Ring ring deformation screening device

Abstract

The invention provides a Ring ring deformation screening device, which is applied to the technical field of workpiece deformation detection, and comprises a rotating platform and a distance measuring sensor, the rotating platform is provided with an accommodating groove for clamping a workpiece, the rotating platform is internally provided with air exhaust equipment, a rectifying plate and a flow guide pipe, and the air exhaust equipment forms negative pressure at a through hole in the bottom of the accommodating groove through the rectifying plate and the flow guide pipe; the workpiece is adsorbed into the containing groove, and the workpiece is driven by the driving mechanism along with the rotating platform to rotate on the workbench; the distance measuring sensor measures the distance from the workpiece surface to the distance measuring sensor for multiple times when the workpiece rotates; and judging whether the workpiece is deformed or not according to the obtained multiple groups of distance values. According to the deformation screening device of the Ring ring, the workpiece is driven by the driving mechanism to rotate along with the rotating platform, the distance measuring sensor completes distance measurement on the surface of the rotating workpiece at a fixed point, whether the workpiece is deformed or not is judged by comparing multiple sets of distance values, and the detection result is more accurate and efficient.

Description

Technical Field

[0001] The invention belongs to the technical field of workpiece deformation detection, and in particular relates to a deformation screening device for a Ring. Background Art

[0002] like Figure 1 As shown, the Ring ring involved in the present invention is a ring-shaped thin sheet structure. In IC production and manufacturing, the quality of the Ring ring is of vital importance. However, due to various factors in the production process, the Ring ring may be deformed, which will affect the quality of the product and requires deformation detection before the product leaves the factory. At present, the detection of Ring ring deformation mainly relies on manual detection by staff using simple tools. This method is not only inefficient, but also difficult to guarantee the accuracy of the detection results. Summary of the invention

[0003] In view of the above problems in the prior art, the purpose of the present invention is to provide a deformation screening device for a Ring, so that the workpiece rotates along with the rotating platform driven by a driving mechanism, and the ranging sensor completes the ranging of the surface of the rotating workpiece at a fixed point. By comparing multiple groups of distance values, it is determined whether the workpiece is deformed, and the detection result is more accurate and efficient.

[0004] A deformation screening device for a ring comprises a rotating platform and a distance measuring sensor. A receiving groove for a workpiece to be clamped is provided on the top of the rotating platform. An exhaust device, a rectifier plate and a guide tube are arranged inside the rotating platform. The exhaust device is used to form a negative pressure at a through hole at the bottom of the receiving groove through the rectifier plate and the guide tube, and the workpiece is adsorbed in the receiving groove by air pressure. The workpiece rotates on a workbench as the rotating platform is driven by a driving mechanism. The distance measuring sensor is mounted above the workpiece, and the distance from the workpiece surface to the distance measuring sensor is measured multiple times when the workpiece rotates. Whether the workpiece is deformed is judged based on multiple sets of distance values ​​obtained. If the multiple sets of distance values ​​are the same, the corresponding workpiece is not deformed. If the multiple sets of distance values ​​are different, the corresponding workpiece is deformed.

[0005] Preferably, the driving mechanism includes a driving motor, a driving shaft, a driven shaft, a transmission component 1 and a transmission component 2. The driving motor drives the driving shaft to rotate through the transmission component 1, and the driving shaft drives the driven shaft to rotate through the transmission component 2. The driven shaft is connected to the rotating platform, thereby driving the rotating platform to rotate.

[0006] Preferably, the transmission component 1 includes a main transmission gear and a main transmission chain, and both ends of the main transmission chain are respectively meshed with two main transmission gears, and the two main transmission gears are respectively installed on the driving end of the driving motor and the driving shaft.

[0007] Preferably, transmission component 2 includes a slave transmission gear and a slave transmission chain, and both ends of the slave transmission chain are respectively meshed with two slave transmission gears, and the two slave transmission gears are respectively installed on the driving shaft and the driven shaft; wherein, the number of transmission components 2 is the same as the number of rotating platforms, and through the transmission between the slave transmission gear and the slave transmission chain, the rotating driving shaft drives the driven shaft to rotate, thereby driving the rotating platform to rotate.

[0008] Preferably, the driving motor, the active shaft, the driven shaft, the transmission assembly 1 and the transmission assembly 2 are all located inside the workbench, and a partition is arranged inside the workbench, and the active shaft and the driven shaft are both rotatably connected to the partition.

[0009] Preferably, the rotating platform is mounted on the top plate of the workbench, and corresponding positions of the top plate of the workbench and the rotating platform are respectively provided with slots for accommodating the ball bearings.

[0010] Preferably, it also includes a feeding mechanism, which is driven by a driving mechanism to move up and down to feed the rotating platform, and the up and down movement of the feeding mechanism and the rotational movement of the rotating platform cooperate with each other; the feeding mechanism includes a lifting plate and a feeding barrel, and the feeding barrel is installed on the lifting plate, and the lifting plate is threadedly sleeved with the driving shaft. The driving shaft rotates forward or reversely to drive the lifting plate to drive the feeding barrel to move up and down, and a guide rod is arranged on the workbench, and the lifting plate is sleeved with the guide rod.

[0011] Preferably, a rotating platform is equipped with a loading barrel, which is located directly above the rotating platform. The loading barrel is a cylindrical structure with a hollow interior. The top and bottom of the loading barrel are open. A spring piece is installed at the bottom of the loading barrel. One end of the spring piece is connected to the loading barrel, and the other end is suspended at the opening at the bottom of the loading barrel to provide support for the workpiece inside the loading barrel.

[0012] Preferably, when the loading barrel moves downward to the rotating platform, a negative pressure is formed at the receiving groove through the vacuum equipment. When the adsorption force is greater than the supporting force provided by the spring sheet, the workpiece at the bottom of the loading barrel is sucked out and adsorbed in the receiving groove, completing the workpiece loading operation.

[0013] Preferably, the distance measuring sensor is driven by an electric telescopic rod to move on the workbench, and the up and down movement of the lifting plate, the lateral movement of the distance measuring sensor, and the rotational movement of the rotating platform cooperate with each other; the electric telescopic rod is installed on the workbench, the driving end of the electric telescopic rod is connected to the slider, the slider is connected to the distance measuring sensor through the bracket, and the workbench is provided with a slide groove that cooperates with the slider.

[0014] The beneficial effects of the present invention are as follows: the deformation screening device of the Ring makes the workpiece rotate along with the rotating platform driven by the driving mechanism, so that the distance measuring sensor completes the distance measurement of the rotating workpiece surface at a fixed point, and judges whether the workpiece is deformed by comparing multiple groups of distance values, and the detection result is more accurate and efficient. Specifically, through the mutual cooperation between the driving motor, transmission component 1, transmission component 2, driving shaft, and driven shaft, the driving motor can drive multiple rotating platforms to rotate at the same time, effectively improving the efficiency of detection.

[0015] In addition, through the structural setting between the exhaust equipment, the rectifier plate and the guide tube configured in the rotating platform, negative pressure is formed in the receiving groove of the rotating platform to achieve adsorption of the workpiece, which can prevent the workpiece from shifting during rotation and affecting the accuracy of the distance measurement result.

[0016] Furthermore, the driving mechanism drives the loading mechanism to move up and down to realize the automation of workpiece loading, and through the structural design of the loading barrel, the vacuum equipment can realize auxiliary loading on the basis of adsorbing the workpiece, which can further improve the efficiency of detection and realize the automation of loading and ranging. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0018] Figure 1 It is a schematic diagram of the structure of the Ring involved in the present invention;

[0019] Figure 2 It is a schematic diagram of the structure of the present invention;

[0020] Figure 3 The structure of the present invention is schematically shown in FIG. Figure 2 Enlarged view of point A in the middle;

[0021] Figure 4 It is a structural schematic diagram of the top of the rotating platform of the present invention;

[0022] Figure 5 It is a structural schematic diagram of a loading barrel of the present invention.

[0023] The markings in the figure are: 1. workbench; 2. driving motor; 3. driving shaft; 4. driven shaft; 5. transmission component 2; 6. partition; 7. guide rod; 8. lifting plate; 9. loading barrel; 10. rotating platform; 1001. receiving groove; 1002. guide pipe; 1003. rectifier plate; 1004. exhaust equipment; 11. ball bearing; 12. bracket; 13. distance sensor; 14. slider; 15. electric telescopic rod; 16. spring; 17. transmission component 1. DETAILED DESCRIPTION

[0024] Embodiment 1

[0025] like Figure 2 , Figure 3 As shown, a deformation screening device for a Ring includes a rotating platform 10 and a distance sensor 13. The rotating platform 10 is driven by a driving mechanism to rotate on a workbench 1. Figure 3 As shown, the rotating platform 10 is a box structure, and is internally provided with an exhaust device 1004, a rectifying plate 1003, and a guide tube 1002. Specifically, a receiving groove 1001 for the workpiece to be clamped is provided on the top of the rotating platform 10, and the receiving groove 1001 is connected to the rectifying plate 1003 through the guide tube 1002, and the rectifying plate 1003 is connected to the exhaust device 1004.

[0026] The air is extracted by the air extraction device 1004, and negative pressure is formed at the through hole at the bottom of the receiving groove 1001 through the rectifying plate 1003 and the guide tube 1002, and the workpiece is adsorbed in the receiving groove 1001 by air pressure, so as to prevent the workpiece from shifting during the rotation of the rotating platform 10, and effectively improve the accuracy of the distance measurement result. Among them, the rectifying plate 1003 is used to balance the air pressure in each guide tube 1002 to ensure that the air pressure at each part of the workpiece is consistent.

[0027] like Figure 2 , Figure 3 As shown, a distance sensor 13 is mounted on the workbench 1. The distance sensor 13 is used to measure the distance from the workpiece in the corresponding rotating platform 10 to the distance sensor 13, and the workpiece is judged whether it is deformed by the measured distance value. Since the workpiece is placed flat in the receiving groove 1001 and the air pressure at each location is consistent, if the workpiece is deformed, the surface of the workpiece is not in a horizontal state. During the rotation of the rotating platform 10, each location on the surface of the workpiece will pass through the measuring range of the distance sensor 13. By continuously measuring the rotating workpiece with the distance sensor 13, multiple groups of distance values ​​can be obtained. If the multiple groups of distance values ​​are the same, it is considered that the workpiece is not deformed; if the multiple groups of distance values ​​have different values, it is considered that the workpiece is deformed, and an alarm light or alarm can be used to warn, completing the screening of workpiece deformation.

[0028] It should be noted that when detecting whether the workpiece is deformed, the detection accuracy can be adjusted by adjusting the number of measurements of the distance sensor 13 to adjust the number of distance values ​​collected. The more distance values ​​collected, the higher the detection accuracy.

[0029] Further, such as Figure 2As shown, the driving mechanism includes a driving motor 2, a driving shaft 3, a driven shaft 4, a transmission component 1 17 and a transmission component 2 5. The driving motor 2 drives the driving shaft 3 to rotate through the transmission component 1 17, and the driving shaft 3 drives the driven shaft 4 to rotate through the transmission component 2 5. The driven shaft 4 is connected to the rotating platform 10, and can drive the rotating platform 10 to rotate.

[0030] Specifically, the driving motor 2, the driving shaft 3, the driven shaft 4, the transmission component 1 17 and the transmission component 2 5 are all located inside the workbench 1. The workbench 1 is provided with a heat dissipation window to prevent the internal temperature of the workbench 1 from being too high. In addition, the rotating platform 10 is embedded and installed on the top plate of the workbench 1. The corresponding positions of the top plate of the workbench 1 and the rotating platform 10 are respectively provided with slots for accommodating the ball bearings 11. The ball bearings 11 are used to improve the stability and continuity of the rotation of the rotating platform 10.

[0031] The transmission component 17 includes a main transmission gear and a main transmission chain. The two ends of the main transmission chain are respectively meshed with two main transmission gears. The two main transmission gears are respectively installed on the driving end of the driving motor 2 and the driving shaft 3. Through the transmission between the main transmission gear and the main transmission chain, the driving motor 2 drives the driving shaft 3 to rotate.

[0032] The transmission assembly 2 5 includes a slave transmission gear and a slave transmission chain. The two ends of the slave transmission chain are respectively meshed with two slave transmission gears, and the two slave transmission gears are respectively installed on the driving shaft 3 and the driven shaft 4. Among them, the number of the transmission assembly 2 5 is the same as the number of the rotating platform 10. Through the transmission between the slave transmission gear and the slave transmission chain, the rotating driving shaft 3 drives the driven shaft 4 to rotate, thereby driving the rotating platform 10 to rotate.

[0033] In addition, the rotation speed of the rotating platform 10 can be adjusted by adjusting the rotation speed and gear ratio of the driving motor 2. The appropriate rotation speed can be selected according to actual needs to improve the detection efficiency as much as possible while ensuring the detection accuracy.

[0034] Furthermore, a partition 6 is arranged inside the workbench 1 , so that the driving shaft 3 and the driven shaft 4 are rotatably connected to the partition 6 , and the stability of the driving shaft 3 and the driven shaft 4 is improved by the partition 6 .

[0035] like Figure 2 As shown, in a specific embodiment, two rotating platforms 10 are provided, and two driven shafts 4 and two driven components 5 are provided accordingly. The two rotating platforms 10 can be driven to rotate by one driving motor 2, which can effectively improve the work efficiency. If the work efficiency needs to be further improved, there is no need to change the original equipment structure. The number of rotating platforms 10 and driven components 5 can be increased within the range allowed by the workbench 1 space, such as Figure 4 As shown, four rotating platforms 10 are arranged on the workbench 1 .

[0036] Embodiment 2

[0037] like Figure 2 As shown, the structure of this embodiment is basically the same as that of the first embodiment, except that this embodiment further includes a loading mechanism, which is driven by a driving mechanism to move up and down to load the rotating platform 10.

[0038] Specifically, the loading mechanism includes a lifting plate 8 and a loading barrel 9. The loading barrel 9 is mounted on the lifting plate 8. The lifting plate 8 is mounted above the workbench 1. The lifting plate 8 is threadedly sleeved with the driving shaft 3. The driving shaft 3 rotates forward or reversely to drive the lifting plate 8 to drive the loading barrel 9 to move up and down. In addition, a guide rod 7 is configured on the workbench 1. The lifting plate 8 is sleeved with the guide rod 7. The guide rod 7 improves the stability of the lifting plate 8 moving up and down.

[0039] like Figure 2 As shown, a rotating platform 10 is provided with a loading barrel 9, and the loading barrel 9 is located directly above the rotating platform 10. Specifically, as Figure 5 As shown, the upper barrel 9 is a cylindrical structure with a hollow interior, and the top and bottom of the upper barrel 9 are both open, wherein a spring piece 16 is installed at the bottom of the upper barrel 9, one end of the spring piece 16 is connected to the upper barrel 9, and the other end is suspended at the open bottom of the upper barrel 9, for providing support force for the workpiece inside the upper barrel 9 to prevent the workpiece from escaping from the upper barrel 9 due to gravity.

[0040] When the loading barrel 9 moves downward to the rotating platform 10, a negative pressure is formed at the receiving groove 1001 through the air extraction device 1004. When the adsorption force is greater than the supporting force provided by the spring sheet 16, the workpiece at the bottom of the loading barrel 9 can be sucked out, so that the workpiece is adsorbed in the receiving groove 1001, and the workpiece loading operation is completed. Correspondingly, when there is already a workpiece adsorbed in the receiving groove 1001, no adsorption force is generated on the workpiece in the loading barrel 9. Therefore, the loading barrel 9 can realize a single workpiece loading operation.

[0041] In order to prevent the distance sensor 13 from interfering with the loading barrel 9 loading the rotating platform 10, the distance sensor 13 is arranged to be movable on the workbench 1. Specifically, an electric telescopic rod 15 is installed on the workbench 1, and the driving end of the electric telescopic rod 15 is connected to the slider 14, and the slider 14 is connected to the distance sensor 13 through the bracket 12. Accordingly, a slide groove that cooperates with the slider 14 is provided on the workbench 1. The electric telescopic rod 15 drives the slider 14 to move, thereby driving the distance sensor 13 to move, so that when the loading barrel 9 is loading, the distance sensor 13 can give way to avoid path interference with the loading barrel 9.

[0042] Among them, the up and down movement of the lifting plate 8, the lateral movement of the ranging sensor 13, and the rotational movement of the rotating platform 10 cooperate with each other. The up and down movement of the lifting plate 8 corresponds to the forward and reverse rotation of the rotating platform 10 respectively. The rotation speed, gear ratio, thread parameters, etc. are set so that the deformation screening device of the Ring can work uninterruptedly.

[0043] Working principle: When the deformation screening device of the Ring is used, multiple workpieces are assembled in the loading barrel 9, and then the driving motor 2 is started, and the driving shaft 3 is driven to rotate through the transmission component 17, and the driven shaft 4 is driven to rotate through the transmission component 2 5, thereby driving the rotating platform 10 to rotate.

[0044] Due to the threaded cooperation between the driving shaft 3 and the lifting plate 8, the lifting plate 8 drives the loading barrel 9 to move downward as the driving shaft 3 rotates. When the loading barrel 9 moves to the rotating platform 10, the vacuum device 1004 is started to evacuate air to form a negative pressure in the receiving groove 1001. When the adsorption force is greater than the supporting force provided by the spring piece 16, the workpiece at the bottom of the loading barrel 9 is sucked out, so that the workpiece is adsorbed in the receiving groove 1001, and the workpiece loading operation is completed.

[0045] Then, the driving motor 2 is rotated in the opposite direction, so that the lifting plate 8 drives the loading barrel 9 to move upward. At the same time, the electric telescopic rod 15 is started to drive the distance measuring sensor 13 to move above the workpiece, and multiple distance measurements are performed during the workpiece rotating with the rotating platform 10. Multiple sets of distance values ​​are compared. If the multiple sets of distance values ​​are the same, it is determined that the workpiece has no deformation. If the multiple sets of distance values ​​are different, it is determined that the workpiece has deformation, and an alarm light or alarm is used to warn, thereby completing the screening of workpiece deformation.

[0046] After the distance measurement is completed, the electric telescopic rod 15 drives the distance sensor 13 to reset, and the driving motor 2 rotates in the opposite direction again to drive the lifting plate 8 to drive the loading barrel 9 to move downward to realize the loading. Repeating the above operation can realize the automatic operation of distance measurement and loading.

[0047] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A Ring deformation screening device, characterized in that: The invention comprises a rotating platform (10) and a distance measuring sensor (13); a receiving groove (1001) for a workpiece to be clamped is provided on the top of the rotating platform (10); an exhaust device (1004), a rectifying plate (1003) and a guide tube (1002) are arranged inside the rotating platform (10); the exhaust device (1004) is used to form a negative pressure at a through hole at the bottom of the receiving groove (1001) through the rectifying plate (1004) and the guide tube (1002); the workpiece is adsorbed into the receiving groove (1001) by air pressure; and the workpiece rotates on the workbench (1) as the rotating platform (10) is driven by a driving mechanism; The distance measuring sensor (13) is mounted above the workpiece, and measures the distance from the workpiece surface to the distance measuring sensor (13) multiple times when the workpiece rotates; It is determined whether the workpiece is deformed based on the multiple sets of distance values ​​obtained. If the multiple sets of distance values ​​are the same, the corresponding workpiece is not deformed. If the multiple sets of distance values ​​are different, the corresponding workpiece is deformed.

2. The deformation screening device for a ring according to claim 1, characterized in that: The driving mechanism comprises a driving motor (2), a driving shaft (3), a driven shaft (4), a transmission component 1 (17) and a transmission component 2 (5); the driving motor (2) drives the driving shaft (3) to rotate via the transmission component 1 (17); the driving shaft (3) drives the driven shaft (4) to rotate via the transmission component 2 (5); the driven shaft (4) is connected to the rotating platform (10), thereby driving the rotating platform (10) to rotate.

3. The deformation screening device for a ring according to claim 2, characterized in that: The transmission assembly 1 (17) comprises a main transmission gear and a main transmission chain, the two ends of the main transmission chain are respectively meshed with two main transmission gears, and the two main transmission gears are respectively mounted on the driving end of the driving motor (2) and the driving shaft (3).

4. The deformation screening device for a ring according to claim 2, characterized in that: The transmission assembly 2 (5) comprises a slave transmission gear and a slave transmission chain, wherein the two ends of the slave transmission chain are respectively meshed with two slave transmission gears, and the two slave transmission gears are respectively mounted on the driving shaft (3) and the driven shaft (4); wherein the number of the transmission assembly 2 (5) is the same as the number of the rotating platforms (10), and through the transmission between the slave transmission gear and the slave transmission chain, the rotating driving shaft (3) drives the driven shaft (4) to rotate, thereby driving the rotating platform (10) to rotate.

5. The deformation screening device for a ring according to claim 2, characterized in that: The driving motor (2), the driving shaft (3), the driven shaft (4), the transmission component 1 (17) and the transmission component 2 (5) are all located inside the workbench (1); a partition (6) is arranged inside the workbench (1); and the driving shaft (3) and the driven shaft (4) are both rotatably connected to the partition (6).

6. The deformation screening device for a ring according to claim 1, characterized in that: The rotating platform (10) is mounted on the top plate of the workbench (1), and corresponding positions of the top plate of the workbench (1) and the rotating platform (10) are respectively provided with slots for accommodating the ball bearings (11).

7. The deformation screening device for a ring according to any one of claims 1 to 6, characterized in that: It also includes a feeding mechanism, which is driven by the driving mechanism to move up and down to feed the rotating platform (10), and the up and down movement of the feeding mechanism and the rotational movement of the rotating platform 10 cooperate with each other; The loading mechanism comprises a lifting plate (8) and a loading barrel (9), wherein the loading barrel (9) is mounted on the lifting plate (8), the lifting plate (8) is threadedly sleeved with the driving shaft (3), the driving shaft (3) rotates forward or reversely to drive the lifting plate (8) to drive the loading barrel (9) to move up and down, and a guide rod (7) is arranged on the workbench (1), and the lifting plate (8) is sleeved with the guide rod (7).

8. The deformation screening device for a ring according to claim 7, characterized in that: A rotating platform (10) is provided with a loading barrel (9), which is located directly above the rotating platform (10). The loading barrel (9) is a cylindrical structure with a hollow interior. The top and bottom of the loading barrel (9) are both open. A spring sheet (16) is installed at the bottom of the loading barrel (9). One end of the spring sheet (16) is connected to the loading barrel (9), and the other end is suspended at the open bottom of the loading barrel (9) to provide support for the workpiece inside the loading barrel (9).

9. The deformation screening device for a ring according to claim 8, characterized in that: When the loading barrel (9) moves downward to the rotating platform (10), a negative pressure is formed at the receiving groove (1001) through the vacuum device (1004). When the adsorption force is greater than the supporting force provided by the spring (16), the workpiece at the bottom of the loading barrel (9) is sucked out and adsorbed into the receiving groove (1001), completing the workpiece loading operation.

10. The deformation screening device for a ring according to claim 7, characterized in that: The distance measuring sensor (13) is driven by an electric telescopic rod (15) to move on the workbench (1), and the up and down movement of the lifting plate (8), the lateral movement of the distance measuring sensor (13), and the rotational movement of the rotating platform (10) are coordinated with each other; The electric telescopic rod (15) is installed on the workbench (1), the driving end of the electric telescopic rod (15) is connected to a slider (14), the slider (14) is connected to a distance measuring sensor (13) via a bracket (12), and a slide groove that cooperates with the slider (14) is provided on the workbench (1).

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