Cutting fluid cooling and recycling device for silicon wafer cutting machine

Abstract

The invention relates to the field of numerical control machine tools, and discloses a cutting fluid cooling and recycling device for a silicon wafer cutting machine, the cutting fluid cooling and recycling device comprises a tank body, a tank cover arranged on the tank body and a storage shell, a first motor is fixedly arranged above the tank cover, and the output end of the first motor penetrates through the tank cover and is fixedly connected with a rotating plate; the rotating plate is rotationally connected to the lower portion of the tank cover, a connecting vertical rod is fixedly arranged below the rotating plate, four stirring rod assemblies are arranged on the outer side of the connecting vertical rod, a fishing assembly is arranged on one side of each stirring rod assembly, and a telescopic electric cylinder is matched with the stirring rod assemblies, so that the distance between every two adjacent stirring rods is increased; and compared with a common stirring rod, the rotating rod and the rotating frame are arranged, so that the contact area between the stirring rod and the cutting fluid is increased, and the stirring and cooling efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of numerically controlled machine tools, in particular to a cutting fluid cooling and circulating device for a silicon wafer cutting machine. Background Art

[0002] Cutting fluid is an industrial liquid used in the process of metal cutting, grinding and grinding to cool and lubricate tools and workpieces. The lubricating effect of cutting fluid in the cutting process can reduce the friction between the front cutting edge and the chips, and between the back cutting edge and the processed surface, forming a partial lubricating film, thereby reducing cutting force, friction and power consumption, reducing the surface temperature and tool wear of the friction part between the tool and the workpiece blank, and improving the cutting performance of the workpiece material. In the grinding process, after the grinding fluid is added, the grinding fluid penetrates into the grinding wheel abrasive grains-workpiece and abrasive grains-chips to form a lubricating film, which reduces the friction between the interfaces, prevents the abrasive cutting edge from wearing and the chips from adhering, thereby reducing the grinding force and friction heat, and improving the durability of the grinding wheel and the surface quality of the workpiece; After cutting silicon wafers, there will be silicon particles and powder in the cutting fluid, and the cutting fluid needs to be cooled before it can be used again. Then, there are impurities in the cutting fluid, which will block the cutting fluid nozzle and affect the silicon wafer cutting efficiency. In the process of cooling the cutting fluid, the present application adds a structure for filtering impurities in the cutting fluid, while improving the cooling efficiency of the cutting fluid. Summary of the invention

[0003] The object of the present invention is to provide a cutting fluid cooling and recycling device for a silicon wafer cutting machine to solve the problems raised in the above-mentioned background technology.

[0004] In order to solve the above technical problems, the technical solution of the present invention is: a cooling and circulating device for cutting fluid of a silicon wafer cutting machine, comprising a tank body and a tank cover arranged on the tank body for stirring a chemical reactant and a cutting fluid, and a storage shell for controlling the discharge of the chemical reactant, a first motor is fixedly arranged above the tank cover, an output end of the first motor passes through the tank cover and is fixedly connected with a rotating plate, the rotating plate is rotatably connected to the bottom of the tank cover, a connecting vertical rod is fixedly arranged below the rotating plate, four groups of stirring rod assemblies for mixing and stirring the chemical reactant and the cutting fluid are arranged on the outside of the connecting vertical rod, and a catching assembly for catching larger impurities in the cutting fluid is respectively arranged on one side of each group of stirring rod assemblies; A telescopic electric cylinder for driving the stirring rod assembly to unfold is fixedly arranged above the connecting vertical rod, and four vertical slots corresponding to the positions of the four groups of stirring rod assemblies are opened on the connecting vertical rod, and limited position sliding slots are respectively opened inside the four vertical slots; The agitator rod assembly includes a connecting plate slidably connected in the vertical groove, the output end of the telescopic electric cylinder is fixedly connected to the four connecting plates, the multiple sliding plates are slidably connected in the limiting sliding groove, and the connecting plate is located directly above the sliding plate, and the connecting plate is fixedly connected to one side of the sliding plate with a stirring rod, and the stirring rod is provided with a through cavity, and a rotating block is arranged between each two adjacent stirring rods, one side of the rotating block is rotatably connected to two rotating rods, and the other ends of the two rotating rods are rotatably connected to the through cavities on the upper and lower stirring rods, the lower end of the top rotating block is fixedly connected to the vertical plate, and the vertical plate is slidably connected to the multiple rotating blocks below, the upper end of the top rotating block is rotatably connected to a rotating long rod, and the other end of the rotating long rod is rotatably connected to the bottom of the rotating plate.

[0005] Preferably, four vertical rods are fixedly connected to the lower end of the tank cover, and multiple groups of sliding components are arranged between the four vertical rods. The sliding components include a sliding ring slidably arranged between the four vertical rods, and four protrusions corresponding to the vertical rods are fixedly arranged on the outside of the sliding ring. The protrusions slide in the vertical rods, and an annular groove is opened inside the sliding ring.

[0006] Preferably, a convex plate is fixedly connected to one side of the stirring rod, and the convex plate is slidably connected in the annular groove.

[0007] Preferably, the fishing assembly includes rotating frames rotatably connected to one side of the stirring rod, one end of the rotating frames on the two adjacent stirring rods are connected by a hinge, magnet blocks are fixedly arranged on the opposite sides of the two rotating frames, and a fishing net for capturing impurities is fixedly arranged on the rotating frame.

[0008] Preferably, a water inlet shell is fixedly connected to the upper side of one side of the tank body, a water inlet pipe for injecting cutting fluid is fixedly connected to the lower side of the water inlet shell, a slag discharge pipe for removing impurities in the water inlet shell is fixedly connected to the lower side of the water inlet shell, a trapezoidal block is fixedly connected to the lower part of the water inlet shell, a water inlet parallel to the top of the trapezoidal block is opened on the outside of the tank body, the inside of the water inlet shell is connected with the inside of the tank body, and a drain pipe for discharging cutting fluid is fixedly connected to the lower part of the outer side of the tank body.

[0009] Preferably, four limiting vertical grooves are provided on the tank body, and the positions of the limiting vertical grooves correspond to the positions of the vertical rods.

[0010] Preferably, the material storage shell is fixedly connected to the upper end of the tank cover, and a material pre-storage bin is provided at the lower part of the interior of the material storage shell near the edge.

[0011] Preferably, a second motor is fixedly arranged at the lower center position inside the material storage shell, a rotating plate is fixedly connected to the upper end of the second motor, a material drop hole corresponding to the material unloading pre-storage bin is opened on the rotating plate, and a cover plate for sealing the internal space of the material storage shell is arranged above the material storage shell.

[0012] Preferably, a feed hole corresponding to the pre-storage bin for unloading materials is provided on the tank cover, and a through hole corresponding to the feed hole is provided on the rotating plate.

[0013] Compared with the prior art, the technical solution of the present invention has the following advantages: (1) The telescopic electric cylinder cooperates with the stirring rod assembly to increase the distance between two adjacent stirring rods. The setting of the rotating rod and the rotating frame increases the contact area between the stirring rod and the cutting fluid compared with the ordinary stirring rod, thereby improving the efficiency of stirring cooling; (2) When the distance between the stirring rods increases, the two rotating frames are driven to open. During the stirring process, the rotating frames drive the catching net to catch the impurities in the cutting fluid, thereby reducing the impurities in the cutting fluid. After catching, the telescopic electric cylinder drives the stirring rod to reset, and the stirring rod drives the two rotating frames together, sandwiching the impurities between the catching nets, and taking some of the impurities out of the cutting fluid, thereby reducing the reaction time between the chemical reactants and the impurities. (3) When stirring and cooling the cutting fluid, the distance between two adjacent stirring rods is controlled by controlling the extension and retraction of the telescopic electric cylinder to achieve stirring and cooling. The height and density of the stirring rods are adjusted to enhance the stirring effect on the cutting fluid and accelerate the cooling time of the cutting fluid. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the tank structure of the present invention; Figure 3 This is a schematic diagram of the planar structure of the water inlet shell of the present invention; Figure 4 This is a schematic diagram of the tank cover structure of the present invention; Figure 5 It is a schematic diagram of the structure of the rotating plate of the present invention; Figure 6 This is a schematic diagram of the connecting vertical rod structure of the present invention; Figure 7 It is a schematic diagram of the structure of the sliding assembly of the present invention; Figure 8 It is a schematic diagram of the structure of the stirring rod assembly and the fishing assembly of the present invention; Fig. 9 It is a schematic diagram of the pre-deployed structure of the stirring rod assembly and the fishing assembly of the present invention; Fig.10 This is a schematic diagram of the structure of the stirring rod assembly of the present invention; Fig.11 This is a schematic diagram of the structure of the fishing assembly of the present invention; Fig.12 It is a schematic diagram of the material storage shell structure of the present invention.

[0015] In the figure: 1, tank body; 11, water inlet shell; 111, water inlet pipe; 112, slag discharge pipe; 113, trapezoidal block; 114, water inlet; 115, limit vertical slot; 12, liquid discharge pipe; 2, tank cover; 21, first motor; 22, feed hole; 23, vertical rod; 24, rotating plate; 241, through hole; 25, connecting vertical rod; 251, telescopic electric cylinder; 252, vertical slot; 253, limit slide slot; 26, sliding assembly; 261, sliding ring; 262, bump; 2 63. annular groove; 27. stirring rod assembly; 271. stirring rod; 272. through cavity; 273. rotating rod; 274. rotating block; 275. convex plate; 276. rotating long rod; 277. vertical plate; 278. connecting plate; 279. sliding plate; 28. fishing assembly; 281. rotating frame; 282. magnet block; 283. fishing net; 3. storage shell; 31. second motor; 32. pre-storage bin for unloading materials; 33. rotating plate; 34. material drop hole; 35. cover plate. DETAILED DESCRIPTION

[0016] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0017] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. "Include" or "comprise" and other similar words used in the present disclosure mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Connect" or "connected" and other similar words are not limited to physical or mechanical connections, but may also include electrical connections, whether direct or indirect. "Up", "down", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0018] like Figure 1 , Figures 4 to 10As shown, a cooling and recycling device for cutting fluid for a silicon wafer cutting machine provided by the present invention comprises a tank body 1 and a tank cover 2 arranged on the tank body 1 for stirring a chemical reactant and a cutting fluid, and a material storage shell 3 for controlling the discharge of the chemical reactant, a first motor 21 is fixedly arranged above the tank cover 2, an output end of the first motor 21 passes through the tank cover 2 and is fixedly connected to a rotating plate 24, the rotating plate 24 is rotatably connected to the bottom of the tank cover 2, a connecting vertical rod 25 is fixedly arranged below the rotating plate 24, four groups of stirring rod assemblies 27 for mixing and stirring the chemical reactant and the cutting fluid are arranged on the outside of the connecting vertical rod 25, and a catching assembly 28 for catching larger impurities in the cutting fluid is respectively arranged on one side of each group of stirring rod assemblies 27; A telescopic electric cylinder 251 for driving the stirring rod assembly 27 to unfold is fixedly arranged on the upper part of the connecting vertical rod 25. Four vertical slots 252 corresponding to the positions of the four groups of stirring rod assemblies 27 are opened on the connecting vertical rod 25. The four vertical slots 252 are respectively provided with limited position slide slots 253; The stirring rod assembly 27 includes a connecting plate 278 slidably connected in the vertical groove 252, the output end of the telescopic electric cylinder 251 is fixedly connected to the four connecting plates 278, a plurality of sliding plates 279 are slidably connected in the limiting slide groove 253, and the connecting plate 278 is located directly above the sliding plate 279, and the connecting plate 278 and one side of the sliding plate 279 are respectively fixedly connected to stirring rods 271, and the stirring rods 271 are provided with a through cavity 272, and a rotating block 274 is arranged between every two adjacent stirring rods 271, and one side of the rotating block 274 is rotatably connected to two rotating rods 273, and the other ends of the two rotating rods 273 are respectively rotatably connected in the through cavity 272 on the upper and lower stirring rods 271, the lower end of the uppermost rotating block 274 is fixedly connected to the vertical plate 277, and the vertical plate 277 is slidably connected to the plurality of rotating blocks 274 below, and the upper end of the uppermost rotating block 274 is rotatably connected to a rotating long rod 276, and the other end of the rotating long rod 276 is rotatably connected to the bottom of the rotating plate 24.

[0019] In this embodiment, when the cutting fluid is cooling and circulating, it is necessary to clean and remove the cutting impurities in the cutting fluid to prevent the impurities from blocking the cutting fluid nozzle and affecting the circulation of the cutting fluid. During the cooling process, the cutting fluid is injected into the tank body 1, and the output end of the telescopic electric cylinder 251 drives the connecting plate 278 to move downward, and the connecting plate 278 drives the stirring rod 271 to move downward. The stirring rod 271 drives the rotating block 274 to move by rotating the long rod 276, and the rotating block 274 drives the rotating rod 273, so that the two rotating rods 273 move the two adjacent The stirring rod 271 is spread out, so that the distance between the two stirring rods 271 increases, and the uppermost rotating block 274 drives the lower rotating block 274 to move through the vertical plate 277, so that the direct distance between the two adjacent stirring rods 271 increases. At this time, when the first motor 21 drives the stirring rod assembly 27 to rotate, not only the stirring rod 271 stirs the cutting fluid, but also the rotating rod 273 and the vertical plate 277 are added to stir the cutting fluid, thereby improving the stirring effect, accelerating the cooling of the cutting fluid, and accelerating the mixing of the cutting fluid and the chemical reactant.

[0020] like Figures 1 to 3 , Fig.11 and Fig.12 As shown, four vertical rods 23 are fixedly connected to the lower end of the tank cover 2, and multiple groups of sliding components 26 are arranged between the four vertical rods 23. The sliding component 26 includes a sliding ring 261 slidably arranged between the four vertical rods 23, and four protrusions 262 corresponding to the vertical rods 23 are fixedly arranged on the outside of the sliding ring 261. The protrusions 262 slide in the vertical rods 23, and an annular groove 263 is opened inside the sliding ring 261.

[0021] A convex plate 275 is fixedly connected to one side of the stirring rod 271 , and the convex plate 275 is slidably connected in the annular groove 263 .

[0022] The fishing assembly 28 includes a rotating frame 281 which is rotatably connected to one side of the stirring rod 271, and one end of the rotating frame 281 on two adjacent stirring rods 271 is connected by a hinge. A magnet block 282 is fixedly set on the opposite side of the two rotating frames 281. The magnet block 282 is used to assist the two rotating frames 281 to fit together. A fishing net 283 for capturing impurities is fixedly set on the rotating frame 281.

[0023] A water inlet shell 11 is fixedly connected to the upper side of the tank body 1, a water inlet pipe 111 for injecting cutting fluid is fixedly connected to the lower side of the water inlet shell 11, a slag discharge pipe 112 for removing impurities in the water inlet shell 11 is fixedly connected to the lower side of the water inlet shell 11, a trapezoidal block 113 is fixedly connected to the lower part of the water inlet shell 11, a water inlet 114 parallel to the top of the trapezoidal block 113 is opened on the outside of the tank body 1, so that the inside of the water inlet shell 11 is connected with the inside of the tank body 1, a drain pipe 12 for discharging cutting fluid is fixedly connected to the lower side of the tank body 1, and a filter is provided at the inlet of the drain pipe 12.

[0024] Four limiting vertical grooves 115 are formed on the tank body 1 , and the positions of the limiting vertical grooves 115 correspond to the positions of the vertical rods 23 .

[0025] The material storage shell 3 is fixedly connected to the upper end of the tank cover 2. The material storage shell 3 is used to store chemical reactants. A material pre-storage bin 32 is provided at the lower part of the material storage shell 3 near the edge.

[0026] A second motor 31 is fixedly arranged at the lower center position inside the storage shell 3, and a rotating plate 33 is fixedly connected to the upper end of the second motor 31. The rotating plate 33 is provided with a material drop hole 34 corresponding to the material pre-storage bin 32. A cover plate 35 for sealing the internal space of the storage shell 3 is arranged above the storage shell 3.

[0027] The tank cover 2 is provided with a feeding hole 22 corresponding to the material pre-storage bin 32 , and the rotating plate 24 is provided with a through hole 241 corresponding to the feeding hole 22 .

[0028] In this embodiment: after the cutting fluid is injected into the water inlet shell 11 through the water inlet pipe 111, since the water inlet 114 is at a high position, the larger impurities in the cutting fluid sink below the trapezoidal block 113 and cannot flow over the trapezoidal block 113 as the cutting fluid rises and enters the tank body 1 from the water inlet 114. When it is necessary to clean the impurities in the water inlet shell 11, the valve on the slag discharge pipe 112 is opened, and water is injected into the water inlet shell 11 through the water inlet pipe 111. The water drives the impurities in the water inlet shell 11 to flow out from the slag discharge pipe 112, and the impurities in the cutting fluid are simply filtered before cooling and filtering. When the cutting fluid enters the tank body 1, the second motor 31 drives the rotating plate 33 to rotate. When the drop hole 34 passes above the pre-storage bin 32, the chemical reactant on the rotating plate 33 falls into the pre-storage bin 32. When the drop hole 34 moves away from the pre-storage bin 32, the second motor 31 stops working. When the cutting fluid is injected, the first motor 21 drives the connecting vertical rod 25 to rotate through the rotating plate 24. When the rotating plate 24 rotates, the through hole 241 passes below the pre-storage bin 32, and the cutting fluid in the pre-storage bin 32 falls into the tank body 1. When the output end of the telescopic electric cylinder 251 is retracted downward, the stirring rod 271 is directly enlarged. At the same time, the stirring rod 271 drives the sliding ring 261 to slide in the vertical rod 23 by driving the convex plate 275. When the first motor 21 drives the connecting vertical rod 25 to rotate, the telescopic electric cylinder 251 drives the stirring rod assembly 27 to rotate. The stirring rod 271 and the through cavity 272 rotate in the sliding ring 261. The distance between the stirring rods 271 increases, driving the rotating frames 281 on the two adjacent stirring rods 271 to separate, so that the fishing net 283 on the rotating frame 281 changes from a horizontal state to a vertical state. When the connecting vertical rod 25 drives the stirring rod assembly 27 to rotate, the rotating frame 281 also stirs the cutting fluid, accelerates the mixing efficiency of the chemical reactant and the cutting fluid, and improves the cooling speed of the cutting fluid. The rotating frame 281 drives The fishing net 283 rotates in the cutting fluid, so that the fishing net 283 catches the impurities in the cutting fluid. When the cutting fluid is cooled, the output end of the telescopic electric cylinder 251 drives the stirring rod 271 to slowly reset, so that the two adjacent stirring rods 271 are attached together. At this time, the stirring rod 271 drives the rotating frame 281 to close, and the impurities are clamped between the two fishing nets 283. The fishing assembly 28 and the stirring rod assembly 27 are both recovered to the top of the tank body 1, so that the impurities captured by the fishing net 283 are separated from the cutting fluid, the impurities in the cutting fluid are reduced, and the mixing efficiency of the chemical reactant and the cutting fluid is improved. After the reaction is completed, the impurities in the cutting fluid are condensed into larger clumps, and the drain pipe 12 is opened to discharge the cutting fluid. Because the filter screen is provided at the inlet of the drain pipe 12, the clumps of impurities condensed cannot be discharged together with the cutting fluid. When the cutting fluid is stirred and cooled, the distance between two adjacent stirring rods 271 is controlled by controlling the extension and contraction of the telescopic electric cylinder 251 to achieve stirring and cooling, and the height and density of the stirring rods 271 are adjusted to enhance the stirring effect and speed up the cooling time.

[0029] The above embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention. The protection scope of the present invention is defined by the claims. Those skilled in the art may make various modifications or equivalent substitutions to the present invention within the essence and protection scope of the present invention, and such modifications or equivalent substitutions shall also be deemed to fall within the protection scope of the present invention.

Claims

1. A cooling and recycling device for a cutting fluid for a silicon wafer cutting machine, comprising a tank body (1), a tank cover (2) arranged on the tank body (1) for stirring a chemical reactant and a cutting fluid mixture, and a storage shell (3) for controlling the discharge of the chemical reactant, characterized in that: A first motor (21) is fixedly arranged above the tank cover (2); an output end of the first motor (21) penetrates the tank cover (2) and is fixedly connected to a rotating plate (24); the rotating plate (24) is rotatably connected to the bottom of the tank cover (2); a connecting vertical rod (25) is fixedly arranged below the rotating plate (24); four groups of stirring rod assemblies (27) for mixing and stirring chemical reactants and cutting fluid are arranged outside the connecting vertical rod (25); and a catching assembly (28) for catching larger impurities in the cutting fluid is respectively arranged on one side of each group of stirring rod assemblies (27); A telescopic electric cylinder (251) for driving the stirring rod assembly (27) to unfold is fixedly arranged above the connecting vertical rod (25), and four vertical slots (252) corresponding to the positions of the four groups of stirring rod assemblies (27) are provided on the connecting vertical rod (25), and limiting sliding slots (253) are respectively provided inside the four vertical slots (252); The stirring rod assembly (27) comprises a connecting plate (278) slidably connected in the vertical groove (252); the output end of the telescopic electric cylinder (251) is fixedly connected to four connecting plates (278); a plurality of sliding plates (279) are slidably connected in the limiting sliding groove (253); the connecting plate (278) is located directly above the sliding plate (279); stirring rods (271) are fixedly connected to one side of the connecting plate (278) and the sliding plate (279); the stirring rods (271) are provided with a through cavity (272); a rotating shaft is provided between each two adjacent stirring rods (271); A block (274) is provided, one side of the rotating block (274) is rotatably connected to two rotating rods (273), the other ends of the two rotating rods (273) are rotatably connected to the through cavities (272) on the upper and lower stirring rods (271), the lower end of the uppermost rotating block (274) is fixedly connected to a vertical plate (277), and the vertical plate (277) is slidably connected to the plurality of rotating blocks (274) below, the upper end of the uppermost rotating block (274) is rotatably connected to a rotating long rod (276), and the other end of the rotating long rod (276) is rotatably connected to the lower side of the rotating plate (24).

2. The device for cooling and circulating cutting fluid for a silicon wafer cutting machine according to claim 1, characterized in that: The lower end of the tank cover (2) is fixedly connected to four vertical rods (23), a plurality of sliding components (26) are arranged between the four vertical rods (23), and the sliding components (26) include a sliding ring (261) slidably arranged between the four vertical rods (23), a protrusion (262) is fixedly arranged on the outside of the sliding ring (261), and an annular groove (263) is opened inside the sliding ring (261).

3. The device for cooling and circulating cutting fluid for a silicon wafer cutting machine according to claim 2, characterized in that: A convex plate (275) is fixedly connected to one side of the stirring rod (271).

4. The device for cooling and circulating cutting fluid for a silicon wafer cutting machine according to claim 3, characterized in that: The fishing assembly (28) comprises a rotating frame (281) rotatably connected to one side of the stirring rod (271), one end of the rotating frame (281) on two adjacent stirring rods (271) is connected via a hinge, a magnet block (282) is fixedly provided on one side opposite to the two rotating frames (281), and a fishing net (283) for fishing impurities is fixedly provided on the rotating frame (281).

5. The device for cooling and circulating cutting fluid for a silicon wafer cutting machine according to claim 4, characterized in that: A water inlet shell (11) is fixedly connected to the upper side of one side of the tank body (1), a water inlet pipe (111) for injecting cutting fluid is fixedly connected to the lower side of one side of the water inlet shell (11), a slag discharge pipe (112) for removing impurities in the water inlet shell (11) is fixedly connected to the lower side of the water inlet shell (11), a trapezoidal block (113) is fixedly connected to the lower side of the water inlet shell (11), a water inlet (114) parallel to the top of the trapezoidal block (113) is provided on the outer side of the tank body (1), the inner side of the water inlet shell (11) is communicated with the inner side of the tank body (1), and a liquid discharge pipe (12) for discharging cutting fluid is fixedly connected to the lower side of the outer side of the tank body (1).

6. The device for cooling and circulating cutting fluid for a silicon wafer cutting machine according to claim 5, characterized in that: The tank body (1) is provided with four limiting vertical grooves (115), and the positions of the limiting vertical grooves (115) correspond to the positions of the vertical rods (23).

7. The device for cooling and circulating cutting fluid for a silicon wafer cutting machine according to claim 1, characterized in that: The material storage shell (3) is fixedly connected to the upper end of the tank cover (2), and a material pre-storage bin (32) is provided at the lower part of the interior of the material storage shell (3) near the edge.

8. The device for cooling and circulating cutting fluid for a silicon wafer cutting machine according to claim 7, characterized in that: A second motor (31) is fixedly arranged at a central position at the lower part of the material storage shell (3); a rotating plate (33) is fixedly connected to the upper end of the second motor (31); a material drop hole (34) corresponding to the material pre-storage bin (32) is provided on the rotating plate (33); and a cover plate (35) for sealing the internal space of the material storage shell (3) is arranged above the material storage shell (3).

9. The device for cooling and circulating cutting fluid for a silicon wafer cutting machine according to claim 8, characterized in that: The tank cover (2) is provided with a feeding hole (22) corresponding to the material pre-storage bin (32), and the rotating plate (24) is provided with a through hole (241) corresponding to the feeding hole (22).

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