Micropositioner and motion system

Abstract

The invention provides a micropositioner and a motion system, and relates to the technical field of precision equipment. The micropositioner comprises a top plate and at least three vertical driving devices for driving a part of the top plate to move in the vertical direction of a reference plane, the at least three vertical driving devices comprise three vertical driving devices of which the axes are not coplanar; the vertical driving device comprises a first linear driving mechanism and a second linear driving mechanism connected with a first driving part of the first linear driving mechanism, and a second driving part of the second linear driving mechanism is connected with the top plate through a driving decoupling mechanism; the driving precision of the second linear driving mechanism is higher than that of the first linear driving mechanism.

Description

Technical Field

[0001] The embodiments of this specification relate to the technical field of precision equipment, and specifically to a micro-motion stage and a motion system. Background Art

[0002] The micro-motion table can carry materials and achieve displacement and / or rotation of the materials. The micro-motion table can include three or more vertical drive devices, and the vertical drive device can be a linear drive device, which is used to drive a part of the micro-motion table to move along the z-axis direction or parallel to the z-axis direction. In some related embodiments, the vertical drive of the micro-motion table adopts a single motor direct drive solution, which can achieve displacement in the z-axis direction and rotation in the Rz direction, but cannot accurately position the Rx direction and Ry direction, and its travel and accuracy are dependent on a single motor, and the accuracy is low. Summary of the invention

[0003] One or more embodiments of the present specification provide a micro-motion stage, which includes: a top plate, and at least three vertical drive devices for driving a part of the top plate to move in a vertical direction of a reference plane; the at least three vertical drive devices include three vertical drive devices whose axes are not coplanar; the vertical drive device includes: a first linear drive mechanism and a second linear drive mechanism connected to a first drive portion of the first linear drive mechanism, the second drive portion of the second linear drive mechanism being connected to the top plate via a drive decoupling mechanism; wherein the driving accuracy of the second linear drive mechanism is higher than the driving accuracy of the first linear drive mechanism.

[0004] In some embodiments, the vertical drive device also includes: a drive device base; a first shell of the first linear drive mechanism is connected to the drive device base, and a second shell of the second linear drive mechanism is connected to the first drive part of the first linear drive mechanism; a portion of the first shell is located on one side of a portion of the second shell.

[0005] In some embodiments, the second shell includes a second accommodating space opening upward for accommodating a portion of the second linear drive mechanism, and a connecting plate extending to one side from the opening of the second accommodating space; the first driving part of the first linear drive mechanism is connected to the connecting plate; and the second driving part of the second linear drive mechanism moves along the vertical direction.

[0006] In some embodiments, the vertical drive device further includes: a guide device, wherein the guide device is installed on a side of the second shell of the second linear drive mechanism.

[0007] In some embodiments, the guiding device includes: a fixed guide rail and a movable guide rail that match each other, the fixed guide rail is connected to the base of the driving device, and the movable guide rail is connected to the second shell of the second linear driving mechanism; or, the guiding device includes: a linear motion guide spring, one end of the linear motion guide spring is connected to the base of the driving device, and the other end of the linear motion guide spring is connected to the second shell of the second linear driving mechanism.

[0008] In some embodiments, the vertical drive device also includes: a drive device base, a spring mounting seat connected to the drive device base, and a first vertical guide spring; a portion of the first vertical guide spring is connected to the spring mounting seat, and another portion of the first vertical guide spring is connected to the top plate; the two sides of the first vertical guide spring are symmetrically arranged relative to a vertical plane where the movement direction of the first drive part of the first linear drive mechanism is located.

[0009] In some embodiments, the leaf spring mounting seat is a multi-step structure, the leaf spring mounting seat at least includes a bottom step connected to the drive device base and a top step away from the drive device base, the size of the bottom step is larger than the size of the top step; the vertical guide leaf spring includes a first area connected to the top step of the leaf spring mounting seat, a second area connected to the top plate and capable of deforming relative to the first area, and a third area for the drive decoupling mechanism to pass through; or, the leaf spring mounting seat includes a mounting seat bottom plate and a leaf spring fixing portion provided on both sides of the mounting seat bottom plate and protruding from the mounting seat bottom plate in the vertical direction; the vertical guide leaf spring includes a mover portion connected to the top plate, two guide portions connected to both sides of the mover portion, wherein the drive decoupling mechanism passes through the mover portion, the guide portion is L-shaped, the guide portion includes a first guide portion extending from the mover portion to one side and a second guide portion extending in the vertical direction connected to the first guide portion, the second guide portion is connected to the leaf spring fixing portion, and the thickness of the mover portion is greater than the thickness of the guide portion.

[0010] In some embodiments, the vertical drive device also includes: a second vertical guide spring; the second vertical guide spring is arranged between the second shell of the second linear drive mechanism and the drive decoupling mechanism; the two second vertical guide springs are symmetrically arranged in a vertical plane relative to the movement direction of the second drive part of the second linear drive mechanism.

[0011] In some embodiments, the second vertical guide spring is in a straight line shape, an L shape, or a C shape.

[0012] In some embodiments, the drive decoupling mechanism is used to achieve decoupling in a third direction and / or a fourth direction, wherein the third direction is parallel to a first direction in the reference plane, and the fourth direction is parallel to a second direction in the reference plane that intersects with the first direction.

[0013] In some embodiments, the drive decoupling mechanism includes: a first decoupling fixed block fixedly connected to the second drive part of the second linear drive mechanism, a second decoupling fixed block fixedly connected to the top plate, an intermediate decoupling fixed block arranged between the first decoupling fixed block and the second decoupling fixed block, a first decoupling spring connecting the first decoupling fixed block and the intermediate decoupling fixed block, and a second decoupling spring connecting the second decoupling fixed block and the intermediate decoupling fixed block, the first decoupling spring and the second decoupling spring being arranged crosswise; the drive decoupling mechanism is used to decouple the movement of the top plate into deformation of the first decoupling spring and / or the second decoupling spring.

[0014] In some embodiments, it further includes: one or more first vertical measuring devices, wherein the first vertical measuring devices are connected to the top plate via a first measurement decoupling mechanism and are used to measure the position and displacement of the top plate.

[0015] In some embodiments, the first vertical measuring device includes: a vertical measuring device base, a tape ruler mounting seat slidably connected to the vertical measuring device base, a grating scale disposed on the tape ruler mounting seat, and a reading head matching the grating scale disposed in the vertical measuring device base.

[0016] In some embodiments, it further includes: second vertical measuring devices whose number corresponds to that of the first vertical measuring devices, and the second vertical measuring devices are used to measure the displacement of the top plate relative to the second shell of the second linear drive mechanism.

[0017] In some embodiments, it further includes: one or more gravity compensation devices, wherein the gravity compensation devices are connected to the top plate and provide a force to the top plate at least for compensating for the gravity of the top plate.

[0018] In some embodiments, it also includes: a carrier and a rotation module arranged on the top plate for driving the carrier to rotate; the rotation module includes: a rotating base fixedly connected to the top plate, a rotating shaft rotatably connected to the rotating base, a rotation driving mechanism driving the rotating shaft to rotate relative to the rotating base, and a rotation measuring device for measuring the rotation angle of the rotating shaft relative to the rotating base.

[0019] In some embodiments, the upper surface of the rotating base is flush with the upper surface of the top plate.

[0020] One or more embodiments of the present specification provide a motion system, which includes any one of the micro-motion stages described above.

[0021] The beneficial effects that may be brought about by the embodiments of this specification include but are not limited to: (1) through the combination of the first linear drive mechanism and the second linear drive mechanism, a large-stroke, high-precision drive of the complex movement of the top plate is achieved, so that the micro-motion table can perform high-precision material posture adjustment and also enable the micro-motion table to perform large-stroke material transfer; (2) through the drive decoupling mechanism corresponding to the vertical drive mechanism, the complex movement of the top plate is decoupled to avoid the shear force acting on the first linear drive mechanism or the second linear drive mechanism caused by the complex movement of the top plate, and the wear caused by direct friction between the first linear drive mechanism and the second linear drive mechanism and the top plate is avoided; (3) the second shell of the second linear drive mechanism is arranged on one side of the first shell of the first linear drive mechanism, so as to reduce the size of the micro-motion table in the vertical direction; (4) by extending the connecting plate in the lateral direction The second linear drive mechanism is arranged to be arranged on one side of the first linear drive mechanism; (5) the second linear drive mechanism is guided as a whole by a guiding device to avoid the second drive portion of the second linear drive mechanism being offset in the vertical direction due to the vibration of the first linear drive mechanism; (6) the movement of the top plate is guided by the first vertical guide spring, and the two sides have a balanced guiding effect by the symmetrical first vertical guide spring; (7) the first vertical guide spring can extend a longer distance on both sides and have a larger deformation space through the multi-step step structure of the spring mounting seat, thereby allowing the first vertical guide spring with greater flexibility to be arranged, so that the micro-motion table can not only realize the posture adjustment of the material, but also realize the material transfer with a large stroke; (8) the U-shaped structure of the spring mounting seat allows the first vertical guide spring to be deformed upward or downward. (9) The movement of the driving decoupling mechanism is guided by the second vertical guide spring, and the two sides have a balanced guiding effect by the symmetrical second vertical guide spring; (10) The design of the second vertical guide springs of various shapes makes them have different flexibility to meet different needs; (11) The top plate is decoupled in two directions or even more directions by the driving decoupling mechanism, and the complex movement of the top plate is decoupled into a single deformation of the two springs by the first decoupling spring and the second decoupling spring; (12) The top plate is measured with high precision by the first vertical measuring device to realize vertical large closed-loop control; (13) The coarse precision of the second vertical measuring device is used to measure the top plate with high precision to realize vertical large closed-loop control. The combination of a vertical measuring device and a high-precision second vertical measuring device realizes the separate control of the first linear drive device and the second linear drive device, which is suitable for situations where the accuracy and stroke of the measuring device are insufficient; (14) The gravity compensation device is used to compensate the force of the structure or various types of springs driven by the vertical drive mechanism, so that the high-precision second linear drive device in the vertical drive mechanism has a smaller load, thereby obtaining a more accurate vertical positioning performance; (15) The rotation around the vertical direction is realized by the rotation module; (16) The size of the micro-motion table in the vertical direction is further reduced by setting the upper surface of the rotating base and the top plate flush.It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of a micro-motion stage according to some embodiments of the present specification.

[0023] Figure 2 It is a cross-sectional schematic diagram of a micro-motion stage shown in some embodiments of this specification.

[0024] Figure 3 It is a schematic diagram of a vertical driving device of a micro-motion stage according to some embodiments of the present specification.

[0025] Figure 4 It is a cross-sectional schematic diagram of a vertical driving device of a micro-motion stage according to some embodiments of the present specification.

[0026] Figure 5 It is a schematic diagram of the assembly of the vertical guide spring of the micro-motion stage shown in some embodiments of this specification.

[0027] Figure 6 It is a schematic diagram of a vertical guide spring of a micro-motion stage according to some embodiments of this specification.

[0028] Figure 7 It is a schematic diagram of assembling the vertical guide spring of the micro-motion stage according to other embodiments of this specification.

[0029] Figure 8 It is a schematic diagram of a vertical guide spring of a micro-motion stage according to other embodiments of this specification.

[0030] Fig. 9 It is a schematic diagram of the vertical guide spring of the micro-motion stage shown in some other embodiments of this specification.

[0031] Fig.10 It is a schematic diagram of the assembly of the linear motion guide spring of the vertical drive device of the micro-motion stage shown in some embodiments of this specification.

[0032] Fig.11 It is a schematic diagram of the arrangement of the linear motion guide springs of the micro-motion stage shown in some embodiments of this specification.

[0033] Fig.12 It is a schematic diagram of the arrangement of the linear motion guide springs of the micro-motion stage shown in other embodiments of this specification.

[0034] Fig.13It is a schematic diagram of a guide spring of a second linear drive mechanism of a micro-motion stage according to some embodiments of the present specification.

[0035] Fig.14 It is a schematic diagram of the guide spring of the second linear drive mechanism of the micro-motion stage shown in other embodiments of this specification.

[0036] Fig.15 It is a schematic diagram of the guide spring of the second linear drive mechanism of the micro-motion stage shown in some other embodiments of this specification.

[0037] Fig.16 , Fig.17 It is a schematic diagram of a first vertical measurement device of a micro-motion stage according to some embodiments of the present specification.

[0038] Fig.18 It is a schematic diagram of the assembly of the second vertical measuring device of the micro-motion stage shown in some embodiments of this specification.

[0039] Markings in the figure: 1 top plate; 2 stage; 3 vertical drive device; 31 first linear drive mechanism; 311 first drive part; 312 first shell; 32 second linear drive mechanism; 321 second drive part; 322 second shell; 3221 connecting plate; 33 drive device base; 331 drive device base bottom plate; 332 drive device base side plate; 34 spring mounting seat; 341 bottom step; 342 top step; 343 mounting seat bottom plate; 344 spring fixing part; 35 first vertical guide spring; 351 first area; 352 second area; 353 third area; 354 ​​mover part; 355 guide part; 4 drive decoupling mechanism; 41 first decoupling spring; 42 second decoupling spring; 43 first decoupling fixed block; 44 second decoupling fixed block; 45 middle decoupling fixed block; 5 guide device; 51 fixed guide rail; 52 movable guide rail; 53 Linear motion guide spring; 531 Linear motion guide spring fixing part; 532 Linear motion guide spring deformation part; 6 Second vertical guide spring; 61 First connection structure; 62 Second connection structure; 71 Rotating base; 72 Rotating axis; 81 First vertical measuring device; 811 First measurement decoupling mechanism; 812 Vertical measuring device base; 813 Scale tape mounting seat; 814 Grating scale; 815 Reading head; 82 Second vertical measuring device; 821 Capacitive sensor production; 822 Capacitive sensor; 823 Capacitive sensing sheet; 9 Gravity compensation device; 10 Base; 11 Cover. DETAILED DESCRIPTION

[0040] In order to more clearly illustrate the technical solutions of the embodiments of this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the contents described below are some examples or embodiments of this specification. For ordinary technicians in this field, without paying creative work, the technical solutions or means disclosed in this specification can also be applied to other scenarios based on these technical contents.

[0041] It should be understood that the "system", "device", "equipment", "part" and / or "piece", "unit" and / or "module" used in this specification are a method for distinguishing different components, elements, parts, portions or assemblies at different levels. However, if other words can achieve the same purpose, the words can be replaced by other expressions.

[0042] Unless otherwise specified, technical terms used in this specification to describe components, elements, etc. do not refer to the singular, but may also include the plural. Generally speaking, terms such as "include", "comprise", etc. only indicate that the steps, elements, or components that have been clearly identified are included, and these steps, elements, and components do not constitute an exclusive list, such as the method or device described may also include other steps or components.

[0043] In the description of this specification, it should be understood that the description of orientation, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In the description of this specification, unless otherwise clearly defined, the terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meaning of the above terms in this specification in combination with the specific content of the technical solution.

[0044] The micro-motion table can carry materials and realize the displacement and / or rotation of materials. The micro-motion table can be applied to fields such as precision machining and detection. In some embodiments, the micro-motion table can carry materials to displace and / or rotate in the vertical direction relative to a reference plane. In some embodiments, the micro-motion table can also carry materials to rotate around the first direction or the second direction in the reference plane. Taking the xyz coordinate system as an example, the reference plane can be an xy plane, in which the x-axis direction and the y-axis direction can intersect or even be perpendicular, and the vertical direction of the reference plane can be the z-axis direction. In some embodiments, the micro-motion table can carry materials to displace along the z-axis direction, or rotate around the z-axis direction (or called the Rz direction), or carry materials to rotate around the x-axis direction (or called the Rx direction) or a direction parallel to the x-axis direction, around the y-axis direction (or called the Ry direction) or a direction parallel to the y-axis direction.

[0045] In some embodiments, the micro-motion table may include three or more vertical drive devices, wherein the axes of at least three of the vertical drive devices are not coplanar. In some embodiments, the vertical drive device may be a linear drive device, which is used to drive a part of the micro-motion table to move along the z-axis direction or parallel to the z-axis direction. Taking three vertical drive devices as an example, the three vertical drive devices rise or fall synchronously, thereby realizing the displacement of the material along the z-axis direction. Furthermore, the three vertical drive devices rise or fall asynchronously, which can realize the rotation of the material in the Rx direction and / or the Ry direction. In some embodiments, the micro-motion table may also include a rotation module, which is used to realize the rotation of the material in the Rz direction.

[0046] In some relevant embodiments, the vertical drive of the micro-motion stage adopts a single motor direct drive solution, which can achieve displacement in the z-axis direction and rotation in the Rz direction, but cannot accurately position the Rx and Ry directions, and its stroke and accuracy are dependent on a single motor, with low accuracy. In some relevant cases, there may be a problem of low accuracy when a motor with a large stroke is selected, and a problem of small stroke when a motor with a large accuracy is selected.

[0047] In other related embodiments, the vertical drive of the micro-motion stage uses three sets of cam mechanisms, and decouples the movement of the platform surface through a triangular spring parallel to the reference plane, which can achieve displacement in the z-axis direction and rotation in the Rx and Ry directions. However, there is friction between the cam mechanism and the platform surface, and there is a wear problem in long-term work, which requires regular maintenance; the load directly acts on the cam, and the motor driving the cam heats up seriously, affecting the vertical performance; the movement stroke is limited by the vertical deformation space of the triangular spring, and a large vertical stroke movement cannot be achieved, so only the posture adjustment function of the material can be achieved, but the material handover function cannot be achieved.

[0048] Based on this, one or more embodiments of the present specification provide a micro-motion table, whose vertical drive device achieves large-stroke, high-precision displacement positioning in the z-axis direction and rotational positioning in the Rx and Ry directions through the combination of two linear drive devices with different precisions. Each vertical drive device is decoupled by an independent drive decoupling mechanism to avoid being constrained by the vertical deformation or torsional deformation of a single spring leaf, thereby being able to achieve large-stroke movement, material posture adjustment, and material handover.

[0049] Figure 1 is a schematic diagram of a micro-motion stage according to some embodiments of this specification, Figure 2 is a cross-sectional schematic diagram of a micro-motion stage according to some embodiments of this specification. Figure 1 , Figure 2As shown, in some embodiments, the micro-motion stage may include a top plate 1 and at least three vertical drive devices 3 that drive a portion of the top plate 1 to move in a vertical direction (e.g., z-axis direction) of a reference plane. In some embodiments, the at least three vertical drive devices 3 include three vertical drive devices 3 whose axes are not coplanar. Exemplarily, the lower surface of the top plate 1 may include a first position, a second position, and a third position that are not colinear, and the three vertical drive devices 3 are respectively connected to the first position, the second position, and the third position. In some embodiments, the three vertical drive devices 3 may move synchronously or asynchronously to achieve displacement of the component in the z-axis direction or rotation in the Rx direction / Ry direction. In some embodiments, the component may be the top plate 1, or it may be connected to other structures of the top plate 1, or directly or indirectly carry, be adsorbed on, or float on the top plate 1. In some embodiments, the three vertical drive devices 3 are arranged at an equiangular angle of 120°. In some embodiments, more vertical drive devices 3 may be further provided.

[0050] It should be noted that in one or more embodiments of the present specification, the z-axis direction may be perpendicular to the x-axis direction and the y-axis direction, the x-axis direction and the y-axis direction may be located in the xy plane, and the x-axis direction and the y-axis direction may be perpendicular or non-perpendicular. It should be noted that in one or more embodiments of the present specification, the setting of the x-axis direction and the y-axis direction is mainly used to decompose the complex rotation change or pitch change of the plane into a simple rotation compound on two axes that is easy to understand, and does not limit the plane to rotate around the x-axis direction and the y-axis direction.

[0051] See also Figure 3 , Figure 4 As shown, in some embodiments, the vertical drive device 3 may include: a first linear drive mechanism 31 and a second linear drive mechanism 32 connected to the first drive portion 311 of the first linear drive mechanism 31, and the second drive portion 321 of the second linear drive mechanism 32 is connected to the top plate 1 through a drive decoupling mechanism 4. In some embodiments, each vertical drive device 3 is provided with an independent drive decoupling mechanism 4, so that each vertical drive device 3 can act and decouple independently of each other, avoiding mutual interference caused by being connected to the same decoupling spring. In some embodiments, decoupling in this specification refers to converting or disassembling the complex movement of a component such as the top plate 1 into a single movement in two or more directions. It should be noted that the drive decoupling mechanism 4 corresponding to each vertical drive device 3 can have an independent decoupling direction, that is, the two or more decoupling directions of each drive decoupling mechanism 4 can be arbitrarily set without having to be parallel to the x-axis or y-axis, and the decoupling directions of different drive decoupling mechanisms 4 can be the same or different.

[0052] In some embodiments, the first linear drive device 31 may be a piezoelectric micro-stepping motor. In other embodiments, the first linear drive device 31 may be a plate-type voice coil motor, a cylinder-type voice coil motor, or a cylinder-type double-coil voice coil motor. The first linear drive device 31 is used to provide driving force in CoarseZ (i.e., coarse adjustment in the z-axis direction) / Rx / Ry directions.

[0053] In some embodiments, the second linear driving device 32 may be a piezoelectric actuator. The second linear driving device 32 is used to provide driving force in the FineZ (ie, fine adjustment in the z-axis direction) / Rx / Ry directions.

[0054] In some embodiments, the driving accuracy of the second linear drive mechanism 32 is higher than that of the first linear drive mechanism 31. For example, the first linear drive mechanism 31 may have a larger stroke and lower accuracy, and the second linear drive mechanism 32 may have a higher accuracy and a smaller stroke. The combination of the first linear drive mechanism 31 and the second linear drive mechanism 32 may achieve a larger stroke and higher accuracy for the vertical drive device 3 as a whole.

[0055] In some embodiments, the combination of three or more vertical drive devices 3, a first linear drive mechanism 31 with a large stroke, and a second linear drive mechanism 32 with high precision can achieve accurate positioning of the material in the Rx / Ry direction. In some embodiments, the z / Rx / Ry pre-alignment of the material is achieved through three or more first linear drive mechanisms 31, and the z / Rx / Ry precise positioning and posture adjustment of the material are achieved through three or more second linear drive mechanisms 32.

[0056] In one or more embodiments of the present specification, the vertical drive device 3 further includes: a drive device base 33, and the drive device base 33 is used to accommodate and install the first linear drive mechanism 31 and the second linear drive mechanism 32. In some embodiments, the drive device base 33 may include a drive device base bottom plate 331 and two drive device base side plates 332 arranged on the drive device base bottom plate 331, and there is a accommodating space for accommodating the first linear drive mechanism 31 and the second linear drive mechanism 32 between the two drive device base side plates 332. In some embodiments, the drive device base 33 may also include a drive device base back plate arranged on the drive device base bottom plate 331, and the two sides of the drive device base back plate are respectively connected to the two drive device base side plates 332. In some embodiments, the first linear drive mechanism 31 can be installed on the drive device base bottom plate 331. In some embodiments, there is a gap between the first linear drive mechanism 31 and the drive device base back plate, and the second linear drive mechanism 32 is arranged between the first linear drive mechanism 31 and the drive device base back plate. In some embodiments, the drive device base 33 can be fixed on the micro-motion stage base of the micro-motion stage.

[0057] In some embodiments, the first housing 312 of the first linear drive mechanism 31 is connected to the drive device base 33 (for example, the drive device base bottom plate 331), and the second housing 322 of the second linear drive mechanism 32 is connected to the first drive portion 311 of the first linear drive mechanism 31, and the second housing 322 of the second linear drive mechanism 32 is driven by the first linear drive mechanism 31 to move in the z-axis direction. In some embodiments, a portion of the first housing 312 is located on one side of a portion of the second housing 322. In some embodiments, the second housing of the second linear drive mechanism 32 is embedded in the drive device base 33. In some embodiments, a portion of the first housing 312 and a portion of the second housing 322 are staggered in the z-axis direction. Based on the overlap of the first housing 312 and the second housing 322 in the z-axis direction, the height of the vertical drive device 3 as a whole in the z-axis direction is reduced, thereby reducing the height of the entire motion device, and solving the problem of the large size of the micro-motion stage caused by the direct superposition of the coarse-precision z-axis drive motor and the high-precision z-axis drive motor in the z-axis direction.

[0058] See also Figure 3 , Figure 4 As shown, in some embodiments, the second shell 322 includes a second accommodating space that opens upward for accommodating a portion of the second linear drive mechanism 31, and a connecting plate 3221 that extends from the opening of the second accommodating space to one side, the first driving portion 311 of the first linear drive mechanism 31 is connected to the connecting plate 3221, and the second driving portion 321 of the second linear drive mechanism 32 moves in the vertical direction. In some embodiments, the connecting plate 3221 is arranged parallel to the bottom plate 331 of the drive device base. In some embodiments, the connecting plate 3221 is located above the first shell 312 of the first linear drive mechanism 31. By arranging the connecting plate 3221 extending in the lateral direction, the second shell 322 can be arranged on one side of the first shell 312, thereby achieving the staggering of the two in the z-axis direction. In some embodiments, see Figure 4 As shown, the second shell 322 is L-shaped and partially surrounds the upper side of the first shell 312 to reduce its occupied space as much as possible, thereby achieving overall miniaturization of the vertical drive device 3.

[0059] In one or more embodiments of the present specification, the vertical drive device 3 further includes: a guide device 5, which is installed on the side of the second housing 322 of the second linear drive mechanism 32. In some embodiments, the number of the guide devices 5 can be two, and the two guide devices 5 are respectively arranged on both sides of the second housing 322. In some embodiments, the two guide devices 5 can be arranged symmetrically with respect to the axis of the second housing 322. In some embodiments, the guide device 5 can be connected to the side plate 332 of the drive device base or the back plate of the drive device base. In some embodiments, the guide device 5 can be used to guide the first drive portion 311 of the first linear drive mechanism 31 or the second housing 322 of the second linear drive mechanism 32. In some embodiments, the first driving portion 311 of the first linear driving mechanism 31 drives the second linear driving mechanism 32 to move as a whole in the z-axis direction through the connecting plate 3221. Due to the possible deformation of the connecting plate 3221, it may cause the second shell 322 to vibrate or deflect relative to the connecting plate 3221, resulting in an angle between the working direction of the second driving portion 321 in the second shell 322 and the z-axis direction. The setting of the guide device 5 limits the displacement of the second shell 322 as a whole in the z-axis direction, thereby avoiding the vibration or the deflection.

[0060] See also Figures 3 to 5 As shown, in some embodiments, the guide device 5 may include: a fixed guide rail 51 and a movable guide rail 52 that match each other, and the fixed guide rail 51 and the movable guide rail 52 are both arranged along the z-axis direction. In some embodiments, the fixed guide rail 51 is connected to the drive device base 33 (for example, the drive device base side plate 332 or the drive device base back plate), and the movable guide rail 52 is connected to the second housing 322 of the second linear drive mechanism 32. In some embodiments, the guide device 5 may be a cross roller guide rail. In some embodiments, the number of the cross roller guide rails may be two, and the two cross roller guide rails are respectively arranged on both sides of the second housing 322 of the second linear drive mechanism 32.

[0061] See also Figures 10 to 12 As shown, in other embodiments, the guide device 5 may include: a linear motion guide spring 53, one end of the linear motion guide spring 53 is connected to the drive device base 33 (for example, the drive device base side plate 332), and the other end of the linear motion guide spring 53 is connected to the second housing 322 of the second linear drive mechanism 32. Further, in some embodiments, the guide device 5 may include two groups of linear motion guide springs 53, and the two groups of linear motion guide springs 53 are respectively arranged on both sides of the second housing 322 of the second linear drive 32. In some embodiments, as Fig.10 , Fig.11As shown, each set of linear motion guide springs 53 may include two linear motion guide springs 53, and the two linear motion guide springs 53 are arranged in sequence in the z-axis direction. Fig.12 As shown, each group of linear motion guide springs 53 may include one linear motion guide spring 53. In other embodiments, each group of linear motion guide springs 53 may also include more than two linear motion guide springs 53.

[0062] In some embodiments, the linear motion guide spring 53 may include a linear motion guide spring fixing portion 531 located on both sides thereof, and a linear motion guide spring deforming portion 532 connecting the two linear motion guide spring fixing portions 531, wherein the two linear motion guide spring fixing portions 531 are respectively connected to the drive device base 33 (for example, the drive device base side plate 332) and the second housing 322 of the second linear drive 32, and the linear motion guide spring deforming portion 532 can deform with the movement of the second housing 322 relative to the drive device base 33. Since the linear motion guide spring 53 is symmetrically arranged on both sides of the second housing 322, it can guide the second housing 322 to move in the z-axis direction. In some embodiments, the thickness of the linear motion guide spring fixing portion 531 is greater than the thickness of the linear motion guide spring deforming portion 532, so that the linear motion guide spring fixing portion 531 is easy to fix and the linear motion guide spring deforming portion 532 is easy to deform. In some embodiments, the linear motion guide spring 53 can be integrally formed by cutting or the like.

[0063] In one or more embodiments of this specification, see Figures 5 to 9 As shown, the vertical drive device 3 also includes: a leaf spring mounting seat 34 connected to the drive device base 33 and a first vertical guide leaf spring 35, a part of the first vertical guide leaf spring 35 is connected to the leaf spring mounting seat 34, and another part of the first vertical guide leaf spring 35 is connected to the top plate 1, and the first vertical guide leaf spring 35 is used to guide the movement of the top plate 1 relative to the leaf spring mounting seat 34 (or relative to the drive device base 33) in the CoarseZ / Rx / Ry direction. In some embodiments, relative to the aforementioned cam mechanism, the arrangement of the first vertical guide leaf spring 35 can avoid wear caused by friction between the vertical drive device 3 and the top plate 1. In some embodiments, the two sides of the first vertical guide leaf spring 35 are symmetrically arranged relative to a vertical plane where the movement direction of the first driving part 311 of the first linear drive mechanism 31 is located. In some embodiments, the two sides of the first vertical guide leaf spring 35 protrude from the two sides of the leaf spring mounting seat 34 respectively to increase the area of ​​the first vertical guide leaf spring 35, thereby allowing the first vertical guide leaf spring 35 to undergo greater deformation.

[0064] See also Figure 5FIG. 1 shows a reed mounting seat 34 in some embodiments. The reed mounting seat 34 may be a multi-step structure. The reed mounting seat 34 at least includes a bottom step 341 connected to the drive device base 33 and a top step 342 away from the drive device base 33. The size of the bottom step 341 is larger than the size of the top step 342. In some embodiments, the reed mounting seat 34 may be as follows: Figure 5 In some other embodiments, the reed mounting seat 34 may also be a multi-step structure, for example, the reed mounting seat 34 also includes a plurality of intermediate steps between the bottom step 341 and the top step 342. In these other embodiments, the size of the plurality of intermediate steps may decrease step by step. In some embodiments, deformation spaces are formed on both sides of the top step 342 in the multi-step structure of the reed mounting seat, and the deformation spaces can avoid the deformation of the two sides of the first vertical guide reed 35.

[0065] In some embodiments, see Figure 5 As shown, a shunting groove is also provided in the middle of the lower surface of the spring mounting seat 34 of the multi-step structure, and the connecting plate 3221 of the second housing 322 of the second linear drive mechanism 32 can enter the shunting groove when being driven to rise, thereby allowing the first linear drive mechanism 31 to drive the second linear drive mechanism 32 to perform a larger displacement in the z-axis direction. At the same time, the shunting groove also saves space in the z-axis direction.

[0066] See also Figure 5 , Figure 6 As shown, the first vertical guide spring 35 in some embodiments is shown, and the first vertical guide spring 35 may include a first area 351 connected to the top step 342 of the spring mounting seat 34, a second area 352 connected to the top plate 1 and capable of being deformed relative to the first area 351, and a third area 353 for the drive decoupling mechanism 4 to pass through.

[0067] exist Figure 5-6 In the embodiment shown, as described above, the two sides of the first vertical guide spring 35 are relative to a vertical plane (eg Figure 6 The arrangement may specifically include a symmetrical arrangement relative to the vertical plane (e.g. relative to the vertical plane). Figure 6 The first area 351, the second area 352 and the third area 353 are symmetrically arranged on the left and right sides of the plane indicated by the dotted line.

[0068] In some embodiments, the first vertical guide spring 35 is a sheet-like structure or a plate-like structure. In some embodiments, a hole is provided in the middle of the first vertical guide spring 35, which is provided for the driving decoupling mechanism 4 to pass through, that is, the third area 353. In some embodiments, two parallel long through grooves are provided on the first vertical guide spring 35. In some embodiments, two second areas 352 are formed between the two through grooves, and the two second areas 352 are respectively located on the left and right sides of the third area 353. In some embodiments, the periphery of the two through grooves forms an annular first area 351, and the annular first area 351 surrounds the second area 352 and the third area 353.

[0069] In some embodiments, the second region 352 of the first vertical guide spring 35 is fixedly connected to the top plate 1 at one side close to the third region 353. In some embodiments, the two second regions 352 of the first vertical guide spring 35 can move along the top plate 1 as the top plate 1 moves upward. Figure 6 The first vertical guide spring 35 is bent upward in the direction of the arrow in the figure, and guides the top plate 1 through elastic force. Further, in some embodiments, the first region 351 of the first vertical guide spring 35 is fixedly connected to the spring mounting seat 34 near the third region 353. In some embodiments, due to the bending of the second region 352, the left and right ends of the first region 351 may be deformed downward and enter the deformation space formed on both sides of the top step 342.

[0070] See also Figure 7 , which shows a reed mounting seat 34 in some other embodiments, and the reed mounting seat 34 may include a mounting seat bottom plate 343 and reed fixing portions 344 disposed on both sides of the mounting seat bottom plate 343 and protruding from the mounting seat bottom plate 343 in the vertical direction. In some embodiments, the reed mounting seat 34 is in a U-shape, and a deformation space is formed in the middle of the reed mounting seat 34, and the deformation space can avoid the deformation of the middle part of the first vertical guide reed 35.

[0071] See also Figure 7 , Figure 8As shown, the first vertical guide spring piece 35 in other embodiments is shown. The first vertical guide spring piece 35 may include a mover portion 354 connected to the top plate 1 and two guide portions 355 respectively connected to the two sides of the mover portion 354. In some embodiments, a hole is provided in the middle of the mover portion 354, which is penetrated from top to bottom and is passed through by the drive decoupling mechanism 4, and the drive decoupling mechanism 4 passes through the mover portion 354. In some embodiments, the guide portion 355 is L-shaped, and the guide portion 355 includes a first guide portion extending to one side of the automatic sub-portion 354 and a second guide portion extending in the vertical direction connected to the first guide portion, and the second guide portion is directly or indirectly connected to the spring piece fixing portion 344, and the thickness of the mover portion 354 is greater than the thickness of the guide portion 355.

[0072] exist Figure 7-8 In the illustrated embodiment, as described above, the two sides of the first vertical guide spring 35 are symmetrically arranged relative to a vertical plane where the movement direction of the first driving portion 311 of the first linear driving mechanism 31 is located. Exemplarily, the two guide portions 355 of the vertical guide spring 35 can be symmetrically arranged relative to the vertical plane where the center of the mover portion 354 is located.

[0073] In some embodiments, the upper surface of the movable part 354 of the first vertical guide spring 35 is fixedly connected to the top plate 1. In some embodiments, the movable part 354 can move upward or downward as the top plate 1 moves upward or downward, and guides the top plate 1 through the elastic force provided by the guide part 355. Further, in some embodiments, the guide part 355 of the first vertical guide spring 35 is away from the movable part 354 (for example, the side of the second guide part extending in the vertical direction) and is fixedly connected to the spring fixing part 344 of the spring mounting seat 34 (for example, directly fixedly connected, or fixedly connected through a connecting structure). In some embodiments, the movable part 354 and a part of the guide part 355 may enter the deformation space formed in the middle of the spring mounting seat 34 due to deformation.

[0074] In some embodiments, the first vertical guide spring 35 may be an integrated structure, and the mover portion 354 and the guide portion 355 may be integrally formed by cutting.

[0075] See also Fig. 9 As shown, the first vertical guide spring piece 35 in some other embodiments is shown, and the vertical guide spring piece 35 may include a mover portion 354 connected to the top plate 1, and two guide portions 355 respectively connected to the two sides of the mover portion 354. In some embodiments, a hole is opened in the middle of the mover portion 354, which is penetrated from top to bottom and is used for the drive decoupling mechanism 4 to penetrate, and the drive decoupling mechanism 4 penetrates the mover portion 354.

[0076] exist Fig. 9 In the illustrated embodiment, the guide portion 355 is L-shaped, and the guide portion 355 includes a first guide portion extending to one side of the automatic sub-portion 354 and a second guide portion extending in a vertical direction and connected to the first guide portion, the second guide portion is directly or indirectly connected to the spring fixing portion 344 (for example, directly fixedly connected, or fixedly connected through a connecting structure), and the thickness of the movable sub-portion 354 is greater than the thickness of the guide portion 355.

[0077] In some embodiments, the first vertical guide spring 35 can be a split structure, and the mover portion 354 and the guide portion 355 can be formed separately and fixedly connected by welding, bolts, etc., so as to reduce manufacturing difficulty and cost.

[0078] In one or more embodiments of the present specification, the vertical drive device 3 further includes: a second vertical guide spring 6, the second vertical guide spring 6 is arranged between the second housing 322 of the second linear drive mechanism 32 and the drive decoupling mechanism 4, and the second vertical guide spring 6 is used to guide the movement of the drive decoupling mechanism 4 relative to the second housing 322 in the FineZ / Rx / Ry direction. In some embodiments, the second vertical guide spring 6 and the second housing 322 of the second linear drive mechanism 32 can be an integrated structure or a split structure. In some embodiments, the arrangement of the second vertical guide spring 6 and the cooperation of the first vertical guide spring 35 achieve frictionless force and frictionless vibration in the Rx / Ry direction, thereby achieving more accurate positioning. In some embodiments, the number of the second vertical guide springs 6 can be two, and the two second vertical guide springs 6 are symmetrically arranged relative to a vertical plane where the movement direction of the second drive part 321 of the second linear drive mechanism 32 is located, so that the two sides thereof have a relatively balanced force relationship.

[0079] In some embodiments, the vertical drive device 3 further includes: a second vertical guide spring device, which may include a first connection structure 61, a second vertical guide spring 6, and a second connection structure 62 connected in sequence from bottom to top. In some embodiments, the first connection structure 61 is fixedly connected to the second housing 322 of the second linear drive mechanism 32. In some embodiments, the second connection structure 62 is fixedly connected to the drive decoupling mechanism 4. In some embodiments, the drive decoupling mechanism 4 further includes a drive decoupling mechanism connection portion adapted to the shape of the second connection structure 62.

[0080] In other embodiments, the second vertical guide spring device may include a first connection structure 61 and a second vertical guide spring 62 connected in sequence from bottom to top, wherein the first connection structure 61 is fixedly connected to the second housing 322 of the second linear drive mechanism 32, and the second vertical guide spring 6 may be directly fixedly connected to the drive decoupling mechanism 4. In some embodiments, the drive decoupling mechanism 4 further includes a drive decoupling mechanism connection portion adapted to the shape of the second vertical guide spring 6.

[0081] See also Fig.13 As shown, in some embodiments, the first connection structure 61 includes a first connection structure horizontal portion and a first connection structure vertical portion connected to each other, wherein the first connection structure horizontal portion is fixedly connected to the second housing 322, and the first connection structure vertical portion extends in the vertical direction and is fixedly connected to the second vertical guide spring 6. In some embodiments, the second connection structure 62 includes a second connection structure vertical portion, which connects the second vertical guide spring 6 and the drive decoupling mechanism 4. In this embodiment, see Fig.13 As shown in the dotted line portion, the second vertical guide spring piece 6 is in a straight line shape, and the guidance is implemented by elastic deformation (such as bending, twisting and / or torsion) of the second vertical guide spring piece 6 .

[0082] See also Fig.14 As shown, in other embodiments, the first connection structure 61 includes a first connection structure horizontal portion, and the first connection structure horizontal portion is fixedly connected to the second shell 322. In this embodiment, see Fig.14 As shown in the dotted line portion, the vertical guide spring 6 is L-shaped, and the guidance is implemented by elastic deformation (such as bending, twisting and / or torsion) of the vertical guide spring 6. In some embodiments, the lower end of the vertical guide spring 6 is fixedly connected to the first connecting structure 61, and the horizontal end of the vertical guide spring 6 is fixedly connected to the drive decoupling mechanism 4. In this embodiment, the side of the drive decoupling mechanism 4 is provided with a fixing groove (i.e., the drive decoupling mechanism connecting part) corresponding to the vertical guide spring 6, and the horizontal end of the vertical guide spring 6 extends into the fixing groove and is fixed. In this embodiment, there may be a gap between the inner wall of the fixing groove and the horizontal end of the vertical guide spring 6 to allow its deformation. In some other embodiments, compared with the one-shaped structure, the L-shaped vertical guide spring 6 can be deformed in two directions, so as to have greater flexibility.

[0083] See also Fig.15As shown, in some other embodiments, the first connection structure 61 includes a first connection structure horizontal portion and a first connection structure vertical portion connected to each other, wherein the first connection structure horizontal portion is fixedly connected to the second housing 322, and the first connection structure vertical portion extends in the vertical direction and is fixedly connected to the second vertical guide spring 6. In some embodiments, the second connection structure 62 includes a second connection structure vertical portion, which connects the second vertical guide spring 6 and the drive decoupling mechanism 4. In this embodiment, see Fig.15 As shown in the dotted line portion, the vertical guide spring piece 6 is C-shaped, and the guidance is implemented by elastic deformation (such as bending, twisting and / or torsion) of the vertical guide spring piece 6. In some embodiments, compared with the I-shaped structure, the C-shaped vertical guide spring piece 6 can be deformed in two directions; compared with the L-shaped structure, the C-shaped vertical guide spring piece 6 has two horizontal parts that can be deformed, and thus has greater flexibility than the L-shaped structure.

[0084] In one or more embodiments of the present specification, the structure of the second vertical guide spring 6 and the structure of the drive decoupling mechanism connecting portion of the corresponding drive decoupling mechanism 4 can be selected according to actual needs (such as the need for elastic deformation or flexibility).

[0085] It should be noted that the aforementioned vertical refers to along the z-axis direction or approximately along the z-axis direction, and the aforementioned horizontal refers to being located in the xy plane or approximately located in the xy plane, and it is not strictly required to have a horizontal or vertical relationship.

[0086] In one or more embodiments of the present specification, the drive decoupling mechanism 4 is used to achieve decoupling in a third direction and / or a fourth direction, the third direction is parallel to the first direction in the reference plane, and the fourth direction is parallel to the second direction in the reference plane that intersects with the first direction. In other embodiments, the drive decoupling mechanism 4 can also be used to achieve decoupling in one or two other directions, or even more directions.

[0087] In one or more embodiments of the present specification, the drive decoupling mechanism 4 may include: a first decoupling fixed block 43 fixedly connected to the second driving portion 321 of the second linear drive mechanism 32, a second decoupling fixed block 44 fixedly connected to the top plate 1, an intermediate decoupling fixed block 45 disposed between the first decoupling fixed block 43 and the second decoupling fixed block 44, a first decoupling spring 41 connecting the first decoupling fixed block 43 and the intermediate decoupling fixed block 45, and a second decoupling spring 42 connecting the second decoupling fixed block 44 and the intermediate decoupling fixed block 45, wherein the first decoupling spring 41 and the second decoupling spring 42 are arranged crosswise. In some embodiments, a groove may be provided on one of the first decoupling spring 41 and the second decoupling spring 42 for the other to penetrate.

[0088] In some embodiments, the drive decoupling mechanism 4 can also include a larger number of intermediate decoupling fixed blocks 45, and provide a larger number of decoupling reeds in the same direction or different directions, such as a third decoupling reed, a fourth decoupling reed, etc., to adapt to more complex movement requirements, so that the movement of the top plate 1 is smoother and the decoupling response is faster.

[0089] In some embodiments, the drive decoupling mechanism 4 is used to decouple the movement of the top plate 1 into the deformation of the first decoupling spring 41 and / or the second decoupling spring 42. The drive decoupling mechanism 4 realizes a flexible or elastic connection between the top plate 1 and the vertical drive device 3, so that the rotation change or pitch change of the top plate 1 will not affect the drive of the vertical drive device 3 in the z-axis direction. Compared with the aforementioned triangular spring, the multiple drive decoupling mechanisms 4 are independent of each other, and their decoupling will not be affected by the deformation of other positions. Compared with the aforementioned triangular spring, the first decoupling spring 41 and the second decoupling spring 42 of the drive decoupling mechanism 4 independently provide deformation in two directions, and the deformation is the bending of a single spring in a single direction, rather than using the same spring to provide deformation in two directions in different ways (for example, the triangular spring provides deformation in the first direction by bending, and then provides deformation in the second direction by twisting), so that the decoupling ability in the two directions can be consistent, and the movement in the first direction will not be easier and the movement in the other direction will be more difficult due to the different decoupling mechanisms in the two directions.

[0090] In one or more embodiments of this specification, see Fig.16 , Fig.17 As shown, the micro-motion stage further includes: one or more first vertical measuring devices 81, which are connected to the top plate 1 through a first measurement decoupling mechanism 811, and are used to measure the position and displacement of the top plate 1. In some embodiments, the number of the vertical measuring devices 81 can be three, and the three vertical measuring devices 81 are arranged at an equiangular angle of 120°. In some embodiments, each vertical drive device 3 is correspondingly arranged with a vertical measuring device 81.

[0091] In some embodiments, the first vertical measuring device 81 includes: a vertical measuring device base 812, a tape mounting seat 813 slidably connected to the vertical measuring device base 812, a grating ruler 814 disposed on the tape mounting seat 813, and a reading head 815 disposed in the vertical measuring device base 812 and matching the grating ruler 814. The grating ruler 814 and the reading head 815 provide a position feedback signal.

[0092] In some embodiments, the first vertical measuring device 81 also includes a guide rail and slider group for guiding the tape mounting base 813 and the grating scale 814 thereon, wherein the guide rails in the guide rail and slider group can be fixedly connected to the vertical measuring device base 812, and the sliders in the guide rail and slider group can be fixedly connected to the tape mounting base 813.

[0093] In some embodiments, similar to the drive decoupling mechanism 4, the first measurement decoupling mechanism 811 is used to perform decoupling in the Rx / Ry direction when the top plate 1 moves. In some embodiments, the first measurement decoupling mechanism 811 may include a lower first measurement decoupling fixed block, an intermediate measurement decoupling fixed block, and a second measurement decoupling fixed block arranged in sequence from bottom to top, wherein the first measurement decoupling fixed block may be provided by a tape mounting seat 813. In some embodiments, the first measurement decoupling mechanism 811 also includes a first measurement decoupling reed and a second measurement decoupling reed similar to the drive decoupling mechanism 4. The structure of the first measurement decoupling mechanism 811 can refer to the structure of the drive decoupling mechanism 4, and will not be repeated here.

[0094] In some embodiments, the first vertical measurement device 81 may also be a capacitive sensor or an eddy current sensor.

[0095] In some embodiments, the first vertical measuring device 81 directly measures the displacement of the top plate 1, and the first linear driving device 31 and the second linear driving device 32 are adjusted according to the measurement data of the first vertical measuring device 81, and the vertical driving device 3 controls the driving of the top plate 1 as a whole to realize a large vertical closed loop.

[0096] In one or more embodiments of the present specification, the micro-motion stage further includes: a number of second vertical measuring devices 82 corresponding to the number of the first vertical measuring devices 81, and the second vertical measuring devices 82 are used to measure the displacement of the top plate 1 relative to the second housing 322 of the second linear drive mechanism 32. In some embodiments, when the accuracy of the first vertical measuring device 81 is sufficient, the first vertical measuring device 81 can be used to perform independent measurements. In other embodiments, when the accuracy of the first vertical measuring device 81 is insufficient, a solution of combining the first vertical measuring device 81 with lower accuracy and the second vertical measuring device 82 with higher accuracy for measurement can be used.

[0097] In some embodiments, the second vertical measuring device 82 may be fixedly connected to the second housing 322 of the second linear drive mechanism 32. In some embodiments, the second vertical measuring device 82 may be fixedly connected to the connecting plate 3221.

[0098] In some embodiments, see Fig.18As shown, the second vertical measuring device 82 may include a capacitive sensor and a capacitive sensing sheet. In some embodiments, the second vertical measuring device 82 may include a capacitive sensor support 821 disposed on the second housing 322 (e.g., the connecting plate 3221) of the second linear drive mechanism 32, the capacitive sensor 822 is disposed on the capacitive sensor support 821, and the capacitive sensing sheet 823 is fixedly connected to the top plate 1.

[0099] In the measurement scheme of a low-precision first vertical measuring device 81 and a high-precision second vertical measuring device 82, the first vertical measuring device 81 is used to measure the overall first displacement of the top plate 1, and the second vertical measuring device 82 is used to measure the second displacement of the second linear drive mechanism 32 with higher precision, thereby obtaining the displacement that the first linear drive mechanism 32 needs to implement based on the difference between the first displacement and the second displacement.

[0100] In one or more embodiments of the present specification, the micro-motion stage further includes: one or more gravity compensation devices 9, which are connected to the top plate 1 and provide the top plate 1 with a force at least for compensating for the gravity of the top plate 1. In some embodiments, for example, when the first linear drive device 31 adopts a piezoelectric micro-step motor and the second linear drive device 32 adopts a piezoelectric brake, the load of the vertical drive device 3 can be reduced by the gravity compensation device 9, and the load requirements of the first linear drive mechanism 31 and the second linear drive mechanism 32 of the vertical drive device 3 are reduced to avoid affecting the vertical performance. In some embodiments, for example, when the first linear drive device 31 or the second linear drive device 32 does not adopt a piezoelectric device, specifically, when the first linear drive device 31 adopts a voice coil motor, the load of the vertical drive device 3 reduced by the gravity compensation device 9 can further reduce the heat of the voice coil motor, thereby avoiding the heat affecting the vertical performance. In some embodiments, the gravity compensation device 9 can compensate for the gravity of the vertical driving components to be driven by the vertical driving device 3 (for example, the top plate 1, other structures fixedly connected to the top plate 1, and / or materials directly or indirectly carried on the top plate 1, etc.), or simultaneously compensate for the gravity of the vertical driving components to be driven by the vertical driving device and the elastic reaction force generated by the deformation of various guide springs (for example, the first vertical guide spring 35 and / or the second vertical guide spring 36, etc.) during the movement, thereby reducing the load of the vertical driving device 3, which is beneficial to improving the positioning accuracy of the high-precision second linear driving device 32.

[0101] In some embodiments, the gravity compensation device 9 may be a magnetic buoyancy compensation device. In other embodiments, the gravity compensation device 9 may also be an air buoyancy compensation device. In some embodiments, the number of vertical gravity compensation devices 9 may be three, and the three vertical gravity compensation devices 9 are arranged at an equiangular angle of 120°. In some embodiments, each vertical drive device 3 is correspondingly arranged with a vertical gravity compensation device 9.

[0102] In one or more embodiments of this specification, see Figure 2 As shown, the micro-motion stage further includes: a stage and a rotation module disposed on the top plate for driving the stage to rotate. In some embodiments, the rotation module includes: a rotation base 71 fixedly connected to the top plate 1, a rotation shaft 72 rotatably connected to the rotation base 71, a rotation driving mechanism for driving the rotation shaft 72 to rotate relative to the rotation base 71, and a rotation measuring device for measuring the rotation angle of the rotation shaft 72 relative to the rotation base 71.

[0103] In some embodiments, one of the stator and the mover of the rotary drive mechanism is connected to the rotary base 71, and the other of the stator and the mover of the rotary drive mechanism is connected to the rotary shaft 72. In some embodiments, the rotary measuring device may be a grating measuring device. In some embodiments, one of the grating ruler and the reading head is connected to the rotary base 71, and the other of the grating ruler and the reading head is connected to the rotary shaft 72.

[0104] In some embodiments, the rotational driving mechanism may be a voice coil arc motor or a torque motor for providing vertical rotational driving force.

[0105] In some embodiments, the upper surface of the rotating base 71 is flush with the upper surface of the top plate 1. In some embodiments, an annular groove may be provided on the top plate 1, and the outer edge of the rotating base 71 may extend outward to form an annular protrusion, which is mounted and fixed on the annular groove, thereby allowing the upper surfaces of the rotating base 71 and the top plate 1 to be flush.

[0106] In one or more embodiments of the present specification, the micro-motion stage further includes: a base 10 and a cover 11, wherein the vertical drive device 3, the vertical measuring device 81, and the gravity compensation device 9 are all installed on the base 10, and the cover 11 is disposed between the base 10 and the top plate 1. In some embodiments, the vertical drive device 3, the vertical measuring device 81, and the gravity compensation device 9 are all embedded in the accommodation space formed by the base 10, the cover 11, and the top plate 1, and the vertical measuring device 81 has a smaller vertical height due to the staggered arrangement of the first linear drive device 31 and the second linear drive device 32, and the rotating base 71 is flush with the upper surface of the top plate 1, which also reduces the vertical height, and the overall structure of the micro-motion stage is smaller in vertical height and has a higher degree of integration.

[0107] One or more embodiments of the present specification also provide a motion system, which includes the above-mentioned micro-motion stage, and is used to drive the micro-motion stage as a whole to move on a working plane, for example, to drive the micro-motion stage as a whole to perform linear motion in at least one direction on a working plane. In some embodiments, the motion system may include a second linear motion mechanism that drives the micro-motion stage as a whole to move in a second direction (for example, the y-axis direction), and a first linear motion mechanism that drives the second linear motion mechanism as a whole to move in a first direction (for example, the x-axis direction). In some embodiments, the first linear motion mechanism and the second linear motion mechanism are used to drive the micro-motion stage as a whole to move in the x-axis direction or the y-axis direction of the working plane to adjust the macro position of the micro-motion stage.

[0108] In some embodiments, the first linear motion mechanism and the second linear motion mechanism may be guide rail and slider mechanisms. In other embodiments, the first linear motion mechanism and the second linear motion mechanism may be air-floating guide rails and air-floating guide sleeves supported on the air-floating guide rails. Exemplarily, the first linear motion mechanism may include a first air-floating guide rail arranged on the table along the x-axis direction and a first air-floating guide sleeve supported by air-floating on the first air-floating guide rail, and the second linear motion mechanism may include a second air-floating guide rail fixed on the first air-floating guide sleeve along the y-axis direction and a second air-floating guide sleeve supported by air-floating on the second air-floating guide rail, wherein the micro-motion table is fixed on the second air-floating guide sleeve.

[0109] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this specification. Such modifications, improvements and corrections are taught in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this specification.

Claims

1. A micro-motion stage, characterized in that: include: A top plate, and at least three vertical drive devices for driving a portion of the top plate to move in a vertical direction of a reference plane; The at least three vertical drive devices include three vertical drive devices whose axes are not coplanar; The vertical drive device comprises: a first linear drive mechanism and a second linear drive mechanism connected to a first drive portion of the first linear drive mechanism, wherein a second drive portion of the second linear drive mechanism is connected to the top plate via a drive decoupling mechanism; Wherein, the driving accuracy of the second linear driving mechanism is higher than the driving accuracy of the first linear driving mechanism.

2. The micro-motion stage according to claim 1, characterized in that: The vertical drive device further comprises: a drive device base; The first housing of the first linear drive mechanism is connected to the drive device base, and the second housing of the second linear drive mechanism is connected to the first drive part of the first linear drive mechanism; A portion of the first shell is located on one side of a portion of the second shell.

3. The micro-motion stage according to claim 2, characterized in that: The second housing comprises a second accommodating space which opens upward and is used to accommodate a part of the second linear drive mechanism, and a connecting plate which extends to one side from the opening of the second accommodating space; The first driving portion of the first linear driving mechanism is connected to the connecting plate; The second driving portion of the second linear driving mechanism moves along the vertical direction.

4. The micro-motion stage according to claim 2, characterized in that: The vertical drive device further includes: a guide device, which is installed on the side of the second shell of the second linear drive mechanism.

5. The micro-motion stage according to claim 4, characterized in that: The guide device comprises: a fixed guide rail and a movable guide rail matching each other, the fixed guide rail is connected to the base of the driving device, and the movable guide rail is connected to the second housing of the second linear driving mechanism; Alternatively, the guide device comprises: a linear motion guide spring, one end of which is connected to the base of the driving device, and the other end of which is connected to the second housing of the second linear driving mechanism.

6. The micro-motion stage according to claim 1, characterized in that: The vertical driving device further comprises: a driving device base, a spring mounting seat connected to the driving device base, and a first vertical guide spring; A portion of the first vertical guide spring is connected to the spring mounting seat, and another portion of the first vertical guide spring is connected to the top plate; The two sides of the first vertical guide spring are symmetrically arranged relative to a vertical plane where the movement direction of the first driving part of the first linear driving mechanism is located.

7. The micro-motion stage according to claim 6, characterized in that: The reed mounting seat is a multi-step structure, and the reed mounting seat at least includes a bottom step connected to the driving device base and a top step away from the driving device base, and the size of the bottom step is larger than the size of the top step; the vertical guide reed includes a first area connected to the top step of the reed mounting seat, a second area connected to the top plate and capable of deforming relative to the first area, and a third area for the drive decoupling mechanism to pass through; Or, the spring mounting seat includes a mounting seat bottom plate and a spring fixing portion provided on both sides of the mounting seat bottom plate and protruding from the mounting seat bottom plate in the vertical direction; the vertical guide spring includes a movable part connected to the top plate and two guide parts respectively connected to the two sides of the movable part, wherein the drive decoupling mechanism passes through the movable part, the guide part is L-shaped, and the guide part includes a first guide part extending to one side from the movable part and a second guide part extending in the vertical direction connected to the first guide part, the second guide part is connected to the spring fixing portion, and the thickness of the movable part is greater than the thickness of the guide part.

8. The micro-motion stage according to claim 1, characterized in that: The vertical drive device further comprises: a second vertical guide spring; The second vertical guide spring is arranged between the second housing of the second linear drive mechanism and the drive decoupling mechanism; The two second vertical guide springs are symmetrically arranged relative to a vertical plane where the movement direction of the second driving part of the second linear driving mechanism is located.

9. The micro-motion stage according to claim 8, characterized in that: The second vertical guide spring is in a straight line shape, an L shape or a C shape.

10. The micro-motion stage according to claim 1, characterized in that: The drive decoupling mechanism comprises: a first decoupling fixed block fixedly connected to the second driving part of the second linear drive mechanism, a second decoupling fixed block fixedly connected to the top plate, an intermediate decoupling fixed block provided between the first decoupling fixed block and the second decoupling fixed block, a first decoupling spring connecting the first decoupling fixed block and the intermediate decoupling fixed block, and a second decoupling spring connecting the second decoupling fixed block and the intermediate decoupling fixed block, wherein the first decoupling spring and the second decoupling spring are arranged crosswise; The drive decoupling mechanism is used to decouple the movement of the top plate into deformation of the first decoupling reed and / or the second decoupling reed.

11. The micro-motion stage according to claim 1, characterized in that: Also includes: One or more first vertical measuring devices, wherein the first vertical measuring devices are connected to the top plate via a first measurement decoupling mechanism and are used to measure the position and displacement of the top plate.

12. The micro-motion stage according to claim 11, characterized in that: The first vertical measuring device includes: a vertical measuring device base, a tape ruler mounting seat slidably connected to the vertical measuring device base, a grating ruler arranged on the tape ruler mounting seat, and a reading head matched with the grating ruler arranged in the vertical measuring device base.

13. The micro-motion stage according to claim 11, characterized in that: Also includes: The number of second vertical measuring devices corresponds to that of the first vertical measuring devices, and the second vertical measuring devices are used to measure the displacement of the top plate relative to the second shell of the second linear drive mechanism.

14. The micro-motion stage according to claim 1, characterized in that: Also includes: One or more gravity compensation devices are connected to the top plate to provide a force to the top plate at least for compensating for the gravity of the top plate.

15. The micro-motion stage according to claim 1, characterized in that: Also includes: A carrier and a rotating module disposed on the top plate and used for driving the carrier to rotate; The rotating module includes: a rotating base fixedly connected to the top plate, a rotating shaft rotatably connected to the rotating base, a rotating driving mechanism for driving the rotating shaft to rotate relative to the rotating base, and a rotating measuring device for measuring the rotation angle of the rotating shaft relative to the rotating base.

16. The micro-motion stage according to claim 15, characterized in that: The upper surface of the rotating base is flush with the upper surface of the top plate.

17. A motion system, characterized in that: A micro-motion stage comprising the micro-motion stage described in any one of claims 1 to 16.

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