Sample setting device and laser repair system

Abstract

The invention relates to a sample setting device and a laser repair system. The sample setting device comprises a bearing table assembly, a first adsorption assembly, a second adsorption assembly and a negative pressure mechanism, the first adsorption assembly is arranged on the bearing table assembly and provided with a plurality of first adsorption holes, and the first adsorption holes are distributed at intervals in the first direction; the second adsorption assembly and the first adsorption assembly are arranged on the same side of the bearing table assembly in a spaced mode in the second direction, and the second adsorption assembly can move in the direction close to or away from the first adsorption assembly relative to the bearing table assembly in the second direction. The second adsorption assembly is provided with a plurality of second adsorption holes which are arranged at intervals in the first direction; wherein the first direction intersects with the second direction; the negative pressure mechanism is communicated with the first adsorption holes and the second adsorption holes and used for enabling the first adsorption holes and the second adsorption holes to be in a negative pressure state, and therefore the sample to be repaired is adsorbed. The sample setting device can be suitable for to-be-repaired samples of various sizes.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to a sample setting device and a laser repair system. Background Art

[0002] In the panel industry, lasers are needed to weld or cut the circuits on the panels to repair the panels. In the process of repairing the panels, the panels need to be fixed. However, the sizes of products are often different, and panels of different sizes require fixtures of various sizes to fix them. When products of different sizes need to be tested, the fixtures need to be replaced. Frequent replacement of fixtures brings inconvenience to the staff, and the repair efficiency is bound to be reduced during the replacement of the fixtures. Summary of the invention

[0003] In view of this, the present application provides a sample setting device and a laser repair system, wherein the sample setting device can be applicable to samples to be repaired of various sizes.

[0004] The present application provides a sample setting device, which includes: a support platform component, a first adsorption component, a second adsorption component and a negative pressure mechanism, wherein the first adsorption component is arranged on the support platform component, the first adsorption component has a plurality of first adsorption holes, and the plurality of first adsorption holes are arranged at intervals along a first direction; the second adsorption component and the first adsorption component are arranged at intervals along a second direction on the same side of the support platform component, the second adsorption component can move relative to the support platform component along the second direction toward or away from the first adsorption component, the second adsorption component has a plurality of second adsorption holes, and the plurality of second adsorption holes are arranged at intervals along the first direction; wherein the first direction intersects with the second direction; the negative pressure mechanism is connected to the plurality of first adsorption holes and the plurality of second adsorption holes, respectively, and is used to make the plurality of first adsorption holes and the plurality of second adsorption holes be in a negative pressure state, thereby adsorbing the sample to be repaired.

[0005] Furthermore, the first adsorption component includes a first mounting plate and a first adsorption plate, the first mounting plate and the first adsorption plate are stacked along a third direction, the first mounting plate is arranged on the supporting platform assembly, the first adsorption plate is arranged on the surface of the first mounting plate away from the supporting platform assembly, the first adsorption plate has the plurality of first adsorption holes, and the first adsorption holes penetrate the two surfaces of the first adsorption plate opposite to each other along the third direction, the plurality of first adsorption holes include a plurality of groups of first-group adsorption holes, each group of the first-group adsorption holes includes at least one first adsorption hole, the first adsorption plate and the first mounting plate enclose a plurality of first chambers arranged at intervals, the plurality of first chambers are respectively connected to the negative pressure mechanism, each first chamber is connected to a group of the first-group adsorption holes, and different first chambers are connected to different first-group adsorption holes; the second adsorption component includes A second mounting plate and a second adsorption plate, the second mounting plate and the second adsorption plate are stacked along a third direction, the second mounting plate is arranged on the supporting platform assembly, the second adsorption plate is arranged on the surface of the second mounting plate away from the supporting platform assembly, the second adsorption plate has the plurality of second adsorption holes, and the second adsorption holes penetrate the two surfaces of the second adsorption plate opposite to each other along the third direction, the plurality of second adsorption holes include a plurality of groups of second adsorption holes, each group of the second adsorption holes includes at least one second adsorption hole, the second adsorption plate and the second mounting plate enclose a plurality of second chambers arranged at intervals, the plurality of second chambers are respectively connected to the negative pressure mechanism, each second chamber is connected to a group of the second adsorption holes, and different second chambers are connected to different second adsorption holes; wherein, the third direction intersects with the first direction and the second direction respectively.

[0006] Furthermore, the sample setting device also includes a main pipeline and a plurality of connecting components, and the main pipeline cooperates with each of the connecting components to connect the negative pressure mechanism with one of the first chambers and one of the second chambers respectively, and the connecting components correspond to the first chamber and the second chamber one by one respectively; the connecting components include a first connecting piece, a second connecting piece, a first pipeline member, a second pipeline member, a third pipeline member and a three-way joint, the first connecting piece is connected to the first chamber, and the opposite ends of the first pipeline member are respectively connected to the first connecting piece and the three-way joint, the second connecting piece is connected to the second chamber, and the opposite ends of the second pipeline member are respectively connected to the second connecting piece and the three-way joint, and the opposite ends of the third pipeline member are respectively connected to the three-way joint and the main pipeline, and the end of the main pipeline away from the three-way joint is connected to the negative pressure mechanism.

[0007] Furthermore, the connection assembly also includes a switch component, which is arranged on the third pipeline component and is used to control the connection or disconnection between the negative pressure mechanism and the three-way joint.

[0008] Furthermore, the sample setting device also includes a vacuum detector, which is arranged in the main pipeline, and cooperates with the switch element to detect the vacuum tightness of each of the first chamber and the second chamber.

[0009] Furthermore, the sample setting device also includes a guide member and a stop member, the guide member is arranged on the supporting platform assembly and extends along the second direction, and the second adsorption assembly can be slidably connected to the guide member along the second direction; the stop member is connected to the second adsorption assembly, and the stop member has a first state and a second state relative to the guide member, when the stop member is in the first state, the stop member locks the guide member, and the relative position of the second adsorption assembly and the supporting platform assembly is fixed; when the stop member is in the second state, the stop member is unlocked from the guide member, so that the second adsorption assembly can move relative to the supporting platform assembly.

[0010] Furthermore, the sample setting device includes a first horizontal adjustment mechanism, which includes a plurality of first adjustment components, which are spaced apart on the first mounting plate, and cooperate with each other to adjust the horizontality of the first adsorption plate.

[0011] Furthermore, each of the first adjusting components includes a first adjusting member, a locking member and a first fixing member, the first adjusting member is sequentially passed through the locking member and the first mounting plate, and the first adjusting member is threadedly connected to the locking member and the first mounting plate, respectively, the first adjusting member passes through the surface of the first mounting plate away from the locking member and abuts against the supporting platform assembly; the first adjusting member is used to adjust the relative position of the supporting platform assembly and the first mounting plate, and the locking member locks the first adjusting member after the first mounting plate and the supporting platform assembly are in a preset position; the first fixing member is sequentially passed through the first adjusting member and the supporting platform assembly to limit the relative position of the first adjusting member and the supporting platform assembly.

[0012] Furthermore, the sample setting device also includes a limiting plate, which includes a first sub-plate and a second sub-plate connected by bending, the first sub-plate is connected to the carrier plate assembly, and the second sub-plate is connected to a side of the first mounting plate away from the second adsorption assembly.

[0013] Further, the support platform assembly includes a first support plate and a second support plate, the first support plate and the second support plate are stacked along a third direction, and the side of the second support plate facing away from the first support plate is used to set the first adsorption assembly and the second adsorption assembly; the sample setting device also includes a second horizontal adjustment mechanism, the second horizontal adjustment mechanism includes a penetration member and a plurality of second adjustment components, the penetration member and the plurality of second adjustment components are arranged around the outer periphery of the second support plate, and the penetration member and the plurality of second adjustment components cooperate to adjust the horizontality of the second support plate; the penetration member is used to connect the first support plate and the second support plate, the second adjustment assembly includes a second adjustment member and a second fixing member, the second adjustment member is penetrated through the second support plate and is threadedly connected to the second support plate, the side of the second adjustment member facing away from the second support plate abuts against the first support plate, the second adjustment member is used to adjust the relative position of the first support plate and the second support plate, and the second fixing member is sequentially penetrated through the second adjustment member and the first support plate to limit the relative position of the first support plate and the second support plate.

[0014] The present application also provides a laser repair system, which includes: a sample setting device, a mounting seat, a stand and a laser repair component provided in the present application, wherein the sample setting device is used to set a sample to be repaired; the mounting seat is used to support the sample setting device, and the sample setting device can move relative to the mounting seat along a first direction; the stand is connected to the mounting seat and is arranged at a distance from the sample setting device on the same side of the mounting seat; the laser repair component is connected to the stand and is arranged corresponding to the sample setting device to repair the sample to be repaired.

[0015] In the present application, when the sample setting device is used to set the sample to be repaired, the opposite ends of the sample to be repaired are respectively set above the multiple first adsorption holes and the multiple second adsorption holes, and the negative pressure mechanism is respectively connected to the first adsorption hole and the multiple second adsorption holes, and the first adsorption hole and the second adsorption hole are in a negative pressure state, so that the multiple first adsorption holes and the multiple second adsorption holes cooperate to adsorb the sample to be repaired. The first adsorption component is set on the carrier assembly, and the second adsorption component can move relative to the carrier assembly along the second direction toward or away from the first adsorption component to reduce or increase the distance between the first adsorption component and the second adsorption component in the second direction, so that the first adsorption component and the second adsorption component cooperate to adsorb samples to be repaired of different sizes. When the sample setting device is used to set samples to be repaired of different sizes, only the relative position of the second adsorption component and the first adsorption component needs to be adjusted, and the sample setting device is convenient for the staff to adjust according to the size of the sample to be repaired. When the sample setting device is used in a laser repair system, there is no need to frequently replace the sample setting device, which is conducive to improving the efficiency of the laser repair system in repairing the sample to be repaired. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the implementation will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 This is a schematic structural diagram of a laser repair system according to an embodiment of the present application; Figure 2 A schematic diagram of the matching relationship between the sample setting device and the sample to be repaired according to an embodiment of the present application; Figure 3 A partial structural schematic diagram of a sample setting device according to an embodiment of the present application; Figure 4 A schematic diagram of the connection relationship between the negative pressure mechanism and the first adsorption hole and the second adsorption hole in the sample setting device of one embodiment of the present application; Figure 5 A schematic diagram of a partial exploded structure of a sample setting device according to an embodiment of the present application; Figure 6 It is a perspective structural schematic diagram of a sample setting device according to an embodiment of the present application; Figure 7 for Figure 5 The enlarged structural diagram of the M dotted line frame; Figure 8 for Figure 5 A schematic diagram of the enlarged structure of the N dotted box; Fig. 9 A schematic top view of the structure of a sample setting device according to an embodiment of the present application; Fig.10 for Fig. 9 Sectional view in the OO direction; Fig.11 for Fig. 9 Sectional view in the mid-PP direction; Fig.12 for Fig. 9 Sectional view along the QQ direction.

[0018] Description of reference numerals: 100-sample setting device, 110-carrying platform assembly, 111-first carrying plate, 112-second carrying plate, 120-first adsorption assembly, 121-first adsorption hole, 1211-first group of adsorption holes, 1212-first chamber, 1213-first sub-hole, 1214-second sub-hole, 122-first mounting plate, 123-first adsorption plate, 130-second adsorption assembly, 131-second adsorption hole, 1311-second group of adsorption holes, 1312-second chamber, 1313-third sub-hole, 1314-fourth sub-hole, 132-second mounting plate, 133-second adsorption plate, 140-negative pressure mechanism, 150-main pipeline, 160-connection assembly, 161-first connecting member, 162-second connecting member, 163-first pipeline member, 164-second pipeline member, 165-third pipeline member, 166-three-way joint , 1661-first interface, 1662-second interface, 1663-third interface, 167-switch member, 170-vacuum detector, 180-guide member, 190-stop member, 210-first horizontal adjustment mechanism, 211-first adjustment component, 212-first adjustment member, 213-locking member, 214-first fixing member, 220-limiting plate, 221-first sub-plate, 222-second sub-plate, 230-second horizontal adjustment mechanism, 231-penetrating member, 2311-first penetrating portion, 2312-second penetrating portion, 232-second adjustment component, 2321-second adjustment member, 2322-second fixing member, 240-scale, 250-first drag chain, 260-setting base, 300-laser repair system, 310-mounting seat, 320-stand, 330-laser repair member, 400-sample to be repaired. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0020] The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices.

[0021] Reference to "embodiment" or "implementation" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiment or implementation may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0022] In the panel industry, lasers are needed to weld or cut the circuits on the panels to repair the panels. In the process of repairing the panels, the panels need to be fixed. However, the sizes of products are often different, and panels of different sizes require fixtures of various sizes to fix them. When products of different sizes need to be tested, the fixtures need to be replaced. Frequent replacement of fixtures brings inconvenience to the staff, and the repair efficiency is bound to be reduced during the replacement of the fixtures.

[0023] See also Figure 1 and Figure 2 The present application provides a laser repair system 300, which includes: a sample setting device 100, a mounting seat 310, a stand 320 and a laser repair part 330 provided in the present application, wherein the sample setting device 100 is used to set a sample 400 to be repaired; the mounting seat 310 is used to carry the sample setting device 100, and the sample setting device 100 can be moved along a first direction (such as Figure 1The stand 320 is connected to the mount 310 and is spaced apart from the sample setting device 100 on the same side of the mount 310; the laser repair component 330 is connected to the stand 320 and is set corresponding to the sample setting device 100 to repair the sample 400 to be repaired.

[0024] It can be understood that the sample 400 to be repaired may be, but is not limited to, a display panel, a circuit board, etc.

[0025] It can be understood that the sample setting device 100 , the stand 320 and the laser repair component 330 are all located on the same side of the mounting seat 310 .

[0026] It can be understood that the sample to be repaired 400 has a circuit thereon.

[0027] In this embodiment, the laser repair system 300 is used to repair the sample 400 to be repaired. Specifically, when a circuit in the sample 400 to be repaired fails to be disconnected, the laser repair component 330 deposits metal on the sample 400 to be repaired so as to connect the circuit and repair the sample 400 to be repaired. When the circuit of the sample 400 to be repaired is connected at a place where it should not be connected, the laser repair component 330 can emit laser light to the sample 400 to cut off the circuit and repair the sample 400 to be repaired. In this embodiment, the laser repair component 330 is disposed on the stand 320 and is disposed corresponding to the sample setting device 100. The sample setting device 100 can move relative to the mounting seat 310 in a first direction to move the repair area of ​​the sample 400 to be repaired to below the laser repair component 330. In this embodiment, the sample setting device 100 can adapt to various sizes of samples 400 to be repaired, so as to adsorb and fix the samples 400 to be repaired in various sizes, thereby improving the performance of the sample setting device 100. In the process of testing the samples 400 to be repaired in various sizes, it is not necessary to frequently replace the sample setting device 100, which is convenient for the staff to set the samples 400 to be repaired, and reduces the time for setting the samples 400 to be repaired, thereby facilitating the improvement of the efficiency of the laser repair system 300 in repairing the samples 400 to be repaired.

[0028] Understandably, in Figure 2 In the figure, five samples 400 to be repaired of different sizes are shown. In actual use, one sample setting device 100 can only set one sample 400 to be repaired at a time, and it should not be understood that the sample setting device 100 sets five samples 400 to be repaired of different sizes at the same time.

[0029] Please also see Figure 3 and Figure 4 The present application provides a sample setting device 100, the sample setting device 100 comprising: a carrier platform component 110, a first adsorption component 120, a second adsorption component 130 and a negative pressure mechanism 140, the first adsorption component 120 is arranged on the carrier platform component 110, the first adsorption component 120 has a plurality of first adsorption holes 121 and the plurality of first adsorption holes 121 are arranged at intervals along a first direction; the second adsorption component 130 and the first adsorption component 120 are arranged at intervals along a second direction on the same side of the carrier platform component 110, the second adsorption component 130 can move along the second direction relative to the supporting platform assembly 110 toward or away from the first adsorption assembly 120, the second adsorption assembly 130 has a plurality of second adsorption holes 131 and the plurality of second adsorption holes 131 are arranged at intervals along the first direction; wherein the first direction intersects with the second direction; the negative pressure mechanism 140 is respectively connected to the plurality of first adsorption holes 121 and the plurality of second adsorption holes 131, and is used to make the plurality of first adsorption holes 121 and the plurality of second adsorption holes 131 in a negative pressure state, thereby adsorbing the sample 400 to be repaired.

[0030] Optionally, the first direction is perpendicular to the second direction.

[0031] It can be understood that in the terminology of the present application, "plurality" means greater than or equal to two, and can be but is not limited to two, three, four, five, six, seven, eight, ten, twelve, fifteen, eighteen, twenty, twenty-two, twenty-five, twenty-eight, thirty or thirty-five, etc.

[0032] In this embodiment, when the sample setting device 100 is used to set the sample 400 to be repaired, the opposite ends of the sample 400 to be repaired are respectively set above the plurality of first adsorption holes 121 and the plurality of second adsorption holes 131, and the negative pressure mechanism 140 is respectively connected to the first adsorption holes 121 and the plurality of second adsorption holes 131, and the first adsorption holes 121 and the second adsorption holes 131 are in a negative pressure state, so that the plurality of first adsorption holes 121 and the plurality of second adsorption holes 131 cooperate to adsorb the sample 400 to be repaired. The first adsorption component 120 is set on the support platform component 110, and the second adsorption component 130 can move in the second direction relative to the support platform component 110 toward or away from the first adsorption component 120, so as to reduce or increase the distance between the first adsorption component 120 and the second adsorption component 130 in the second direction, so that the first adsorption component 120 and the second adsorption component 130 cooperate to adsorb samples 400 to be repaired of different sizes. When the sample setting device 100 is used to set samples 400 to be repaired of different sizes, it is only necessary to adjust the relative positions of the second adsorption component 130 and the first adsorption component 120, and the sample setting device 100 is convenient for the staff to adjust according to the size of the sample 400 to be repaired. When the sample setting device 100 is used in the laser repair system 300, there is no need to frequently replace the sample setting device 100, which is conducive to improving the efficiency of the laser repair system 300 in repairing the sample 400 to be repaired.

[0033] Optionally, when the sample to be repaired 400 needs to be removed from the sample setting device 100 , the negative pressure state of the first adsorption hole 121 and the second adsorption hole 131 can be released, or the sample to be repaired 400 can be directly taken out.

[0034] Please also see Figure 5 and Figure 6 In some embodiments, the first adsorption assembly 120 includes a first mounting plate 122 and a first adsorption plate 123, and the first mounting plate 122 and the first adsorption plate 123 are arranged along a third direction (such as Figure 3The first adsorption plate 123 is arranged in a stacked manner (as shown in the Z direction), the first mounting plate 122 is arranged on the supporting platform assembly 110, the first adsorption plate 123 is arranged on the surface of the first mounting plate 122 away from the supporting platform assembly 110, the first adsorption plate 123 has the plurality of first adsorption holes 121, and the first adsorption holes 121 penetrate the two surfaces of the first adsorption plate 123 opposite to each other along the third direction, the plurality of first adsorption holes 121 include a plurality of groups of first group adsorption holes 1211, each group of the first group of adsorption holes 1211 includes at least one first adsorption hole 121, the first adsorption plate 123 and the first mounting plate 122 are surrounded by a plurality of first chambers 1212 arranged at intervals, the plurality of first chambers 1212 are respectively connected to the negative pressure mechanism 140, each first chamber 1212 is connected to a group of the first group of adsorption holes 1211, and different first chambers 1212 are connected to different first groups of adsorption holes 1211.

[0035] It can be understood that the third direction is the arrangement direction of the supporting platform assembly 110 and the first adsorption assembly 120 .

[0036] As used herein, "at least one" means one or more.

[0037] It can be understood that the number of the first chambers 1212 is equal to the number of the first group of adsorption holes 1211 , and the first chambers 1212 and the first group of adsorption holes 1211 are arranged in a one-to-one correspondence.

[0038] It can be understood that the multiple first chambers 1212 are arranged at intervals along the first direction, and different first chambers 1212 are not connected to each other.

[0039] It can be understood that the negative pressure mechanism 140, the first chamber 1212, and the first group of adsorption holes 1211 are connected in sequence to form an air path.

[0040] In this embodiment, the first mounting plate 122 and the first adsorption plate 123 are stacked along the third direction, and the first mounting plate 122 and the first adsorption plate 123 enclose the plurality of first chambers 1212 arranged at intervals, and each of the first chambers 1212 is respectively connected to the negative pressure mechanism 140 and a group of the first adsorption holes 1211. In other words, the negative pressure mechanism 140 can respectively put one or more of the plurality of first chambers 1212 in a negative pressure state, so that the corresponding first adsorption holes 1211 are in a negative pressure state to adsorb the sample 400 to be repaired. More specifically, when the size of the sample 400 to be repaired is small, the negative pressure mechanism 140 can put one of the plurality of first chambers 1212 in the negative pressure mechanism 140, and put the first group of adsorption holes 1211 corresponding to the first chamber 1212 in a negative pressure state to adsorb the sample 400 to be repaired. As the size of the sample 400 to be repaired increases in the first direction, the negative pressure mechanism 140 can place multiple first chambers 1212 in the multiple first chambers 1212 in the negative pressure mechanism 140, and place multiple groups of first adsorption holes 1211 corresponding to the multiple first chambers 1212 in a negative pressure state to adsorb the sample 400 to be repaired with a larger size. The sample setting device 100 provided in this embodiment can adapt to the change in the size of the sample 400 to be repaired in the first direction, and adsorb the sample 400 to be repaired by controlling at least one of the multiple first chambers 1212 to be in a negative pressure state, so as to facilitate the staff to adjust according to the size of the sample 400 to be repaired. When the sample setting device 100 is used in the laser repair system 300, there is no need to frequently replace the sample setting device 100, which is conducive to improving the efficiency of the laser repair system 300 in repairing the sample 400 to be repaired.

[0041] Understandably, in Figure 6In the embodiment, the dashed box A has a first chamber 1212, the dashed box A' has a second chamber 1312, the first chamber 1212 in the dashed box A and the second chamber 1312 in the dashed box A' are arranged correspondingly to form a group of chambers; by analogy, the dashed box B has a first chamber 1212, the dashed box B' has a second chamber 1312, the first chamber 1212 in the dashed box B and the second chamber 1312 in the dashed box B' are arranged correspondingly to form a group of chambers; the dashed box C has a first chamber 1212, the dashed box C' has a second chamber 1312, the first chamber 1212 in the C dotted frame and the second chamber 1312 in the C' dotted frame are arranged correspondingly to form a group of chambers; the D dotted frame has one first chamber 1212, the D' dotted frame has one second chamber 1312, the first chamber 1212 in the D dotted frame and the second chamber 1312 in the D' dotted frame are arranged correspondingly to form a group of chambers; the E dotted frame has one first chamber 1212, the E' dotted frame has one second chamber 1312, the first chamber 1212 in the E dotted frame and the second chamber 1312 in the E' dotted frame are arranged correspondingly to form a group of chambers.

[0042] Preferably, in some embodiments, the number of the first group of adsorption holes 1211 is five, the number of the first chambers 1212 is five, and the first group of adsorption holes 1211 corresponds to the first chambers 1212 one by one.

[0043] In this embodiment, the sample setting device 100 is applicable to samples 400 to be repaired of at least five sizes. Assuming that the sample setting device 100 is applicable to samples 400 to be repaired of five sizes, and the five samples 400 to be repaired have a first size, a second size, a third size, a fourth size and a fifth size, respectively, and the first size, the second size, the third size, the fourth size and the fifth size gradually increase, then when the sample setting device 100 is used to set a sample 400 to be repaired of the first size, the negative pressure mechanism 140 is connected to one of the first chambers 1212; when the sample setting device 100 is used to set a sample 400 to be repaired of the second size, the negative pressure mechanism 140 is connected to one of the first chambers 1212; When the sample setting device 100 is used to set a sample 400 to be repaired with a size of one inch, the negative pressure mechanism 140 is connected to two adjacent first chambers 1212; when the sample setting device 100 is used to set a sample 400 to be repaired with a size of one inch, the negative pressure mechanism 140 is connected to three adjacent first chambers 1212; when the sample setting device 100 is used to set a sample 400 to be repaired with a size of one inch, the negative pressure mechanism 140 is connected to four adjacent first chambers 1212; when the sample setting device 100 is used to set a sample 400 to be repaired with a size of one inch, the negative pressure mechanism 140 is connected to five adjacent first chambers 1212.

[0044] Please also see Figure 7 Optionally, in some embodiments, the first adsorption hole 121 includes a first sub-hole 1213 and a second sub-hole 1214 that are interconnected, the first sub-hole 1213 passes through the surface of the first adsorption plate 123 facing away from the first mounting plate 122, the second sub-hole 1214 passes through the surface of the first adsorption plate 123 facing the first mounting plate 122, and the radial dimension of the first sub-hole 1213 is greater than the radial dimension of the second sub-hole 1214.

[0045] In this embodiment, when the sample to be repaired 400 is set on the first adsorption component 120, the first sub-hole 1213 is closer to the sample to be repaired 400 than the second sub-hole 1214, and the radial dimension of the first sub-hole 1213 is larger than the radial dimension of the second sub-hole 1214, which is beneficial to increase the adsorption area of ​​the first adsorption plate 123 on the sample to be repaired 400, thereby enhancing the adsorption force of the first adsorption plate 123 on the sample to be repaired 400, which is beneficial to improving the stability of the sample to be repaired 400 set on the first adsorption component 120.

[0046] Further optionally, the cross section of the first sub-hole 1213 is waist-shaped, and the cross section of the second sub-hole 1214 is circular.

[0047] Similarly, the second adsorption assembly 130 includes a second mounting plate 132 and a second adsorption plate 133, the second mounting plate 132 and the second adsorption plate 133 are stacked along the third direction, the second mounting plate 132 is arranged on the support platform assembly 110, the second adsorption plate 133 is arranged on the surface of the second mounting plate 132 away from the support platform assembly 110, the second adsorption plate 133 has the plurality of second adsorption holes 131, and the second adsorption holes 131 pass through the two surfaces of the second adsorption plate 133 opposite to each other along the third direction, and the plurality of second The adsorption holes 131 include multiple groups of the second-group adsorption holes 1311, each group of the second-group adsorption holes 1311 includes at least one second adsorption hole 131, the second adsorption plate 133 and the second mounting plate 132 enclose a plurality of second chambers 1312 arranged at intervals, the plurality of second chambers 1312 are respectively connected to the negative pressure mechanism 140, each second chamber 1312 is connected to a group of the second-group adsorption holes 1311, and different second chambers 1312 are connected to different second groups of adsorption holes 1311; wherein the third direction intersects with the first direction and the second direction respectively.

[0048] It can be understood that the third direction is the arrangement direction of the supporting platform assembly 110 and the second adsorption assembly 130 .

[0049] It can be understood that the number of the second chambers 1312 is equal to the number of the second adsorption holes 1311 , and the second chambers 1312 and the second adsorption holes 1311 are arranged in a one-to-one correspondence.

[0050] It can be understood that the plurality of second chambers 1312 are arranged at intervals along the first direction, and different second chambers 1312 are not connected to each other.

[0051] It can be understood that the negative pressure mechanism 140, the second chamber 1312, and the second group of adsorption holes 1311 are connected in sequence to form an air path.

[0052] In this embodiment, the second mounting plate 132 and the second adsorption plate 133 are stacked along the third direction, and the second mounting plate 132 and the second adsorption plate 133 enclose the plurality of second chambers 1312 arranged at intervals, and each second chamber 1312 is respectively connected to the negative pressure mechanism 140 and a group of the second adsorption holes 1311. In other words, the negative pressure mechanism 140 can respectively make one or more of the plurality of second chambers 1312 in a negative pressure state, so that the corresponding second adsorption holes 1311 are in a negative pressure state to adsorb the sample 400 to be repaired. More specifically, when the size of the sample 400 to be repaired is small, the negative pressure mechanism 140 can make one of the plurality of second chambers 1312 in the negative pressure mechanism 140, and make the second group of adsorption holes 1311 corresponding to the second chamber 1312 in a negative pressure state to adsorb the sample 400 to be repaired. As the size of the sample 400 to be repaired increases in the first direction, the negative pressure mechanism 140 can place multiple second chambers 1312 in the multiple second chambers 1312 in the negative pressure mechanism 140, and place multiple groups of the second adsorption holes 1311 corresponding to the multiple second chambers 1312 in a negative pressure state to adsorb the sample 400 to be repaired with a larger size. The sample setting device 100 provided in this embodiment can adapt to the change in the size of the sample 400 to be repaired in the first direction, and adsorb the sample 400 to be repaired by controlling at least one of the multiple second chambers 1312 to be in a negative pressure state, so as to facilitate the staff to adjust according to the size of the sample 400 to be repaired. When the sample setting device 100 is used in the laser repair system 300, there is no need to frequently replace the sample setting device 100, which is conducive to improving the efficiency of the laser repair system 300 in repairing the sample 400 to be repaired.

[0053] Preferably, in some embodiments, the number of the second group of adsorption holes 1311 is five, the number of the second chambers 1312 is five, and the second group of adsorption holes 1311 corresponds to the second chambers 1312 one by one.

[0054] In this embodiment, the sample setting device 100 is applicable to samples 400 to be repaired of at least five sizes. Assuming that the sample setting device 100 is applicable to samples 400 to be repaired of five sizes, and the five samples 400 to be repaired have a first size, a second size, a third size, a fourth size and a fifth size, respectively, and the first size, the second size, the third size, the fourth size and the fifth size gradually increase, then when the sample setting device 100 is used to set a sample 400 to be repaired of the first size, the negative pressure mechanism 140 is connected to one of the second chambers 1312; when the sample setting device 100 is used to set a sample 400 to be repaired of the second size, the negative pressure mechanism 140 is connected to one of the second chambers 1312. When the sample setting device 100 is used to set a sample 400 to be repaired with a size of one inch, the negative pressure mechanism 140 is connected to two adjacent second chambers 1312; when the sample setting device 100 is used to set a sample 400 to be repaired with a size of one inch, the negative pressure mechanism 140 is connected to three adjacent second chambers 1312; when the sample setting device 100 is used to set a sample 400 to be repaired with a size of one inch, the negative pressure mechanism 140 is connected to four adjacent second chambers 1312; when the sample setting device 100 is used to set a sample 400 to be repaired with a size of one inch, the negative pressure mechanism 140 is connected to five second chambers 1312.

[0055] Optionally, see Figure 8 In some embodiments, the second adsorption hole 131 includes a third sub-hole 1313 and a fourth sub-hole 1314 which are interconnected. The third sub-hole 1313 passes through the surface of the second adsorption plate 133 facing away from the second mounting plate 132, and the fourth sub-hole 1314 passes through the surface of the second adsorption plate 133 facing the second mounting plate 132. The radial dimension of the third sub-hole 1313 is greater than the radial dimension of the fourth sub-hole 1314.

[0056] In this embodiment, when the sample to be repaired 400 is set in the second adsorption component 130, the third sub-hole 1313 is closer to the sample to be repaired 400 than the fourth sub-hole 1314, and the radial dimension of the third sub-hole 1313 is larger than the radial dimension of the fourth sub-hole 1314, which is beneficial to increase the adsorption area of ​​the second adsorption plate 133 on the sample to be repaired 400, thereby enhancing the adsorption force of the second adsorption plate 133 on the sample to be repaired 400, which is beneficial to improving the stability of the sample to be repaired 400 set in the second adsorption component 130.

[0057] Further optionally, the cross section of the third sub-hole 1313 is waist-shaped, and the cross section of the fourth sub-hole 1314 is circular.

[0058] Optionally, in some embodiments, the sample 400 to be repaired is in the positive direction, and the sample setting device 100 can be used to adsorb the sample 400 to be repaired with side lengths of five inches, six inches, seven inches, nine inches and fourteen inches respectively. When the sample setting device 100 is used to adsorb a sample with a side length of five inches, the negative pressure mechanism 140 connects one first chamber 1212 and one second chamber 1312; when the sample setting device 100 is used to adsorb a sample with a side length of six inches, the negative pressure mechanism 140 connects two adjacent first chambers 1212 and two adjacent second chambers 1312; when the sample setting device 100 is used to adsorb a sample with a side length of seven inches, the negative pressure mechanism 140 connects three adjacent first chambers 1212 and three adjacent second chambers 1312; when the sample setting device 100 is used to adsorb a sample with a side length of nine inches, the negative pressure mechanism 140 connects four adjacent first chambers 1212 and four adjacent second chambers 1312; when the sample setting device 100 is used to adsorb a sample with a side length of fourteen inches, the negative pressure mechanism 140 connects five adjacent first chambers 1212 and five adjacent second chambers 1312.

[0059] Optionally, the number of the first chambers 1212 and the second chambers 1312 is equal, one first chamber 1212 is set corresponding to one second chamber 1312, and the number of first adsorption holes 121 connected to the first chamber 1212 is equal to the number of second adsorption holes 131 connected to the corresponding second chamber 1312.

[0060] In this embodiment, the first chamber 1212 and the second chamber 1312 are correspondingly arranged. When the sample 400 to be repaired is arranged on the first adsorption component 120 and the second adsorption component 130, the negative pressure mechanism 140, the first chamber 1212 and the second chamber 1312 cooperate to adsorb the opposite ends of the sample 400 to be repaired in the second direction, so as to improve the stability of the sample 400 to be repaired being arranged on the sample setting device 100. Specifically, the first chamber 1212 and the second chamber 1312 arranged correspondingly are arranged as a group of chambers, and the plurality of first chambers 1212 and the corresponding second chambers 1312 are a plurality of groups of chambers. The staff can control the negative pressure mechanism 140 to connect at least one of the plurality of groups of chambers according to the size of the sample 400 to be repaired in the first direction, so as to achieve adsorption of the opposite ends of the sample 400 to be repaired in the second direction. The sample setting device 100 provided in this embodiment can stably set the sample 400 to be repaired on the first adsorption component 120 and the second adsorption component 130, and can be applicable to samples 400 to be repaired of various sizes, and has good performance.

[0061] In some embodiments, the sample setting device 100 further includes a main pipeline 150 and a plurality of connecting components 160, the main pipeline 150 cooperates with each of the connecting components 160 to connect the negative pressure mechanism 140 with one of the first chambers 1212 and one of the second chambers 1312, respectively, and the connecting components 160 correspond to the first chamber 1212 and the second chamber 1312 one by one; the connecting components 160 include a first connecting member 161, a second connecting member 162, a first pipe member 163, a second pipe member 164, a third pipe member 165, and a three-way joint 1 66, the first connecting member 161 is connected to the first chamber 1212, the opposite ends of the first pipe member 163 are respectively connected to the first connecting member 161 and the three-way joint 166, the second connecting member 162 is connected to the second chamber 1312, the opposite ends of the second pipe member 164 are respectively connected to the second connecting member 162 and the three-way joint 166, the opposite ends of the third pipe member 165 are respectively connected to the three-way joint 166 and the main pipe 150, and the end of the main pipe 150 away from the three-way joint 166 is connected to the negative pressure mechanism 140.

[0062] It can be understood that the number of the connecting components 160 is equal to the number of the first chambers 1212, and the number of the connecting components 160 is equal to the number of the second chambers 1312, and one connecting component 160 is respectively provided corresponding to one first chamber 1212 and one second chamber 1312.

[0063] In this embodiment, the negative pressure mechanism 140 and the main pipeline 150 are connected and then divided into the multiple groups of chambers, and the main pipeline 150 and the multiple groups of chambers are connected through the connecting assembly 160. Specifically, the first group of adsorption holes 1211, the first chamber 1212, the first pipeline member 163 and the three-way joint 166 are connected in sequence, the second group of adsorption holes 1311, the second chamber 1312, the second pipeline member 164 and the three-way joint 166 are connected in sequence, and the end of the three-way joint 166 away from the first chamber 1212 and the second chamber 1312 is connected to the main pipeline 150 through the third pipeline member 165, and finally connected to the negative pressure mechanism 140. The three-way connector 166 connects a corresponding set of chambers in parallel, so that the negative pressure mechanism 140 can simultaneously control the negative pressure conditions of the corresponding first chamber 1212 and the second chamber 1312, so that the corresponding first chamber 1212 and the second chamber 1312 can be in the negative pressure mechanism 140 at the same time and adsorb the sample 400 to be repaired, which is conducive to improving the efficiency of setting the sample 400 to be repaired in the sample setting device 100, and can simplify the operating steps of the staff, and improve the efficiency of regulating the negative pressure conditions of the multiple chambers. Furthermore, multiple chambers correspond to multiple sets of connection components 160, and the multiple connection components 160 are aggregated to the negative pressure mechanism 140 through the main pipeline 150. Then the sample setting device 100 of the present application only needs one set of negative pressure equipment, which is conducive to the miniaturization design of the equipment.

[0064] Please also see Fig. 9 and Fig.10 It can be understood that the three-way connector 166 has a first interface 1661, a second interface 1662 and a third interface 1663, the first interface 1661 is connected to the third interface 1663, the second interface 1662 is connected to the third interface 1663, then the end of the first pipe member 163 away from the first chamber 1212 is connected to the first interface 1661, the end of the second pipe member 164 away from the second chamber 1312 is connected to the second interface 1662, and the third interface 1663 is connected to the end of the third pipe member 165 away from the main pipeline 150.

[0065] See also Figure 4 and Figure 5 In some embodiments, the connection assembly 160 further includes a switch member 167 , which is disposed on the third pipe member 165 and is used to control the connection or disconnection between the negative pressure mechanism 140 and the three-way joint 166 .

[0066] In this embodiment, the switch component 167 is disposed on the third pipe component 165, and the switch component 167 is disposed between the main pipe 150 and the three-way joint 166, and the switch component 167 is used to control the connection or disconnection between the negative pressure mechanism 140 and the three-way joint 166, so as to control the negative pressure condition of a group of chambers corresponding to the connection component 160. Specifically, when the switch component 167 is turned on, the main pipe 150 is connected to the three-way joint 166, in other words, the negative pressure mechanism 140 and the three-way joint 166 are connected, and the negative pressure mechanism 140 can evacuate the first chamber 1212 and the second chamber 1312 connected to the three-way joint 166, so that the corresponding first chamber 1212 and the second chamber 1312 are in a negative pressure state, thereby achieving adsorption of the sample 400 to be repaired. When the switch 167 is closed, the main pipeline 150 and the three-way joint 166 are blocked. In other words, the negative pressure mechanism 140 is disconnected from the three-way joint 166, and the negative pressure mechanism 140 cannot evacuate the first chamber 1212 and the second chamber 1312 connected to the three-way joint 166, thereby breaking the vacuum, so as to facilitate the removal of the sample 400 to be repaired from the first adsorption component 120 and the second adsorption component 130. In this embodiment, when the number of groups of the connection components 160 is multiple, the number of the switch 167 is multiple, and each of the switch 167 is used to control the opening and closing of the gas path between the negative pressure mechanism 140 and the multiple groups of chambers. The staff can control at least one of the multiple switch 167 to control the negative pressure of the multiple groups of chambers. The sample setting device 100 is convenient for regulating the negative pressure of the multiple groups of chambers, and can adapt to samples 400 to be repaired of various sizes, and has good performance.

[0067] In some embodiments, the sample setting device 100 further includes a vacuum detector 170 , which is disposed in the main pipeline 150 . The vacuum detector 170 cooperates with the switch 167 to detect the vacuum tightness of each of the first chamber 1212 and the second chamber 1312 .

[0068] Optionally, the vacuum detector 170 is a barometer.

[0069] In this embodiment, the vacuum detector 170 is disposed in the main pipeline 150, and the vacuum detector 170 cooperates with the switch 167 to detect the vacuum air tightness of each of the first chamber 1212 and the second chamber 1312, and timely detect the air path with air leakage, which is convenient for the staff to perform maintenance. Specifically, when the negative pressure mechanism 140 is connected to all the first chambers 1212 and the second chambers 1312, if the air tightness of the first chamber 1212 and the second chamber 1312 is good, assuming that the vacuum detector 170 measures the first air pressure difference, wherein the first air pressure difference is the difference between the internal pressure of the first chamber 1212 and the second chamber 1312 and the atmospheric pressure at this time; further, after closing all the switch components 167, open the switch components 167 in turn to measure the vacuum of the first chamber corresponding to the switch component 167. As for the vacuum tightness of the first chamber 1212 and the second chamber 1312, assuming that the vacuum detector 170 measures the second pressure difference, if the second pressure difference is greater than the first pressure difference, it proves that there is leakage in the first chamber 1212 and the second chamber 1312 connected to the switch 167, which is convenient for the staff to repair the air circuit where the switch 167 is located; if the second pressure difference is equal to or very small compared to the first pressure difference, it proves that the air tightness of the first chamber 1212 and the second chamber 1312 connected to the switch 167 is good. The vacuum detector 170 provided in this embodiment is convenient for detecting the vacuum tightness of each of the first chamber 1212 and the second chamber 1312, so that when one or more of the multiple first chambers 1212 and the multiple second chambers 1312 have leaks, it is convenient to detect the leaking air path and replace or repair it in time, thereby ensuring the adsorption performance of the first adsorption component 120 and the second adsorption component 130 on the sample to be repaired 400, and improving the performance of the sample setting device 100.

[0070] For example, if the first air pressure difference is -40 MPa and the second air pressure difference is -20 MPa, the air tightness of the first chamber 1212 and the second chamber 1312 connected to the switch element 167 is poor and there is air leakage.

[0071] Please also see Figure 3In some embodiments, the sample setting device 100 further includes a guide member 180 and a stop member 190, wherein the guide member 180 is disposed on the carrier platform assembly 110 and extends along the second direction, and the second adsorption assembly 130 is slidably connected to the guide member 180 along the second direction; the stop member 190 is connected to the second adsorption assembly 130, and the stop member 190 has a first state and a second state relative to the guide member 180, when the stop member 190 is in the first state, the stop member 190 locks the guide member 180, and the relative position of the second adsorption assembly 130 and the carrier platform assembly 110 is fixed; when the stop member 190 is in the second state, the stop member 190 is unlocked from the guide member 180, so that the second adsorption assembly 130 can move relative to the carrier platform assembly 110.

[0072] In this embodiment, the guide member 180 extends along the second direction, and the second adsorption component 130 is slidably connected to the guide member 180 along the second direction. The guide member 180 provides a guide for the movement of the second adsorption component 130 to avoid the second adsorption component 130 from shifting during the movement relative to the first adsorption component 120, thereby improving the accuracy of adjusting the distance between the first adsorption component 120 and the second adsorption component 130 in the second direction. In addition, the sample setting device 100 also includes a stopper 190. When the stopper 190 is in the first state, the stopper 190 locks the guide member 180. The stopper 190 is connected to the second adsorption component 130, and the relative position of the second adsorption component 130 and the guide member 180 is fixed. Furthermore, the relative position of the second adsorption component 130 and the supporting platform component 110 is fixed, and the distance between the first adsorption component 120 and the second adsorption component 130 in the second direction is fixed, so that when the first adsorption component 120 and the second adsorption component 130 are used together to adsorb the sample 400 to be repaired, the second adsorption component 130 can be prevented from sliding relative to the supporting platform component 110 along the second direction toward the direction away from the first adsorption component 120, causing the sample 400 to fall off, thereby improving the structural stability of the sample 400 to be repaired set on the supporting platform component 110. When the stopper 190 is in the second state, the stopper 190 is unlocked from the guide member 180, and the second adsorption component 130 is unlocked from the guide member 180, and the second adsorption component 130 can move relative to the guide member 180 in the second direction, so that the second adsorption component 130 can move relative to the carrier platform component 110, which is convenient for the staff to adjust the distance between the first adsorption component 120 and the second adsorption component 130 in the second direction, so that the sample setting device 100 is suitable for samples 400 to be repaired of different sizes. When the sample setting device 100 is used in the laser repair system 300, there is no need to frequently replace the sample setting device 100, which is conducive to improving the efficiency of the laser repair system 300 in repairing the sample 400 to be repaired.

[0073] Optionally, the stopper 190 may be, but is not limited to, a guide rail clamp.

[0074] Optionally, the sample setting device 100 also includes a scale 240, which is arranged on the support platform assembly 110 and adjacent to the guide member 180, and the scale 240 extends along the second direction. When the second adsorption assembly 130 moves relative to the guide member 180 along the second direction, the distance moved by the second adsorption assembly 130 can be obtained through the scale 240, and the distance between the first adsorption assembly 120 and the second adsorption assembly 130 along the second direction can also be obtained through the scale 240, so that it is convenient for the staff to determine the distance moved by the second adsorption assembly 130 relative to the support platform assembly 110 according to the size of the sample 400 to be repaired, which is beneficial to improving the efficiency of adjusting the distance between the second adsorption assembly 130 and the first adsorption assembly 120. When the sample setting device 100 is applied to the laser repair system 300 and the laser repair system 300 is used to repair samples 400 to be repaired of different sizes, the time for setting samples 400 to be repaired of different sizes can be saved, which is beneficial to improving the repair efficiency of the samples 400 to be repaired.

[0075] Optionally, the sample setting device 100 further includes a first drag chain 250 , the first drag chain 250 having a first end and a second end disposed opposite to each other, the first end being connected to the first adsorption component 120 , the second end being connected to the support platform component 110 , and the first drag chain 250 being used to pass through the plurality of second pipe members 164 .

[0076] In this embodiment, the first drag chain 250 is used to pass through the multiple second pipe members 164. When the second adsorption component 130 moves along the second direction relative to the supporting platform component 110, the first drag chain 250 can drive the second pipe member 164 to move to adapt to the movement of the second adsorption component 130. Compared with the solution in which the second pipe member 164 is fixed to the supporting platform component 110, the solution of the present application can avoid the second pipe member 164 and the second connecting member 162 from pulling each other, and can avoid the second pipe member 164 and the three-way joint 166 from pulling each other. In addition, the first drag chain 250 can physically protect the second pipe member 164, avoid the second pipe member 164 from being crushed, ensure the connectivity of the gas circuits between the second connecting member 162, the second pipe member 164 and the three-way joint 166, and extend the service life of the second pipe member 164, thereby ensuring the adsorption effect of the second adsorption component 130 on the sample 400 to be repaired, and improving the performance of the sample setting device 100.

[0077] See also Figure 5In some embodiments, the sample setting device 100 includes a first horizontal adjustment mechanism 210, and the first horizontal adjustment mechanism 210 includes a plurality of first adjustment components 211, and the plurality of first adjustment components 211 are spaced apart on the first mounting plate 122, and the plurality of first adjustment components 211 cooperate to adjust the horizontality of the first adsorption plate 123.

[0078] In this embodiment, the first level adjustment mechanism 210 includes a plurality of first adjustment components 211, and the plurality of first adjustment components 211 cooperate to adjust the level of the first adsorption plate 123, so that the first adsorption plate 123 is parallel to the second adsorption plate 133, or the first adsorption plate 123 and the second adsorption plate 133 are as parallel as possible, in other words, so that the first adsorption plate 123 and the second adsorption plate 133 are adjusted to the same horizontal plane. When the opposite ends of the sample 400 to be repaired are respectively arranged on the first adsorption component 120 and the second adsorption component 130, the sample 400 to be repaired can be arranged flatly above the first adsorption plate 123 and the second adsorption plate 133, so as to avoid reducing the adsorption effect of the plurality of first adsorption holes 121 and the plurality of second adsorption holes 131 on the sample 400 to be repaired due to the height difference between the first adsorption plate 123 and the second adsorption plate 133, thereby improving the stability of the sample 400 to be repaired being arranged on the sample setting device 100, and improving the use performance of the sample setting device 100.

[0079] Please also see Fig. 9 and Fig.11 In some embodiments, each of the first adjustment components 211 includes a first adjustment member 212, a locking member 213 and a first fixing member 214, the first adjustment member 212 is sequentially passed through the locking member 213 and the first mounting plate 122, and the first adjustment member 212 is threadedly connected to the locking member 213 and the first mounting plate 122, respectively, the first adjustment member 212 passes through the surface of the first mounting plate 122 away from the locking member 213 and abuts against the support platform component 110; the first adjustment member 212 is used to adjust the relative position of the support platform component 110 and the first mounting plate 122, and the locking member 213 locks the first adjustment member 212 after the first mounting plate 122 and the support platform component 110 are in a preset position; the first fixing member 214 is sequentially passed through the first adjustment member 212 and the support platform component 110 to limit the relative position of the first adjustment member 212 and the support platform component 110.

[0080] It can be understood that the first adjusting member 212 has a first inner hole, and the first inner hole is used for passing the first fixing member 214 .

[0081] It can be understood that the preset position refers to the relative position of the first mounting plate 122 and the supporting platform assembly 110 when the first adsorption plate 123 is parallel to the second adsorption plate 133 .

[0082] In this embodiment, the first adjusting member 212 is threadedly connected to the locking member 213 and the first mounting plate 122, respectively. The first adjusting member 212 passes through the surface of the first mounting plate 122 away from the locking member 213 and abuts against the supporting platform assembly 110. When the first adjusting member 212 rotates relative to the first mounting plate 122, one end of the first adjusting member 212 abuts against the supporting platform assembly 110, and the first adjusting member 212 will drive the first mounting plate 122 to move along the third direction toward or away from the supporting platform assembly 110 to adjust the relative position of the first mounting plate 122 and the supporting platform assembly 110, thereby adjusting the relative position of the first adsorption plate 123 and the supporting platform assembly 110. The locking member 213 is used to lock the first adjusting member 212. The locking member 213 can rotate relative to the first adjusting member 212. When the locking member 213 presses the first mounting plate 122 away from the surface of the supporting platform assembly 110, the relative position of the locking member 213 and the first adjusting member 212 is locked to prevent the first adjusting member 212 from continuing to rotate relative to the first mounting plate 122 and changing the position of the first mounting plate 122, thereby locking the relative position of the first mounting plate 122 and the supporting platform assembly 110, and finally locking the relative position of the first adsorption plate 123 and the supporting platform assembly 110. Furthermore, the first adjusting component 211 also includes a first fixing member 214, and the first fixing member 214 is sequentially inserted into the first adjusting member 212 and the supporting platform assembly 110 to avoid deflection of the first adjusting member 212 and the supporting platform assembly 110, which is beneficial to further limit the relative position of the first adjusting member 212 and the supporting platform assembly 110, and improve the accuracy of the first adjusting component 211 in adjusting the horizontality of the first adsorption plate 123.

[0083] See also Figure 3 In some embodiments, the sample setting device 100 also includes a limiting plate 220, and the limiting plate 220 includes a first sub-plate 221 and a second sub-plate 222 that are bent and connected to each other, the first sub-plate 221 is connected to the supporting plate assembly, and the second sub-plate 222 is connected to the side of the first mounting plate 122 away from the second adsorption assembly 130.

[0084] Optionally, in some embodiments, the first sub-board 221 is perpendicular to the second sub-board 222 .

[0085] In this embodiment, the first sub-plate 221 is connected to the supporting plate assembly. In other words, the first sub-plate 221 is connected to the surface of the supporting plate assembly facing the first adsorption assembly 120, and the second sub-plate 222 is connected to the side of the first mounting plate 122 away from the second adsorption assembly 130. The first sub-plate 221 and the second sub-plate 222 cooperate to support and limit the first mounting plate 122 to prevent the first mounting plate 122 from flipping toward the side away from the second adsorption assembly 130, thereby improving the structural stability of the first mounting plate 122 set on the supporting platform assembly 110, and further improving the structural stability of the first adsorption plate 123 set on the supporting platform assembly 110, so that the multiple first adsorption holes 121 of the first adsorption plate 123 can effectively play an adsorption role to adsorb the sample 400 to be repaired.

[0086] Please also see Fig. 9 and Fig.12 In some embodiments, the carrier platform assembly 110 includes a first carrier plate 111 and a second carrier plate 112, the first carrier plate 111 and the second carrier plate 112 are stacked along a third direction, and the side of the second carrier plate 112 away from the first carrier plate 111 is used to set the first adsorption component 120 and the second adsorption component 130; the sample setting device 100 also includes a second horizontal adjustment mechanism 230, the second horizontal adjustment mechanism 230 includes a penetration member 231 and a plurality of second adjustment components 232, the penetration member 231 and the plurality of second adjustment components 232 are arranged around the periphery of the second carrier plate 112, and the penetration member 231 and the plurality of second adjustment components 232 cooperate to adjust the second carrier plate 112 The penetration member 231 is used to connect the first supporting plate 111 and the second supporting plate 112, the second adjusting component 232 includes a second adjusting member 2321 and a second fixing member 2322, the second adjusting member 2321 is penetrated by the second supporting plate 112 and is threadedly connected to the second supporting plate 112, the second adjusting member 2321 abuts against the first supporting plate 111 on the side away from the second supporting plate 112, the second adjusting member 2321 is used to adjust the relative position of the first supporting plate 111 and the second supporting plate 112, the second fixing member 2322 is sequentially penetrated by the second adjusting member 2321 and the first supporting plate 111, and the relative position of the first supporting plate 111 and the second supporting plate 112 is limited.

[0087] It can be understood that along the third direction, the first supporting plate 111, the second supporting plate 112, the first mounting plate 122 and the first adsorption plate 123 are arranged in sequence; the first supporting plate 111, the second supporting plate 112, the second mounting plate 132 and the second adsorption plate 133 are arranged in sequence.

[0088] It can be understood that the second adjusting member 2321 has a second inner hole, and the second inner hole is used for passing the second fixing member 2322 .

[0089] In this embodiment, the penetration member 231 and the plurality of second adjustment components 232 are arranged around the outer periphery of the second carrier plate 112 to adjust the level of the second carrier plate 112, thereby simultaneously adjusting the level of the first adsorption plate 123 and the level of the second adsorption plate 133, so as to prevent the first adsorption plate 123 and the second adsorption plate 133 from tilting as a whole, so that the first adsorption plate 123 and the second adsorption plate 133 are both located in a horizontal position, so as to better adsorb the sample 400 to be repaired. Specifically, with the penetration member 231 as a reference, at least one of the plurality of second adjustment components 232 is adjusted to adjust the relative position of the second carrier plate 112 and the first carrier plate 111. The second adjusting member 2321 is threadedly connected to the second supporting plate 112, and the side of the second adjusting member 2321 facing away from the second supporting plate 112 abuts against the first supporting plate 111. When the second adjusting member 2321 rotates relative to the second supporting plate 112, one end of the second adjusting member 2321 abuts against the first supporting plate 111, and the second adjusting member 2321 drives the second supporting plate 112 to move along the third direction toward or away from the first supporting plate 111, so as to adjust the relative position of the first supporting plate 111 and the second supporting plate 112, so as to make the first adsorption plate 123 and the second adsorption plate 133 in a horizontal position. Furthermore, the second adjusting component 232 also includes a second fixing member 2322, which is sequentially arranged in the second adjusting member 2321 and the first supporting plate 111 to prevent the second adjusting member 2321 and the first supporting plate 111 from deflecting, thereby improving the accuracy of the second adjusting component 232 in adjusting the horizontality of the second supporting plate 112.

[0090] Optionally, the second horizontal adjustment mechanism 230 also includes a third fixing member (not shown in the figure), the penetration member 231 includes a first penetration portion 2311 and a second penetration portion 2312, the first penetration portion 2311 and the second penetration portion 2312 are arranged along a third direction, the first penetration portion 2311 has a first guiding slope facing the second penetration portion 2312 (not shown in the figure), the second penetration portion 2312 has a second guiding slope facing the first penetration portion 2311 (not shown in the figure), the first guiding slope and the second guiding slope are both arc surfaces, and the first guiding slope abuts against the second guiding slope; the third fixing member is sequentially penetrated through the second supporting plate 112, the second penetration portion 2312, the first penetration portion 2311 and the first supporting plate 111 to fix the relative positions of the first supporting plate 111 and the second supporting plate 112.

[0091] In this embodiment, the first penetration portion 2311 and the second penetration portion 2312 are arranged opposite to each other. When the second supporting plate 112 is slightly tilted relative to the first supporting plate 111, the weight of the second supporting plate 112 is carried on the first penetration portion 2311 through the second penetration portion 2312, pushing the second guiding inclined surface to slide relative to the first guiding inclined surface, so that the contact between the first penetration portion 2311 and the second penetration portion 2312 always maintains surface contact, so that the weight of the second supporting plate 112 is evenly transferred to the first supporting plate 111 through the second penetration portion 2312 and the first penetration portion 2311, avoiding point contact between the first penetration portion 2311 and the second penetration portion 2312 to cause stress concentration, thereby avoiding the first supporting plate 111 from breaking or deforming due to local aggravation of force, which is beneficial to extending the service life of the first supporting plate 111.

[0092] Optionally, the sample setting device 100 also includes a setting base 260, which is set between the support platform assembly 110 and the mounting seat 310. The setting base 260 can be moved relative to the mounting seat 310 along a first direction to drive the support platform assembly 110, the first adsorption assembly 120 and the second adsorption assembly 130 to move relative to the mounting seat 310 along the first direction; the support platform assembly 110 can be moved relative to the setting base 260 along a second direction to drive the first adsorption assembly 120 and the second adsorption assembly 130 to move as a whole relative to the mounting seat 310 along the second direction. In other words, when the sample to be repaired 400 is set on the first adsorption assembly 120 and the second adsorption assembly 130, the sample to be repaired 400 can move relative to the mounting seat 310 along the first direction and along the second direction to adjust the relative position of the sample to be repaired 400 and the laser repair part 330.

[0093] Optionally, the sample setting device 100 also includes a second drag chain (not shown in the figure), the second drag chain has a third end and a fourth end arranged in opposite directions, the third end is connected to the support platform assembly 110, and the fourth end is connected to the setting base 260, and the second drag chain is used to pass through the multiple third pipeline components 165 and / or the main pipeline 150; the laser repair system 300 also includes a third drag chain (not shown in the figure), the third drag chain has a fifth end and a sixth end arranged in opposite directions, the fifth end is connected to the setting base 260, and the sixth end is connected to the mounting seat 310, and the third drag chain is used to pass through the multiple third pipeline components 165 and / or the main pipeline 150.

[0094] In this embodiment, the second drag chain is used to pass through the plurality of third pipe members 165 and / or the main pipe 150. When the bearing platform assembly 110 moves relative to the setting base 260 along the second direction, the second drag chain can drive the third pipe member 165 and / or the main pipe 150 to move to adapt to the movement of the bearing platform assembly 110. Compared with the solution in which the third pipe member 165 and / or the main pipe 150 are fixed to the setting base 260 or the mounting seat 310, the solution of the present application can avoid the third pipe member 165 and the three-way joint 166 from pulling each other, the third pipe member 165 and the main pipe 150 from pulling each other, and the main pipe 150 and the negative pressure mechanism 140 from pulling each other. Similarly, when the setting base 260 moves relative to the mounting seat 310 along the first direction, the third drag chain can drive the third pipe member 165 and / or the main pipe 150 to move to adapt to the movement of the setting base 260. Furthermore, in addition, the second drag chain and the third drag chain can physically protect the third pipe component 165 and the three-way joint 166, thereby preventing the third pipe component 165 and the three-way joint 166 from being crushed, ensuring the connectivity of the air circuits among the three-way joint 166, the third pipe component 165, the main pipeline 150 and the negative pressure mechanism 140, and extending the service life of the third pipe component 165 and / or the main pipeline 150, thereby ensuring the adsorption effect of the first adsorption component 120 and the second adsorption component 130 on the sample to be repaired 400, and improving the performance of the sample setting device 100.

[0095] Mentioning "embodiment" and "implementation method" in this application means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrases in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in the various embodiments of the present application can be arbitrarily combined to form another embodiment that does not deviate from the spirit and scope of the technical solution of the present application, provided that there is no contradiction between them.

[0096] Finally, it should be noted that the above implementation modes are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the above preferred implementation modes, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A sample setting device, characterized in that: The sample setting device comprises: Carrier assembly, A first adsorption component, the first adsorption component is arranged on the supporting platform component, the first adsorption component has a plurality of first adsorption holes and the plurality of first adsorption holes are arranged at intervals along a first direction; a second adsorption component, wherein the second adsorption component and the first adsorption component are arranged at the same side of the support platform component along a second direction, the second adsorption component can move relative to the support platform component along the second direction toward or away from the first adsorption component, the second adsorption component has a plurality of second adsorption holes, and the plurality of second adsorption holes are arranged at intervals along the first direction; wherein the first direction intersects the second direction; and A negative pressure mechanism is connected to the plurality of first adsorption holes and the plurality of second adsorption holes respectively, and is used to put the plurality of first adsorption holes and the plurality of second adsorption holes in a negative pressure state, so as to adsorb the sample to be repaired.

2. The sample setting device according to claim 1, characterized in that: The first adsorption assembly comprises a first mounting plate and a first adsorption plate, the first mounting plate and the first adsorption plate are stacked along a third direction, the first mounting plate is arranged on the bearing platform assembly, the first adsorption plate is arranged on the surface of the first mounting plate away from the bearing platform assembly, the first adsorption plate has the plurality of first adsorption holes, and the first adsorption holes penetrate the two surfaces of the first adsorption plate opposite to each other along the third direction, the plurality of first adsorption holes comprise a plurality of groups of first adsorption holes, each group of the first adsorption holes comprises at least one first adsorption hole, the first adsorption plate and the first mounting plate enclose a plurality of first chambers arranged at intervals, the plurality of first chambers are respectively connected to the negative pressure mechanism, each first chamber is connected to a group of the first adsorption holes, and different first chambers are connected to different first adsorption holes; The second adsorption assembly includes a second mounting plate and a second adsorption plate, the second mounting plate and the second adsorption plate are stacked along a third direction, the second mounting plate is arranged on the supporting platform assembly, the second adsorption plate is arranged on the surface of the second mounting plate away from the supporting platform assembly, the second adsorption plate has the plurality of second adsorption holes, and the second adsorption holes penetrate the two surfaces of the second adsorption plate opposite to each other along the third direction, the plurality of second adsorption holes include a plurality of groups of second adsorption holes, each group of the second adsorption holes includes at least one second adsorption hole, the second adsorption plate and the second mounting plate enclose a plurality of second chambers arranged at intervals, the plurality of second chambers are respectively connected to the negative pressure mechanism, each second chamber is connected to a group of the second adsorption holes, and different second chambers are connected to different second adsorption holes; wherein, the third direction intersects with the first direction and the second direction respectively.

3. The sample setting device according to claim 2, characterized in that: The sample setting device also includes a main pipeline and multiple connecting components, and the main pipeline cooperates with each of the connecting components to connect the negative pressure mechanism with one of the first chambers and one of the second chambers respectively, and the connecting components correspond to the first chamber and the second chamber one by one respectively; the connecting components include a first connecting piece, a second connecting piece, a first pipeline member, a second pipeline member, a third pipeline member and a three-way joint, the first connecting piece is connected to the first chamber, and the opposite ends of the first pipeline member are respectively connected to the first connecting piece and the three-way joint, the second connecting piece is connected to the second chamber, and the opposite ends of the second pipeline member are respectively connected to the second connecting piece and the three-way joint, and the opposite ends of the third pipeline member are respectively connected to the three-way joint and the main pipeline, and the end of the main pipeline away from the three-way joint is connected to the negative pressure mechanism.

4. The sample setting device according to claim 3, characterized in that: The connection assembly also includes a switch component, which is arranged on the third pipeline component and is used to control the connection or disconnection between the negative pressure mechanism and the three-way joint.

5. The sample setting device according to claim 4, characterized in that: The sample setting device further comprises a vacuum detector, which is arranged in the main pipeline and cooperates with the switch element to detect the vacuum tightness of each of the first chamber and the second chamber.

6. The sample setting device according to any one of claims 1 to 5, characterized in that: The sample setting device also includes a guide and a stopper, wherein the guide is arranged on the support platform assembly and extends along the second direction, and the second adsorption assembly is slidably connected to the guide along the second direction; the stopper is connected to the second adsorption assembly, and the stopper has a first state and a second state relative to the guide member, and when the stopper is in the first state, the stopper locks the guide member, and the relative positions of the second adsorption assembly and the support platform assembly are fixed; when the stopper is in the second state, the stopper is unlocked from the guide member, so that the second adsorption assembly can move relative to the support platform assembly.

7. The sample setting device according to any one of claims 2 to 5, characterized in that: The sample setting device includes a first level adjustment mechanism, which includes a plurality of first adjustment components, which are arranged at intervals on the first mounting plate, and the plurality of first adjustment components cooperate to adjust the horizontality of the first adsorption plate.

8. The sample setting device according to claim 7, characterized in that: Each of the first adjusting components includes a first adjusting member, a locking member and a first fixing member, the first adjusting member is sequentially passed through the locking member and the first mounting plate, and the first adjusting member is threadedly connected to the locking member and the first mounting plate, respectively, the first adjusting member passes through the surface of the first mounting plate away from the locking member and abuts against the supporting platform assembly; the first adjusting member is used to adjust the relative position of the supporting platform assembly and the first mounting plate, and the locking member locks the first adjusting member after the first mounting plate and the supporting platform assembly are in a preset position; the first fixing member is sequentially passed through the first adjusting member and the supporting platform assembly to limit the relative position of the first adjusting member and the supporting platform assembly.

9. The sample setting device according to any one of claims 2 to 5, characterized in that: The sample setting device further comprises a limiting plate, which comprises a first sub-plate and a second sub-plate connected by bending, wherein the first sub-plate is connected to the carrying plate assembly, and the second sub-plate is connected to a side of the first mounting plate away from the second adsorption assembly.

10. The sample setting device according to any one of claims 2 to 5, characterized in that: The carrier platform assembly includes a first carrier plate and a second carrier plate, the first carrier plate and the second carrier plate are stacked along a third direction, and a side of the second carrier plate away from the first carrier plate is used to set the first adsorption assembly and the second adsorption assembly; The sample setting device further includes a second level adjustment mechanism, which includes a penetration member and a plurality of second adjustment components, the penetration member and the plurality of second adjustment components are arranged around the periphery of the second carrier plate, and the penetration member and the plurality of second adjustment components cooperate to adjust the horizontality of the second carrier plate; The penetration member is used to connect the first bearing plate and the second bearing plate, the second adjusting component includes a second adjusting member and a second fixing member, the second adjusting member is penetrated through the second bearing plate and is threadedly connected to the second bearing plate, the side of the second adjusting member facing away from the second bearing plate abuts against the first bearing plate, the second adjusting member is used to adjust the relative position of the first bearing plate and the second bearing plate, the second fixing member is sequentially penetrated through the second adjusting member and the first bearing plate to limit the relative position of the first bearing plate and the second bearing plate.

11. A laser repair system, characterized in that: The laser repair system comprises: The sample setting device according to any one of claims 1 to 10, used for setting a sample to be repaired; A mounting seat, the mounting seat is used to carry the sample setting device, and the sample setting device can move relative to the mounting seat along a first direction; a stand, the stand being connected to the mounting base and being spaced apart from the sample setting device and arranged on the same side of the mounting base; and A laser repair part is connected to the stand and is arranged corresponding to the sample setting device to repair the sample to be repaired.

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