Method for reducing gas adsorption in vacuum system

Abstract

The invention relates to the field of vacuum device structures, and discloses a method for reducing gas adsorption in a vacuum system, which comprises the following steps: building a vacuum system component, adding a discharge plate in a building plate of the vacuum system component, wrapping a heating shell outside the vacuum system component, and cleaning the vacuum system component. Surface coating is carried out in the vacuum system assembly, a getter material and an adsorption material are installed and inserted in the vacuum system assembly, gas is adsorbed, and a discharge plate is activated, so that discharge is carried out in the vacuum system assembly, internal gas is removed, the vacuum system assembly is heated through a heating shell, and the adsorbed gas is released; gas in the vacuum system assembly is discharged through discharging and heating, the gas is adsorbed through the adsorption material and the getter material, gas adsorption sites are reduced through the materials, and the adsorption condition of the gas in the vacuum system is reduced.

Description

Technical Field

[0001] The present invention relates to the field of vacuum device structures, and more particularly to a method for reducing gas adsorption in a vacuum system. Background Art

[0002] Vacuum means the state of gas below one atmospheric pressure in a given space, which is a physical phenomenon. In the "void", sound cannot be transmitted because there is no medium, but the transmission of electromagnetic waves is not affected by vacuum; in fact, in vacuum technology, vacuum refers to the atmosphere. When part of the material inside a specific space is discharged, making its pressure less than one standard atmospheric pressure, we generally call this space a vacuum or vacuum state. Vacuum often uses Pascal or Torr as the unit of pressure; in the natural environment, only outer space can be called the space closest to vacuum.

[0003] In the field of vacuum technology, the adsorption of gas in vacuum systems has always been an important and challenging problem. Gas adsorption will lead to a decrease in vacuum degree, affect the performance and stability of the vacuum system, and limit its application in scientific research, industrial production and other fields. Therefore, a method to reduce gas adsorption in vacuum systems is proposed. Summary of the invention

[0004] In order to overcome the deficiencies of the prior art, the present invention provides a method for reducing gas adsorption in a vacuum system, which has the advantage of more precise operation.

[0005] To achieve the above object, the present invention provides the following technical solution: A method for reducing gas adsorption in a vacuum system, comprising the following steps:

[0006] S1. Build a vacuum system component, add a discharge plate inside the vacuum system component building plate, and wrap a heating shell outside the vacuum system component;

[0007] S2. Clean the vacuum system components and apply surface coating inside the vacuum system components;

[0008] S3, installing and inserting getter materials and adsorbent materials inside the vacuum system components to adsorb the gas;

[0009] S4, activating the discharge plate to discharge the inside of the vacuum system component to remove the internal gas;

[0010] S5. The vacuum system components are heated by heating the housing to release the adsorbed gas.

[0011] As a preferred technical solution of the present invention, the vacuum system components in S1 are constructed by building a building plate, and the building plate is a low-adsorption material. The low-adsorption material is composed of a high-density stainless steel material. The high-density stainless steel material has a tight internal molecular structure and a small gas molecule adsorption space, thereby reducing gas adsorption.

[0012] As a preferred technical solution of the present invention, the vacuum system component hook in S1 is composed of a building plate, a discharge plate is arranged inside the building plate, and a discharge plate is added inside the building plate during the manufacturing process of the building plate. The discharge plate has a mesh structure and is arranged inside the building plate. The discharge plate is located at the bottom of the building plate and has a connection port, which is connected to an external power-on structure.

[0013] As a preferred technical solution of the present invention, the wrapping heating shell in S1 is arranged outside the vacuum system component, a heating structure is arranged inside the wrapping heating shell, the heating structure is attached to the outside of the vacuum system component, and an insulating shell is arranged outside the heating mechanism. The insulating shell makes the heating more uniform, avoids heat loss and makes the heating more uniform.

[0014] As a preferred technical solution of the present invention, the vacuum system components are cleaned in S2 to remove impurities and adsorbed objects attached to the vacuum system components, thereby improving the surface cleanliness of the vacuum system components and reducing the gas adsorption space.

[0015] As a preferred technical solution of the present invention, in S2, the inner surface of the vacuum system component is coated, and the coating is added to the inner surface of the vacuum system component by electroplating, and a passivation layer is added inside the vacuum system component to reduce gas attachment sites, thereby reducing gas adsorption.

[0016] As a preferred technical solution of the present invention, the S3 is a getter material added inside the vacuum system component, and the getter material is zirconium-aluminum alloy or barium-lithium alloy. The zirconium-aluminum alloy or barium-lithium alloy can chemically react with specific gases, thereby consuming the gas inside the vacuum system component and reducing the adsorbed gas content.

[0017] As a preferred technical solution of the present invention, the adsorption materials added by S3 inside the vacuum system component are activated carbon and organic metal. The activated carbon captures gas molecules in the air, and the organic metal is a metal-organic framework compound that can adsorb free gas molecules inside the vacuum system component.

[0018] As a preferred technical solution of the present invention, the S4 activates the discharge plate, and the discharge plate realizes the formation of a discharge environment inside the vacuum system component. The discharge environment forms ions inside the vacuum system component, and the ions migrate inside the vacuum system component to activate the gas inside the vacuum system component, so that the gas molecules are separated from the vacuum system component and the adsorption material is used to perform gas adsorption.

[0019] As a preferred technical solution of the present invention, in S5, the vacuum system component is heated to intensify the molecular movement inside the vacuum system component, thereby increasing the molecular gap inside the vacuum system component, thereby facilitating the movement of gas molecules inside the vacuum system component, thereby performing adsorption and removal.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. The building plate of the vacuum system is made of low-adsorption material, which is made of high-density stainless steel. The internal molecular structure of high-density stainless steel is tight, and the adsorption space of gas molecules is small, thereby reducing gas adsorption.

[0022] 2. Getter material and adsorbent material are arranged inside the vacuum system. The getter material reacts with the gas to produce a stable chemical structure, and the adsorbent material adsorbs the free gas.

[0023] 3. The ion is formed by the power generation plate, so that the gas is separated from the vacuum system components, the vacuum system components are heated, and the gas separation is intensified. Then, the gas is consumed by the getter material and the adsorbent material to reduce the adsorbed gas inside the vacuum system components. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the process of the present invention. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] like Figure 1 As shown, the present invention provides a method for reducing gas adsorption in a vacuum system, comprising the following steps:

[0027] S1. Build a vacuum system component, add a discharge plate inside the vacuum system component building plate, and wrap a heating shell outside the vacuum system component;

[0028] S2. Clean the vacuum system components and apply surface coating inside the vacuum system components;

[0029] S3, installing and inserting getter materials and adsorbent materials inside the vacuum system components to adsorb the gas;

[0030] S4, activating the discharge plate to discharge the inside of the vacuum system component to remove the internal gas;

[0031] S5. The vacuum system components are heated by heating the housing to release the adsorbed gas.

[0032] The vacuum system components in S1 are constructed by building a building plate, the building plate is a low-adsorption material, and the low-adsorption material is composed of a high-density stainless steel material. The high-density stainless steel material has a tight internal molecular structure and a small gas molecule adsorption space, thereby reducing gas adsorption.

[0033] Among them, the vacuum system component hook in S1 is composed of a building plate, and a discharge plate is arranged inside the building plate. During the manufacturing process of the building plate, a discharge plate is added inside it. The discharge plate has a mesh structure and is arranged inside the building plate. The discharge plate is located at the bottom of the building plate and has a connection port, which is connected to an external power-on structure.

[0034] Among them, the wrapped heating shell in S1 is arranged outside the vacuum system component, a heating structure is arranged inside the wrapped heating shell, the heating structure is attached to the outside of the vacuum system component, and an insulating shell is arranged outside the heating mechanism. The insulating shell makes the heating more uniform, avoids heat loss and makes the heating more uniform.

[0035] Among them, in S2, the vacuum system components are cleaned to remove impurities and adsorbed objects attached to the vacuum system components, thereby improving the surface cleanliness of the vacuum system components and reducing the gas adsorption space.

[0036] Among them, in S2, the inner surface of the vacuum system component is coated, and the coating is added to the inner surface of the vacuum system component by electroplating, and a passivation layer is added inside the vacuum system component to reduce gas attachment sites, thereby reducing gas adsorption.

[0037] Among them, the S3 is a getter material added inside the vacuum system component, and the getter material is zirconium-aluminum alloy or barium-lithium alloy. The zirconium-aluminum alloy or barium-lithium alloy can chemically react with specific gases, thereby consuming the gas inside the vacuum system component and reducing the adsorbed gas content.

[0038] Among them, the adsorption materials added by S3 inside the vacuum system component are activated carbon and organic metal. The activated carbon captures gas molecules in the air, and the organic metal is a metal organic framework compound that can adsorb free gas molecules inside the vacuum system component.

[0039] Among them, the S4 activates the discharge plate, and the discharge plate realizes the formation of a discharge environment inside the vacuum system component. The discharge environment forms ions inside the vacuum system component. The ions move inside the vacuum system component to activate the gas inside the vacuum system component, so that the gas molecules are separated from the vacuum system component and cooperate with the adsorption material to perform gas adsorption.

[0040] Among them, in S5, the vacuum system component is heated to intensify the molecular movement inside the vacuum system component, increase the molecular gap inside the vacuum system component, thereby facilitating the movement of gas molecules inside the vacuum system component, thereby performing adsorption and removal.

[0041] The working principle and use process of the present invention are as follows: a vacuum system component is constructed, a discharge plate is added to the inside of a construction plate of the vacuum system component, a heating shell is wrapped around the outside of the vacuum system component, the vacuum system component is cleaned, and a surface coating is performed inside the vacuum system component, a getter material and an adsorbent material are installed and inserted inside the vacuum system component, the getter material reacts with the gas inside the vacuum system component to form a stable chemical structure, thereby consuming the gas, the getter material adsorbs the free gas, activates the discharge plate, and discharges inside the vacuum system component, the discharge plate realizes the formation of a discharge environment inside the vacuum system component, the discharge environment forms ions inside the vacuum system component, the ions travel inside the vacuum system component, thereby activating the gas inside the vacuum system component, causing the gas molecules to detach from the vacuum system component, and the adsorbent material is used to adsorb the gas, the vacuum system component is heated by the heating shell, the heating of the vacuum system component intensifies the molecular motion inside the vacuum system component, increases the molecular gap inside the vacuum system component, thereby facilitating the movement of gas molecules inside the vacuum system component, and adsorption and removal are performed.

[0042] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0043] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A method for reducing gas adsorption in a vacuum system, characterized in that: The following steps are involved: S1. Build a vacuum system component, add a discharge plate inside the vacuum system component building plate, and wrap a heating shell outside the vacuum system component; S2. Clean the vacuum system components and apply surface coating inside the vacuum system components; S3, installing and inserting getter materials and adsorbent materials inside the vacuum system components to adsorb the gas; S4, activating the discharge plate to discharge the inside of the vacuum system component to remove the internal gas; S5. The vacuum system components are heated by heating the housing to release the adsorbed gas.

2. The method for reducing gas adsorption in a vacuum system according to claim 1, characterized in that: The vacuum system components in S1 are constructed by building a building plate, and the building plate is made of low-adsorption material. The low-adsorption material is made of high-density stainless steel material. The high-density stainless steel material has a tight internal molecular structure and a small gas molecule adsorption space, thereby reducing gas adsorption.

3. The method for reducing gas adsorption in a vacuum system according to claim 1, characterized in that: The vacuum system component in S1 is composed of a hook building plate, and a discharge plate is arranged inside the building plate. During the manufacturing process of the building plate, a discharge plate is added inside the building plate. The discharge plate has a mesh structure and is arranged inside the building plate. The discharge plate is located at the bottom of the building plate and has a connection port, which is connected to an external power-on structure.

4. The method for reducing gas adsorption in a vacuum system according to claim 1, characterized in that: In S1, the wrapped heating shell is arranged outside the vacuum system component, a heating structure is arranged inside the wrapped heating shell, the heating structure is attached to the outside of the vacuum system component, and an insulating shell is arranged outside the heating mechanism. The insulating shell makes the heating more uniform, avoids heat loss and makes the heating more uniform.

5. The method for reducing gas adsorption in a vacuum system according to claim 1, characterized in that: In the step S2, the vacuum system components are cleaned to remove impurities and adsorbed objects attached to the vacuum system components, thereby improving the surface cleanliness of the vacuum system components and reducing the gas adsorption space.

6. The method for reducing gas adsorption in a vacuum system according to claim 1, characterized in that: In the S2, the inner surface of the vacuum system component is coated, and the coating is added to the inner surface of the vacuum system component by electroplating, and a passivation layer is added inside the vacuum system component to reduce gas attachment sites, thereby reducing gas adsorption.

7. The method for reducing gas adsorption in a vacuum system according to claim 1, characterized in that: The S3 is a getter material added inside the vacuum system component. The getter material is zirconium-aluminum alloy or barium-lithium alloy. The zirconium-aluminum alloy or barium-lithium alloy can react chemically with specific gases, thereby consuming the gas inside the vacuum system component and reducing the adsorbed gas content.

8. The method for reducing gas adsorption in a vacuum system according to claim 1, characterized in that: The adsorption materials added by S3 inside the vacuum system component are activated carbon and organic metal. The activated carbon captures gas molecules in the air, and the organic metal is a metal organic framework compound that can adsorb free gas molecules inside the vacuum system component.

9. The method for reducing gas adsorption in a vacuum system according to claim 1, characterized in that: The S4 activates the discharge plate, which forms a discharge environment inside the vacuum system component. The discharge environment forms ions inside the vacuum system component. The ions move inside the vacuum system component to activate the gas inside the vacuum system component, so that the gas molecules are separated from the vacuum system component and the adsorption material is used to adsorb the gas.

10. The method for reducing gas adsorption in a vacuum system according to claim 1, characterized in that: In S5, the vacuum system component is heated to intensify the molecular motion inside the vacuum system component, thereby increasing the molecular gap inside the vacuum system component, thereby facilitating the motion of gas molecules inside the vacuum system component, thereby performing adsorption and removal.

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