Corrosion device and corrosion method

Abstract

The invention provides a corrosion device and a corrosion method, and belongs to the technical field of semiconductor material surface treatment. The corrosion device comprises a supporting table, a limiting piece, a driving assembly, a shell and a plurality of supporting pieces. The multiple supporting pieces are arranged on the periphery of the supporting table at intervals. The limiting piece is arranged on the side, away from the supporting table, of the supporting piece and used for bearing the chip; the driving assembly is provided with a driving shaft, the driving shaft is connected with the side, away from the limiting piece, of the supporting table, and the driving assembly is used for driving the supporting table to rotate and / or driving the supporting table to move in the axis direction of the driving shaft; a containing cavity is defined by the shell, and at least part of the supporting piece is contained in the containing cavity. The corrosion device provided by the invention can prevent sediments generated in the corrosion process from covering the surface of the chip in the corrosion process of the chip in the accommodating cavity, so that the corrosion uniformity and the corrosion quality of the chip are ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor material surface treatment, and in particular to an etching device and an etching method. Background Art

[0002] Currently, the common corrosion methods for chips are front corrosion and vertical corrosion. Products will be produced in the corrosion process. When the products fall back to the chip surface, they hinder the corrosion, which not only causes uneven and incomplete corrosion of the chip, but also makes the chip surface dirty and difficult to clean, and the surface is uneven. Summary of the invention

[0003] In view of this, the purpose of the present invention is to overcome the deficiencies in the prior art and provide a corrosion device and a corrosion method.

[0004] The present invention provides the following technical solution: a corrosion device, comprising: Support table; A plurality of support members are arranged at intervals on the periphery of the support platform; A limiting member, arranged on a side of the supporting member away from the supporting platform, and used for carrying the chip; A driving assembly, comprising a driving shaft, wherein the driving shaft is connected to a side of the support platform away from the stopper, and the driving assembly is used to drive the support platform to rotate and / or drive the support platform to move along the axis direction of the driving shaft; The shell defines a receiving cavity, and the support member is at least partially received in the receiving cavity.

[0005] In some embodiments, the drive assembly includes a drive motor, a connecting structure, and a lifting motor; One end of the connecting structure is connected to the lifting shaft of the lifting motor, and the other end of the connecting structure is connected to the driving motor; The output shaft of the driving motor is coaxially connected to the driving shaft.

[0006] In some embodiments, the connection structure includes a connection platform and a connection rod, the connection platform is connected to the lifting shaft, and one end of the connection rod is passed through the connection platform and connected to the driving motor.

[0007] In some embodiments, the edge of the support platform is provided with a plurality of spaced-apart notches; One end of the support member facing away from the limiting member is clamped in the notch.

[0008] In some embodiments, the support member includes a rod body and a connecting block, and the connecting block is disposed at one end of the rod body in the length direction; A plurality of spaced-apart card slots are provided on one side of the support platform away from the limiting member, wherein the card slots are arranged at the edge of the support platform and communicate with the notch; One end of the rod body close to the connecting block is received in the notch, and the connecting block is at least partially received in the slot and abuts against a slot wall of the slot.

[0009] In some embodiments, a limiting assembly is provided at the edge of the support platform for limiting the position of the support member; The limiting assembly includes a stopper and a first bolt. The stopper abuts against a side of the support member away from the support platform. The first bolt passes through the stopper and is threadedly connected to the support platform.

[0010] In some embodiments, the limiting member is a sapphire sheet, and the limiting member is provided with an opening for carrying the chip, and the opening penetrates the limiting member along the thickness direction of the limiting member.

[0011] In a second aspect, the present invention provides a corrosion method, using the corrosion device, comprising: Obtain the chip and fix the chip on the limiting piece; Determine the area of ​​the chip that needs to be etched and apply photoresist to the remaining area of ​​the chip; The photoresist is baked at a preset temperature T for t minutes to solidify the photoresist; The driving component controls the limiting member on which the chip is fixed to be immersed in the corrosive liquid in the accommodating cavity, and controls the supporting platform to rotate at a constant speed; After the etching time is t1 minutes, the chip is immersed in an acetone solution to remove the photoresist to complete the etching.

[0012] In some embodiments, the preset temperature T has a value range of 20°C ≤ T ≤ 300°C; The value range of t is 15≤T≤30.

[0013] In some embodiments, the etching solution includes at least one of nitric acid, hydrofluoric acid, hydrochloric acid, hydrogen bromide, phosphoric acid, sulfuric acid, hydrogen peroxide, citric acid, tartaric acid, acetic acid, potassium permanganate and potassium dichromate.

[0014] The embodiments of the present invention have the following advantages: by arranging the limit member on the side of the support member away from the support platform, and the support member is arranged on the side of the support platform away from the driving shaft, so that when the driving component controls the rotation of the driving shaft, the driving shaft can drive the support platform and the support member to rotate synchronously, and the support member is at least partially accommodated in the accommodating cavity, thereby realizing the formation of an inverted corrosion structure for the chip carried on the limit member, and the driving component can control the support platform to rotate uniformly, thereby driving the support member and the limit member to rotate synchronously to improve the uniformity of chip corrosion; the driving component can also control the support platform to move along the axial direction of the driving shaft in the direction away from the shell, so that when the chip is corroded in the accommodating cavity, the precipitate generated during the corrosion process is prevented from covering the chip surface, thereby ensuring the uniformity and corrosion quality of the chip corrosion and improving the corrosion efficiency.

[0015] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and understandable, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0017] Figure 1 A schematic structural diagram showing a perspective of a corrosion device provided by some embodiments of the present invention; Figure 2 A schematic structural diagram showing another perspective of a corrosion device provided by some embodiments of the present invention; Figure 3 Shows Figure 2 Cross-sectional view of the middle AA section; Figure 4 A structural schematic diagram showing a perspective view of the connection between a support platform and a support member in a corrosion device provided by some embodiments of the present invention; Figure 5 A schematic structural diagram showing a perspective of a support platform in a corrosion device provided by some embodiments of the present invention; Figure 6 A flow chart of a corrosion method provided by some embodiments of the present invention is shown.

[0018] Description of main component symbols: 100-support platform; 110-notch; 120-slot; 200-support member; 210-rod body; 220-connecting block; 300-limiting member; 310-opening; 400-driving assembly; 410-driving motor; 411-output shaft; 420-connecting structure; 421-connecting platform; 422-connecting rod; 430-lifting motor; 431-lifting shaft; 500-driving shaft; 600-housing; 610-accommodating chamber; 700-limiting assembly; 710-block; 720-first bolt. DETAILED DESCRIPTION

[0019] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0020] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. In contrast, when an element is referred to as being "directly on" another element, there is no intermediate element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0021] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of the template are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0024] like Figures 1 to 3 As shown, some embodiments of the present invention provide an etching device, which is mainly used for etching chips to improve the uniformity of chip etching and improve the etching efficiency of the chip.

[0025] The corrosion device includes a driving assembly 400 , a supporting platform 100 , a limiting member 300 , a housing 600 and a plurality of supporting members 200 .

[0026] The driving assembly 400 has a driving shaft 500 , which is connected to a side of the support platform 100 away from the limiting member 300 . The driving assembly 400 is used to drive the support platform 100 to rotate and / or drive the support platform 100 to move along the axial direction of the driving shaft 500 .

[0027] It is understandable that the driving assembly 400 can drive the support table 100 to rotate, or the driving assembly 400 can drive the support table 100 to move along the axis direction of the driving shaft 500. In this embodiment, the driving assembly 400 can drive the support table 100 to rotate and can also drive the support table 100 to move along the axis direction of the driving shaft 500.

[0028] By connecting the support platform 100 with the driving shaft 500 , the driving assembly 400 can control the driving shaft 500 to rotate during operation, thereby driving the support platform 100 to rotate synchronously through the driving shaft 500 .

[0029] It should be noted that the driving assembly 400 can drive the support platform 100 to rotate, and the driving assembly 400 can also drive the support platform 100 to move along the axial direction of the driving shaft 500 to adjust the height of the support platform 100 .

[0030] In some embodiments, the axis of the support platform 100 coincides with the axis of the driving shaft 500 to ensure the stability of the support platform 100 during rotation.

[0031] The shape of the support platform 100 may be any one of circular, elliptical, polygonal or irregular shapes, or a combination of two or more thereof, and may be specifically set according to actual conditions.

[0032] In this embodiment, the support platform 100 is a circular chuck to ensure that the distance between each support member 200 and the axis of the support platform 100 is equal, thereby ensuring the uniformity of corrosion.

[0033] A plurality of support members 200 are arranged at intervals on the periphery of the support platform 100 . It is understandable that the number of the support members 200 can be two or more than two, and can be specifically set according to actual conditions.

[0034] In some embodiments, a plurality of support members 200 are arranged at equal intervals on the periphery of the support platform 100 to further improve the uniformity of etching.

[0035] In addition, the stopper 300 is disposed on the side of the support member 200 away from the support platform 100. The connection between the stopper 300 and the support member 200 can be any one of threaded connection, clamping, bonding, magnetic connection, and bolt connection, which can be specifically set according to actual conditions.

[0036] It is understandable that, in this embodiment, the limiting member 300 is detachably connected to the support platform 100 to ensure the connection stability between the limiting member 300 and the support platform 100 and improve the installation or disassembly efficiency between the limiting member 300 and the support platform 100.

[0037] In this embodiment, the position-limiting member 300 is used to carry the chip to ensure the stability of the chip on the position-limiting member 300. In addition, the connection between the chip and the position-limiting member 300 includes clamping or bonding.

[0038] In this embodiment, the shell 600 is spaced apart from the driving assembly 400, and the shell 600 defines a accommodating chamber 610 having an opening 310, and the accommodating chamber 610 is capable of storing corrosive liquid. The opening 310 faces the support platform 100, and one end of the support member 200 facing away from the support platform 100 is passed through the opening 310, and the support member 200 is at least partially accommodated in the accommodating chamber 610.

[0039] By setting the limit member 300 on the side of the support member 200 away from the support table 100, and the support member 200 is set on the side of the support table 100 away from the driving shaft 500, so that when the driving component 400 controls the rotation of the driving shaft 500, the driving shaft 500 can drive the support table 100 and the support member 200 to rotate synchronously, and the support member 200 is at least partially accommodated in the accommodating cavity 610 to form an inverted corrosion structure, thereby realizing the formation of an inverted corrosion structure for the chip carried on the limit member 300, and the driving component 400 can control the support table 100 to rotate uniformly, thereby driving the support member 200 and the limit member 300 to rotate synchronously to improve the uniformity of chip corrosion; the driving component 400 can also control the support table 100 to move along the axial direction of the driving shaft 500 in the direction away from the shell 600, so that the chip can rise at a uniform speed during the corrosion process in the accommodating cavity 610 to prevent the precipitate generated during the corrosion process from covering the chip surface, thereby ensuring the uniformity and corrosion quality of the chip.

[0040] It is worth noting that in this embodiment, the surface of the chip to be corroded is arranged away from the opening 310 of the accommodating cavity 610, that is, the surface of the chip to be corroded is located on the side of the limiting member 300 away from the support platform 100, thereby realizing inverted corrosion of the chip to prevent the precipitate generated during the corrosion process from falling on the surface of the chip to be corroded, thereby ensuring the corrosion quality of the chip.

[0041] like Figures 1 to 3 As shown, in some embodiments of the present invention, the driving assembly 400 includes a driving motor 410 , a connecting structure 420 and a lifting motor 430 .

[0042] Among them, one end of the connecting structure 420 is connected to the lifting shaft 431 of the lifting motor 430, and the other end of the connecting structure 420 is connected to the driving motor 410, so that the lifting shaft 431 of the lifting motor 430 can drive the connecting structure 420 and the driving motor 410 to rise or fall synchronously during the rising or falling process.

[0043] It should be noted that the axis of the output shaft 411 of the driving motor 410 is parallel to the axis of the lifting shaft 431 .

[0044] In addition, the output shaft 411 of the driving motor 410 and the driving shaft 500 are coaxially connected, so that the output shaft 411 of the driving motor 410 can drive the driving shaft 500 to rotate synchronously during the rotation process.

[0045] It can be understood that since the limit member 300 is connected to the support member 200, the support member 200 is connected to the support platform 100, the support platform 100 is connected to the drive shaft 500, and the drive shaft 500 is connected to the output shaft 411, the lifting shaft 431 of the lifting motor 430 can control the connection structure 420, the drive motor 410, the support platform 100, the support member 200 and the limit member 300 to rise or fall synchronously during the rising or falling process.

[0046] like Figure 4 and Figure 5 As shown, in some embodiments of the present invention, the edge of the support platform 100 is provided with a plurality of spaced notches 110. The number of the notches 110 can be two or more than two, and can be specifically set according to actual conditions.

[0047] In this embodiment, one end of the support member 200 facing away from the limiting member 300 is clamped in the notch 110, and the inner wall of the notch 110 abuts against the outer wall of the support member 200 to limit the support member 200, thereby ensuring the stability of the connection between the support member 200 and the support platform 100 and preventing the support member 200 from shaking.

[0048] The number of the notches 110 is equal to the number of the supporting members 200 , and one supporting member 200 is correspondingly disposed in one notch 110 .

[0049] It should be noted that there is a gap between the support member 200 and the inner wall of the shell 600, and there is a gap between the limit member 300 and the inner wall of the shell 600 to prevent the support member 200 and the limit member 300 from rubbing against the inner wall of the shell 600 during rotation, so as to ensure the stability and smoothness of the support member 200 and the limit member 300 during rotation.

[0050] like Figure 4 and Figure 5 As shown, in some embodiments of the present invention, a limiting assembly 700 is provided on the edge of the support platform 100 for limiting the support member 200 to ensure the stability of the connection between the support member 200 and the support platform 100 .

[0051] Among them, the limiting assembly 700 includes a stop block 710 and a first bolt 720, the stop block 710 is set at the edge of the support platform 100, and the stop block 710 abuts against the side of the support member 200 away from the support platform 100, the first bolt 720 passes through the stop block 710 and is threadedly connected to the support platform 100, thereby connecting the support member 200 with the support platform 100, which can not only improve the stability of the connection between the support member 200 and the support platform 100, but also improve the installation or disassembly efficiency between the support member 200 and the support platform 100.

[0052] like Figure 4 As shown, in some embodiments of the present invention, the limit member 300 is a sapphire sheet. It should be noted that the advantages of sapphire mainly include its high hardness, chemical stability, electrical properties and dielectric properties, high temperature resistance, good thermal conductivity, high light transmittance, high melting point, Mohs hardness of 9 (second only to diamond), chemical corrosion resistance, scratch resistance, high pressure resistance, extreme wear resistance, good impact resistance, high dielectric constant, excellent electrical insulator, thermal stability, no loss of mechanical and optical properties from low temperature to high temperature of 2000°C, extreme thermal cycles will not cause surface damage or anti-crystallization, no sagging or collapse at high temperature, high corrosion resistance, good radiation resistance, and good optical transmission characteristics from ultraviolet to mid-infrared.

[0053] In this embodiment, the stopper 300 is provided with an opening 310 for carrying the chip, and the opening 310 penetrates the stopper 300 along the thickness direction of the stopper 300. It is understandable that the chip can be accommodated in the opening 310 and bonded or clamped to the wall of the opening 310.

[0054] like Figure 2 and Figure 3 As shown, in some embodiments of the present invention, the connecting structure 420 includes a connecting platform 421 and a connecting rod 422, the connecting platform 421 is connected to the lifting shaft 431, one end of the connecting rod 422 is passed through the connecting platform 421 and connected to the driving motor 410.

[0055] It should be noted that the connecting rod 422 is slidably connected to the connecting platform 421 , and the axis of the connecting rod 422 is perpendicular to the axis of the lifting shaft 431 .

[0056] In this embodiment, the axis of the lifting shaft 431 is parallel to the vertical direction, and the axis of the connecting shaft is parallel to the horizontal direction.

[0057] like Figure 1 and Figure 3 As shown, in some embodiments of the present invention, the support member 200 includes a rod body 210 and a connecting block 220 , and the connecting block 220 is disposed at one end of the rod body 210 in the length direction.

[0058] In this embodiment, the rod body 210 and the connecting block 220 are integrally connected to form the supporting member 200 .

[0059] A plurality of slots 120 are disposed at intervals on a side of the support platform 100 away from the limiting member 300 . The plurality of slots 120 are disposed at intervals along the edge of the support platform 100 and are communicated with the notch 110 .

[0060] In addition, one end portion of the rod body 210 close to the connecting block 220 is accommodated in the notch 110, and the connecting block 220 is at least partially accommodated in the slot 120 and abuts against the slot wall of the slot 120, so as to form a limiting effect on the connecting block 220 through the slot wall of the slot 120 to prevent the connecting block 220 from moving along the axial direction perpendicular to the driving shaft 500, thereby ensuring the stability of the connection between the support member 200 and the support platform 100.

[0061] like Figure 6 As shown, some embodiments of the present invention provide a corrosion method, using the corrosion device described in any of the above embodiments, including: Step S100 , obtaining a chip and fixing the chip on the limiting member 300 .

[0062] Specifically, the chip is placed in the opening 310 of the limiting member 300 , and the edge of the chip is bonded to the inner wall of the opening 310 by using materials such as photoresist, so as to fix the chip on the limiting member 300 .

[0063] Step S200, determining the area of ​​the chip that needs to be corroded, and coating the remaining area of ​​the chip with materials such as photoresist.

[0064] Specifically, the etching area of ​​the chip is determined according to the etching requirements of the chip.

[0065] It should be noted that the remaining area of ​​the chip refers to the area outside the area of ​​the chip that needs to be etched, and a material such as a photoresist is coated on the area to avoid etching this part of the area, thereby ensuring the accuracy of the etching area of ​​the chip.

[0066] Step S300, baking the photoresist at a preset temperature T for t minutes to solidify the photoresist.

[0067] Specifically, the chip coated with the photoresist is placed in a preset temperature T and baked for t minutes to solidify the photoresist to ensure the stability of the photoresist on the chip.

[0068] In step S400 , the driving assembly 400 controls the stopper 300 on which the chip is fixed to be immersed in the etching liquid in the receiving chamber 610 , and controls the support platform 100 to rotate at a constant speed.

[0069] Specifically, a corrosive liquid is added to the accommodating chamber 610, and the driving assembly 400 is used to control the driving shaft 500 to rotate at a uniform speed, and the driving shaft 500 drives the supporting platform 100, the supporting member 200 and the limiting member 300 to rotate synchronously, thereby driving the chip to rotate at a uniform speed, so that the chip is fully in contact with the corrosive liquid during the rotation process, so as to accelerate the corrosion rate and improve the uniformity of the corrosion, and at the same time, it can effectively prevent the products from falling back onto the chip during the corrosion process, thereby ensuring the corrosion quality of the chip.

[0070] Step S500, after the etching time is t1 minutes, the chip is immersed in an acetone solution to remove the photoresist to complete the etching.

[0071] Specifically, the etching time is t1 minutes, and the etching of the chip is completed. The driving assembly 400 drives the support table 100 to move away from the housing 600 along the axial direction of the driving shaft 500, so as to remove the stopper 300 and the chip from the accommodating cavity 610. Then, the stopper 300 is removed from the support member 200 and immersed in an acetone solution to remove the photoresist on the surface of the chip, so as to obtain a chip after the etching is completed.

[0072] The present invention uses a vertically inverted etching method to prevent products generated during chip etching from falling back onto the chip surface, thereby improving the chip etching quality and etching uniformity.

[0073] like Figure 2 As shown, in some embodiments of the present invention, the etching solution includes at least one of nitric acid, hydrofluoric acid, hydrochloric acid, hydrogen bromide, phosphoric acid, sulfuric acid, hydrogen peroxide, citric acid, tartaric acid, acetic acid, potassium permanganate and potassium dichromate.

[0074] It is understandable that the etching solution includes any one or a combination of two or more of nitric acid, hydrofluoric acid, hydrochloric acid, hydrogen bromide, phosphoric acid, sulfuric acid, hydrogen peroxide, citric acid, tartaric acid, acetic acid, potassium permanganate and potassium dichromate, and can be specifically set according to actual conditions.

[0075] like Figure 2 As shown, in some embodiments of the present invention, the value range of the preset temperature T is 20°C≤T≤300°C.

[0076] It can be understood that the value range of the preset temperature T can be any range of 20°C≤T≤155°C, 155°C≤T≤255°C, 255°C≤T≤300°C, and can be specifically set according to actual conditions.

[0077] In addition, the value range of t is 15≤t≤30. It can be understood that the value range of t can be any range of 15≤t≤30, 16≤t≤30, 17≤t≤30, 18≤t≤30, 19≤t≤30, 20≤t≤30, 21≤t≤30, 22≤t≤30, 23≤t≤30, 24≤t≤30, 25≤t≤30, 26≤t≤30, 27≤t≤30, 28≤t≤30, and 29≤t≤30, which can be specifically set according to actual conditions.

[0078] Specifically, in this embodiment, the photoresist is baked at a temperature of 50° C. for 20 minutes to solidify the photoresist.

[0079] In all examples shown and described herein, any specific values ​​should be interpreted as merely exemplary and not as limiting, and thus other examples of the exemplary embodiments may have different values.

[0080] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0081] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the present invention. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A corrosion device, characterized in that: include: Support table; A plurality of support members are arranged at intervals on the periphery of the support platform; A limiting member, arranged on a side of the supporting member away from the supporting platform, and used for carrying the chip; A driving assembly, comprising a driving shaft, wherein the driving shaft is connected to a side of the support platform away from the stopper, and the driving assembly is used to drive the support platform to rotate and / or drive the support platform to move along the axis direction of the driving shaft; The shell defines a receiving cavity, and the support member is at least partially received in the receiving cavity.

2. The corrosion device according to claim 1, characterized in that: The driving assembly includes a driving motor, a connecting structure and a lifting motor; One end of the connecting structure is connected to the lifting shaft of the lifting motor, and the other end of the connecting structure is connected to the driving motor; The output shaft of the driving motor is coaxially connected to the driving shaft.

3. The corrosion device according to claim 2, characterized in that: The connecting structure comprises a connecting platform and a connecting rod. The connecting platform is connected to the lifting shaft. One end of the connecting rod is passed through the connecting platform and connected to the driving motor.

4. The corrosion device according to claim 1, characterized in that: The edge of the support platform is provided with a plurality of spaced-apart notches; One end of the support member facing away from the limiting member is clamped in the notch.

5. The corrosion device according to claim 4, characterized in that: The support member includes a rod body and a connecting block, wherein the connecting block is arranged at one end of the rod body in the length direction; A plurality of spaced-apart card slots are provided on one side of the support platform away from the limiting member, wherein the card slots are arranged at the edge of the support platform and communicate with the notch; One end of the rod body close to the connecting block is received in the notch, and the connecting block is at least partially received in the slot and abuts against a slot wall of the slot.

6. The corrosion device according to claim 1, characterized in that: A limiting assembly is provided at the edge of the support platform for limiting the position of the support member; The limiting assembly includes a stopper and a first bolt. The stopper abuts against a side of the support member away from the support platform. The first bolt passes through the stopper and is threadedly connected to the support platform.

7. The corrosion device according to any one of claims 1 to 6, characterized in that: The limiting member is a sapphire sheet, and the limiting member is provided with an opening for carrying the chip, and the opening penetrates the limiting member along the thickness direction of the limiting member.

8. A corrosion method, characterized in that: The corrosion device according to any one of claims 1 to 7 comprises: Obtain the chip and fix the chip on the limiting piece; Determine the area of ​​the chip that needs to be etched and apply photoresist to the remaining area of ​​the chip; The photoresist is baked at a preset temperature T for t minutes to solidify the photoresist; The driving component controls the limiting member on which the chip is fixed to be immersed in the corrosive liquid in the accommodating cavity, and controls the supporting platform to rotate at a constant speed; After the etching time is t1 minutes, the chip is immersed in an acetone solution to remove the photoresist to complete the etching.

9. The etching method according to claim 8, characterized in that: The preset temperature T has a value range of 20°C ≤ T ≤ 300°C; The value range of t is 15≤T≤30.

10. The etching method according to claim 8, characterized in that: The etching solution includes at least one of nitric acid, hydrofluoric acid, hydrochloric acid, hydrogen bromide, phosphoric acid, sulfuric acid, hydrogen peroxide, citric acid, tartaric acid, acetic acid, potassium permanganate and potassium dichromate.

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