Rule configuration method and device for statistical process control system and electronic equipment

Abstract

The invention provides a rule configuration method and device for a statistical process control system and electronic device.The method comprises the steps that a rule configuration instruction sent for a target PM rule on a rule configuration interface is responded, and a sub-configuration interface corresponding to the target PM rule is displayed, the sub-configuration interface at least comprises a name edit box and a first early warning range edit box of the target PM rule; responding to an editing operation for the first early warning range edit box, obtaining a percentage value indicated by the editing operation, and displaying the percentage value in the first early warning range edit box; and based on the percentage value and the basic early warning range, updating an improved early warning range of the target PM rule so as to monitor operation data generated by the semiconductor production equipment based on the improved early warning range. On the premise that production is not affected, a user can set stricter control conditions so as to improve production quality.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a rule configuration method, device and electronic equipment for a statistical process control system. Background Art

[0002] In the prior art, during the semiconductor production process, SPC (Statistical Process Control) monitors various indicators in real time during operation and determines whether these indicators exceed the preset control limits. Once an indicator is detected to be beyond the control limit, it is considered that a violation of the rules has occurred, and corresponding measures are taken, such as alarming, recording logs, or suspending production.

[0003] However, customers usually want to be able to perform inspections under stricter control limits to further improve product quality and the stability of the production process without changing the original control limit settings. This means that customers want to introduce new inspection rules without affecting the original system settings, so that inspections can be performed within stricter control limits. Summary of the invention

[0004] The purpose of the embodiments of the present application is to provide a rule configuration method, device and electronic device for a statistical process control system, so as to allow users to set stricter control conditions without affecting production to improve production quality.

[0005] In a first aspect, the present invention provides a rule configuration method for a statistical process control system, the method comprising responding to a rule configuration instruction issued for a target PM rule on a rule configuration interface, displaying a sub-configuration interface corresponding to the target PM rule, the sub-configuration interface comprising at least a name edit box and a first warning range edit box for the target PM rule; responding to an edit operation on the first warning range edit box, obtaining a percentage value indicated by the edit operation, and displaying it in the first warning range edit box; updating an improved warning range of the target PM rule based on the percentage value and the basic warning range, so as to monitor the operating data generated by the semiconductor production equipment based on the improved warning range.

[0006] In an optional implementation, the warning range includes at least an upper control limit value and a lower control limit value. Based on the percentage value and the basic warning range, the step of updating the improved warning range of the target PM rule specifically includes calculating the upper control limit value of the improved warning range based on the upper control limit value and the percentage value of the basic warning range; and calculating the lower control limit value of the improved warning range based on the lower control limit value and the percentage value of the basic warning range.

[0007] In an optional embodiment, the control upper limit value of the improved warning range is calculated in the following manner: calculating the first difference between the original control upper limit value and the median value; calculating the first product between the first difference and the percentage value; calculating the first sum between the first product and the median value as the control upper limit value of the improved warning range.

[0008] In an optional embodiment, the control lower limit value of the improved warning range is calculated in the following manner: calculating the second difference between the median and the original control lower limit value; calculating the second product between the second difference and the percentage value; calculating the third difference between the median and the second product as the control lower limit value of the improved warning range.

[0009] In an optional embodiment, the step of monitoring the operating data generated by the semiconductor production equipment based on the improved warning range specifically includes acquiring the operating data generated by the semiconductor production equipment in real time; determining whether the operating data is within the basic warning range, and if not, executing the warning action; determining whether the operating data is within the improved warning range, and if not, recording the operating data to generate an abnormal data report.

[0010] In an optional embodiment, the sub-configuration interface also includes a second warning range edit box and a third warning range edit box, and the method also includes responding to a first input operation to the second warning range edit box, obtaining the numerical value indicated by the first input operation as the upper control limit value of the basic warning range; and responding to a second input operation to the third warning range edit box, obtaining the numerical value indicated by the second input operation as the lower control limit value of the basic warning range.

[0011] In an optional embodiment, the abnormal data report includes at least abnormal operating data that is not within the improved warning range and the abnormal data ratio value, and the method also includes determining whether the abnormal data ratio value is less than a preset ratio value; if so, displaying a reminder interface, the reminder interface includes at least a warning range update control; and in response to a click operation on the warning range update control, using the improved warning range as the basic warning range.

[0012] In a second aspect, the present invention provides a rule configuration device for a statistical process control system, the device comprising:

[0013] A first response module, used to respond to the rule configuration instruction issued for the target PM rule on the rule configuration interface, and display a sub-configuration interface corresponding to the target PM rule, wherein the sub-configuration interface includes at least a name edit box and a first warning range edit box of the target PM rule;

[0014] A second response module is used to respond to the editing operation on the first warning range edit box, obtain the percentage value indicated by the editing operation, and display it in the first warning range edit box;

[0015] The monitoring module is used to update the improved warning range of the target PM rule based on the percentage value and the basic warning range, so as to monitor the operation data generated by the semiconductor production equipment based on the improved warning range.

[0016] In a third aspect, the present invention provides an electronic device comprising: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate via the bus, and the processor executes the machine-readable instructions to perform the steps of the rule configuration method of a statistical process control system as described in any of the aforementioned implementations.

[0017] In a fourth aspect, the present invention provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the steps of configuring a rule of a statistical process control system as described in any of the aforementioned embodiments are executed.

[0018] The present application provides a rule configuration method for a statistical process control system, the method comprising responding to a rule configuration instruction issued for a target PM rule on a rule configuration interface, displaying a sub-configuration interface corresponding to the target PM rule, the sub-configuration interface at least including a name edit box and a first warning range edit box for the target PM rule; responding to an edit operation for the first warning range edit box, obtaining a percentage value indicated by the edit operation, and displaying it in the first warning range edit box; based on the percentage value and the basic warning range, updating an improved warning range of the target PM rule, so as to monitor the operating data generated by semiconductor production equipment based on the improved warning range. Users can set stricter control conditions without affecting production to improve production quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 A flowchart of a rule configuration method for a statistical process control system provided in an embodiment of the present application;

[0021] Figure 2 A schematic diagram of a sub-configuration interface provided in an embodiment of the present application;

[0022] Figure 3 A schematic diagram of the structure of a rule configuration device for a statistical process control system provided in an embodiment of the present application;

[0023] Figure 4 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0024] First, the application scenario of the present application is described. The technical solution of the present application is applicable to the PM Rule configuration in the SPC system in semiconductor production.

[0025] In order to help manufacturers achieve accurate monitoring and optimization of the production process, a PMRule configuration interface is usually set in the SPC system. This interface is mainly used to create and manage PM (Process Monitoring) rules. These rules define how to monitor specific parameters or variables in the semiconductor production process to ensure that they are within the specified range. In this interface, users can set parameters such as thresholds, sampling frequencies, and data collection points. However, in existing SPC systems, a PM rule is only associated with a set of control limits and acts on monitoring. Customers usually want to be able to perform inspections under stricter control limits to further improve product quality and the stability of the production process without changing the original control limit settings. This means that customers want to introduce new inspection rules without affecting the original system settings, so that inspections can be performed within stricter control limits.

[0026] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application.

[0027] Embodiment 1

[0028] Figure 1 A flowchart of a rule configuration method for a statistical process control system provided in an embodiment of the present application. Figure 1 As shown, the present application provides a rule configuration method for a statistical process control system, which specifically includes:

[0029] S1. In response to a rule configuration instruction issued for a target PM rule on a rule configuration interface, a sub-configuration interface corresponding to the target PM rule is displayed, wherein the sub-configuration interface includes at least a name edit box and a first warning range edit box of the target PM rule.

[0030] The rule configuration interface here is the PM Rule configuration interface, and the PM Rule configuration interface can display multiple PM rule entries that the user has created. The user can issue a rule configuration instruction for the PM rule entry corresponding to the target PM rule, so that the system displays a sub-configuration interface.

[0031] Here, users can issue rule configuration instructions by double-clicking the PM rule entry corresponding to the target PM rule.

[0032] like Figure 2 As shown, there is a one-to-one correspondence between the sub-configuration interface and the PM rule entry. The sub-configuration interface includes at least a name edit box for the target PM rule and a first warning range edit box. The user can enter the name of the target PM rule in the name edit box. Usually different types of names can be represented by different identifiers. For example, "XWE-1", "XWE-2", "XBARWE-1", "XWE-1", and so on.

[0033] The first warning range edit box here is used to obtain the percentage that the user wants to limit the warning range of the target PM rule.

[0034] The sub-configuration interface also includes a second warning range edit box and a third warning range edit box. The second warning range edit box and the third warning range edit box are used to obtain the user's set value for the warning range of the target PM rule. The warning range may include an upper control limit and / or a lower control limit.

[0035] Specifically, the system can respond to the first input operation on the second warning range edit box, obtain the value indicated by the first input operation, and use it as the upper control limit of the basic warning range. And respond to the second input operation on the third warning range edit box, obtain the value indicated by the second input operation, and use it as the lower control limit of the basic warning range.

[0036] The sub-configuration interface may also include a chart type configuration area (Chart Type), which includes multiple different types of chart type names and corresponding check boxes. The charts here are used to collect the operating data generated by semiconductor production equipment during the monitoring process, and statistically form charts to display to users. Chart types may include RAW, SIGMA, RANGE, X, MA, MR, MS, XBAR, etc.

[0037] The sub-configuration interface can also include a rule configuration area for adding the object to which the target PM rule is to be applied (a certain production equipment in a certain assembly line in the factory). The object information can be displayed in a list format, which can specifically include factory name, rule number, rule name, rule description, production equipment number, production equipment type, etc.

[0038] S2. In response to an edit operation on the first warning range edit box, obtain the percentage value indicated by the edit operation and display it in the first warning range edit box.

[0039] The user can determine the percentage by which the warning range of the target PM rule is to be narrowed according to actual needs. Furthermore, the user can also save the current editing content to make the input percentage value effective.

[0040] S3. Based on the percentage value and the basic warning range, update the improved warning range of the target PM rule to monitor the operation data generated by the semiconductor production equipment based on the improved warning range.

[0041] In step S2, when the percentage value takes effect, the target PM rule corresponds to a primary warning range (basic warning range) and one or more secondary warning ranges (improved warning ranges). The improved warning range here is obtained by calculating the basic warning range and the percentage value.

[0042] Specifically, the steps of monitoring the operation data generated by the semiconductor production equipment based on the improved warning range include:

[0043] Real-time acquisition of operating data generated by semiconductor production equipment. The operating data here can be the temperature value of the wafer processing room, the pressure value of the gas transmission pipeline, the relative humidity value in the clean room, the accumulated operating time of the equipment, the thickness value of the wafer, the granularity of the wafer surface, etc.

[0044] Determine whether the operating data is within the basic warning range. If not, execute the warning action. For the basic warning range under the currently effective PM rules, the system strictly monitors according to the basic warning range. When there is operating data that is not within the basic warning range, it will generate an alarm message in time to notify maintenance personnel or even automatically stop the corresponding equipment or devices.

[0045] For example, for the temperature value of the wafer processing chamber, the upper control limit can be 300°C and the lower control limit can be 290°C. When the collected pressure value exceeds the upper control limit or falls below the lower control limit for three consecutive times, an alarm message is sent to the maintenance personnel, and the production line is automatically stopped for inspection and adjustment.

[0046] Determine whether the operating data is within the improved warning range. If not, record the operating data to generate an abnormal data report. For the improved warning range under the currently effective PM rules, the system still needs to monitor the data according to the improved warning range. The difference is that the operating data that is not within the basic warning range is only recorded, and the alarm measures are not executed. In this way, users can regularly determine the control effect corresponding to each percentage value through the abnormal data report, and then modify the basic warning range, so as to make semiconductor production more stable and accurate. At the same time, it will not affect the actual operating status of the production line, avoiding the impact on production efficiency.

[0047] Furthermore, the abnormal data report includes at least normal operation data, abnormal operation data between the improved warning range and the basic warning range, and the abnormal data ratio value exceeding the basic warning range, etc. The abnormal data ratio value here is the ratio between the number of abnormal operation data and the total operation data within a preset time.

[0048] The SPC system can determine whether the abnormal data ratio value is less than the preset ratio value. If so, a reminder interface is displayed, and the reminder interface includes at least an early warning range update control. Exemplarily, when the operating data of semiconductor production equipment is stable between the improved early warning range for a period of time, it is possible to consider modifying the basic early warning range to improve production quality. The reminder interface here can display statistical data related to the abnormal data ratio value, as well as the early warning range update control. After the user confirms, he can click the early warning range update control to narrow the early warning range more accurately. The SPC system responds to the click operation on the early warning range update control and uses the improved early warning range as the basic early warning range.

[0049] In one embodiment of the present application, the warning range is preset by the user, but can be a unilateral upper limit, a unilateral lower limit, a bilateral limit, etc. Taking the bilateral limit as an example, after the user enters a percentage value in the first warning range edit box, the steps of updating the improved warning range of the target PM rule based on the percentage value and the basic warning range specifically include:

[0050] Based on the control upper limit value and percentage value of the basic warning range, the control upper limit value of the improved warning range is calculated. Specifically, the control upper limit value of the improved warning range is calculated in the following way:

[0051] (UCL-CL)*P+CL;

[0052] Among them, UCL is the original control upper limit, CL is the median, and P is the percentage value.

[0053] Calculate the first difference between the original upper control limit and the median. Calculate the first product between the first difference and the percentage value. Calculate the first sum between the first product and the median as the upper control limit of the improved warning range.

[0054] And, based on the lower control limit value and percentage value of the basic warning range, the lower control limit value of the improved warning range is calculated. Specifically, the lower control limit value of the improved warning range is calculated in the following way:

[0055] CL-(CL-LCL)*P;

[0056] Among them, CL is the median value and LCL is the original lower control limit.

[0057] Calculate the second difference between the median and the original lower control limit. Calculate the second product between the second difference and the percentage value. Calculate the third difference between the median and the second product as the lower control limit value for the improved warning range.

[0058] Figure 3 This is a schematic diagram of the structure of a rule configuration device for a statistical process control system provided in an embodiment of the present application. Figure 3 As shown, based on the same inventive concept, an embodiment of the present application further provides a rule configuration device 30 for a statistical process control system, the device comprising:

[0059] The first response module 310 is used to respond to the rule configuration instruction issued for the target PM rule on the rule configuration interface, and display the sub-configuration interface corresponding to the target PM rule, wherein the sub-configuration interface at least includes a name edit box and a first warning range edit box of the target PM rule;

[0060] The second response module 320 is used to respond to the editing operation on the first warning range edit box, obtain the percentage value indicated by the editing operation, and display it in the first warning range edit box;

[0061] The monitoring module 330 is used to update the improved warning range of the target PM rule based on the percentage value and the basic warning range, so as to monitor the operation data generated by the semiconductor production equipment based on the improved warning range.

[0062] In a preferred embodiment, the warning range includes at least an upper control limit value and a lower control limit value. The monitoring module 330 updates the improved warning range of the target PM rule based on the percentage value and the basic warning range, specifically including calculating the upper control limit value of the improved warning range based on the upper control limit value and the percentage value of the basic warning range; calculating the lower control limit value of the improved warning range based on the lower control limit value and the percentage value of the basic warning range.

[0063] In a preferred embodiment, the monitoring module 330 calculates the control upper limit value of the improved warning range in the following manner: calculating the first difference between the original control upper limit value and the median value; calculating the first product between the first difference value and the percentage value; calculating the first sum between the first product and the median value as the control upper limit value of the improved warning range.

[0064] In a preferred embodiment, the monitoring module 330 calculates the control lower limit value of the improved warning range in the following manner: calculating the second difference between the median and the original control lower limit value; calculating the second product between the second difference and the percentage value; calculating the third difference between the median and the second product as the control lower limit value of the improved warning range.

[0065] In a preferred embodiment, the monitoring module 330 monitors the operating data generated by the semiconductor production equipment based on the improved warning range, specifically including real-time acquisition of the operating data generated by the semiconductor production equipment; determining whether the operating data is within the basic warning range, and if so, executing the warning action; determining whether the operating data is within the improved warning range, and if not, recording the operating data to generate an abnormal data report.

[0066] In a preferred embodiment, the sub-configuration interface also includes a second warning range edit box and a third warning range edit box, and also includes a third response module for responding to a first input operation on the second warning range edit box, obtaining the numerical value indicated by the first input operation as the upper control limit value of the basic warning range; and responding to a second input operation on the third warning range edit box, obtaining the numerical value indicated by the second input operation as the lower control limit value of the basic warning range.

[0067] In a preferred embodiment, the abnormal data report includes at least abnormal operating data that is not within the improved warning range and the abnormal data ratio value, and the monitoring module 330 is also used to determine whether the abnormal data ratio value is less than the preset ratio value; if so, a reminder interface is displayed, and the reminder interface includes at least a warning range update control; and in response to a click operation on the warning range update control, the improved warning range is used as the basic warning range.

[0068] See also Figure 4 , Figure 4 This is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application. Figure 4 As shown in , the electronic device 400 includes a processor 410 , a memory 420 and a bus 430 .

[0069] The memory 420 stores machine-readable instructions executable by the processor 410. When the electronic device 400 is running, the processor 410 communicates with the memory 420 via the bus 430. When the machine-readable instructions are executed by the processor 410, the above-mentioned Figure 1 The steps of a method for calculating the output torque of a vehicle in the method embodiment shown are specifically implemented in accordance with the method embodiment and will not be described in detail here.

[0070] The present application also provides a computer-readable storage medium on which a computer program is stored. When the computer program is executed by a processor, the computer program can execute the above-mentioned Figure 1 The steps of a method for calculating the output torque of a vehicle in the method embodiment shown are specifically implemented in accordance with the method embodiment and will not be described in detail here.

[0071] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0072] In the embodiments provided in the present application, it should be understood that the disclosed devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, and the indirect coupling or communication connection of the devices or units can be electrical, mechanical or other forms.

[0073] In addition, the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0074] Furthermore, the functional modules in the various embodiments of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.

[0075] It should be noted that if the function is implemented in the form of a software function module and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application can essentially be embodied in the form of a software product, or the part that contributes to the prior art or the part of the technical solution. The computer software product is stored in a storage medium, including a number of instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM) random access memory (RAM), disk or optical disk, and other media that can store program codes.

[0076] In this document, relational terms such as first and second, etc. are used merely to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0077] The above description is only an embodiment of the present application and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A rule configuration method for a statistical process control system, characterized in that: The method comprises: In response to a rule configuration instruction issued for a target PM rule on the rule configuration interface, a sub-configuration interface corresponding to the target PM rule is displayed, wherein the sub-configuration interface includes at least a name edit box and a first warning range edit box of the target PM rule; In response to an edit operation on the first warning range edit box, obtaining a percentage value indicated by the edit operation and displaying it in the first warning range edit box; Based on the percentage value and the basic warning range, the improved warning range of the target PM rule is updated to monitor the operation data generated by the semiconductor production equipment based on the improved warning range.

2. The method according to claim 1, characterized in that The warning range includes at least an upper control limit value and a lower control limit value. The step of updating the improved warning range of the target PM rule based on the percentage value and the basic warning range specifically includes: Calculating the upper control limit value of the improved warning range based on the upper control limit value of the basic warning range and the percentage value; The lower control limit value of the improved warning range is calculated based on the lower control limit value of the basic warning range and the percentage value.

3. The method according to claim 2, characterized in that The upper control limit of the improved warning range is calculated by: Calculate the first difference between the original upper control limit value and the median value; calculating a first product between the first difference value and the percentage value; A first sum between the first product and the median value is calculated as the upper control limit value of the improved early warning range.

4. The method according to claim 2, characterized in that: The lower control limit of the improved warning range is calculated by: Calculate the second difference between the median and the original lower control limit; calculating a second product between the second difference value and the percentage value; A third difference between the median value and the second product is calculated as a lower control limit value of the improved early warning range.

5. The method according to claim 1, characterized in that The step of monitoring the operation data generated by the semiconductor production equipment based on the improved warning range specifically includes: Real-time access to operational data generated by semiconductor production equipment; Determine whether the operating data is within the basic warning range, and if not, execute a warning action; Determine whether the operating data is within the improvement warning range, and if not, record the operating data to generate an abnormal data report.

6. The method according to claim 1, characterized in that The sub-configuration interface further includes a second warning range editing box and a third warning range editing box, and the method further includes: In response to a first input operation on the second warning range edit box, acquiring a numerical value indicated by the first input operation as a control upper limit value of the basic warning range; and In response to a second input operation on the third warning range edit box, a numerical value indicated by the second input operation is acquired as a control lower limit value of the basic warning range.

7. The method according to claim 5, characterized in that The abnormal data report includes at least abnormal operation data that is not within the improved warning range and the abnormal data ratio value, and the method further includes: Determine whether the abnormal data ratio value is less than a preset ratio value; If yes, displaying a reminder interface, the reminder interface at least including a warning range update control; and In response to a click operation on the warning range update control, the improved warning range is used as a basic warning range.

8. A rule configuration device for a statistical process control system, characterized in that: The device comprises: A first response module, used to respond to a rule configuration instruction issued for a target PM rule on a rule configuration interface, and display a sub-configuration interface corresponding to the target PM rule, wherein the sub-configuration interface includes at least a name edit box and a first warning range edit box of the target PM rule; A second response module is used to respond to an edit operation on the first warning range edit box, obtain a percentage value indicated by the edit operation, and display the percentage value in the first warning range edit box; The monitoring module is used to update the improved warning range of the target PM rule based on the percentage value and the basic warning range, so as to monitor the operation data generated by the semiconductor production equipment based on the improved warning range.

9. An electronic device, characterized in that: include: A processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor communicates with the memory via the bus, and the processor executes the machine-readable instructions to perform the steps of the rule configuration method for a statistical process control system as described in any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of configuring the rules of the statistical process control system according to any one of claims 1 to 7 are executed.

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