Boat bearing block, carrier and tool for replacing boat bearing block

Abstract

The invention relates to a boat bearing block, a carrier and a tool for replacing the boat bearing block, and the boat bearing block comprises a block body and a conductive part; the block body is provided with a supporting part, the supporting part is provided with an installation groove used for installing the conductive piece, when the conductive piece is installed in the installation groove, one end of the conductive piece protrudes out of the installation groove, and the end face of the side, extending out of the installation groove, of the conductive piece forms a boat foot supporting face. The surface of the conductive part can be prevented from being coated with a conductive film to affect the coating process, meanwhile, frequent shutdown and temperature rising and falling of equipment caused by frequent replacement of the boat bearing block can be avoided, and the production efficiency is guaranteed.

Description

Technical Field

[0001] The present application relates to the technical field of coating equipment, and in particular to a boat block, a carrier, and a tooling for replacing the boat block. Background Art

[0002] In PECVD (plasma enhanced chemical vapor deposition) equipment, after a period of coating, a thin film will be coated on the surface of the support boat block, such as silicon nitride film, silicon oxynitride film, silicon oxide film and polysilicon film. The thin film will affect the electrical contact of the support boat block, thereby causing high frequency of the equipment, powder discharge during coating, uneven film thickness of the coating, and affected electrical properties of silicon wafers, thereby reducing product yield.

[0003] In order to avoid the influence of the surface coating of the boat block on the production and product performance, the following two methods are mainly used in the prior art: one method is to directly grind the boat block with a brush. Since the hardness of silicon nitride and silicon oxide films is higher than that of stainless steel, and the film layer has strong adhesion, the grinding effect is very small; the other method is to take out the entire electrode assembly after the equipment is shut down and cooled down, and to pickle, grind and polish the boat block. This will cause frequent shutdown and heating and cooling of the equipment, which may easily lead to a series of problems such as quartz tube breakage, sealing ring leakage, reduced equipment production capacity, and low equipment utilization rate.

[0004] Therefore, how to avoid the impact of the surface coating of the boat block on production and product performance, as well as frequent shutdowns and temperature increases and decreases due to replacement or cleaning of the boat block, and ensure production efficiency are technical problems that technical personnel in this field urgently need to solve. Summary of the invention

[0005] The purpose of the present application is to provide a boat block, a carrier and a tooling for replacing the boat block, which can prevent the film on the surface of the boat block from affecting the product, and can also avoid frequent heating and cooling of the equipment to ensure production efficiency.

[0006] In order to solve the above technical problems, the present application provides a boat supporting block, including a block body and a conductive member; the block body is provided with a supporting portion, the supporting portion is provided with a mounting groove for installing the conductive member, when the conductive member is installed in the mounting groove, one end of the conductive member protrudes out of the mounting groove, and one side end surface of the conductive member extending out of the mounting groove forms a boat foot supporting surface.

[0007] Optionally, the conductive member is gap-matched with the inner wall of the mounting groove, and the single-side gap between the peripheral side wall of the conductive member and the inner peripheral wall of the mounting groove is 0.1 mm-0.2 mm.

[0008] Optionally, a guide surface is further provided along the circumferential direction at one end of the conductive member facing the installation groove.

[0009] Optionally, the conductive member is a magnetic member, and the block body is a non-magnetic member.

[0010] The present application also provides a carrier, comprising the boat support block as described above.

[0011] The present application also provides a replacement tool for a boat block, which is used to replace the conductive part of the boat block as described above, and the replacement tool for the boat block includes an operating handle and a fixing part; the fixing part is arranged at the front end of the operating handle, and the fixing part is used to fix or detach from the conductive part of the boat block.

[0012] Optionally, the fixing portion includes a fixing seat and an actuating member, the operating handle is provided with a slide, and the actuating member can act on the fixing seat to make the fixing seat slide along the slide to get closer to or away from the boat supporting block; the operating handle is also provided with a limiting structure, and when the conductive member is in abutment with the limiting structure, the actuating member can act on the fixing seat to move along the slide to a side away from the boat supporting block until it is disengaged from the conductive member.

[0013] Optionally, the operating handle is provided with a guide hole, the guide hole forms the slideway, and an end surface of the operating handle located at one side end of the guide hole facing the boat supporting block forms the limiting structure.

[0014] Optionally, one of the operating handle and the fixing seat is provided with a guide shaft, and the other is provided with an axial hole, the guide shaft is parallel to the slideway, and the guide shaft passes through the axial hole and can move axially relative to the axial hole.

[0015] Optionally, the actuating member is a pull rope, one end of which is connected to the fixing seat, the operating handle is further provided with a threading hole along the axial direction, the side wall of the operating handle is further provided with a wire entry hole connected to the threading hole, the pull rope passes through the wire entry hole and the threading hole, and the rear end of the pull rope extends out of the threading hole.

[0016] Optionally, a first bracket is further provided on the top of the fixing seat, and the first bracket is further provided with a first through-hole, and the pull rope passes through the first through-hole.

[0017] Optionally, the operating handle is further fixed with a second bracket, the second bracket is provided with a second through-hole, and the pull rope passes through the second through-hole; the second bracket is located between the first bracket and the wire entry hole.

[0018] Optionally, the fixing portion and the block body are further provided with mutually matching positioning structures respectively, and when the fixing portion and the block body are positioned and matched by the positioning structures, the conductive member fixed to the fixing portion is located in the installation groove.

[0019] Optionally, the operating handle includes an operating portion and an extension portion, and the operating portion is detachably connected to a front end of the extension portion.

[0020] The boat support block, carrier, and tooling for replacing the boat support block provided in the present application have the following technical effects compared to the prior art:

[0021] After a period of coating process, a layer of film will be coated on the surface of the boat block. At this time, the conductive parts of the boat block can be taken out from the installation groove and replaced with new conductive parts by replacing the corresponding tooling of the boat block. There is no need to replace the entire boat block or perform operations such as grinding on the boat block, which can simplify the operating process and improve production efficiency.

[0022] At the same time, since there is no need to remove the entire support boat block, only the conductive parts need to be removed and replaced, the equipment does not need to be cooled down, thereby avoiding the risk of quartz tube breakage and sealing ring leakage due to frequent temperature increases and decreases, thereby improving equipment capacity and utilization rate, and thus improving production efficiency.

[0023] Moreover, only the supporting portion of the boat support block is provided with a mounting groove, and the conductive member is detachably mounted in the mounting groove, so that the overall structure of the boat support block is relatively simple and the operation is relatively convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of a boat support block provided in an embodiment of the present application;

[0025] Figure 2 yes Figure 1 A cross-sectional view of

[0026] Figure 3 yes Figure 2 A magnified view of middle;

[0027] Figure 4 It is a structural schematic diagram of a replacement tool for a boat support block provided in an embodiment of the present application;

[0028] Figure 5 yes Figure 4 A cross-sectional view of a state in which the middle fixing portion and the conductive member are fixed;

[0029] Figure 6 yes Figure 5 Enlarged view of middle B;

[0030] Figure 7 yes Figure 4 A cross-sectional view of the middle fixing portion and the conductive member when they are separated.

[0031] Attached Figure 1-Figure 7 In the figure, the reference numerals are described as follows:

[0032] 100 boat support block, 110 block body, 1101 support portion, 1102 mounting groove, 1103 positioning inclined surface, 1104 positioning vertical surface, 120 conductive member, 1201 boat foot support surface, 1202 guide surface;

[0033] 200 boat block replacement tooling;

[0034] 1 operating handle, 11 slideway, 12 limiting structure, 13 operating portion, 14 extension portion, 15 threading hole, 16 positioning groove, 161 guide wall, 162 positioning wall, 17 wire entry hole;

[0035] 2 fixing part, 21 fixing seat, 211 fixing member, 22 moving member;

[0036] 3 guide shafts;

[0037] 4 axis holes;

[0038] 5 first bracket, 51 first perforation;

[0039] 6 second bracket, 61 second perforation;

[0040] 7 first locking nut;

[0041] 8Second locking nut. DETAILED DESCRIPTION

[0042] In order to enable those skilled in the art to better understand the technical solution of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0043] The embodiment of the present application provides a boat support block and a carrier, wherein the carrier includes a conductive boat body and a support member disposed at the bottom of the conductive boat body, the support member is used to provide support for the conductive boat body, and a boat support portion is also disposed at the bottom of the carrier, and the support member is supported on the boat support portion. Specifically, the support member includes a boat foot, and the boat support portion includes a boat support block 100, and the boat support block 100 is used to provide support for the boat foot, and the conductive boat body is electrically connected to the boat support block 100 through the boat foot.

[0044] like Figure 1 and Figure 2 As shown, the boat supporting block 100 includes a block body 110 and a conductive member 120, wherein the block body 110 is provided with a supporting portion 1101, the supporting portion 1101 is provided with a mounting groove 1102, the mounting groove 1102 is used to install the conductive member 120, the conductive member 120 is detachably installed in the mounting groove 1102, and a side wall surface of the conductive member 120 located outside the mounting groove 1102 can form a boat foot supporting surface 1201 for providing support for the boat foot and also realizing electrical connection with the boat foot.

[0045] In PECVD (plasma enhanced chemical vapor deposition) equipment, after a period of coating process, the surface of the boat block 100 will inevitably be coated with a film layer, such as a silicon nitride film layer, a silicon oxynitride film layer, a silicon oxide film layer or a polysilicon film layer, which will affect the electrical contact between the boat block 100 and the boat foot. At this time, the conductive part 120 of the boat block 100 can be taken out from the installation groove 1102 by replacing the tooling corresponding to the boat block 100, and replaced with a new conductive part 120. This can avoid affecting the coating process due to the conductive film being coated on the surface of the conductive part 120. There is no need to replace the boat block 100 as a whole, nor is there any need to wait for the equipment to cool down before performing operations such as grinding on the boat block 100. This can simplify the operating process and improve production efficiency.

[0046] At the same time, since there is no need to remove the boat block 100 as a whole, only the conductive part 120 needs to be removed and replaced; or, there is no need to wait for the equipment to cool down before grinding the boat block 100, thereby avoiding the risk of quartz tube breakage and sealing ring leakage due to frequent heating and cooling of the equipment, thereby improving equipment capacity and utilization rate, and thus improving production efficiency.

[0047] Furthermore, the support portion 1101 of the boat support block 100 is provided with a mounting groove 1102 , and the conductive member 120 is detachably mounted in the mounting groove 1102 . The overall structure of the boat support block 100 is relatively simple and the operation is relatively convenient.

[0048] Because in the use state, the conductive boat body is located above the boat supporting block 100, and the boat foot support surface 1201 of the conductive member 120 faces upward and provides support for the boat foot located above, therefore, the opening of the installation groove 1102 is set upward, and the conductive member 120 is located in the installation groove 1102, and the installation stability can be ensured by its own gravity, and there is no need to set up additional fixing components to fix the two, which can greatly simplify the replacement operation of the conductive member 120.

[0049] like Figure 2 and Figure 3 As shown, when the conductive member 120 is installed in the installation groove 1102, the top of the conductive member 120 protrudes from the upper surface of the support portion 1101 to ensure that the boat foot support surface 1201 at the top of the conductive member 120 can provide support and conduction for the boat foot. There is no restriction on the specific protrusion height b, such as 2mm-4mm. Moreover, the top end surface of the conductive member 120 is preferably a planar structure to increase the contact area with the boat foot to ensure support stability and good conductivity.

[0050] In this embodiment, there is no limitation on the shape, structure, size, etc. of the conductive member 120, which can be set according to actual conditions. Figure 1As shown, the mounting groove 1102 is a square groove, and the cross section of the conductive member 120 is a square structure, which can also be set to a triangle, a circle, a trapezoid, etc. A larger conductive member 120 is set as much as possible on the surface of the support portion 1101, so that the conductive member 120 has a larger area of ​​the boat foot support surface 1201, ensuring support stability and good conductive performance.

[0051] like Figure 3 As shown, a guide surface 1202 is further provided along the circumferential direction at one end of the conductive member 120 facing the installation groove 1102 . The provision of the guide surface 1202 can facilitate the installation operation of the conductive member 120 .

[0052] In order to facilitate the placement and removal of the conductive member 120 and to facilitate its replacement, in this embodiment, the peripheral side wall of the conductive member 120 and the inner peripheral wall of the mounting groove 1102 are clearance-matched, such as Figure 3 As shown, the unilateral gap a between the circumferential side wall of the conductive member 120 and the inner circumferential wall of the mounting groove 1102 is preferably set to 0.1 mm-0.2 mm. Of course, the unilateral gap a can also be set to less than 0.1 mm, such as 0.08 mm, 0.09 mm, etc., or the unilateral gap a can also be set to more than 0.2 mm, such as 0.25 mm, 0.3 mm, etc., and the unilateral gap a between the circumferential side wall of the conductive member 120 and the inner circumferential wall of the mounting groove 1102 is set to 0.1 mm -0.2mm, such as 0.1mm, 0.15mm, 0.2mm, etc. Compared with the solution of setting the single-sided gap a below 0.1mm, the gap is relatively large, which is conducive to the pick-up and placement operation of the conductive part 120, and avoids the conductive part 120 from getting stuck during the pick-up and placement process. Compared with the solution of setting the single-sided gap a above 0.2mm, the gap is relatively small, which can ensure that there is a sufficiently large boat foot support surface 1201 to ensure support stability and good conductive performance, and at the same time can reduce the probability of forming a film layer in the installation groove 1102, avoid the film layer from affecting the product, and ensure the quality of the product.

[0053] This embodiment further provides a replacement tool 200 for a boat support block (hereinafter referred to as “replacement tool”), which is used to replace the conductive member 120 of the boat support block 100 .

[0054] Specifically, Figure 4 As shown, the replacement tool comprises an operating handle 1 and a fixing portion 2 , wherein the fixing portion 2 is disposed at the front end of the operating handle 1 , and the fixing portion 2 is used to fix with or detach from the conductive member 120 of the boat support block 100 .

[0055] When the conductive member 120 of the boat support block 100 needs to be replaced, the front end of the operating handle 1 is inserted into the device, and the rear part of the operating handle 1 is located outside the device to facilitate the operation of the operator. After the front end of the operating handle 1 enters the device, the fixing part 2 can be fixed to the conductive member 120 in the mounting groove 1102. Then the operator can use the operating handle 1 and the fixing part 2 to pull the conductive member 120 out of the mounting groove 1102, and then move the operating handle 1 as a whole out of the device to complete the removal operation of the conductive member 120.

[0056] Then the fixing part 2 is separated from the removed conductive part 120, and a new conductive part 120 is replaced to be fixed to the fixing part 2. The fixing part 2 with the new conductive part 120 is extended into the device and to the boat support block 100 through the front end of the operating handle 1 again. The operator can use the operating handle 1 to make the conductive part 120 fall into the installation groove 1102, and then the fixing part 2 is separated from the conductive part 120. Then the operating handle 1 is moved out of the device as a whole to complete the installation operation of the conductive part 120.

[0057] Since only the operating handle 1 and the fixed part are inserted into the device, the operator is outside the device throughout the whole process, which is highly safe. Moreover, the device does not need to be cooled down, and the conductive part 120 can be replaced even at high temperature, thus avoiding affecting the production efficiency.

[0058] The conductive part 120 is preferably a magnetic part, and specifically, ferritic stainless steel, cobalt, nickel alloy, etc. can be used. The block body 110 is a non-magnetic part, such as 316 stainless steel, etc. The tooling can be replaced by a magnetic adsorption part, and the conductive part 120 can be adsorbed and fixed by magnetic adsorption. Of course, there is no restriction on how the fixing part 2 of the tooling is fixed to the conductive part 120 to achieve the replacement operation, such as vacuum adsorption, bonding, etc. When the fixation is achieved by magnetic adsorption, it is easy to achieve under high temperature conditions of the equipment, which reduces the high temperature resistance requirements of the tooling, and at the same time can simplify the structure of the tooling replacement and reduce costs.

[0059] like Figure 4 and Figure 5 As shown, the fixing portion 2 includes a fixing seat 21 and an actuating member 22, wherein the fixing seat 21 is fixed to the operating handle 1, and the fixing seat 21 also includes a fixing member 211 with magnetic adsorption capability. Specifically, the fixing seat 21 as a whole may have magnetic adsorption capability and form the fixing member 211, or the fixing member 211 may have magnetic adsorption capability and the fixing seat 21 without magnetism. The fixing member 211 may be connected to the conductive member 120 through magnetic adsorption.

[0060] The operating handle 1 is further provided with a slideway 11 , and a fixing seat 21 is slidably provided on the slideway 11 . The action member 22 can act on the fixing seat 21 to make the fixing seat 21 slide along the slideway 11 .

[0061] In the use state, the slideway 11 is arranged in the vertical direction and is perpendicular to the boat foot support surface 1201. The operator does not need to operate the action member 22. The fixed seat 21 can slide down along the slideway 11 to the conductive member 120 and be fixed to the conductive member 120 under the action of its own gravity. The overall structure is simple. The arrangement of the slideway 11 can provide a guide for the sliding of the fixed seat 21, ensuring that the fixed seat 21 can slide along the slideway 11 to be fixed to the conductive member 120.

[0062] Specifically, when the conductive member 120 is replaced, the front end of the operating handle 1 is extended into the device, and the rear end of the operating handle 1 is still located outside the device to facilitate operation. The operator can act on the fixed seat (21) through the action member 22 to make the fixed seat 21 slide along the slide 11 to approach or move away from the boat support block 100.

[0063] The operating handle 1 is also provided with a limiting structure 12. When the conductive member 120 is in contact with the limiting structure 12, the actuating member 22 can act on the fixed seat 21 to move along the slide 11 to the side away from the boat support block 100 until it is separated from the conductive member 120. However, the conductive member 120 cannot slide along the slide 11 due to the limitation of the limiting structure 12. As the actuating member 22 continues to act, the fixed seat 21 slides along the slide 11 under the action of the actuating member 22 until it is separated from the conductive member 120.

[0064] Of course, in this embodiment, the fixing seat 21 can also be set as an electromagnetic member, which can be fixed to the conductive member 120 by magnetic adsorption in the power-on state, and the fixing member 211 can be separated from the conductive member 120 in the power-off state. In this embodiment, through the setting of the action member 22 and the limiting structure 12, it is possible to achieve the fixation and separation between the fixing member 211 and the conductive member 120, and also simplify the overall structure, without the need to set electrical connecting wires, avoiding the situation where the high cost is caused by the use of high temperature resistant electrical connecting wires under high temperature, and the mechanical structure of the action member 22 and the limiting structure 12 cooperates, and the reliability is better.

[0065] like Figure 5 , Figure 6 and Figure 7As shown, the operating handle 1 is also provided with a guide hole, which forms the above-mentioned slide 11. Of course, in this embodiment, there is no limitation on the specific structure of the slide 11. For example, the operating handle 1 can also be provided with a slide groove or a slide rail to form the above-mentioned slide 11. When the operating handle 1 is provided with a guide hole to form the above-mentioned slide 11, the above-mentioned limiting structure 12 can be formed by the end face of the operating handle 1 located on one side of the guide hole facing the boat support block 100. That is to say, the aperture of the guide hole is relatively small, and the conductive member 120 cannot enter the guide hole, so that the operating handle 1 is located on the bottom end face of the guide hole to form the above-mentioned limiting structure 12. In this way, there is no need to set up a limiting component separately. While ensuring that the conductive member 120 can be stably limited, the overall structure can also be simplified.

[0066] like Figure 4 , Figure 5 and Figure 7 As shown, the operating handle 1 is also provided with a guide shaft 3, which is arranged parallel to the above-mentioned slideway 11, and the fixed seat 21 is also provided with an axial hole 4, through which the guide shaft 3 passes and can move axially relative to the axial hole 4. Of course, in this embodiment, the operating handle 1 can also be provided with the axial hole 4, and the fixed part 2 can be provided with the guide shaft 3, and no specific limitation is made here. The guide shaft 3 cooperates with the axial hole 4 to provide a limit for the movement of the fixed seat 21, and can limit the maximum distance that the fixed seat 21 can slide.

[0067] like Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, the actuating member 22 is a pull rope, the front end of which is connected to the fixing seat 21, the operating handle 1 is also provided with a threading hole 15 along the axial direction, the side wall of the operating handle 1 is also provided with a wire entry hole 17 connected to the threading hole 15, the pull rope passes through the wire entry hole 17 and the threading hole 15, and the rear end of the pull rope extends out of the threading hole 15 to facilitate the operator's operation.

[0068] Specifically, when the new conductive part 120 is placed into the installation groove 1102 through the replacement tool, the front end of the operating handle 1, the fixing part 2 and the front end of the pull rope are extended into the device. After the conductive part 120 fixed to the fixing seat 21 is placed in the installation groove 1102, the operator can pull the rear end of the pull rope so that the pull rope drives the fixing seat 21 to move along the slide 11 to the side away from the boat support block 100. Since the conductive part 120 is restricted by the limiting structure 12, as the pull rope continues to be pulled, the fixing seat 21 is separated from the conductive part 120, and then the operating handle 1 can be taken out.

[0069] Of course, in this embodiment, there is no limitation on the structure of the action member 22. For example, the action member 22 can also be set as a seesaw structure, such as one end of the seesaw is connected to the fixing seat 21, and the operator can operate the seesaw away from one end of the fixing seat 21, so that the seesaw drives the fixing seat 21 to move to the side away from the conductive member 120. When the action member 22 is set as a pull rope, the pull rope can pass through the threading hole 15 provided in the operating handle 1, so as to provide protection for the pull rope, and also make the overall structure of the replacement tool more regular, with a small overall volume and convenient operation.

[0070] In this embodiment, there is no limitation on the specific structure and material of the pull rope, such as a chain rope, a wire rope, etc., as long as the pull rope can withstand the high temperature in the equipment.

[0071] like Figure 5 and Figure 7 As shown, a first bracket 5 is also provided on the top of the fixing seat 21. The first bracket 5 is also provided with a first through-hole 51. The pull rope passes through the first through-hole 51. The first through-hole 51 can provide a guiding effect for the pull rope to prevent the pull rope from being stuck with other structures during the pulling process.

[0072] The operating handle 1 is also provided with a second bracket 6, which is provided with a second through-hole 61, through which the pull rope passes. The second bracket 6 is arranged between the first bracket 5 and the wire entry hole 17, and is arranged close to one side of the wire entry hole 17. The second bracket 6 provides support for the pull rope at the front end of the wire entry hole 17 to prevent the pull rope from interfering with or getting entangled with other surrounding components.

[0073] There is no limitation on the fixing method between the second bracket 6 and the operating handle 1. Figure 5 and Figure 7 As shown, the operating handle 1 and the second bracket 6 are fixed by threaded engagement, and to further ensure the fixing stability, a first locking nut 7 is threadedly engaged with the outside of the second bracket 6 to further ensure the fixing stability. Of course, the second bracket 6 and the operating handle 1 can also be fixed by other means, such as welding, etc., which are not specifically limited here.

[0074] The fixing part 2 and the block body 110 are also provided with mutually adapted positioning structures, and when the fixing part 2 and the block body 110 are positioned and matched by the positioning structures, the conductive member 120 fixed to the fixing part 2 is located in the installation groove 1102. Specifically, the specific structure of the positioning structure is not limited.

[0075] like Figure 6As shown, the operating handle 1 is provided with a positioning groove 16, and a guide wall 161 is circumferentially provided on the groove mouth side of the groove wall of the positioning groove 16, and a positioning wall 162 is formed on the side of the groove wall of the positioning groove 16 facing the groove bottom, and the positioning wall 162 is adapted to the circumferential wall of the support portion 1101 of the block body 110, that is, after the operating handle 1 is inserted into the device, it is initially matched with the support portion 1101 through the guide wall 161 of the positioning groove 16, and as the operating handle 1 continues to move toward the boat support block 100, the positioning wall 162 can just match with the circumferential wall of the support portion 1101, and the top of the support portion 1101 is located in the positioning groove 16, and at this time, the conductive member 120 fixed to the fixing portion 2 can just fall into the installation groove 1102, or the fixing portion 2 can just be fixed to the conductive member 120 located in the installation groove 1102.

[0076] By using the positioning structure to coordinately position the operating handle 1 and the boat support block 100 , it is possible to ensure smooth assembly and disassembly of the conductive member 120 , reduce the time for frequently adjusting the relative position between the fixing portion 2 and the conductive member 120 , and thereby improve the replacement efficiency of the conductive member 120 .

[0077] Specifically, the outer wall of the block body 110 is provided with a positioning inclined surface 1103 and a positioning vertical surface 1104, which are used to cooperate with the boat foot for positioning when the equipment is in use. The positioning wall surface 162 of the mounting groove 1102 can be positioned and cooperated with the positioning inclined surface 1103 and the positioning vertical surface 1104 of the block body 110, which can simplify the improvement of the structure of the block body 110.

[0078] like Figure 4 , Figure 5 and Figure 7 As shown, the operating handle 1 includes an operating portion 13 and an extension portion 14, wherein the operating portion 13 is fixedly arranged at the front end of the extension portion 14, the operating portion 13 is provided with the above-mentioned fixing portion 2, and the extension portion 14 is used to extend the overall length of the operating handle 1 to facilitate the operator to operate from outside the equipment. Specifically, the extension portion 14 is detachably connected to the above-mentioned operating portion 13, so that it is convenient to determine the length of the operating handle 1 according to actual conditions, and then determine the length of the extension portion 14, which has good flexibility.

[0079] Specifically, the operating portion 13 and the extension portion 14 can be connected by threaded matching. The operating portion 13 is provided with a threaded hole, and the front end of the extension portion 14 is provided with an external threaded portion, which is threadedly matched and fixed with the threaded hole. In order to further ensure the fixing stability, a second locking nut 8 is also provided in the external threaded portion, and the second locking nut 8 abuts against the end of the threaded hole to further ensure the fixing stability between the operating portion 13 and the extension portion 14 to avoid loosening. The extension portion 14 can be set as a tube structure with a cavity inside, and the threading hole 15 is formed, so that the overall structure can be simplified and the processing technology can be simplified.

[0080] The above are only preferred implementations of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A boat support block, characterized in that: It comprises a block body (110) and a conductive member (120); The block body (110) is provided with a supporting portion (1101), and the supporting portion (1101) is provided with a mounting groove (1102) for mounting the conductive member (120). When the conductive member (120) is mounted in the mounting groove (1102), one end of the conductive member (120) protrudes out of the mounting groove (1102), and an end surface of one side of the conductive member (120) extending out of the mounting groove (1102) forms a boat foot supporting surface (1201).

2. The boat support block according to claim 1, characterized in that: The conductive member (120) is gap-matched with the inner wall of the installation groove (1102), and the single-side gap between the peripheral side wall of the conductive member (120) and the inner peripheral wall of the installation groove (1102) is 0.1 mm-0.2 mm.

3. The boat support block according to claim 1, characterized in that: One end of the conductive member (120) facing the installation groove (1102) is also provided with a guide surface (1202) along the circumferential direction.

4. The boat support block according to claim 1, characterized in that: The conductive part (120) is a magnetic part, and the block body (110) is a non-magnetic part.

5. A carrier, characterized in that: The invention comprises a boat support block as claimed in any one of claims 1 to 4.

6. A replacement tool for a boat support block, used for replacing the conductive member (120) of the boat support block according to any one of claims 1 to 4, characterized in that: The replacement tool for the boat support block comprises an operating handle (1) and a fixing part (2); The fixing portion (2) is arranged at the front end of the operating handle (1), and the fixing portion (2) is used to fix or detach from the conductive member (120) of the boat support block.

7. The replacement tool for the boat support block according to claim 6, characterized in that: The fixing portion (2) comprises a fixing seat (21) and an actuating member (22); the operating handle (1) is provided with a slideway (11); the actuating member (22) can act on the fixing seat (21) to make the fixing seat (21) slide along the slideway (11) so as to move closer to or away from the boat support block; The operating handle (1) is further provided with a limiting structure (12); when the conductive member (120) is in contact with the limiting structure (12), the actuating member (22) can act on the fixing seat (21) to move along the slideway (11) to a side away from the boat support block until it is separated from the conductive member (120).

8. The replacement tool for the boat support block according to claim 7, characterized in that: The operating handle (1) is provided with a guide hole, the guide hole forms the slideway (11), and the end surface of the operating handle (1) located at one side end of the guide hole facing the boat support block forms the limiting structure (12).

9. The replacement tool for the boat support block according to claim 7, characterized in that: One of the operating handle (1) and the fixing seat (21) is provided with a guide shaft (3), and the other is provided with an axial hole (4); the guide shaft (3) is parallel to the slideway (11), and the guide shaft (3) passes through the axial hole (4) and can move axially relative to the axial hole (4).

10. The replacement tool for the boat support block according to any one of claims 7 to 9, characterized in that: The actuating member (22) is a pull rope, one end of which is connected to the fixing seat (21). The operating handle (1) is also provided with a threading hole (15) along the axial direction. The side wall of the operating handle (1) is also provided with a wire entry hole (17) connected to the threading hole (15). The pull rope passes through the wire entry hole (17) and the threading hole (15), and the rear end of the pull rope extends out of the threading hole (15).

11. The replacement tool for the boat support block according to claim 10, characterized in that: A first bracket (5) is also provided on the top of the fixing seat (21), and the first bracket (5) is also provided with a first through-hole (51), and the pull rope passes through the first through-hole (51).

12. The replacement tool for the boat support block according to claim 10, characterized in that: The operating handle (1) is further fixedly provided with a second bracket (6), the second bracket (6) being provided with a second through-hole (61), and the pull rope passes through the second through-hole (61); The second bracket (6) is located between the first bracket (5) and the wire entry hole.

13. The replacement tool for the boat support block according to any one of claims 6 to 9, characterized in that: The fixing portion (2) and the block body (110) are also respectively provided with mutually matching positioning structures, and when the fixing portion (2) and the block body (110) are in a positioning matching state through the positioning structures, the conductive member (120) fixed to the fixing portion (2) is located in the installation groove (1102).

14. The replacement tool for the boat support block according to any one of claims 6 to 9, characterized in that: The operating handle (1) comprises an operating portion (13) and an extension portion (14), wherein the operating portion (13) is detachably connected to a front end of the extension portion (14).

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