Automatic overturning type multi-surface cnc processing equipment for semiconductor equipment part processing

Abstract

The invention discloses automatic turnover type multi-surface cnc machining equipment for semiconductor equipment part machining, and belongs to the field of part machining. The automatic turnover type multi-surface cnc machining equipment comprises a machine tool, two sliding ways are formed in the upper surface of the machine tool in a penetrating mode, vertical frames are slidably connected to the interiors of the sliding ways, and a first motor is fixed to the upper surface of the interior of the machine tool; the turnover function is adopted, the second motor enables the clamping mechanism to drive a machined part to turn over through the transmission wheel, multi-face machining can be rapidly achieved in cooperation with machining equipment such as turning equipment above, multiple times of clamping and adjusting are not needed, the machining efficiency is improved, the machining cost is reduced, and the machining efficiency is improved. The processing efficiency is greatly improved; the eight clamping rods are used for clamping and fixing a machined part in an inside-outside fit mode, in the machining operation of cutting, drilling, milling and the like, even if machining equipment exerts pressure on the surface of the machined part, the machined part can be kept stable and prevented from sliding down and deviating, and therefore the machining accuracy is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of parts processing, and in particular to an automatic flip-over multi-surface CNC processing device for processing semiconductor equipment parts. Background Art

[0002] In the processing of semiconductor equipment parts, high precision, high efficiency and multi-faceted processing capabilities are key requirements. Traditional processing methods often have the following problems: Limited processing accuracy: For parts with complex shapes, such as square tube structures, traditional processing equipment is difficult to achieve accurate multi-faceted processing, which is prone to dimensional deviation and uneven surface quality. Especially in semiconductor equipment, the accuracy requirements of parts are extremely high, and a small error may affect the performance of the entire device.

[0003] Low processing efficiency: Traditional processing equipment usually requires multiple clamping and adjustments when performing multi-faceted processing, which not only wastes time, but also increases the complexity of manual operation and the possibility of errors. In addition, for workpieces of different shapes and sizes, the fixture needs to be frequently replaced, further reducing processing efficiency.

[0004] Lack of adaptability: With the continuous development of semiconductor technology, the shapes and specifications of parts are becoming more and more diversified. The fixtures of traditional processing equipment can often only adapt to workpieces of specific shapes. It is difficult to effectively clamp and process special structures such as square tube parts with hollow interiors and different wall thicknesses.

[0005] Therefore, there is a need for an automatic flip-type multi-faceted CNC processing equipment for processing semiconductor device parts to solve the above problems. Summary of the invention

[0006] In view of the shortcomings of the prior art, the present invention provides an automatic flip-type multi-surface CNC processing equipment for processing semiconductor equipment parts, which solves the problems raised in the above-mentioned background technology.

[0007] Technical solution: To solve the above technical problems, according to one aspect of the present invention, more specifically, an automatic flip-type multi-faceted CNC processing equipment for processing semiconductor equipment parts, including a machine tool, two slideways are penetrated on the upper surface of the machine tool, a vertical frame is slidably connected inside the slideway, a motor 1 is fixed on the upper surface of the inner part of the machine tool, screw rods are fixed on the left and right ends of the output shaft of the motor 1, the outer surface of the screw rod is threadedly connected to the bottom of the vertical frame, the tops of the two vertical frames are rotatably connected with clamping mechanisms, a workpiece is clamped and fixed between the two clamping mechanisms, two hydraulic rods are symmetrically fixed on the upper surface of the inner part of the machine tool, the tops of the two hydraulic rods both penetrate to the top of the machine tool, and a transmission mechanism is fixed to them, the transmission mechanism is located below the workpiece, motor 2 is fixed on the opposite sides of the two vertical frames, the output shaft of the motor 2 penetrates to the other side of the vertical frame, and a transmission wheel is fixed.

[0008] The cam is provided with two cams, and the two cams are connected with each other with a spring, and the two cams have two limit switches, and the limit switches are connected with the two cams by the spring, and the two cams are connected with the springs by the spring. The gear is located inside the slide and is rotatably connected with the slide, the clamping rod is threadedly connected with a screw rod, and one end of the screw rod away from the clamping rod is rotatably connected with the slide, and a bevel gear 2 is fixed on the outer surface of the screw rod, and the bevel gear 2 is meshed with the adjacent bevel gear 1, and a limiting groove 2 is provided on the outer surface of the clamping rod, and a slide rail is slidably connected inside the limiting groove 2, and the slide rail is fixedly connected to the inner wall of the slide, and the opposite ends of the four shaft rods located on the inside all penetrate into the middle groove and are fixed with a bevel gear 4, and a rotating rod is rotatably connected inside the middle groove, and a bevel gear 3 is fixed on the outer surface of the rotating rod, and the bevel gear 3 is meshed with the four bevel gears 4, and an annular ring groove is provided on the outer surface of the wheel disk, and four rotating grooves are provided inside the ring groove, and a gear ring is rotatably connected inside the ring groove, and the opposite ends of the four shaft rods located on the outside respectively penetrate into the four rotating grooves and are fixed with spur gears, and the four spur gears are meshed with the gear ring.

[0009] Furthermore, the outer surface of the wheel disc is rotatably connected to the upper part of the vertical frame, and the outer surface of the transmission wheel is in contact with the outer surface of the wheel disc.

[0010] Furthermore, one end of the rotating rod away from the bevel gear three penetrates through the outer surface of the wheel disc and fixes the operating wheel.

[0011] Furthermore, the outer surfaces of the four clamping rods located on the outside are all in contact with the outer surface of the workpiece, and the four clamping rods located on the inside are all in contact with the inner surface of the workpiece.

[0012] Furthermore, the lower portion of the outer surface of the workpiece is in contact with the outer surface of the conveyor belt of the transmission mechanism.

[0013] Furthermore, the left and right sides of the workpiece are respectively fitted with the push frames on both sides.

[0014] The beneficial effects of the automatic flip-type multi-surface CNC processing equipment for processing semiconductor equipment parts of the present invention are: (1) The present invention uses eight clamping rods to clamp and fix the workpiece inside and outside. During cutting, drilling, milling and other processing operations, even if the processing equipment applies pressure to the surface of the workpiece, it can ensure its stability and avoid sliding and deviation, thereby ensuring the accuracy of the processing.

[0015] For tubular workpieces, whether they are hollow or solid inside, or have different wall thicknesses, precise clamping can be achieved by adjusting the position of the clamping rod, meeting the requirements of semiconductor equipment parts for high-precision processing; the rotation of the rotating rod can be easily controlled by the operating wheel, thereby adjusting the position of the inner clamping rod; rotating the gear ring can control the contraction of the outer clamping rod. The operation is simple and intuitive, without the need for complex tools and skills, reducing the difficulty of the operator's work.

[0016] (2) The present invention adopts an automatic flipping function. Motor 2 drives the clamping mechanism to flip the workpiece through the transmission wheel. In conjunction with the turning and other processing equipment above, multi-faceted processing can be quickly achieved without multiple clamping and adjustment, greatly improving the processing efficiency; The transmission mechanism can automatically remove the processed workpieces and transmit the workpieces to be processed to between the clamping mechanisms, thus realizing continuous processing and further improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0018] Figure 1 It is a structural schematic diagram of the present invention; Figure 2It is a structural schematic diagram of the machine tool and the clamping mechanism in the present invention; Figure 3 For the present invention Figure 2 Schematic diagram of the side section structure; Figure 4 It is a schematic diagram of the structure of the clamping mechanism and the workpiece in the present invention; Figure 5 It is a schematic cross-sectional structure diagram of the clamping mechanism and the workpiece in the present invention; Figure 6 It is a structural schematic diagram of the clamping mechanism in the present invention; Figure 7 It is a schematic diagram of the internal structure of the clamping mechanism in the present invention; Figure 8 It is a schematic cross-sectional structural diagram of the roulette wheel in the present invention; Fig. 9 It is a cross-sectional structural schematic diagram of the clamping mechanism in the present invention; Fig.10 For the present invention Fig. 9 Schematic diagram of the structure after enlargement at A in the middle.

[0019] In the figure: 1, machine tool; 2, slide; 3, vertical frame; 4, motor 1; 5, screw; 6, clamping mechanism; 7, workpiece; 8, transmission mechanism; 9, hydraulic rod; 10, motor 2; 11, transmission wheel; 12, wheel plate; 13, slide groove; 14, inner cavity; 15, middle groove; 16, slide; 17, push frame; 18, through groove; 19, fixed block; 20, spring; 21, connecting rod; 22, clamping rod; 23, shaft rod; 24, limit groove 1; 25, bevel gear 1; 26, bevel gear 2; 27, screw; 28, limit groove 2; 29, operating wheel; 30, ring groove; 31, slide rail; 32, rotating rod; 33, bevel gear 3; 34, bevel gear 4; 35, rotating groove; 36, gear ring; 37, spur gear. DETAILED DESCRIPTION

[0020] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments. It should be noted that the embodiments and features in the embodiments of the present application can be combined with each other without conflict.

[0021] In order to make the technical solution of the present invention clearer, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0022] Reference Figure 1-10An automatic flip multi-faceted CNC processing equipment for processing semiconductor equipment parts includes a machine tool 1. Two slideways 2 are provided on the upper surface of the machine tool 1. A vertical frame 3 is slidably connected inside the slideway 2. A motor 4 is fixed on the upper surface of the inner part of the machine tool 1. Screw rods 5 are fixed to the left and right ends of the output shaft of the motor 4. The outer surface of the screw rod 5 is threadedly connected to the bottom of the vertical frame 3. The tops of the two vertical frames 3 are rotatably connected to clamping mechanisms 6. A workpiece 7 is clamped and fixed between the two clamping mechanisms 6. Two hydraulic rods 9 are symmetrically fixed on the upper surface of the inner part of the machine tool 1. The tops of the two hydraulic rods 9 are both extended to the top of the machine tool 1 and are fixed with a transmission mechanism 8. The transmission mechanism 8 is located below the workpiece 7. Motor 2 10 is fixed on the opposite sides of each vertical frame 3. The output shaft of motor 2 10 passes through the other side of the vertical frame 3 and is fixed with a transmission wheel 11. The motor 1 4 drives the screw rods 5 on both sides to rotate, so that the two vertical frames 3 move opposite to each other or relatively inside the two slideways 2, so that the clamping mechanisms 6 on both sides can adjust the spacing and clamp the workpiece 7 transmitted by the transmission mechanism 8. After clamping, the hydraulic rod 9 contracts to make the transmission mechanism 8 drop away from the workpiece 7 to avoid affecting its subsequent flipping. The turning equipment and other equipment located above will process the upper surface of the workpiece 7. The operation of motor 2 10 through the transmission wheel 11 causes the clamping mechanism 6 to drive the workpiece 7 to flip, thereby performing multi-faceted processing.

[0023] Reference Figure 4-10The clamping mechanism 6 includes a wheel 12, and four slide grooves 13 are provided on one side of the wheel 12 close to the workpiece 7. An inner cavity 14 is provided inside the wheel 12, and the inner cavity 14 is connected to the four slide grooves 13. The inner surface of the inner cavity 14 is provided with a middle groove 15 between the four slide grooves 13. Two slides 16 are slidably connected inside the slide groove 13, and a push frame 17 is provided between the two slides 16. A through groove 18 is provided inside the push frame 17, and a fixed block 19 is slidably connected inside the through groove 18. Both ends of the fixed block 19 are fixedly connected to the inner surface of the slide groove 13, and a spring 20 is fixed between the fixed block 19 and the through groove 18. The push frame 17 is away from the workpiece. One end of the connecting rod 21 is rotatably connected to two connecting rods 21, and the end of the connecting rod 21 away from the push frame 17 is rotatably connected to the slide 16. The slide 16 is internally slidably connected with a clamping rod 22, and the slide groove 13 is internally rotatably connected with two shaft rods 23. The shaft rod 23 is movably connected to the inside of the slide 16. Two limiting grooves 24 are symmetrically provided on the outer surface of the shaft rod 23. The outer surface of the shaft rod 23 is slidably connected with a bevel gear 25 through the limiting groove 24. The bevel gear 25 is located inside the slide 16 and is rotatably connected to the slide 16. The clamping rod 22 is internally threadedly connected with a screw 27, and the end of the screw 27 away from the clamping rod 22 is rotatably connected to the inside of the slide 16. The screw A bevel gear 26 is fixed on the outer surface of the rod 27, and the bevel gear 26 is meshed with the adjacent bevel gear 1 25. A limit groove 28 is provided on the outer surface of the clamping rod 22, and a slide rail 31 is slidably connected inside the limit groove 28. The slide rail 31 is fixedly connected to the inner wall of the slide 16. The opposite ends of the four shaft rods 23 located on the inner side all penetrate into the middle groove 15 and are fixed with bevel gears 4 34. A rotating rod 32 is rotatably connected inside the middle groove 15, and a bevel gear 33 is fixed on the outer surface of the rotating rod 32. The bevel gear 33 is meshed with the four bevel gears 4 34. An annular ring groove 30 is provided on the outer surface of the wheel disc 12, and four rotating grooves are provided inside the ring groove 30. 35, a gear ring 36 is rotatably connected inside the annular groove 30, and the opposite ends of the four shaft rods 23 located on the outside respectively penetrate into the four rotating grooves 35, and are fixed with spur gears 37, and the four spur gears 37 are meshed and connected with the gear ring 36; when the clamping mechanisms 6 on both sides move relatively close to the workpiece 7, the two ends of the workpiece 7 first contact the outer ends of the push frame 17, and then the push frame 17 is retracted into the slide groove 13 when the clamping mechanism 6 continues to move. When the push frame 17 slides, the two slides 16 are pulled by the two connecting rods 21 to move relatively, so that the two clamping rods 22 are respectively attached to the inner and outer walls of the workpiece 7, so as to achieve left and right clamping and inside and outside clamping of the workpiece 7; The workpiece 7 in the figure is a square tube structure with a hollow interior. When the tubular solid workpiece 7 needs to be processed, the personnel only need to rotate the operating wheel 29 to rotate the rotating rod 32 and rotate the four shaft rods 23 located on the inside through the bevel gear three 33 and the four bevel gear four 34. The rotation of the shaft rod 23 drives the bevel gear one 25 connected to the outer surface for sliding to rotate, and then the screw rod 27 is rotated under the transmission of the bevel gear two 26, so that the four clamping rods 22 located on the inside are retracted to the inside of the slide 16, so that the four inner clamping rods 22 are no longer exposed. At this time, the solid workpiece 7 can be clamped and fixed by the left and right clamping and the external clamping; When it is necessary to process a workpiece 7 that is hollow inside but has a thick wall, it is only necessary to rotate the gear ring 36 to rotate the four spur gears 37 through meshing connection, and drive the four outer shaft rods 23 to rotate, so that the outer clamping rods 22 are contracted, and the workpiece 7 is only clamped and fixed by the wheel discs 12 on both sides and the four inner clamping rods 22.

[0024] Reference Figure 1-3 The outer surface of the wheel disc 12 is rotatably connected to the upper part of the vertical frame 3, and the outer surface of the transmission wheel 11 is in contact with the outer surface of the wheel disc 12, so that when the motor 10 drives the transmission wheel 11 to rotate, the clamping mechanism 6 will drive the clamped workpiece 7 to flip over, so as to cooperate with the upper cutting, drilling, milling and other processing equipment to achieve multi-faceted processing.

[0025] Reference Figure 9-10 One end of the rotating rod 32 away from the bevel gear 33 passes through the outer surface of the wheel disc 12 and fixes the operating wheel 29. The rotating rod 32 is rotated by operating the operating wheel 29, thereby controlling the four inner clamping rods 22 to retract or extend the four inner clamping rods 22.

[0026] Reference Figure 5 The outer surfaces of the four clamping rods 22 located on the outside are all in contact with the outer surface of the workpiece 7, and the four clamping rods 22 located on the inside are all in contact with the inner surface of the workpiece 7. Eight clamping rods 22 are provided in the same clamping mechanism 6. As shown in the figure, the four outer clamping rods 22 of the eight clamping rods 22 are located outside the tubular workpiece 7, and the other four are located inside the workpiece 7. They are clamped and fixed by the inside-outside clamping, so that during the subsequent rotation, turning, cutting, drilling, milling and other processing operations, when the cutting, drilling, milling and other equipment apply pressure to the surface of the workpiece 7, it can also stabilize it to prevent it from sliding down and causing it to deviate and affect the processing accuracy.

[0027] Reference Figure 1 The lower part of the outer surface of the workpiece 7 is in contact with the outer surface of the conveyor belt of the transmission mechanism 8. The transmission mechanism 8 transmits the workpiece 7 through the internal conveyor belt, moves the processed workpiece 7, and moves the workpiece 7 to be processed between the two clamping mechanisms 6, waiting for clamping and positioning to be flipped for multi-faceted processing.

[0028] Reference Figure 4-6 The left and right sides of the workpiece 7 are respectively fitted with the push racks 17 on both sides. As shown in the figure, the push racks 17 on both sides are relatively moved by the two clamping mechanisms 6 to squeeze the two sides of the workpiece 7, so that it is completely received in the slide groove 13, so that the two ends of the workpiece 7 are in contact with the opposite sides of the two wheel discs 12.

[0029] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. An automatic flip-type multi-surface CNC processing device for processing semiconductor device parts, comprising a machine tool (1), characterized in that: Two slideways (2) are provided through the upper surface of the machine tool (1), and a vertical frame (3) is slidably connected inside the slideway (2). A motor 1 (4) is fixed on the upper surface of the machine tool (1). Screw rods (5) are fixed to the left and right ends of the output shaft of the motor 1 (4), and the outer surface of the screw rod (5) is threadedly connected to the bottom of the vertical frame (3). The tops of the two vertical frames (3) are rotatably connected to clamping mechanisms (6), and a workpiece (7) is clamped and fixed between the two clamping mechanisms (6). Two hydraulic rods (9) are symmetrically fixed on the upper surface of the machine tool (1), and the tops of the two hydraulic rods (9) penetrate the top of the machine tool (1) and are jointly fixed with a transmission mechanism (8), and the transmission mechanism (8) is located below the workpiece (7). Motor 2 (10) is fixed on the opposite sides of the two vertical frames (3), and the output shaft of the motor 2 (10) penetrates the other side of the vertical frame (3) and is fixed with a transmission wheel (11).

2. The automatic flip multi-surface CNC processing equipment for semiconductor equipment parts processing according to claim 1, characterized in that: The clamping mechanism (6) comprises a wheel disc (12), four slide grooves (13) are provided on a side of the wheel disc (12) close to the workpiece (7), an inner cavity (14) is provided inside the wheel disc (12), the inner cavity (14) is connected to the four slide grooves (13), a middle groove (15) is provided on the inner surface of the inner cavity (14) between the four slide grooves (13), two slide racks (16) are slidably connected inside the slide groove (13), a push rack (17) is provided between the two slide racks (16), a through groove (18) is provided inside the push rack (17), a fixed block (19) is slidably connected inside the through groove (18), both ends of the fixed block (19) are connected to the inner surface of the slide groove (13), and the inner surface of the slide groove (13) is connected to the inner surface of the slide groove (13). The push frame (17) is fixedly connected to the workpiece (7), a spring (20) is fixed between the fixed block (19) and the through groove (18), one end of the push frame (17) away from the workpiece (7) is rotatably connected to two connecting rods (21), one end of the connecting rod (21) away from the push frame (17) is rotatably connected to the slide frame (16), a clamping rod (22) is slidably connected inside the slide frame (16), two shaft rods (23) are rotatably connected inside the slide groove (13), the shaft rod (23) is movably connected to the inside of the slide frame (16), two limit grooves (24) are symmetrically provided on the outer surface of the shaft rod (23), and a bevel gear (25) is slidably connected to the outer surface of the shaft rod (23) through the limit groove (24). The bevel gear 1 (25) is located inside the slide (16) and is rotatably connected to the slide (16). The clamping rod (22) is internally threadedly connected with a screw rod (27). One end of the screw rod (27) away from the clamping rod (22) is rotatably connected to the inside of the slide (16). The outer surface of the screw rod (27) is fixed with a bevel gear 2 (26). The bevel gear 2 (26) is meshingly connected with the adjacent bevel gear 1 (25). The outer surface of the clamping rod (22) is provided with a limiting groove 2 (28). The limiting groove 2 (28) is slidably connected with a slide rail (31). The slide rail (31) is fixedly connected to the inner wall of the slide (16). The opposite ends of the four shaft rods (23) located on the inner side are all penetrated. The middle groove (15) is penetrated into the inside of the middle groove (15) and is fixed with a bevel gear four (34). The middle groove (15) is rotatably connected with a rotating rod (32). The outer surface of the rotating rod (32) is fixed with a bevel gear three (33). The bevel gear three (33) is meshingly connected with the four bevel gear fours (34). The outer surface of the wheel disc (12) is provided with an annular ring groove (30). Four rotating grooves (35) are provided inside the ring groove (30). A gear ring (36) is rotatably connected inside the ring groove (30). The opposite ends of the four shaft rods (23) located on the outside respectively penetrate into the inside of the four rotating grooves (35) and are fixed with spur gears (37). The four spur gears (37) are meshingly connected with the gear ring (36).

3. The automatic flip multi-surface CNC processing equipment for semiconductor equipment parts processing according to claim 2, characterized in that: The outer surface of the wheel disc (12) is rotatably connected to the upper part of the vertical frame (3), and the outer surface of the transmission wheel (11) is in contact with the outer surface of the wheel disc (12).

4. The automatic flip-type multi-surface CNC processing equipment for semiconductor equipment parts processing according to claim 2, characterized in that: One end of the rotating rod (32) away from the bevel gear three (33) penetrates through the outer surface of the wheel disc (12) and fixes the operating wheel (29).

5. The automatic flip-type multi-surface CNC processing equipment for semiconductor equipment parts processing according to claim 2, characterized in that: The outer surfaces of the four clamping rods (22) located on the outside are all in contact with the outer surface of the processed part (7), and the four clamping rods (22) located on the inside are all in contact with the inner surface of the processed part (7).

6. The automatic flip-type multi-surface CNC processing equipment for semiconductor equipment parts processing according to claim 1, characterized in that: The lower portion of the outer surface of the workpiece (7) is in contact with the outer surface of the conveyor belt of the transmission mechanism (8).

7. The automatic flip-over multi-surface CNC processing equipment for semiconductor equipment parts processing according to claim 2, characterized in that: The left and right sides of the processed part (7) are respectively fitted with the push frames (17) on both sides.

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