Control panel and control method

Abstract

The invention relates to the technical field of industrial semiconductors, and discloses a control panel and a control method, the control panel and the control method are applied to ultraviolet curing equipment, the control panel comprises an isolation transformer, a power supply conversion module, a filament voltage output module, a panel communication module, a main loop circuit breaker control module and a microprocessor; the panel communication module is used for sending an instruction of equipment startup or equipment shutdown operation to the microprocessor through man-machine interaction, and the microprocessor controls on or off of a main loop circuit breaker in the ultraviolet curing equipment through the main loop circuit breaker control module so as to realize startup and shutdown operation of the equipment; according to the control panel, device function scheduling, closed-loop control and internal and external communication are all integrated on the control panel, the control panel is used for controlling the whole device, the system response time is shortened, the size of the ultraviolet curing device is reduced, and the difficulty of design of the internal structure of a device case is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of industrial semiconductors, and in particular to a control panel and a control method. Background Art

[0002] UV curing equipment plays an important role in semiconductor manufacturing and is mainly used in key links such as photolithography and microelectronic packaging. Photolithography is a key step in making integrated circuits. UV lithography machines form the basis of microelectronic devices by transferring circuit patterns onto silicon wafers. In the microelectronic packaging process, UV curing equipment is used to fix and seal chips to ensure their stability and reliability. UV curing equipment uses ultraviolet light to cause a chemical reaction in the photoresist, thereby achieving the transfer and curing of fine patterns. Specifically, ultraviolet light irradiates the photoresist, triggering the photoinitiator to produce free radicals or cations, which in turn triggers the polymerization and cross-linking reaction of monomers and prepolymers, ultimately achieving the curing effect.

[0003] UV curing equipment includes a lamp head for generating UV light and a controller for controlling the lamp head. The lamp head uses an internal magnetron to generate high-power radio frequency microwave energy to power the UV lamp. The controller provides the lamp head with high-voltage acceleration voltage and low-voltage filament preheating voltage, and transmits control signals to the lamp head to adjust the lamp head status. With the advancement of technology and the improvement of environmental protection requirements, UV curing equipment is developing in the direction of high efficiency and environmental protection.

[0004] However, the existing UV curing equipment is large in size, the components inside the equipment are relatively scattered, and the functions of each module are dispersed, which is not conducive to centralized management. Summary of the invention

[0005] The present application provides a control board and a control method, which are applied to ultraviolet light curing equipment. By integrating function scheduling, closed-loop control and internal and external communications into the control board, the control board is used to control the entire ultraviolet light curing equipment, which is beneficial to shortening the system response time, reducing the size of the ultraviolet light curing equipment, and reducing the difficulty of designing the internal structure of the equipment chassis.

[0006] In the first aspect, the embodiment of the present application provides a control panel, which is applied to ultraviolet curing equipment, wherein the ultraviolet curing equipment includes a lamp holder, a lamp holder controller and a chassis embedded display panel; wherein the lamp holder controller includes an AC filter, a main switch, a power driver, a main circuit breaker, a main power transformer module and a high-voltage rectifier module; the input end of the AC filter is connected to the main power, the output end of the AC filter is connected to the input end of the main switch, and the output end of the main switch is connected to the input end of the power driver; the main switch is a manual disconnect switch, and the power on and off of the entire ultraviolet curing equipment are manually controlled by the main switch. When the ultraviolet curing equipment needs to be started, the staff manually closes the main switch, and when the equipment is turned off, the staff manually disconnects the main switch to ensure the integrity of the equipment. The output end of the power driver is connected to the input end of the main circuit breaker, the output end of the main circuit breaker is connected to the input end of the main power transformer module, the output end of the main power transformer module is connected to the input end of the high-voltage rectifier module, and the output end of the high-voltage rectifier module is connected to the lamp holder. The power driver is mainly used to control its output voltage, and finally control the high-voltage DC voltage of the lamp holder to achieve constant power operation. The main power transformer module is used to boost the voltage input to the primary side, so that it can output a high-voltage DC voltage after being rectified by the high-voltage rectifier module. The high-voltage DC voltage is transmitted to the lamp holder through a cable, and serves as the electric field acceleration voltage of the magnetron inside the lamp holder, which can light up the ultraviolet lamp holder. The main circuit breaker is normally disconnected before the device is started. Therefore, even if the staff manually closes the main switch, the device will not start immediately. The lamp holder will not be powered by high-voltage DC voltage and will not be lit. The control panel needs to control whether to close the main circuit breaker to light up the ultraviolet lamp holder.

[0007] The control panel includes: an isolation transformer, a power conversion module, a filament voltage output module, a panel communication module, a main circuit breaker control module and a microprocessor; wherein, the output end of the main switch is connected to the input end of the primary side of the isolation transformer, the output end of the secondary side of the isolation transformer is respectively connected to the input end of the power conversion module and the input end of the filament voltage output module, the output end of the power conversion module is connected to the power end of the microprocessor, and the output end of the filament voltage output module is connected to the lamp holder; the output end of the filament voltage output module, the first end of the panel communication module and the first end of the main circuit breaker control module are respectively connected to the microprocessor, the second end of the panel communication module is connected to the chassis embedded display panel through a serial communication bus, and the second end of the main circuit breaker control module is connected to the main circuit breaker. As described above, when the main switch is closed, the city power is output to the isolation transformer through the AC filter. The isolation transformer is used to convert the city power voltage into an AC voltage of 220V. The power conversion module is used to convert the output voltage on the secondary side of the isolation transformer into a low-voltage DC voltage, such as a 24V DC voltage, to power the control board and its functional modules. In addition, the lamp holder also needs a set of AC voltages as the preheating voltages for the internal filaments. This part of the preheating AC voltage is provided by the filament voltage output module. Therefore, the output end of the secondary side of the isolation transformer is also connected to the input end of the filament voltage output module, and the filament voltage output module outputs the filament preheating AC voltage required by the lamp holder. However, the output of the filament voltage output module is controlled by the microprocessor. When the main switch is closed, before the device is started, the output end of the filament voltage output module is in a normally disconnected state with the lamp holder. The microprocessor needs to complete the self-check of the system and find no abnormalities before controlling the output end of the filament voltage output module to output the filament preheating AC voltage.

[0008] As described above, when the main switch is closed, the microprocessor will detect that there is a DC voltage signal at the output end of the power conversion module, and then the microprocessor starts to perform power-on self-test on the filament voltage output module, the panel communication module and the main circuit breaker control module, mainly to detect whether there are problems such as faults or poor connections in each functional module. If there is an abnormality in the power-on self-test, the microprocessor will feedback abnormal information to the chassis embedded display panel through the panel communication module, so as to prompt relevant staff to repair the equipment in time; if there is no abnormality in the power-on self-test, the microprocessor will continue to inspect the external hardware connected to the control panel, mainly to detect whether the connection between each external hardware and the control panel is normal, that is, to perform connection detection on the chassis embedded display panel. If there is a connection abnormality, a corresponding alarm message is generated and the alarm message is output through the corresponding external interface, so as to prompt relevant staff to repair the equipment in time, and the microprocessor keeps the control panel in a system reset state, that is, it will no longer continue to automatically control the equipment, so as to avoid unnecessary damage to the components inside the equipment after the equipment is started. If there is no abnormality in the connection detection, the system of the control board can enter the standby state, that is, the conditions for starting the device are met and it is waiting for the device startup instruction. Therefore, the microprocessor sends a first instruction to the chassis embedded display panel through the panel communication module, and the first instruction is used to instruct the chassis embedded display panel to prompt the user that the device enters the standby state; in this way, the user knows that the current device is in the standby state, and can send a second instruction to the panel communication module through the human-computer interaction function of the chassis embedded display panel, and the second instruction is used to instruct the microprocessor to start the ultraviolet curing device; the panel communication module then forwards the second instruction to the microprocessor.

[0009] Based on the second instruction, the microprocessor sends a third instruction to the filament voltage output module, and the third instruction is used to instruct the filament voltage output module to output the filament preheating AC voltage to the lamp holder; that is, at this time, the lamp holder starts to preheat the filament, but the filament preheating needs to be monitored in real time to avoid excessive filament preheating, causing the lamp holder to be overheated and damage the lamp holder. Therefore, before the device is officially started, it is also necessary to obtain the output current signal fed back by the filament voltage output module in real time, and judge whether the filament preheating of the lamp holder meets the first preset condition based on the output current signal; when the output current reaches the preset threshold, it is determined that the filament preheating of the lamp holder meets the first preset condition. Specifically, the filament voltage output module and the lamp holder are connected through a thermistor, and the thermistor decreases as the temperature increases, that is, when the output current reaches the preset threshold, it means that the temperature of the lamp holder has reached the temperature threshold. Therefore, the microprocessor sends a fourth instruction to the main circuit breaker through the main circuit breaker control module, and the fourth instruction is used to instruct the main circuit breaker to close; then the output voltage of the power driver enters the input end of the main power transformer module, thereby providing a high-voltage DC voltage to the lamp head, thereby lighting the ultraviolet lamp head, and the ultraviolet light curing equipment is started and is in normal operating state.

[0010] During the normal operation of the device, if it is necessary to shut down the device, the user can perform human-computer interaction through the chassis embedded display panel and send a fifth instruction to the panel communication module, and the panel communication module forwards the fifth instruction to the microprocessor, wherein the fifth instruction is used to instruct the microprocessor to perform a shutdown operation on the ultraviolet curing device; therefore, the microprocessor sends a sixth instruction to the main circuit breaker control module (K) based on the fifth instruction, and the main circuit breaker control module (K) controls the main circuit breaker (D) to be disconnected based on the sixth instruction.

[0011] In a second aspect, an embodiment of the present application further provides a control method, which uses the control panel described in the first aspect to control the ultraviolet curing equipment, including: real-time monitoring whether there is a DC voltage signal at the output end of the power conversion module; if so, performing a power-on self-test on the filament voltage output module, the panel communication module and the main circuit breaker control module; if there is no abnormality in the power-on self-test, performing a connection test on the chassis embedded display panel; if there is no abnormality in the connection test, sending a first instruction to the chassis embedded display panel through the panel communication module, the first instruction is used to instruct the chassis embedded display panel to prompt the user that the device enters a standby state; receiving a second instruction sent by the chassis embedded display panel through the panel communication module, the second instruction is a power-on startup instruction of the ultraviolet curing equipment; sending a third instruction to the filament voltage output module, the third instruction is used to instruct the filament voltage output module to output a filament preheating AC voltage to the lamp holder; the output current signal fed back by the filament voltage output module is obtained in real time, and whether the filament preheating of the lamp holder meets the first preset condition based on the output current signal; if satisfied, a fourth instruction is sent to the main circuit breaker through the main circuit breaker control module, and the fourth instruction is used to instruct the main circuit breaker to close and start the ultraviolet light curing equipment; when the fifth instruction sent by the chassis embedded display panel is received through the panel communication module, the fifth instruction is the shutdown instruction of the ultraviolet light curing equipment; a sixth instruction is sent to the main circuit breaker through the main circuit breaker control module, and the sixth instruction is used to instruct the main circuit breaker to disconnect, thereby shutting down the ultraviolet light curing equipment.

[0012] In summary, the present application realizes closed-loop control of the opening and closing of the entire device and controls the scheduling of various functions of the device through the control panel, all of which are integrated in the above-mentioned control panel. The control panel controls the entire device, which is conducive to shortening the system response time and reducing the volume of the ultraviolet light curing equipment, reducing the difficulty of the internal structure design of the equipment chassis; it solves the technical problem that the existing ultraviolet light curing equipment is not conducive to centralized management due to its large volume, relatively scattered distribution of internal devices of the equipment, and scattered functions of each module. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 A schematic diagram of the structure of a control panel applied to ultraviolet curing equipment provided in an embodiment of the present application; Figure 2 A circuit schematic diagram of a lamp holder controller provided in an embodiment of the present application; Figure 3 A circuit schematic diagram of another lamp holder controller provided in an embodiment of the present application; Figure 4A circuit schematic diagram of a high-voltage rectifier module provided in an embodiment of the present application; Figure 5 A circuit schematic diagram of a rectifier circuit provided in an embodiment of the present application; Figure 6 A schematic diagram of the structure of a power conversion module provided in an embodiment of the present application; Figure 7 A schematic diagram of the structure of another control panel applied to ultraviolet curing equipment provided in an embodiment of the present application; Figure 8 A schematic flow chart of a control method applied to ultraviolet curing equipment provided in an embodiment of the present application; Fig. 9 A flow chart of a constant power operation control method provided in an embodiment of the present application; Fig.10 A schematic flow chart of another control method for ultraviolet curing equipment provided in an embodiment of the present application; Figure identification: lamp holder-100; lamp holder controller-200; chassis embedded display panel-300; IO interface board-400; cooling fan-500; 600, first rectifier circuit; 700, second rectifier circuit; 800, third rectifier circuit; 900, fourth rectifier circuit; AC filter-A; main switch-B; power driver-C; main circuit breaker-D; main power transformer module-T; high-voltage rectifier module-E; isolation transformer-T1; power conversion module-F; lamp holder detection communication module-G; filament voltage output module-H; panel communication module-J; main circuit breaker control module-K; main circuit voltage and current feedback module-L; main circuit power drive communication module-M; remote control communication module Block-N; cooling fan control module-P; temperature sensor module-Q; online communication module-S; microprocessor-U; T, high-power transformer; AC, alternating current power supply; DC, high-voltage direct current power supply; AC1, first alternating current input terminal; AC2, second alternating current input terminal; HV+, direct current positive output terminal; HV-, direct current negative output terminal; D1, first ultra-fast recovery diode; D2, second ultra-fast recovery diode; D3, third ultra-fast recovery diode; D4, fourth ultra-fast recovery diode; D5, fifth ultra-fast recovery diode; D6, sixth ultra-fast recovery diode; D7, seventh ultra-fast recovery diode; D8, eighth ultra-fast recovery diode; D9, ninth ultra-fast recovery diode; D10, tenth ultra-fast recovery diode ; D11, the eleventh ultrafast recovery diode; D12, the twelfth ultrafast recovery diode; D13, the thirteenth ultrafast recovery diode; D14, the fourteenth ultrafast recovery diode; D15, the fifteenth ultrafast recovery diode; D16, the sixteenth ultrafast recovery diode; D17, the seventeenth ultrafast recovery diode; D18, the eighteenth ultrafast recovery diode; D19, the nineteenth ultrafast recovery diode; D20, the twentieth ultrafast recovery diode; D21, the twenty-first ultrafast recovery diode; D22, the twenty-second ultrafast recovery diode; D23, the twenty-third ultrafast recovery diode; D24, the twenty-fourth ultrafast recovery diode; D25, the twenty-fifth ultrafast recovery diode; D26, the twenty-sixth ultrafast recovery diode; D27 , the twenty-seventh ultrafast recovery diode; D28, the twenty-eighth ultrafast recovery diode; D29, the twenty-ninth ultrafast recovery diode; D30, the thirtieth ultrafast recovery diode; D31, the thirty-first ultrafast recovery diode; D32, the thirty-second ultrafast recovery diode; D33, the thirty-third ultrafast recovery diode; D34, the thirty-fourth ultrafast recovery diode; D35, the thirty-fifth ultrafast recovery diode; D36, the thirty-sixth ultrafast recovery diode; D37, the thirty-seventh ultrafast recovery diode; D38, the thirty-eighth ultrafast recovery diode; D39, the thirty-ninth ultrafast recovery diode; D40, the fortieth ultrafast recovery diode; D41, the forty-first ultrafast recovery diode; D42, the forty-second ultrafast recovery diode;D43, the forty-third ultra-fast recovery diode; D44, the forty-fourth ultra-fast recovery diode; D45, the forty-fifth ultra-fast recovery diode; D46, the forty-sixth ultra-fast recovery diode; D47, the forty-seventh ultra-fast recovery diode; D48, the forty-eighth ultra-fast recovery diode; D49, the forty-ninth ultra-fast recovery diode; D50, the fiftieth ultra-fast recovery diode; D51, the fifty-first ultra-fast recovery diode; D52, the fifty-second ultra-fast recovery diode; D53, the fifty-third ultra-fast recovery diode; D54, the fifty-fourth ultra-fast recovery diode; D55, the fifty-fifth ultra-fast recovery diode; D56, the fifty-sixth ultra-fast recovery diode; D57, the fifty-seventh ultra-fast recovery Diode; D58, fifty-eighth ultra-fast recovery diode; D59, fifty-ninth ultra-fast recovery diode; D60, sixtieth ultra-fast recovery diode; D61, sixty-first ultra-fast recovery diode; D62, sixty-second ultra-fast recovery diode; D63, sixty-third ultra-fast recovery diode; D64, sixty-fourth ultra-fast recovery diode; VR1, first varistor; VR2, second varistor; VR3, third varistor; VR4, fourth varistor; VR5, fifth varistor; VR6, sixth varistor; CN, connector; R1, first resistor; R2, second resistor; R3, third resistor; R4, fourth resistor; R5, fifth resistor; R6, sixth resistor. ; DETAILED DESCRIPTION

[0014] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0015] like Figure 1As shown, an embodiment of the present application provides a control board for ultraviolet curing equipment, wherein the ultraviolet curing equipment (hereinafter referred to as the equipment) comprises: a lamp holder (100), a lamp holder controller (200) and a chassis embedded display panel (300); wherein the lamp holder controller (200) comprises an AC filter (A), a main switch (B), a power driver (C), a main circuit breaker (D), a main power transformer module (T) and a high-voltage rectifier module (E); the input end of the AC filter (A) is connected to the mains, and the AC filter (A) is connected to the mains. The output end of the transformer (A) is connected to the input end of the main switch (B), the output end of the main switch (B) is connected to the input end of the power driver (C), the output end of the power driver (C) is connected to the input end of the main circuit breaker (D), the output end of the main circuit breaker (D) is connected to the input end of the main power transformer module (T), the output end of the main power transformer module (T) is connected to the input end of the high-voltage rectifier module (E), and the output end of the high-voltage rectifier module (E) is connected to the lamp holder (100). The control panel comprises: an isolation transformer (T1), a power conversion module (F), a filament voltage output module (H), a panel communication module (J), a main circuit breaker control module (K) and a microprocessor (U); wherein the output end of the main switch (B) is connected to the input end of the primary side of the isolation transformer (T1), the output end of the secondary side of the isolation transformer (T1) is respectively connected to the input end of the power conversion module (F) and the input end of the filament voltage output module (H), the output end of the power conversion module (F) is connected to the power end of the microprocessor (U), and the output end of the filament voltage output module (H) is connected to the lamp holder (100); the output end of the filament voltage output module (H), the first end of the panel communication module (J) and the first end of the main circuit breaker control module (K) are respectively connected to the A microprocessor (U), a second end of the panel communication module (J) is connected to the chassis embedded display panel (300), and a second end of the main circuit breaker control module (K) is connected to the main circuit breaker (D); wherein the main switch (B) is used to control the power supply of the ultraviolet curing device, and when the main switch (B) is closed, the mains power is output to the isolation transformer (T1) through the AC filter (A), and the isolation transformer (T1) is used to convert the mains voltage into a 220V AC voltage, and the power conversion module (F) is used to convert the output voltage of the secondary side of the isolation transformer (T1) into a low-voltage DC voltage, and the low-voltage DC voltage is used to power the control panel; the output voltage of the secondary side of the isolation transformer (T1) is also used to provide the lamp holder (100) with a filament preheating AC voltage;The microprocessor (U) performs a power-on self-test on the filament voltage output module (H), the panel communication module (J) and the main circuit breaker control module (K); if the power-on self-test is normal, the microprocessor (U) performs a connection test on the chassis embedded display panel (300); if the connection test is normal, the microprocessor (U) sends a first instruction to the chassis embedded display panel (300) through the panel communication module (J), the first instruction being used to instruct the chassis embedded display panel (300) to prompt a user that the device enters a standby state; the microprocessor (U) receives a second instruction sent by the chassis embedded display panel (300) through the panel communication module (J), the second instruction being used to instruct the microprocessor (U) to start the ultraviolet curing device; the microprocessor (U) sends a third instruction to the filament voltage output module (H), the third instruction being used to instruct the filament voltage output module (H) outputs a filament preheating AC voltage to the lamp holder (100); the microprocessor (U) acquires the output current signal fed back by the filament voltage output module (H) in real time, and judges whether the filament preheating of the lamp holder (100) satisfies a first preset condition based on the output current signal; if so, the microprocessor (U) sends a fourth instruction to the main circuit breaker (D) through the main circuit breaker control module (K), the fourth instruction being used to instruct the main circuit breaker (D) to close; when the microprocessor (U) receives a fifth instruction sent by the chassis embedded display panel (300) through the panel communication module (J), the fifth instruction is used to instruct the microprocessor (U) to perform a shutdown operation on the ultraviolet curing device; the microprocessor (U) sends a sixth instruction to the main circuit breaker (D) through the main circuit breaker control module (K), the sixth instruction being used to instruct the main circuit breaker (D) to open. ;

[0016] It should be noted that the main switch (B) is a manual disconnect switch, and the power on and off of the entire ultraviolet curing device is manually controlled by the main switch (B). When the ultraviolet curing device needs to be started, the staff manually closes the main switch (B), and when the device needs to be shut down, the staff manually disconnects the main switch (B) to ensure the integrity of the device. The power driver (C) is mainly used to control its output voltage, and ultimately controls the high-voltage DC voltage of the lamp holder (100) to achieve constant power operation. The main power transformer module (T) is used to boost the voltage input to the primary side of the power driver (C), for example, to a maximum of about 7000V, and the AC high voltage output from the secondary side is then rectified by the high-voltage rectifier module (E) and converted into a high-voltage DC voltage of 5000V. The high-voltage DC voltage is transmitted to the lamp holder (100) through a cable as the electric field acceleration voltage of the magnetron inside the lamp holder (100), which can light up the ultraviolet lamp holder. The main circuit breaker (D) is normally disconnected before the device is started. Therefore, even if the staff manually closes the main switch (B), the device will not start immediately. The lamp head (100) will not be lit without high-voltage DC power supply. The control panel described in the present application needs to control whether to close the main circuit breaker (D) to light up the ultraviolet lamp head. As described above, when the main switch (B) is closed, the microprocessor (U) will detect that there is a DC voltage signal at the output end of the power conversion module. Then, the microprocessor (U) starts to perform a power-on self-test on the filament voltage output module (H), the panel communication module (J) and the main circuit breaker control module (K), mainly to detect whether there are faults or poor connections in each functional module. If there is an abnormality in the power-on self-test, the microprocessor (U) will feedback the abnormal information to the chassis embedded display panel (300) through the panel communication module (J) to prompt the relevant staff to repair the equipment in time. If there is no abnormality in the power-on self-test, the microprocessor (U) continues to perform a power-on self-test on each external module connected to the control panel. The hardware is inspected, mainly to detect whether the connection between each external hardware and the control panel is normal, that is, the chassis embedded display panel (300) is connected. If there is a connection abnormality, a corresponding alarm message is generated and the alarm message is output through the corresponding external interface. For example, the alarm message can be fed back to the chassis embedded display panel (300) through the panel communication module (J) to prompt the relevant staff to repair the equipment in time. Whether it is the self-test or the equipment inspection, if an abnormality occurs, the microprocessor (U) keeps the control panel in a system reset state, that is, it will no longer continue to automatically control the equipment, so as to avoid unnecessary damage to the components inside the equipment after the equipment is started. If there is no abnormality in the connection detection, the system of the control panel can enter the standby state, that is, the conditions for starting the equipment are met, and the equipment is waiting for the instruction to start.Therefore, the microprocessor (U) sends a first instruction to the chassis embedded display panel (300) through the panel communication module (J), and the first instruction is used to instruct the chassis embedded display panel (300) to prompt the user that the device enters the standby state; in this way, the user knows that the current device is in the standby state, and can send a second instruction to the panel communication module (J) through the human-computer interaction function of the chassis embedded display panel (300), and the second instruction is used to instruct the microprocessor (U) to start the ultraviolet curing device; the panel communication module (J) then forwards the second instruction to the microprocessor (U). Then, based on the second instruction, the microprocessor (U) sends a third instruction to the filament voltage output module (H), and the third instruction is used to instruct the filament voltage output module (H) to output the filament preheating AC voltage to the lamp head (100); that is, at this time, the lamp head starts to preheat the filament, but the filament preheating needs to be monitored in real time to avoid excessive filament preheating, causing the lamp head to be too high in temperature and damage the lamp head. Therefore, before the device is officially started, it is necessary to obtain the output current signal fed back by the filament voltage output module (H) in real time, and determine whether the filament preheating of the lamp head meets the first preset condition based on the output current signal; when the output current reaches the preset threshold, it is determined that the filament preheating of the lamp head meets the first preset condition. Specifically, the filament voltage output module (H) and the lamp head (100) can be connected through a thermistor, and the thermistor decreases as the temperature increases, that is, when the output current reaches the preset threshold, it means that the temperature of the lamp head has reached the temperature threshold. Therefore, the microprocessor (U) sends a fourth instruction to the main circuit breaker (D) through the main circuit breaker control module (K), and the fourth instruction is used to instruct the main circuit breaker (D) to close; then the output voltage of the power driver (C) enters the input end of the main power transformer module (T), so as to provide a high-voltage DC voltage to the lamp head, thereby lighting the ultraviolet lamp head, and then the ultraviolet curing device is started and is in a normal operating state. If the device needs to be shut down during normal operation, the user can perform human-computer interaction through the chassis embedded display panel (300) and send a fifth instruction to the panel communication module (J), and the panel communication module (J) forwards the fifth instruction to the microprocessor (U), wherein the fifth instruction is used to instruct the microprocessor (U) to shut down the ultraviolet curing device; therefore, the microprocessor (U) sends a sixth instruction to the main circuit breaker control module (K) based on the fifth instruction, and the main circuit breaker control module (K) controls the main circuit breaker (D) to be disconnected based on the sixth instruction.

[0017] The specific implementation is as follows: One embodiment of the lamp holder controller (200) is as follows Figure 2 As shown, the AC filter (A) can be a single-phase AC filter with two input ports (A1 in1 and A1 in2 ), connect the live wire of single-phase mains power ( ) and neutral line ( ) output terminal, through the two output ports (A1 out1 and A1 out2 ) output. The main switch (B) consists of two single-pole single-throw switches, and the output port (A1 out1 ) and (A1 out2 ) are respectively connected to the first end of the first switch (SPST1) and the first end of the second switch (SPST2). The first switch (SPST1) and the second switch (SPST2) are normally open. In order to effectively protect the lamp holder controller (200) when the equipment is overloaded, two groups of 30A high current fuses are connected to the rear stage of the main switch (B), and the second end of the first switch (SPST1) and the second end of the second switch (SPST2) are respectively connected to the first end of the first fuse (FUSE1) and the first end of the second fuse (FUSE2). The main circuit breaker (D) is composed of two single-pole single-throw switches. The main power transformer module (T) includes a first core transformer (T2). The second end of the first fuse (FUSE1) and the second end of the second fuse (FUSE2) are respectively connected to the input end of the power driver (C); the output end of the power driver (C) is respectively connected to the first ends of the third switch (SPST3) and the fourth switch (SPST4) of the main circuit breaker (D); the second ends of the third switch (SPST3) and the fourth switch (SPST4) are respectively connected to the input end of the primary side of the magnetic core transformer; the output end of the secondary side of the magnetic core transformer is connected to the input end of the high-voltage rectifier module (E). After rectification by the high-voltage rectifier module (E), a high-voltage DC voltage is output, which is transmitted to the lamp holder (100) through a cable and serves as an electric field acceleration voltage of the magnetron inside the lamp holder (100), so as to light up the ultraviolet lamp holder.

[0018] Another embodiment of the lamp holder controller (200) is as follows Figure 3 As shown, the AC filter (A) can also adopt a three-phase AC filter, which has three input ports (A2 in1 、A2 in2 、A2 in3 ) and three output ports (A2 out1 、A2 out2 、A2 out3), connected to the output terminals (u, v, w) of the three-phase mains, and output through the three output ports of the AC filter (A). The main switch (B) is composed of three single-pole single-throw switches, and the output port (A2 out1 )、(A2 out2 )、(A2 out3 ) are respectively connected to the first ends of the fifth switch (SPST5), the sixth switch (SPST6) and the seventh switch (SPST7). The fifth switch (SPST5), the sixth switch (SPST6) and the seventh switch (SPST7) are normally open. In order to effectively protect the lamp holder controller (200) when the equipment is overloaded, three groups of 30A high-current fuses are connected to the rear stage of the main switch (B), and the second ends of the fifth switch (SPST5), the sixth switch (SPST6) and the seventh switch (SPST7) are respectively connected to the first ends of the third fuse (FUSE3), the fourth fuse (FUSE4) and the fifth fuse (FUSE5). The main circuit breaker (D) is composed of four single-pole single-throw switches (SPST8, SPST9, SPST10, SPST11). The main power transformer module (T) includes a third core transformer (T3) and a fourth core transformer (T4). The second ends of the third fuse (FUSE3) and the fourth fuse (FUSE4) are connected to the first group of input ends of the power driver (C), and the second ends of the third fuse (FUSE3) and the fifth fuse (FUSE5) are connected to the second group of input ends of the power driver (C). The first group of output ends of the power driver (C) are respectively connected to the first ends of the eighth switch (SPST8) and the ninth switch (SPST9), and the second group of output ends of the power driver (C) are respectively connected to the first ends of the tenth switch (SPST10) and the eleventh switch (SPST11). The second ends of the eighth switch (SPST8) and the ninth switch (SPST9) are respectively connected to the primary side input end of the third magnetic core transformer (T3), and the second ends of the tenth switch (SPST10) and the eleventh switch (SPST11) are respectively connected to the primary side input end of the fourth magnetic core transformer (T4). In this embodiment, two groups of high-voltage DC voltages are provided to the lamp holder (100) by connecting to three-phase mains electricity. Therefore, two groups of the high-voltage rectifier modules (E) are also required for rectification, and two high-voltage direct current voltages are output as the electric field acceleration voltage of the magnetron inside the lamp holder (100). The output ends of the secondary sides of the third magnetic core transformer (T3) and the fourth magnetic core transformer (T4) are respectively connected to the input ends of the first high-voltage rectifier module (E1) and the second high-voltage rectifier module (E2). After rectification by the high-voltage rectifier module (E), a high-voltage direct current voltage is output, which is transmitted to the lamp holder (100) through a cable as the electric field acceleration voltage of the magnetron inside the lamp holder (100), so as to light up the ultraviolet lamp holder.

[0019] Specifically, Figure 4 As shown, the specific implementation of the high-voltage rectifier module (E) can be: the high-voltage rectifier module (E) includes a first rectifier circuit (600), a second rectifier circuit (700), a third rectifier circuit (800), a fourth rectifier circuit (900), a first AC input terminal (AC1), a second AC input terminal (AC2), a DC positive output terminal (HV+) and a DC negative output terminal (HV-), as well as an overvoltage protection circuit, a voltage sampling circuit, a current limiting protection circuit, and a current sampling circuit; wherein the first rectifier circuit (600), the second rectifier circuit (700), the third rectifier circuit (800) and the fourth rectifier circuit (900) are composed of 16 ultra-fast recovery diodes connected in series; as shown Figure 5As shown, the first rectifier circuit (600) includes a first ultra-fast recovery diode D1, a second ultra-fast recovery diode D2, a third ultra-fast recovery diode D3, a fourth ultra-fast recovery diode D4, a fifth ultra-fast recovery diode D5, a sixth ultra-fast recovery diode D6, a seventh ultra-fast recovery diode D7, an eighth ultra-fast recovery diode D8, a ninth ultra-fast recovery diode D9, a tenth ultra-fast recovery diode D10, an eleventh ultra-fast recovery diode D11, a twelfth ultra-fast recovery diode D12, a thirteenth ultra-fast recovery diode D13, a fourteenth ultra-fast recovery diode D14, a fifteenth ultra-fast recovery diode D15 and a sixteenth ultra-fast recovery diode D16; the cathode of the first ultra-fast recovery diode D1 is connected to the anode of the second ultra-fast recovery diode D2, and so on, the cathode of the fifteenth ultra-fast recovery diode D15 is connected to the anode of the sixteenth ultra-fast recovery diode D16. The second rectifier circuit (700) comprises a seventeenth ultra-fast recovery diode D17, an eighteenth ultra-fast recovery diode D18, a nineteenth ultra-fast recovery diode D19, a twentieth ultra-fast recovery diode D20, a twenty-first ultra-fast recovery diode D21, a twenty-second ultra-fast recovery diode D22, a twenty-third ultra-fast recovery diode D23, a twenty-fourth ultra-fast recovery diode D24, a twenty-fifth ultra-fast recovery diode D25, a twenty-sixth ultra-fast recovery diode D26, a twenty-seventh ultra-fast recovery diode D27, a twenty-eighth ultra-fast recovery diode D28, a twenty-ninth ultra-fast recovery diode D29, a thirtieth ultra-fast recovery diode D30, a thirty-first ultra-fast recovery diode D31 and a thirty-second ultra-fast recovery diode D32; the cathode of the seventeenth ultra-fast recovery diode D17 is connected to the anode of the eighteenth ultra-fast recovery diode D18, and by analogy, the cathode of the thirty-first ultra-fast recovery diode D31 is connected to the anode of the thirty-second ultra-fast recovery diode D32. The third rectifier circuit (800) comprises a thirty-third ultra-fast recovery diode D33, a thirty-fourth ultra-fast recovery diode D34, a thirty-fifth ultra-fast recovery diode D35, a thirty-sixth ultra-fast recovery diode D36, a thirty-seventh ultra-fast recovery diode D37, a thirty-eighth ultra-fast recovery diode D38, a thirty-ninth ultra-fast recovery diode D39, a forty-first ultra-fast recovery diode D41, a forty-second ultra-fast recovery diode D42, a forty-third ultra-fast recovery diode D43, a forty-fourth ultra-fast recovery diode D44, a forty-fifth ultra-fast recovery diode D45, a forty-sixth ultra-fast recovery diode D46, a forty-seventh ultra-fast recovery diode D47 and a forty-eighth ultra-fast recovery diode D48; the cathode of the thirty-third ultra-fast recovery diode D33 is connected to the anode of the thirty-fourth ultra-fast recovery diode D34, and by analogy, the cathode of the forty-seventh ultra-fast recovery diode D47 is connected to the anode of the forty-eighth ultra-fast recovery diode D48.The fourth rectifier circuit (900) comprises a forty-ninth ultra-fast recovery diode D49, a fiftieth ultra-fast recovery diode D50, a fifty-first ultra-fast recovery diode D51, a fifty-second ultra-fast recovery diode D52, a fifty-third ultra-fast recovery diode D53, a fifty-fourth ultra-fast recovery diode D54, a fifty-fifth ultra-fast recovery diode D55, a fifty-sixth ultra-fast recovery diode D56, a fifty-seventh ultra-fast recovery diode D57, a fifty-eighth ultra-fast recovery diode D58, a fifty-ninth ultra-fast recovery diode D59, a sixtieth ultra-fast recovery diode D60, a sixty-first ultra-fast recovery diode D61, a sixty-second ultra-fast recovery diode D62, a sixty-third ultra-fast recovery diode D63 and a sixty-fourth ultra-fast recovery diode D64; the cathode of the forty-ninth ultra-fast recovery diode D49 is connected to the anode of the fiftieth ultra-fast recovery diode D50, and by analogy, the cathode of the sixty-third ultra-fast recovery diode D63 is connected to the anode of the sixty-fourth ultra-fast recovery diode D64. The DC negative output terminal HV- is connected to the anode of the first ultra-fast recovery diode D1 and the anode of the thirty-third ultra-fast recovery diode D33 respectively; the DC positive output terminal HV+ is connected to the cathode of the thirty-second ultra-fast recovery diode D32 and the cathode of the sixty-fourth ultra-fast recovery diode D64 respectively. The first AC input terminal AC1 is connected to the cathode of the sixteenth ultra-fast recovery diode D16 and the anode of the seventeenth ultra-fast recovery diode D17 respectively; the second AC input terminal AC2 is connected to the cathode of the forty-eighth ultra-fast recovery diode D48 and the anode of the forty-ninth ultra-fast recovery diode (D49) respectively. The overvoltage protection circuit comprises a first varistor (VR1), a second varistor (VR2), a third varistor (VR3), a fourth varistor (VR4), a fifth varistor (VR5) and a sixth varistor (VR6) connected in series; one end of the first varistor (VR1) is respectively connected to the cathode of the thirty-second ultra-fast recovery diode (D32) and the cathode of the sixty-fourth ultra-fast recovery diode (D64), and the other end is connected in series with the second varistor (VR2); one end of the sixth varistor (VR6) is respectively connected to the DC negative output terminal (HV-) and the anode of the thirty-third ultra-fast recovery diode (D33), and the other end is connected in series with the fifth varistor (VR5).The voltage sampling circuit comprises a connector (CN), a first resistor (R1) and a second resistor (R2); one end of the second resistor (R2) is connected to one end of the sixth varistor (VR6), and the other end is respectively connected to one end of the first resistor (R1) and a first input end of the connector (CN); the other end of the first resistor (R1) is connected to the DC positive output terminal (HV+); the second input end of the connector (CN) is connected to the DC positive output terminal (HV+), and the first output end and the second output end of the connector (CN) are connected to the DC positive output terminal (HV+); the ratio of the resistance values ​​of the first resistor (R1) and the second resistor (R2) is 1:2500. Wherein, the current limiting protection circuit; wherein, the current limiting protection circuit comprises a third resistor (R3), a fourth resistor (R4) and a fifth resistor (R5) connected in series; one end of the third resistor (R3) is connected to the second input end of the connector (CN), and the other end is respectively connected to the cathode of the thirty-second ultra-fast recovery diode (D32) and one end of the fourth resistor (R4); the other end of the fourth resistor (R4) is connected to one end of the fifth resistor (R5), and the other end of the fifth resistor (R5) is connected to the DC positive output terminal (HV+). Wherein, the current sampling circuit comprises a sixth resistor (R6), one end of the sixth resistor (R6) is connected to the cathode of the sixty-fourth ultra-fast recovery diode (D64), and the other end is connected to the DC positive output terminal (HV+).

[0020] In summary, Figure 4 Point DY and point DL in are the voltage sampling terminal and current sampling terminal of the high-voltage rectifier module (E). The first AC input terminal (AC1) and the second AC input terminal (AC2) are two input terminals of the high-voltage rectifier module (E), connected to the output terminal of the secondary side of the magnetic core transformer of the main power transformer module (T). The DC positive output terminal (HV+) and the DC negative output terminal (HV-) are the output terminals of the high-voltage rectifier module (E), connected to the lamp holder (100). In this embodiment, four rectifier circuits composed of 16 ultrafast recovery diodes connected in series are used to improve the overall withstand voltage level of the rectifier bridge. According to actual application requirements, the number of ultrafast recovery diodes connected in series in the rectifier circuit can be adjusted to meet the requirements of high voltage resistance and load power supply. The circuit as a whole is simple and easy to implement. It only needs to form a rectifier circuit through a plurality of ultrafast recovery diodes connected in series to replace the existing high-voltage rectifier bridge integrated in the internal circuit board of the ultraviolet curing equipment to realize the rectification of AC high voltage into DC high voltage, thereby improving the space utilization rate of the equipment circuit board, reducing costs, and improving the circuit withstand voltage capability, which is conducive to the mass production of ultraviolet curing equipment.

[0021] In summary, the second ends of the fourth fuse (FUSE4) and the fifth fuse (FUSE5) are connected to the input end of the primary side of the isolation transformer (T1) to convert the three-phase AC power into a 220V AC voltage. The output voltage on the secondary side of the isolation transformer (T1) is divided into two paths, one of which is sent to the filament voltage output module (H), and the filament voltage output module (H) outputs a 220V AC voltage to the lamp holder (100) as the filament preheating AC voltage of the lamp holder (100) for filament preheating; the other path is converted into a low-voltage DC voltage by the power conversion module (F) for powering the control board. Specifically, in order to meet the different power supply requirements of each functional template on the control board, such as Figure 6 As shown, the power conversion module (F) may also include: an AC voltage conversion unit (F1), a DC voltage conversion unit (F2) and an analog voltage conversion unit (F3); wherein the AC voltage conversion unit (F1) is used to convert the output voltage (220V AC voltage) on the secondary side of the isolation transformer (T1) into a 24V low-voltage DC voltage; the DC voltage conversion unit (F2) is used to reduce the output voltage (24V low-voltage DC voltage) of the AC voltage conversion unit to a 5V low-voltage DC voltage used by most components on the control board; in addition, some analog signal debugging circuits on the control board require positive and negative bipolar power supply, so the analog voltage conversion unit (F3) is used to convert the 5V low-voltage DC voltage into a ±5V dual-channel power supply for its use. Therefore, the control of the device by the control board described in the embodiment of the present invention is mainly reflected in controlling the power supply on and off and closed-loop control. The control panel realizes closed-loop control of opening and closing of the whole equipment, as well as control of the scheduling of various functions of the equipment, which are all integrated in the above-mentioned control panel. The control panel controls the whole equipment, which is conducive to shortening the system response time, reducing the volume of the ultraviolet curing equipment, and reducing the difficulty of the internal structure design of the equipment chassis; it solves the technical problem that the existing ultraviolet curing equipment is not conducive to centralized management due to its large volume, relatively scattered distribution of internal devices of the equipment, and scattered functions of each module.

[0022] like Figure 7As shown, an embodiment of the present application provides another control board for ultraviolet curing equipment. On the basis of the above-mentioned embodiment 1, the control board also includes a lamp holder detection communication module (G); wherein a first end of the lamp holder detection communication module (G) is connected to the microprocessor (U), and a second end is connected to the lamp holder (100) via a CAN bus; the microprocessor (U) is also used to perform a power-on self-test on the lamp holder detection communication module (G); if the microprocessor (U) determines that the filament preheating of the lamp holder (100) meets a first preset condition based on the output current signal, the microprocessor (U) determines whether the working state of the lamp holder (100) meets a second preset condition through the wind pressure signal and temperature signal of the lamp holder (100) fed back by the lamp holder detection communication module (G); if so, the microprocessor (U) sends a fourth instruction to the main circuit breaker control module (K). In this embodiment, when the device is in a standby state and the filament preheating satisfies the first preset condition, before the main circuit breaker (D) is controlled to close by the main circuit breaker control module (K) to start the device, the working state of the lamp holder (100) is also detected to avoid damage to the lamp holder or other device components by forcibly starting the device when an abnormality occurs inside the lamp holder. The wind pressure signal and temperature signal of the lamp holder (100) fed back by the lamp holder detection communication module (G) are used to determine whether the current wind pressure value and temperature value of the lamp holder are within the preset wind pressure threshold and preset temperature threshold ranges. If they exceed the preset value range, the working state of the lamp holder (100) does not meet the second preset condition. Otherwise, it is determined to be satisfied. If the working state of the lamp holder (100) does not satisfy the second preset condition, the microprocessor (U) will not send the fourth instruction to the main circuit breaker control module (K), and the device will not start up; at this time, the microprocessor (U) feeds back abnormal information to the chassis embedded display panel (300) through the panel communication module (J), so as to prompt relevant staff to repair the equipment in time and keep the control panel in a system reset state. Specifically, the wind pressure signal and temperature signal of the lamp holder (100) can be obtained through the wind pressure sensor and temperature sensor provided inside the lamp holder, and then fed back to the microprocessor (U) through the lamp holder detection communication module (G), thereby realizing real-time monitoring and closed-loop control of the working state of the lamp holder.

[0023] The control panel further comprises a main circuit voltage and current feedback module (L) and a main circuit power drive communication module (M); wherein a first end of the main circuit voltage and current feedback module (L) and a first end of the main circuit power drive communication module (M) are connected to the microprocessor (U), and a second end of the main circuit voltage and current feedback module (L) is connected to a voltage sampling end of the high voltage rectifier module (E) (i.e., the above Figure 4 DY in the above Figure 4 DL in the main circuit power drive communication module (M), the second end of the main circuit power drive communication module (M) is connected to the power driver (C) through a serial communication bus; the microprocessor (U) is also used to perform power-on self-test on the main circuit voltage and current feedback module (L) and the main circuit power drive communication module (M); the microprocessor (U) receives the high-voltage DC voltage signal and the high-voltage DC current signal fed back by the main circuit voltage and current feedback module (L) in real time, calculates the real-time power according to the high-voltage DC voltage signal and the high-voltage DC current signal, and compares the real-time power with the preset power; if the real-time power is less than the preset power, the microprocessor (U) sends a seventh instruction to the power driver (C) through the main circuit power drive communication module (M), and the seventh instruction is used to instruct the power driver (C) to adjust the output voltage to increase; if the real-time power is greater than the preset power, the microprocessor (U) sends an eighth instruction to the power driver (C) through the main circuit power drive communication module (M), and the eighth instruction is used to instruct the power driver (C) to adjust the output voltage to decrease. Monitor the voltage and current of the lamp holder in real time, and adjust the output voltage of the power driver (C) by adjusting the conduction angle of the bidirectional thyristor inside the power driver (C), so that the lamp holder can operate at a constant value according to the set standard power, avoid damage to the lamp holder, and realize real-time monitoring and adaptive closed-loop control of the equipment. The main circuit voltage and current feedback module (L) is powered by the dual power supply output by the analog voltage conversion unit (F3). The main circuit power drive communication module (M) is powered by the 5V voltage output by the DC voltage conversion unit (F2). At the same time, the AC voltage conversion unit (F1) outputs a 24V low-voltage DC voltage to power the power driver (C) to maintain its normal operation.

[0024] The control panel also includes a remote control communication module (N); wherein a first end of the remote control communication module (N) is connected to the microprocessor (U), and a second end is connected to an IO interface board (400) arranged outside the chassis of the ultraviolet curing device through a serial communication bus; the microprocessor (U) is also used to perform a power-on self-test on the remote control communication module (N) and a connection detection on the IO interface board (400); the remote control communication module (N) is used to achieve wireless communication connection with a remote terminal; the microprocessor (U) is also used to send the first instruction to the remote terminal through the remote control communication module (N), and the first instruction is also used to instruct the remote terminal to prompt the user that the device enters a standby state; the microprocessor (U) is also used to receive the second instruction sent by the remote terminal through the remote control communication module (N); the microprocessor (U) is also used to receive the fifth instruction sent by the remote terminal through the remote control communication module (N). In this embodiment, the device power on and off and other corresponding control instructions can not only be sent on-site by the above-mentioned chassis embedded display panel (300) through manual interaction, that is, local control of the device, but can also be sent by a remote terminal through a remote control communication module (N) to achieve remote control of the device. Specifically, the IO interface board (400) can be installed on the back panel of the device chassis, and the corresponding signal is transmitted to the remote terminal using different interface forms. It should be noted that the chassis embedded display panel (300) described in the embodiment of the present application is powered by the 5V voltage output by the DC voltage conversion unit (F2) and is arranged on the front of the device chassis. The chassis embedded display panel (300) integrates the chassis status display function and some local operations, and the display content is transmitted through the RS485 bus for data transmission. The control panel interacts with the chassis embedded display panel (300) through the panel communication module (J), and the operating parameters set by the chassis embedded display panel (300) are also transmitted to the microprocessor (U) of the control panel through the bus for storage. Even if the device is accidentally powered off, the operating parameters will not be lost.

[0025] The control panel also includes an online communication module (S); wherein the first end of the online communication module (S) is connected to the microprocessor (U), and the second end is connected to the IO interface board (400) arranged outside the chassis of the ultraviolet curing device through a serial communication bus; the microprocessor (U) is also used to perform a power-on self-test on the online communication module (S) and to perform a connection detection on the IO interface board (400); the online communication module (S) is used to connect with other ultraviolet curing devices; in some application scenarios, a semiconductor production line needs to have many ultraviolet curing devices working at the same time, and the working status is consistent. For the convenience of operation, multiple devices need to be operated online to realize the simultaneous start and stop of multiple devices. Therefore, the online communication module (S) is integrated on the control panel, and each device is cascaded one by one in the form of a daisy chain, so that the same instruction can be forwarded to multiple devices, which greatly simplifies the engineering routing of the semiconductor production line.

[0026] The control panel also includes a heat dissipation fan control module (P) and a temperature sensor module (Q); wherein the first end of the heat dissipation fan control module (P) is connected to the microprocessor (U), and the second end is connected to the heat dissipation fan (500) arranged inside the chassis of the ultraviolet curing device; the temperature sensor module (Q) is arranged inside the chassis of the ultraviolet curing device, connected to the microprocessor (U), and is used to detect the temperature inside the chassis of the ultraviolet curing device in real time, and send the detected temperature information to the microprocessor (U); the microprocessor (U) is also used to perform a power-on self-test on the heat dissipation fan control module (P), and to perform a connection test on the heat dissipation fan (500); when the temperature inside the chassis of the ultraviolet curing device reaches a preset temperature threshold, the microprocessor (U) is also used to send a ninth instruction to the heat dissipation fan control module (P), and the ninth instruction is used to instruct the heat dissipation fan control module (P) to control and start the heat dissipation fan (500). In order to ensure that the components inside the chassis work normally for a long time, the chassis must maintain a suitable working temperature. Therefore, in this embodiment, a temperature sensor module (Q) is integrated on the control board to sense the internal temperature of the chassis. Once the temperature is too high, an alarm needs to be sounded immediately to remind the staff that the equipment is abnormal. In order to accelerate the heat dissipation inside the chassis, cooling fans are installed on the front and back panels of the chassis. After the control board is powered on, the fan power supply is controlled by the chassis cooling fan control module. After the fan is turned on, negative pressure is formed inside the chassis, which accelerates the flow of air, improves the heat exchange efficiency, reduces the internal temperature of the chassis, and prolongs the service life of the device.

[0027] like Figure 8As shown, the embodiment of the present application provides a control method applied to ultraviolet curing equipment, using the control board as described in any one of the above embodiments 1 or 2 to control the ultraviolet curing equipment, the execution subject is the above microprocessor (U), and the control method includes the following steps: 801. Real-time monitoring of whether there is a DC voltage signal at the output end of the power conversion module (F).

[0028] 802. If a DC voltage signal is detected at the output end of the power conversion module (F), a power-on self-test is performed on the filament voltage output module (H), the panel communication module (J) and the main circuit breaker control module (K).

[0029] 803. If the power-on self-test is normal, then a connection test is performed on the chassis embedded display panel (300). If the power-on self-test is abnormal, then step 814 is executed.

[0030] 804. If the connection detection is normal, a first instruction is sent to the chassis embedded display panel (300) through the panel communication module (J), wherein the first instruction is used to instruct the chassis embedded display panel (300) to prompt the user that the device enters a standby state. If the connection detection is abnormal, step 814 is executed.

[0031] 805. Receive, via the panel communication module (J), a second instruction sent by the chassis embedded display panel (300), wherein the second instruction is a power-on instruction for the ultraviolet light curing device.

[0032] 806. Send a third instruction to the filament voltage output module (H), wherein the third instruction is used to instruct the filament voltage output module (H) to output a filament preheating AC voltage to the lamp holder (100).

[0033] 807. Acquire the output current signal fed back by the filament voltage output module (H) in real time.

[0034] 808. Determine whether the filament preheating of the lamp holder (100) satisfies a first preset condition based on the output current signal.

[0035] 809. If the filament preheating of the lamp holder (100) meets the first preset condition, the wind pressure signal and the temperature signal of the lamp holder (100) are obtained through the lamp holder detection communication module (G). If the filament preheating of the lamp holder (100) does not meet the first preset condition, execute step 814.

[0036] 810. Determine whether the working state of the lamp holder (100) satisfies a second preset condition based on the wind pressure signal and the temperature signal of the lamp holder (100).

[0037] 811. If the working state of the lamp holder (100) satisfies the second preset condition, a fourth instruction is sent to the main circuit breaker (D) through the main circuit breaker control module (K), wherein the fourth instruction is used to instruct the main circuit breaker (D) to close. If the working state of the lamp holder (100) does not satisfy the second preset condition, step 814 is executed.

[0038] 812. Receive, via the panel communication module (J), a fifth instruction sent by the chassis embedded display panel (300), wherein the fifth instruction is a shutdown instruction for the ultraviolet curing device.

[0039] 813. Send a sixth instruction to the main circuit breaker (D) through the main circuit breaker control module (K), wherein the sixth instruction is used to instruct the main circuit breaker (D) to disconnect.

[0040] 814. Warning, system reset.

[0041] On the basis of the above, during the operation of the lamp head, the control method also includes: using a temperature sensor (Q) to detect the real-time temperature inside the chassis of the ultraviolet light curing device in real time; judging whether the real-time temperature inside the chassis of the ultraviolet light curing device reaches a preset temperature threshold; if so, sending a ninth instruction to the cooling fan control module (P), the ninth instruction being used to instruct the cooling fan control module (P) to control the cooling fan (500) to start.

[0042] like Fig. 9 As shown, during the operation of the lamp holder, the control method further includes: 901. Real-time sampling of the high-voltage direct current voltage signal and the high-voltage direct current signal at the input end of the lamp holder (100).

[0043] 902. Calculate the real-time power at the input end of the lamp holder (100) according to the high-voltage direct current voltage signal and the high-voltage direct current signal.

[0044] 903. Compare the real-time power with the preset power.

[0045] 904. If the real-time power is less than the preset power, a seventh instruction is sent to the power driver (C) through the main circuit power drive communication module (M), and the seventh instruction is used to instruct the power driver (C) to adjust the output voltage to increase.

[0046] 905. If the real-time power is greater than the preset power, an eighth instruction is sent to the power driver (C) through the main circuit power drive communication module (M), and the eighth instruction is used to instruct the power driver (C) to adjust the output voltage to decrease.

[0047] Preferably, when the device is controlled by a remote terminal, the control method includes: 1001. Real-time monitoring of whether there is a DC voltage signal at the output end of the power conversion module (F).

[0048] 1002. If a DC voltage signal is detected at the output end of the power conversion module (F), a power-on self-test is performed on the filament voltage output module (H), the panel communication module (J) and the main circuit breaker control module (K).

[0049] 1003. If the power-on self-test is normal, then a connection test is performed on the remote terminal. If the power-on self-test is abnormal, then step 814 is executed.

[0050] 1004. If the connection detection is normal, a first instruction is sent to the remote terminal through the remote control communication module (N), wherein the first instruction is used to instruct the remote terminal to prompt the user that the device enters the standby state. If the connection detection is abnormal, step 814 is executed.

[0051] 1005. Receive a second instruction sent by a remote terminal through the remote control communication module (N), where the second instruction is a power-on instruction for the ultraviolet light curing device.

[0052] 1006. Send a third instruction to the filament voltage output module (H), wherein the third instruction is used to instruct the filament voltage output module (H) to output a filament preheating AC voltage to the lamp holder (100).

[0053] 1007. Acquire the output current signal fed back by the filament voltage output module (H) in real time.

[0054] 1008. Determine whether the filament preheating of the lamp holder (100) satisfies a first preset condition based on the output current signal.

[0055] 1009. If the filament preheating of the lamp holder (100) meets the first preset condition, the wind pressure signal and the temperature signal of the lamp holder (100) are obtained through the lamp holder detection communication module (G). If the filament preheating of the lamp holder (100) does not meet the first preset condition, execute step 814.

[0056] 1010. Determine whether the working state of the lamp holder (100) satisfies a second preset condition based on the wind pressure signal and the temperature signal of the lamp holder (100).

[0057] 1011. If the working state of the lamp holder (100) satisfies the second preset condition, a fourth instruction is sent to the main circuit breaker (D) through the main circuit breaker control module (K), wherein the fourth instruction is used to instruct the main circuit breaker (D) to close. If the working state of the lamp holder (100) does not satisfy the second preset condition, step 814 is executed.

[0058] 1012. Receive a fifth instruction sent by a remote terminal through the remote control communication module (N), wherein the fifth instruction is a shutdown instruction of the ultraviolet light curing device.

[0059] 1013. Send a sixth instruction to the main circuit breaker (D) through the main circuit breaker control module (K), wherein the sixth instruction is used to instruct the main circuit breaker (D) to disconnect.

[0060] 1014. Warning, system reset.

[0061] It should be noted that when the on-site staff manually turns on the main switch (B) to power on the control board, it starts working. The control board first performs a self-test of the functional module. After the self-test passes, it starts to inspect the circuit boards in the chassis. Through the communication bus, it detects the power driver (C), the chassis embedded display panel (300), the IO interface board (400), etc. in the chassis. If the status of each circuit board in the controller chassis is normal, the system enters the standby state and waits for local or remote control to control the device. The lamp head needs to be preheated before turning on the light. In addition to detecting the filament current signal fed back by the filament voltage output module (H), the control board also needs to obtain the wind pressure and temperature of the lamp head. If they are all normal, the control board starts to turn on the light, closes the main circuit breaker (D), starts the closed-loop control of the entire device, and maintains the constant power operation of the main circuit of the power supply. If the operating device receives a light-off operation from the local and remote control, the control board immediately disconnects the main circuit breaker (D) and cuts off the power supply to the lamp head.

[0062] In a feasible embodiment, after the control panel disconnects the main circuit breaker (D) and cuts off the power supply to the lamp holder, the control method further includes: obtaining the temperature signal of the lamp holder (100) through the lamp holder detection communication module (G), and judging whether the detected lamp holder temperature satisfies a third preset condition, that is, when the detected lamp holder temperature cools to or below the second preset temperature threshold, the third preset condition is satisfied, otherwise it is not satisfied. If the detected lamp holder temperature satisfies the third preset condition, that is, when the lamp holder cools to the requirement, the main control panel feedbacks that the cooling is completed, then a prompt message is sent to the chassis embedded display panel (300) through the panel communication module (J), such as "The lamp holder has been cooled, please shut down", and at this time, the on-site staff disconnects the main switch (B) to cut off the power supply to the entire device, and the device stops working.

[0063] To sum up, the control of the entire device is integrated on the control board, which includes both the control of system functions and internal and external communications, achieving highly integrated integration, which can facilitate the wiring inside the device chassis, greatly reduce the difficulty of device structure design, and at the same time compress the size of the device chassis, facilitate the transportation of the equipment, and reduce costs.

[0064] The specific implementation of this embodiment can refer to the above-mentioned embodiments 1 and 2, and will not be repeated here.

[0065] The above description is only a preferred embodiment of the present invention and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the present invention is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept. For example, the above features are replaced with the technical features with similar functions disclosed in the present invention (but not limited to) to form a technical solution.

Claims

1. A control panel, applied to ultraviolet curing equipment, characterized in that: The control panel includes a microprocessor (U), a panel communication module (J), a filament voltage output module (H), and a main circuit breaker control module (K); When the microprocessor (U) detects a power-on command input by a user through the panel communication module (J), the microprocessor (U) outputs a filament preheating AC voltage to the lamp head (100) of the curing device through the filament voltage output module (H); the microprocessor (U) determines whether the output current signal fed back by the filament voltage output module (H) satisfies a first preset condition; if so, the main circuit breaker control module (K) controls the main circuit breaker of the curing device to close, thereby completing the power-on start-up of the curing device; When the microprocessor (U) detects a shutdown command input by the user through the panel communication module (J), the main circuit breaker control module (K) controls the main circuit breaker of the curing equipment to be disconnected, thereby completing the shutdown operation of the curing equipment.

2. The control panel according to claim 1, characterized in that: It also includes a lamp head detection communication module (G); wherein the microprocessor (U) determines whether the working state of the lamp head (100) meets a second preset condition through the wind pressure signal and temperature signal of the lamp head (100) fed back by the lamp head detection communication module (G); if so, the main circuit breaker of the curing equipment is controlled to be closed through the main circuit breaker control module (K).

3. The control panel according to claim 2, characterized in that: It also includes a main circuit voltage and current feedback module (L) and a main circuit power drive communication module (M); wherein the main circuit voltage and current feedback module (L) feeds back the high-voltage DC voltage signal and the high-voltage DC current signal of the curing device to the microprocessor (U) in real time; the microprocessor (U) calculates the real-time power according to the high-voltage DC voltage signal and the high-voltage DC current signal, and compares the real-time power with the preset power; if the real-time power is less than the preset power, the output voltage of the power driver of the curing device is adjusted to increase through the main circuit power drive communication module (M); otherwise, the output voltage of the power driver of the curing device is adjusted to decrease through the main circuit power drive communication module (M).

4. The control panel according to claim 3, characterized in that: It also includes a remote control communication module (N); wherein, when the remote control communication module (N) detects a power-on command input by a user through a remote terminal, the remote control communication module (N) sends the power-on command to the microprocessor (U); the microprocessor (U) controls the main circuit breaker of the curing equipment to close through the main circuit breaker control module (K); or, when the remote control communication module (N) detects a power-off command input by a user through a remote terminal, the remote control communication module (N) sends the power-off command to the microprocessor (U); the microprocessor (U) controls the main circuit breaker of the curing equipment to open through the main circuit breaker control module (K).

5. The control panel according to claim 4, characterized in that: It also includes a heat dissipation fan control module (P); wherein, when the microprocessor (U) detects that the real-time temperature inside the curing device chassis reaches a preset temperature threshold, the heat dissipation fan (500) arranged inside the curing device chassis is controlled to start through the heat dissipation fan control module (P).

6. A control method, characterized in that: Using the control panel as claimed in any one of claims 1 to 5 to control the ultraviolet curing equipment, comprising: When a power-on command input by the user is detected, a filament preheating AC voltage is output to the lamp head of the curing equipment, and an output current signal is obtained; Determine whether the output current signal meets a first preset condition; if so, control the main circuit breaker of the curing device to close, and complete the startup of the curing device; When a shutdown command input by the user is detected, the main circuit breaker of the curing equipment is controlled to be disconnected to complete the shutdown operation of the curing equipment.

7. The control method according to claim 6, characterized in that: The output current signal satisfies a first preset condition, and then further comprises: Obtaining wind pressure signal and temperature signal of the lamp head of the curing equipment; Based on the wind pressure signal and the temperature signal, it is determined whether the working state of the lamp head of the curing equipment meets the second preset condition; if so, the main circuit breaker of the curing equipment is controlled to be closed.

8. The control method according to claim 7, characterized in that: Also includes: Real-time sampling of the high-voltage DC voltage signal and the high-voltage DC current signal at the input end of the lamp holder of the curing equipment; According to the high-voltage DC voltage signal and the high-voltage DC current signal, the real-time power of the lamp head input end of the curing device is calculated; the real-time power is compared with the preset power; if the real-time power is less than the preset power, the output voltage of the power driver of the curing device is adjusted to increase; otherwise, the output voltage of the power driver of the curing device is adjusted to decrease.

9. The control method according to claim 8, characterized in that: The user inputs a power-on instruction through the chassis embedded display panel or a remote terminal of the curing device.

10. The control method according to claim 9, characterized in that: Also includes: It is detected in real time whether the real-time temperature inside the curing device chassis reaches a preset temperature threshold, and if so, a heat dissipation fan (500) arranged inside the curing device chassis is controlled to start.

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