Clamping device, scanning electron microscope sample observation table and scanning electron microscope system

Abstract

The invention discloses a clamping device, a scanning electron microscope sample observation table and a scanning electron microscope system.The clamping device comprises two clamping blocks and a pressing assembly, the two clamping blocks are each provided with a clamping face, and the clamping faces of the two clamping blocks are oppositely arranged; each clamping surface is provided with at least one clamping part, the number of the clamping parts on the two clamping surfaces is consistent, the clamping parts are in one-to-one correspondence, and the two corresponding clamping parts are used for combining and fixing a micro dropper; at least one clamping block is provided with a pressing assembly which is used for enabling the clamping part of the clamping block to slide towards the corresponding clamping part of the other clamping block in the clamping direction until the micro dropper is clamped after the micro dropper is placed between the two corresponding clamping parts; according to the device, the detection efficiency is effectively improved in the process of using the scanning electron microscope sample observation table, the nondestructive detection of the micro dropper is ensured, and the accuracy of a detection result is improved.

Description

Technical Field

[0001] The present application relates to the field of electron microscopy technology, and in particular to a clamping device, a scanning electron microscope sample observation platform and a scanning electron microscope system. Background Art

[0002] Scanning electron microscope (hereinafter referred to as SEM) is an observation method between transmission electron microscope and optical microscope. SEM collects and processes the generated signals through the interaction between electron beam and sample surface, and finally forms an image on the fluorescent screen that reflects the surface morphology and composition information of the sample. It can accurately detect very small apertures.

[0003] A micropipette is a glass product that is long, hollow inside and thin-walled. The top of one side is fired and pulled into a micrometer-sized hole. Due to the limited space on the electron microscope sample observation platform, the existing scanning electron microscope sample platform usually needs to cut off a part of the micropipette to put it into the sample observation platform when detecting the micrometer-sized hole of the micropipette. At the same time, in order to make the micropipette sample vertical, it is also necessary to use auxiliary tools to fix it. However, during the use of this scanning electron microscope sample platform, not only does it need to fix the micropipette one by one, the operation is complicated and time-consuming; at the same time, the use of auxiliary tools can easily damage the micropipette, and it is also impossible to completely ensure that the micropipette is in a vertical state, making it difficult to achieve the purpose of accurately detecting the micropipette. Summary of the invention

[0004] The purpose of the present application is to provide a clamping device, a scanning electron microscope sample observation platform and a scanning electron microscope system, aiming to solve the technical problems in the prior art of using a scanning electron microscope to detect micropipettes, such as low detection efficiency, easy damage to the micropipettes, and the inability to guarantee the accuracy of the detection results.

[0005] In order to achieve the above-mentioned purpose, an embodiment of the present application provides a clamping device, including two clamping blocks and a pressing assembly, wherein a clamping surface is respectively provided on the two clamping blocks, and the clamping surfaces on the two clamping blocks are arranged facing each other; each clamping surface is provided with at least one clamping portion, and the number of the clamping portions on the two clamping surfaces is consistent and one-to-one corresponding, and the corresponding two clamping portions are used to combine and fix the micropipette; at least one of the clamping blocks is provided with the pressing assembly, so that after the micropipette is placed between the two corresponding clamping portions, the clamping portion of the clamping block slides along the clamping direction toward the corresponding clamping portion of the other clamping block until the micropipette is clamped.

[0006] Optionally, the clamping portion is configured as a clamping groove formed on the clamping surface.

[0007] Furthermore, the two corresponding clamping grooves are combined to form a fixing hole, and the fixing hole is a through hole with a diamond-shaped cross-section when no micropipette is placed inside.

[0008] In one embodiment of the present invention, the pressing assembly of the clamping device comprises a guide member extending along the clamping direction, and the clamping block is provided with a guide portion, and the clamping block slides along the guide member through the guide portion.

[0009] Furthermore, the pressing assembly also includes an elastic element, which is sleeved on the guide member and connected to the guide portion of the clamping block, so as to generate elastic deformation in the clamping direction when the clamping block slides along the guide member and provide a holding force for clamping the micropipette.

[0010] A second aspect of the present application provides a scanning electron microscope sample observation platform, comprising a base and at least one clamping device of any one of the above items, wherein the base is provided with at least two fixed ridges, and each of the clamping devices is connected between two of the fixed ridges.

[0011] Furthermore, the top surface of the base is provided with three fixed ridges parallel to each other, which are divided into a central ridge and two side ridges respectively located on both sides of the central ridge; at least one clamping device is provided between each side ridge and the central ridge, and the clamping direction of each clamping device is perpendicular to the central ridge.

[0012] On the other hand, the two clamping blocks of the clamping device are divided into a fixed block and a movable block, the fixed block is fixedly mounted on the side convex ridge on the side away from its clamping surface, and the movable block is provided with the pressing assembly, which is connected between the central convex ridge and the movable block;

[0013] And / or, each of the side ridges, the central ridge, and the clamping device between the side ridges and the central ridge form a sample observation area, and the two sample observation areas are arranged axially symmetrically with respect to the central ridge.

[0014] On the other hand, a shifting portion is provided on a side of the movable block away from the clamping surface;

[0015] And / or, the base is provided with a through hole for the clamped micropipette to pass through;

[0016] And / or, the bottom surface of the base is provided with two fixing rods, and the two fixing rods extend in a direction perpendicular to the bottom surface.

[0017] A third aspect of the present application provides a scanning electron microscope system, comprising the above-mentioned scanning electron microscope sample observation platform.

[0018] One of the above technical solutions has the following advantages or beneficial effects: the clamping device can be used to stably fix at least one micropipette by respectively arranging at least one clamping part on two clamping blocks, thereby effectively improving the detection efficiency; during the use of the scanning electron microscope sample observation table, there is no need to perform additional processing such as cutting on the micropipette, thereby avoiding damage to the micropipette and ensuring non-destructive testing of micropipette samples; at the same time, a pressing component is configured on at least one clamping block, so that after the micropipette is placed between the two corresponding clamping parts, the micropipette can remain in a vertical state, thereby improving the accuracy of the detection results.

[0019] Other advantages of the present application and the technical effects of the preferred embodiments will be further described in the following specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the following specific implementations, they are used to explain the embodiments of the present application, but do not constitute a limitation on the embodiments of the present application. In the accompanying drawings:

[0021] Figure 1 is an isometric diagram of a scanning electron microscope sample observation platform provided in an embodiment of the present application;

[0022] Figure 2 It is a front view of a scanning electron microscope sample observation platform provided in an embodiment of the present application;

[0023] Figure 3 is a top view of a scanning electron microscope sample observation platform provided in an embodiment of the present application;

[0024] Figure 4 It is a bottom view of the scanning electron microscope sample observation platform provided in an embodiment of the present application;

[0025] Figure 5 is a plan view of a moving block provided in an embodiment of the present application;

[0026] Figure 6 is a three-dimensional schematic diagram of a scanning electron microscope sample observation platform provided by another embodiment of the present application;

[0027] Figure 7 is a three-dimensional schematic diagram of a scanning electron microscope sample observation platform provided by another embodiment of the present application;

[0028] Figure 8 This is a diagram of the detection results of a scanning electron microscope sample observation platform provided in another embodiment of the present application.

[0029] Description of Reference Numerals

[0030] 1: Clamping block 2: Press-fit assembly

[0031] 21: Guide 22: Elastic element

[0032] 3: Clamping part 4: Fixing hole

[0033] 5: Guide part 6: Fixed ridge

[0034] 61: Central ridge 62: Side ridge

[0035] 7: Toggle part 8: Through hole

[0036] 9: Fixing rod 10: Base

[0037] 11: Clamping direction DETAILED DESCRIPTION

[0038] Embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present application, and should not be construed as limiting the present application.

[0039] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0040] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0041] In addition, in the description of the present application, “plurality” means two or more than two, unless otherwise clearly and specifically defined.

[0042] In one embodiment of the present application, please refer to Figure 1 and Figure 2The present application discloses a clamping device, including two clamping blocks 1 and a pressing assembly 2. The two clamping blocks 1 are respectively provided with a clamping surface, and the clamping surfaces on the two clamping blocks 1 are arranged facing each other; each clamping surface is provided with at least one clamping portion 3, and the number of the clamping portions 3 on the two clamping surfaces is consistent and one-to-one corresponding, and the corresponding two clamping portions 3 are used to combine and fix a micropipette; at least one clamping block 1 is provided with a pressing assembly 2, which is used to place a micropipette between two corresponding clamping portions 3, so that the clamping portion 3 of the clamping block 1 slides along a clamping direction 11 toward the corresponding clamping portion 3 of the other clamping block 1 until the micropipette is clamped. Specifically, the two clamping blocks 1 in the above-mentioned clamping device can be set as movable blocks that both move along the clamping direction 11, or can be set as a movable block that moves along the clamping direction 11 and a fixed block; accordingly, a pressing component 2 is configured on the movable block, so that the clamping device does not require additional pretreatment operations or accessories during the sample detection process. It only needs to move the clamping block 1 so that the clamping part 3 can be opened along the clamping direction 11 to insert the micropipette, and the top aperture of the micropipette can be measured by looking down from top to bottom, which can effectively avoid damage to the micropipette due to operational errors and ensure that the micropipette can be placed in the electron microscope for detection intact.

[0043] Furthermore, if Figure 1 As shown, the clamping portion 3 is configured as a clamping groove formed on the clamping surface. It should be noted that the clamping portion 3 is used to clamp and fix the micropipette, and the shape and structure of the clamping portion 3 are not limited thereto, and can also be implemented by other more common anti-slip fixing structures, such as anti-slip coatings, mechanical clamp structures, etc., which are not limited here.

[0044] For details, please refer to Figure 2 and Figure 4 , the two corresponding clamping grooves are combined to form a fixing hole 4, and the fixing hole 4 is a through hole with a diamond cross-section when no micropipette is placed inside, and the through hole is used to fix the micropipette; optionally, the side length of the fixing hole 4 is 0.8 mm, and the inner diameter of the fixing hole 4 is slightly smaller than the outer diameter of the micropipette, so that the fixing hole 4 can clamp the micropipette and keep the micropipette vertical at the same time; it should be understood that the cross-sectional shape of the above-mentioned through hole can be a diamond, or a circle or other shapes, and of course it can also be changed according to the size of the holes between micropipette of different specifications or the scanning electron microscope stage, which is not the only limitation here.

[0045] In one embodiment, Figure 2 As shown, the pressing assembly 2 includes a guide member 21 extending along the clamping direction 11, and a guide portion 5 is provided on the clamping block 1. The clamping block 1 slides along the guide member 21 through the guide portion 5. As a further optimization, Figure 2 and Figure 5It can be seen that the pressing assembly 2 also includes an elastic element 22, which is sleeved on the guide member 21 and connected to the guide portion 5 of the clamping block 1, so as to generate elastic deformation in the clamping direction 11 when the clamping block 1 slides along the guide member 21, and provide a holding force for clamping the micropipette. Optionally, in this embodiment, the guide portion 5 can be a portion with a circular through hole, the guide member 21 can be a rod-shaped guide rail with a circular cross-sectional shape to pass through the circular through hole, and the elastic element 22 is connected to the circumferential inner wall of the circular through hole; further, the circular through hole can be set as a stepped hole structure, and the elastic element 22 can be connected to the annular step surface, wherein the elastic element 22 can be movably abutted on the step surface, or can be fixedly connected to the step surface; the elastic element 22 can be a spring structure, and when the spring is in Figure 2 When the spring is in the position, it can be set in a slightly compressed state to resist the clamping block 1. Of course, the guide member 21 can also be a rod-shaped guide rail or a linear strip-shaped slide groove with a square cross-section, which is not limited here, and the guide portion 5 can also be a part with a through hole with a cross-section shape of other shapes, as long as it can ensure that the guide portion 5 slides smoothly on the guide member 21, which can be changed according to actual conditions, which is not limited here.

[0046] Furthermore, if Figure 1 As shown, as a specific embodiment of the scanning electron microscope sample observation platform provided by the present application, the top surface of the base 10 is provided with three mutually parallel fixed ridges 6, which are divided into a central ridge 61 and two side ridges 62 respectively located on both sides of the central ridge 61; at least one clamping device is provided between each side ridge 62 and the central ridge 61, and the clamping direction 11 of each clamping device is perpendicular to the central ridge 61. This embodiment can make full use of the space of the base 10 by setting the central ridge 61 to divide the area, so that the central ridge 61 divides the base 10 into two parts, so that multiple micro-pipettes can be detected at one time, which greatly improves the detection efficiency.

[0047] from Figure 3 It can be seen that as a further optimization, the two clamping blocks 1 of the clamping device are divided into a fixed block and a movable block. The side of the fixed block facing away from its clamping surface is fixedly mounted on the side ridge 62, and the movable block is provided with a pressing assembly 2, which is connected between the central ridge 61 and the movable block; wherein, the fixed block is connected to the base 10 as a whole after being fixed, and the movable block can be flexibly opened by the pressing assembly 2. Under this embodiment, more clamping devices can be installed on the base 10, and at the same time, the operation is convenient, time-saving and labor-saving, thereby improving the detection efficiency.

[0048] In another embodiment of the present application, see Figure 3Each side ridge 62, the central ridge 61 and the clamping device between the side ridge 62 and the central ridge 61 form a sample observation area. The two sample observation areas are axially symmetrical about the central ridge 61, so that the same guide member can pass through the central ridge and be connected to the moving blocks in the two observation areas respectively, which is convenient for processing and installation.

[0049] Furthermore, if Figure 3 As shown, the central ridge 61 divides the base 10 into two left and right sample observation areas, each observation area has six clamping devices, each clamping device has a clamping portion 3, the length dimension of the base 10 can be between about 0.09m and 0.1m, the width dimension can be between about 0.06m and 0.07m, the distance between two adjacent clamping devices in one observation area can be between about 0.01m and 0.02m, and the distance between two clamping devices along the clamping direction 11 is about 0.04m.

[0050] In one embodiment, see Figure 2 , a toggle portion 7 is provided on the side of the moving block away from the clamping surface; specifically, the toggle portion 7 can be a raised structure on the clamping block connected to one side of the pressing assembly to enhance the operating feel and facilitate the sliding of the clamping block to open the fixing hole to place the micropipette; it should be noted that the toggle portion 7 is not limited to this, and can also be achieved by other more common toggle mechanisms, such as a rotary toggle switch, opening the fixing hole by rotating the switch knob, and rotating and clamping after the micropipette is placed, etc., which is not the only limitation here.

[0051] In one embodiment, Figure 4 and Figure 5 As shown, the base 10 is provided with a through hole 8 for the clamped micropipette to pass through; optionally, the through hole 8 has a diameter of 2 mm. The through hole 8 passes through the base 10, so that the processing of the through hole 8 is simpler and can adapt to micropipette of different specifications. During the detection process, there is no need to perform additional cutting on the length of the micropipette to meet the detection needs.

[0052] In one embodiment, Figure 2 As shown, the bottom surface of the base 10 is provided with two fixing rods 9, and the two fixing rods 9 extend in a direction perpendicular to the bottom surface. The two fixing rods 9 can be inserted into the scanning electron microscope instrument to play a fixing role. The two inserted rods can prevent the observation platform from rotating or moving, and protect the micropipette running through it. It should be noted that the fixing structure of the base 10 is not limited to this. Multiple fixing rods 9 can be set, and it can also be achieved by other fixing structures, such as fixing screws, fixing buckles, etc., which are not limited here.

[0053] In one embodiment, see Figure 6The present application provides a scanning electron microscope sample observation platform, including a base 10 and at least one of the above-mentioned clamping devices, the base 10 is provided with at least two fixed ribs 6, and each clamping device is connected between the two fixed ribs 6. Specifically, at least one clamping device can be connected between the two fixed ribs 6. It should be pointed out that if the above-mentioned scanning electron microscope sample observation platform is provided with two fixed ribs 6 and a clamping device, each clamping block 1 on the clamping device can be provided with a plurality of clamping parts 3, and a plurality of pressing assemblies 2 can be connected to the same clamping block 1, which can be set according to actual conditions. During use, it is only necessary to toggle the clamping block 1 to open the fixed hole 4 on the clamping device, and the two clamping blocks 1 slide and compress the pressing assembly 2 along the clamping direction 11, so that multiple micropipettes can be placed at one time, which effectively saves operation time and improves detection efficiency.

[0054] In another embodiment of the present application, see Figure 7 The above-mentioned scanning electron microscope sample observation platform can also have two fixed ridges and multiple clamping devices. Each clamping block 1 on the clamping device can be provided with a clamping portion 3, and each clamping block 1 is connected to a pressing assembly 2. During use, it is only necessary to turn the clamping block 1 to open the fixed hole 4 on the clamping device. The two clamping blocks 1 slide and compress the pressing assembly 2 along the clamping direction 11, and the way of inserting the micropipette is more flexible. Optionally, the size of the scanning electron microscope sample observation platform provided in this application is customized according to the electron microscope stage. The corresponding hole spacing for placing the micropipette on the scanning electron microscope sample observation platform is designed by measuring the hole spacing size on the stage provided by the scanning electron microscope. Therefore, the fixed ridge 6, clamping device and pressing assembly 2 of the above-mentioned embodiment can be selected and combined according to actual needs, and are not limited here.

[0055] In another embodiment of the present application, Figure 8 The figure shows the test results of the scanning electron microscope sample observation platform proposed in this application. During the test, the micropipette sample needs to be vertically placed into the fixed hole 4 on the clamping device, and the aperture D at the top of the micropipette is measured from top to bottom. In a group of experiments for measuring the micropipette, the test result D can be accurate to the micron level.

[0056] For further optimization, the present application proposes a scanning electron microscope system, including the above-mentioned scanning electron microscope sample observation table and scanning electron microscope stage. In a specific embodiment, the scanning electron microscope sample observation table can be fixed on the scanning electron microscope stage by the two aforementioned fixing rods.

[0057] It should be noted that while the numerical ranges and parameters setting forth the broad scope of the present application are approximations and are qualified as "about," the numerical values ​​set forth in the specific examples are reported as precisely as possible. Any numerical value, however, inherently contains certain errors as a result of the standard deviation found in their respective testing measurements, including the standard deviation found in the measuring instrument.

[0058] Obviously, the above embodiments of the present application are only examples for clearly illustrating the present application, and are not intended to limit the implementation methods of the present application. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present application should be included in the protection scope of the claims of the present application.

Claims

1. A clamping device, characterized in that: It comprises two clamping blocks and a pressing assembly, wherein the two clamping blocks are respectively provided with a clamping surface, and the clamping surfaces on the two clamping blocks are arranged facing each other; each clamping surface is provided with at least one clamping part, and the number of the clamping parts on the two clamping surfaces is consistent and one-to-one corresponding, and the two corresponding clamping parts are used to combine and fix the micropipette; at least one clamping block is provided with the pressing assembly, which is used to make the clamping part of the clamping block slide along the clamping direction toward the corresponding clamping part of the other clamping block until the micropipette is clamped after the micropipette is placed between the two corresponding clamping parts.

2. The clamping device according to claim 1, characterized in that: The clamping portion is configured as a clamping groove formed on the clamping surface.

3. The clamping device according to claim 2, characterized in that: The two corresponding clamping grooves are combined to form a fixing hole, and when no micropipette is placed inside the fixing hole, the fixing hole is a through hole with a diamond-shaped cross-section.

4. The clamping device according to any one of claims 1 to 3, characterized in that: The pressing assembly comprises a guide member extending along the clamping direction, and the clamping block is provided with a guide portion, and the clamping block slides along the guide member through the guide portion.

5. The clamping device according to claim 4, characterized in that: The pressing assembly also includes an elastic element, which is sleeved on the guide member and connected to the guide portion of the clamping block, so as to generate elastic deformation in the clamping direction when the clamping block slides along the guide member and provide a holding force for clamping the micropipette.

6. A scanning electron microscope sample observation platform, characterized in that: It comprises a base and at least one clamping device as claimed in any one of claims 1 to 5, wherein the base is provided with at least two fixing ridges, and each of the clamping devices is connected between two of the fixing ridges.

7. The scanning electron microscope sample observation platform according to claim 6, characterized in that: The top surface of the base is provided with three fixed ridges parallel to each other, which are divided into a central ridge and two side ridges respectively located on both sides of the central ridge; at least one clamping device is provided between each side ridge and the central ridge, and the clamping direction of each clamping device is perpendicular to the central ridge.

8. The scanning electron microscope sample observation platform according to claim 7, characterized in that: The two clamping blocks of the clamping device are divided into a fixed block and a movable block, the fixed block is fixedly mounted on the side convex ridge on the side away from its clamping surface, and the movable block is provided with the pressing assembly, which is connected between the central convex ridge and the movable block; And / or, each of the side ridges, the central ridge, and the clamping device between the side ridges and the central ridge form a sample observation area, and the two sample observation areas are arranged axially symmetrically with respect to the central ridge.

9. The scanning electron microscope sample observation platform according to claim 8, characterized in that: A shifting portion is provided on a side of the movable block away from the clamping surface; And / or, the base is provided with a through hole for the clamped micropipette to pass through; And / or, the bottom surface of the base is provided with two fixing rods, and the two fixing rods extend in a direction perpendicular to the bottom surface.

10. A scanning electron microscope system, characterized in that: Comprising a scanning electron microscope sample observation stage as described in any one of claims 6 to 9.

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