Helium detection device for air tightness detection of vacuum equipment and use method of helium detection device

Abstract

The invention provides a helium detection device for airtightness detection of vacuum equipment and a use method thereof.The helium detection device comprises a rigid helium detection cabin, the rigid helium detection cabin is provided with a closed cabin body structure, and a gas distribution system and a gas collection system are further arranged in the rigid helium detection cabin and used for filling and recycling helium respectively; the gas distribution system comprises a plurality of gas distribution pipes, the gas distribution pipes are arranged at the bottom of the rigid helium detection cabin, and each gas distribution pipe is provided with a plurality of gas distribution holes and gas distribution valves; the gas distribution pipe is connected with the bottom of the helium storage tank; the gas collection system comprises a plurality of gas collection pipes, the gas collection pipes are arranged at the top of the rigid helium detection cabin, each gas collection pipe is provided with a plurality of gas collection ports and a gas collection valve, the gas collection pipes are connected with a fan, and the fan is connected with the top of the helium storage tank or the atmosphere through a pipeline. By optimizing the gas distribution and collection system, the helium concentration in the helium detection cabin can be accurately controlled so as to meet the detection requirements of different devices, efficient recycling of helium is achieved, and helium loss is remarkably reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum equipment detection equipment, and in particular to a helium detection device for air tightness detection of vacuum equipment and a use method thereof. Background Art

[0002] In modern industrial production, helium is widely used in the field of leak detection (helium detection) due to its unique physical properties. However, due to the limited and expensive helium resources, efficient recovery and reuse of helium during use is of great significance. In the prior art, helium detection equipment is mostly a simple helium filling and discharging system, with low helium utilization rate and large helium emission loss, resulting in high cost of use. Summary of the invention

[0003] The purpose of the present invention is to provide a helium detection device for airtightness detection of vacuum equipment and a method of using the same, so as to achieve efficient recovery and recycling of helium, thereby reducing operating costs and protecting resources and the environment.

[0004] According to the purpose of the present invention, the present invention provides a helium detection device for airtightness detection of vacuum equipment, comprising a rigid helium detection cabin, the rigid helium detection cabin having a closed cabin structure, and the interior of the rigid helium detection cabin is also provided with a gas distribution system and a gas collection system, which are respectively used for filling and recycling helium; wherein:

[0005] The gas distribution system includes a plurality of gas distribution pipes, which are arranged at the bottom of the rigid helium inspection chamber, and each of the gas distribution pipes is provided with a plurality of gas distribution holes and gas distribution valves; the gas distribution pipes are connected to the bottom of the helium storage tank;

[0006] The gas collection system includes a plurality of gas collection pipes, which are arranged on the top of the rigid helium inspection cabin. Each of the gas collection pipes is provided with a plurality of gas collection ports and a gas collection valve. The gas collection pipes are connected to a fan, and the fan is connected to the top of the helium storage tank or to the atmosphere through a pipeline.

[0007] Furthermore, the rigid helium inspection cabin is provided with a cabin door for equipment to enter and exit, and a guide rail is provided inside the rigid helium inspection cabin.

[0008] Furthermore, the outlet of the blower is divided into two branches: the first branch is connected to the atmosphere through an exhaust valve, and the second branch is connected to the helium storage tank through an air collecting valve.

[0009] Furthermore, an exhaust hole is provided at the bottom of the helium storage tank, and the exhaust hole is connected to the atmosphere through an exhaust valve.

[0010] Furthermore, the top of the helium storage tank is connected to a gas supply port, and the gas supply port is connected to the helium cylinder through a gas supply valve.

[0011] Furthermore, a helium concentration meter is provided inside the helium storage tank.

[0012] Furthermore, a bottom helium concentration meter is provided at the bottom of the rigid helium inspection cabin, and a top helium concentration meter is provided at the top of the rigid helium inspection cabin.

[0013] Furthermore, the outlet of the fan is connected to a three-way regulating valve, the inlet of the three-way regulating valve is connected to the fan, and two outlets of the three-way regulating valve are connected to the helium storage tank and the atmosphere respectively.

[0014] According to another object of the present invention, the present invention provides a method for using the above-mentioned helium detection device for airtightness detection of vacuum equipment, comprising the following steps:

[0015] S1. Gas distribution and collection operations of rigid helium inspection chamber:

[0016] Before the helium inspection operation begins, the equipment enters the rigid helium inspection cabin, the cabin door is closed, the gas distribution system is started, the gas distribution valve of the gas distribution pipe is opened, and helium enters the cabin evenly through the gas distribution holes, gradually increasing the helium concentration in the cabin; when the helium concentration at the top reaches the preset standard value, the gas distribution is stopped; at this time, the equipment is in a high-concentration helium environment for leak detection;

[0017] At the same time, the fan and gas collection system are started, allowing the gas in the cabin to enter the fan through the gas collection pipe. The gas emission is controlled according to the helium concentration on the cabin top:

[0018] When the concentration is low, the gas is discharged directly into the atmosphere;

[0019] When the concentration is high, open the gas collection valve and the gas enters the helium storage tank;

[0020] S2. Helium recovery and purification of helium storage tanks:

[0021] During the high-concentration helium recovery process, the helium storage tank obtains gas from the rigid helium inspection chamber through a fan. Since the density of air is greater than that of helium, air gradually accumulates at the bottom of the helium storage tank. When the helium concentration in the helium storage tank drops to the set value, the vent valve is opened to discharge part of the gas at the bottom of the tank into the atmosphere, completing the separation of air and helium.

[0022] Furthermore, when the helium in the helium storage tank is insufficient, the gas replenishment valve is opened and the helium storage tank is replenished with helium using a helium cylinder to ensure continuous and stable operation of the system.

[0023] The technical solution of the present invention can accurately control the helium concentration in the helium inspection chamber by optimizing the gas distribution and collection system to meet the detection requirements of different equipment, achieve efficient recycling of helium, and significantly reduce helium loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 This is a schematic diagram of the structure of Embodiment 1 of the present invention;

[0026] Figure 2 This is a schematic diagram of the structure of Embodiment 2 of the present invention;

[0027] Figure 3 This is a schematic diagram of the structure of Embodiment 3 of the present invention;

[0028] Figure 4 This is a schematic diagram of the structure of Embodiment 4 of the present invention;

[0029] In the figure: 1. Rigid helium inspection cabin; 2. Guide rail; 3. Gas collecting pipe; 4. Gas collecting valve; 5. Gas collecting port; 6. Helium concentration meter on cabin top; 7. Helium concentration meter on cabin bottom; 8. Gas distribution pipe; 9. Gas distribution hole; 10. Gas distribution valve; 11. Fan; 12. Gas collecting valve; 13. Exhaust valve; 14. Helium storage tank; 15. Gas replenishment valve; 16. Helium cylinder; 17. Release valve; 18. Helium concentration meter in tank; 19. Main gas supply valve; 20. Three-way regulating valve. DETAILED DESCRIPTION

[0030] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0032] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined. In addition, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] Example 1

[0034] like Figure 1 As shown:

[0035] A helium inspection device for air tightness inspection of vacuum equipment comprises a rigid helium inspection cabin 1 having a closed cabin structure and provided with a cabin door for equipment to enter and exit. A guide rail 2 is provided inside the rigid helium inspection cabin 1 for facilitating the entry and exit of equipment.

[0036] A gas distribution system and a gas collection system are provided inside the rigid helium inspection chamber 1, which are used for filling and recovering helium respectively.

[0037] Specifically, the gas distribution system is composed of a plurality of gas distribution pipes 8, which are arranged at the bottom of the rigid helium inspection chamber 1. Each gas distribution pipe 8 is provided with a plurality of gas distribution holes 9 and a gas distribution valve 10. By adjusting the gas distribution valve 10 on the gas distribution pipe 8, the gas distribution speed and flow rate can be controlled to ensure that the helium concentration inside the rigid helium inspection chamber 1 is evenly distributed to meet the detection requirements of different equipment.

[0038] The gas distribution pipe 8 is connected to a helium storage tank 14 , and helium is provided to the gas distribution pipe 8 through the helium storage tank 14 . A main gas supply valve 19 is provided between the helium storage tank 14 and the gas distribution pipe 8 .

[0039] The gas collection system consists of a number of gas collection pipes 3, which are arranged on the top of the rigid helium inspection chamber 1. Each gas collection pipe 3 is provided with a gas collection port 5 and a gas collection valve 4. The gas collection system is connected to the inlet of the fan 11, and the outlet of the fan 11 is divided into two branches:

[0040] The first branch is connected to the atmosphere through an exhaust valve 13 and is used for discharging low-concentration helium;

[0041] The second branch is connected to the helium storage tank 14 through the gas collecting valve 12 and is used for recovering high-concentration helium.

[0042] The helium storage tank 14 has the functions of storing, purifying and replenishing helium. An exhaust hole is provided at the bottom of the helium storage tank 14, which is connected to the atmosphere through a vent valve 17 to discharge the air gathered at the bottom of the tank. The top of the helium storage tank 14 is connected to a gas replenishment port, which is connected to a helium cylinder 16 through a gas replenishment valve 15 to replenish helium. In addition, an in-tank helium concentration meter 18 is provided inside the helium storage tank 14 to monitor the helium concentration in the tank to ensure the quality of the recovered helium.

[0043] A bottom helium concentration meter 7 is provided at the bottom of the rigid helium inspection cabin 1, and the gas distribution condition of the gas distribution pipe 8 is judged by the bottom helium concentration meter 7. A top helium concentration meter 6 is provided at the top of the rigid helium inspection cabin 1, and the top helium concentration meter 6 monitors the helium concentration of the gas on the top of the cabin in real time, and switches the states of the gas collecting valve 12 and the exhaust valve 13 according to the concentration value, so as to realize efficient helium recovery and air discharge. When the air concentration at the bottom of the helium storage tank 14 increases, the air is discharged through the vent valve 17 to ensure the purity of the helium in the tank.

[0044] Example 2

[0045] like Figure 2 As shown, the structure of this embodiment is basically the same as that of embodiment 1, except that, in order to improve the system integration, the gas collecting valve 12 and the exhaust valve 13 can be replaced by a three-way regulating valve 20, and the switching of the airflow direction is achieved through the combined design of the three-way regulating valve 20; the outlet of the fan 11 is connected to the three-way regulating valve 20, the inlet of the three-way regulating valve 20 is connected to the fan 11, and the two outlets of the three-way regulating valve 20 are respectively connected to the helium storage tank 14 and the atmosphere.

[0046] Example 3

[0047] like Figure 3 As shown, the structure of this embodiment is basically the same as that of Embodiment 2, except that, in this embodiment, the gas replenishment path of the helium cylinder 16 can be directly connected to the rigid helium inspection chamber 1, so that helium can be directly replenished to the rigid helium inspection chamber 1 when needed.

[0048] Example 4

[0049] like Figure 4 As shown, the structure of this embodiment is basically the same as that of Embodiment 2, except that, in this embodiment, an independent exhaust valve 13 can be added to the top of the rigid helium inspection chamber 1 to further simplify the system structure and improve the operating efficiency.

[0050] When the present invention is used:

[0051] 1. Gas distribution and collection operations of rigid helium inspection chamber:

[0052] Before the helium inspection operation begins, the equipment enters the rigid helium inspection cabin 1 through the guide rail 2, the cabin door is closed, the gas distribution system is started, the gas distribution valve 10 of the gas distribution pipe 8 is opened, and helium enters the cabin evenly through the gas distribution holes 9, gradually increasing the helium concentration in the cabin. When the top cabin top helium concentration meter 6 shows that it reaches the preset standard value, the gas distribution is stopped. At this time, the equipment is in a high-concentration helium environment for leak detection.

[0053] At the same time, the fan 11 and the gas collection system are started, so that the gas in the cabin enters the fan 11 through the gas collection pipe 3. According to the reading of the helium concentration meter 6 on the cabin top, the gas collection valve 12 and the exhaust valve 13 are controlled.

[0054] If the concentration is low, open the exhaust valve 13 to discharge the gas directly into the atmosphere;

[0055] If the concentration is high, the exhaust valve 13 is closed, the gas collecting valve 12 is opened, and the gas enters the helium storage tank 14.

[0056] 2. Helium recovery and purification of helium storage tanks:

[0057] During the high-concentration helium recovery process, the helium storage tank 14 obtains gas from the rigid helium inspection chamber 1 through the fan 11. Since the density of air is greater than that of helium, air gradually accumulates at the bottom of the helium storage tank 14. The helium concentration meter 18 in the helium storage tank 14 monitors the helium concentration of the bottom gas. When the concentration drops to a set value, the vent valve 17 is opened to discharge part of the gas at the bottom of the tank into the atmosphere, completing the separation of air and helium.

[0058] When the helium in the helium storage tank is insufficient, the helium storage tank is replenished with helium by opening the gas replenishment valve 15 and using the helium cylinder 16 to ensure the continuous and stable operation of the system.

[0059] The present invention can accurately control the helium concentration in the helium inspection chamber by optimizing the gas distribution and gas collection system to meet the detection requirements of different equipment. By setting up a helium storage tank and a multi-branch fan outlet, combined with helium concentration monitoring, efficient recycling of helium is achieved, and helium loss is significantly reduced. The exhaust design at the bottom of the helium storage tank utilizes the density difference between air and helium, which can effectively discharge the accumulated air and ensure the purity of the recovered helium. The air replenishment interface design between the helium bottle and the helium storage tank ensures the stability of the helium supply and the reliable operation of the system.

[0060] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A helium detection device for detecting the airtightness of vacuum equipment, characterized in that: It comprises a rigid helium inspection cabin, which has a closed cabin structure, and is also provided with a gas distribution system and a gas collection system inside the rigid helium inspection cabin, which are used for filling and recycling helium respectively; wherein: The gas distribution system includes a plurality of gas distribution pipes, which are arranged at the bottom of the rigid helium inspection chamber, and each of the gas distribution pipes is provided with a plurality of gas distribution holes and gas distribution valves; the gas distribution pipes are connected to the bottom of the helium storage tank; The gas collection system includes a plurality of gas collection pipes, which are arranged on the top of the rigid helium inspection cabin. Each of the gas collection pipes is provided with a plurality of gas collection ports and a gas collection valve. The gas collection pipes are connected to a fan, and the fan is connected to the top of the helium storage tank or to the atmosphere through a pipeline.

2. The helium detection device for airtightness detection of vacuum equipment according to claim 1, characterized in that: The rigid helium inspection cabin is provided with a cabin door for equipment to enter and exit, and a guide rail is provided inside the rigid helium inspection cabin.

3. The helium detection device for airtightness detection of vacuum equipment according to claim 1, characterized in that: The outlet of the blower is divided into two branches: the first branch is connected to the atmosphere through an exhaust valve, and the second branch is connected to the helium storage tank through a gas collecting valve.

4. The helium detection device for airtightness detection of vacuum equipment according to claim 3, characterized in that: An exhaust hole is provided at the bottom of the helium storage tank, and the exhaust hole is connected to the atmosphere through an exhaust valve.

5. The helium detection device for airtightness detection of vacuum equipment according to claim 3, characterized in that: The top of the helium storage tank is connected to a gas supply port, and the gas supply port is connected to the helium cylinder through a gas supply valve.

6. The helium detection device for airtightness detection of vacuum equipment according to claim 3, characterized in that: An in-tank helium concentration meter is arranged inside the helium storage tank.

7. The helium detection device for airtightness detection of vacuum equipment according to claim 1, characterized in that: A bottom helium concentration meter is provided at the bottom of the rigid helium inspection cabin, and a top helium concentration meter is provided at the top of the rigid helium inspection cabin.

8. The helium detection device for airtightness detection of vacuum equipment according to claim 1, characterized in that: The outlet of the fan is connected to a three-way regulating valve, the inlet of the three-way regulating valve is connected to the fan, and the two outlets of the three-way regulating valve are connected to the helium storage tank and the atmosphere respectively.

9. The method for using the helium detection device for airtightness detection of vacuum equipment according to claim 8, characterized in that: The steps include: S1. Gas distribution and collection operations of rigid helium inspection chamber: Before the helium inspection operation begins, the equipment enters the rigid helium inspection cabin, the cabin door is closed, the gas distribution system is started, the gas distribution valve of the gas distribution pipe is opened, and helium enters the cabin evenly through the gas distribution holes, gradually increasing the helium concentration in the cabin; when the helium concentration at the top reaches the preset standard value, the gas distribution is stopped; at this time, the equipment is in a high-concentration helium environment for leak detection; At the same time, the fan and gas collection system are started, allowing the gas in the cabin to enter the fan through the gas collection pipe. The gas emission is controlled according to the helium concentration on the cabin top: When the concentration is low, the gas is discharged directly into the atmosphere; When the concentration is high, open the gas collection valve and the gas enters the helium storage tank; S2. Helium recovery and purification of helium storage tanks: During the high-concentration helium recovery process, the helium storage tank obtains gas from the rigid helium inspection chamber through a fan. Since the density of air is greater than that of helium, air gradually accumulates at the bottom of the helium storage tank. When the helium concentration in the helium storage tank drops to the set value, the vent valve is opened to discharge part of the gas at the bottom of the tank into the atmosphere, completing the separation of air and helium.

10. The method for using the helium detection device for airtightness detection of vacuum equipment according to claim 8, characterized in that: When the helium in the helium storage tank is insufficient, open the gas replenishment valve and use the helium cylinder to replenish helium into the helium storage tank to ensure the continuous and stable operation of the system.

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