and the driving structure 510 is connected to the transmission member 600 through the intermediate structure 520 to drive the transmission member 600 to rotate. An input structure 630 is provided on the side of the transmission member 600 close to the driving member 500, and the input structure 630 refers to the input of the rotational motion. The driving structure 510 includes a rack and a transverse driving member, and the transverse driving member is connected to the rack to drive the rack to move along the second direction Y. The intermediate structure 520 includes a first driving wheel, a second driving wheel and a connecting rod, and the two ends of the connecting rod are respectively connected to the first driving wheel and the second driving wheel, and the first driving wheel is coaxially arranged with the second driving wheel. The first driving wheel is connected to the rack in a driving manner, and the driving structure 510 is used to drive the first driving wheel to rotate, and the second driving wheel is connected to the input structure 630 in a driving manner to switch the rotational motion of the first driving wheel into the rotational motion of the transmission member 600. Further, the first driving wheel is a cylindrical gear structure, and the second driving wheel and the input structure 630 are bevel gear structures.

[0039] In one embodiment, the driving member 500 may also be a driving motor, which is directly connected to the transmission member 600 to drive the transmission member 600 to rotate.

[0040] Please refer to the attached Figure 3 As shown, the transmission member 600 of the present application includes a transmission rod 610, which rotates under the drive of the driving member 500. The transmission rod 610 is arranged along the second direction Y. During specific installation, the transmission rod 610 is located in the lower plate 130, and part of the transmission rod 610 is located in the lower cavity 220.

[0041] Please refer to the attached Figure 3 As shown, the transmission member 600 of the present application further includes a rotating ring 620, and the number of the rotating ring 620 is set corresponding to the number of the switching components 300, that is, each rotating ring 620 independently controls a switching component 300. The rotating rod is set on the transmission rod 610, and the rotating ring 620 is arranged at intervals along the second direction Y, and the rotating ring 620 is against the switching component 300 to drive the switching component 300 to move.

[0042] In one embodiment, the rotating ring 620 is a cylindrical structure, and the rotation center of the rotating ring 620 coincides with the rotation center of the transmission rod 610 .

[0043] Please refer to the attached Figure 3 As shown, a limiting ring 710 is also provided on the transmission rod 610, and the limiting ring 710 is a part of the limiting member 700, and the limiting member 700 is used to achieve the relative position stability of the transmission assembly 400. The limiting ring 710 is provided on the transmission rod 610, and the limiting ring 710 is provided on the transmission rod 610 at intervals.

[0044] Attached Figure 4 This is a schematic diagram of the structure of the rotating ring 620 of the present application. Figure 4 As shown, the rotating ring 620 of the present application includes a driving surface 621 and a second driving groove 622. When the rotating ring 620 rotates, the driving surface 621 abuts against the switching component 300 to form a blocked state. When the second driving groove 622 abuts against the switching component 300, a connected state is formed. The outer surface of the rotating ring 620 in the circumferential direction is the driving surface 621, and a contact point is formed when the rotating ring 620 abuts against the switching component 300. When the rotating ring 620 rotates and the driving surface 621 abuts against the switching component 300, the height of the abutment point remains unchanged in the first direction X to ensure the stability of the blocked state. The driving surface 621 on the rotating ring 620 is radially inwardly recessed to form the second driving groove 622, and the second driving groove 622 is provided with an opening outwardly, and the switching component 300 can enter the second driving groove 622 through the opening to form a connected state. When the rotating ring 620 rotates, the height of the contact point of the driving surface 621 against the switching assembly 300 in the first direction X is higher than the height of the contact point of the second driving groove 622 against the switching assembly 300 in the first direction X.

[0045] In one embodiment, the second driving groove 622 and the driving surface 621 are transitionally connected.

[0046] Attached Figure 5 This is another structural diagram of the rotating ring 620 of the present application. Figure 5 As shown, the projection of the rotating ring 620 of the present application along the second direction Y on the bottom surface of the transmission rod 610 is shown, and the projection includes all the second driving grooves 622. The second driving grooves 622 in the projection do not intersect with each other. Therefore, during the rotation of the transmission rod 610, only one of all the switching components 300 enters the second driving groove 622, that is, only one of the adsorption grooves 140 in the vacuum adsorption device 10 is in a connected state, thereby realizing precise control of the adsorption grooves 140 in the vacuum adsorption device 10.

[0047] Attached Figure 6 This is a schematic diagram of the structure of the limit ring 710 of the present application. Figure 6 As shown, the limiting ring 710 of the present application is a polygonal column structure, and a plurality of limiting surfaces 711 are formed on the circumferential outer surface of the limiting ring 710, that is, a limiting surface 711 is formed on each side surface of the limiting ring 710, and the limiting surfaces 711 are arranged corresponding to the second driving groove 622, and the specific corresponding process will be further explained in the subsequent drawings.

[0048] Attached Figure 7 Attached Figure 2 A partial enlarged view of point A in the figure. Please refer to the attached Figure 7 As shown, a third accommodating cavity 740 is provided in the lower plate 130 along the first direction X, and the third accommodating cavity 740 is used to set the limiting member 700 . The transmission rod 610 intersects with the third accommodating cavity 740 , so that the limiting ring 710 is set in the third accommodating cavity 740 .

[0049] Please refer to the attached Figure 7 As shown, the limiting member 700 of the present application further includes a first elastic member 730 and a limiting block 720. The first elastic member 730 is arranged in the third accommodating cavity 740 along the first direction X. The first end of the first elastic member 730 abuts against or is connected to the bottom of the third accommodating cavity 740. The second end of the first elastic member 730 abuts against or is connected to the limiting block 720. The limiting block 720 and the limiting ring 710 are also located in the third accommodating cavity 740 at the same time. The limiting block 720 is located between the first elastic member 730 and the limiting ring 710. The surface of the limiting block 720 close to the limiting ring 710 can be fitted with the limiting surface 711 of the limiting ring 710. When the limiting ring 710 rotates, the limiting block 720 sequentially abuts against each limiting surface 711 in the rotation direction. When a limiting surface 711 in the limiting ring 710 abuts against the limiting block 720, it means that one of all the switching components 300 falls into the second driving groove 622. At this time, the abutment between the limiting surface 711 and the limiting block 720 can ensure the stability of the switching component 300 in the second driving groove 622, because if it is necessary to switch other switching components 300 to fall into the second driving groove 622, it is necessary to rotate the transmission rod 610 and overcome the preload of the first elastic member 730 at the same time. The setting of the limiting member 700 can further increase the precision range of the transmission component 400 during transmission, because when the limiting ring 710 rotates, if the limiting block 720 passes through the angle formed by the limiting surface 711, the limiting surface 711 and the limiting block 720 will be quickly fitted under the drive of the first elastic member 730, because when the transmission rod 610 rotates inaccurately, the transmission rod 610 can be further rotated through the first elastic member 730 to achieve accurate positioning of the switching component 300.

[0050] In one embodiment, the first elastic member 730 is a compression spring.

[0051] Attached Figure 8This is a schematic diagram of the structure of the switching component 300 of the present application. Figure 7 As shown, the switching component 300 of the present application includes a fixing member 310, which is fixed in the transmission cavity 200, and the fixing member 310 will not produce relative movement with the adsorption plate 100. In the present application, the fixing member 310 includes a first fixing section 311 and a second fixing section 312 arranged in sequence along the first direction X, and the cross-sectional areas of the first fixing section 311 and the second fixing section 312 along the second direction Y are different. In one embodiment, the cross-sectional area of ​​the first fixing section 311 along the second direction Y is greater than the cross-sectional area of ​​the first fixing section 311 along the second direction Y, and at the same time, the cross-sectional area of ​​the first cavity 211 along the second direction Y is smaller than the cross-sectional area of ​​the second cavity 212 along the second direction Y, and the first fixing section 311 is located in the second cavity 212, and the second fixing section 312 is located in the first cavity 211. The first fixing section 311 is connected to the second fixing section 312, and the second fixing section 312 is connected to the second fixing section 312 by a fixed connection. Furthermore, the first fixing section 311 and the second fixing section 312 are integrally arranged.

[0052] Please refer to the attached Figure 8 As shown, the fixing member 310 of the present application further includes a first air hole 313 and a second air hole 314. The first air hole 313 is arranged along the first direction X through the first fixing section 311, and the second air hole 314 is arranged along the first direction X through the second fixing section 312. The first air hole 313 is connected to the second air hole 314, and the cross-sectional area of ​​the first air hole 313 in the second direction Y is greater than the cross-sectional area of ​​the second air hole 314 in the second direction Y, so as to facilitate the installation of the moving member 320 in the first air hole 313. Since the first air hole 313 and the second air hole 314 have different cross-sectional areas in the second direction Y, an interface 315 is formed in the first air hole 313 and the second air hole 314, and the interface 315 intersects with both the first air hole 313 and the second air hole 314. The first air hole 313 is connected to the lower cavity 220, and the second air hole 314 is connected to the upper cavity 210. Further, the first air hole 313 is communicated with the lower cavity 220 by communicating with the second cavity 212. Therefore, the switching between the blocking state and the communicating state is completely dependent on the relative movement of the moving part 320.

[0053] Please refer to the attached Figure 8As shown, the switching assembly 300 of the present application also includes a moving member 320, and the moving member 320 includes a butt joint 323 and a first connecting member 324. The butt joint 323 is arranged at the first end of the moving member 320, and the butt joint 323 is provided with a butt surface 323-1 on the side close to the transmission member 600. The butt joint 323 butts with the second driving groove 622 or the driving surface 621 on the rotating ring 620 through the butt surface 323-1, and the butt joint 323 can enter the second driving groove 622, that is, the first end of the moving member 320 butts with the transmission member 600. The second end of the moving member 320 is located in the first air hole 313, and the second end of the moving member 320 is provided with a blocking plate 321. When the blocking plate 321 butts with the interface 315, the second air hole 314 is completely blocked to achieve isolation between the first air hole 313 and the second air hole 314.

[0054] In the present application, the two ends of the first connecting member 324 are respectively provided with abutment joints 323 and blocking plates 321 to form the two ends of the moving member 320. A first accommodating cavity 324-1 is provided in the first connecting plate from the abutment joint 323 to the blocking plate 321, and a plurality of first driving grooves 324-2 are radially penetrated on the first connecting member 324, the first driving grooves 324-2 are connected to the first accommodating cavity 324-1, and the first driving grooves 324-2 are arranged along the first direction X at the same time.

[0055] Please refer to the attached Figure 8 As shown, the fixing member 310 also includes an abutment plate 316 and a second connecting member 317. The abutment plate 316 is arranged in the first air hole 313, and the abutment plate 316 is arranged near the abutment head 323. The second connecting member 317 is arranged between the abutment plate 316 and the first fixing section 311, and the second connecting member 317 is also located in the first air hole 313 at the same time. The first end of the second connecting member 317 is connected to the side wall of the first air hole 313, and the second connecting member 317 passes through the first driving groove 324-2 after being connected to the first fixing section 311 and is connected to the abutment plate 316. A plurality of second connecting members 317 are arranged in the circumferential direction of the abutment plate 316. When the moving member 320 floats up and down along the first direction X, the second connecting member 317 and the first driving groove 324-2 also form relative movement at the same time. The first driving groove 324-2 is used to limit the movement range and movement direction of the moving member 320.

[0056] In one embodiment, the cross section of the abutting plate 316 along the second direction Y is consistent with the cross section of the first air hole 313 along the second direction Y. Furthermore, the cross section of the abutting plate 316 along the second direction Y and the cross section of the first air hole 313 along the second direction Y are both circular.

[0057] In one embodiment, the second connecting member 317 is a rod-shaped structure.

[0058] Please refer to the attached Figure 8As shown, the switching assembly 300 of the present application further includes a second elastic member 322, which is respectively connected to the moving member 320 and the fixed member 310. In the present application, the second elastic member 322 is arranged in the first accommodating cavity 324-1 between the abutting plate 316 and the blocking plate 321, and the second elastic member 322 is connected to the blocking plate 321 and the abutting plate 316. In the present application, the second elastic member 322 is a tension spring. When the moving member 320 moves along the first direction X, the second elastic member 322 always gives a driving force to the blocking plate 321 close to the abutting plate 316, so as to realize that the first end of the moving member 320 always abuts against the transmission member 600, and under the rotation of the transmission member 600, the blocking plate 321 abuts against or separates from the interface 315, so as to form a switching between a blocking state and a connected state. The specific working process of the vacuum adsorption member will be further described in the subsequent drawings.

[0059] Please refer to the attached Figure 8 As shown, the switching assembly 300 of the present application further includes a first sealing member 330, which is sleeved on the periphery of the second air hole 314, and the first sealing member 330 at least partially protrudes from the interface 315, and a first protrusion is formed, and the first protrusion is arranged toward the blocking plate 321. Therefore, in the blocking state, the blocking plate 321 can contact the first sealing member 330 to enhance the isolation efficiency between the first air hole 313 and the second air hole 314, and avoid air permeability between the first air hole 313 and the second air hole 314 in the blocking state.

[0060] Please refer to the attached Figure 8 As shown, the switching component 300 of the present application also includes a second seal 340, which is sleeved on the periphery of the second fixed section 312. The second seal 340 is at least not protruding from the outer surface of the second fixed section 312. When the switching component 300 is installed in the transmission cavity 200, the second fixed section 312 can be sealed and connected to the first cavity 211 through the second seal 340.

[0061] In one embodiment, the second sealing member 340 and the third sealing member 170 of the present application are both made of rubber material.

[0062] Attached Fig. 9 This is a structural diagram of the switching component 300 of the present application in a blocked state. Fig. 9As shown, under the rotation of the transmission rod 610, the driving surface 621 of the rotating ring 620 abuts against the abutting surface 323-1 of the abutting head 323, and drives the abutting head 323 to move downward along the first direction X until the sealing plate 321 contacts the interface 315 and compresses the first sealing member 330. At this time, the second elastic member 322 is stretched, and at the same time, the connection between the first air hole 313 and the second air hole 314 is blocked by the sealing plate 321, and the connection between the upper cavity 210 and the lower cavity 220 is also blocked at the same time. At this time, the adsorption groove 140 corresponding to the switching component 300 is in a blocked state.

[0063] Attached Fig.10 This is a schematic diagram of the structure of the switching component 300 of the present application in a connected state. Fig.10 As shown, under the rotation of the transmission rod 610, when the second driving groove 622 of the rotating ring 620 corresponds to the contact surface of the abutment head 323, the second elastic member 322 drives the abutment head 323 to enter the second driving groove 622 to realize the upward movement of the abutment head 323 along the first direction X, and the blocking plate 321 leaves the contact surface, the first air hole 313 is connected with the second air hole 314, and the upper cavity 210 is also connected with the lower cavity 220 at the same time. At this time, the adsorption groove 140 corresponding to the switching component 300 is in a connected state.

[0064] Embodiment 2: Please refer to the attached Fig.11 To Attachment Fig.12 As shown, a specific implementation of the vacuum adsorption device 10 of the present application is shown. The vacuum adsorption device 10 of the present application realizes vacuum adsorption of the adsorbed object, and the vacuum adsorption device 10 of the present application is applied to the field of silicon wafer processing. In one embodiment, the vacuum adsorption device 10 of the present application is applied to the adsorption of silicon wafers.

[0065] The difference between this embodiment and Example 1 lies in the specific structure of the driving assembly. For the structures of the remaining components of the vacuum adsorption device 10, please refer to the description in Example 1 and will not be repeated in this embodiment.

[0066] Please refer to the attached Fig.11 And attached Fig.12 As shown, please refer to the attached Fig.11 And attached Fig.12As shown, the switching component 300 of the present application includes a fixing member 310, which is fixed in the transmission cavity 200, and the fixing member 310 will not produce relative movement with the adsorption plate 100. In the present application, the fixing member 310 includes a first fixing section 311 and a second fixing section 312 arranged in sequence along the first direction X, and the cross-sectional areas of the first fixing section 311 and the second fixing section 312 along the second direction Y are different. In one embodiment, the cross-sectional area of ​​the first fixing section 311 along the second direction Y is greater than the cross-sectional area of ​​the first fixing section 311 along the second direction Y, and at the same time, the cross-sectional area of ​​the first cavity 211 along the second direction Y is smaller than the cross-sectional area of ​​the second cavity 212 along the second direction Y, and the first fixing section 311 is located in the second cavity 212, and the second fixing section 312 is located in the first cavity 211. The first fixing section 311 is connected to the second fixing section 312, and the second fixing section 312 is connected to the second fixing section 312 by a fixed connection. Furthermore, the first fixing section 311 and the second fixing section 312 are integrally arranged.

[0067] Please refer to the attached Fig.11 And attached Fig.12 As shown, the fixing member 310 of the present application further includes a first air hole 313 and a second air hole 314. The first air hole 313 is arranged along the first direction X through the first fixing section 311, and the second air hole 314 is arranged along the first direction X through the second fixing section 312. The first air hole 313 is connected to the second air hole 314, and the cross-sectional area of ​​the first air hole 313 in the second direction Y is greater than the cross-sectional area of ​​the second air hole 314 in the second direction Y, so as to facilitate the installation of the moving member 320 in the first air hole 313. Since the first air hole 313 and the second air hole 314 have different cross-sectional areas in the second direction Y, an interface 315 is formed in the first air hole 313 and the second air hole 314, and the interface 315 intersects with both the first air hole 313 and the second air hole 314. The first air hole 313 is connected to the lower cavity 220, and the second air hole 314 is connected to the upper cavity 210. Further, the first air hole 313 is communicated with the lower cavity 220 by communicating with the second cavity 212. Therefore, the switching between the blocking state and the communicating state is completely dependent on the relative movement of the moving part 320.

[0068] Please refer to the attached Fig.11 And attached Fig.12As shown, the switching assembly 300 of the present application also includes a moving member 320, and the moving member 320 includes a butt joint 323 and a first connecting member 324. The butt joint 323 is arranged at the first end of the moving member 320, and the butt joint 323 is provided with a butt surface 323-1 on the side close to the transmission member 600. The butt joint 323 butts with the second driving groove 622 or the driving surface 621 on the rotating ring 620 through the butt surface 323-1, and the butt joint 323 can enter the second driving groove 622, that is, the first end of the moving member 320 butts with the transmission member 600. The second end of the moving member 320 is located in the first air hole 313, and the second end of the moving member 320 is provided with a blocking plate 321. When the blocking plate 321 butts with the interface 315, the second air hole 314 is completely blocked to achieve isolation between the first air hole 313 and the second air hole 314.

[0069] In the present application, the two ends of the first connecting member 324 are respectively provided with abutment joints 323 and blocking plates 321 to form the two ends of the moving member 320. Further, the first connecting member 324 is connected to the blocking plate 321 through the third elastic member 318.

[0070] In one embodiment, the third elastic member 318 is a compression spring.

[0071] Please refer to the attached Fig.11 And attached Fig.12 The first connecting member 324 of the present application is provided with a first driving groove 324 - 2 on one side close to the abutting member 323 , and the first driving groove 324 - 2 is communicated with the first accommodating cavity 324 - 1 and the lower cavity 220 respectively.

[0072] Please refer to the attached Fig.11 And attached Fig.12 As shown, the switching assembly 300 of the present application also includes a second elastic member 322, and the second elastic member 322 is connected to the moving member 320 and the fixed member 310 respectively. In the present application, the second elastic member 322 is sleeved outside the first connecting member 324, and the second elastic member 322 is connected to the abutment head 323 and the first fixed section 311 respectively. The second elastic member 322 always gives the abutment head 323 a driving force away from the first fixed section 311, so as to realize that the first end of the moving member 320 always abuts against the transmission member 600, and under the rotation of the transmission member 600, the blocking plate 321 abuts against or separates from the interface 315 to form a switching between a blocking state and a connected state. The specific working process of the vacuum adsorption member will be further described in the subsequent drawings. In the present application, there is a breathable groove 321-1 between the blocking plate 321 and the side wall of the first air hole 313, that is, the cross section of the blocking plate 321 in the second direction Y is smaller than the cross section of the first air hole 313 in the second direction Y.

[0073] In one embodiment, the second elastic member 322 is a compression spring.

[0074] Please refer to the attached Fig.11 And attached Fig.12 As shown, the switching assembly 300 of the present application further includes a first sealing member 330, which is sleeved on the periphery of the second air hole 314, and the first sealing member 330 at least partially protrudes from the interface 315, and a first protrusion is formed, and the first protrusion is arranged toward the blocking plate 321. Therefore, in the blocking state, the blocking plate 321 can contact the first sealing member 330 to enhance the isolation efficiency between the first air hole 313 and the second air hole 314, and avoid air permeability between the first air hole 313 and the second air hole 314 in the blocking state.

[0075] Please refer to the attached Fig.11 And attached Fig.12 As shown, the switching component 300 of the present application also includes a second seal 340, which is sleeved on the periphery of the second fixed section 312. The second seal 340 is at least not protruding from the outer surface of the second fixed section 312. When the switching component 300 is installed in the transmission cavity 200, the second fixed section 312 can be sealed and connected to the first cavity 211 through the second seal 340.

[0076] In one embodiment, the second sealing member 340 and the third sealing member 170 of the present application are both made of rubber material.

[0077] Please refer to the attached Fig.11 As shown, under the rotation of the transmission rod 610, the driving surface 621 of the rotating ring 620 abuts against the abutting surface 323-1 of the abutting head 323, and drives the abutting head 323 to move downward along the first direction X until the sealing plate 321 contacts the interface 315 and compresses the first sealing member 330. At this time, the second elastic member 322 is stretched, and at the same time, the connection between the first air hole 313 and the second air hole 314 is blocked by the sealing plate 321, and the connection between the upper cavity 210 and the lower cavity 220 is also blocked at the same time. At this time, the adsorption groove 140 corresponding to the switching component 300 is in a blocked state.

[0078] Please refer to the attached Fig.12 As shown, under the rotation of the transmission rod 610, when the second driving groove 622 of the rotating ring 620 corresponds to the contact surface of the abutment head 323, the second elastic member 322 drives the abutment head 323 to enter the second driving groove 622 to realize the upward movement of the abutment head 323 along the first direction X, and the blocking plate 321 leaves the contact surface, the first air hole 313 is connected with the second air hole 314, and the upper cavity 210 is also connected with the lower cavity 220 at the same time. At this time, the adsorption groove 140 corresponding to the switching component 300 is in a connected state.

[0079] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0080] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0081] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A vacuum adsorption device, characterized in that: The vacuum adsorption device comprises: An adsorption plate, wherein a plurality of adsorption grooves are arranged on a surface of one side of the adsorption plate along the first direction, and an opening is arranged on an outward side of the adsorption groove; A transmission cavity, wherein the transmission cavity is located in the adsorption plate, a first end of the transmission cavity is communicated with the adsorption groove, and a second end of the transmission cavity is communicated with a vacuum generating device; A switching component and a transmission component, wherein the switching component is located in the transmission cavity, the transmission cavity includes an upper cavity and a lower cavity, the upper cavity is connected to the adsorption groove, the lower cavity is connected to the vacuum generating device, and the transmission component is connected to the switching component to drive the switching component to move in the transmission cavity and form a blocked state and a connected state of the adsorption groove; wherein, In the blocking state, the upper cavity and the lower cavity are disconnected under the blocking of the switching component; In the connected state, the upper cavity and the lower cavity are connected to each other under the connection of the switching component.

2. The vacuum adsorption device according to claim 1, characterized in that: The transmission assembly comprises: A driving member and a transmission member, wherein the driving member is in transmission connection with the transmission member, the switching component is located on one side of the driving member, the driving member is used to drive the transmission member to rotate, and the transmission member converts the rotational motion into a linear motion of the switching component along a first direction in the transmission cavity to form a switch between the blocking state and the connecting state.

3. The vacuum adsorption device according to claim 2, characterized in that: The transmission member comprises: A transmission rod, wherein a rotation input structure is arranged on the transmission rod, and a plurality of rotating rings are arranged on the transmission rod at intervals along the second direction, wherein the outer surface of the rotating ring in the circumferential direction is a driving surface, and a second driving groove is formed by radially inwardly recessing from the driving surface on the rotating ring, and the second driving groove is provided with an opening outward, and the projections of the second driving grooves of each rotating ring on the bottom surface of the transmission rod along the second direction do not intersect with each other; wherein, The connecting state is formed when the switching component abuts against the second driving groove, and the blocking state is formed when the switching component abuts against the driving surface.

4. The vacuum adsorption device according to claim 3, characterized in that: The vacuum adsorption device further includes a limiting member, and the limiting member includes: The limiting ring, one or more limiting rings are arranged on the transmission rod along the second direction, and a plurality of limiting surfaces are formed on the outer surface of the limiting ring in the circumferential direction, and the limiting surfaces are arranged corresponding to the second driving groove; A limit block and a first elastic member, wherein the limit block and the first elastic member are located on one side of the limit ring along the first direction, and the first elastic member is used to drive the limit block to abut against the outer surface of the limit ring in the circumferential direction. When the limit ring rotates, the limit block sequentially abuts against each of the limit surfaces in the rotation direction.

5. The vacuum adsorption device according to claim 3, characterized in that: The switching component comprises: A fixing member, the fixing member comprising a first fixing section and a second fixing section sequentially arranged along a first direction, the first fixing section being connected to the second fixing section, a first air hole being arranged through the first direction in the first fixing section, a second air hole being arranged through the second fixing section along the first direction, the first air hole being connected to the second air hole, and an interface being formed between the first air hole and the second air hole, the first fixing section being located in the upper cavity, and the first air hole being communicated with the upper cavity, the second fixing section being located in the lower cavity, and the second air hole being communicated with the lower cavity; A moving part and a blocking plate, wherein the first end of the moving part abuts against the transmission part, the second end of the moving part is located in the first air hole, and the second end of the moving part is provided with a blocking plate, and the blocking plate completely covers the second air hole when abutting against the interface; The second elastic member is respectively connected to the moving member and the fixed member, and the second elastic member drives the first end of the moving member to always abut against the transmission member, and under the rotation of the transmission member, the blocking plate abuts against or separates from the interface to form a switch between the blocking state and the connecting state.

6. The vacuum adsorption device according to claim 5, characterized in that: The moving parts include: An abutment joint, wherein the abutment joint is provided with an abutment surface on a side close to the transmission member, the abutment joint abuts against the second driving groove or the driving surface through the abutment surface, and the abutment joint can enter and exit the second driving groove; A first connecting member, the abutment joint is connected to the sealing plate through the first connecting member, a first accommodating cavity is provided in the first connecting plate from the abutment joint to the sealing plate, a plurality of first driving grooves are radially penetrated on the first connecting member, and the first driving grooves are connected to the first accommodating cavity.

7. The vacuum adsorption device according to claim 6, characterized in that: The fixing member comprises: an abutment plate, the abutment plate being disposed in the first air hole and being disposed close to the abutment head; The second connecting member is arranged between the abutment plate and the first fixed section. After the second connecting member is connected to the first fixed section, it passes through the first driving groove and is connected to the abutment plate. The second elastic member is arranged in the first accommodating cavity between the abutment plate and the sealing plate. The second elastic member always gives the sealing plate a driving force close to the abutment plate.

8. The vacuum adsorption device according to claim 7, characterized in that: The switching component comprises: a first sealing member, wherein the first sealing member is sleeved on the periphery of the second air hole, the first sealing member at least partially protrudes from the interface to form a first protrusion, and the first protrusion is arranged toward the blocking plate; The second sealing member is sleeved on the periphery of the second fixing section, and the second sealing member at least partially protrudes from the outer surface of the second fixing section.

9. The vacuum adsorption device according to claim 5, characterized in that: The moving parts include: An abutment joint, wherein the abutment joint is provided with an abutment surface on a side close to the moving part, the abutment joint abuts against the second driving groove or the driving surface through the abutment surface, and the abutment joint can enter and exit the second driving groove; A first connecting member and a third elastic member, the abutment joint is connected to the sealing plate through the first connecting member, the third elastic member is arranged between the first connecting member and the sealing member, a first accommodating cavity is arranged in the first connecting plate from the abutment joint to the sealing plate, a first driving groove is arranged on one side of the first connecting member close to the abutment joint, and the first driving groove is respectively connected to the first accommodating cavity and the lower cavity.

10. The vacuum adsorption device according to claim 9, characterized in that: The second elastic member is sleeved outside the first connecting member, the second elastic member is respectively connected to the abutting head and the first fixing section, the second elastic member always gives the abutting head a driving force away from the first fixing section, and a venting groove is provided between the blocking plate and the side wall of the first air hole; a first sealing member, wherein the first sealing member is sleeved on the periphery of the second air hole, the first sealing member at least partially protrudes from the interface to form a first protrusion, and the first protrusion is arranged toward the blocking plate; The second sealing member is sleeved on the periphery of the second fixing section, and at least half of the second sealing member protrudes from the outer surface of the second fixing section.

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