Material box detection device, composite robot and material box detection method

Abstract

The embodiment of the invention provides a material box detection device, a composite robot and a material box detection method. The material box detection device comprises a mounting base, a driving mechanism, a photoelectric support, a photoelectric sensor and a photoelectric baffle. The mounting base is arranged on the working surface of the composite robot; a detection storage position is arranged on the working face of the composite robot, the mounting base, the detection storage position and the photoelectric baffle are located on the same working face, the mounting base is arranged on one side of the detection storage position, and the photoelectric baffle is arranged on the other side of the detection storage position; the photoelectric sensor is used for performing linear motion at a constant speed along with the photoelectric bracket on the driving mechanism along the direction parallel to the height of the material box, and detecting and acquiring the bearing information of the material box on the substrate; by adopting the technical scheme provided by the invention, in the process of transferring the material boxes by the composite robot, the bearing information of the material boxes on the substrates can be detected, and the material boxes which are not filled with the substrates are identified and processed, so that the influence on the efficiency of subsequent procedures is avoided, and the high-efficiency operation of a production line of a whole semiconductor workshop is ensured.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of semiconductor production technology, and in particular to a material box detection device, a composite robot, and a material box detection method. Background Art

[0002] In automated semiconductor workshops, mobile composite robots are important material handling tools.

[0003] During the production process, semiconductor devices will be uniformly packaged on substrates. After the substrate is processed at the work station, it is pushed into a material box. The composite robot then grabs the material box and places it in the storage position of the composite robot. The composite robot then transports the material box and the substrate in the material box to the subsequent process location.

[0004] However, the material box for transferring substrates generally has multiple substrate placement positions. If there are vacant substrate placement positions in the material box, the material box is not filled with substrates, which will produce defective material boxes, reduce the efficiency of subsequent processes, and further affect the entire production line. Summary of the invention

[0005] The embodiments of the present application provide a material box detection device, a composite robot and a material box detection method, which are used to detect the material box's carrying information on the substrate during the process of the composite robot transferring the material box, identify and process the material box that is not filled with substrates, avoid affecting the efficiency of subsequent processes, and ensure efficient operation of the production line of the entire semiconductor workshop.

[0006] In a first aspect, an embodiment of the present application provides a material box detection device, the material box detection device comprising a mounting base, a driving mechanism, a photoelectric bracket, a photoelectric sensor and a photoelectric baffle;

[0007] The mounting base is arranged on the working surface of the composite robot; a detection storage position is arranged on the working surface of the composite robot, the mounting base, the detection storage position and the photoelectric baffle are located on the same working surface, and the mounting base is arranged on one side of the detection storage position, and the photoelectric baffle is arranged on the other side of the detection storage position; the detection storage position includes at least two parallel and spaced detection sub-storage positions, and all the detection sub-storage positions are located on the line connecting the mounting base and the photoelectric baffle, and the detection sub-storage positions are used to set a material box, and the material box carries a substrate;

[0008] The driving mechanism is arranged on the mounting base; the photoelectric bracket is arranged on the driving mechanism, the photoelectric sensor is arranged on the photoelectric bracket, and the probe of the photoelectric sensor faces the photoelectric baffle;

[0009] The photoelectric sensor is used to follow the photoelectric support to perform linear motion at a uniform speed in a direction parallel to the height of the material box under the drive of the driving mechanism, and detect and obtain the bearing information of the material box on the substrate at the target sub-storage position;

[0010] The target sub-storage position refers to the detection sub-storage position where the material box is arranged and which is closest to the photoelectric sensor when the photoelectric sensor performs linear motion.

[0011] In a second aspect, an embodiment of the present application provides a composite robot, including the material box detection device provided in the first aspect of the embodiment of the present application, wherein the composite robot includes a material box detection device, a detection storage position, a material box, and a transfer device;

[0012] The detection storage position is arranged on the working surface of the composite robot, and the material box detection device is arranged on the working surface; the photoelectric baffle of the material box detection device is arranged on one side of the detection storage position, and other components of the material box detection device are arranged on the other side of the detection storage position; the detection storage position includes at least two parallel and spaced detection sub-storage positions, and all the detection sub-storage positions are located on the line connecting the mounting base and the photoelectric baffle, and the detection sub-storage positions are used to set the material box;

[0013] The material box has two opposite material openings, and the two opposite material openings of the material box arranged on the detection sub-storage position are penetrated by the connection line between the probe of the photoelectric sensor of the material box detection device and the photoelectric baffle of the material box detection device, and the inner wall of the material box is parallel to and evenly spaced along the height direction of the material box. The card slots are used to place substrates;

[0014] The transfer device is used to transfer the material box to the detection sub-storage position.

[0015] In a third aspect, an embodiment of the present application provides a material box detection method, which is applied to the composite robot provided in the second aspect of the embodiment of the present application, and the method steps include:

[0016] In the case where a material box is set in the target sub-storage position in the detection storage position, the detection photoelectric sensor is located on the transmission member;

[0017] When the photoelectric sensor is located at one of the initialization positions of the transmission member, the photoelectric sensor is started to move at a uniform speed to another initialization position, and movement parameters are detected and recorded during the movement of the photoelectric sensor; when the photoelectric sensor is located at the initialization position of the transmission member, the photoelectric sensor is controlled to be aligned with any one of the uppermost slot and the lowermost slot in the height direction of the material box;

[0018] Determining the bearing information of the material box on the substrate according to the movement parameters;

[0019] When the carrying information of the material box on the substrate is fully loaded, the material box is marked as a fully loaded material box, and the detection of the material box in the next detection sub-storage position is performed;

[0020] When the carrying information of the material box on the substrate is not fully loaded, the material box is marked as a partially loaded material box, and the transfer device is controlled to transfer the partially loaded material box to a bad storage position, thereby terminating the detection process.

[0021] In the technical solution provided by the embodiment of the present application, the material box to be detected in the detection storage position is detected by a material box detection device, and the photoelectric sensor of the material box detection device can make a linear motion in a direction parallel to the height of the material box to be detected through the driving mechanism of the material box detection device, and periodically send a photoelectric signal to the material box to be detected while making a linear motion, and detect and obtain the bearing information of the material box to be detected on the substrate through the photoelectric signal; at least two detection sub-storage positions are arranged in parallel and spaced in the detection storage position, and multiple detection sub-storage positions are located on the line connecting the photoelectric sensor and the photoelectric baffle, so that the photoelectric sensor can detect the material box to be detected on each detection sub-storage position when only reciprocating linear motion is made in a direction parallel to the height of the material box to be detected, thereby improving the detection efficiency. Through the technical solution provided by the embodiment of the present application, the bearing information of the substrate of each of the multiple material boxes can be detected with high efficiency during the process of the composite robot transporting the substrate in the material box, and the empty defective material box can be identified to avoid the influence of the defective material box on the subsequent process, thereby improving the working efficiency of the entire semiconductor production line. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the main structure of a material box detection device provided in an embodiment of the present application;

[0023] Figure 2 A schematic diagram of the structure of a composite robot provided in an embodiment of the present application;

[0024] Figure 3 A schematic diagram of a material box detection device and a projection of a material box on a working surface of a composite robot provided in an embodiment of the present application;

[0025] Figure 4 This is a schematic diagram of the structure of the material box provided in the embodiment of the present application;

[0026] Figure 5 This is a flow chart of the steps of a material box detection method provided in an embodiment of the present application;

[0027] Figure 6 In the embodiment of this application Figure 5A schematic diagram of step 103 in a provided material box detection method;

[0028] Figure 7 This is an example flow chart of a material box detection method provided in an embodiment of the present application.

[0029] Among them, 10-material box detection device, 20-detection storage position, 30-material box, 40-transfer device, 50-defective storage position, 60-substrate, 11-mounting base, 12-driving mechanism, 13-photoelectric bracket, 14-photoelectric sensor, 15-photoelectric baffle, 16-drag chain, 121-driving member, 122-transmission member, 1211-stepping motor, 1221-screw nut, 1222-screw, 1223-slider, 1224-slide rail bracket, 21-first detection sub-storage position, 22-second detection sub-storage position, 31-first material box, 32-second material box, 33-defective material box, 301-material port, 302-card slot, 3021-first card slot, 3022-second card slot, 61-first substrate, 62-second substrate, 63-third substrate, 64-fourth substrate, 65-fifth substrate. DETAILED DESCRIPTION

[0030] Before explaining the implementation methods of the present application, the application scenarios of the embodiments of the present application are first explained:

[0031] In an automated semiconductor workshop, a composite robot can be used to transfer materials between different devices or to connect materials on and off machines. It is an important material handling tool. In the application scenario of the embodiment of the present application, the materials to be transported mainly include semiconductor devices, such as integrated circuit chips, light-emitting diodes, and discrete semiconductor devices.

[0032] In the production process of semiconductor devices, the die bonder will package the semiconductor devices onto the substrate, and then at this process position, the processed substrate will be pushed into the material box, which will be grabbed by a composite robot and placed in the storage position of the composite robot. The material box and the substrates in the material box will then be transferred to the subsequent process position. In order to improve the transportation efficiency, the material box for transporting the substrate is generally configured to be in the shape of a clip, that is, a plurality of substrate placement positions are stacked along the height direction of the material box to carry multiple processed substrates at one time; accordingly, the subsequent process will be processed based on each material box carrying the substrate.

[0033] However, during the process of the composite robot transferring the material box, if there is an empty position for placing the substrate in the material box, and the material box is not filled with processed substrates, a defective material box will be generated. The subsequent process will need to spend extra running time to handle the defective material box, thus reducing the efficiency of the subsequent process. Furthermore, the entire semiconductor production line will also be affected.

[0034] In response to the above problems, the embodiments of the present application provide a material box detection device, a composite robot and a material box detection method, which are used to complete the detection of the material box's carrying information on the substrate in advance during the process of the composite robot transferring the material box, identify and process the material boxes that are not filled with substrates, and avoid the material boxes that are not filled with substrates from entering the subsequent processes and affecting the efficiency of the subsequent processes, thereby ensuring the efficient operation of the production line of the entire semiconductor workshop.

[0035] The implementation methods of the present application will be further described in detail below with reference to the accompanying drawings.

[0036] In a first aspect, an embodiment of the present application first provides a material box detection device.

[0037] refer to Figure 1 , is a schematic diagram of the main structure of a material box detection device provided in an embodiment of the present application, the material box detection device 10 includes a mounting base 11, a driving mechanism 12, a photoelectric bracket 13, a photoelectric sensor 14 and a photoelectric baffle 15 ( Figure 1 Not shown, please refer to Figure 2 ); Further references Figure 2 , is a structural schematic diagram of a composite robot provided in an embodiment of the present application, wherein a mounting base 11 is disposed on a working surface of the composite robot; a detection storage position 20 is disposed on the working surface of the composite robot, the mounting base 11, the detection storage position 20 and the photoelectric baffle 15 are located on the same working surface, and the mounting base 11 is disposed on one side of the detection storage position 20, and the photoelectric baffle 15 is disposed on the other side of the detection storage position 20; the detection storage position 20 includes at least two parallel and spaced detection sub-storage positions, Figure 2 Taking the composite robot shown in the figure as an example, the detection sub-storage position may include a first detection sub-storage position 21 and a second detection sub-storage position 22; all the detection sub-storage positions are located on the connection line between the mounting base 11 and the photoelectric baffle 15, and the detection sub-storage position is used to set the material box 30, and the material box 30 carries the substrate; combined with reference Figure 1-Figure 2 , a driving mechanism 12 is arranged on the mounting base 11; a photoelectric bracket 13 is arranged on the driving mechanism 12, a photoelectric sensor 14 is arranged on the photoelectric bracket 13, and a probe of the photoelectric sensor 14 faces the photoelectric baffle 15; the photoelectric sensor 14 is used to follow the photoelectric bracket 13 to make a linear motion at a uniform speed along a direction X parallel to the height of the material box under the drive of the driving mechanism 12, and to detect and obtain the bearing information of the material box 30 on the target sub-storage position on the substrate; the target sub-storage position refers to the detection sub-storage position where the material box 30 is arranged and is closest to the photoelectric sensor 14 when the photoelectric sensor performs a linear motion, so as to obtain the bearing information of the material box 30 on the substrate on the target sub-storage position. Figure 2 As an example, the composite robot shown in Figure 2 In the illustrated case, the target sub-storage location is the second detection sub-storage location 22 .

[0038] In the embodiment of the present application, a material box detection device 10 is firstly arranged on the working surface of the composite robot. The main structure of the material box detection device 10 includes a mounting base 11, a driving mechanism 12, a photoelectric bracket 13, and a photoelectric sensor 14. On the same working surface of the composite robot, the photoelectric baffle 15 of the material box detection device 10 and the main structure of the material box detection device 10 are respectively arranged on opposite sides of the detection storage position 20; when the material box 30 is arranged in any one of the detection sub-storage positions in the detection storage position 20, the height direction X of the material box is perpendicular to the working surface of the composite robot. In the material box detection device 10, the driving mechanism 12 enables the photoelectric bracket 13 to perform uniform linear motion in a direction parallel to the X direction, and the photoelectric sensor 14 is arranged on the same working surface of the composite robot. The photoelectric sensor 14 is fixed on the photoelectric bracket 13, so the photoelectric sensor 14 can also make uniform linear motion parallel to the X direction. The probe of the photoelectric sensor 14 is toward the photoelectric baffle 15. Accordingly, during the movement of the photoelectric sensor 14, the photoelectric signal emitted by the photoelectric sensor 14 can be irradiated onto the material box 30 located in the detection storage position 20 and reflected back to the photoelectric sensor, so as to obtain the distance information between the photoelectric sensor 14 and the material box 30 to be detected. By analyzing the distance information obtained by the photoelectric sensor 14 during the movement, the bearing information of the material box 30 to be detected on the substrate can be obtained. Through the above scheme, in the process of the composite robot transporting the material box, the bearing information of the material box on the substrate is detected.

[0039] Furthermore, the photoelectric signal emitted by the photoelectric sensor 14 will be blocked by the photoelectric baffle 15 when passing through the material box 30. In the process of the composite robot transporting semiconductor components, the composite robot will move and its environment will also change accordingly. The setting of the photoelectric baffle 15 avoids the influence of environmental changes on the photoelectric signal emitted by the photoelectric sensor 14, thereby ensuring the accuracy of the measurement data of the photoelectric sensor 14.

[0040] For further reference, Figure 3 , which is a schematic diagram of the projection of a material box detection device and a material box on the working surface of the composite robot provided in an embodiment of the present application; the detection storage position 20 includes at least two parallel and spaced detection sub-storage positions, all of which are located on the line connecting the mounting base 11 and the photoelectric baffle 15, and each detection sub-storage position can be provided with a material box 30, so that the material box detection device 10 can detect the material box 30 on each detection sub-storage position in turn along the direction Y pointed by the photoelectric baffle 15 to the main structure of the material box detection device 10.

[0041] In the technical solution provided by the embodiment of the present application, the material box to be detected in the detection storage position is detected by a material box detection device, and the photoelectric sensor of the material box detection device can make a linear motion in a direction parallel to the height of the material box to be detected through the driving mechanism of the material box detection device, and periodically send a photoelectric signal to the material box to be detected while making a linear motion, and detect and obtain the bearing information of the material box to be detected on the substrate through the photoelectric signal; at least two detection sub-storage positions are arranged in parallel and spaced in the detection storage position, and multiple detection sub-storage positions are located on the line connecting the photoelectric sensor and the photoelectric baffle, so that the photoelectric sensor can detect the material box to be detected on each detection sub-storage position when only reciprocating linear motion is made in a direction parallel to the height of the material box to be detected, thereby improving the detection efficiency. Through the technical solution provided by the embodiment of the present application, the bearing information of the substrate of each of the multiple material boxes can be detected with high efficiency during the process of the composite robot transporting the substrate in the material box, and the empty defective material box can be identified to avoid the influence of the defective material box on the subsequent process, thereby improving the working efficiency of the entire semiconductor production line.

[0042] Optional, reference Figure 3 The material box 30 has two opposite material openings 301. The two opposite material openings 301 of the material box 30 disposed on the detection sub-storage position are connected by the connection line between the probe of the photoelectric sensor 14 and the photoelectric baffle 15. For further reference Figure 4 , is a schematic diagram of the structure of the material box provided in the embodiment of the present application, wherein a plurality of pairs of slots 302 are arranged in parallel and at equal intervals on the inner wall of the material box 30 along the height direction X of the material box, and the slots 302 are used to place the substrate;

[0043] Combined with reference Figure 3 and Figure 4 The material box 30 has two material openings 301 that are opened opposite to each other. When the material box 30 is set on the storage position 20, the material opening 301 is penetrated by the connection line between the probe of the photoelectric sensor 14 and the photoelectric baffle 15, and the photoelectric signal emitted by the photoelectric sensor 14 can pass through the material opening 301 to irradiate into the material box 30; the substrate placement position in the material box 30 is a plurality of pairs of card slots 302 that are arranged at equal intervals S on the inner wall in parallel along the height direction X of the material box 30. The photoelectric sensor 14 periodically emits photoelectric signals to the substrate in the material box 30 during movement, so as to obtain the distance information between the photoelectric sensor 14 and the substrate in the material box 30 to be detected; by analyzing the distance information between the photoelectric sensor 14 and the substrate in the material box 30 to be detected, the movement speed of the photoelectric sensor 14, the movement time of the photoelectric sensor 14 and other parameters, the carrying information of the material box 30 on the substrate is obtained.

[0044] During the detection process, the photoelectric sensor 14 performs a reciprocating uniform linear motion on the driving mechanism 12 in a direction parallel to the X direction. After the photoelectric sensor 14 moves in one direction in the X direction and completes the detection of a material box, it detects the next material box in another direction in the X direction. Figure 4 , wherein the first card slot 3021 and the second card slot 3022 refer to the card slot at the uppermost end of the card slot in the height direction X of the card box 30 and the card slot at the lowermost end of the card slot in the height direction of the card box 30 respectively when the card box 30 is set in the detection sub-storage position, and the X direction includes the direction from the first card slot 3021 to the second card slot 3022 and the direction from the second card slot 3022 to the first card slot 3021; ​​combined with reference Figure 3 and Figure 4 If the photoelectric sensor 14 first moves in the direction from the first card slot 3021 to the second card slot 3022 to complete the detection of the first material box 31 located on the first detection sub-storage position 21, it can then move in the direction from the second card slot 3022 to the first card slot 3021 to complete the detection of the second material box 32 located on the second detection sub-storage position 21; it should be noted that in order to avoid the second material box 32 blocking the first material box 31, when detecting the first material box 31 located on the first detection sub-storage position 21, the second detection sub-storage position 22 should remain empty, and when the material box detection process enters the detection of the second material box 32, the second material box 32 is set in the second detection sub-storage position 22; through the above technical solution, one photoelectric sensor can detect multiple material boxes located on the detection storage position 20 in sequence.

[0045] Optional, reference Figure 1 The driving mechanism 12 includes a driving member 121 and a transmission member 122, and the photoelectric bracket 13 is arranged on the transmission member 122; the driving member 121 includes a stepping motor 1211, and the transmission member 122 includes a screw nut 1221, a screw 1222, a slider 1223, and a slide rail bracket 1224; the length direction of the screw 1222 is parallel to the height direction X of the material box, and one end of the screw 1222 is connected to the output shaft of the stepping motor 1211, and the other end of the screw 1222 is rotatably connected to the mounting base 11; the slide rail bracket 1224 is parallel to the length direction of the screw 1222 X is set, and one end of the slide rail bracket 1224 is fixedly connected to the shell of the stepper motor 1211, and the other end of the slide rail bracket 1224 is fixedly connected to the mounting base 11; the screw nut 1221 is movably set on the screw 1222, the slider 1223 is movably set on the slide rail bracket 1224, and the photoelectric bracket 13 is connected to the screw nut 1221 and the slider 1223 at the same time; the photoelectric sensor 14 is used to follow the photoelectric bracket 13 to make a straight line motion at a uniform speed along the length direction X of the screw under the drive of the stepper motor 1211, and at the same time detect and obtain the bearing information of the material box on the substrate.

[0046] Figure 1A preferred implementation scheme of the main structure of the material box detection device 10 in the present application is further given: the driving mechanism 12 may include a driving member 121 and a transmission member 122. The transmission member 122 first converts the rotation of the output shaft of the stepping motor 1211 into uniform linear movement of the screw nut 1221 on the screw 1222 through the mutual cooperation of the screw nut 1221 and the screw 1222. In order to avoid the screw nut 1221 from rotating during the uniform linear movement on the screw 1222, the embodiment of the present application provides a slider 1223 and a slide rail bracket 1224, and connects the slider 1223 and the screw nut 1221 through the photoelectric bracket 13. The slider 1223 can only move along the slide rail bracket 1224 moves in the length direction, and the length directions of the slide rail bracket 1224 and the length directions of the screw rod 1222 are parallel to the height direction X of the material box. Therefore, the rotation tendency of the screw nut 1221 will be restricted by the photoelectric bracket 13 and the slider 1223 connected to the photoelectric bracket 13, so that the screw nut 1221 only performs uniform linear motion along the length direction of the screw rod 1222; the photoelectric bracket 13 connects the screw nut 1221 and the slider 1223, and while the screw nut 1221 performs uniform linear motion along the length direction of the screw rod 1222, the photoelectric bracket 13 and the photoelectric sensor 14 arranged on the photoelectric bracket 13 perform uniform linear motion along the length direction parallel to the screw rod 1222. Figure 2 , ensuring that during the material box detection process, the probe of the photoelectric sensor 14 always points to the photoelectric baffle 15.

[0047] Furthermore, in addition to limiting the movement trajectory of the slider 1223 and allowing the slider 1223 to move in a straight line, the slide rail bracket 1224 also supports the main structure of the material box detection device 10 by fixedly connecting the mounting base 11 and the housing of the stepper motor 1221, thereby ensuring the stability of the material box detection device 10 during the material box detection process.

[0048] Optional, reference Figure 1 The material box detection device 10 also includes a drag chain 16 , one end of the drag chain 16 is connected to the photoelectric sensor 14 , and the other end of the drag chain 16 is connected to the main body of the composite robot. The photoelectric cable of the photoelectric sensor 14 is arranged inside the drag chain 16 .

[0049] The photoelectric sensor 14 can be connected to the main body of the composite robot via a photoelectric cable, and the main body of the composite robot supplies energy to the photoelectric sensor 14 via the photoelectric cable, so that the photoelectric sensor 14 can work stably; by setting up a drag chain 16 to store the photoelectric cable, damage to the photoelectric cable due to direct exposure can be avoided, and the photoelectric cable can be protected. At the same time, the photoelectric cable can be prevented from interfering with other components of the material box detection device 10 due to the linear motion of the photoelectric sensor 14, thereby improving the operating stability of the material box detection device 10.

[0050] In the technical solution provided in the embodiment of the present application, a material box detection device is used to detect a material box to be detected in a detection storage position. Through a driving mechanism composed of a stepping motor, a screw nut, a screw, a slide rail bracket, and a slider, the photoelectric sensor of the material box detection device can make a linear motion in a direction parallel to the height of the material box to be detected, and periodically send a photoelectric signal to the material box to be detected while making a linear motion, and detect and obtain the bearing information of the material box to be detected on the substrate through the photoelectric signal; at least two detection sub-storage positions are arranged in parallel and at intervals in the detection storage position, and the plurality of detection sub-storage positions are all located on the line connecting the photoelectric sensor and the photoelectric baffle, so that the photoelectric sensor can detect the material box to be detected on each detection sub-storage position only by making a reciprocating linear motion in a direction parallel to the height of the material box to be detected, thereby improving the detection efficiency; the setting of the drag chain protects the photoelectric cable of the photoelectric sensor while avoiding the interference of the photoelectric cable with other components of the material box detection device. Through the technical solution provided in the embodiment of the present application, it is possible to complete the detection of the carrying information of the substrates in the multiple material boxes with high efficiency during the process of the composite robot transferring the substrates in the material box, identify the existence of empty defective material boxes, avoid the influence of defective material boxes on subsequent processes, and improve the work efficiency of the entire semiconductor production line.

[0051] In a second aspect, an embodiment of the present application provides a composite robot, comprising the material box detection device provided in the first aspect of the embodiment of the present application.

[0052] refer to Figure 2 The composite robot includes a material box detection device 10, a detection storage position 20, a material box 30, and a transfer device 40; the detection storage position 20 is arranged on the working surface of the composite robot, and the material box detection device 10 is arranged on the same working surface; the photoelectric baffle 15 of the material box detection device 10 is arranged on one side of the detection storage position 20, and other components of the material box detection device 10 are arranged on the other side of the detection storage position 20; the detection storage position 20 includes at least two parallel and spaced detection sub-storage positions, so that Figure 2 Taking the composite robot shown in the figure as an example, the detection sub-storage position may include a first detection sub-storage position 21 and a second detection sub-storage position 22, and all the detection sub-storage positions are located on the line connecting the mounting base 11 and the photoelectric baffle 15, and the detection sub-storage position is used to set the material box 30; further reference Figure 3 The material box 30 has two opposite material openings 301, and the two opposite material openings 301 of the material box 30 arranged on the detection sub-storage position are connected by the connection line between the probe of the photoelectric sensor 14 of the material box detection device 10 and the photoelectric baffle 15 of the material box detection device 10. For further reference Figure 4The inner wall of the material box 30 is parallel to and evenly spaced from each other along the height direction X of the material box 30 , and the card slots 302 are used to place the substrates; the transfer device 40 is used to transfer the material box 30 to the detection sub-storage position.

[0053] In the preferred technical solution of the embodiment of the present application, the material box detection device 10 provided in the first aspect of the embodiment of the present application is arranged and operated on the working surface of the composite robot provided in the second aspect of the embodiment of the present application. In addition to the material box detection device 10, the detection storage position 20, and the material box 30, the composite machine also includes a transfer device 40, whose main function is to transfer the material box 30. Figure 2 For example, the transfer device 40 can be a robotic arm arranged on the working surface of the composite robot. When the material box detection device 10 detects the material box 30, the transfer device 40 first grabs the first material box 31 and places the first material box 31 on the first detection sub-storage position 21. At this time, the second storage position 22 is in a control state. After the material box detection device 10 completes the detection of the first material box 31 and confirms that the first material box 31 is a fully loaded material box, the transfer device 40 will then grab the second material box 32 and place the second material box 32 on the second detection sub-storage position 22. The material box detection device 10 completes the detection of the second material box 32. At this time, the first material box 31 and the second material box 32 are respectively located on the first detection sub-storage position 21 and the second detection sub-storage position 22.

[0054] Optional, reference Figure 2 The composite robot also includes a defective storage location 50; the defective storage location 50 is staggered from the detection storage location 20; the transfer device 40 is also used to transfer the material box 30 to the defective storage location when the material box detection device 10 detects that the material box 30 does not meet the preset conditions.

[0055] refer to Figure 2 The composite robot may further include a defective storage position 50; the defective storage position 50 is staggered from the detection storage position 20 so that the material box 30 that does not meet the preset conditions and is placed on the defective storage position 50 does not affect the detection of the material box 30 subsequently set at the detection storage position 20 by the material box detection device 10. The material box 30 that does not meet the preset conditions mentioned here can be called a defective material box 33, that is, the defective storage position 50 is used to place the defective material box 33. It should be noted that the relevant judgment on whether the material box 30 meets the preset conditions is performed when the material box 30 is located in the detection storage position 20; accordingly, the transfer device 40 is also used to transfer the defective material box 33 from the detection storage position 20 to the defective storage position 50 when the material box detection device 10 detects that the material box 30 is a defective material box 33, so as to avoid the influence of the defective material box 33 on the subsequent detection process and the subsequent semiconductor device production process.

[0056] Furthermore, the composite robot may also include a transfer dump location ( Figure 2The transfer dump is used to store all the material boxes obtained from the previous process position. After the composite robot obtains the material boxes to be tested from the previous process position, all these material boxes can be stored in the transfer dump. At the same time, the composite robot leaves the previous process position and moves to the subsequent process position. During the movement of the composite robot, the transfer device takes out the material boxes in the transfer dump one by one and places them on the detection storage position for detection. By setting the transfer dump, the material box detection device in the composite robot can complete the detection of the material box during the movement of the composite robot, shortening the residence time of the composite robot at the previous process position and the idle time of the material box detection device, thereby improving the handling efficiency of the composite robot and the detection efficiency of the material box by the material box detection device.

[0057] In a third aspect, the present application embodiment provides a material box detection method, which is applied to the composite robot provided in the second aspect of the present application embodiment, referring to Figure 5 , the method comprising:

[0058] Step 101: When a material box is set in a target sub-storage position in the detection storage position, the position of the photoelectric sensor on the transmission member is detected.

[0059] First, the composite robot arrives at the docking location of the previous process to obtain the material box, and transfers the material box to the target sub-storage location in the detection storage location. After the material box is set on the target sub-storage location, the position of the photoelectric sensor on the transmission part is determined at this time to further determine the direction of the next linear movement of the photoelectric sensor.

[0060] Step 102: When the photoelectric sensor is located at one of the initialization positions of the transmission member, start the photoelectric sensor to move at a uniform speed to the other initialization position, and detect and record the movement parameters during the movement of the photoelectric sensor; when the photoelectric sensor is located at the initialization position of the transmission member, control the photoelectric sensor to align with any one of the uppermost slot and the lowermost slot in the height direction of the material box.

[0061] If the photoelectric sensor is located at any initialization position of the transmission member, the photoelectric sensor can be started to move linearly to another initialization position, and the motion parameters of the photoelectric sensor can be periodically detected and recorded during the linear motion; the initialization position is established to make the linear motion stroke length of the photoelectric sensor cover the height of the material box to be detected, so as to avoid the substrate in the material box to be detected being missed by the photoelectric sensor, thereby avoiding erroneous judgment in the material box detection method.

[0062] Step 103: Determine the bearing information of the material box on the substrate according to the movement parameters.

[0063] After the movement parameters are acquired, the bearing information of the material box on the substrate is determined by analyzing the movement parameters, and whether the material box is filled with the substrate is determined by the acquired movement parameters.

[0064] Step 104: When the material box has full load information for the substrate, mark the material box as a fully loaded material box, and perform detection of the material box in the next detection sub-storage position.

[0065] The material box detection method provided in the embodiment of the present application can be divided into the superposition of multiple separate material box detection processes, and the detection process of each separate material box is connected in the following manner: after completing the detection of the current material box and confirming that the current material box is filled with the substrate, if there is at least one material box that has not been detected, the detection process of the next material box will be carried out.

[0066] Step 105: When the material box's carrying information for the substrate is not fully loaded, mark the material box as a partially loaded material box, and control the transfer device to transfer the partially loaded material box to a defective storage location, thereby ending the detection process.

[0067] After completing the inspection of the current material box and confirming that the current material box is not filled with the substrate, the current material box is transferred to the defective storage position, and the inspection process of the current material box is ended; it should be noted that after the inspection process of the current material box is completed, it is possible to determine whether to end the entire material box inspection method process by judging whether there are additional inspection sub-storage positions between the inspection sub-storage position where the current material box is located and the photoelectric sensor and the number of material boxes that have not been inspected. If there is at least one additional inspection sub-storage position and at least one material box that has not been inspected, the inspection process of the next material box will continue, otherwise the entire material box inspection method process will be ended.

[0068] Optionally, after the step of detecting the position of the photoelectric sensor on the transmission member in step 102, the method further includes:

[0069] Step A: When the photoelectric sensor is not located at the initialization position of the transmission member, the detection process is stopped and an abnormal position of the photoelectric sensor is reported.

[0070] If the photoelectric sensor is not located at the initialization position at the beginning of the detection, the process of the material box detection method will be directly terminated, and the composite robot will report the abnormal position of the photoelectric sensor to the control platform and wait for intervention; further, in another embodiment of the present application, when the photoelectric sensor is not located at the initialization position, the distance between the photoelectric sensor and the two initialization positions can be first determined, and then the photoelectric sensor can be controlled to move to the initialization position closest to itself, and after the photoelectric sensor moves to the initialization position, step 103 is entered.

[0071] Optionally, the motion parameter includes an indication of the photoelectric sensor and a detection time point; the indication of the photoelectric sensor is used to represent a detection distance of the photoelectric sensor;

[0072] The step of detecting and recording movement parameters during the movement of the photoelectric sensor in step 102 includes:

[0073] Sub-step 1021: during the movement of the photoelectric sensor, periodically reading the reading of the photoelectric sensor, and determining the state information that the reading of the photoelectric sensor falls within a preset range; the preset range represents the range of the distance between the photoelectric sensor and the substrate detected by the photoelectric sensor when the substrate is arranged in the card slot in the material box on the target sub-storage position;

[0074] Sub-step 1022: when the status information shows that the reading of the photoelectric sensor is not within the preset range, controlling the photoelectric sensor to continue moving;

[0075] Sub-step 1023: When the status information shows that the reading of the photoelectric sensor falls within the preset range, read and record the current time as the detection time point, and control the photoelectric sensor to continue moving.

[0076] In step 102, the movement parameters detected and recorded include the reading of the photoelectric sensor. The reading of the photoelectric sensor represents the distance detected by the photoelectric sensor during operation. The reading of the photoelectric sensor will change during the movement of the photoelectric sensor due to the different positions of the material box aligned with the photoelectric sensor. As in sub-step 1021, during the movement of the photoelectric sensor, the reading of the photoelectric sensor is periodically read to determine whether the reading of the photoelectric sensor falls within a preset range. The preset range here represents the range of the distance between the photoelectric sensor and the substrate detected by the photoelectric sensor when a substrate is provided in the slot in the material box on the target sub-storage position. The maximum value of the range is the distance from the photoelectric sensor to the target sub-storage position plus a set error, and the minimum value of the range is the distance from the photoelectric sensor to the target sub-storage position minus the set error. When the material box detection device and the composite robot are deployed, for each detection sub-storage position, the distance from the photoelectric sensor to the detection sub-storage position is a fixed value. Furthermore, for the same target sub-storage position, the photoelectric sensor moves During the process, the distance from the photoelectric sensor to the target sub-storage position is also a fixed value, and the set error is determined according to the substrate in the material box to cover the position error of multiple substrates in the material box; it can be considered that the distance between all substrates in the material box in the target sub-storage position and the photoelectric sensor should fall within the preset range; as in sub-step 1022, if the reading of the photoelectric sensor exceeds the preset range, it is considered that the current moving position of the photoelectric sensor is not aligned with the substrate in the material box in the target sub-storage position. In this case, it may be that there is no substrate in the card slot corresponding to the current moving position, or it may be that the current moving position corresponds to the gap between two adjacent substrates. The photoelectric sensor needs to be moved further and further judgment is made in the subsequent process; as in sub-step 1023, at the moment when the reading of the photoelectric sensor falls into the preset range, it can be considered that a substrate is placed in the card slot corresponding to the current moving position of the photoelectric sensor. At this time, the moment is read and recorded as the detection time point. The detection time point will be used as a kind of movement parameter to participate in the detection of the information carried by the material box on the substrate in the subsequent step process.

[0077] Optionally, before determining the bearing information of the material box on the substrate according to the movement parameters in step 103, the method further includes:

[0078] Step B1: Determine the position information of the photoelectric sensor;

[0079] Step B2: When the position information of the photoelectric sensor shows that the photoelectric sensor has not reached another initialization position, controlling the photoelectric sensor to continue moving;

[0080] Step B3: When the position information of the photoelectric sensor shows that the photoelectric sensor has reached another initialization position, proceed to step 103.

[0081] Before determining the load-bearing information of the current material box on the substrate according to the moving parameters, it is necessary to obtain the complete detection process of the current material box by the material box detection device, that is, the step of determining the load-bearing information of the current material box on the substrate according to the moving parameters is performed after the photoelectric sensor moves to another initialization position; for this purpose, as in step B1, it is necessary to continuously determine the position information of the photoelectric sensor during the movement of the photoelectric sensor; as in step B2, if the photoelectric sensor has not reached another initialization position, it means that the detection process of the current material box has not been completed, and the photoelectric sensor needs to continue to be moved; as in step B3, if the photoelectric sensor has reached another initialization position, it means that the photoelectric sensor has completed the detection of the current material box, and the process can proceed to step 103.

[0082] Optionally, the motion parameter further includes a moving speed of the photoelectric sensor, and step 103 determines the bearing information of the material box on the substrate according to the moving parameter, including:

[0083] Sub-step 1031: calculating the time period between each two adjacent detection time points, calculating the moving distance of the photoelectric sensor within the time period according to each time period and the moving speed of the photoelectric sensor, and comparing the relationship between each moving distance and the length of the interval between two adjacent card slots in the height direction of the material box;

[0084] Sub-step 1032: when all the moving distances are less than or equal to the length between two adjacent slots in the height direction of the magazine, confirming that the carrying information of the magazine for the substrate is fully loaded;

[0085] Sub-step 1033: in the case where the moving distance is greater than the length between two adjacent slots in the height direction of the material box, confirming that the carrying information of the material box for the substrate is not fully loaded.

[0086] In the case where multiple detection time points have been obtained through sub-step 1023, it can be determined that there are substrates in the material box, but it is impossible to confirm whether the material box is filled with substrates. For this reason, in step 103, the motion parameters are further analyzed; wherein, in step 1031, the time period between each two adjacent detection time points is calculated, and the moving distance of the photoelectric sensor in the time period is calculated by multiplying the time period by the photoelectric sensor. Because the photoelectric sensor moves in the direction parallel to the height of the material box, the relationship between the moving distance and the length of the interval between two adjacent card slots in the height direction of the material box can be compared. In the embodiment of the present application, the length of the interval between two adjacent card slots in the height direction of the material box is a constant; as in step 1032, when all moving distances are less than or equal to the distances between two adjacent card slots in the height direction of the material box, When the slot interval length is greater than the slot interval length, it means that in step 1022, all cases where the reading of the photoelectric sensor falls outside the preset range are because the moving position of the photoelectric sensor corresponds to the gap between two adjacent substrates in the material box. It can be concluded that during the movement of the photoelectric sensor, there is no empty substrate on any slot, further indicating that the material box is filled with substrates, and it can be confirmed that the material box is fully loaded with the substrate carrying information; as in step 1033, when there is a situation where the moving distance is greater than the length of the interval between two adjacent slots in the height direction of the material box, it means that in step 1022, the reading of the photoelectric sensor falls outside the preset range because there is a slot in the material box where the moving position of the photoelectric sensor corresponds to which no substrate is placed, further indicating that the material box is not filled with substrates, and it can be confirmed that the material box is not fully loaded with the substrate carrying information.

[0087] refer to Figure 6 , is a schematic diagram of step 103 in the detection method provided in the embodiment of the present application, Figure 5In the material box shown, the photoelectric sensor moves at a constant speed of v and in a direction of X1 from a position aligned with the first card slot 3021 to a position aligned with the second card slot 3022. The first substrate 61 to the fifth substrate 65 refer to five adjacent substrates arranged along the X1 direction, respectively. Although there is a vacant card slot 302 between the card slot corresponding to the third substrate 63 and the card slot corresponding to the fourth substrate 64, they are still two adjacent substrates. The same is true for the fourth substrate 64 and the fifth substrate 65. During the movement of the photoelectric sensor, when the photoelectric sensor detects the first substrate 61, the reading of the photoelectric sensor will fall into the preset range, and the time at this time is recorded as T1. When the position corresponding to the photoelectric sensor moves from the gap between the first substrate 61 and the second substrate 62 to the second substrate 62, the reading of the photoelectric sensor will fall into the preset range again, and this time is recorded. The moment when the substrate is moved is T2, and so on, the time points T2, T3, T4, and T5 are recorded respectively. Correspondingly, the photoelectric sensor detects the moving distances of two adjacent substrates in the time period as follows: D1=(T2-T1)×v, D2=(T3-T2)×v, D3=(T4-T3)×v, and D4=(T5-T4)×v. After obtaining the moving distances in all time periods, the moving distances in each time period are compared with the length S of the interval between two adjacent slots in the height direction in the material box. If there are substrates 60 on each slot 302 in the material box, the photoelectric sensor detects the moving distances of the time period of two adjacent substrates should be less than or equal to the length S of the interval between adjacent slots. However, by comparison, it is found that D3 is greater than S and D4 is greater than S. Therefore, it can be determined that the material box is not filled with substrates.

[0088] Optionally, before the step of performing the detection of the material box of the next detection sub-storage position in step 104, the method further includes:

[0089] Step C1: Detecting the number of the detection sub-storage positions between the target sub-storage position and the photoelectric sensor;

[0090] Step C2: when the number of the detection sub-storage positions between the target sub-storage position and the photoelectric sensor is 0, end the detection process;

[0091] Step C3: When the number of the detection sub-storage positions between the target sub-storage position and the photoelectric sensor is greater than or equal to 1, proceed to step 104 to perform detection of the material box of the next detection sub-storage position.

[0092] After the detection process of one material box is completed in step 104 and before the detection process of the next material box is started, step C1 is used to determine whether the conditions for starting the detection process of the next material box are met. By detecting the number of detection sub-storage positions between the target sub-storage position and the photoelectric sensor, it can be known whether there are any extra detection sub-storage positions in the composite robot for material box detection; as in step C2, if there is no detection sub-storage position between the target sub-storage position and the photoelectric sensor, it means that the composite robot does not have the conditions to continue detecting material boxes, and no more material boxes can be detected by the material box detection method. At this time, the material box detection process should be stopped; as in step C3, if there is at least one detection sub-storage position between the target sub-storage position and the photoelectric sensor, it means that the composite robot has the conditions to continue detecting material boxes. At this time, the detection of the next material box will be started.

[0093] The step of performing the detection of the material box of the next detection sub-storage position in step 104 includes:

[0094] Sub-step 1041: controlling the transfer device to transfer the next material box to the detection sub-storage position closer to the photoelectric sensor, and marking the detection sub-storage position as the new target sub-storage position;

[0095] Sub-step 1042: Go to step 101.

[0096] If the detection of the current material box is completed and the current material box is determined to be a fully loaded material box, sub-step 1041 is executed to retain the fully loaded material box in the detection sub-storage position, and the transfer device transfers the next material box to the next detection sub-storage position that is closer to the photoelectric sensor, and marks this detection sub-storage position as the new target sub-storage position. Sub-step 1041 is entered to start the process of the next material box. At this point, the two separate material box detection processes are connected. When multiple separate material box detection processes are connected front and back, they constitute the material box detection process provided in the embodiment of the present application.

[0097] For ease of understanding, refer to Figure 7 , is an example flow chart of a material box detection method provided in an embodiment of the present application, combined with reference Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 ,by Figure 2 Taking a composite robot including two detection sub-storage locations as an example, the method steps provided in the embodiment of the present application include:

[0098] Step S1: The composite robot arrives at the machine docking point; the machine docking point here refers to the docking point where the composite robot obtains the process position of the material box.

[0099] Step S2: The robotic arm carries the first material box to the first detection sub-storage position; the robotic arm here is a preferred implementation of the transfer device 40 in the embodiment of the present application.

[0100] Step S3: Determine whether the photoelectric sensor is at the highest position; Figure 4 For example, in step S3, the photoelectric sensor is at the highest position, then the photoelectric sensor will align Figure 4 The first card slot 3021 in.

[0101] Step S4: If the photoelectric sensor is not at the highest position, determine whether the photoelectric sensor is at the lowest position; Figure 4 For example, in step S4, the photoelectric sensor is at the lowest position, then the photoelectric sensor will Figure 4 The second card slot 3022 in.

[0102] Step S5: If the photoelectric sensor is neither in the highest position nor in the lowest position, report the abnormal position of the photoelectric sensor to the platform and wait for intervention; the highest position and the lowest position in steps S3-S5 are equivalent to the initialization position mentioned in the material box detection method provided in the embodiment of this application.

[0103] Step S6: If the photoelectric sensor is at the lowest position, control the photoelectric sensor to move upward from the lowest position; Figure 4 For example, the photoelectric sensor moves upward from the lowest position, which means that the photoelectric sensor moves in the direction from the second card slot 3022 to the first card slot 3021 in the height direction X of the material box.

[0104] Step S7: If the photoelectric sensor is at the highest position, control the photoelectric sensor to move downward from the highest position; Figure 4 For example, the photoelectric sensor moves downward from the highest position, which means that the photoelectric sensor moves in the direction from the first card slot 3021 to the second card slot 3022 in the height direction X of the material box.

[0105] Step S8: During the movement of the photoelectric sensor, periodically read the reading L of the photoelectric sensor. The above steps S3 and S4 are equivalent to step 101 of the material box detection method provided in the embodiment of the present application, and step S5 is equivalent to step A of the material box detection method provided in the embodiment of the present application.

[0106] Step S9: Determine whether the reading L of the photoelectric sensor is in the interval (L1-σ, L1+σ); the interval (L1-σ, L1+σ) here corresponds to the preset range in the material box detection method provided in the embodiment of the present application. Figure 3For example, L1 refers to the distance from the photoelectric sensor to the first detection sub-storage position, and σ is a set error, which is used to cover the error caused by the photoelectric sensor and the substrate. Steps S6, S7, S8, and S9 are equivalent to step 102 of the material box detection method provided in the embodiment of the present application, wherein steps S8 and S9 are equivalent to sub-step 1021 of the material box detection method provided in the embodiment of the present application.

[0107] If the indication L of the photoelectric sensor is not in the interval (L1-σ, L1+σ) in step S9, the photoelectric sensor will be controlled to continue moving, which is equivalent to executing sub-step 1022 of the material box detection method provided in the embodiment of the present application.

[0108] If the indication L of the photoelectric sensor falls into the interval (L1-σ, L1+σ) in step S9, execute step S10: record the time point T(x) at this moment, and control the photoelectric sensor to continue moving; the time point T(x) here is the detection time point in the material box detection method provided in the embodiment of the present application, wherein x refers to the number of times the indication L of the photoelectric sensor falls into the interval (L1-σ, L1+σ).

[0109] During the movement of the photoelectric sensor, step S11 is executed: judging whether the photoelectric sensor is at the lowest position or the highest position; if the photoelectric sensor enters step S8 through step S7 and moves downward from the highest position, step S11 is to judge whether the photoelectric sensor is at the lowest position; if the photoelectric sensor enters step S8 through step S6 and moves upward from the lowest position, step S11 is to judge whether the photoelectric sensor is at the highest position. Step S11 is equivalent to step B1 of the material box detection method provided in the embodiment of the present application.

[0110] If in step S11, the photoelectric sensor has not reached the lowest position or the highest position, the photoelectric sensor is controlled to continue moving, which is equivalent to executing step B2 of the material box detection method provided in the embodiment of the present application.

[0111] If in step S11, the photoelectric sensor reaches the lowest position or the highest position, then enter step S12, which is equivalent to executing step B3 of the material box detection method provided in the embodiment of the present application, wherein step S12 is equivalent to step 103 of the material box detection method provided in the embodiment of the present application.

[0112] Step S12: Compare the sizes of Dx and S; wherein Dx = v × [T(x+1)-T(x)], which is equivalent to the moving distance of the photoelectric sensor in the material box detection method provided in the embodiment of the present application within the time period, v is the moving speed of the photoelectric sensor, T(x+1)-T(x) is equivalent to the time period between two adjacent detection time points in the material box detection method provided in the embodiment of the present application, S refers to the length of the interval between two adjacent card slots in the height direction of the material box. In the embodiment of the present application, S is a constant; it should be noted that x in step S10 and step S12 only represents the detection of the first material box by the photoelectric sensor.

[0113] If Dx is greater than S, then proceed to step S13: mark the first material box as a partially loaded material box, and proceed to step S14: place the first material box in a bad storage position. Steps S13 and S14 are equivalent to step 105 in the material box detection method provided in the embodiment of the present application.

[0114] If all Dx are less than or equal to S, then proceed to step S15: mark the first material box as a fully loaded material box, and proceed to step S16: the robot arm moves the second material box to the second detection sub-storage position. Step S15 is equivalent to "marking the material box as a fully loaded material box when the carrying information of the material box on the substrate is fully loaded" in step 104 of the material box detection method provided in the embodiment of the present application, and step S16 is equivalent to sub-step 1041 of the material box detection method provided in the embodiment of the present application.

[0115] At this point, a single box inspection process ends, and the next single box inspection process begins. Figure 3 After completing the detection of the first material box 31, the detection of the second material box 32 begins.

[0116] First, enter step S17: read the position of the photoelectric sensor and start moving to the lowest position or the highest position; S17 here includes steps S3 to S7 mentioned above. In step S11, if the photoelectric sensor reaches the lowest position, then in step S17, the photoelectric sensor starts to move to the highest position. If the photoelectric sensor reaches the highest position, then in step S17, the photoelectric sensor starts to move to the lowest position.

[0117] Step S18 is the same as step S8, which is to periodically read the reading L of the photoelectric sensor.

[0118] In step S19, the determination of whether the reading L of the photoelectric sensor is in the interval (L1-σ, L1+σ) is modified to the determination of whether the reading L of the photoelectric sensor is in the interval (L2-σ, L2+σ), where the interval (L2-σ, L2+σ) corresponds to the preset range in the material box detection method provided in the embodiment of the present application. Figure 3Take as an example, where L2 refers to the distance from the photoelectric sensor to the second detection sub-storage position, and σ is the set error, which is used to cover the error caused by the photoelectric sensor and the substrate.

[0119] If the reading L of the photoelectric sensor is not in the interval (L2-σ, L2+σ) in step S19, the photoelectric sensor will be controlled to continue moving.

[0120] If the reading L of the photoelectric sensor falls into the interval (L2-σ, L2+σ) in step S19, step S20 is executed: the time point T(x) at this moment is recorded, and the photoelectric sensor is controlled to continue moving.

[0121] During the movement of the photoelectric sensor, execute step S21: determine whether the photoelectric sensor has reached the lowest position or the highest position; if in step S17, the photoelectric sensor moves downward from the highest position, then step S21 is to determine whether the photoelectric sensor has reached the lowest position; if in step S17, the photoelectric sensor moves upward from the lowest position, then step S21 is to determine whether the photoelectric sensor has reached the highest position.

[0122] If in step S21, the photoelectric sensor has not reached the lowest position or the highest position, the photoelectric sensor is controlled to continue moving.

[0123] If the photoelectric sensor reaches the lowest position or the highest position in step S21, then enter step S22: compare the sizes of Dx and S; it should be noted that x in step S20 and step S22 only represents the detection status of the second material box by the photoelectric sensor.

[0124] If Dx is greater than S, the process proceeds to step S23: marking the second material box as a partially loaded material box, and proceeds to step S24: placing the second material box in a bad storage position.

[0125] If all Dx are less than or equal to S, then go to step S25: mark the first box as a fully loaded box. Figure 2 In the composite robot shown, all detection sub-storage positions are provided with material boxes fully loaded with substrates, and the material box detection method provided in the embodiment of the present application will no longer be continued.

[0126] By using the material box detection method provided in the embodiment of the present application, by controlling the photoelectric sensor in the material box detection device to move from one initialization position to another initialization position, and detecting and obtaining motion parameters while moving, the bearing information of the material box to be detected on the substrate is obtained through the motion parameters, so that the photoelectric sensor completes the detection of a single material box each time it moves from one initialization position to another initialization position, and by replacing the target sub-storage position and the material box, the detection process of multiple single material boxes is connected end to end, forming an overall technical solution that completes the detection of each material box on multiple detection sub-storage positions by moving only one material box detection device. Through the technical solution provided in the embodiment of the present application, the bearing information of each of the multiple material boxes on the substrate can be detected with high efficiency during the process of the composite robot transporting the substrate in the material box, and the existence of empty defective material boxes can be identified to avoid the influence of defective material boxes on subsequent processes, thereby improving the work efficiency of the entire semiconductor production line.

[0127] It should be understood that the "plurality" mentioned herein refers to two or more. Those skilled in the art will readily appreciate other embodiments of the present invention after considering the specification and practicing the invention disclosed herein. The present invention is intended to cover any variations, uses or adaptations of the present invention, which follow the general principles of the present invention and include common knowledge or customary techniques in the art that are not disclosed in the present disclosure. The description and examples are intended to be exemplary only, and the true scope and spirit of the present invention are indicated by the claims.

[0128] It should be understood that the present invention is not limited to the exact construction that has been described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the present invention is limited only by the appended claims.

Claims

1. A material box detection device, characterized in that: The material box detection device includes a mounting base, a driving mechanism, a photoelectric bracket, a photoelectric sensor and a photoelectric baffle; The mounting base is arranged on the working surface of the composite robot; a detection storage position is arranged on the working surface of the composite robot, the mounting base, the detection storage position and the photoelectric baffle are located on the same working surface, and the mounting base is arranged on one side of the detection storage position, and the photoelectric baffle is arranged on the other side of the detection storage position; the detection storage position includes at least two parallel and spaced detection sub-storage positions, and all the detection sub-storage positions are located on the line connecting the mounting base and the photoelectric baffle, and the detection sub-storage positions are used to set a material box, and the material box carries a substrate; The driving mechanism is arranged on the mounting base; the photoelectric bracket is arranged on the driving mechanism, the photoelectric sensor is arranged on the photoelectric bracket, and the probe of the photoelectric sensor faces the photoelectric baffle; The photoelectric sensor is used to follow the photoelectric support to perform linear motion at a uniform speed in a direction parallel to the height of the material box under the drive of the driving mechanism, and detect and obtain the bearing information of the material box on the substrate at the target sub-storage position; The target sub-storage position refers to the detection sub-storage position where the material box is arranged and which is closest to the photoelectric sensor when the photoelectric sensor performs linear motion.

2. The material box detection device according to claim 1, characterized in that: The material box includes two opposite material openings, and the two opposite material openings of the material box arranged on the detection sub-storage position are penetrated by the connection line between the probe of the photoelectric sensor and the photoelectric baffle. The inner wall of the material box is parallel to and evenly spaced from each other along the height direction of the material box to form a plurality of pairs of card slots, and the card slots are used to place substrates.

3. The material box detection device according to claim 1, characterized in that: The driving mechanism includes a driving member and a transmission member, and the photoelectric bracket is arranged on the transmission member; the driving member includes a stepping motor, and the transmission member includes a screw nut, a screw, a slider, and a slide rail bracket; The length direction of the screw rod is parallel to the height direction of the material box, and one end of the screw rod is connected to the output shaft of the stepper motor, and the other end of the screw rod is rotatably connected to the mounting base; the slide rail bracket is arranged parallel to the length direction of the screw rod, and one end of the slide rail bracket is fixedly connected to the housing of the stepper motor, and the other end of the slide rail bracket is fixedly connected to the mounting base; The screw nut is movably arranged on the screw, the slider is movably arranged on the slide rail bracket, and the photoelectric bracket is connected to the screw nut and the slider at the same time; The photoelectric sensor is used to follow the photoelectric support to perform linear motion at a uniform speed along the length direction of the lead screw under the drive of the stepping motor, and to detect and obtain the bearing information of the material box on the substrate.

4. The material box detection device according to claim 1, characterized in that: The material box detection device also includes a drag chain, one end of the drag chain is connected to the photoelectric sensor, the other end of the drag chain is connected to the main body of the composite robot, and the photoelectric cable of the photoelectric sensor is arranged inside the drag chain.

5. A composite robot, comprising the material box detection device according to any one of claims 1 to 4, characterized in that: The composite robot includes a material box detection device, a detection storage location, a material box, and a transfer device; The detection storage position is arranged on the working surface of the composite robot, the material box detection device is arranged on the working surface, the photoelectric baffle of the material box detection device is arranged on one side of the detection storage position, and other components of the material box detection device are arranged on the other side of the detection storage position; the detection storage position includes at least two parallel and spaced detection sub-storage positions, and all the detection sub-storage positions are located on the line connecting the mounting base and the photoelectric baffle, and the detection sub-storage positions are used to set the material box; The material box comprises two opposite material openings, and the two opposite material openings of the material box arranged on the detection sub-storage position are penetrated by the connection line between the probe of the photoelectric sensor of the material box detection device and the photoelectric baffle of the material box detection device, and the inner wall of the material box is parallelly and evenly spaced along the height direction of the material box. The card slots are used to place substrates; The transfer device is used to transfer the material box to the detection sub-storage position.

6. The composite robot according to claim 5, characterized in that: The composite robot also includes a bad storage location; The defective storage position is staggered from the detection storage position; the transfer device is also used to transfer the material box to the defective storage position when the material box detection device detects that the material box does not meet the preset conditions.

7. A material box detection method, applied to the composite robot according to claim 5, characterized in that: The method steps include: In the case where a material box is set in the target sub-storage position in the detection storage position, the detection photoelectric sensor is located on the transmission member; When the photoelectric sensor is located at one of the initialization positions of the transmission member, the photoelectric sensor is started to move at a uniform speed to another initialization position, and movement parameters are detected and recorded during the movement of the photoelectric sensor; when the photoelectric sensor is located at the initialization position of the transmission member, the photoelectric sensor is controlled to be aligned with any one of the uppermost slot and the lowermost slot in the height direction of the material box; Determining the bearing information of the material box on the substrate according to the movement parameters; When the carrying information of the material box on the substrate is fully loaded, the material box is marked as a fully loaded material box, and the detection of the material box in the next detection sub-storage position is performed; When the carrying information of the material box on the substrate is not fully loaded, the material box is marked as a partially loaded material box, and the transfer device is controlled to transfer the partially loaded material box to a bad storage position, thereby terminating the detection process.

8. The method according to claim 7, characterized in that The motion parameters include the reading of the photoelectric sensor and the detection time point; the reading of the photoelectric sensor is used to represent the detection distance of the photoelectric sensor; The step of detecting and recording movement parameters during the movement of the photoelectric sensor comprises: During the movement of the photoelectric sensor, the reading of the photoelectric sensor is periodically read, and state information that the reading of the photoelectric sensor falls within a preset range is determined; the preset range represents the range of the distance between the photoelectric sensor and the substrate detected by the photoelectric sensor when the substrate is arranged in the card slot in the material box on the target sub-storage position; When the status information shows that the reading of the photoelectric sensor is not within the preset range, controlling the photoelectric sensor to continue moving; When the status information shows that the reading of the photoelectric sensor falls within the preset range, the current time is read and recorded as the detection time point, and the photoelectric sensor is controlled to continue moving.

9. The method according to claim 8, characterized in that The motion parameter also includes the moving speed of the photoelectric sensor, and the step of determining the bearing information of the material box on the substrate according to the moving parameter includes: Calculate the time period between each two adjacent detection time points, calculate the moving distance of the photoelectric sensor within the time period according to each time period and the moving speed of the photoelectric sensor, and compare the relationship between each moving distance and the length of the interval between two adjacent card slots in the height direction of the material box; When all the moving distances are less than or equal to the length of the interval between two adjacent card slots in the height direction of the material box, it is confirmed that the carrying information of the material box for the substrate is fully loaded; In the case where the moving distance is greater than the length between two adjacent slots in the height direction of the magazine, it is confirmed that the carrying information of the magazine for the substrate is not fully loaded.

10. The method according to claim 7, characterized in that Before the step of performing the detection of the material box of the next detection sub-storage position, the method further includes: Detecting the number of the detection sub-storage positions between the target sub-storage position and the photoelectric sensor; When the number of the detection sub-storage positions between the target sub-storage position and the photoelectric sensor is 0, the detection process is terminated; when the number of the detection sub-storage positions between the target sub-storage position and the photoelectric sensor is greater than or equal to 1, the step of detecting the material box of the next detection sub-storage position is entered; The step of performing the detection of the material box of the next detection sub-storage position comprises: Control the transfer device to transfer the next material box to the detection sub-storage position closer to the photoelectric sensor, and mark the detection sub-storage position as the new target sub-storage position, and enter the step of detecting the position of the photoelectric sensor on the transmission member when a material box is set in the target sub-storage position in the detection storage position.

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