Parylene coating equipment

Abstract

The utility model discloses parylene coating equipment, which belongs to the technical field of coating equipment and comprises a box body, a spraying mechanism arranged on the box body, a box door rotationally mounted on the box body and a clamping mechanism arranged on the box body and used for clamping workpieces, the clamping mechanism comprises a first clamping block rotationally mounted in the box body, a driving motor arranged on the box body and used for driving the first clamping block to rotate, a mounting frame fixedly mounted on the box body, and a mounting ring fixedly mounted on the box body through the mounting frame; the inserting rod sequentially penetrates through the mounting ring and the box body and is rotationally mounted on the box body; the second clamping block is fixedly mounted at one end, close to the box body, of the inserting rod and is matched with the first clamping block; through cooperative use of the devices, when an operator carries out film coating on a workpiece, the workpiece is clamped by the two clamping blocks and is driven to rotate at the same time, so that multiple surfaces of the workpiece are coated with films, and the film coating uniformity of the workpiece is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to a parylene coating equipment. Background Art

[0002] Parylene is prepared by a unique vacuum vapor deposition process. Active small molecules "grow" a completely solid polymer film coating on the surface of the substrate. It has performance advantages that are difficult to match with other coatings. In order to prevent problems such as oxidation and solvent corrosion on the surface of the workpiece, the surface of the workpiece is generally coated with a protective coating. The uniformity of the workpiece coating determines the service life of the workpiece.

[0003] Upon investigation, a Chinese utility model patent discloses a high-airtightness Parylene vacuum nano-coating equipment (publication number: CN212189712U), including a sealing plate and a cylinder, the bottom of the sealing plate is fixedly connected to the shell, and a bottom box is installed at the bottom of the shell, and a fixed bracket is installed inside the shell, and an insert block is fixedly connected inside the fixed bracket, a base plate is installed on the insert block, a cross plate is installed on the upper side of the fixed bracket, and the lower right side of the fixed bracket is fixedly connected to the universal wheel, and the bottom of the fixed bracket is fixedly connected to the shaft rod, and the end of the shaft rod is fixedly connected to the rotating gear through a bearing through a power box, the upper end of the vacuum tube is arranged inside the shell, and the lower end of the vacuum tube is fixedly connected to the vacuum device inside the bottom box; the telescopic rod of the cylinder is fixedly connected to the power box.

[0004] Although the above patent can perform coating operations on multiple groups of substrates at the same time through the setting of worm gears and rotating gears, when it is necessary to coat both sides of the substrate, the above device can only complete the coating once, turn the substrate in the direction, and then re-fix it on the fixed bracket to coat the other side of the substrate. The operation is cumbersome and reduces the coating efficiency.

[0005] Therefore, the utility model provides a parylene coating device to solve the above problems. Utility Model Content

[0006] 1. Technical issues to be solved

[0007] The utility model provides a parylene coating device, aiming to solve the problems mentioned in the background technology that the existing coating device needs to turn the substrate around after completing one coating, and then re-fix it on a fixed bracket before coating the other side of the substrate, which is cumbersome to operate and reduces the coating efficiency.

[0008] (II) Technical solution

[0009] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a parylene coating device, which includes a box body and a spray mechanism arranged on the box body, the coating device also includes a box door rotatably installed on the box body and a clamping mechanism arranged on the box body for clamping a workpiece.

[0010] The clamping mechanism includes a first clamping block rotatably installed inside the box, a driving motor arranged on the box for driving the first clamping block to rotate, a mounting frame fixedly installed on the box, a mounting ring fixedly installed on the box through the mounting frame, a plug-in rod which passes through the mounting ring and the box in sequence and is rotatably installed on the box, and a second clamping block fixedly installed on the plug-in rod near one end of the box and adapted to the first clamping block, so that when the workpiece is sprayed, the driving motor drives the workpiece to rotate, so that the workpiece is evenly coated by the spraying mechanism.

[0011] As a preferred technical solution of the present application, the clamping mechanism also includes a limit block that penetrates the box body and is rotatably connected to the second clamping block at one end close to the box body. A limit mechanism for limiting the sliding of the plug-in rod is provided on the mounting ring, so that the second clamping block is not easily offset during rotation.

[0012] As a preferred technical solution of the present application, the limiting mechanism includes a mounting block fixedly mounted on a mounting ring, a sliding plate slidably mounted on the mounting block, a sliding rod penetrating the mounting block and fixedly connected to the sliding plate, a clamping block fixedly mounted on the sliding rod, a clamping groove provided on the plug-in rod for clamping the clamping block, and a pressure spring mounted on the sliding rod for pressing the sliding plate, wherein the two ends of the pressure spring are respectively fixedly connected to the mounting block and the sliding plate, so that the plug-in rod is limited by the clamping block when in use and is not easily offset.

[0013] As a preferred technical solution of the present application, a sealing member for sealing the inner cavity of the box is provided on the plug-in rod, so that the material is not easy to leak out of the box.

[0014] As a preferred technical solution of the present application, a plurality of limit blocks are provided, and at least two limit blocks are symmetrically arranged on both sides of the plug-in rod to improve the stability of the second clamping block during rotation.

[0015] (III) Beneficial effects

[0016] The utility model has a simple structure and is easy to use. Through the arrangement of the first clamping block, the second clamping block and the plug-in rod, when the operator is coating the workpiece, the workpiece is clamped by the two clamping blocks and the workpiece is driven to rotate, so that multiple surfaces of the workpiece are coated, thereby improving the uniformity of the workpiece coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a parylene coating device;

[0018] Figure 2 This is a schematic diagram of the structure of a chamber door in a Parylene coating device;

[0019] Figure 3 A cross-sectional view of a box in a parylene coating device;

[0020] Figure 4 It is a structural schematic diagram of a second clamping block in a parylene coating device;

[0021] Figure 5 for Figure 3 A is an enlarged schematic diagram.

[0022] In the figure:

[0023] 1. Box body; 11. Box door;

[0024] 2. Spraying mechanism;

[0025] 3. Clamping mechanism; 31. First clamping block; 32. Driving motor; 33. Mounting frame; 34. Mounting ring; 35. Connecting rod; 36. Second clamping block; 37. Limiting block;

[0026] 4. Limiting mechanism; 41. Mounting block; 42. Sliding plate; 43. Sliding rod; 44. Clamping block; 45. Clamping groove; 46. Pressing spring;

[0027] 5. Seals. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] The utility model provides a parylene coating device, such as Figure 1 , Figure 2 and Figure 3 As shown, the coating equipment includes a box body 1 and a spray mechanism 2 arranged on the box body 1. The coating equipment also includes a box door 11 rotatably mounted on the box body 1 and a clamping mechanism 3 arranged on the box body 1 for clamping a workpiece.

[0030] The clamping mechanism 3 includes a first clamping block 31 rotatably mounted inside the box body 1, a driving motor 32 arranged on the box body 1 for driving the first clamping block 31 to rotate, a mounting frame 33 fixedly mounted on the box body 1, a mounting ring 34 fixedly mounted on the box body 1 through the mounting frame 33, a plug-in rod 35 that passes through the mounting ring 34 and the box body 1 in sequence and is rotatably mounted on the box body 1, and a second clamping block 36 fixedly mounted on the plug-in rod 35 at one end close to the box body 1 and adapted to the first clamping block 31.

[0031] Before using the device to coat the workpiece, open the box door 11, push the plug rod 35, the plug rod 35 moves on the mounting ring 34, and drives the second clamping block 36 to move in the box body 1, and adjust the distance between the first clamping block 31 and the second clamping block 36 so that the first clamping block 31 and the second clamping block 36 are convenient for clamping the workpiece. After the adjustment is completed, take the workpiece and insert it between the first clamping block 31 and the second clamping block 36, and then continue to push the plug rod 35 so that the second clamping block 36 squeezes the workpiece to complete the clamping of the workpiece, close the box door 11, start the spray mechanism 2, and perform the parylene coating operation on the workpiece. At the same time, start the drive motor 32, and the drive motor 32 drives the first clamping block 31 to rotate, so that multiple surfaces of the workpiece are sprayed by the spray mechanism 2, thereby improving the working efficiency of the parylene coating.

[0032] Furthermore, in order to prevent the second clamping block 36 from being easily deflected during rotation, Figure 3 As shown, the clamping mechanism 3 also includes a limiting block 37 that penetrates the box body 1 and is rotatably connected to the second clamping block 36 at one end close to the box body 1. The mounting ring 34 is provided with a limiting mechanism 4 for limiting the sliding of the plug rod 35.

[0033] After the first clamping block 31 and the second clamping block 36 clamp the workpiece, the first clamping block 31 drives the second clamping block 36 to rotate through the workpiece, and the limit block 37 slides in the second clamping block 36 to provide a limit for the rotation of the second clamping block 36, so that the second clamping block 36 is not easily offset during rotation, thereby improving the stability of the second clamping block 36 during rotation. At the same time, when the operator adjusts the position of the second clamping block 36 through the plug-in rod 35, it drives the limit block 37 to slide synchronously on the box body 1 for easy use.

[0034] Furthermore, in order to prevent the plug-in rod 35 from being easily deflected during rotation, Figure 5As shown, the limiting mechanism 4 includes a mounting block 41 fixedly mounted on the mounting ring 34, a sliding plate 42 slidably mounted on the mounting block 41, a sliding rod 43 penetrating the mounting block 41 and fixedly connected to the sliding plate 42, a clamping block 44 fixedly mounted on the sliding rod 43, a clamping groove 45 provided on the plug-in rod 35 for clamping the clamping block 44, and a pressing spring 46 sleeved on the sliding rod 43 for pressing the sliding plate 42, wherein both ends of the pressing spring 46 are fixedly connected to the mounting block 41 and the sliding plate 42, respectively.

[0035] When it is necessary to slide the plug rod 35, the operator moves the sliding plate 42 so that the sliding plate 42 drives the sliding rod 43 to move upward, and the pressing spring 46 is compressed, thereby driving the clamping block 44 to disengage from the plug rod 35, releasing the limit on the plug rod 35, and then the operator synchronously slides the plug rod 35 to adjust the position of the second clamping block 36. After the adjustment is completed, the sliding plate 42 is released, and the pressing spring 46 pushes the sliding plate 42 to reset, so that the clamping block 44 contacts the clamping groove 45 on the plug rod 35, limiting the plug rod 35 for easy use.

[0036] It should be noted that, in order to improve the airtightness of the inner cavity of the box body 1 , a sealing member 5 for sealing the inner cavity of the box body 1 is provided on the plug-in rod 35 .

[0037] The sealing member 5 is provided to improve the sealing performance of the connection between the plug rod 35 and the housing 1 , so that when the plug rod 35 rotates, the parylene inside the housing 1 is not easily leaked from the gap between the plug rod 35 and the housing 1 .

[0038] Furthermore, in order to improve the stability of the second clamping block 36 during rotation, as shown in FIG. Figure 4 As shown, there are multiple limit blocks 37 , and at least two limit blocks 37 are symmetrically arranged on both sides of the plug-in rod 35 .

[0039] When the second clamping block 36 rotates, the two limiting blocks 37 limit the second clamping block 36 so that the second clamping block 36 is not easily deviated when rotating.

[0040] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A parylene coating device, comprising a housing (1) and a spray mechanism (2) disposed on the housing (1), characterized in that: The coating device further comprises a box door (11) rotatably mounted on the box body (1) and a clamping mechanism (3) arranged on the box body (1) for clamping a workpiece; The clamping mechanism (3) comprises a first clamping block (31) rotatably mounted inside a box body (1), a driving motor (32) arranged on the box body (1) for driving the first clamping block (31) to rotate, a mounting frame (33) fixedly mounted on the box body (1), a mounting ring (34) fixedly mounted on the box body (1) via the mounting frame (33), a plug-in rod (35) which passes through the mounting ring (34) and the box body (1) in sequence and is rotatably mounted on the box body (1), and a second clamping block (36) fixedly mounted on one end of the plug-in rod (35) close to the box body (1) and adapted to the first clamping block (31).

2. The Parylene coating device according to claim 1, characterized in that: The clamping mechanism (3) further comprises a limiting block (37) which penetrates the box body (1) and is rotatably connected to the second clamping block (36) at one end close to the box body (1). The mounting ring (34) is provided with a limiting mechanism (4) for limiting the sliding of the plug rod (35).

3. The Parylene coating device according to claim 2, characterized in that: The limiting mechanism (4) comprises a mounting block (41) fixedly mounted on a mounting ring (34), a sliding plate (42) slidably mounted on the mounting block (41), a sliding rod (43) penetrating the mounting block (41) and fixedly connected to the sliding plate (42), a clamping block (44) fixedly mounted on the sliding rod (43), a clamping groove (45) provided on the plug-in rod (35) for clamping the clamping block (44), and a pressing spring (46) sleeved on the sliding rod (43) for pressing the sliding plate (42), wherein two ends of the pressing spring (46) are respectively fixedly connected to the mounting block (41) and the sliding plate (42).

4. The Parylene coating device according to claim 1, characterized in that: The plug-in rod (35) is provided with a sealing member (5) for sealing the inner cavity of the box body (1).

5. The Parylene coating device according to claim 2, characterized in that: A plurality of the limit blocks (37) are provided, and at least two of the limit blocks (37) are symmetrically arranged on both sides of the plug-in rod (35).

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