Fiber-optic gyroscope chip, method and system integrated with temperature control

Abstract

The invention provides an integrated temperature control fiber-optic gyroscope chip, method and system. The fiber-optic gyroscope chip integrated with temperature control comprises a signal transceiving unit, a gyroscope modulation unit, an optical signal processing unit, an optical fiber coil interface unit and an on-chip temperature-sensitive micro-ring resonant cavity, and the signal transceiving unit is used for forming an optical signal according to a light source; the on-chip temperature-sensitive micro-ring resonant cavity is used for forming a first transmission spectrum according to the optical signal; the gyro modulation unit is used for generating a modulation electric field in response to the modulation driving signal so as to perform phase modulation on the optical signal; the optical signal processing unit is used for performing polarization and beam splitting on the modulated optical signal to form a first path of optical signal and a second path of optical signal; and the optical fiber coil interface unit is used for transmitting the first path of optical signal and the second path of optical signal to a polarization maintaining optical fiber coil to form a gyroscope interference optical signal and outputting the gyroscope interference optical signal, so that a gyroscope detector obtains a compensated gyroscope output result according to the gyroscope interference optical signal.

Description

Technical Field

[0001] This application relates to the field of integrated photonic chip technology, and in particular to a fiber optic gyroscope chip, method, and system with integrated temperature control. Background Technology

[0002] Fiber optic gyroscopes are angular velocity sensors based on the Sagnac effect, widely used in navigation and inertial measurement. Their core component, the integrated optical chip, typically uses lithium niobate to achieve key functions such as phase modulation. However, the zero-bias and scaling factor of fiber optic gyroscopes are susceptible to temperature-induced drift, affecting measurement accuracy.

[0003] In related technologies, temperature drift compensation can be achieved through methods such as: externally installing temperature sensors for measurement and compensation; implementing constant temperature control on the gyroscope; or establishing a temperature-error model through calibration for software correction. However, these methods all have shortcomings. For example, there is a difference and lag between the temperature measured by the external sensor and the actual internal temperature of the fiber optic gyroscope chip with integrated temperature control, which limits the compensation accuracy. Moreover, adding external sensors and temperature control devices increases the system size, power consumption, and complexity. In addition, lithium niobate chips do not have temperature sensing capabilities, and compensation relies on external calibration, resulting in insufficient long-term stability. Therefore, a new method is urgently needed to improve the above problems. Summary of the Invention

[0004] This disclosure provides an integrated temperature-controlled fiber optic gyroscope chip, method, and system.

[0005] In a first aspect, embodiments of this disclosure provide an integrated temperature-controlled fiber optic gyroscope chip. The chip includes a signal transceiver unit, a gyroscope modulation unit, an optical signal processing unit, an optical fiber coil interface unit, and an on-chip temperature-sensitive microring resonator. The signal transceiver unit is optically connected to both the optical signal processing unit and the on-chip temperature-sensitive microring resonator. The optical signal processing unit and the optical fiber coil interface unit are optically connected. The gyroscope modulation unit is disposed above the modulation section of the optical waveguide in the signal transceiver unit, and the distance between the on-chip temperature-sensitive microring resonator and the gyroscope modulation unit is less than or equal to a first threshold. The signal transceiver unit is used to receive light sources and generate optical signals based on the light sources. An on-chip temperature-sensitive microring resonant cavity is used to generate a first transmission spectrum based on an optical signal; the first transmission spectrum is used to determine the current temperature of the fiber optic gyroscope chip with integrated temperature control. The gyroscope modulation unit is used to generate a modulation electric field in response to the modulation drive signal. The modulation electric field is used to perform phase modulation on the optical signal. The modulation drive signal is generated after temperature drift compensation based on the current temperature. The optical signal processing unit is used to polarize and split the modulated optical signal to form a first optical signal and a second optical signal. The fiber optic coil interface unit is used to transmit the first optical signal and the second optical signal to the polarization-maintaining fiber optic coil, forming a gyroscope interference optical signal, which is then output through the optical signal processing unit and the signal transceiver unit, so that the gyroscope detector can obtain the compensated gyroscope output result based on the gyroscope interference optical signal.

[0006] In some embodiments, the signal transceiver unit includes a first optical waveguide coupled to an on-chip temperature-sensitive microring resonator; the first optical waveguide is used to transmit a first optical signal in the optical signal to the on-chip temperature-sensitive microring resonator.

[0007] In some embodiments, the fiber optic gyroscope chip with integrated temperature control further includes a first grating coupler, which is connected to the output of a first optical waveguide. A first grating coupler is used to couple the first transmission spectrum to form a temperature detection optical signal; the temperature detection optical signal is used to determine the current temperature.

[0008] In some embodiments, the signal transceiver unit further includes a second optical waveguide and a ring optical resonator, the ring optical resonator being laterally coupled to the first optical waveguide and the second optical waveguide respectively; the gyroscope modulation unit is disposed above the modulation section of the second optical waveguide; The second optical waveguide is used to transmit the optical signal through the gyroscope modulation unit, the optical signal processing unit and the optical fiber coil interface unit to the polarization-maintaining optical fiber coil to form a gyroscope interference optical signal. A ring optical resonator is used to couple a first optical signal transmitted in a second optical waveguide to a first optical waveguide. The first optical signal is a portion of the optical signal transmitted in the second optical waveguide.

[0009] In some embodiments, the gyroscope modulation unit includes a modulation segment first ground electrode, a modulation segment second ground electrode, and a modulation segment first signal electrode; the modulation segment first ground electrode, the modulation segment first signal electrode, and the modulation segment second ground electrode are arranged side by side along the propagation direction of the second optical waveguide, and the modulation segment first signal electrode is located between the modulation segment first ground electrode and the modulation segment second ground electrode. The first ground electrode, the second ground electrode, and the first signal electrode of the modulation section are used to generate a modulation electric field to phase modulate the optical signal propagating in the second optical waveguide.

[0010] In some embodiments, the first ground electrode and the second ground electrode of the modulation segment are both connected to the ground electrode; the first signal electrode of the modulation segment is connected to the signal electrode. The first ground electrode of the modulation section, the second ground electrode of the modulation section, and the first signal electrode of the modulation section are also used to generate a modulation electric field when a driving voltage is applied between the signal electrode and the ground electrode, so as to use the modulation electric field to perform phase modulation on the optical signal propagating in the second optical waveguide.

[0011] In some embodiments, the signal transceiver unit further includes a light source connection port, a gyroscope detector connection port, a first edge coupler, a second edge coupler, and a first beam combiner; the light source connection port is connected to the first edge coupler; the gyroscope detector connection port is connected to the second edge coupler; and the first beam combiner is connected to the first edge coupler and the second edge coupler respectively via a second optical waveguide. The light source connection port is used to receive the light source; The gyroscope detector connection port is used to output gyroscope interference light signals to the gyroscope detector; The first edge coupler is used to receive light from the light source connection port, form an optical signal, and couple the optical signal to the third optical waveguide; The second edge coupler is also used to receive the gyroscope interference optical signal transmitted by the fourth optical waveguide and transmit the gyroscope interference optical signal to the gyroscope detector connection port; The first beam combiner is used to combine the third and fourth optical waveguides into the second optical waveguide.

[0012] In some embodiments, the optical signal processing unit includes a first polarizer and a first beam splitter arranged sequentially along the propagation direction of the second optical waveguide; The first polarizer is used to polarize the optical signal transmitted in the second optical waveguide to obtain the polarized optical signal. The second beam splitter is used to split the polarized optical signal into a first optical signal and a second optical signal; the first optical signal is transmitted through the fifth optical waveguide, and the second optical signal is transmitted through the sixth optical waveguide.

[0013] In some embodiments, the fiber optic coil interface unit includes a third edge coupler and a fourth edge coupler; the input end of the third edge coupler is connected to a fifth optical waveguide; the input end of the fourth edge coupler is connected to a sixth optical waveguide; the output end of the third edge coupler is coupled to a polarization-maintaining fiber coil through a first polarization-maintaining fiber interface; and the output end of the fourth edge coupler is coupled to a polarization-maintaining fiber coil through a second polarization-maintaining fiber interface. The third and fourth edge couplers are used to transmit the first optical signal transmitted through the fifth optical waveguide and the second optical signal transmitted through the sixth optical waveguide to the polarization-maintaining fiber coil through the first and second polarization-maintaining fiber interfaces, respectively, to form a gyroscope interference optical signal.

[0014] In some embodiments, the first optical waveguide is laterally coupled to the ring optical resonator in the first coupling region and to the on-chip temperature-sensitive micro-ring resonator in the second coupling region, with the first coupling region and the second coupling region located at different positions.

[0015] Secondly, embodiments of this disclosure provide a temperature compensation method, the method comprising: The first optical signal passes through the on-chip temperature-sensitive micro-ring resonator in the integrated temperature-controlled fiber optic gyroscope chip to form the first transmission spectrum. Based on the first transmission spectrum, the temperature detection electrical signal is obtained; Based on the temperature detection electrical signal and the preset mapping relationship, the current temperature of the fiber optic gyroscope chip with integrated temperature control is determined. The preset mapping relationship is used to characterize the correspondence between temperature and temperature detection electrical signal. Temperature drift compensation is performed based on the current temperature to obtain the compensated gyroscope output.

[0016] In some embodiments, the method further includes: The light source generates a first optical signal and a second optical signal through an integrated temperature-controlled fiber optic gyroscope chip; The first and second optical signals pass through a polarization-maintaining fiber coil to form a gyroscope interference optical signal; The optical signal of the gyroscope interference is converted to obtain the electrical signal of the gyroscope interference; The gyroscope interference signal is demodulated and processed to obtain the first gyroscope data; the first gyroscope data includes angular velocity or angular increment.

[0017] In some embodiments, temperature drift compensation is performed based on the current temperature to obtain the compensated gyroscope output, including: Based on the preset temperature compensation model, determine the temperature drift compensation parameters corresponding to the current temperature; the temperature drift compensation parameters include zero bias correction and / or scale factor correction. The first gyroscope data is corrected based on the temperature drift compensation parameters to obtain the compensated gyroscope output.

[0018] In some embodiments, after determining the temperature drift compensation parameter corresponding to the current temperature, the method further includes: Based on the temperature drift compensation parameters, a modulation drive signal is generated; the parameters in the modulation drive signal include at least one of the drive voltage amplitude, bias voltage, and modulation waveform.

[0019] A modulation drive signal is applied to the gyroscope modulation unit in the fiber optic gyroscope chip with integrated temperature control to generate a modulation electric field; The phase of the optical signal is modulated by a modulation electric field so that the phase modulation operating point of the optical signal fluctuates within a preset range.

[0020] In some embodiments, the temperature detection electrical signal is obtained based on the first transmission spectrum, including: The first transmission spectrum is coupled out via the first grating coupler in the integrated temperature-controlled fiber optic gyroscope chip to form a temperature detection optical signal; The temperature detection optical signal is converted into a temperature detection electrical signal.

[0021] Thirdly, embodiments of this disclosure provide a fiber optic gyroscope system, including a fiber optic gyroscope chip with integrated temperature control as described in any of the first aspects, a temperature detector, and an electronic signal processing unit; the fiber optic gyroscope chip with integrated temperature control is electrically connected to the temperature detector and the electronic signal processing unit, respectively. An integrated temperature-controlled fiber optic gyroscope chip is used to generate temperature detection optical signals; A temperature detector is used to acquire temperature detection optical signals and generate temperature detection electrical signals based on the temperature detection optical signals; The electronic signal processing unit is used to determine the current temperature of the fiber optic gyroscope chip with integrated temperature control based on the temperature detection electrical signal and a preset mapping relationship. The preset mapping relationship is used to characterize the correspondence between the temperature and the temperature detection electrical signal. The unit also performs temperature drift compensation based on the current temperature to obtain the compensated gyroscope output result.

[0022] In some embodiments, the system further includes a polarization-maintaining fiber coil and a gyroscope detector; the first end and the second end of the polarization-maintaining fiber coil are respectively connected to an integrated temperature-controlled fiber optic gyroscope chip, and the gyroscope detector is respectively connected to the integrated temperature-controlled fiber optic gyroscope chip and an electronic signal processing unit. The fiber optic gyroscope chip with integrated temperature control is also used to generate the first optical signal and the second optical signal; The polarization-maintaining fiber coil is used to receive the first optical signal and the second optical signal, and to form a gyroscope interference optical signal based on the first optical signal and the second optical signal. A gyroscope detector is used to detect gyroscope interference optical signals and convert them into gyroscope interference electrical signals. The electronic signal processing unit is used to demodulate and process the gyroscope interference electrical signal to obtain the first gyroscope data; determine the temperature drift compensation parameter corresponding to the current temperature according to the preset temperature compensation model; and perform correction processing on the first gyroscope data according to the temperature drift compensation parameter to obtain the compensated gyroscope output result; wherein, the first gyroscope data includes angular velocity or angular increment; the temperature drift compensation parameter includes zero bias correction amount and / or scaling factor correction amount.

[0023] The embodiments of this application have the following beneficial effects: First, the signal transceiver unit in the fiber optic gyroscope chip with integrated temperature control receives the light source and forms an optical signal. Then, the on-chip temperature-sensitive micro-ring resonator is used to obtain the current temperature information of the chip. Based on this temperature information, a modulation drive signal is generated to perform phase modulation on the optical signal, thereby achieving temperature drift compensation. Simultaneously, the optical signal enters the polarization-maintaining fiber coil after polarization and beam splitting to form a gyroscope interference signal. Finally, the compensated gyroscope output result is obtained through the gyroscope detector. In this way, on the one hand, by integrating the temperature-sensitive micro-ring resonator inside the chip, the actual temperature of the core area of ​​the chip can be directly measured, avoiding the temperature measurement error caused by the spatial position difference and thermal conduction hysteresis of the external temperature sensor, thus improving the temperature measurement accuracy. On the other hand, based on the real-time measured temperature information, closed-loop compensation is performed on the gyroscope modulation unit, effectively reducing the impact of ambient temperature changes on the gyroscope's zero bias and scaling factor, and improving the long-term stability and environmental adaptability of the gyroscope. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of a fiber optic gyroscope chip with integrated temperature control provided in an embodiment of this application. Figure 1 ; Figure 2 This is a schematic diagram of the structure of an on-chip optical temperature sensing unit provided in an embodiment of this application; Figure 3 This is a schematic diagram of the structure of a fiber optic gyroscope chip with integrated temperature control provided in an embodiment of this application. Figure 2 ; Figure 4 This is a schematic diagram of the structure of a fiber optic gyroscope system provided in an embodiment of this application; Figure 5 This is a flowchart illustrating a temperature compensation method provided in an embodiment of this application. Figure 1 ; Figure 6 This is a flowchart illustrating a temperature compensation method provided in an embodiment of this application. Figure 2 .

[0025] In the diagram: 1. Light source connection port; 2. Gyroscope detector connection port; 3. First polarization-maintaining fiber interface; 4. Second polarization-maintaining fiber interface; 5. Ground electrode; 6. Signal electrode; 10. Signal transceiver unit; 20. Optical signal processing unit; 30. Gyroscope modulation unit; 40. Fiber optic coil interface unit; 50. On-chip optical temperature sensing unit; 101. First edge coupler; 102. Second edge coupler; 103. First beam combiner; 104. First optical waveguide; 105. Ring light 106. Second optical waveguide; 107. Third optical waveguide; 108. Fourth optical waveguide; 109. Fifth optical waveguide; 110. Sixth optical waveguide; 201. First polarizer; 202. First beam splitter; 301. First ground electrode of modulation section; 302. Second ground electrode of modulation section; 303. First signal electrode of modulation section; 401. Third edge coupler; 402. Fourth edge coupler; 501. On-chip temperature-sensitive micro-ring resonant cavity; 502. First grating coupler.

[0026] It should be noted that the terms "first" and "second" mentioned above are only used to distinguish between different options and do not represent the degree of superiority or inferiority of the options or their priority in the implementation process. Detailed Implementation

[0027] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this disclosure, and not all of them. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0028] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of this disclosure. However, it will be apparent to those skilled in the art that this disclosure may be practiced without one or more of these details. In other instances, to avoid confusion with this disclosure, certain technical features well-known in the art have not been described; that is, not all features of actual embodiments are described herein, nor are well-known functions and structures described in detail.

[0029] In the accompanying drawings, for clarity, the dimensions of layers, areas, and elements, as well as their relative dimensions, may be exaggerated. The same reference numerals denote the same elements throughout.

[0030] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this disclosure, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion. And the discussion of a second element, component, area, layer, or portion does not imply that the first element, component, area, layer, or portion necessarily exists in this disclosure.

[0031] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below,” “under,” or “below” other elements or features will be oriented “above” other elements or features. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0032] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this disclosure. When used herein, the singular forms “a,” “an,” and “ / the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprise” and / or “comprising,” when used in this specification, identify the presence of features, integers, steps, operations, elements, and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0033] To fully understand this disclosure, detailed steps and structures will be presented in the following description to illustrate the technical solutions of this disclosure. Preferred embodiments of this disclosure are described in detail below; however, other embodiments may also be implemented in addition to these detailed descriptions.

[0034] For the zero bias drift and scale factor drift problems caused by changes in ambient temperature in fiber optic gyroscope systems, most solutions rely on external temperature sensors or constant temperature control systems for compensation. However, these methods suffer from low temperature measurement accuracy, system complexity, high power consumption, and cumbersome packaging structures, making it difficult to meet the application requirements of miniaturization, low cost, and high performance.

[0035] To address this, this application provides an integrated temperature-controlled fiber optic gyroscope chip, method, and system. By utilizing the on-chip temperature-sensitive microring resonator in the integrated temperature-controlled fiber optic gyroscope chip to process the input first optical signal, a first transmission spectrum reflecting the current temperature is generated. Then, the current temperature of the integrated temperature-controlled fiber optic gyroscope chip is obtained based on the first transmission spectrum. Finally, temperature drift compensation is performed based on the current temperature. This effectively reduces the impact of ambient temperature changes on the gyroscope's zero bias and scaling factor, improving the overall system's stability and adaptability.

[0036] It should be noted that the embodiments of this application can be applied to various inertial navigation systems, aerospace equipment, autonomous driving platforms and other scenarios that require high accuracy in angular velocity detection.

[0037] The embodiments of this disclosure will now be described in detail with reference to the accompanying drawings.

[0038] In one embodiment of this disclosure, see [link to embodiment]. Figure 1 This illustrates a fiber optic gyroscope chip with integrated temperature control provided in an embodiment of this disclosure. For example... Figure 1 As shown, the integrated temperature-controlled fiber optic gyroscope chip includes a signal transceiver unit 10, a gyroscope modulation unit 30, an optical signal processing unit 20, an optical fiber coil interface unit 40, and an on-chip temperature-sensitive microring resonator 501. The signal transceiver unit 10 is optically connected to the optical signal processing unit 20 and the on-chip temperature-sensitive microring resonator 501, respectively; the optical signal processing unit 20 is optically connected to the optical fiber coil interface unit 40; the gyroscope modulation unit 30 is disposed above the modulation section of the optical waveguide in the signal transceiver unit 10, and the distance between the on-chip temperature-sensitive microring resonator 501 and the gyroscope modulation unit 30 is less than or equal to a first threshold.

[0039] The signal transceiver unit 10 is used to receive light sources and generate light signals based on the light sources.

[0040] The on-chip temperature-sensitive microring resonator 501 is used to form a first transmission spectrum based on the optical signal; the first transmission spectrum is used to determine the current temperature of the fiber optic gyroscope chip with integrated temperature control.

[0041] The gyroscope modulation unit 30 (also known as an electro-optic phase modulator) is used to generate a modulation electric field in response to the modulation drive signal, and to use the modulation electric field to perform phase modulation on the optical signal. The modulation drive signal is generated after temperature drift compensation based on the current temperature.

[0042] The optical signal processing unit 20 is used to polarize and split the modulated optical signal to form a first optical signal and a second optical signal.

[0043] The fiber optic coil interface unit 40 is used to transmit the first optical signal and the second optical signal to the polarization-maintaining fiber optic coil to form a gyroscope interference optical signal, which is then output through the optical signal processing unit 20 and the signal transceiver unit 10, so that the gyroscope detector can obtain the compensated gyroscope output result based on the gyroscope interference optical signal.

[0044] In some embodiments, the signal transceiver unit 10 is one of the optical structures integrated on a thin-film lithium niobate chip, used to connect an external light source with the internal optical path of the integrated temperature-controlled fiber optic gyroscope chip and to collect the output signal of the gyroscope detector (i.e., the gyroscope interference optical signal), ensuring efficient input and output of the optical signal. Here, the light source refers to a laser source externally input into the integrated temperature-controlled fiber optic gyroscope chip. Exemplarily, the light source can be a single-mode laser with a wavelength in the communication band (e.g., 1310 nm or 1550 nm) exhibiting good coherence and stability. For example, the light source can be a laser diode (LD), a superluminescent diode (SLED), or other types of stable light sources.

[0045] The on-chip temperature-sensitive microring resonator 501 is a miniature optical device based on thin-film lithium niobate material, and can be an optical resonant structure fabricated using micro-nano processing techniques. The resonant characteristics of this on-chip temperature-sensitive microring resonator 501 are highly sensitive to ambient temperature. When the temperature changes, due to the thermo-optical effect of the material and changes in geometry, the resonant wavelength of the on-chip temperature-sensitive microring resonator 501 will drift, and this wavelength drift can be detected by an external detector (such as a temperature detector), thereby converting the drift into temperature information to achieve real-time temperature measurement of the chip core region (also known as the gyroscope-sensitive region) to obtain the current temperature (which can be labeled using Tcore). The chip core region is the modulation segment of the optical waveguide and its thermally coupled neighborhood.

[0046] In some embodiments, when an optical signal passes through the on-chip temperature-sensitive microring resonator 501, part of the light is resonated and amplified, while the other part is transmitted to form a transmission spectrum. The temperature value of the chip core region can be calculated by detecting changes in the transmission spectrum. Furthermore, the radius, waveguide width, and other parameters of the on-chip temperature-sensitive microring resonator 501 can be optimized according to the operating wavelength and the desired free spectral range.

[0047] In some embodiments, the distance between the on-chip temperature-sensitive microring resonator 501 and the gyroscope modulation unit 30 is less than a first threshold, which restricts the on-chip temperature-sensitive microring resonator 501 to be arranged in a region close to the gyroscope modulation unit 30. This ensures that the temperature field of the on-chip temperature-sensitive microring resonator 501 is consistent with the core region of the integrated temperature-controlled fiber optic gyroscope chip, thereby guaranteeing the accuracy of temperature measurement.

[0048] The modulation drive signal is an electrical signal applied to the gyroscope modulation unit 30 to generate a modulation electric field, thereby changing the propagation phase of the optical signal. Since temperature changes cause changes in the refractive index and electro-optic coefficient of the thin-film lithium niobate material, the modulation drive signal must be compensated in real time to ensure that the phase modulation operating point fluctuates within a preset range.

[0049] In some embodiments, the fiber optic coil interface unit 40 is used to efficiently couple the optical signals (i.e., the first optical signal and the second optical signal) inside the temperature-controlled fiber optic gyroscope chip to an external polarization-maintaining fiber optic coil. The polarization-maintaining fiber optic coil serves as the interference path of the fiber optic gyroscope system, maintaining the polarization state of the optical signals and generating a phase difference under the Sagnac effect. Exemplarily, the polarization-maintaining fiber optic coil needs to be selected with high birefringence characteristics to avoid polarization crosstalk.

[0050] This application provides a fiber optic gyroscope chip with integrated temperature control. By integrating a signal transceiver unit 10, a gyroscope modulation unit 30, an optical signal processing unit 20, a fiber optic coil interface unit 40, and an on-chip temperature-sensitive microring resonator 501 onto a unified thin-film lithium niobate substrate, highly sensitive temperature measurement of the chip's core area is achieved, and closed-loop temperature drift compensation is performed based on this. This not only significantly improves the gyroscope's long-term stability and environmental adaptability but also effectively reduces system complexity and manufacturing costs. Furthermore, by placing the on-chip temperature-sensitive microring resonator 501 close to the gyroscope modulation unit 30, the temperature measured by the on-chip temperature-sensitive microring resonator 501 is closer to the current temperature of the chip's core area, thereby helping to improve the accuracy of temperature drift compensation. This avoids temperature measurement errors caused by spatial differences in external temperature sensors used in related technologies.

[0051] In some embodiments, the signal transceiver unit 10 includes a first optical waveguide 104, which is coupled to an on-chip temperature-sensitive microring resonator 501; the first optical waveguide 104 is used to transmit a first optical signal in the optical signal to the on-chip temperature-sensitive microring resonator 501.

[0052] For example, the first optical waveguide 104 is part of the signal transceiver unit 10 and is one of the main channels for optical signal propagation inside the fiber optic gyroscope chip with integrated temperature control. In some scenarios, the width, height, and refractive index distribution of the first optical waveguide 104 can be specially designed to control the propagation mode and loss of the optical signal.

[0053] The first optical waveguide 104 and the on-chip temperature-sensitive microring resonator 501 can be optically connected via lateral coupling. Lateral coupling ensures that a portion of the optical signal (i.e., the first optical signal) is injected into the on-chip temperature-sensitive microring resonator for temperature sensing. Furthermore, by designing appropriate coupling gaps and waveguide parameters, high-sensitivity temperature monitoring can be achieved without significantly affecting the performance of the gyroscope's main optical path (i.e., the optical path formed by the second optical waveguide 106, the fifth optical waveguide 109, and the sixth optical waveguide 110).

[0054] In some embodiments, after receiving an optical signal from an external light source, the signal transceiver unit 10 can guide the first optical signal (a portion of the optical signal) into the on-chip temperature-sensitive microring resonator 501 through the first optical waveguide 104 to achieve temperature monitoring.

[0055] This application embodiment implements optical signal splitting, utilizing a portion of the optical path for temperature sensing. This not only improves the integration density of the fiber optic gyroscope chip with integrated temperature control but also avoids the increased size and packaging complexity caused by introducing an additional independent temperature sensor, thereby enhancing the overall stability and environmental adaptability of the integrated temperature control fiber optic gyroscope chip.

[0056] In some embodiments, the fiber optic gyroscope chip with integrated temperature control further includes a first grating coupler 502, which is connected to the output end of the first optical waveguide 104; the first grating coupler 502 is used to couple out a first transmission spectrum to form a temperature detection optical signal; the temperature detection optical signal is used to determine the current temperature.

[0057] Here, the first grating coupler 502 is an optical device used to couple an optical signal from the first optical waveguide 104 to an external medium (such as air or optical fiber). The first grating coupler 502 can be composed of periodically arranged etched patterns. By limiting the grating period, depth, and angle of the first grating coupler 502, the first optical signal can be radiated in a certain direction from the surface of the fiber optic gyroscope chip with integrated temperature control. Furthermore, the first grating coupler 502 can be designed in unidirectional or bidirectional output mode to adapt to different temperature detector layouts and system requirements. Moreover, parameters such as the period, depth, and tilt angle of the first grating coupler 502 can be optimized and adjusted based on the target wavelength, thereby improving emission efficiency and stability.

[0058] The first grating coupler 502 is connected to the output of the first optical waveguide 104, which ensures that the first transmission spectrum from the on-chip temperature-sensitive micro-ring resonator 501 is effectively transmitted to the temperature detector, thereby providing a data basis for subsequent temperature calculation and temperature drift compensation.

[0059] Furthermore, the first grating coupler 502 is connected to the first optical waveguide 104 via lateral coupling, which ensures the continuity and stability of the optical signal and avoids signal distortion caused by interface loss or reflection. Lateral coupling facilitates process integration on thin-film lithium niobate materials and meets the requirements of miniaturization and high integration.

[0060] It is understandable that the temperature detection optical signal is an optical signal radiated by the first grating coupler 502, carrying the temperature information of the fiber optic gyroscope chip with integrated temperature control.

[0061] Furthermore, based on the connection relationship between the first optical waveguide 104, the on-chip temperature-sensitive micro-ring resonator 501, and the first grating coupler 502, it can be seen that, firstly, the on-chip temperature-sensitive micro-ring resonator 501 responds to changes in ambient temperature, causing changes in the transmission spectrum and forming a first transmission spectrum; subsequently, the first optical waveguide 104 transmits the transmission spectrum to the first grating coupler 502; the first grating coupler 502 outputs the optical signal to an external temperature detector, forming a temperature detection optical signal; then, it is convenient to perform real-time temperature drift compensation based on the current temperature.

[0062] In this embodiment, the signal transceiver unit 10 transmits the first transmission spectrum to an external temperature detector through the first grating coupler 502, thereby accurately obtaining the current temperature of the core area of ​​the chip. This facilitates real-time temperature drift compensation based on the current temperature, improving the accuracy and reliability of the fiber optic gyroscope system.

[0063] Figure 2 An exemplary schematic diagram of an on-chip optical temperature sensing unit 50 is shown. For example... Figure 2As shown, the on-chip optical temperature sensing unit 50 includes an on-chip temperature-sensitive microring resonator 501 and a first grating coupler 502. The on-chip temperature-sensitive microring resonator 501 is optically coupled to the first optical waveguide 104, and the first grating coupler 502 is connected to the output terminal of the first optical waveguide 104.

[0064] In some embodiments, a first optical signal is coupled from a first optical waveguide 104 into an on-chip temperature-sensitive microring resonator 501, and different resonant modes are excited within the on-chip temperature-sensitive microring resonator 501. For example... Figure 2 As shown, the resonant modes include: TE00@WG, TE00@MRR, and TM00@MRR. TE00@WG represents the transverse electric fundamental mode transmitted in the first optical waveguide 104, serving as the transmission carrier of the first optical signal. TE00@MRR and TM00@MRR represent the transverse electric and transverse magnetic fundamental modes excited within the on-chip temperature-sensitive microring resonant cavity 501, respectively. These transverse electric and transverse magnetic fundamental modes are the core of the sensing function, and their resonant characteristics are highly sensitive to changes in ambient temperature.

[0065] When the ambient temperature changes, the refractive index and physical dimensions of the 501 material in the on-chip temperature-sensitive microring resonator change accordingly, causing a shift in the resonant wavelengths of the TE and TM resonant modes. This wavelength shift can be detected using a temperature sensor. Figure 2 The structure shown can convert temperature changes into temperature detection optical signals, demonstrating the significant advantages of integrated photonic devices in miniaturization, high sensitivity, and resistance to electromagnetic interference in the field of sensing.

[0066] In some embodiments, the signal transceiver unit 10 further includes a second optical waveguide 106 and a ring optical resonator 105, the ring optical resonator 105 being laterally coupled to the first optical waveguide 104 and the second optical waveguide 106 respectively; the gyroscope modulation unit 30 is disposed above the modulation segment of the second optical waveguide 106 in the signal transceiver unit 10.

[0067] The second optical waveguide 106 is used to transmit the optical signal through the gyroscope modulation unit 30, the optical signal processing unit 20, and the fiber optic coil interface unit 40 to the polarization-maintaining fiber optic coil to form a gyroscope interference optical signal. The ring optical resonator 105 is used to couple the first optical signal transmitted in the second optical waveguide 106 to the first optical waveguide 104. The first optical signal is a portion of the optical signal transmitted in the second optical waveguide 106.

[0068] In some embodiments, the ring optical resonator 105 is a closed optical structure used for spectral shaping of the input optical signal or for enhancing sensing sensitivity. The ring optical resonator 105 may be made of a high refractive index material.

[0069] In some embodiments, the annular optical resonator 105 is optically coupled to the first optical waveguide 104 and the second optical waveguide 106 via a lateral proximity method. By simultaneously laterally coupling the annular optical resonator 105 to both the first and second optical waveguides 104 and 106, multipath optical signal splitting can be achieved, thereby improving system stability and anti-interference capability. Exemplarily, the second optical waveguide 106 branches off to form the first optical waveguide 104 in a region near the gyroscope modulation unit 30. For example, a branch coupling structure is provided in the second optical waveguide 106 to branch off the first optical waveguide 104, which is laterally coupled to the annular optical resonator 105 along its path.

[0070] In some embodiments, the modulation section of the second optical waveguide 106 can be located inside the signal transceiver unit 10. By placing the gyroscope modulation unit 30 inside the signal transceiver unit 10, the vertical distance between the gyroscope modulation unit 30 and the second optical waveguide 106 can be minimized, which is beneficial to enhancing the electro-optic coupling efficiency and thus improving the performance of the entire integrated temperature-controlled fiber optic gyroscope chip.

[0071] In this embodiment, the first optical waveguide 104 transmits the first optical signal to the on-chip temperature-sensitive micro-ring resonator 501, while the second optical waveguide 106 performs the functions of optical signal splitting and modulation. The ring optical resonator 105 serves as an intermediate optical element to improve system sensitivity. The gyroscope modulation unit 30 further optimizes the overall performance of the integrated temperature-controlled fiber optic gyroscope chip by precisely modulating the optical signal in the second optical waveguide 106. Through the collaborative work of the above components, the entire integrated temperature-controlled fiber optic gyroscope chip achieves higher measurement accuracy and stronger environmental adaptability while maintaining miniaturization.

[0072] In some embodiments, the gyroscope modulation unit 30 includes a modulation segment first ground electrode 301, a modulation segment second ground electrode 302, and a modulation segment first signal electrode 303; the modulation segment first ground electrode 301, the modulation segment first signal electrode 303, and the modulation segment second ground electrode 302 are arranged side by side along the propagation direction of the second optical waveguide 106, and the modulation segment first signal electrode 303 is located between the modulation segment first ground electrode 301 and the modulation segment second ground electrode 302.

[0073] The modulation section first ground electrode 301, modulation section second ground electrode 302, and modulation section first signal electrode 303 are used to generate a modulation electric field to perform phase modulation on the optical signal propagating in the second optical waveguide 106.

[0074] In some embodiments, the gyroscope modulation unit 30 is an electrode structure for phase modulation of optical signals in the main optical path of the gyroscope. The gyroscope modulation unit 30 typically consists of coplanar waveguide electrodes, including a modulation section first ground electrode 301, a modulation section first signal electrode 303, and a modulation section second ground electrode 302. The modulation section first ground electrode 301 and the modulation section second ground electrode 302 are among the metal electrodes that construct the coplanar waveguide structure. The modulation section first ground electrode 301 and the modulation section second ground electrode 302 provide a reference potential for the modulation section first signal electrode 303 and, together with the modulation section first signal electrode 303, form a transverse electric field.

[0075] In some embodiments, the first ground electrode 301 and the second ground electrode 302 of the modulation section are located on both sides of the first signal electrode 303 of the modulation section, and together they form a three-electrode coplanar waveguide structure. This side-by-side arrangement allows the electric field to be uniformly distributed along the direction of light propagation, which helps to enhance the electro-optic coupling efficiency and reduce the nonlinear effects caused by electrode asymmetry.

[0076] Here, the modulation electric field is a transverse electric field generated by the voltage difference between the first signal electrode 303, the first ground electrode 301, and the second ground electrode 302 of the modulation section. The modulation electric field changes the refractive index of the optical signal in the second optical waveguide 106 through the electro-optic effect, thereby achieving phase modulation. Phase modulation is one of the methods for interferometric measurement in fiber optic gyroscope chips with integrated temperature control, and the uniformity and intensity of the modulation electric field directly affect the modulation accuracy and gyroscope sensitivity. To ensure the modulation effect of the modulation electric field, parameters such as the distance between the first ground electrode 301 and the first signal electrode 303, the width of the first signal electrode 303, and the voltage amplitude can be further limited to ensure sufficient modulation depth under low power consumption conditions, thereby avoiding optical signal distortion caused by uneven modulation electric field.

[0077] The modulation section refers to a specific region in the optical waveguide designed for phase modulation, and this region is covered by an electrode structure consisting of a first ground electrode 301, a second ground electrode 302, and a first signal electrode 303. When a modulation drive signal is applied between the first signal electrode 303, the first ground electrode 301, and the second ground electrode 302, a modulation electric field is generated within the thin-film lithium niobate layer of the temperature-controlled fiber optic gyroscope chip. This modulation electric field changes the refractive index of the optical signal in the second optical waveguide 106, thereby achieving phase modulation of the optical signal. The geometric parameters of the modulation section (such as bandwidth length, width, and thickness) also affect the modulation efficiency.

[0078] In some embodiments, the design of the modulation electric field can take into account factors such as the spacing between the first ground electrode 301 of the modulation segment and the first signal electrode 303 of the modulation segment, the width of the first signal electrode 303 of the modulation segment, and the voltage amplitude, so that the design can ensure sufficient modulation depth under low power consumption conditions and avoid optical signal distortion caused by uneven electric field.

[0079] In this embodiment, a coplanar waveguide structure composed of a first ground electrode 301, a second ground electrode 302, and a first signal electrode 303 is used. Combined with a reasonable electrode layout, the uniformity and intensity of the modulation electric field can be effectively improved. This enhances the phase modulation effect of the optical signal, thereby significantly improving the measurement accuracy and environmental adaptability of the fiber optic gyroscope system.

[0080] In some embodiments, the first ground electrode 301 and the second ground electrode 302 of the modulation section are both connected to the ground electrode 5; the first signal electrode 303 of the modulation section is connected to the signal electrode 6. The first ground electrode 301, the second ground electrode 302, and the first signal electrode 303 of the modulation section are also used to generate a modulation electric field when a driving voltage is applied between the signal electrode 6 and the ground electrode 5, so as to use the modulation electric field to perform phase modulation on the optical signal propagating in the second optical waveguide 106.

[0081] Here, ground electrode 5 is a metal electrode structure that provides a reference potential. Ground electrode 5 is connected to an external circuit via leads to form a stable low-potential terminal. Ground electrode 5 is used to provide a stable ground reference for the modulation electrode system composed of the first ground electrode 301 of the modulation section, the second ground electrode 302 of the modulation section, and the first signal electrode 303 of the modulation section, thereby ensuring the stability of the modulation electric field. For example, in a thin-film lithium niobate chip, ground electrode 5 is usually arranged in a region far from the main optical path to reduce interference with the optical signal.

[0082] The signal electrode 6 is a metal electrode structure that provides the driving voltage. It is connected to an external driving circuit via leads, forming the high-potential end of a modulation electrode system consisting of a first ground electrode 301, a second ground electrode 302, and a first signal electrode 303. The signal electrode 6 works in conjunction with the ground electrode 5 to form a controllable modulation electric field distribution in the modulation section, thereby achieving phase modulation of the optical signal. For example, in the gyroscope modulation unit 30, the signal electrode 6 can be constructed from multiple layers of metal traces to improve electric field uniformity and modulation efficiency.

[0083] In some embodiments, the intensity and distribution of the modulation electric field determine the phase change amplitude of the optical signal, thereby affecting the output accuracy of the fiber optic gyroscope chip with integrated temperature control. For example, in a coplanar waveguide structure, the modulation electric field is distributed along the direction of light propagation, causing a change in the refractive index in the second optical waveguide 106, which in turn causes a phase shift in the optical signal.

[0084] In some embodiments, phase modulation can be achieved by a modulation electric field to enhance the sensitivity and dynamic range of the gyroscope system. For example, under the influence of the electro-optic effect, the modulation electric field causes a change in the refractive index of the optical waveguide material, resulting in a phase shift in the optical signal. Since the phase shift of the optical signal is proportional to the intensity of the modulation electric field, the phase state of the optical signal can be controlled by a modulation drive signal.

[0085] In this embodiment, by designing the connection method of the first ground electrode 301, the second ground electrode 302, and the first signal electrode 303 of the modulation section, and applying a driving voltage to the modulation section to generate a modulation electric field, the optical signal is phase-modulated using the modulation electric field. This allows for stable control of the optical signal phase in the second optical waveguide 106, thereby improving the measurement accuracy and stability of the integrated temperature-controlled fiber optic gyroscope chip, and ultimately achieving more precise angular velocity detection and temperature compensation.

[0086] In some embodiments, the signal transceiver unit 10 further includes a light source connection port 1, a gyroscope detector connection port 2, a first edge coupler 101, a second edge coupler 102, and a first beam combiner 103; the light source connection port 1 is connected to the first edge coupler 101; the gyroscope detector connection port 2 is connected to the second edge coupler 102; and the first beam combiner 103 is connected to the first edge coupler 101 and the second edge coupler 102 respectively through a second optical waveguide 106.

[0087] The light source connection port 1 is used to receive a light source; the gyroscope detector connection port 2 is used to output a gyroscope interference light signal to the gyroscope detector; the first edge coupler 101 is used to receive the light source from the light source connection port 1, form an optical signal, and couple the optical signal to the third optical waveguide 107; the second edge coupler 102 is also used to receive the gyroscope interference light signal transmitted from the fourth optical waveguide 108 and transmit the gyroscope interference light signal to the gyroscope detector connection port 2; and the first beam combiner 103 is used to combine the third optical waveguide 107 and the fourth optical waveguide 108 into the second optical waveguide 106.

[0088] Here, the light source connection port 1 is an interface structure for introducing an external light source into the fiber optic gyroscope chip with integrated temperature control. The light source connection port 1 can be located on one side of the chip and docked with the first edge coupler 101 through optical alignment. In order to realize the light injection light source connection port 1, factors such as fiber type (e.g., single-mode or polarization-maintaining), wavelength matching, and insertion loss also need to be considered during the design.

[0089] The gyroscope detector connection port 2 is an interface structure for transmitting the gyroscope interference light signal output from the integrated temperature-controlled fiber optic gyroscope chip to an external gyroscope detector. This gyroscope detector connection port 2 is also located on one side of the chip and is connected to the optical path within the integrated temperature-controlled fiber optic gyroscope chip via a second edge coupler 102. When designing the gyroscope detector connection port 2, the sensitivity, response speed, and optical coupling efficiency between the gyroscope detector and the external gyroscope detector must be considered to ensure the stability and accuracy of the gyroscope interference light signal output from the gyroscope detector connection port 2.

[0090] The first edge coupler 101 is an optical device that guides an external light source into a fiber optic gyroscope chip with integrated temperature control, and is connected to the light source connection port 1. The second edge coupler 102 is an optical device that transmits the gyroscope interference light signal output from the fiber optic gyroscope chip with integrated temperature control to the gyroscope detector, and is connected to the gyroscope detector connection port 2. The first beam combiner 103 is an optical device used to combine two optical signals from the first edge coupler 101 and the second edge coupler 102 into a single main optical path input to the second optical waveguide 106 via the third optical waveguide 107 and the fourth optical waveguide 108, respectively. The first beam combiner 103 ensures that optical signals from different directions can propagate along the same path, thereby enabling the second optical waveguide 106 to form a unified optical path. When designing the first beam combiner 103, parameters such as wavelength matching, insertion loss, and mode matching of the optical signals need to be considered to ensure the stability and consistency of the optical path.

[0091] In some scenarios, external optical signals can be introduced into the light source connection port 1, which enters the fiber optic gyroscope chip with integrated temperature control via the first edge coupler 101. Then, the first beam combiner 103 combines multiple optical signals, which are then transmitted through the second optical waveguide 106. Finally, the gyroscope interference optical signal is output to the external detector through the gyroscope detector connection port 2.

[0092] In this embodiment, by adding components such as a light source connection port 1, a gyroscope detector connection port 2, a first edge coupler 101, a second edge coupler 102, and a first combiner 103 to the signal transceiver unit 10, the injection and output efficiency of optical signals can be effectively improved, optical path loss can be reduced, and the stability and measurement accuracy of the entire system can be enhanced. This enables more precise gyroscope measurement and temperature compensation functions, thereby further improving the overall performance and reliability of the fiber optic gyroscope.

[0093] In some embodiments, the optical signal processing unit 20 (also referred to as the polarization and beam splitting unit) includes a first polarizer 201 and a first beam splitter 202 arranged sequentially along the propagation direction of the second optical waveguide 106. The first polarizer 201 is used to polarize the optical signal transmitted in the second optical waveguide 106 to obtain a polarized optical signal; the first beam splitter 202 is used to split the polarized optical signal into a first optical signal and a second optical signal; the first optical signal is transmitted through a fifth optical waveguide 109, and the second optical signal is transmitted through a sixth optical waveguide 110.

[0094] Here, the first polarizer 201 is an optical device used to convert the optical signal transmitted in the second optical waveguide 106 into polarized light with a specific polarization state (e.g., linearly polarized light (TE or TM polarization)). The first polarizer 201 can ensure that the optical signal entering the subsequent optical path has a uniform polarization state, thereby avoiding interference errors or signal distortion caused by polarization inconsistencies. Exemplarily, the first polarizer 201 is disposed on the second optical waveguide 106.

[0095] The first beam splitter 202 is used to split the polarized optical signal into two paths, which enter the two edge couplers (i.e., the third edge coupler 401 and the fourth edge coupler 402) of the fiber optic coil interface unit 40 respectively, to form the required round-trip optical paths. The working principle of the first beam splitter 202 can be based on principles such as interference, diffraction, or refraction. The design of the first beam splitter 202 needs to consider factors such as optical power distribution ratio, insertion loss, and polarization preservation capability to meet the high sensitivity and low noise requirements of the gyroscope system. For example, the first beam splitter 202 is also disposed on the second optical waveguide 106, and along the propagation direction of the second optical waveguide 106, the first beam splitter 202 is disposed after the first polarizer 201.

[0096] In this embodiment, by sequentially arranging the first polarizer 201 and the first beam splitter 202 in the optical signal processing unit 20, the optical signal can be ensured to have stable polarization characteristics in the subsequent optical path, thereby reducing interference errors caused by polarization changes. Simultaneously, the first beam splitter 202 provides the necessary optical path structure for constructing the round-trip optical path, thus enabling high-precision measurement of angular velocity. This improves the overall performance of the fiber optic gyroscope system, particularly in terms of stability and measurement accuracy in complex environments.

[0097] In some embodiments, the fiber optic coil interface unit 40 includes a third edge coupler 401 and a fourth edge coupler 402; the input end of the third edge coupler 401 is connected to the fifth optical waveguide 109; the input end of the fourth edge coupler 402 is connected to the sixth optical waveguide 110; the output end of the third edge coupler 401 is coupled to the polarization-maintaining fiber coil through the first polarization-maintaining fiber interface 3; and the output end of the fourth edge coupler 402 is coupled to the polarization-maintaining fiber coil through the second polarization-maintaining fiber interface 4.

[0098] The third edge coupler 401 and the fourth edge coupler 402 are used to transmit the first optical signal transmitted by the fifth optical waveguide 109 and the second optical signal transmitted by the sixth optical waveguide 110 to the polarization-maintaining fiber coil through the first polarization-maintaining fiber interface 3 and the second polarization-maintaining fiber interface 4, respectively, to form a gyroscope interference optical signal.

[0099] Here, the fiber optic coil interface unit 40 is an on-chip optical coupling structure used to connect an external polarization-maintaining fiber optic coil. Exemplarily, the fiber optic coil interface unit 40 includes a third edge coupler 401 and a fourth edge coupler 402, which correspond to the two outputs of the gyroscope's main optical path, respectively. These two edge couplers ensure that the optical signal can smoothly enter the polarization-maintaining fiber optic coil and complete the round-trip optical path, thereby forming a gyroscope interference optical signal.

[0100] In some embodiments, the third edge coupler 401 is an optical coupling device on a chip. The input end of the third edge coupler 401 is connected to the fifth optical waveguide 109, and the output end is connected to the polarization-maintaining fiber coil through the first polarization-maintaining fiber interface 3. The fourth edge coupler 402 is symmetrically arranged with the third edge coupler 401. The input end of the fourth edge coupler 402 is connected to the sixth optical waveguide 110, and the output end of the fourth edge coupler 402 is connected to the polarization-maintaining fiber coil through the second polarization-maintaining fiber interface 4.

[0101] The third edge coupler 401 and the fourth edge coupler 402 are used to introduce the first optical signal from the fifth optical waveguide 109 and the second optical signal from the sixth optical waveguide 110 into the polarization-maintaining fiber coil to form a round-trip path. The round-trip optical path formed by the second optical signal and the first optical signal generates a gyro interference optical signal in the polarization-maintaining fiber coil.

[0102] For example, the round-trip optical path of optical signal propagation in an integrated temperature-controlled fiber optic gyroscope chip is as follows: light source connection port 1 → first edge coupler 101 (combined with second edge coupler 102 in first combiner 103) → first combiner 103 → second optical waveguide 106 → gyroscope modulation unit 30 → first polarizer 201 → first beam splitter 202 → third edge coupler 401 / fourth edge coupler 402 → polarization-maintaining fiber coil → third edge coupler 401 / fourth edge coupler 402 → first beam splitter 202 → first polarizer 201 → gyroscope modulation unit 30 (can pass through again) → first combiner 103 → gyroscope detector connection port 2 → gyroscope detector.

[0103] The first polarization-maintaining fiber interface 3 is the physical interface connecting the third edge coupler 401 and the polarization-maintaining fiber coil. The first polarization-maintaining fiber interface 3 is used to maintain the polarization state of the optical signal, thereby reducing gyroscope interference optical signal errors caused by polarization changes. The first polarization-maintaining fiber interface 3 adopts a coupling method adapted to the polarization-maintaining fiber, which ensures the optical signal remains stable when entering the polarization-maintaining fiber coil. This method is beneficial for improving the measurement accuracy of the gyroscope. The second polarization-maintaining fiber interface 4 is similar to the first polarization-maintaining fiber interface 3, used to connect the fourth edge coupler 402 and the polarization-maintaining fiber coil, and also has the function of maintaining the polarization characteristics unchanged. Through the second polarization-maintaining fiber interface 4 and the first polarization-maintaining fiber interface 3, effective control of the round-trip path of the optical signal can be achieved, ensuring the generation of the gyroscope interference optical signal.

[0104] Furthermore, the optical fiber in the polarization-maintaining fiber coil possesses polarization-maintaining characteristics, meaning that the polarization state of the optical signal does not change significantly during propagation along the fiber. In some examples, the polarization-maintaining fiber coil, as part of the optical path, receives optical signals from the third edge coupler 401 and the fourth edge coupler 402. Therefore, a back-to-back optical path can be formed within the polarization-maintaining fiber coil, thereby generating a Sagnac interference signal (i.e., a gyroscopic interference optical signal).

[0105] In this embodiment, by introducing an optical fiber coil interface unit 40 into the optical signal processing unit 20 and configuring a third edge coupler 401 and a fourth edge coupler 402, the optical signals in the fifth optical waveguide 109 and the sixth optical waveguide 110 are respectively guided to the polarization-maintaining optical fiber coils to form gyro interference optical signals. This enables high-precision round-trip transmission of the optical signal, allowing for accurate measurement of angular velocity or angular increment, thereby improving the performance and environmental adaptability of the fiber optic gyroscope.

[0106] In some embodiments, the first optical waveguide 104 is laterally coupled to the ring optical resonator 105 in the first coupling region and to the on-chip temperature-sensitive micro-ring resonator 501 in the second coupling region, with the first coupling region and the second coupling region located at different positions.

[0107] Here, lateral coupling refers to the optical signal coupling method achieved between two adjacent optical waveguides through spatial spacing. It is generally used to transmit optical signals from one waveguide to another without using structures such as beam splitters or beam combiners. Lateral coupling depends on the distance between the waveguides, the refractive index difference, and the distribution of the optical field. When the distance between two adjacent optical waveguides is small enough, electromagnetic field interactions will occur between the two adjacent optical waveguides, thereby realizing the transmission or exchange of optical signals.

[0108] For example, the first optical waveguide 104 is laterally coupled to the ring optical resonator 105 and the on-chip temperature-sensitive micro-ring resonator 501, respectively, so that part of the optical signal in the second optical waveguide 106 enters the ring optical resonator 105 for spectral shaping, and the first optical signal enters the on-chip temperature-sensitive micro-ring resonator 501 for temperature measurement.

[0109] The different positions here indicate that the first coupling region and the second coupling region have different physical layout locations on the chip; that is, the first coupling region and the second coupling region are not in the same area or path. This avoids interference between the two coupling regions and helps optimize the optical path layout and functional partitioning. In addition, different coupling regions can correspond to different functional modules, such as signal processing and temperature detection. By rationally arranging the positions of each coupling region, the overall performance and stability of the system can be improved.

[0110] In this embodiment, by laterally coupling the first optical waveguide 104 to the ring optical resonator 105 and the on-chip temperature-sensitive micro-ring resonator 501 respectively, and arranging the first coupling region and the second coupling region at different positions, it is possible to realize multi-functional utilization of optical signals, improve system integration and functional diversity, and further optimize the overall performance and environmental adaptability of the fiber optic gyroscope.

[0111] like Figure 3As shown, this embodiment provides an integrated temperature-controlled fiber optic gyroscope chip, which can also be referred to as an integrated temperature-controlled fiber optic gyroscope thin-film lithium niobate chip. This integrated temperature-controlled fiber optic gyroscope chip includes a substrate layer, a thin-film lithium niobate layer disposed on the substrate layer, an integrated optical waveguide structure formed in the thin-film lithium niobate layer, an upper cladding layer covering the thin-film lithium niobate layer, and a metal electrode structure formed on the upper cladding layer. Figure 3 Figures (a) to (c) schematically show typical cross-sectional structures of different regions, which, from bottom to top, are a substrate layer, a thin-film lithium niobate layer, a metal layer, and an upper cladding layer.

[0112] here, Figure 3 (a) in the figure represents the chip structure of the fiber optic coil interface unit 40 region; Figure 3 (b) in the figure represents the chip structure of the gyroscope modulation unit 30 region; Figure 3 In the diagram, (c) represents the chip structure of the on-chip temperature-sensitive microring resonator 501; where, Figure 3 The two thin-film lithium niobate layer protrusions in (a) represent the ridge / etched optical waveguide structure (i.e., the fifth optical waveguide 109 and the sixth optical waveguide 110). Figure 3 The three metal layers in (b) represent the first ground electrode 301 of the modulation section, the first signal electrode 303 of the modulation section, and the second ground electrode 302 of the modulation section. When a driving voltage is applied between the signal electrode 6 and the ground electrode 5, the first ground electrode 301, the first signal electrode 303, and the second ground electrode 302 of the modulation section generate a modulation electric field distributed along the second optical waveguide 106 in the thin film lithium niobate layer, thereby realizing phase modulation of the optical signal in the second optical waveguide 106. Figure 3 The two thin-film lithium niobate layer protrusions in (b) are also used to represent the optical waveguide structure (i.e., the fifth optical waveguide 109 and the sixth optical waveguide 110). Figure 3 The longer lithium niobate thin-film protrusion in (c) represents the cross-section of the on-chip temperature-sensitive microring resonator 501. Because the waveguide width of the on-chip temperature-sensitive microring resonator 501 is larger, this protrusion is also longer. The shorter lithium niobate thin-film protrusion represents the first optical waveguide 104.

[0113] In this embodiment, the fiber optic gyroscope chip with integrated temperature control has a compact overall structure. All functional units are integrated on the same thin-film lithium niobate chip, realizing the integration of the gyroscope's main optical path and on-chip optical temperature sensing function, providing a foundation for the system configuration and temperature drift compensation method in subsequent embodiments.

[0114] In another embodiment of this disclosure, see Figure 4This illustrates a fiber optic gyroscope system (also known as an on-chip temperature sensing and temperature drift compensation integrated fiber optic gyroscope system) provided in an embodiment of this disclosure. Figure 4 As shown, the fiber optic gyroscope system may include a fiber optic gyroscope chip with integrated temperature control, a temperature detector, and an electronic signal processing unit. The fiber optic gyroscope chip with integrated temperature control is electrically connected to both the temperature detector and the electronic signal processing unit.

[0115] The system includes a fiber optic gyroscope chip with integrated temperature control, used to generate a first optical signal, a second optical signal, and a temperature detection optical signal; a temperature detector, used to acquire the temperature detection optical signal and generate a temperature detection electrical signal based on it; an electronic signal processing unit, used to determine the current temperature of the fiber optic gyroscope chip with integrated temperature control based on the temperature detection electrical signal and a preset mapping relationship, whereby the preset mapping relationship characterizes the correspondence between temperature and the temperature detection electrical signal; and to perform temperature drift compensation based on the current temperature to obtain the compensated gyroscope output result.

[0116] In some embodiments, such as Figure 1 As shown, the temperature-controlled fiber optic gyroscope chip integrates a signal transceiver unit 10, a gyroscope modulation unit 30, an optical signal processing unit 20, a fiber optic coil interface unit 40, and an on-chip optical temperature sensing unit 50 on the same thin-film lithium niobate substrate. This temperature-controlled fiber optic gyroscope chip can simultaneously perform gyroscope measurement and temperature detection functions. Detailed information about the internal structure of this chip can be found in the aforementioned section... Figure 1 The details of the above description will not be repeated here. The integrated temperature control fiber optic gyroscope chip adopts an integrated design that reduces the number of discrete components and improves the stability and reliability of the system.

[0117] The first and second optical signals generated by the integrated temperature-controlled fiber optic gyroscope chip are used to form gyroscope interference optical signals to measure angular velocity. The temperature detection optical signal is a portion of the light (i.e., the first optical signal) split from the second optical waveguide 106, injected into the on-chip temperature-sensitive microring resonator 501 through the first optical waveguide 104, and determined by monitoring the first transmission spectrum of the on-chip temperature-sensitive microring resonator 501. The generation of the first optical signal, the second optical signal, and the temperature detection optical signal can be performed synchronously, thus ensuring the time consistency between gyroscope measurement and temperature detection, thereby improving the accuracy of temperature drift compensation.

[0118] A temperature detector is a photoelectric conversion device that may include a photodiode and a preamplifier circuit. When a temperature detection optical signal is radiated from the integrated temperature-controlled fiber optic gyroscope chip through the first grating coupler 502, the temperature detector receives the signal and converts it into a corresponding temperature detection electrical signal. The intensity or wavelength distribution of the temperature detection electrical signal reflects the temperature state of the core area of ​​the integrated temperature-controlled fiber optic gyroscope chip, providing a basis for subsequent current temperature calculations.

[0119] Furthermore, since the temperature detector directly receives temperature information from the internal components of the fiber optic gyroscope chip with integrated temperature control, the temperature measurement accuracy of the fiber optic gyroscope chip with integrated temperature control is higher than that of the external temperature sensor, and the response speed of the fiber optic gyroscope chip with integrated temperature control is also faster than that of the external temperature sensor.

[0120] The electronic signal processing unit uses the measured temperature detection electrical signal to find the corresponding temperature value in a preset mapping relationship, which represents the current temperature. This preset mapping relationship can be represented in various forms. Through this preset mapping relationship, the electronic signal processing unit can calculate the current temperature of the fiber optic gyroscope chip with integrated temperature control in real time, providing accurate temperature data for subsequent temperature drift compensation.

[0121] The electronic signal processing unit can also calculate the compensation amount at the current temperature based on a pre-stored preset temperature compensation model (e.g., a temperature-zero bias / scaling factor model), and apply the calculated compensation amount at the current temperature to the gyroscope output signal. The compensation method can be analog circuit adjustment or digital signal processing. For example, the gyroscope's operating point can be optimized by changing the driving voltage amplitude, bias point, or modulation waveform on the first signal electrode 303 of the modulation section; or the angular velocity or angular increment signal output by the gyroscope detector can be digitally corrected. This significantly reduces the impact of ambient temperature changes on gyroscope performance, improving the gyroscope's long-term stability and environmental adaptability.

[0122] In this embodiment, by integrating gyroscope measurement and temperature detection functions onto the same substrate, the spatial bias and thermal conduction hysteresis problems caused by external temperature sensors in traditional solutions can be avoided, thereby improving the accuracy and timeliness of temperature measurement. This improvement enables more precise temperature drift compensation, thus enhancing the overall performance of the gyroscope.

[0123] In another embodiment of this disclosure, in some embodiments, such as Figure 4As shown, the fiber optic gyroscope system also includes an optical signal transceiver unit 10 and a gyroscope sensing unit. The optical signal transceiver unit 10 includes a light source, a temperature detector, and a gyroscope detector. Both the temperature detector and the gyroscope detector are connected to the signal transceiver unit 10 of the fiber optic gyroscope chip with integrated temperature control. Additionally, the temperature detector is also connected to a temperature calculation module in the electronic signal processing unit. The gyroscope sensing unit includes a polarization-maintaining fiber optic coil, the first and second ends of which are respectively connected to the fiber optic coil interface unit 40 of the fiber optic gyroscope chip with integrated temperature control.

[0124] Among them, the polarization-maintaining fiber coil is used to receive the first optical signal and the second optical signal from the integrated temperature-controlled fiber optic gyroscope chip, and to form a gyroscope interference optical signal based on the first optical signal and the second optical signal. The gyroscope detector is used to receive gyroscope interference optical signals from an integrated temperature-controlled fiber optic gyroscope chip and convert the gyroscope interference optical signals to obtain gyroscope interference electrical signals.

[0125] The electronic signal processing unit is used to receive the gyroscope interference electrical signal from the gyroscope detector, demodulate and process the gyroscope interference electrical signal to obtain the first gyroscope data; the first gyroscope data includes angular velocity or angular increment; determine the temperature drift compensation parameters corresponding to the current temperature according to the preset temperature compensation model; the temperature drift compensation parameters include zero bias correction (which can be labeled b(T)) and / or scaling factor correction (which can be labeled K(T)); and perform correction processing on the first gyroscope data according to the temperature drift compensation parameters to obtain the compensated gyroscope output result.

[0126] In some embodiments, the two ends of the polarization-maintaining fiber coil are respectively connected to an integrated temperature-controlled fiber optic gyroscope chip to form an interference loop. By using the polarization-maintaining fiber coil, polarization state changes caused by environmental disturbances can be effectively suppressed, improving the system's anti-interference capability and measurement accuracy.

[0127] A gyroscope detector is a device used to receive gyroscope interference optical signals and convert them into gyroscope interference electrical signals. One end of the gyroscope detector is connected to a fiber optic gyroscope chip with integrated temperature control, and the other end is connected to an electronic signal processing unit. The gyroscope detector enables real-time acquisition and transmission of gyroscope interference optical signals. The sensitivity and response speed of the gyroscope detector directly affect the system's ability to detect angular velocity or angular increment.

[0128] In some embodiments, the polarization-maintaining fiber coil receives two optical signals (a first optical signal and a second optical signal) output from a fiber optic gyroscope chip with integrated temperature control. These two optical signals, after round-trip propagation through the polarization-maintaining fiber coil, form a gyroscopic interference optical signal. The gyroscope detector receives the gyroscopic interference optical signal formed by the polarization-maintaining fiber coil and converts it into a corresponding gyroscopic interference electrical signal. Subsequently, the electronic signal processing unit receives the gyroscopic interference electrical signal output from the gyroscope detector and performs demodulation, filtering, and integration on the gyroscopic interference electrical signal to ultimately obtain a representation of angular velocity or angular increment.

[0129] In some embodiments, such as Figure 4 As shown, the electronic signal processing unit may include a temperature calculation module, a temperature drift compensation module, a gyroscope signal processing module, and a modulation / demodulation module. The temperature calculation module and the temperature drift compensation module are electrically connected; the temperature drift compensation module and the modulation / demodulation module are electrically connected; the gyroscope signal processing module and the modulation / demodulation module are electrically connected.

[0130] The system includes several modules: a temperature calculation module for determining the current temperature of the integrated temperature-controlled fiber optic gyroscope chip based on a temperature detection electrical signal and a preset mapping relationship, whereby the preset mapping relationship characterizes the correspondence between temperature and the temperature detection electrical signal; a temperature drift compensation module for determining the temperature drift compensation parameters corresponding to the current temperature based on a preset temperature compensation model, including zero-bias correction and / or scaling factor correction; a gyroscope signal processing module for demodulating and processing the gyroscope interference electrical signal to obtain first gyroscope data, including angular velocity or angular increment; a modulation drive / demodulation module for correcting the first gyroscope data according to the temperature drift compensation parameters to obtain the compensated gyroscope output; and a modulation drive signal for generating a modulation drive signal based on the temperature drift compensation parameters, including at least one of a drive voltage amplitude, a bias voltage, and a modulation waveform. The modulation drive signal is applied to the gyroscope modulation unit 30 in the integrated temperature-controlled fiber optic gyroscope chip to generate a modulation electric field; the modulation electric field is used to phase-modulate the optical signal so that the phase modulation operating point of the optical signal fluctuates within a preset range.

[0131] In some embodiments, the temperature drift compensation module calculates the corresponding temperature drift compensation parameters based on a preset temperature compensation model and the currently measured temperature, and sends the temperature drift compensation parameters to the modulation / demodulation module. For example, the temperature drift compensation module can generate temperature drift compensation parameters based on factory calibration data or an online learning model, thereby using these parameters to correct the gyroscope output in real time, eliminating temperature-induced errors and improving the long-term stability and environmental adaptability of the system.

[0132] Simultaneously, the gyroscope signal processing module can demodulate and process the gyroscope interference electrical signal to obtain the first gyroscope data, and send the first gyroscope data to the modulation drive / demodulation module. Then, the modulation drive / demodulation module uses temperature drift compensation parameters to correct the first gyroscope data, thereby obtaining the compensated gyroscope output. This correction process can be open-loop or closed-loop control, depending on the system design and application scenario. Alternatively, the modulation drive / demodulation module can also generate a modulation drive signal based on the temperature drift compensation parameters; apply the modulation drive signal to the gyroscope modulation unit 30 in the temperature-controlled fiber optic gyroscope chip to generate a modulation electric field; finally, use the modulation electric field to phase modulate the optical signal, so that the phase modulation operating point of the optical signal fluctuates within a preset range.

[0133] In this embodiment, by adding a polarization-maintaining fiber optic coil and a gyroscope detector to the system, and combining them with an integrated temperature-controlled fiber optic gyroscope chip and an electronic signal processing unit, high-precision acquisition and temperature drift compensation of the gyroscope signal can be achieved. This improves the stability and accuracy of the gyroscope signal, reduces system errors, and enhances the application capability of the fiber optic gyroscope in complex environments.

[0134] In another embodiment of this disclosure, see Figure 5 The diagram illustrates a flow chart of a temperature compensation method provided in an embodiment of this disclosure. Figure 5 As shown, the temperature compensation method may include: S101, the first optical signal passes through the on-chip temperature-sensitive micro-ring resonator in the integrated temperature-controlled fiber optic gyroscope chip to form the first transmission spectrum.

[0135] Here, the first transmission spectrum refers to the spectral distribution of the light signal transmitted by the on-chip temperature-sensitive micro-ring resonator 501 within a specific wavelength range. The first transmission spectrum reflects the variation characteristics of the internal temperature state of the fiber optic gyroscope chip with integrated temperature control.

[0136] Referring to the above Figure 1 As described in the text regarding the on-chip temperature-sensitive micro-ring resonator 501, this on-chip temperature-sensitive micro-ring resonator 501, coupled with the first optical waveguide 104, can sense temperature changes in the core region of the chip and convert the first optical signal into a first transmission spectrum. Therefore, integrating the on-chip temperature-sensitive micro-ring resonator 501 within the fiber optic gyroscope chip for integrated temperature control enables real-time measurement of the temperature in the core region of the chip, thereby improving the overall environmental adaptability and stability of the system.

[0137] Understandably, this temperature compensation method can be applied to fiber optic gyroscope systems.

[0138] S102, based on the first transmission spectrum, obtains the temperature detection electrical signal.

[0139] In some embodiments, the process of obtaining a temperature detection electrical signal based on a first transmission spectrum may include the temperature detector obtaining a temperature detection electrical signal based on the first transmission spectrum.

[0140] Here, the temperature detection electrical signal is an electrical signal generated by photoelectric conversion of the first transmission spectrum. The temperature detection electrical signal is used to characterize the temperature change inside the fiber optic gyroscope chip with integrated temperature control.

[0141] In some embodiments, the process of obtaining the temperature detection electrical signal based on the first transmission spectrum may include: S11, the first transmission spectrum is coupled out via the first grating coupler in the integrated temperature-controlled fiber optic gyroscope chip to form a temperature detection optical signal.

[0142] Referring to the above Figure 1 As described in the text, the first grating coupler 502 is connected to the output of the first optical waveguide 104. The first optical waveguide 104 is optically coupled to the on-chip temperature-sensitive micro-ring resonator 501. Therefore, the first transmission spectrum of the on-chip temperature-sensitive micro-ring resonator 501 can be coupled and output through the first grating coupler 502 to form a temperature detection optical signal. Subsequently, the current temperature of the fiber optic gyroscope chip with integrated temperature control can be obtained using the temperature detection optical signal.

[0143] S12 converts the temperature detection optical signal into a temperature detection electrical signal.

[0144] In some embodiments, the process of converting the temperature detection optical signal into a temperature detection electrical signal may include: the temperature detector converting the temperature detection optical signal into a temperature detection electrical signal.

[0145] For example, converting a temperature detection optical signal can be a process of converting the temperature detection optical signal into an electrical signal. This conversion may include stages such as receiving, amplifying, filtering, and analog-to-digital conversion of the optical signal, so that subsequent electronic circuits can process and analyze these signals.

[0146] In this embodiment, by introducing a first grating coupler 502 into the integrated temperature-controlled fiber optic gyroscope chip, the temperature-related optical signal of the temperature-sensitive micro-ring resonant cavity is output to the outside of the integrated temperature-controlled fiber optic gyroscope chip, and further, a temperature detection electrical signal is obtained through a temperature detector. This enables high-precision measurement of the temperature in the core area of ​​the chip, thereby allowing real-time adjustment of the parameters in the modulation drive signal. This effectively suppresses zero-bias and scale factor drift caused by temperature fluctuations, improving the overall performance and environmental adaptability of the fiber optic gyroscope.

[0147] S103 determines the current temperature of the fiber optic gyroscope chip with integrated temperature control based on the temperature detection electrical signal and a preset mapping relationship.

[0148] The preset mapping relationship is used to characterize the correspondence between temperature and temperature detection electrical signal.

[0149] In some embodiments, based on Figure 4 The description of the electronic signal processing unit indicates that it includes a temperature calculation module, a temperature drift compensation module, a gyroscope signal processing module, and a modulation / demodulation module. The process of determining the current temperature of the integrated temperature-controlled fiber optic gyroscope chip based on the temperature detection electrical signal and a preset mapping relationship can include: the temperature calculation module in the electronic signal processing unit determines the current temperature of the integrated temperature-controlled fiber optic gyroscope chip based on the temperature detection electrical signal and the preset mapping relationship.

[0150] Here, the preset mapping relationship refers to a set of mathematical relationships between temperatures and corresponding temperature detection electrical signals established during the system's factory calibration phase. This preset mapping relationship can exist in the form of a table or a function. For example, the preset mapping relationship can be a linear or nonlinear function relationship fitted based on actual test data, and the current temperature can be calculated by inputting the temperature detection electrical signal into the preset mapping relationship.

[0151] By establishing accurate preset mapping relationships by technical personnel, the accuracy of temperature detection results can be ensured, thus providing a reliable basis for subsequent temperature drift compensation operations.

[0152] S104 performs temperature drift compensation based on the current temperature to obtain the compensated gyroscope output result.

[0153] In some embodiments, the process of performing temperature drift compensation based on the current temperature to obtain the compensated gyroscope output result may include: the temperature drift compensation module in the electronic signal processing unit performs temperature drift compensation based on the current temperature to obtain the compensated gyroscope output result.

[0154] Here, temperature drift compensation refers to the process of dynamically adjusting the gyroscope's zero bias and scaling factor based on changes in the current temperature of the fiber optic gyroscope chip. The compensated gyroscope output is the angular velocity or angular increment signal after temperature drift compensation. The temperature drift compensation process can be achieved by adjusting the drive voltage through hardware circuitry or by correcting the original signal through software algorithms.

[0155] In this embodiment, by integrating an on-chip temperature-sensitive microring resonator 501 within the integrated temperature-controlled fiber optic gyroscope chip, highly sensitive temperature measurement of the core region of the fiber optic gyroscope chip is achieved. This allows for real-time acquisition of the actual temperature information within the integrated temperature-controlled fiber optic gyroscope chip, enabling precise temperature drift compensation operations and thereby improving the overall performance and environmental adaptability of the fiber optic gyroscope.

[0156] In another embodiment of this disclosure, the method further includes: S201, the light source forms a first optical signal and a second optical signal through an integrated temperature-controlled fiber optic gyroscope chip.

[0157] In some embodiments, light emitted from the light source is injected into a fiber optic gyroscope chip with integrated temperature control to drive the optical links of the entire system. For example, as... Figure 1 As shown, the light source enters the second optical waveguide 106 of the integrated temperature-controlled fiber optic gyroscope chip, and passes through the gyroscope modulation unit 30 and the optical signal processing unit 20 in sequence to form a first optical signal and a second optical signal; then the first optical signal and the second optical signal can enter the polarization-maintaining fiber optic coil through the fiber optic coil interface unit 40.

[0158] By combining a light source with a fiber optic gyroscope chip that integrates temperature control, optical signal splitting and preliminary temperature sensing functions are achieved. This allows the fiber optic gyroscope system to simultaneously acquire temperature data while obtaining gyroscope rotation information, thus enabling more accurate temperature drift compensation.

[0159] S202, the first optical signal and the second optical signal pass through the polarization-maintaining fiber coil to form a gyroscope interference optical signal.

[0160] In some embodiments, when the first optical signal and the second optical signal enter the polarization-maintaining fiber coil through the third edge coupler 401 and the fourth edge coupler 402 in the fiber coil interface unit 40, respectively, and propagate along different directions of the polarization-maintaining fiber coil, the phase difference caused by rotation is preserved and amplified, thereby forming a gyroscopic interference optical signal.

[0161] S203 converts the optical signal of the gyroscope interference into the electrical signal of the gyroscope interference.

[0162] In some embodiments, the process of converting the gyro interference optical signal into a gyro interference electrical signal may include: a gyro detector converting the gyro interference optical signal into a gyro interference electrical signal. Here, the gyro interference optical signal contains information about the rotation angle. To convert the gyro interference optical signal into a processable electrical signal, it can be done using a gyro detector.

[0163] For example, the gyroscope detector converts the gyroscope interference optical signal into an electrical signal in the form of current or voltage, thereby facilitating subsequent processing of the gyroscope interference electrical signal. The gyroscope interference electrical signal is an analog signal output by the gyroscope detector, and its amplitude and frequency reflect the angular velocity or angular increment of the gyroscope. To improve the signal-to-noise ratio and signal quality, the gyroscope detector can be configured with a preamplifier to enhance the strength of weak signals.

[0164] S204 demodulates and processes the gyroscope interference electrical signal to obtain the first gyroscope data.

[0165] The first gyroscope data includes angular velocity or angular increment. Angular velocity refers to the rate of change of rotation angle per unit time, which can be expressed in radians per second (rad / s). Angular increment refers to the cumulative value of the total rotation angle over a certain time period, which can be used to describe the rotation state over a longer period. Exemplarily, angular velocity and angular increment can be used in combination in some scenarios, and this application does not limit this.

[0166] In some embodiments, the gyroscope signal processing module in the electronic signal processing unit demodulates and processes the gyroscope interference electrical signal to obtain the first gyroscope data.

[0167] Here, demodulation and signal processing refer to performing a series of mathematical operations and filtering on the gyroscope interference signal to extract rotation-related physical quantities, such as angular velocity or angular increment. Demodulation methods typically include orthogonal demodulation, Fourier transform, and digital integration. By demodulating and processing the gyroscope interference signal, the first gyroscope data can be obtained. This first gyroscope data can serve as the basic input for applications such as navigation, positioning, and attitude control. By introducing a temperature compensation mechanism, the stability and accuracy of the first gyroscope data can be further improved.

[0168] In this embodiment, by introducing a light source, a polarization-maintaining fiber optic coil, and a gyroscope detector into an integrated temperature-controlled fiber optic gyroscope chip, the generation, transmission, and detection of optical signals are achieved. This improves the measurement accuracy and stability of the gyroscope system, thereby reducing errors caused by changes in ambient temperature and significantly enhancing the long-term performance and adaptability of the fiber optic gyroscope.

[0169] In another embodiment of this disclosure, temperature drift compensation is performed based on the current temperature to obtain the compensated gyroscope output result, including: S301, determine the temperature drift compensation parameters corresponding to the current temperature based on the preset temperature compensation model.

[0170] Here, the temperature drift compensation parameters include zero bias correction and / or scale factor correction.

[0171] In some embodiments, the process of determining the temperature drift compensation parameters corresponding to the current temperature according to a preset temperature compensation model may include: the temperature drift compensation module in the electronic signal processing unit determining the temperature drift compensation parameters corresponding to the current temperature according to the preset temperature compensation model.

[0172] Here, the preset temperature compensation model refers to a set of mathematical functions or table data structures generated through multi-temperature calibration before the fiber optic gyroscope system leaves the factory. This model describes the relationship between the fiber optic gyroscope's zero bias and / or scaling factor and temperature. For example, the preset temperature compensation model can be constructed using linear fitting, polynomial fitting, neural network modeling, etc., to quickly obtain the corresponding temperature drift compensation parameters at different operating temperatures. For instance, the preset temperature compensation model could be a temperature-zero bias / scaling factor model.

[0173] By inputting the real-time measured current temperature into a preset temperature compensation model, the zero-bias correction and / or scaling factor correction at the current temperature can be obtained. This allows for precise compensation of the fiber optic gyroscope output signal, thereby reducing measurement errors caused by temperature variations.

[0174] Temperature drift compensation parameters refer to the set of correction values ​​set under specific temperature conditions to eliminate optical characteristic drift in the main optical path and modulation unit 30 of the fiber optic gyroscope caused by temperature changes. Among them, the zero-bias correction and / or scaling factor correction are used to adjust the constant deviation and scaling factor deviation in the fiber optic gyroscope output, respectively. For example, when the chip temperature rises, the refractive index of the optical signal changes, causing a systematic shift in the fiber optic gyroscope output signal. In this case, it is necessary to increase the zero-bias correction to compensate for the systematic shift. The purpose of temperature drift compensation parameters is to provide a dynamic correction mechanism so that the fiber optic gyroscope output maintains stability and consistency under different temperatures.

[0175] Zero-bias correction refers to the value used to correct the constant offset portion of the output signal of a fiber optic gyroscope under specific temperature conditions. Zero-bias drift refers to the phenomenon where a fiber optic gyroscope system outputs a non-zero average value even without an actual angular velocity input. Introducing zero-bias correction can effectively eliminate this deviation, making the fiber optic gyroscope system output closer to the true angular velocity value.

[0176] The scaling factor correction is a numerical value used to correct the proportional relationship of the output signal of a fiber optic gyroscope under specific temperature conditions. The scaling factor represents the linear proportional relationship between the input angular velocity and the output electrical signal. Scale factor drift leads to output distortion in the fiber optic gyroscope, meaning the same input angular velocity corresponds to different output values. This phenomenon of different output values ​​for the same input angular velocity is usually caused by changes in waveguide length, refractive index, or electro-optic coefficient due to temperature variations. By introducing a scaling factor correction, the proportional relationship can be dynamically adjusted at the software level, ensuring that the fiber optic gyroscope system maintains consistent sensitivity and accuracy across the entire temperature range.

[0177] The above methods can achieve precise compensation of the fiber optic gyroscope output signal, improve the long-term stability of the system, and enhance the system's adaptability in complex environments.

[0178] S302, the first gyroscope data is corrected according to the temperature drift compensation parameters to obtain the compensated gyroscope output result.

[0179] In some embodiments, the process of correcting the first gyroscope data according to the temperature drift compensation parameter to obtain the compensated gyroscope output result may include: the modulation drive / demodulation module in the electronic signal processing unit corrects the first gyroscope data according to the temperature drift compensation parameter to obtain the compensated gyroscope output result.

[0180] Correction processing refers to performing mathematical operations or logical adjustments on the data of the first fiber optic gyroscope based on the calculated temperature drift compensation parameters (such as zero bias correction and scaling factor correction) to eliminate systematic errors caused by temperature changes.

[0181] For example, after acquiring the first fiber optic gyroscope data, a zero-bias correction can be applied to subtract or add to the fixed offset portion of the first fiber optic gyroscope data; then, a scaling factor correction can be used to multiply and adjust the overall proportional relationship of the first fiber optic gyroscope data; finally, the compensated gyroscope output is output. For example, if the current fiber optic gyroscope detector reading is 1.2 rad / s and the zero-bias correction is 0.05 rad / s, then the corrected value should be 1.15 rad / s; if the scaling factor correction is 0.98, then the corrected value is multiplied by the scaling factor correction to obtain a final output of 1.13 rad / s.

[0182] In this embodiment, the fiber optic gyroscope system generates temperature drift compensation parameters based on a preset temperature compensation model, and corrects the first fiber optic gyroscope data according to these parameters. This eliminates system errors caused by temperature changes in real time, significantly improving the accuracy and stability of the fiber optic gyroscope system output, making the system suitable for high-precision navigation and measurement scenarios in various complex environments.

[0183] In another embodiment of this disclosure, after determining the temperature drift compensation parameter corresponding to the current temperature, the process includes: S401 generates a modulation drive signal based on temperature drift compensation parameters.

[0184] The parameters in the modulation drive signal include at least one of the following: drive voltage amplitude, bias voltage, and modulation waveform.

[0185] In some embodiments, the process of generating a modulation drive signal based on temperature drift compensation parameters may include: the temperature drift compensation module in the electronic signal processing unit generating the modulation drive signal based on the temperature drift compensation parameters.

[0186] Here, the modulation drive signal is used to drive the gyroscope modulation unit 30 to perform phase modulation, ensuring that the modulation process operates at the optimal operating point. Exemplarily, the modulation drive signal includes at least the drive voltage amplitude, bias voltage, and modulation waveform. For example, in a fiber optic gyroscope system, the modulation drive signal can be in the form of a sine wave or a square wave, and the modulation efficiency and linearity can be optimized by adjusting the amplitude and bias of the modulation drive signal.

[0187] S402 applies a modulation drive signal to the gyroscope modulation unit in the fiber optic gyroscope chip with integrated temperature control to generate a modulation electric field.

[0188] In some embodiments, the process of applying a modulation drive signal to the gyroscope modulation unit 30 in the integrated temperature-controlled fiber optic gyroscope chip to generate a modulation electric field may include the modulation drive / demodulation module applying a modulation drive signal to the gyroscope modulation unit 30 in the integrated temperature-controlled fiber optic gyroscope chip to generate a modulation electric field.

[0189] When a modulation drive signal is applied to the gyroscope modulation unit 30, an electric field, i.e. a modulation electric field, is generated within the thin-film lithium niobate layer and distributed along the optical path. The intensity and distribution of the modulation electric field determine the phase change experienced by the optical signal as it passes through the modulation region, thereby affecting the stability and accuracy of the gyroscope output signal.

[0190] S403 uses a modulation electric field to modulate the phase of an optical signal so that the phase modulation operating point of the optical signal fluctuates within a preset range.

[0191] Here, phase modulation refers to changing the phase state of an optical signal by modulating an electric field, ensuring that the phase modulation operating point of the optical signal fluctuates within a preset range to maintain the optimal performance of the gyroscope system. The phase modulation operating point is the position point where the phase change of the optical signal achieves optimal sensitivity and linearity during modulation. The preset range can be set according to the design requirements of the fiber optic gyroscope system and can be optimized through factory calibration and long-term operating data. For example, for a fiber optic gyroscope operating over a wide temperature range, the preset range might be designed to be ±π / 2 to ensure a stable interference signal at different temperatures.

[0192] In this embodiment, by generating a modulation drive signal and applying it to the gyroscope modulation unit 30 to produce a modulation electric field, and using the modulation electric field to perform phase modulation on the optical signal, it can be ensured that the phase modulation operating point of the optical signal fluctuates within a preset range. Since the phase modulation operating point of the optical signal is controlled to fluctuate within the preset range, the measurement accuracy and stability of the fiber optic gyroscope under different temperature conditions can be improved. This effectively compensates for zero bias and scale factor drift caused by temperature, thereby improving the overall system reliability and environmental adaptability.

[0193] like Figure 6 As shown, the temperature measurement and temperature drift compensation method based on the above system in this embodiment may include the following steps: S601: System power-on initialization.

[0194] The external light source is activated and outputs a stable light signal. The electronic signal processing unit and each detection unit complete self-testing and parameter initialization. The modulation / demodulation module sets the initial drive parameters according to the preset working mode.

[0195] S602: Optical signal injection integrated chip.

[0196] The optical signal output by the light source is injected into the signal transceiver unit 10 through the light source connection port 1 and the first edge coupler 101, and the optical signal is formed into forward propagating light in the second optical waveguide 106 through the first beam combiner 103.

[0197] S603: The gyroscope's main optical path enters the working state.

[0198] The optical signal in the second optical waveguide 106 passes sequentially through the gyroscope modulation unit 30, the first polarizer 201, and the first beam splitter 202. After being split into two paths, the optical signal enters the polarization-maintaining fiber coil through the third edge coupler 401 and the fourth edge coupler 402, respectively. The optical signal propagates back and forth in opposite directions in the fiber core. The optical signal is affected by the Sagnac effect, forming a phase difference. The optical signal then returns to the gyroscope detector connection port 2 through the polarization-maintaining fiber coil and the integrated temperature-controlled fiber optic gyroscope chip. The external gyroscope detector converts the gyroscope interference optical signal into a gyroscope interference electrical signal.

[0199] S604: On-chip temperature measurement channel in operation.

[0200] Simultaneously, the first optical signal split from the second optical waveguide 106 enters the first optical waveguide 104 and optically couples with the on-chip temperature-sensitive microring resonator 501. When the temperature changes, the resonance condition of the on-chip temperature-sensitive microring resonator 501 changes, causing a change in the spectrum or light intensity distribution output from the first grating coupler 502. The temperature detector receives the temperature detection optical signal output from the first grating coupler 502 and outputs a corresponding temperature detection electrical signal.

[0201] S605: Temperature calculation for the core area of ​​the chip.

[0202] The temperature calculation module in the electronic signal processing unit calculates the temperature in the region where the on-chip temperature-sensitive microring resonator 501 is located in real time, based on the temperature detection electrical signal output by the temperature detector and combined with the preset mapping relationship obtained from factory calibration (such as temperature-spectrum mapping relationship or temperature-electrical signal mapping relationship). Since the region where the on-chip temperature-sensitive microring resonator 501 is located is adjacent to the gyroscope modulation unit 30, the temperature of the region where the on-chip temperature-sensitive microring resonator 501 is located can be considered to represent the actual temperature of the chip core region.

[0203] S606: Temperature drift compensation amount generation.

[0204] The temperature drift compensation module calculates the corresponding zero bias correction and / or scaling factor correction based on the current temperature and a preset temperature compensation model (such as a temperature-zero bias / scaling factor model), thus forming the temperature drift compensation parameters.

[0205] S607: Temperature drift compensation for gyroscope output.

[0206] The electronic signal processing unit performs a compensation operation based on the temperature drift compensation parameters. For example, the modulation drive / demodulation module in the electronic signal processing unit adjusts the amplitude, bias, or modulation waveform of the driving voltage between the signal electrode 6 and the ground electrode 5, so that the gyroscope modulation unit 30 operates at the optimal point after temperature drift compensation; and / or adjusts the modulation drive / demodulation module to digitally correct the first gyroscope data output by the gyroscope signal processing module, thereby obtaining the compensated gyroscope output result.

[0207] In some embodiments, S104→S107 can be supplemented as follows: S104 calculates Tcore based on the position of the resonance peak / valley; S105 obtains b(T) and k(T) by looking up a table / fitting; S106 outputs the compensated angular velocity / angular increment; S107 optionally adjusts the drive parameters in a closed loop to maintain the optimal operating point.

[0208] In this embodiment, the light source is first received and an optical signal is formed by the signal transceiver unit 10. Then, the current temperature information of the chip is obtained by the on-chip temperature-sensitive micro-ring resonator 501. Based on this temperature information, a modulation drive signal is generated to modulate the phase of the optical signal, thereby achieving temperature drift compensation. Simultaneously, the optical signal enters the polarization-maintaining fiber coil after polarization and beam splitting to form a gyroscope interference signal. Finally, the compensated gyroscope output result is obtained through the gyroscope detector. In this way, on the one hand, by integrating the temperature-sensitive micro-ring resonator inside the chip, the actual temperature of the core area of ​​the chip can be directly measured, avoiding the temperature measurement error caused by the spatial position difference and thermal conduction hysteresis of the external temperature sensor, thus improving the temperature measurement accuracy. On the other hand, the closed-loop compensation of the gyroscope modulation unit 30 based on the real-time measured temperature information effectively reduces the impact of ambient temperature changes on the gyroscope zero bias and scaling factor, improving the long-term stability and environmental adaptability of the gyroscope.

[0209] For details not disclosed in the embodiments of this disclosure, please refer to the description of the foregoing embodiments for understanding.

[0210] The above are merely preferred embodiments of this disclosure and are not intended to limit the scope of protection of this disclosure.

[0211] It should be noted that, in this disclosure, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0212] The sequence numbers of the embodiments disclosed above are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0213] The methods disclosed in the several method embodiments provided in this disclosure can be arbitrarily combined without conflict to obtain new method embodiments.

[0214] The features disclosed in the several product embodiments provided in this disclosure can be combined arbitrarily without conflict to obtain new product embodiments.

[0215] The features disclosed in the several method or device embodiments provided in this disclosure can be arbitrarily combined without conflict to obtain new method or device embodiments.

[0216] The above are merely specific embodiments of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

[0217] It should be understood that if this disclosure references any user data and personal information (including but not limited to device information, behavioral data, location information, etc.) and before applying the technical solutions described in the embodiments of this disclosure, the relevant products or services should comply with the laws and regulations concerning the protection of user data and personal information, strictly process users' personal information and data in accordance with the provisions of applicable laws and regulations throughout the entire data processing lifecycle, follow the principles of legality, legitimacy, necessity, good faith, openness, and transparency, and adopt reasonable privacy design schemes and technical measures to ensure the security of user data and personal information, protect users' legitimate rights and interests, and prevent the risks of leakage, theft, or tampering of user data and personal information.

[0218] Specifically, the company must publish and display its privacy policy in a prominent position on the user interface, clearly informing users of the types, purposes, uses, and methods of processing personal information, as well as other matters that should be disclosed as required by laws and regulations; obtain users' prior informed consent or explicit authorization for data processing through user-initiated interaction (such as confirmation pop-ups); process or store user data securely within the legally required timeframe; adopt a series of security technologies and management measures, including but not limited to data encryption and access control; share and transfer user data within the scope permitted by law and in a legally required manner; and process user rights, including the rights to query, access, correct, delete, withdraw authorization and consent, cancel registration, and obtain copies of personal information, within the legally required timeframe.

Claims

1. A fiber optic gyroscope chip with integrated temperature control, characterized in that, The system includes a signal transceiver unit, a gyroscope modulation unit, an optical signal processing unit, an optical fiber coil interface unit, and an on-chip temperature-sensitive microring resonator. The signal transceiver unit is optically connected to both the optical signal processing unit and the on-chip temperature-sensitive microring resonator. The optical signal processing unit is optically connected to the optical fiber coil interface unit. The gyroscope modulation unit is positioned above the modulation section of the optical waveguide in the signal transceiver unit. The distance between the on-chip temperature-sensitive microring resonator and the gyroscope modulation unit is less than or equal to a first threshold value. The signal transceiver unit is used to receive a light source and generate an optical signal based on the light source. The on-chip temperature-sensitive microring resonator is used to form a first transmission spectrum based on the optical signal; The first transmission spectrum is used to determine the current temperature of the fiber optic gyroscope chip with integrated temperature control; The gyroscope modulation unit is used to generate a modulation electric field in response to a modulation drive signal, and to use the modulation electric field to perform phase modulation on the optical signal. The modulation drive signal is generated after temperature drift compensation based on the current temperature. The optical signal processing unit is used to polarize and split the modulated optical signal to form a first optical signal and a second optical signal. The fiber optic coil interface unit is used to transmit the first optical signal and the second optical signal to the polarization-maintaining fiber optic coil to form a gyroscope interference optical signal, which is then output through the optical signal processing unit and the signal transceiver unit, so that the gyroscope detector can obtain the compensated gyroscope output result based on the gyroscope interference optical signal.

2. The chip according to claim 1, characterized in that, The signal transceiver unit includes a first optical waveguide, which is coupled to the on-chip temperature-sensitive microring resonator. The first optical waveguide is used to transmit a first optical signal in the optical signal to the on-chip temperature-sensitive microring resonator.

3. The chip according to claim 2, characterized in that, The fiber optic gyroscope chip with integrated temperature control also includes a first grating coupler, which is connected to the output end of the first optical waveguide. The first grating coupler is used to couple the first transmission spectrum to form a temperature detection optical signal; the temperature detection optical signal is used to determine the current temperature.

4. The chip according to claim 2, characterized in that, The signal transceiver unit further includes a second optical waveguide and a ring optical resonator, the ring optical resonator being laterally coupled to the first optical waveguide and the second optical waveguide respectively; the gyroscope modulation unit is disposed above the modulation section of the second optical waveguide; The second optical waveguide is used to transmit the optical signal through the gyroscope modulation unit, the optical signal processing unit and the optical fiber coil interface unit to the polarization-maintaining optical fiber coil to form the gyroscope interference optical signal; The annular optical resonant cavity is used to couple the first optical signal transmitted in the second optical waveguide to the first optical waveguide, wherein the first optical signal is a portion of the optical signal transmitted in the second optical waveguide.

5. The chip according to claim 4, characterized in that, The gyroscope modulation unit includes a modulation section first ground electrode, a modulation section second ground electrode, and a modulation section first signal electrode; the modulation section first ground electrode, the modulation section first signal electrode, and the modulation section second ground electrode are arranged side by side along the propagation direction of the second optical waveguide, and the modulation section first signal electrode is located between the modulation section first ground electrode and the modulation section second ground electrode; The first ground electrode of the modulation section, the second ground electrode of the modulation section, and the first signal electrode of the modulation section are used to generate a modulation electric field to perform phase modulation on the optical signal propagating in the second optical waveguide.

6. The chip according to claim 5, characterized in that, The first ground electrode and the second ground electrode of the modulation segment are both connected to the ground electrode; the first signal electrode of the modulation segment is connected to the signal electrode. The first ground electrode of the modulation segment, the second ground electrode of the modulation segment, and the first signal electrode of the modulation segment are further configured to generate the modulation electric field when a driving voltage is applied between the signal electrode and the ground electrode, so as to use the modulation electric field to perform phase modulation on the optical signal propagating in the second optical waveguide.

7. The chip according to claim 4, characterized in that, The signal transceiver unit further includes a light source connection port, a gyroscope detector connection port, a first edge coupler, a second edge coupler, and a first beam combiner; the light source connection port is connected to the first edge coupler; the gyroscope detector connection port is connected to the second edge coupler; and the first beam combiner is connected to the first edge coupler and the second edge coupler respectively through the second optical waveguide. The light source connection port is used to receive the light source; The gyroscope detector connection port is used to output the gyroscope interference light signal to the gyroscope detector; The first edge coupler is used to receive light from the light source connection port, form an optical signal, and couple the optical signal to the third optical waveguide; The second edge coupler is also used to receive the gyroscope interference optical signal transmitted by the fourth optical waveguide and to transmit the gyroscope interference optical signal to the gyroscope detector connection port; A first beam combiner is used to combine the third and fourth optical waveguides into the second optical waveguide.

8. The chip according to claim 3, characterized in that, The optical signal processing unit includes a first polarizer and a first beam splitter arranged sequentially along the propagation direction of the second optical waveguide. The first polarizer is used to polarize the optical signal transmitted in the second optical waveguide to obtain the polarized optical signal. The second beam splitter is used to split the polarized optical signal into a first optical signal and a second optical signal; the first optical signal is transmitted through the fifth optical waveguide, and the second optical signal is transmitted through the sixth optical waveguide.

9. The chip according to claim 8, characterized in that, The fiber optic coil interface unit includes a third edge coupler and a fourth edge coupler; the input end of the third edge coupler is connected to the fifth optical waveguide; the input end of the fourth edge coupler is connected to the sixth optical waveguide; the output end of the third edge coupler is coupled to the polarization-maintaining fiber coil through a first polarization-maintaining fiber interface; and the output end of the fourth edge coupler is coupled to the polarization-maintaining fiber coil through a second polarization-maintaining fiber interface. The third edge coupler and the fourth edge coupler are respectively used to transmit the first optical signal transmitted by the fifth optical waveguide and the second optical signal transmitted by the sixth optical waveguide to the polarization-maintaining fiber coil through the first polarization-maintaining fiber interface and the second polarization-maintaining fiber interface to form a gyroscope interference optical signal.

10. The chip according to claim 2, characterized in that, The first optical waveguide is laterally coupled to the ring optical resonator in the first coupling region and to the on-chip temperature-sensitive micro-ring resonator in the second coupling region. The positions of the first coupling region and the second coupling region are different.

11. A temperature compensation method, characterized in that, The method includes: The first optical signal passes through the on-chip temperature-sensitive microring resonant cavity in the integrated temperature-controlled fiber optic gyroscope chip to form a first transmission spectrum. Based on the first transmission spectrum, a temperature detection electrical signal is obtained; Based on the temperature detection electrical signal and the preset mapping relationship, the current temperature of the fiber optic gyroscope chip with integrated temperature control is determined. The preset mapping relationship is used to characterize the correspondence between temperature and temperature detection electrical signal. Temperature drift compensation is performed based on the current temperature to obtain the compensated gyroscope output result.

12. The method according to claim 11, characterized in that, The method further includes: The light source generates a first optical signal and a second optical signal through the integrated temperature-controlled fiber optic gyroscope chip; The first optical signal and the second optical signal pass through a polarization-maintaining fiber coil to form a gyroscope interference optical signal; The optical interference signal of the gyroscope is converted to obtain the electrical interference signal of the gyroscope; The gyroscope interference signal is demodulated and processed to obtain first gyroscope data; the first gyroscope data includes angular velocity or angular increment.

13. The method according to claim 12, characterized in that, The temperature drift compensation based on the current temperature, to obtain the compensated gyroscope output result, includes: Based on a preset temperature compensation model, the temperature drift compensation parameters corresponding to the current temperature are determined; the temperature drift compensation parameters include zero bias correction and / or scaling factor correction. The first gyroscope data is corrected according to the temperature drift compensation parameters to obtain the compensated gyroscope output result.

14. The method according to claim 13, characterized in that, After determining the temperature drift compensation parameter corresponding to the current temperature, the method further includes: Based on the temperature drift compensation parameters, a modulation drive signal is generated; the parameters in the modulation drive signal include at least one of the drive voltage amplitude, bias voltage, and modulation waveform. The modulation drive signal is applied to the gyroscope modulation unit in the integrated temperature-controlled fiber optic gyroscope chip to generate a modulation electric field; The optical signal is phase-modulated using the modulation electric field so that the phase modulation operating point of the optical signal fluctuates within a preset range.

15. The method according to claim 11, characterized in that, The step of obtaining the temperature detection electrical signal based on the first transmission spectrum includes: The first transmission spectrum is coupled out via the first grating coupler in the integrated temperature-controlled fiber optic gyroscope chip to form a temperature detection optical signal; The temperature detection optical signal is converted to obtain the temperature detection electrical signal.

16. A fiber optic gyroscope system, characterized in that, It includes an integrated temperature-controlled fiber optic gyroscope chip, a temperature detector, and an electronic signal processing unit as described in any one of claims 1-10; the integrated temperature-controlled fiber optic gyroscope chip is electrically connected to the temperature detector and the electronic signal processing unit, respectively. The integrated temperature-controlled fiber optic gyroscope chip is used to generate a temperature detection optical signal; The temperature detector is used to acquire a temperature detection optical signal and generate a temperature detection electrical signal based on the temperature detection optical signal. The electronic signal processing unit is used to determine the current temperature of the fiber optic gyroscope chip with integrated temperature control based on the temperature detection electrical signal and a preset mapping relationship, wherein the preset mapping relationship is used to characterize the correspondence between temperature and temperature detection electrical signal. And based on the current temperature, temperature drift compensation is performed to obtain the compensated gyroscope output result.

17. The system according to claim 16, characterized in that, The system also includes a polarization-maintaining fiber optic coil and a gyroscope detector; the first and second ends of the polarization-maintaining fiber optic coil are respectively connected to the integrated temperature-controlled fiber optic gyroscope chip, and the gyroscope detector is respectively connected to the integrated temperature-controlled fiber optic gyroscope chip and the electronic signal processing unit. The fiber optic gyroscope chip with integrated temperature control is also used to generate a first optical signal and a second optical signal. The polarization-maintaining fiber coil is used to receive the first optical signal and the second optical signal, and to form a gyroscope interference optical signal based on the first optical signal and the second optical signal; The gyroscope detector is used to detect the gyroscope interference optical signal and convert the gyroscope interference optical signal to obtain the gyroscope interference electrical signal; The electronic signal processing unit is used to demodulate and process the gyroscope interference signal to obtain first gyroscope data; determine the temperature drift compensation parameter corresponding to the current temperature according to a preset temperature compensation model; and perform correction processing on the first gyroscope data according to the temperature drift compensation parameter to obtain the compensated gyroscope output result; wherein, the first gyroscope data includes angular velocity or angular increment; and the temperature drift compensation parameter includes zero bias correction and / or scaling factor correction.

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