Vacuum ion coating device capable of uniformly coating

Abstract

The invention discloses a vacuum ion coating device capable of uniformly coating, and relates to the technical field of coating devices, the vacuum ion coating device comprises a support plate, the upper end of the support plate is provided with a vacuum coating device main body, and one side of the vacuum coating device main body is provided with a protective door; according to the vacuum ion coating device, when the inner wall of the vacuum coating device body needs to be cleaned, the output end of the lifting motor drives the lifting screw rod to rotate along the interior of the threaded hole, so that the lifting frame drives the rotating seat to descend, and in the descending process, the inner wall of the vacuum coating device body is cleaned. The output end of a first rotating motor drives a rotating gear to be engaged along the interior of a tooth groove, so that the tooth groove drives a rotating seat to rotate, and meanwhile, a cleaning brush is driven to rotate along the inner wall of the vacuum coating device main body, so that the interior of the vacuum coating device main body is rotationally cleaned; and manual cleaning of the interior of the vacuum coating device body is not needed, time and labor are saved, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of film coating devices, and in particular to a vacuum ion coating device capable of uniformly coating. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. There are many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main idea is to divide it into evaporation and sputtering.

[0003] During use, impurities are easily accumulated inside the existing coating device. After use, it needs to be manually cleaned using cleaning tools, which is cumbersome, time-consuming, labor-intensive, and has low cleaning efficiency. Therefore, the present invention proposes a vacuum ion coating device that can uniformly coat the film. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention provides a vacuum ion plating device capable of uniform film coating, which solves the problems raised by the above-mentioned background technology.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a vacuum ion plating device capable of uniform film coating, comprising a support plate, a vacuum plating device body is arranged at the upper end of the support plate, a protective door is arranged at one side of the vacuum plating device body, a door lock is arranged between the vacuum plating device body and the protective door, a vacuum pump is arranged at the upper end of the vacuum plating device body, an arc target and a control cabinet are arranged at the outer side of the vacuum plating device body, a base is arranged at the bottom of the support plate, a cleaning assembly and a moving seat are arranged inside the vacuum plating device body, a roller is arranged at the bottom of the moving seat, a hanging rotating assembly is arranged between the moving seat and the vacuum plating device body, a hanging rack is arranged at the upper end of the moving seat, and a hanging rack self-rotating assembly is arranged between the moving seat and the hanging rack;

[0006] The cleaning component includes a lifting motor, the output end of the lifting motor is connected to a lifting screw, a lifting frame is arranged inside the main body of the vacuum coating device, a threaded hole is arranged in the middle of the lifting frame, a rotating seat is arranged at the upper end of the lifting frame, a slider is connected to the bottom of the rotating seat, a sliding groove and a tooth groove are arranged on the outer side of the lifting frame, a cleaning brush and a mounting frame are arranged outside the lifting frame, a rotating motor 1 is arranged on the outer side of the mounting frame, and a rotating gear is connected to the output end of the rotating motor 1.

[0007] As a further technical solution of the present invention, the support plate is fixedly connected to the main body of the vacuum coating device, a hinge is provided between the main body of the vacuum coating device and the protective door, the input end of the vacuum pump is connected to the interior of the main body of the vacuum coating device, the number of the arc targets is several groups and distributed in an array, and a control circuit board and a power supply module are provided inside the control cabinet.

[0008] As a further technical solution of the present invention, the output end of the lifting motor is fixedly connected to the lifting screw, the lifting screw is matched with the threaded hole, the rotating seat and the slider are fixedly connected, the rotating seat is a circular ring structure, and the slide groove is matched with the slider.

[0009] As a further technical solution of the present invention, the cleaning brush is fixedly connected to the rotating seat, the cleaning brush is in contact with the inner wall of the main body of the vacuum coating device, the mounting frame is fixedly connected to the rotating seat, the output end of the rotating motor is fixedly connected to the rotating gear, and the rotating gear is meshed with the tooth groove.

[0010] As a further technical solution of the present invention, the pendant rotating assembly includes a connecting seat, the bottom of the connecting seat is fixedly connected to a driving motor, the output end of the driving motor is fixedly connected to a positioning seat, and the bottom of the movable seat is provided with a positioning groove that matches the positioning seat.

[0011] As a further technical solution of the present invention, an electric telescopic rod is arranged in the middle of the main body of the vacuum coating device, the output end of the electric telescopic rod is connected to the connecting seat, a guide hole is opened in the middle of the connecting seat, and the bottom of the support plate is fixedly connected to a guide rod matching the guide hole, and the bottom of the guide rod is fixedly connected to a limiting block.

[0012] As a further technical solution of the present invention, the self-rotating assembly of the bracket includes a bearing seat, a driven gear is fixedly connected to the outer side of the bracket, an inner cavity is opened inside the movable seat, a rotating motor 2 is arranged inside the inner cavity, and the rotating motor 2 is fixedly connected to the inner cavity.

[0013] As a further technical solution of the present invention, the output end of the second rotating motor is fixedly connected with a driving gear, the number of the second rotating motor and the driving gear is equal to the number of the brackets, and the driving gear is meshed with the driven gear.

[0014] The present invention provides a vacuum ion plating device capable of uniformly plating a film. Compared with the prior art, it has the following beneficial effects:

[0015] 1. The present invention is a vacuum ion plating device capable of uniform film coating. Through the setting of a cleaning component, when the inner wall of the main body of the vacuum coating device needs to be cleaned, the output end of the lifting motor drives the lifting screw to rotate along the inside of the threaded hole, so that the lifting frame drives the rotating seat to descend. During the descent, the output end of the rotating motor drives the rotating gear to mesh along the inside of the tooth groove, so that the tooth groove drives the rotating seat to rotate, and at the same time drives the cleaning brush to rotate along the inner wall of the main body of the vacuum coating device, thereby rotating and cleaning the inside of the main body of the vacuum coating device, without manual cleaning of the inside of the main body of the vacuum coating device, saving time and effort and improving cleaning efficiency.

[0016] 2. The present invention is a vacuum ion plating device which can coat films uniformly. Through the setting of the hanging rotating assembly, when the movable seat needs to rotate, the output end of the electric telescopic rod drives the connecting seat to rise, so that the guide hole slides along the outer side of the guide rod, and further the connecting seat drives the driving motor and the positioning seat to engage with the positioning groove, and the driving motor is started, so that the output end of the driving motor drives the positioning seat and the movable seat to rotate, so that several groups of hangers and hangers on the upper end of the movable seat rotate, and the coating operation is performed, thereby improving its coating efficiency.

[0017] 3. This design is a vacuum ion plating device that can be evenly coated. Through the setting of the self-rotating component of the rack, when the rack needs to self-rotate, the output end of the second rotating motor drives the driving gear and the driven gear to engage, so that the driven gear drives the rack to rotate along the inside of the bearing seat, and further drives the hanger on the outside of the rack to rotate, so that the hanger can be evenly coated. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structure of a vacuum ion plating device capable of uniform film coating;

[0019] Figure 2 Another perspective view of a vacuum ion plating device capable of uniform film coating;

[0020] Figure 3 A side sectional view of a vacuum ion plating device capable of uniform film coating;

[0021] Figure 4 A vacuum ion plating device capable of uniformly coating a film Figure 3 A magnified view of middle;

[0022] Figure 5 A vacuum ion plating device capable of uniformly coating a film Figure 3 Enlarged view of middle B;

[0023] Figure 6 A vacuum ion plating device capable of uniformly coating a film Figure 3 Enlarged view of middle C;

[0024] Figure 7 A vacuum ion plating device capable of uniformly coating a film Figure 3 Enlarged view of D in the middle.

[0025] In the figure: 1, support plate; 2, main body of vacuum coating device; 3, protective door; 4, door lock; 5, vacuum pump; 6, arc target; 7, control cabinet; 8, base; 9, cleaning component; 91, lifting motor; 92, lifting screw; 93, lifting frame; 94, threaded hole; 95, rotating seat; 96, slider; 97, slide groove; 98, cleaning brush; 99, tooth groove; 910, mounting frame; 911, rotating motor 1; 912, rotating gear; 10. Moving seat; 11. Roller; 12. Hanging bracket; 13. Hanging part rotating assembly; 131. Connecting seat; 132. Driving motor; 133. Positioning seat; 134. Positioning slot; 135. Electric telescopic rod; 136. Guide hole; 137. Guide rod; 138. Limiting block; 14. Hanging bracket self-rotating assembly; 141. Bearing seat; 142. Driven gear; 143. Inner cavity; 144. Rotating motor 2; 145. Driving gear. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0027] See also Figure 1-7 The present invention provides a technical solution of a vacuum ion plating device capable of uniform film coating: a vacuum ion plating device capable of uniform film coating, comprising a support plate 1, a vacuum plating device body 2 is arranged at the upper end of the support plate 1, a protective door 3 is arranged on one side of the vacuum plating device body 2, a door lock 4 is arranged between the vacuum plating device body 2 and the protective door 3, a vacuum pump 5 is arranged at the upper end of the vacuum plating device body 2, an arc target 6 and a control cabinet 7 are arranged on the outer side of the vacuum plating device body 2, a base 8 is arranged at the bottom of the support plate 1, a cleaning component 9 and a moving seat 10 are arranged inside the vacuum plating device body 2, a roller 11 is arranged at the bottom of the moving seat 10, a hanging rotating component 13 is arranged between the moving seat 10 and the vacuum plating device body 2, a hanging rack 12 is arranged at the upper end of the moving seat 10, and a hanging rack self-rotating component 14 is arranged between the moving seat 10 and the hanging rack 12;

[0028] Among them, the cleaning component 9 includes a lifting motor 91, the output end of the lifting motor 91 is connected to a lifting screw 92, a lifting frame 93 is arranged inside the main body 2 of the vacuum coating device, a threaded hole 94 is arranged in the middle of the lifting frame 93, a rotating seat 95 is arranged at the upper end of the lifting frame 93, a slider 96 is connected to the bottom of the rotating seat 95, a slide groove 97 and a tooth groove 99 are opened on the outside of the lifting frame 93, a cleaning brush 98 and a mounting frame 910 are arranged outside the lifting frame 93, a rotating motor 911 is arranged on the outside of the mounting frame 910, and a rotating gear 912 is connected to the output end of the rotating motor 911.

[0029] like Figure 1-2 As shown, the support plate 1 is fixedly connected to the main body 2 of the vacuum coating device, a hinge is provided between the main body 2 of the vacuum coating device and the protective door 3, the input end of the vacuum pump 5 is connected to the interior of the main body 2 of the vacuum coating device, the number of arc targets 6 is several groups and distributed in an array, and a control circuit board and a power supply module are provided inside the control cabinet 7, which is conducive to the coating operation.

[0030] like Figure 3-5 As shown, the output end of the lifting motor 91 is fixedly connected to the lifting screw 92, the lifting screw 92 is matched with the threaded hole 94, the rotating seat 95 is fixedly connected to the slider 96, the rotating seat 95 is a circular ring structure, the slide groove 97 is matched with the slider 96, the cleaning brush 98 is fixedly connected to the rotating seat 95, the cleaning brush 98 is in contact with the inner wall of the vacuum coating device body 2, the mounting frame 910 is fixedly connected to the rotating seat 95, the output end of the rotating motor 911 is fixedly connected to the rotating gear 912, the rotating gear 912 is meshed with the tooth groove 99, which is conducive to cleaning the inner wall of the vacuum coating device body 2.

[0031] like Figure 6 As shown, the hanger rotating assembly 13 includes a connecting seat 131, the bottom of the connecting seat 131 is fixedly connected to a driving motor 132, the output end of the driving motor 132 is fixedly connected to a positioning seat 133, and the bottom of the movable seat 10 is provided with a positioning groove 134 matched with the positioning seat 133. An electric telescopic rod 135 is arranged in the middle of the vacuum coating device body 2, and the output end of the electric telescopic rod 135 is connected to the connecting seat 131. A guide hole 136 is opened in the middle of the connecting seat 131, and a guide rod 137 matched with the guide hole 136 is fixedly connected to the bottom of the support plate 1, and a limiting block 138 is fixedly connected to the bottom of the guide rod 137, which is conducive to the rotation of the movable seat 10, and conveniently drives the hanger 12 and the hanger at the upper end of the hanger 12 to rotate, so as to facilitate uniform coating.

[0032] like Figure 7As shown, the self-rotating assembly 14 of the rack includes a bearing seat 141, a driven gear 142 is fixedly connected to the outer side of the rack 12, an inner cavity 143 is opened inside the movable seat 10, a rotating motor 144 is arranged inside the inner cavity 143, the rotating motor 144 is fixedly connected to the inner cavity 143, a driving gear 145 is fixedly connected to the output end of the rotating motor 144, the number of the rotating motor 144 and the driving gear 145 is equal to the number of the racks 12, and the driving gear 145 is meshed with the driven gear 142, which is conducive to the self-rotation of the rack 12, conveniently drives the hanger to rotate, and ensures that the hanger can be evenly coated.

[0033] The working principle of the present invention is as follows: when the device is in use, the hanger is hung on the upper end of the hanger 12, the protective door 3 is opened, the movable seat 10 and the hanger 12 are pushed into the interior of the vacuum coating device body 2 through the roller 11, the protective door 3 is closed, and then the movable seat 10 is rotated by the hanger rotating assembly 13, and at the same time, the hanger self-rotating assembly 14 drives the hanger 12 to rotate itself so that the hanger can be evenly coated.

[0034] It should be noted that, through the setting of the cleaning component 9, when the inner wall of the main body 2 of the vacuum coating device needs to be cleaned, the output end of the lifting motor 91 drives the lifting screw 92 to rotate along the inside of the threaded hole 94, so that the lifting frame 93 drives the rotating seat 95 to descend. During the descent process, under the support of the mounting frame 910, the output end of the rotating motor 911 drives the rotating gear 912 to mesh along the inside of the tooth groove 99, so that the tooth groove 99 drives the rotating seat 95 to rotate, and at the same time drives the slider 96 to rotate along the inside of the slide groove 97, further driving the cleaning brush 9 8 rotates along the inner wall of the vacuum coating device body 2, thereby rotating and cleaning the inside of the vacuum coating device body 2, until the lifting frame 93 moves to the bottom of the vacuum coating device body 2, and then the output end of the lifting motor 91 is controlled to reverse, thereby driving the lifting frame 93 to rise, and at the same time, the cleaning brush 98 continues to clean the inner wall of the vacuum coating device body 2, and then the inside of the vacuum coating device body 2 can be flushed with clean water to rinse away the cleaned impurities, without manual cleaning of the inside of the vacuum coating device body 2, saving time and effort and improving cleaning efficiency.

[0035] It should be noted that through the setting of the hanger rotating assembly 13, when the movable seat 10 needs to rotate, the output end of the electric telescopic rod 135 drives the connecting seat 131 to rise, so that the guide hole 136 slides along the outer side of the guide rod 137, and further the connecting seat 131 drives the driving motor 132 and the positioning seat 133 to engage with the positioning groove 134, and the driving motor 132 is started, so that the output end of the driving motor 132 drives the positioning seat 133 and the movable seat 10 to rotate, so that the several groups of hangers 12 and hangers at the upper end of the movable seat 10 rotate, and the coating operation is performed to improve its coating efficiency.

[0036] It should be noted that through the setting of the self-rotating component 14 of the hanger, when the hanger 12 needs to self-rotate, the output end of the rotating motor 144 drives the driving gear 145 to engage with the driven gear 142, so that the driven gear 142 drives the hanger 12 to rotate along the inside of the bearing seat 141, and further drives the hanger on the outside of the hanger 12 to rotate, so that the hanger can be evenly coated.

[0037] The above are only preferred embodiments of the invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of the invention, and these improvements and modifications should also be considered as the protection scope of the invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to conventional means in the art unless otherwise specified and limited.

Claims

1. A vacuum ion plating device capable of uniformly coating a film, comprising a support plate (1), characterized in that: A vacuum coating device body (2) is arranged at the upper end of the support plate (1), a protective door (3) is arranged on one side of the vacuum coating device body (2), a door lock (4) is arranged between the vacuum coating device body (2) and the protective door (3), a vacuum pump (5) is arranged at the upper end of the vacuum coating device body (2), an arc target (6) and a control cabinet (7) are arranged on the outer side of the vacuum coating device body (2), a base (8) is arranged at the bottom of the support plate (1), a cleaning assembly (9) and a moving seat (10) are arranged inside the vacuum coating device body (2), a roller (11) is arranged at the bottom of the moving seat (10), a hanging rotating assembly (13) is arranged between the moving seat (10) and the vacuum coating device body (2), a hanging rack (12) is arranged at the upper end of the moving seat (10), and a hanging rack self-rotating assembly (14) is arranged between the moving seat (10) and the hanging rack (12); The cleaning component (9) comprises a lifting motor (91), the output end of the lifting motor (91) is connected to a lifting screw (92), a lifting frame (93) is arranged inside the main body (2) of the vacuum coating device, a threaded hole (94) is arranged in the middle of the lifting frame (93), a rotating seat (95) is arranged at the upper end of the lifting frame (93), a slider (96) is connected to the bottom of the rotating seat (95), a sliding groove (97) and a tooth groove (99) are arranged on the outer side of the lifting frame (93), a cleaning brush (98) and a mounting frame (910) are arranged outside the lifting frame (93), a rotating motor (911) is arranged on the outer side of the mounting frame (910), and a rotating gear (912) is connected to the output end of the rotating motor (911).

2. A vacuum ion plating device capable of uniform film coating according to claim 1, characterized in that: The support plate (1) is fixedly connected to the main body (2) of the vacuum coating device, a hinge is provided between the main body (2) of the vacuum coating device and the protective door (3), an input end of the vacuum pump (5) is connected to the interior of the main body (2) of the vacuum coating device, the number of the arc targets (6) is a plurality of groups and they are distributed in an array, and a control circuit board and a power supply module are provided inside the control cabinet (7).

3. A vacuum ion plating device capable of uniform film coating according to claim 1, characterized in that: The output end of the lifting motor (91) is fixedly connected to the lifting screw (92), the lifting screw (92) is matched with the threaded hole (94), the rotating seat (95) is fixedly connected to the slider (96), the rotating seat (95) is a circular ring structure, and the sliding groove (97) is matched with the slider (96).

4. The vacuum ion plating device capable of uniform film coating according to claim 1, characterized in that: The cleaning brush (98) is fixedly connected to the rotating seat (95), the cleaning brush (98) is in contact with the inner wall of the vacuum coating device body (2), the mounting frame (910) is fixedly connected to the rotating seat (95), the output end of the rotating motor (911) is fixedly connected to the rotating gear (912), and the rotating gear (912) is meshed with the tooth groove (99).

5. The vacuum ion plating device capable of uniform film coating according to claim 1, characterized in that: The pendant rotating assembly (13) comprises a connecting seat (131), the bottom of the connecting seat (131) is fixedly connected to a driving motor (132), the output end of the driving motor (132) is fixedly connected to a positioning seat (133), and the bottom of the movable seat (10) is provided with a positioning groove (134) adapted to the positioning seat (133).

6. A vacuum ion plating device capable of uniform film coating according to claim 5, characterized in that: An electric telescopic rod (135) is arranged in the middle of the main body (2) of the vacuum coating device, the output end of the electric telescopic rod (135) is connected to the connecting seat (131), a guide hole (136) is opened in the middle of the connecting seat (131), and a guide rod (137) adapted to the guide hole (136) is fixedly connected to the bottom of the support plate (1), and a limiting block (138) is fixedly connected to the bottom of the guide rod (137).

7. The vacuum ion plating device capable of uniform film coating according to claim 1, characterized in that: The self-rotating assembly (14) of the hanger comprises a bearing seat (141); a driven gear (142) is fixedly connected to the outer side of the hanger (12); an inner cavity (143) is provided inside the movable seat (10); a second rotating motor (144) is provided inside the inner cavity (143); and the second rotating motor (144) is fixedly connected to the inner cavity (143).

8. The vacuum ion plating device capable of uniform film coating according to claim 7, characterized in that: The output end of the second rotating motor (144) is fixedly connected with a driving gear (145); the number of the second rotating motor (144) and the driving gear (145) is equal to the number of the hanger (12); and the driving gear (145) is meshed with the driven gear (142).

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