Charged particle beam de-dispersion device

Abstract

The invention provides a charged particle beam achromatic device which comprises a mounting bottom plate arranged in an Oxz plane, and a horizontal pole plate unit and a vertical pole plate unit are sequentially arranged on the mounting bottom plate from left to right along a z axis; the horizontal pole plate unit comprises a lower horizontal pole plate and an upper horizontal pole plate which are arranged in parallel, a first space is formed between the lower horizontal pole plate and the upper horizontal pole plate, the vertical pole plate unit comprises a front vertical pole plate and a rear vertical pole plate which are arranged in parallel, and a second space is formed between the front vertical pole plate and the rear vertical pole plate; the central axis of the first space in the z-axis direction and the central axis of the second space in the z-axis direction coincide with each other. The device has a charged particle beam two-dimensional deflection achromatic effect, consumes less energy, does not need a complex structure adopted by a permanent magnet group or a particularly complex winding process adopted by an electromagnet, and can realize deflection scanning of charged particles in a two-dimensional space without an additional mechanical power mechanism.

Description

Technical Field

[0001] The invention belongs to the technical field of transmission beam optics, relates to a charged particle beam, and in particular to a charged particle beam de-dispersion device. Background Art

[0002] In an accelerator, after the charged particle beam is accelerated and deflected, dispersion will occur. At the same time, the charged particle beam will also be dispersed during transmission in a space magnetic field environment, which will affect the focusing and transmission performance of the charged particle beam. Under the action of the Lorentz force of an ideal space magnetic field, the charged particles will move forward in the manner of Larmor rotation precession, that is, they will move at a uniform speed along the direction of the magnetic field and move in a circle perpendicular to the direction of the magnetic field. Due to the difference in the deflection radius of charged particles of different energies moving in a space magnetic field, the charged particle beam forms a beam band of a certain width on the target surface (that is, the beam dispersion effect), causing the beam density to drop sharply.

[0003] Theoretically, the reason why charged particles produce dispersion effects in a magnetic field is the result of the Lorentz force. Charged particles with different energies (kinetic energies) are subject to different Lorentz forces in a magnetic field, resulting in different deflection radii. Limited by the microwave acceleration mechanism, the energy of the electron beam emitted by a linear electron accelerator must have a certain energy width. Usually, energy dispersion is used to describe the distribution width of energy. The larger the energy dispersion, the more dispersed the electron energy distribution, and vice versa, the more concentrated the electron energy. In addition to the physical characteristics of the microwave acceleration electron mechanism itself, indicators such as microwave power stability, electron gun current stability, and temperature changes will affect the width of the electron beam energy spectrum. This means that energy dispersion is inevitable and difficult to completely eliminate. It can only be suppressed to a certain extent. The root cause of dispersion is energy dispersion, and energy dispersion is inevitable. At present, linear microwave accelerators use hot cathode electron guns. Considering the engineering feasibility, the energy dispersion can be controlled within 2%.

[0004] The problems existing in the charged particle beam dedispersion devices in the prior art include: high complexity. Some dedispersion technologies require complex structures and control systems, which increases the cost and difficulty of the system; energy loss. Some dedispersion technologies may cause energy loss of the charged particle beam during the dedispersion process, affecting the efficiency and quality of beam transmission; sensitivity to beam parameters. Some dedispersion technologies may be sensitive to the parameters of the charged particle beam (such as energy, speed, etc.), requiring precise control and adjustment. Summary of the invention

[0005] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a charged particle beam dedispersion device to solve the technical problem that the complexity of the charged particle beam dedispersion device in the prior art needs to be further reduced without affecting other performances.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions to achieve the above problems:

[0007] A charged particle beam de-dispersion device comprises a mounting base plate arranged in an Oxz plane, wherein a horizontal plate unit and a vertical plate unit are arranged on the mounting base plate in sequence from left to right along the z axis.

[0008] The horizontal plate unit comprises a pair of lower horizontal plates and upper horizontal plates arranged in parallel, the lower horizontal plates and the upper horizontal plates are both perpendicular to the y-axis, and a first space is formed between the lower horizontal plates and the upper horizontal plates.

[0009] The vertical plate unit comprises a pair of front vertical plates and rear vertical plates arranged in parallel, the front vertical plates and the rear vertical plates are both perpendicular to the x-axis, and a second space is provided between the front vertical plates and the rear vertical plates.

[0010] The central axis of the first space in the z-axis direction coincides with the central axis of the second space in the z-axis direction.

[0011] The present invention also has the following technical features:

[0012] The spacing between the lower horizontal electrode plate and the upper horizontal electrode plate in the y-axis direction can be adjusted.

[0013] Specifically, the horizontal electrode plate unit includes a gantry-type front side plate arranged in the y-axis direction, and the bottom of the gantry-type front side plate is fixedly connected to the top of the mounting base plate. The horizontal electrode plate unit also includes a gantry-type rear side plate arranged in the y-axis direction, and the bottom of the gantry-type rear side plate is fixedly connected to the top of the mounting base plate. The cavity surrounded by the gantry-type front side plate, the gantry-type rear side plate and the mounting base plate is the horizontal electrode plate cavity.

[0014] A plurality of first front side plate openings are evenly arranged in the middle of the gantry-type front side plate along the z-axis direction, each first front side plate opening passes through both sides of the gantry-type front side plate, and a first card slot which is hollow and open at the top is provided at the bottom of each first front side plate opening.

[0015] A plurality of first rear side plate openings are evenly arranged in the middle of the gantry-type rear side plate along the z-axis direction, each first rear side plate opening passes through both sides of the gantry-type rear side plate, and a second card slot with a hollow center and an open top is provided at the bottom of each first rear side plate opening, and the second card slot and the first card slot are located on the same horizontal line.

[0016] A plurality of lower gantry support plates are arranged in sequence from left to right along the z-axis direction inside the horizontal plate cavity, one end of each lower gantry support plate is fitted and fixedly connected to the first slot, and the other end of each lower gantry support plate is fitted and fixedly connected to the second slot.

[0017] The lower gantry support plate is evenly provided with a plurality of first threaded holes penetrating the upper and lower ends, each of the first threaded holes is provided with a first adjustment bolt, and the first adjustment bolt also passes through the first lower horizontal pole plate connector countersunk hole on the lower horizontal pole plate connector arranged at the top along the z-axis direction, and the plurality of first lower horizontal pole plate connector countersunk holes are evenly distributed on the lower horizontal pole plate connector, and each first lower horizontal pole plate connector countersunk hole passes through the upper and lower ends of the lower horizontal pole plate connector, and the lower horizontal pole plate connector is fixed to the lower gantry support plate by the plurality of first adjustment bolts, and a height adjustment gap is reserved between the lower horizontal pole plate connector and the lower gantry support plate.

[0018] The lower horizontal plate connector is also evenly provided with a plurality of second lower horizontal plate connector countersunk holes that pass through the upper and lower ends, and a first non-metallic screw is provided in each second lower horizontal plate connector countersunk hole. The plurality of first non-metallic screws insulate and fix the lower horizontal plate to the lower horizontal plate connector, and the top of the lower horizontal plate connector contacts the bottom of the lower horizontal plate.

[0019] The lower horizontal plate is also provided with a lower horizontal plate connection terminal, and the lower horizontal plate connection terminal is conductively fixedly connected to the lower horizontal plate.

[0020] The top of the gantry-type front side plate is evenly provided with a plurality of hollow and top-open third card slots along the z-axis direction, and the third card slots run through both sides of the gantry-type front side plate; the top of the gantry-type rear side plate is evenly provided with a plurality of hollow and top-open fourth card slots along the z-axis direction, and each fourth card slot runs through both sides of the gantry-type rear side plate, and the fourth card slots and the third card slots are located on the same horizontal line.

[0021] A plurality of upper gantry support plates are arranged in sequence from left to right along the z-axis direction inside the horizontal plate cavity, one end of each upper gantry support plate is fitted and fixedly connected to the third slot, and the other end of each upper gantry support plate is fitted and fixedly connected to the fourth slot.

[0022] The upper gantry support plate is evenly provided with a plurality of second threaded holes that pass through the upper and lower ends, and a second adjustment bolt is provided in each second threaded hole. The second adjustment bolt also passes through the first upper horizontal pole plate connector countersunk hole on the upper horizontal pole plate connector arranged at the bottom along the z-axis direction. The plurality of first upper horizontal pole plate connector countersunk holes are evenly distributed on the upper horizontal pole plate connector, and each first upper horizontal pole plate connector countersunk hole passes through the upper and lower ends of the upper horizontal pole plate connector. The upper horizontal pole plate connector is fixed to the upper gantry support plate by a plurality of second adjustment bolts, and a height adjustment gap is reserved between the upper horizontal pole plate connector and the upper gantry support plate.

[0023] The upper horizontal plate connector is also evenly provided with a plurality of second upper horizontal plate connector countersunk holes that pass through the upper and lower ends, and each second upper horizontal plate connector countersunk hole is provided with a second non-metallic screw. The plurality of second non-metallic screws insulate and fix the upper horizontal plate to the upper horizontal plate connector, and the bottom of the upper horizontal plate connector is in contact with the top of the upper horizontal plate.

[0024] The upper horizontal plate is also provided with an upper horizontal plate connection terminal, which is conductively and fixedly connected to the upper horizontal plate.

[0025] Specifically, the vertical plate unit includes a plurality of front vertical plate support members arranged in the y-axis direction, and the plurality of front vertical plate support members are distributed along the z-axis direction. The bottom of each front vertical plate support member is fixedly connected to the top of the mounting base plate. The middle and top of each front vertical plate support member are provided with a plurality of fifth hollow slots with open outer edges. Each fifth slot is fitted with a front vertical plate connector arranged along the z-axis direction. The front vertical plate support member is also provided with a third threaded hole at the fifth slot. A third non-metallic screw is provided in each third threaded hole. The third non-metallic screw also passes through a first front vertical plate connector countersunk hole on the front vertical plate connector. The plurality of first front vertical plate connector countersunk holes are evenly distributed on the front vertical plate connector. The front vertical plate connector is fixedly connected to the front vertical plate support member by a plurality of third non-metallic screws.

[0026] The front vertical plate connector is also provided with a plurality of second front vertical plate connector countersunk holes evenly arranged along the z-axis direction, and a fourth non-metallic screw is arranged in each second front vertical plate connector countersunk hole. The plurality of fourth non-metallic screws insulate and fix the front vertical plate to the front vertical plate connector.

[0027] The front vertical plate is also provided with a front vertical plate connection terminal, and the front vertical plate connection terminal is conductively fixedly connected to the front vertical plate.

[0028] The vertical plate unit includes a plurality of rear vertical plate support members arranged in the y-axis direction, and the plurality of rear vertical plate support members are distributed along the z-axis direction. The bottom of each rear vertical plate support member is fixedly connected to the top of the mounting base plate. The middle and top of each rear vertical plate support member are provided with a plurality of sixth card slots which are hollow and open on the outer sides. Each sixth card slot is fitted with a rear vertical plate connector arranged along the z-axis direction. The rear vertical plate support member is also provided with a fourth threaded hole at the sixth card slot. A fifth non-metallic screw is provided in each fourth threaded hole. The fifth non-metallic screw also passes through the first rear vertical plate connector countersunk hole on the rear vertical plate connector. The plurality of first rear vertical plate connector countersunk holes are evenly distributed on the rear vertical plate connector. The rear vertical plate connector is fixedly connected to the rear vertical plate support member by the plurality of fifth non-metallic screws.

[0029] The rear vertical plate connector is also evenly provided with a plurality of second rear vertical plate connector countersunk holes along the z-axis direction, each of which is provided with a sixth non-metallic screw, and the plurality of sixth non-metallic screws insulate and fix the rear vertical plate to the rear vertical plate connector.

[0030] The rear vertical plate is also provided with a rear vertical plate connection terminal, and the rear vertical plate connection terminal is conductively fixedly connected to the rear vertical plate.

[0031] Specifically, the lower gantry support plate adjusts and fixes the height of the lower horizontal plate connector and the lower horizontal plate through the first adjusting bolt.

[0032] The upper gantry support plate is used to adjust and fix the height of the upper horizontal plate connecting member and the upper horizontal plate through the second adjusting bolt.

[0033] Preferably, the first lower horizontal pole plate connector countersunk hole and the second lower horizontal pole plate connector countersunk hole are evenly arranged on the front and rear sides of the lower horizontal pole plate connector, and the middle of the lower horizontal pole plate connector is provided with a first left opening passing through the upper and lower ends and a first right opening passing through the upper and lower ends in sequence from left to right, the first left opening does not contact the first lower horizontal pole plate connector countersunk hole or the second lower horizontal pole plate connector countersunk hole, and the first right opening does not contact the first lower horizontal pole plate connector countersunk hole or the second lower horizontal pole plate connector countersunk hole.

[0034] The first upper horizontal electrode plate connector countersunk hole and the second upper horizontal electrode plate connector countersunk hole are evenly arranged on the front and rear sides of the upper horizontal electrode plate connector, and a second left opening penetrating the upper and lower ends and a second right opening penetrating the upper and lower ends are sequentially arranged in the middle of the upper horizontal electrode plate connector from left to right, the second left opening does not contact the first upper horizontal electrode plate connector countersunk hole or the second upper horizontal electrode plate connector countersunk hole, and the second right opening does not contact the first upper horizontal electrode plate connector countersunk hole or the second upper horizontal electrode plate connector countersunk hole.

[0035] Preferably, the front vertical electrode plate support is a trapezoidal hollow structure with the bottom edge along the z-axis direction, the opposite edge of the bottom edge along the y-axis direction, and the other two sides inclined. Any inclined edge of the front vertical electrode plate support forms a triangular structure with the front vertical electrode plate and the mounting base plate.

[0036] The two inclined sides of the front vertical plate support are also respectively provided with a plurality of seventh slots which are hollow and open on one side.

[0037] The rear vertical plate support is a trapezoidal hollow structure with the bottom edge along the z-axis direction, the opposite edge of the bottom edge along the y-axis direction, and the other two sides inclined. Any inclined edge of the rear vertical plate support forms a triangular structure with the rear vertical plate and the mounting base.

[0038] The two inclined sides of the rear vertical plate support are respectively provided with a plurality of eighth slots which are hollow and open on one side.

[0039] Specifically, the lower part of the gantry-type front side plate is evenly provided with a plurality of second front side plate openings along the z-axis direction, each second front side plate opening is located on the same vertical line as each first front side plate opening, and a plurality of hollow ninth card slots with one side open are also provided on the left and right sides of the lower part of the gantry-type front side plate.

[0040] The lower part of the gantry-type rear side plate is evenly provided with a plurality of second rear side plate openings along the z-axis direction, each second rear side plate opening is located on the same vertical line as each first rear side plate opening, and a plurality of hollow tenth card slots with one side open are also provided on both sides of the lower part of the gantry-type rear side plate.

[0041] Preferably, the internal metal joints of the lower horizontal plate terminal, the upper horizontal plate terminal, the front vertical plate terminal and the rear vertical plate terminal are all chamfered, and processing burrs and defects are removed.

[0042] Preferably, the outer edge distance between the horizontal plate unit and the vertical plate unit ranges from 150 mm to 300 mm.

[0043] Compared with the prior art, the present invention has the following technical effects:

[0044] (I) The device of the present invention has the function of two-dimensional deflection and dispersion elimination of charged particle beams, consumes less energy, does not require the complex structure of the permanent magnet group or the particularly complex winding process of the electromagnet, and does not require an external mechanical power mechanism, and can realize the deflection scanning of charged particles in two-dimensional space.

[0045] (II) The device of the present invention adopts a two-level two-dimensional orthogonal electric field work deflection mode, which can realize the function of two-dimensional deflection and dispersion elimination for different types of charged particles. The device has good repeatability and will not cause energy loss to the charged particle beam.

[0046] (III) The device of the present invention only uses the electric field to do work on the charged particles during the entire de-dispersion process. Compared with other de-dispersion devices that use magnetic fields, the device of the present invention has a simple structure and can fully meet the requirements of repeated use. In addition, the voltage value of the DC voltage source can be adjusted to achieve deflection effects at different angles, thereby meeting the de-dispersion effect of charged particle beams at different transmission distances. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 It is a schematic diagram of the overall structure of the charged particle beam de-dispersion device of the present invention.

[0048] Figure 2 for Figure 1 Left side view of the mid-horizontal plate unit.

[0049] Figure 3 for Figure 1 Right side view of the vertical plate unit in the middle.

[0050] Figure 4 It is a structural schematic diagram of the lower horizontal plate connector of the present invention.

[0051] Figure 5 It is a structural schematic diagram of the upper horizontal plate connector of the present invention.

[0052] Figure 6 It is a schematic structural diagram of the front vertical plate connector of the present invention.

[0053] Figure 7 It is a schematic structural diagram of the rear vertical plate connector of the present invention.

[0054] The meanings of the numbers in the figure are: 1-installation base plate, 2-horizontal plate unit, 3-vertical plate unit.

[0055] 201-lower horizontal plate, 202-upper horizontal plate, 203-first space, 204-gantry front side plate, 205-gantry rear side plate, 206-horizontal plate cavity, 207-first front side plate opening, 208-first slot, 209-first rear side plate opening, 210-second slot, 211-lower gantry support plate, 212-first threaded hole, 213-first adjustment bolt, 214-lower horizontal plate connector, 215-first lower horizontal plate connector countersunk hole, 216-second lower horizontal plate connector countersunk hole, 217-first non-metallic screw, 218-lower horizontal plate terminal Sub, 219-third slot, 220-fourth slot, 221-upper gantry support plate, 222-second threaded hole, 223-second adjustment bolt, 224-upper horizontal plate connector, 225-first upper horizontal plate connector countersunk hole, 226-second upper horizontal plate connector countersunk hole, 227-second non-metallic screw, 228-upper horizontal plate terminal, 229-first left opening, 230-first right opening, 231-second left opening, 232-second right opening, 233-second front side plate opening, 234-ninth slot, 235-second rear side plate opening, 236-tenth slot.

[0056] 301-front vertical plate, 302-rear vertical plate, 303-second space, 304-front vertical plate support, 305-fifth slot, 306-front vertical plate connector, 307-third threaded hole, 308-third non-metallic screw, 309-first front vertical plate connector countersunk hole, 310-second front vertical plate connector countersunk hole, 311-fourth non-metallic screw, 312-front vertical plate terminal, 313-rear vertical plate support, 314-sixth slot, 315-rear vertical plate connector, 316-fourth threaded hole, 317-fifth non-metallic screw, 318-first rear vertical plate connector countersunk hole, 319-second rear vertical plate connector countersunk hole, 320-sixth non-metallic screw, 321-rear vertical plate terminal, 322-seventh slot, 323-eighth slot.

[0057] The specific contents of the present invention are further described in detail below in conjunction with the accompanying drawings and embodiments. DETAILED DESCRIPTION

[0058] It should be noted that, unless otherwise specified, all components and materials in the present invention are components and materials known in the prior art. For example, siasteel uses known siasteel, polyetheretherketone uses known polyetheretherketone, and polycarbonate uses known polycarbonate.

[0059] In the present invention, the Oxyz coordinate system is a rectangular coordinate system.

[0060] The charged particle beam de-dispersion device of the present invention is used for de-dispersion of different types of charged particles such as electrons, protons or positive and negative ions.

[0061] The charged particle beam de-dispersion device of the present invention is a device that utilizes a two-dimensional orthogonal electric field to reduce the dispersion effect of a charged particle beam during its propagation in a spatial magnetic field environment. It is particularly suitable for the long-distance transmission process of a charged particle beam and the working conditions where the angle between the charged particle beam and the magnetic field is large.

[0062] In accordance with the above technical scheme, specific embodiments of the present invention are given below. It should be noted that the present invention is not limited to the following specific embodiments, and all equivalent changes made on the basis of the technical scheme of this application fall within the protection scope of the present invention.

[0063] Embodiment 1:

[0064] This embodiment provides a charged particle beam de-dispersion device, such as Figure 1 As shown, it includes a mounting base plate 1 arranged in the Oxz plane, and a horizontal plate unit 2 and a vertical plate unit 3 are arranged on the mounting base plate 1 in sequence from left to right along the z-axis.

[0065] The horizontal plate unit 2 includes a pair of lower horizontal plates 201 and upper horizontal plates 202 which are arranged in parallel. The lower horizontal plates 201 and the upper horizontal plates 202 are both perpendicular to the y-axis. A first space 203 is formed between the lower horizontal plates 201 and the upper horizontal plates 202 .

[0066] The vertical plate unit 3 includes a pair of front vertical plates 301 and rear vertical plates 302 arranged in parallel. The front vertical plates 301 and rear vertical plates 302 are both perpendicular to the x-axis. A second space 303 is formed between the front vertical plates 301 and rear vertical plates 302 .

[0067] The central axis of the first space 203 in the z-axis direction coincides with the central axis of the second space 303 in the z-axis direction.

[0068] The distance between the lower horizontal plate 201 and the upper horizontal plate 202 in the y-axis direction can be adjusted.

[0069] like Figure 2 As shown, the horizontal pole plate unit 2 includes a gantry-type front side plate 204 arranged in the y-axis direction, and the bottom of the gantry-type front side plate 204 is fixedly connected to the top of the mounting base plate 1. The horizontal pole plate unit 2 also includes a gantry-type rear side plate 205 arranged in the y-axis direction, and the bottom of the gantry-type rear side plate 205 is fixedly connected to the top of the mounting base plate 1. The cavity surrounded by the gantry-type front side plate 204, the gantry-type rear side plate 205 and the mounting base plate 1 is the horizontal pole plate cavity 206.

[0070] A plurality of first front side plate openings 207 are evenly arranged in the middle of the gantry-type front side plate 204 along the z-axis direction, each first front side plate opening 207 passes through both sides of the gantry-type front side plate 204, and a first card slot 208 which is hollow and open at the top is provided at the bottom of each first front side plate opening 207.

[0071] A plurality of first rear side plate openings 209 are evenly arranged in the middle of the gantry-type rear side plate 205 along the z-axis direction, and each first rear side plate opening 209 passes through both sides of the gantry-type rear side plate 205. A second card slot 210 which is hollow and open at the top is provided at the bottom of each first rear side plate opening 209, and the second card slot 210 and the first card slot 208 are located on the same horizontal line.

[0072] A plurality of lower gantry support plates 211 are arranged in sequence from left to right along the z-axis direction inside the horizontal plate cavity 206 , one end of each lower gantry support plate 211 is fitted and fixedly connected to the first slot 208 , and the other end of each lower gantry support plate 211 is fitted and fixedly connected to the second slot 210 .

[0073] A plurality of first threaded holes 212 penetrating the upper and lower ends are evenly arranged on the lower gantry support plate 211, and a first adjustment bolt 213 is arranged in each first threaded hole 212. The first adjustment bolt 213 also passes through the first lower horizontal pole plate connector countersunk hole 215 on the lower horizontal pole plate connector 214 arranged at the top along the z-axis direction. The plurality of first lower horizontal pole plate connector countersunk holes 215 are evenly distributed on the lower horizontal pole plate connector 214, and each first lower horizontal pole plate connector countersunk hole 215 passes through the upper and lower ends of the lower horizontal pole plate connector 214. The lower horizontal pole plate connector 214 is fixed to the lower gantry support plate 211 by the plurality of first adjustment bolts 213, and a height adjustment gap is reserved between the lower horizontal pole plate connector 214 and the lower gantry support plate 211.

[0074] The lower horizontal pole plate connector 214 is also evenly provided with a plurality of second lower horizontal pole plate connector countersunk holes 216 that pass through the upper and lower ends. A first non-metallic screw 217 is provided in each second lower horizontal pole plate connector countersunk hole 216. The plurality of first non-metallic screws 217 insulate and fix the lower horizontal pole plate 201 to the lower horizontal pole plate connector 214. The top of the lower horizontal pole plate connector 214 contacts the bottom of the lower horizontal pole plate 201.

[0075] The lower horizontal plate 201 is also provided with a lower horizontal plate connection terminal 218 , and the lower horizontal plate connection terminal 218 is conductively fixedly connected to the lower horizontal plate 201 .

[0076] A plurality of hollow and top-open third card slots 219 are evenly arranged on the top of the gantry-type front side plate 204 along the z-axis direction, and the third card slots 219 pass through both sides of the gantry-type front side plate 204. A plurality of hollow and top-open fourth card slots 220 are evenly arranged on the top of the gantry-type rear side plate 205 along the z-axis direction, and each fourth card slot 220 passes through both sides of the gantry-type rear side plate 205, and the fourth card slots 220 and the third card slots 219 are located on the same horizontal line.

[0077] A plurality of upper gantry support plates 221 are arranged in sequence from left to right along the z-axis direction inside the horizontal plate cavity 206 , one end of each upper gantry support plate 221 is fitted and fixedly connected to the third slot 219 , and the other end of each upper gantry support plate 221 is fitted and fixedly connected to the fourth slot 220 .

[0078] A plurality of second threaded holes 222 penetrating the upper and lower ends are evenly arranged on the upper gantry support plate 221, and a second adjustment bolt 223 is arranged in each second threaded hole 222. The second adjustment bolt 223 also passes through the first upper horizontal pole plate connector countersunk hole 225 on the upper horizontal pole plate connector 224 arranged at the bottom along the z-axis direction. A plurality of first upper horizontal pole plate connector countersunk holes 225 are evenly distributed on the upper horizontal pole plate connector 224, and each first upper horizontal pole plate connector countersunk hole 225 penetrates the upper and lower ends of the upper horizontal pole plate connector 224. The upper horizontal pole plate connector 224 is fixed to the upper gantry support plate 221 by a plurality of second adjustment bolts 223, and a height adjustment gap is reserved between the upper horizontal pole plate connector 224 and the upper gantry support plate 221.

[0079] The upper horizontal pole plate connector 224 is also evenly provided with a plurality of second upper horizontal pole plate connector countersunk holes 226 that pass through the upper and lower ends. A second non-metallic screw 227 is provided in each second upper horizontal pole plate connector countersunk hole 226. The plurality of second non-metallic screws 227 insulate and fix the upper horizontal pole plate 202 to the upper horizontal pole plate connector 224. The bottom of the upper horizontal pole plate connector 224 contacts the top of the upper horizontal pole plate 202.

[0080] An upper horizontal plate connecting terminal 228 is also provided on the upper horizontal plate 202 , and the upper horizontal plate connecting terminal 228 is conductively fixedly connected to the upper horizontal plate 202 .

[0081] like Figure 3 As shown, the vertical plate unit 3 includes a plurality of front vertical plate support members 304 arranged in the y-axis direction, and the plurality of front vertical plate support members 304 are distributed along the z-axis direction. The bottom of each front vertical plate support member 304 is fixedly connected to the top of the mounting base plate 1, and the middle and top of each front vertical plate support member 304 are provided with a plurality of fifth card slots 305 which are hollow and open on the outer side, and each fifth card slot 305 is fitted with a front vertical plate connector 306 arranged along the z-axis direction. 304 is also provided with a third threaded hole 307 at the fifth slot 305, and a third non-metallic screw 308 is provided in each third threaded hole 307. The third non-metallic screw 308 also passes through the first front vertical pole plate connector countersunk hole 309 on the front vertical pole plate connector 306. Multiple first front vertical pole plate connector countersunk holes 309 are evenly distributed on the front vertical pole plate connector 306. The front vertical pole plate connector 306 is fixedly connected to the front vertical pole plate support 304 by multiple third non-metallic screws 308.

[0082] like Figure 6As shown, the front vertical plate connector 306 is also evenly provided with a plurality of second front vertical plate connector counterbores 310 along the z-axis direction, and each second front vertical plate connector counterbores 310 is provided with a fourth non-metallic screw 311, and the plurality of fourth non-metallic screws 311 insulate and fix the front vertical plate 301 to the front vertical plate connector 306.

[0083] A front vertical plate connection terminal 312 is also provided on the front vertical plate 301 , and the front vertical plate connection terminal 312 is conductively fixedly connected to the front vertical plate 301 .

[0084] The vertical plate unit 3 includes a plurality of rear vertical plate support members 313 arranged in the y-axis direction, and the plurality of rear vertical plate support members 313 are distributed along the z-axis direction. The bottom of each rear vertical plate support member 313 is fixedly connected to the top of the mounting base plate 1. The middle and top of each rear vertical plate support member 313 are provided with a plurality of sixth card slots 314 which are hollow and open on the outer side. Each sixth card slot 314 is fitted with a rear vertical plate connector 315 arranged along the z-axis direction. A fourth threaded hole 316 is further provided at the sixth slot 314, and a fifth non-metallic screw 317 is provided in each of the fourth threaded holes 316. The fifth non-metallic screw 317 also passes through the first rear vertical plate connector countersunk hole 318 on the rear vertical plate connector 315. A plurality of first rear vertical plate connector countersunk holes 318 are evenly distributed on the rear vertical plate connector 315. The rear vertical plate connector 315 is fixedly connected to the rear vertical plate support 313 by the plurality of fifth non-metallic screws 317.

[0085] like Figure 7 As shown, a plurality of second rear vertical plate connector counterbores 319 are evenly arranged on the rear vertical plate connector 315 along the z-axis direction, and a sixth non-metallic screw 320 is arranged in each second rear vertical plate connector counterbore 319. The plurality of sixth non-metallic screws 320 insulate and fix the rear vertical plate 302 to the rear vertical plate connector 315.

[0086] A rear vertical plate connection terminal 321 is also provided on the rear vertical plate 302 , and the rear vertical plate connection terminal 321 is conductively fixedly connected to the rear vertical plate 302 .

[0087] As a preferred solution of this embodiment, the lower gantry support plate 211 adjusts and fixes the height of the lower horizontal plate connector 214 and the lower horizontal plate 201 through the first adjustment bolt 213 .

[0088] The upper gantry support plate 221 adjusts and fixes the height of the upper horizontal plate connector 224 and the upper horizontal plate 202 through the second adjustment bolt 223 .

[0089] As a preferred solution of this embodiment, Figure 4 As shown, the first lower horizontal pole plate connector countersunk hole 215 and the second lower horizontal pole plate connector countersunk hole 216 are evenly arranged on the front and rear sides of the lower horizontal pole plate connector 214, and the middle of the lower horizontal pole plate connector 214 is provided with a first left opening 229 passing through the upper and lower ends and a first right opening 230 passing through the upper and lower ends in sequence from left to right. The first left opening 229 does not contact the first lower horizontal pole plate connector countersunk hole 215 or the second lower horizontal pole plate connector countersunk hole 216, and the first right opening 230 does not contact the first lower horizontal pole plate connector countersunk hole 215 or the second lower horizontal pole plate connector countersunk hole 216.

[0090] like Figure 5 As shown, the first upper horizontal pole plate connector countersunk hole 225 and the second upper horizontal pole plate connector countersunk hole 226 are evenly arranged on the front and rear sides of the upper horizontal pole plate connector 224, and the middle of the upper horizontal pole plate connector 224 is provided with a second left opening 231 passing through the upper and lower ends and a second right opening 232 passing through the upper and lower ends in sequence from left to right. The second left opening 231 does not contact the first upper horizontal pole plate connector countersunk hole 225 or the second upper horizontal pole plate connector countersunk hole 226, and the second right opening 232 does not contact the first upper horizontal pole plate connector countersunk hole 225 or the second upper horizontal pole plate connector countersunk hole 226.

[0091] As a preferred solution of this embodiment, the front vertical electrode plate support 304 is a trapezoidal hollow structure with the bottom edge along the z-axis direction, the opposite edge of the bottom edge along the y-axis direction, and the other two sides inclined. Any one of the inclined edges of the front vertical electrode plate support 304 forms a triangular structure with the front vertical electrode 301 and the mounting base plate 1.

[0092] The two inclined sides of the front vertical plate support 304 are respectively provided with a plurality of seventh slots 322 which are hollow and open on one side.

[0093] The rear vertical plate support 313 is a trapezoidal hollow structure with the bottom edge along the z-axis direction, the opposite edge of the bottom edge along the y-axis direction, and the other two sides inclined. Any inclined edge of the rear vertical plate support 313 forms a triangular structure with the rear vertical plate 302 and the mounting base 1.

[0094] The two inclined sides of the rear vertical plate support 313 are respectively provided with a plurality of eighth slots 323 which are hollow and open on one side.

[0095] As a preferred solution of this embodiment, a plurality of second front side plate openings 233 are evenly arranged at the lower portion of the gantry-type front side plate 204 along the z-axis direction, each second front side plate opening 233 is located on the same vertical line as each first front side plate opening 207, and a plurality of ninth card slots 234 which are hollow and open on one side are also arranged on the left and right sides of the lower portion of the gantry-type front side plate 204.

[0096] The lower part of the gantry-type rear side plate 205 is evenly provided with a plurality of second rear side plate openings 235 along the z-axis direction, and each second rear side plate opening 235 is located on the same vertical line as each first rear side plate opening 209. The lower part of the gantry-type rear side plate 205 is also provided with a plurality of hollow tenth card slots 236 with one side open on both sides.

[0097] As a preferred solution of this embodiment, the internal metal joints of the lower horizontal plate terminal 218, the upper horizontal plate terminal 228, the front vertical plate terminal 312 and the rear vertical plate terminal 321 are all chamfered, and the processing burrs and defects are removed to avoid tip discharge of the terminals.

[0098] As a preferred solution of this embodiment, the outer edge distance between the horizontal plate unit 2 and the vertical plate unit 3 ranges from 150 mm to 300 mm.

[0099] In this embodiment, the number of the first front side plate openings 207 , the number of the first rear side plate openings 209 , the number of the second front side plate openings 233 , and the number of the second rear side plate openings 235 are all two.

[0100] In this embodiment, the number of the first card slots 208 , the number of the second card slots 210 , the number of the third card slots 219 , and the number of the fourth card slots 220 are all two.

[0101] In this embodiment, the number of the lower gantry support plates 211 , the number of the upper gantry support plates 221 , the number of the front vertical plate support members 304 , and the number of the rear vertical plate support members 313 are all 2.

[0102] In this embodiment, the number of the first threaded holes 212, the number of the first adjustment bolts 213, the number of the first lower horizontal plate connector countersunk holes 215, the number of the second threaded holes 222, the number of the second adjustment bolts 223 and the number of the first upper horizontal plate connector countersunk holes 225 are all 4.

[0103] In this embodiment, the number of the second lower horizontal plate connector countersunk holes 216 , the number of the first non-metallic screws 217 , the number of the second upper horizontal plate connector countersunk holes 226 , and the number of the second non-metallic screws 227 are all six.

[0104] In this embodiment, the number of the fifth slots 305 respectively provided in the middle and the top of each front vertical plate support 304 and the number of the sixth slots 314 respectively provided in the middle and the top of each rear vertical plate support 313 are both 1.

[0105] In this embodiment, the number of the second front vertical plate connector countersunk holes 310 and the number of the second rear vertical plate connector countersunk holes 319 are both four.

[0106] In this embodiment, the number of the seventh card slots 322 is 1 or 2 and the number of the eighth card slots 323 is 1 or 2.

[0107] In this embodiment, the number of the ninth slots 234 respectively provided on the left and right sides of the lower portion of the gantry-type front side plate 204 and the number of the tenth slots 236 respectively provided on the two sides of the lower portion of the gantry-type rear side plate 205 are both 1.

[0108] In this embodiment, in order to ensure that the electric field formed between the plates has sufficient uniformity, the plates themselves are required to have good surface roughness and flatness, and the horizontal group of plates and the vertical group of plates are required to have high parallelism.

[0109] In this embodiment, the horizontal plate unit 2 is provided with a lower horizontal plate 201 and an upper horizontal plate 202. After the power is turned on, the following is formed: Figure 1 The electric field in the y direction in the vertical plate unit 3 is formed by changing the external DC power supply. The front vertical plate 301 and the rear vertical plate 302 are provided in the vertical plate unit 3. After the power is turned on, the electric field is formed as follows Figure 1 The electric field in the x direction in the image can be adjusted by changing the external DC power supply. Through the combined adjustment of the two-dimensional orthogonal electric field and the work done by the electric field on the charged particle beam, the pre-deflection of the beam is completed, realizing the de-dispersion effect of the charged particle beam in the process of transmission and reaching the target.

[0110] In this embodiment, the gantry front side plate 204, the gantry rear side plate 205, the lower gantry support plate 211, the upper gantry support plate 221, the front vertical pole plate support 304 and the rear vertical pole plate support 313 are all made of Saigang, polyetheretherketone or polycarbonate, which can not only have sufficient mechanical strength to avoid structural instability and deformation, but also reduce the mass of the system.

[0111] In this embodiment, the lower horizontal plate connector 214, the upper horizontal plate connector 224, the front vertical plate connector 306 and the rear vertical plate connector 315 are all made of nylon or phenolic resin, which can not only ensure the insulation performance, but also the material with low thermal expansion coefficient can reduce the deformation of the plate caused by the temperature change caused by some charged particles with a large divergence angle hitting the plate.

[0112] In this embodiment, the lower horizontal plate 201, the upper horizontal plate 202, the front vertical plate 301 and the rear vertical plate 302 are all made of gold, silver, copper or aluminum with burrs and defects removed; low resistivity materials are used to reduce the heat power consumption generated when the plate voltage is adjusted. Burrs and defects are removed during the processing to avoid tip discharge of the plate.

[0113] In this embodiment, the first non-metallic screw 217 , the second non-metallic screw 227 , the third non-metallic screw 308 , the fourth non-metallic screw 311 , the fifth non-metallic screw 317 and the sixth non-metallic screw 320 are all made of phenolic resin or glass fiber.

[0114] When the charged particle beam de-dispersion device of the present invention is actually used:

[0115] In the first stage, the lower horizontal plate connection terminal 218, the upper horizontal plate connection terminal 228, the front vertical plate connection terminal 312 and the rear vertical plate connection terminal 321 are connected to the power source respectively by using cables.

[0116] In the second stage, in combination with the transmission distance, the basic properties of charged particles and the requirements for dispersion elimination, the voltage between the lower horizontal plate 201 and the upper horizontal plate 202 and between the front vertical plate 301 and the rear vertical plate 302 is set to form the required uniform two-dimensional orthogonal electric field.

[0117] In the third stage, the charged particle beam enters the two-dimensional orthogonal electric field, and the work done by the electric field on the charged particles is used to achieve the predetermined deflection of the charged particle beam, thereby achieving the effect of de-dispersion.

Claims

1. A charged particle beam de-dispersion device, comprising a mounting base plate (1) arranged in an Oxz plane, characterized in that: A horizontal plate unit (2) and a vertical plate unit (3) are arranged on the mounting base plate (1) in sequence from left to right along the z-axis; The horizontal plate unit (2) comprises a pair of lower horizontal plates (201) and upper horizontal plates (202) arranged in parallel, the lower horizontal plates (201) and the upper horizontal plates (202) are both perpendicular to the y-axis, and a first space (203) is provided between the lower horizontal plates (201) and the upper horizontal plates (202); The vertical plate unit (3) comprises a pair of front vertical plates (301) and rear vertical plates (302) arranged in parallel, the front vertical plates (301) and the rear vertical plates (302) are both perpendicular to the x-axis, and a second space (303) is provided between the front vertical plates (301) and the rear vertical plates (302); The central axis of the first space (203) in the z-axis direction coincides with the central axis of the second space (303) in the z-axis direction.

2. The charged particle beam dedispersion device according to claim 1, characterized in that: The spacing between the lower horizontal electrode plate (201) and the upper horizontal electrode plate (202) in the y-axis direction can be adjusted.

3. The charged particle beam de-dispersion device according to claim 1, characterized in that: The horizontal plate unit (2) comprises a gantry-type front side plate (204) arranged in the y-axis direction, the bottom of the gantry-type front side plate (204) is fixedly connected to the top of the installation base plate (1), and the horizontal plate unit (2) further comprises a gantry-type rear side plate (205) arranged in the y-axis direction, the bottom of the gantry-type rear side plate (205) is fixedly connected to the top of the installation base plate (1), and the cavity surrounded by the gantry-type front side plate (204), the gantry-type rear side plate (205) and the installation base plate (1) is a horizontal plate cavity (206); A plurality of first front side plate openings (207) are evenly arranged in the middle of the gantry-type front side plate (204) along the z-axis direction, each first front side plate opening (207) passes through two sides of the gantry-type front side plate (204), and a first card slot (208) which is hollow and open at the top is provided at the bottom of each first front side plate opening (207); A plurality of first rear side plate openings (209) are evenly arranged in the middle of the gantry-type rear side plate (205) along the z-axis direction, each first rear side plate opening (209) passes through two sides of the gantry-type rear side plate (205), and a second card slot (210) which is hollow and open at the top is opened at the bottom of each first rear side plate opening (209), and the second card slot (210) and the first card slot (208) are located on the same horizontal line; A plurality of lower gantry-type support plates (211) are sequentially arranged inside the horizontal plate cavity (206) from left to right along the z-axis direction, one end of each lower gantry-type support plate (211) is fitted and fixedly connected to the first slot (208), and the other end of each lower gantry-type support plate (211) is fitted and fixedly connected to the second slot (210); The lower gantry support plate (211) is evenly provided with a plurality of first threaded holes (212) penetrating the upper and lower ends, each first threaded hole (212) is provided with a first adjustment bolt (213), and the first adjustment bolt (213) also passes through a first lower horizontal pole plate connecting member countersunk hole (215) on a lower horizontal pole plate connecting member (214) arranged at the top along the z-axis direction, and the plurality of first lower horizontal pole plate connecting member countersunk holes (215) are evenly distributed on the lower horizontal pole plate connecting member (214), and each first lower horizontal pole plate connecting member countersunk hole (215) passes through the upper and lower ends of the lower horizontal pole plate connecting member (214), and the lower horizontal pole plate connecting member (214) is fixed to the lower gantry support plate (211) by the plurality of first adjustment bolts (213), and a height adjustment gap is reserved between the lower horizontal pole plate connecting member (214) and the lower gantry support plate (211); The lower horizontal plate connector (214) is also evenly provided with a plurality of second lower horizontal plate connector countersunk holes (216) penetrating the upper and lower ends, and each second lower horizontal plate connector countersunk hole (216) is provided with a first non-metallic screw (217). The plurality of first non-metallic screws (217) insulate and fix the lower horizontal plate (201) to the lower horizontal plate connector (214), and the top of the lower horizontal plate connector (214) contacts the bottom of the lower horizontal plate (201); The lower horizontal plate (201) is also provided with a lower horizontal plate connection terminal (218), and the lower horizontal plate connection terminal (218) is conductively fixedly connected to the lower horizontal plate (201); The top of the gantry-type front side plate (204) is evenly provided with a plurality of third card slots (219) which are hollow and open at the top along the z-axis direction, and the third card slots (219) pass through both sides of the gantry-type front side plate (204); the top of the gantry-type rear side plate (205) is evenly provided with a plurality of fourth card slots (220) which are hollow and open at the top along the z-axis direction, and each fourth card slot (220) passes through both sides of the gantry-type rear side plate (205), and the fourth card slots (220) and the third card slots (219) are located on the same horizontal line; A plurality of upper gantry-type support plates (221) are sequentially arranged inside the horizontal plate cavity (206) from left to right along the z-axis direction, one end of each upper gantry-type support plate (221) is fitted and fixedly connected to the third slot (219), and the other end of each upper gantry-type support plate (221) is fitted and fixedly connected to the fourth slot (220); The upper gantry support plate (221) is evenly provided with a plurality of second threaded holes (222) penetrating the upper and lower ends, each second threaded hole (222) is provided with a second adjustment bolt (223), and the second adjustment bolt (223) also passes through a first upper horizontal pole plate connecting member countersunk hole (225) on an upper horizontal pole plate connecting member (224) arranged at the bottom along the z-axis direction, and the plurality of first upper horizontal pole plate connecting member countersunk holes (225) are evenly distributed on the upper horizontal pole plate connecting member (224), and each first upper horizontal pole plate connecting member countersunk hole (225) passes through the upper and lower ends of the upper horizontal pole plate connecting member (224), and the upper horizontal pole plate connecting member (224) is fixed to the upper gantry support plate (221) by the plurality of second adjustment bolts (223), and a height adjustment gap is reserved between the upper horizontal pole plate connecting member (224) and the upper gantry support plate (221); The upper horizontal plate connector (224) is also evenly provided with a plurality of second upper horizontal plate connector countersunk holes (226) penetrating the upper and lower ends, and each second upper horizontal plate connector countersunk hole (226) is provided with a second non-metallic screw (227). The plurality of second non-metallic screws (227) insulate and fix the upper horizontal plate (202) to the upper horizontal plate connector (224), and the bottom of the upper horizontal plate connector (224) is in contact with the top of the upper horizontal plate (202); The upper horizontal plate (202) is also provided with an upper horizontal plate connection terminal (228), and the upper horizontal plate connection terminal (228) is conductively fixedly connected to the upper horizontal plate (202).

4. The charged particle beam dedispersion device according to claim 1, characterized in that: The vertical plate unit (3) comprises a plurality of front vertical plate support members (304) arranged in the y-axis direction, the plurality of front vertical plate support members (304) are distributed along the z-axis direction, the bottom of each front vertical plate support member (304) is fixedly connected to the top of the mounting base plate (1), the middle and top of each front vertical plate support member (304) are provided with a plurality of fifth card slots (305) which are hollow and have open outer edges, each fifth card slot (305) is fitted with a front vertical plate connector (306) arranged along the z-axis direction, and the front vertical plate support member (304) is fixedly connected to the top of the mounting base plate (1). ) A third threaded hole (307) is also provided at the fifth slot (305), a third non-metallic screw (308) is provided in each third threaded hole (307), the third non-metallic screw (308) also passes through a first front vertical plate connecting member countersunk hole (309) on the front vertical plate connecting member (306), a plurality of first front vertical plate connecting member countersunk holes (309) are evenly distributed on the front vertical plate connecting member (306), and the front vertical plate connecting member (306) is fixedly connected to the front vertical plate supporting member (304) by the plurality of third non-metallic screws (308); The front vertical plate connector (306) is also provided with a plurality of second front vertical plate connector counterbores (310) evenly arranged along the z-axis direction, each second front vertical plate connector counterbores (310) is provided with a fourth non-metallic screw (311), and the plurality of fourth non-metallic screws (311) insulate and fix the front vertical plate (301) to the front vertical plate connector (306); The front vertical plate (301) is also provided with a front vertical plate connection terminal (312), and the front vertical plate connection terminal (312) is conductively fixedly connected to the front vertical plate (301); The vertical plate unit (3) comprises a plurality of rear vertical plate support members (313) arranged in the y-axis direction, the plurality of rear vertical plate support members (313) are distributed along the z-axis direction, the bottom of each rear vertical plate support member (313) is fixedly connected to the top of the mounting base plate (1), the middle and top of each rear vertical plate support member (313) are provided with a plurality of sixth card slots (314) which are hollow and have open outer edges, each sixth card slot (314) is fitted with a rear vertical plate connector (315) arranged along the z-axis direction, and the rear vertical plate support member (313) is fixedly connected to the top of the mounting base plate (1). ) A fourth threaded hole (316) is also provided at the sixth slot (314), a fifth non-metallic screw (317) is provided in each fourth threaded hole (316), the fifth non-metallic screw (317) also passes through a first rear vertical plate connector countersunk hole (318) on the rear vertical plate connector (315), a plurality of first rear vertical plate connector countersunk holes (318) are evenly distributed on the rear vertical plate connector (315), and the rear vertical plate connector (315) is fixedly connected to the rear vertical plate support member (313) by the plurality of fifth non-metallic screws (317); The rear vertical plate connector (315) is also evenly provided with a plurality of second rear vertical plate connector counterbores (319) along the z-axis direction, and a sixth non-metallic screw (320) is provided in each second rear vertical plate connector counterbore (319). The plurality of sixth non-metallic screws (320) insulate and fix the rear vertical plate (302) to the rear vertical plate connector (315); The rear vertical plate (302) is also provided with a rear vertical plate connection terminal (321), and the rear vertical plate connection terminal (321) is conductively fixedly connected to the rear vertical plate (302).

5. The charged particle beam dedispersion device according to claim 1, characterized in that: The lower gantry support plate (211) adjusts and fixes the height of the lower horizontal plate connecting member (214) and the lower horizontal plate (201) through the first adjustment bolt (213); The upper gantry support plate (221) adjusts and fixes the height of the upper horizontal pole plate connecting member (224) and the upper horizontal pole plate (202) through the second adjustment bolt (223).

6. The charged particle beam dedispersion device according to claim 1, characterized in that: The first lower horizontal plate connector countersunk hole (215) and the second lower horizontal plate connector countersunk hole (216) are evenly arranged on the front and rear sides of the lower horizontal plate connector (214); the middle of the lower horizontal plate connector (214) is provided with a first left opening (229) passing through the upper and lower ends and a first right opening (230) passing through the upper and lower ends in sequence from left to right; the first left opening (229) does not contact the first lower horizontal plate connector countersunk hole (215) or the second lower horizontal plate connector countersunk hole (216); the first right opening (230) does not contact the first lower horizontal plate connector countersunk hole (215) or the second lower horizontal plate connector countersunk hole (216); The first upper horizontal plate connecting member countersunk hole (225) and the second upper horizontal plate connecting member countersunk hole (226) are evenly arranged on the front and rear sides of the upper horizontal plate connecting member (224); a second left opening (231) penetrating the upper and lower ends and a second right opening (232) penetrating the upper and lower ends are sequentially arranged in the middle of the upper horizontal plate connecting member (224) from left to right; the second left opening (231) does not contact the first upper horizontal plate connecting member countersunk hole (225) or the second upper horizontal plate connecting member countersunk hole (226); and the second right opening (232) does not contact the first upper horizontal plate connecting member countersunk hole (225) or the second upper horizontal plate connecting member countersunk hole (226).

7. The charged particle beam dedispersion device according to claim 1, characterized in that: The front vertical plate support member (304) is a trapezoidal hollow structure with a bottom edge along the z-axis direction, an opposite side of the bottom edge along the y-axis direction, and the other two sides inclined. Any inclined side of the front vertical plate support member (304) forms a triangular structure with the front vertical plate (301) and the mounting base plate (1); The two inclined sides of the front vertical plate support (304) are also respectively provided with a plurality of seventh slots (322) which are hollow and open on one side; The rear vertical plate support member (313) is a trapezoidal hollow structure with a bottom edge along the z-axis direction, an opposite side of the bottom edge along the y-axis direction, and the other two sides inclined. Any inclined side of the rear vertical plate support member (313) forms a triangular structure with the rear vertical plate (302) and the mounting base plate (1); The two inclined sides of the rear vertical plate support (313) are also respectively provided with a plurality of eighth slots (323) which are hollow and open on one side.

8. The charged particle beam dedispersion device according to claim 1, characterized in that: The lower part of the gantry-type front side plate (204) is evenly provided with a plurality of second front side plate openings (233) along the z-axis direction, each second front side plate opening (233) and each first front side plate opening (207) are located on the same vertical line, and the left and right sides of the lower part of the gantry-type front side plate (204) are also provided with a plurality of ninth slots (234) which are hollow and open on one side; The lower part of the gantry-type rear side plate (205) is evenly provided with a plurality of second rear side plate openings (235) along the z-axis direction, each second rear side plate opening (235) and each first rear side plate opening (209) are located on the same vertical line, and a plurality of hollow tenth card slots (236) with one side open are also provided on both sides of the lower part of the gantry-type rear side plate (205).

9. The charged particle beam dedispersion device according to claim 1, characterized in that: The internal metal joints of the lower horizontal plate terminal (218), the upper horizontal plate terminal (228), the front vertical plate terminal (312) and the rear vertical plate terminal (321) are all chamfered and have their burrs and flaws removed.

10. The charged particle beam dedispersion device according to claim 1, characterized in that: The outer edge distance between the horizontal plate unit (2) and the vertical plate unit (3) ranges from 150 mm to 300 mm.

Images