Method for utilizing time domain method to make difference measurement of accurate reconfiguration

Abstract

The method for making accurate restructure of difference measurement by using time domain is characterized by that according to the difference value obtained by measuring two different separation distances or shearing quanties of measured object, respectively using successive two-point method to evaluate two groups of different difference values, the number of evaluation curves obtained by every group is the ratio value of correspondent sensor separation distance or shearing quantity and sampling interval, then utilizing the interrelationship between two groups of the curves to calculate the influence of zero modulation error to the evaluation result so as to resolve the interrelationship between every curves in the two groups of curves, finally synthesizing these curves into an evaluation curve.

Description

Technical field:

[0001] The invention relates to the technical field of detection applications, in particular to a detection method for reconstructing the original measured parameters according to the differential measurement values ​​of the measured parameters, including the straightness, flatness, cylindricity, and free-form surface of precision and ultra-precision workpiece surfaces. Surface shape detection and wavefront reconstruction for transverse shear interference. Background technique

[0002] In ultra-precision machining, in order to detect the straightness, cylindricity, flatness and surface accuracy of the surface of the workpiece, the multi-probe scanning method is often used. This method uses the displacement probe (commonly used non-contact sensors such as eddy current or Capacitance, etc.) or angle detectors (such as autocollimators, etc.) are installed on the slide plate and move linearly along the measured contour of the workpiece, or the sensor is fixed, a...

Examples

Embodiment Construction

[0020] The invention accurately reconstructs the measured parameters through the time domain method according to the difference values ​​measured by two different distances or shearing amounts on the measured object. It firstly evaluates two groups of different differential values ​​with the successive two-point method, and the number of evaluation curves obtained by each group is the ratio of the corresponding sensor spacing or shear volume sampling interval, and then uses the difference between the two groups of curves Calculate the influence of the zero adjustment error on the evaluation results, find out the relationship between each curve in the two sets of curves, and finally combine these curves into an evaluation curve. This method itself can be applied to the general situation when the size of the measured piece is not an integer multiple of the product of the two sensor spacing or the shear amount, such as the sampling interval is not equal to the sensor spacing or th...

Technical field:

[0001] The invention relates to the technical field of detection applications, in particular to a detection method for reconstructing the original measured parameters according to the differential measurement values ​​of the measured parameters, including the straightness, flatness, cylindricity, and free-form surface of precision and ultra-precision workpiece surfaces. Surface shape detection and wavefront reconstruction for transverse shear interference. Background technique

[0002] In ultra-precision machining, in order to detect the straightness, cylindricity, flatness and surface accuracy of the surface of the workpiece, the multi-probe scanning method is often used. This method uses the displacement probe (commonly used non-contact sensors such as eddy current or Capacitance, etc.) or angle detectors (such as autocollimators, etc.) are installed on the slide plate and move linearly along the measured contour of the workpiece, or the sensor is fixed, a...

Examples

Embodiment Construction

[0020] The invention accurately reconstructs the measured parameters through the time domain method according to the difference values ​​measured by two different distances or shearing amounts on the measured object. It firstly evaluates two groups of different differential values ​​with the successive two-point method, and the number of evaluation curves obtained by each group is the ratio of the corresponding sensor spacing or shear volume sampling interval, and then uses the difference between the two groups of curves Calculate the influence of the zero adjustment error on the evaluation results, find out the relationship between each curve in the two sets of curves, and finally combine these curves into an evaluation curve. This method itself can be applied to the general situation when the size of the measured piece is not an integer multiple of the product of the two sensor spacing or the shear amount, such as the sampling interval is not equal to the sensor spacing or th...

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