Full-automatic efficient chip testing equipment

Abstract

The invention relates to the technical field of chip testing, in particular to full-automatic efficient chip testing equipment which comprises a machine table. The machine table is provided with a plurality of test modules; the test module comprises a base and a test board; a first plane, a second plane, a third plane and a fourth plane are sequentially arranged on the test board in the circumferential direction; the first plane, the second plane and the third plane are all provided with test plates; the test board is provided with a plurality of test seats; the test seat is provided with a clamping assembly; the base is provided with a driving assembly used for driving the clamping assembly to be opened. According to the invention, the plurality of test modules are arranged on the machine table, each test module is provided with the test bench, the test bench is provided with the first plane, the second plane and the third plane, and the first plane, the second plane and the third plane are provided with the test plates, so that the test bench can place a plurality of chips through the clamping assembly. Through the mode that the test boards are arranged on multiple surfaces, the space utilization rate is greatly improved, and the test efficiency is greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of chip testing, and in particular to a fully automatic chip efficient testing device. Background Art

[0002] The low-level test of integrated circuits after packaging is an indispensable part of the chip manufacturing process, and its purpose is to ensure the performance and reliability of the packaged chips in practical applications. However, there are some significant problems with the low-level test methods currently on the market, which affect the test efficiency, yield and safety.

[0003] In order to reduce floor space, some manufacturers use low-grid cabinets for testing. Although this method reduces space occupancy, it still requires manual loading and unloading operations. Manual transfer of test fixture boards for loading and unloading is not only time-consuming and labor-intensive, but also increases the workload of operators.

[0004] Frequent contact with chips during manual operation increases the risk of human static electricity causing chip breakdown damage. Electrostatic discharge events may cause chip damage, thereby reducing yield and increasing production costs.

[0005] In addition, the existing testing methods generally have a low degree of automation and rely on a lot of manual intervention, which not only increases labor costs but also limits the improvement of testing efficiency. In addition, the inconsistency of manual operations will also affect the reliability and repeatability of test results. Summary of the invention

[0006] The purpose of the present invention is to provide a fully automatic chip high-efficiency testing device in view of the above-mentioned deficiencies in the prior art.

[0007] The objective of the present invention is achieved through the following technical solutions: a fully automatic chip high-efficiency testing device, comprising a machine; the machine is provided with a plurality of test modules; the test modules comprise a base arranged on the machine and a test table rotatably arranged on the base; the test table is provided with a first plane, a second plane, a third plane and a fourth plane in sequence along the circumferential direction; the first plane, the second plane and the third plane are all provided with a test board; the test board is provided with a plurality of test seats; the test seat is provided with a clamping assembly; the base is provided with a driving assembly for driving the clamping assembly to open.

[0008] The present invention is further configured as follows: the clamping assembly includes a movable seat and a pressing block; the movable seat is movable and arranged on the top of the test seat; a test slot is arranged in the middle of the test seat; the movable seat is provided with a test opening; the test slot is exposed in the test opening; the test seat is turned over and pressed blocks are arranged on both sides of the test slot; the movable seat is used to drive the pressing block to turn over;

[0009] The driving assembly includes a lifting and lowering pressing plate disposed on the top of the test bench and a driving cylinder disposed on the base; the pressing plate is penetrated by a plurality of through holes; the through holes are arranged corresponding to the test openings; and the output end of the driving cylinder is connected to the pressing plate.

[0010] The present invention is further configured such that a return spring is provided between the test seat and the movable seat; a control portion is provided at one end of the pressing block; a pressing portion is provided at the other end of the pressing block; and a positioning portion is provided in the middle of the pressing block;

[0011] The positioning part is hinged to the test seat; the pressing part protrudes into the test slot; the control part is provided with a strip slot; the movable seat is provided with an articulated block; the articulated block is movably hinged to the strip slot.

[0012] The present invention is further configured such that a wiring channel is provided in the test bench; the test board is connected to the wiring channel; the base is provided with a hollow rotating platform; the output end of the hollow rotating platform is connected to the test bench; the hollow rotating platform is connected to the wiring channel;

[0013] A supporting cylinder is provided at the bottom of the base; a supporting block is provided at the output end of the supporting cylinder; and the first plane, the second plane and the third plane are all provided with a clearance groove for abutting against the supporting block.

[0014] The present invention is further configured such that the machine is provided with a loading mechanism, a unloading mechanism and a picking mechanism; the picking mechanism is used to move between the loading mechanism and the test module and to move between the unloading mechanism and the test module.

[0015] The present invention is further configured such that the material picking mechanism includes a transverse linear motor arranged on the machine along the transverse direction, a longitudinal linear motor arranged at the output end of the transverse linear motor along the longitudinal direction, a material picking seat arranged at the output end of the longitudinal linear motor, and a material picking nozzle that is movable in lifting and lowering manner on the material picking seat.

[0016] The present invention is further configured that the machine platform is provided with a first slide rail and a second slide rail along the lateral direction; the lateral linear motor is provided between the first slide rail and the second slide rail;

[0017] The two ends of the longitudinal linear motor are respectively slidably arranged on the first slide rail and the second slide rail; multiple test modules are arranged along the transverse direction between the first slide rail and the transverse linear motor to form a first test group; multiple test modules are arranged along the transverse direction between the second slide rail and the transverse linear motor to form a second test group.

[0018] The present invention is further configured such that the loading mechanism and the unloading mechanism both include a conveying seat; a first station is provided at one end of the conveying seat; a material taking station is provided at the other end of the conveying seat; a second station is provided at one end of the first station close to the material taking station; a linear module is provided between the first station, the second station and the material taking station of the conveying seat; a support plate is provided at the output end of the linear module;

[0019] The conveying seat of the loading mechanism is arranged between the first test group and the horizontal linear motor; the conveying seat of the unloading mechanism is arranged between the second test group and the horizontal linear motor.

[0020] The present invention is further configured such that the conveying seat is provided with a material picking rod at the material picking station for lifting and lowering; the material picking rod is arranged on both sides of the supporting plate; and the conveying seat is provided with a material picking lifting assembly for driving the material picking rod to lift and lower.

[0021] The present invention is further configured such that the conveying seat is provided with a first positioning column and a first positioning cylinder at the first station; a first positioning plate is provided at the output end of the first positioning cylinder; the first positioning plate is movably provided on the top of the supporting plate; the conveying seat is provided with a first push rod for lifting and lowering at the first station; the first push rod is provided on both sides of the supporting plate; the conveying seat is provided with a first lifting assembly for driving the first push rod to lift and lower;

[0022] The conveying seat is provided with a second positioning column and a second positioning cylinder at the second workstation; a second positioning plate is provided at the output end of the second positioning cylinder; the second positioning plate is movably arranged on the top of the support plate; the conveying seat is provided with a second push rod for lifting and lowering at the second workstation; the second push rod is arranged on both sides of the support plate; the conveying seat is provided with a second lifting assembly for driving the second push rod to lift and lower.

[0023] Beneficial effects of the present invention: The present invention arranges multiple test modules on a machine platform, each test module is provided with a test bench, and the test bench is provided with a first plane, a second plane and a third plane, and the first plane, the second plane and the third plane are all provided with test boards, so that the test bench can place multiple chips through a clamping component. By installing test boards on multiple sides, the space utilization rate is greatly improved and the test efficiency is greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The invention is further described using the accompanying drawings, but the embodiments in the accompanying drawings do not constitute any limitation to the invention. A person skilled in the art can obtain other drawings based on the following drawings without creative work.

[0025] Figure 1 It is a schematic diagram of the structure of the present invention;

[0026] Figure 2 yes Figure 1 A partial enlarged view of the A part;

[0027] Figure 3 It is a structural schematic diagram of the test module of the present invention;

[0028] Figure 4 is a schematic structural diagram of the test module of the present invention from another perspective;

[0029] Figure 5 It is a schematic diagram of the structure of the cooperation between the test seat and the movable seat of the present invention;

[0030] Figure 6 It is a schematic diagram of the structure of the test seat and the movable seat of the present invention in another viewing angle;

[0031] Figure 7 It is a structural schematic diagram of the pressure block of the present invention;

[0032] Figure 8 It is a structural schematic diagram of the feeding mechanism of the present invention;

[0033] Fig. 9 yes Figure 8 A partial enlarged view of the B area;

[0034] Fig.10 It is a structural schematic diagram of the feeding mechanism of the present invention from another perspective;

[0035] Among them: 1. Machine; 11. Horizontal linear motor; 12. Vertical linear motor; 13. Material pick-up seat; 14. Material pick-up nozzle; 15. First slide rail; 16. Second slide rail; 17. Material tray; 21. First test group; 22. Second test group; 3. Base; 31. Hollow rotating platform; 32. Support cylinder; 33. Support block; 4. Test table; 41. First plane; 42. Second plane; 43. Third plane; 44. Fourth plane; 45. Make way slot; 46. Test board; 47. Test seat; 48. Test slot; 5. Movable seat; 51. Test opening; 52. Articulated block; 53. Reset Spring; 6, pressing block; 61, control part; 62, pressing part; 63, positioning part; 64, strip groove; 7, pressing plate; 71, perforation; 72, driving cylinder; 81, loading mechanism; 82, unloading mechanism; 83, conveying seat; 84, first station; 85, second station; 86, material picking station; 87, linear module; 88, support plate; 89, material picking rod; 80, material picking lifting assembly; 91, first positioning column; 92, first positioning cylinder; 93, first positioning plate; 94, first push rod; 96, second positioning column; 97, second positioning cylinder; 98, second positioning plate; 99, second push rod. DETAILED DESCRIPTION

[0036] The present invention is further described in conjunction with the following examples.

[0037] Depend on Figures 1 to 10 It can be seen that the fully automatic chip high-efficiency testing equipment described in this embodiment includes a machine 1; the machine 1 is provided with multiple test modules; the test module includes a base 3 arranged on the machine 1 and a test table 4 rotatably arranged on the base 3; the test table 4 is provided with a first plane 41, a second plane 42, a third plane 43 and a fourth plane 44 in sequence along the circumferential direction; the first plane 41, the second plane 42 and the third plane 43 are all provided with a test board 46; the test board 46 is provided with multiple test seats 47; the test seat 47 is provided with a clamping assembly; the base 3 is provided with a driving assembly for driving the clamping assembly to open.

[0038] Specifically, the fully automatic chip high-efficiency testing equipment described in this embodiment is configured by arranging multiple test modules on a machine 1, each test module is provided with a test table 4, and the test table 4 is provided with a first plane 41, a second plane 42 and a third plane 43, and the first plane 41, the second plane 42 and the third plane 43 are all provided with a test board 46, so that the test table 4 can place multiple chips through a clamping component. By installing the test board 46 on multiple sides, the space utilization rate is greatly improved and the test efficiency is greatly improved.

[0039] The fully automatic chip efficient testing equipment described in this embodiment, the clamping assembly includes a movable seat 5 and a pressing block 6; the movable seat 5 is arranged on the top of the test seat 47 for lifting and lowering; a test slot 48 is arranged in the middle of the test seat 47; the movable seat 5 is provided with a test opening 51; the test slot 48 is exposed in the test opening 51; the test seat 47 is provided with pressing blocks 6 on both sides of the test slot 48 for flipping; the movable seat 5 is used to drive the pressing block 6 to flip;

[0040] The driving assembly includes a lifting plate 7 disposed on the top of the test bench 4 and a driving cylinder 72 disposed on the base 3; the pressing plate 7 is penetrated by a plurality of through holes 71; the through holes 71 are arranged corresponding to the test openings 51; the output end of the driving cylinder 72 is connected to the pressing plate 7.

[0041] Specifically, the fully automatic chip high-efficiency testing equipment described in this embodiment, when in use, rotates the test table 4 so that the first plane 41, the second plane or the third plane 43 rotates to the bottom of the pressure plate 7, and then drives the cylinder 72 to drive the pressure plate 7 to descend. The pressure plate 7 presses the movable seat 5 of the plane so that the movable seat 5 descends. During the descent of the movable seat 5, the pressing block 6 flips upward, so that the through hole 71, the test opening 51 and the test slot 48 are connected. At this time, the chip can be placed in each test slot 48 through the through hole 71 and the test opening 51 in turn; then drives the cylinder 72 to drive the pressure plate 7 to rise, so that the movable seat 5 is reset, so that the pressing block 6 flips downward, so that the pressing block 6 presses the chip in the test slot 48; then continues to rotate the test table 4, so that different planes rotate to the bottom of the pressure plate 7, and repeats the above actions until all test boards 46 of the first plane 41, the second plane and the third plane 43 are placed with chips.

[0042] In the fully automatic chip high-efficiency testing device described in this embodiment, a return spring 53 is provided between the test seat 47 and the movable seat 5; a control part 61 is provided at one end of the pressing block 6; a pressing part 62 is provided at the other end of the pressing block 6; and a positioning part 63 is provided in the middle of the pressing block 6;

[0043] The positioning portion 63 is hinged to the test seat 47 ; the pressing portion 62 protrudes into the test slot 48 ; the control portion 61 is provided with a strip groove 64 ; the movable seat 5 is provided with a hinge block 52 ; the hinge block 52 is movably hinged to the strip groove 64 .

[0044] Specifically, the fully automatic chip high-efficiency testing equipment described in this embodiment, when in use, rotates the test table 4 so that the first plane 41, the second plane or the third plane 43 rotates to the bottom of the pressure plate 7, and then drives the cylinder 72 to drive the pressure plate 7 to descend, and the pressure plate 7 presses the movable seat 5 of the plane, so that the movable seat 5 descends. Since the hinge block 52 is movably hinged with the strip groove 64, the pressing portion 62 is flipped upward during the descent of the movable seat 5, so that the pressing portion 62 withdraws from the test slot 48, so that the through hole 71, the test opening 51 and the test slot 48 are connected, and the chip is placed in each test slot 48 through the through hole 71 and the test opening 51 in turn; then the cylinder 72 is driven to drive the pressure plate 7 to rise, and the movable seat 5 is reset and risen under the action of the reset spring 53, so that the pressing portion 62 is flipped downward, so that the pressing portion 62 presses the chip in the test slot 48, and then all the chips are tested at the same time.

[0045] The present embodiment describes a fully automatic chip efficient testing equipment, wherein the test bench 4 is provided with a wiring channel; the test board 46 is connected to the wiring channel; the base 3 is provided with a hollow rotating platform 31; the output end of the hollow rotating platform 31 is connected to the test bench 4; the hollow rotating platform 31 is connected to the wiring channel; the wiring channel is not drawn in the figure; specifically, the present embodiment can facilitate the routing of each test board 46 by setting the hollow rotating platform 31 and the wiring channel.

[0046] A supporting cylinder 32 is disposed at the bottom of the base 3 ; a supporting block 33 is disposed at the output end of the supporting cylinder 32 ; and the first plane 41 , the second plane 42 and the third plane 43 are all provided with a clearance groove 45 for abutting against the supporting block 33 .

[0047] Specifically, in this embodiment, by providing the clearance groove 45 and the support block 33 , when the driving cylinder 72 drives the pressure plate 7 to descend, the support cylinder 32 drives the support block 33 to rise and abut against the clearance groove 45 , thereby being able to provide sufficient supporting force to the test bench 4 .

[0048] The fully automatic chip efficient testing equipment described in this embodiment, the machine platform 1 is provided with a loading mechanism 81, a unloading mechanism 82 and a picking mechanism; the picking mechanism is used to move between the loading mechanism 81 and the testing module and to move between the unloading mechanism 82 and the testing module.

[0049] In the fully automatic chip high-efficiency testing equipment described in this embodiment, the material picking mechanism includes a horizontal linear motor 11 arranged on the machine 1 in the horizontal direction, a longitudinal linear motor 12 arranged at the output end of the horizontal linear motor 11 in the longitudinal direction, a material picking seat 13 arranged at the output end of the longitudinal linear motor 12, and a material picking nozzle 14 that is movable and movable on the material picking seat 13. Specifically, the horizontal linear motor 11 is arranged to facilitate the horizontal movement of the material picking nozzle 14; the longitudinal linear motor 12 is arranged to facilitate the longitudinal movement of the material picking nozzle 14; and the lifting and lifting movement of the material picking nozzle 14 is arranged on the material picking seat 13, and the material picking nozzle 14 is lifted and lowered together with the material picking nozzle 14.

[0050] In the fully automatic chip high-efficiency testing equipment described in this embodiment, the platform 1 is provided with a first slide rail 15 and a second slide rail 16 along the lateral direction; the lateral linear motor 11 is provided between the first slide rail 15 and the second slide rail 16;

[0051] The two ends of the longitudinal linear motor 12 are respectively slidably arranged on the first slide rail 15 and the second slide rail 16; multiple test modules are arranged along the transverse direction between the first slide rail 15 and the transverse linear motor 11 to form a first test group 21; multiple test modules are arranged along the transverse direction between the second slide rail 16 and the transverse linear motor 11 to form a second test group 22.

[0052] Specifically, through the above arrangement, this embodiment can effectively and reasonably arrange the test modules on the machine 1, thereby effectively improving the efficiency of loading and unloading.

[0053] In the fully automatic chip high-efficiency testing equipment described in this embodiment, the loading mechanism 81 and the unloading mechanism 82 both include a conveying seat 83; a first station 84 is provided at one end of the conveying seat 83; a material picking station 86 is provided at the other end of the conveying seat 83; a second station 85 is provided at one end of the first station 84 close to the material picking station 86; a linear module 87 is provided between the first station 84, the second station 85 and the material picking station 86 of the conveying seat 83; a support plate 88 is provided at the output end of the linear module 87;

[0054] The conveying seat 83 of the loading mechanism 81 is disposed between the first test group 21 and the horizontal linear motor 11 ; the conveying seat 83 of the unloading mechanism 82 is disposed between the second test group 22 and the horizontal linear motor 11 .

[0055] Specifically, in the fully automatic chip high-efficiency testing equipment described in this embodiment, the loading mechanism 81 and the unloading mechanism 82 have the same structure; the first station 84 is used to place the tray 17 fully loaded with chips, and the second station 85 is used to place the empty tray 17; in the loading mechanism 81, the tray 17 fully loaded with chips at the first station 84 is moved to the material picking station 86 through the pallet 88, and the material picking mechanism thereby transfers the chips in the material picking station 86 to each test module; when all the chips in the tray 17 are transferred, the pallet 88 transfers the empty tray 17 to the second station 85.

[0056] In the unloading mechanism 82, the empty tray 17 of the second station 85 is moved to the picking station 86 through the pallet 88, and the picking mechanism places the chips in each test module in the tray 17 in the picking station 86; when the tray 17 is full of chips, the pallet 88 transfers the tray 17 full of chips to the first station 84, thereby realizing automatic loading and unloading.

[0057] The present embodiment describes a fully automatic chip efficient testing equipment, wherein the conveying seat 83 is provided with a material picking rod 89 at the material picking station 86 for lifting and lowering; the material picking rod 89 is arranged on both sides of the support plate 88; the conveying seat 83 is provided with a material picking lifting assembly 80 for driving the material picking rod 89 to lift and lower; wherein the material picking lifting assembly 80 can be a structure such as a cylinder, an oil cylinder or a motor screw.

[0058] Specifically, when the support plate 88 and the material tray 17 move to the material picking station 86, the material picking lifting assembly 80 drives the material picking rod 89 to rise, thereby moving the material tray 17 upward, making it easier for the material picking mechanism to load or unload materials.

[0059] In the fully automatic chip high-efficiency testing equipment described in this embodiment, the conveying seat 83 is provided with a first positioning column 91 and a first positioning cylinder 92 at the first station 84; the output end of the first positioning cylinder 92 is provided with a first positioning plate 93; the first positioning plate 93 is movably arranged on the top of the support plate 88; the conveying seat 83 is provided with a first push rod 94 at the first station 84 for lifting and lowering; the first push rod 94 is arranged on both sides of the support plate 88; the conveying seat 83 is provided with a first lifting assembly for driving the first push rod 94 to lift and lower;

[0060] Specifically, in this embodiment, the first positioning cylinder 92 drives the first positioning plate 93 to extend, thereby placing the material tray 17 in the first positioning column 91. When the material tray 17 needs to be placed from the first positioning column 91 to the support plate 88, or when the material tray 17 needs to be placed from the support plate 88 to the first positioning column 91, it is only necessary to start the first lifting assembly so that the first push rod 94 and the first positioning plate 93 are at the same height, and then drive the first positioning cylinder 92 to operate.

[0061] The conveying seat 83 is provided with a second positioning column 96 and a second positioning cylinder 97 at the second workstation 85; the output end of the second positioning cylinder 97 is provided with a second positioning plate 98; the second positioning plate 98 is movably arranged on the top of the support plate 88; the conveying seat 83 is provided with a second push rod 99 at the second workstation 85 for lifting and lowering; the second push rod 99 is arranged on both sides of the support plate 88; the conveying seat 83 is provided with a second lifting assembly for driving the second push rod 99 to lift and lower; wherein the first lifting assembly and the second lifting assembly can be structures such as cylinders, oil cylinders or motor screws.

[0062] Specifically, in this embodiment, the second positioning cylinder 97 drives the second positioning plate 98 to extend, thereby placing the material tray 17 in the second positioning column 96. When it is necessary to place the material tray 17 from the second positioning column 96 to the support plate 88, or to place the material tray 17 from the support plate 88 to the second positioning column 96, it is only necessary to start the second lifting assembly so that the first push rod 94 and the second positioning plate 98 are at the same height, and then drive the second positioning cylinder 97 to operate.

[0063] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, rather than to limit the scope of protection of the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solution of the present invention can be modified or replaced by equivalents without departing from the essence and scope of the technical solution of the present invention.

Claims

1. A fully automatic chip efficient testing equipment, characterized by: It comprises a machine; the machine is provided with a plurality of test modules; the test modules comprise a base arranged on the machine and a test table rotatably arranged on the base; the test table is provided with a first plane, a second plane, a third plane and a fourth plane in sequence along the circumferential direction; the first plane, the second plane and the third plane are all provided with a test board; the test board is provided with a plurality of test seats; the test seat is provided with a clamping assembly; the base is provided with a driving assembly for driving the clamping assembly to open.

2. The fully automatic chip high-efficiency testing equipment according to claim 1 is characterized in that: The clamping assembly includes a movable seat and a pressing block; the movable seat is movable and arranged on the top of the test seat; a test slot is arranged in the middle of the test seat; the movable seat is provided with a test opening; the test slot is exposed in the test opening; the test seat is turned over and pressed blocks are arranged on both sides of the test slot; the movable seat is used to drive the pressing block to turn over; The driving assembly includes a lifting and lowering pressing plate disposed on the top of the test bench and a driving cylinder disposed on the base; the pressing plate is penetrated by a plurality of through holes; the through holes are arranged corresponding to the test openings; and the output end of the driving cylinder is connected to the pressing plate.

3. The fully automatic chip efficient testing equipment according to claim 2, characterized in that: A return spring is provided between the test seat and the movable seat; a control portion is provided at one end of the pressing block; a pressing portion is provided at the other end of the pressing block; and a positioning portion is provided in the middle of the pressing block; The positioning part is hinged to the test seat; the pressing part protrudes into the test slot; the control part is provided with a strip slot; the movable seat is provided with an articulated block; the articulated block is movably hinged to the strip slot.

4. The fully automatic chip efficient testing equipment according to claim 2, characterized in that: The test bench is provided with a wiring channel; the test board is connected to the wiring channel; the base is provided with a hollow rotating platform; The output end of the hollow rotating platform is connected to the test bench; the hollow rotating platform is connected to the wiring channel; A supporting cylinder is provided at the bottom of the base; a supporting block is provided at the output end of the supporting cylinder; and the first plane, the second plane and the third plane are all provided with a clearance groove for abutting against the supporting block.

5. The fully automatic chip efficient testing equipment according to claim 1, characterized in that: The machine is provided with a loading mechanism, a unloading mechanism and a picking mechanism; the picking mechanism is used to move between the loading mechanism and the test module and to move between the unloading mechanism and the test module.

6. The fully automatic chip efficient testing equipment according to claim 5, characterized in that: The material picking mechanism includes a transverse linear motor arranged on the machine along the transverse direction, a longitudinal linear motor arranged at the output end of the transverse linear motor along the longitudinal direction, a material picking seat arranged at the output end of the longitudinal linear motor, and a material picking nozzle that is movable and movable on the material picking seat.

7. The fully automatic chip efficient testing equipment according to claim 6, characterized in that: The machine platform is provided with a first slide rail and a second slide rail along the transverse direction; the transverse linear motor is provided between the first slide rail and the second slide rail; The two ends of the longitudinal linear motor are respectively slidably arranged on the first slide rail and the second slide rail; multiple test modules are arranged along the transverse direction between the first slide rail and the transverse linear motor to form a first test group; multiple test modules are arranged along the transverse direction between the second slide rail and the transverse linear motor to form a second test group.

8. The fully automatic chip efficient testing equipment according to claim 7, characterized in that: The loading mechanism and the unloading mechanism both include a conveying seat; a first station is provided at one end of the conveying seat; a material taking station is provided at the other end of the conveying seat; a second station is provided at the end of the first station close to the material taking station; a linear module is provided between the first station, the second station and the material taking station of the conveying seat; a support plate is provided at the output end of the linear module; The conveying seat of the loading mechanism is arranged between the first test group and the horizontal linear motor; the conveying seat of the unloading mechanism is arranged between the second test group and the horizontal linear motor.

9. The fully automatic chip efficient testing equipment according to claim 8, characterized in that: The conveying seat is provided with a material taking rod at the material taking station for lifting and lowering; the material taking rod is arranged on both sides of the supporting plate; the conveying seat is provided with a material taking lifting assembly for driving the material taking rod to lift and lower.

10. The fully automatic chip efficient testing equipment according to claim 8, characterized in that: The conveying seat is provided with a first positioning column and a first positioning cylinder at the first station; a first positioning plate is provided at the output end of the first positioning cylinder; the first positioning plate is movably arranged on the top of the supporting plate; the conveying seat is provided with a first push rod for lifting and lowering at the first station; the first push rod is arranged on both sides of the supporting plate; the conveying seat is provided with a first lifting assembly for driving the first push rod to lift and lower; The conveying seat is provided with a second positioning column and a second positioning cylinder at the second workstation; a second positioning plate is provided at the output end of the second positioning cylinder; the second positioning plate is movably arranged on the top of the support plate; the conveying seat is provided with a second push rod for lifting and lowering at the second workstation; the second push rod is arranged on both sides of the support plate; the conveying seat is provided with a second lifting assembly for driving the second push rod to lift and lower.

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