Self-suction type rotary slicing device for water-jet guided laser

Abstract

The utility model relates to a self-suction type rotary slicing device for water-jet guided laser, which belongs to the technical field of water-jet guided laser processing and is characterized in that a rotary exhaust pipe of a rotary mechanism is used as a rotary main shaft of the slicing device and is driven by a driving mechanism; the negative pressure generating mechanism is provided with a conical adsorption nozzle, the conical adsorption nozzle synchronously rotates along with the rotary exhaust pipe, air is supplied through external air supply equipment, and the air passes through the conical air guide end of the conical adsorption nozzle and then is exhausted through the rotary exhaust pipe, so that negative pressure is formed on the adsorption end face of the conical adsorption nozzle to adsorb the workpiece to be sliced, and good clamping reliability is achieved. The swing mechanism is integrally arranged on the hinge mechanism, meanwhile, the hinge mechanism is in spherical contact with the base, the adsorption end face of the conical adsorption nozzle is parallel to the water-guided laser and the feeding direction of the water-guided laser through adjustment of the adjusting mechanism, and good adjusting precision is achieved; and the machining precision and the machining quality of the workpiece to be sliced are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of water-conducting laser processing, and in particular relates to a self-priming rotary slicing device for water-conducting laser. Background Art

[0002] With the rapid development of the manufacturing and aviation industries, the requirements for the slicing quality of ultra-hard and brittle materials and semiconductor materials are getting higher and higher, which puts higher requirements on processing technology. Water-guided laser processing technology uses a water jet to guide the laser beam to cut the workpiece to be processed. Due to the different refractive indices of water and air, when the laser beam irradiates the interface between water and air at a certain angle, if the incident angle of the laser beam is less than its critical angle of total reflection, the laser beam will be totally reflected and will not be transmitted, so that the laser energy is confined in the pure water column and propagates along the direction of the pure water column. The pure water column carrying the laser beam reaches the surface of the workpiece to be processed and removes the material by laser burning. At the same time, the pure water column also plays a role in removing impurities on the surface of the workpiece to be processed and cooling the processing area.

[0003] Since water-guided laser processing technology has the advantages of low processing loss, high processing surface quality and high processing efficiency, the requirements for clamping tooling are becoming higher and higher. Silicon carbide wafers are a typical material processed by water-guided laser processing technology. When there is an angle between the water-guided laser and its feed direction and the slice surface of the workpiece to be processed, the slicing seams will not be parallel, the surface roughness of the cut section will also be high, and higher processing losses will be generated. Therefore, in the process of slicing using water-guided laser, it is necessary to ensure that the water-guided laser, the feed direction of the water-guided laser and the slice surface of the workpiece to be processed are parallel, which puts higher adjustment accuracy requirements on the device used to clamp the workpiece to be processed. At the same time, during the slicing process, the impact of the pure water column will also cause the workpiece to be processed to shift, affecting the processing accuracy and processing quality, and even causing stress cracking of the wafer, which also puts higher requirements on the clamping reliability of the device used to clamp the workpiece to be processed.

[0004] Therefore, there is a need for a slicing device for water-guided laser with good adjustment accuracy and clamping reliability to improve the processing accuracy and processing quality of the workpiece to be sliced. Utility Model Content

[0005] In order to solve the above problems existing in the prior art, the utility model provides a self-priming rotary slicing device for water-guided laser. The technical problem to be solved by the utility model is achieved through the following technical solutions:

[0006] The utility model provides a self-priming rotary slicing device for water-guided laser, comprising: a base, an articulated mechanism, an adjusting mechanism, a driving mechanism, a rotary mechanism and a negative pressure generating mechanism; wherein the articulated mechanism is arranged on the base and contacts the spherical surface of the base; the rotary mechanism is arranged on the articulated mechanism, the driving mechanism is connected to the rotary mechanism through transmission, and is used to drive the rotary exhaust pipe of the rotary mechanism to rotate; the negative pressure generating mechanism is connected to an external air supply device through a compressed air inlet; the negative pressure generating mechanism comprises: a conical adsorption nozzle, the conical adsorption nozzle is coaxially connected to the rotary exhaust pipe, the compressed air inlet, the exhaust channel inside the rotary exhaust pipe and the conical air guide part of the conical adsorption nozzle are connected; the outer side surface of the conical air guide part is a conical surface, and an adsorption end face is arranged at one end of the conical adsorption nozzle away from the conical air guide part, and the workpiece to be sliced ​​is adsorbed on the adsorption end face of the conical adsorption nozzle; a plurality of adjusting mechanisms are respectively arranged in the vertical direction and the horizontal direction, and are used to push the rotary mechanism to adjust the direction of the adsorption end face.

[0007] In one embodiment of the utility model, the base includes: a first panel and a second panel; wherein the first panel is fixedly connected to the machine tool, and the hinge mechanism is in spherical contact with the first panel; and the second panel is vertically connected to the first panel.

[0008] In one embodiment of the utility model, the articulated mechanism includes: an articulated bracket, a clamping cylinder, a ball head connecting rod and a clamping ball head; wherein the articulated bracket is fixedly connected to the base; a through hole is provided in the middle of the articulated bracket, and a ball head is provided at one end of the ball head connecting rod, the ball head is provided in the through hole and contacts with the spherical surface of the base; a rotary mechanism is fixedly connected to the other end of the ball head connecting rod; two clamping cylinders are symmetrically arranged on both sides of the ball head connecting rod, and a clamping ball head is provided at the end of the piston rod of each clamping cylinder, and each clamping ball head contacts with the upper part of the ball head.

[0009] In one embodiment of the utility model, the driving mechanism includes: a motor support, a rotating motor, a first gear and a synchronous belt; wherein the motor support is fixedly connected to the rotating mechanism, the rotating motor is fixedly connected to the motor support, the output shaft of the rotating motor is connected to the first gear, and the first gear is connected to the rotating mechanism through a synchronous belt transmission.

[0010] In one embodiment of the utility model, the rotary mechanism includes: a rotary exhaust pipe, a second gear, a first angular contact bearing, a second angular contact bearing and a bearing seat; wherein the bearing seat is fixedly connected to the hinged bracket, and the first angular contact bearing and the second angular contact bearing are respectively matched with the bearing seat; the rotary exhaust pipe is coaxially connected to the second gear, the first angular contact bearing and the second angular contact bearing in sequence, and the wide end faces of the first angular contact bearing and the second angular contact bearing are arranged oppositely; the second gear is connected to the synchronous belt.

[0011] In one embodiment of the utility model, one end of the rotary exhaust pipe is coaxially connected to the second gear, and the other end of the rotary exhaust pipe is provided with a conical portion, on which a plurality of air vents are evenly arranged; the conical air guide portion of the conical adsorption nozzle is arranged on the inner side of the conical portion.

[0012] In one embodiment of the utility model, each adjustment mechanism includes: an adjusting screw and a locking nut; one end of each adjusting screw is provided with a spherical surface, and the other end of each adjusting screw is provided with a hexagonal socket; a plurality of adjusting screws are respectively connected to the second panel or the bearing seat, and a plurality of adjusting screws are threadedly connected with a plurality of locking nuts in a one-to-one correspondence.

[0013] In one embodiment of the utility model, at least two adjusting screws are arranged in the horizontal direction and are respectively connected to the second panel, and the spherical surfaces of at least two adjusting screws are in contact with the surface of the bearing seat; all other adjusting screws are arranged in the vertical direction and are respectively connected to the bearing seat, and the spherical surfaces of all other adjusting screws are in contact with the surface of the articulated bracket.

[0014] In one embodiment of the utility model, the negative pressure generating mechanism also includes: a shell, an air pipe joint, a first sealing ring and a second sealing ring; wherein the shell is fixedly connected to the bearing seat; an air guide gap is arranged between the shell and the conical portion of the rotary exhaust pipe, the air guide gap is respectively connected to the compressed air inlet and several air vents of the conical portion, and the two ends of the air guide gap are sealed by the first sealing ring and the second sealing ring; the air pipe joint is arranged on the shell, respectively connected to the external air supply equipment and the compressed air inlet.

[0015] In one embodiment of the utility model, the conical adsorption nozzle is threadedly connected to the conical portion; and a plurality of adsorption holes are evenly arranged on the adsorption end surface.

[0016] Compared with the prior art, the beneficial effects of the utility model are:

[0017] The utility model is a self-priming rotary slicing device for water-guided laser. The rotary exhaust pipe of the rotary mechanism serves as the rotary main axis of the slicing device, and the rotary exhaust pipe is driven by a driving mechanism. The negative pressure generating mechanism is provided with a conical suction nozzle, which rotates synchronously with the rotary exhaust pipe, and is supplied with gas through an external gas supply device. The gas passes through the conical gas guide end of the conical suction nozzle and is discharged from the rotary exhaust pipe, thereby forming a negative pressure on the suction end face of the conical suction nozzle to adsorb the workpiece to be sliced, so that the device for clamping the workpiece to be processed has good clamping reliability. The rotary mechanism is arranged on the hinge mechanism as a whole, and spherical contact is adopted between the hinge mechanism and the base. Then, the adjustment of the adjustment mechanism ensures that the suction end face of the conical suction nozzle is parallel to the water-guided laser and the feeding direction of the water-guided laser, so that the device for clamping the workpiece to be processed has good adjustment accuracy, and improves the processing accuracy and processing quality of the workpiece to be sliced.

[0018] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the utility model more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of a self-priming rotary slicing device for water-guided laser provided by an embodiment of the utility model;

[0020] Figure 2 It is a structural front view of a self-priming rotary slicing device for water-guided laser provided in an embodiment of the utility model;

[0021] Figure 3 The utility model embodiment provides Figure 2 Structural cross-section view along the AA axis;

[0022] Figure 4 The utility model embodiment provides Figure 2 Structural cross-section view along the BB direction;

[0023] Figure 5 It is a top view of the structure of a self-priming rotary slicing device for water-guided laser provided in an embodiment of the utility model;

[0024] Figure 6 It is a structural schematic diagram of a conical adsorption nozzle provided in an embodiment of the utility model.

[0025] Icons: 1-base; 101-first panel; 102-second panel; 2-hinged mechanism; 201-hinged bracket; 202-pressing cylinder; 2021-cylinder housing; 2022-cylinder piston rod; 203-ball head connecting rod; 204-clamping ball head; 3-adjusting mechanism; 301-adjusting screw; 302-locking nut; 31-first adjusting mechanism; 32-second adjusting mechanism; 33-third adjusting mechanism; 34-fourth adjusting mechanism; 35-fifth adjusting mechanism; 4-driving mechanism; 401-motor support; 402-rotating motor; 403-first gear; 404-synchronous belt; 5 -rotating mechanism; 501-rotating exhaust pipe; 5011-conical part; 5012-vent; 502-second gear; 503-gear seat; 504-inner sleeve locking nut; 505-outer sleeve locking nut; 506-first angular contact bearing; 507-inner sleeve; 508-outer sleeve; 509-second angular contact bearing; 510-bearing seat; 6-negative pressure generating mechanism; 601-housing; 602-trachea joint; 603-first sealing ring; 604-conical adsorption nozzle; 6041-conical air guide part; 6042-adsorption end face; 6043-adsorption hole; 605-second sealing ring. DETAILED DESCRIPTION

[0026] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined purpose of the present invention, a self-priming rotary slicing device for water-guided laser proposed in accordance with the present invention is described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0027] The above and other technical contents, features and effects of the utility model are clearly presented in the following detailed description of the specific implementation mode in conjunction with the accompanying drawings. Through the description of the specific implementation mode, the technical means and effects adopted by the utility model to achieve the predetermined purpose can be more deeply and specifically understood. However, the attached drawings are only for reference and explanation, and are not used to limit the technical solution of the utility model.

[0028] Embodiment 1

[0029] like Figures 1 to 3As shown, the utility model provides a self-priming rotary slicing device for water-guided laser, comprising: a base 1, an articulated mechanism 2, an adjusting mechanism 3, a driving mechanism 4, a rotary mechanism 5 and a negative pressure generating mechanism 6; wherein the articulated mechanism 2 is arranged on the base 1 and is in spherical contact with the base 1; the rotary mechanism 5 is arranged on the articulated mechanism 2, the driving mechanism 4 is connected to the rotary mechanism 5 in a transmission manner, and is used to drive the rotary exhaust pipe 501 of the rotary mechanism 5 to rotate; the negative pressure generating mechanism 6 is connected to an external air supply device through a compressed air inlet; the negative pressure generating mechanism 6 comprises: a conical suction nozzle 604, a conical suction nozzle 605, a conical suction nozzle 606, a conical suction nozzle 607, a conical suction nozzle 608, a conical suction nozzle 609, a conical suction nozzle 601, a conical suction nozzle 609, a conical suction nozzle 601, a conical suction nozzle 608, a conical suction nozzle 609, a conical suction nozzle 609, a conical suction nozzle 601, a conical suction nozzle 609, a conical suction nozzle 608, a conical suction nozzle 609 ... The conical suction nozzle 604 is coaxially connected to the rotary exhaust pipe 501, and the compressed air inlet, the exhaust channel inside the rotary exhaust pipe 501 and the conical air guide portion 6041 of the conical suction nozzle 604 are connected; the outer side surface of the conical air guide portion 6041 is a conical surface, and the end of the conical suction nozzle 604 away from the conical air guide portion 6041 is provided with a suction end surface 6042, and the workpiece to be sliced ​​is adsorbed on the suction end surface 6042 of the conical suction nozzle 604; a plurality of adjustment mechanisms 3 are respectively arranged in the vertical direction and the horizontal direction, and are used to push the rotating mechanism 5 to adjust the direction of the suction end surface 6042.

[0030] In an optional embodiment, if Figure 1 and Figure 2 As shown, the base 1 includes: a first panel 101 and a second panel 102; wherein the first panel 101 is fixedly connected to the machine tool, and the articulated mechanism 2 is in spherical contact with the first panel 101; and the second panel 102 is vertically connected to the first panel 101.

[0031] In this embodiment, if Figure 1 , Figure 2 and Figure 4 As shown, the articulated mechanism 2 comprises: an articulated bracket 201, a clamping cylinder 202, a ball head connecting rod 203 and a clamping ball head 204; wherein the articulated bracket 201 is fixedly connected to the base 1; a through hole is provided in the middle of the articulated bracket 201, and a ball head is provided at one end of the ball head connecting rod 203, which is arranged in the through hole and in spherical contact with the base 1; a rotary mechanism 5 is fixedly connected to the other end of the ball head connecting rod 203; two clamping cylinders 202 are symmetrically arranged on both sides of the ball head connecting rod 203, and a clamping ball head 204 is provided at the end of the piston rod of each clamping cylinder 202, and each clamping ball head 204 is in contact with the upper part of the ball head.

[0032] For example, Figure 4As shown, the articulated bracket 201 is connected to the base 1 by screws, and piston through holes are arranged on both sides of the articulated bracket 201 in the horizontal direction. The cylinder housing 2021 is fixed to the articulated bracket 201 by screws, and the end of the cylinder piston rod 2022 is threadedly connected to the clamping ball head 204, and the clamping ball head 204 is matched with the piston through hole with a small gap. A through hole is arranged in the middle of the articulated bracket 201, and the ball head of the ball head connecting rod 203 is matched with the through hole with a small gap. After the compression cylinder 202 is ventilated, the cylinder piston rod 2022 is pushed out, driving the ball head connecting rod 203 to clamp the ball head of the articulated bracket 201, and at the same time, the ball head of the articulated bracket 201 is pressed on the base 1 by the component force in the downward direction.

[0033] The principle is that a ball head is provided at one end of the ball head connecting rod 203, and the ball head contacts the base 1, and the cylinder piston rods 2022 of the two clamping cylinders 202 are pushed out, so that the clamping ball heads 204 at the ends of the two piston rods are in contact with the upper part of the ball head, thereby pressing the ball head connecting rod 203 on the base 1, ensuring the stability of the connection. At the same time, when the piston rod of the clamping cylinder 202 is released, the ball head connecting rod 203 also has a higher degree of freedom of movement, so as to have good adjustment accuracy.

[0034] In this embodiment, if Figures 1 to 3 As shown, the driving mechanism 4 includes: a motor support 401, a rotating motor 402, a first gear 403 and a synchronous belt 404; wherein the motor support 401 is fixedly connected to the rotating mechanism 5, the rotating motor 402 is fixedly connected to the motor support 401, the output shaft of the rotating motor 402 is connected to the first gear 403, and the first gear 403 is connected to the rotating mechanism 5 through the synchronous belt 404.

[0035] In this embodiment, if Figures 1 to 4 As shown, the rotary mechanism 5 includes: a rotary exhaust pipe 501, a second gear 502, a first angular contact bearing 506, a second angular contact bearing 509 and a bearing seat 510; wherein the bearing seat 510 is fixedly connected to the hinged bracket 201, and the first angular contact bearing 506 and the second angular contact bearing 509 are respectively matched with the bearing seat 510; the rotary exhaust pipe 501 is coaxially connected to the second gear 502, the first angular contact bearing 506 and the second angular contact bearing 509 in sequence, and the wide end faces of the first angular contact bearing 506 and the second angular contact bearing 509 are arranged opposite to each other; the second gear 502 is connected to the synchronous belt 404.

[0036] In an optional embodiment, if Figure 3 As shown, one end of the rotary exhaust pipe 501 is coaxially connected to the second gear 502 , and the other end of the rotary exhaust pipe 501 is provided with a conical portion 5011 , on which a plurality of vent holes 5012 are evenly arranged; the conical air guide portion 6041 of the conical adsorption nozzle 604 is arranged on the inner side of the conical portion 5011 .

[0037] Exemplarily, the conical portion 5011 is trumpet-shaped.

[0038] In an optional embodiment, if Figure 3 As shown, the rotary mechanism 5 also includes: a gear seat 503, an inner sleeve locking nut 504, an outer sleeve locking nut 505, an inner sleeve 507 and an outer sleeve 508; wherein the gear seat 503 is threadedly connected to the rotary exhaust pipe 501, and the end face of the gear seat 503 is tightly against the end face of the inner sleeve locking nut 504 to form a double nut locking structure, thereby preventing the thread from loosening; the second gear 502 is sleeved on the gear seat 503 and threadedly connected, and at the same time, the end face of the second gear 502 is locked against the step surface of the gear seat 503 by screwing, and then radially locked by a locking screw; the inner sleeve locking nut 504 is threadedly connected to the rotary exhaust pipe 501, The end face of the inner sleeve locking nut 504 abuts against the inner ring of the first angular contact bearing 506; the outer sleeve locking nut 505 is threadedly connected to the bearing seat 510, and the end face of the outer sleeve locking nut 505 abuts against the outer ring of the first angular contact bearing 506; the inner sleeve 507 and the outer sleeve 508 are coaxially sleeved outside the rotary exhaust pipe 501, located between the first angular contact bearing 506 and the second angular contact bearing 509, the two end faces of the inner sleeve 507 respectively abut against the inner rings of the first angular contact bearing 506 and the second angular contact bearing 509, and the two end faces of the outer sleeve 508 respectively abut against the outer rings of the first angular contact bearing 506 and the second angular contact bearing 509.

[0039] Preferably, the inner sleeve 507 is provided with an elastic structure along the axial direction, which ensures that the steel balls of the first angular contact bearing 506 and the second angular contact bearing 509 are pressed against the arc surfaces of their respective bearing outer rings, thereby locking the rotary exhaust pipe 501 along the axial direction.

[0040] The principle is that the bearing seat 510 is provided with a mounting hole inside, the rotary exhaust pipe 501 is inserted into the mounting hole, and the first angular contact bearing 506, the inner sleeve 507, the outer sleeve 508 and the second angular contact bearing 509 are sequentially sleeved on the rotary exhaust pipe 501. The outer sleeve locking nut 505 is screwed with the bearing seat 510 to press the outer ring of the first angular contact bearing 506, and the outer ring of the outer sleeve 508 and the second angular contact bearing 509 in turn, and finally the outer ring of the second angular contact bearing 509 is pressed against the bottom step of the mounting hole. The inner sleeve locking nut 504 is screwed with the rotary exhaust pipe 501 to press the inner ring of the first angular contact bearing 506, the inner sleeve 507 and the inner ring of the second angular contact bearing 509 in turn, and finally the inner ring of the second angular contact bearing 509 is pressed against the bottom step of the mounting hole. The synchronous belt 404 is mounted on the outer rings of the first gear 403 and the second gear 502, and meshes with the first gear 403 and the second gear 502 respectively. Driven by the rotating motor 402, the output shaft of the rotating motor 402, the rotating exhaust pipe 501 and the conical suction nozzle 604 rotate synchronously.

[0041] In an optional embodiment, if Figure 4 and Figure 5 As shown, each adjustment mechanism 3 includes: an adjusting screw 301 and a locking nut 302, one end of each adjusting screw 301 is provided with a spherical surface, and the other end of each adjusting screw 301 is provided with a hexagonal socket; a plurality of adjusting screws 301 are respectively connected to the second panel 102 or the bearing seat 510, and a plurality of adjusting screws 301 are threadedly connected with a plurality of locking nuts 302 in a one-to-one correspondence.

[0042] Exemplarily, the adjusting screw 301 is provided with fine threads throughout, and a spherical surface is provided at one end to reduce the friction between the adjusting support surface abutting against it; the other end of the adjusting screw 301 is provided with a hexagonal groove to facilitate the screwing in and out of the adjusting screw 301 by a hexagonal wrench, and to achieve locking with the locking nut 302.

[0043] In an optional embodiment, at least two adjustment mechanisms 3 are arranged in the horizontal direction and are respectively connected to the second panel 102, and the spherical surfaces of at least two adjustment screws 301 abut against the surface of the bearing seat 510; all other adjustment screws 301 are arranged in the vertical direction and are respectively connected to the bearing seat 510, and the spherical surfaces of all other adjustment screws 301 abut against the surface of the articulated bracket 201.

[0044] For example, Figure 5As shown, the first adjustment mechanism 31 and the second adjustment mechanism 32 are arranged at intervals in the horizontal direction, and the spherical surfaces of the adjustment screws 301 of the first adjustment mechanism 31 and the second adjustment mechanism 32 are both in contact with the side surface of the bearing seat 510. Since the articulation mechanism 2 is in spherical contact with the base 1, when the adjustment screws 301 are rotated, the bearing seat 510 and the articulation bracket 201 are simultaneously rotated around the central axis of the articulation bracket 201. The third adjustment mechanism 33, the fourth adjustment mechanism 34 and the fifth adjustment mechanism 35 are all arranged in the vertical direction, and the spherical surfaces of the adjustment screws 301 are all in contact with the upper surface of the articulation bracket 201; the third adjustment mechanism 33, the fourth adjustment mechanism 34 and the fifth adjustment mechanism 35 are distributed in a triangle and are respectively connected to the bearing seat 510, so as to improve the adjustment accuracy and facilitate stability after adjustment.

[0045] In this embodiment, if Figure 3 As shown, the negative pressure generating mechanism 6 also includes: a shell 601, an air pipe connector 602, a first sealing ring 603 and a second sealing ring 605; wherein the shell 601 is fixedly connected to the bearing seat 510; an air guide gap is arranged between the shell 601 and the conical portion 5011 of the rotary exhaust pipe 501, and the air guide gap is respectively connected to the compressed air inlet and a plurality of air vents 5012 of the conical portion 5011, and both ends of the air guide gap are sealed by the first sealing ring 603 and the second sealing ring 605; the air pipe connector 602 is arranged on the shell 601, and is respectively connected to the external air supply equipment and the compressed air inlet.

[0046] In an optional embodiment, if Figure 3 As shown, the housing 601 is connected to the bearing seat 510 by screws, and two sealing ring installation grooves are arranged at intervals on the inner side of the housing 601. The first sealing ring 603 and the second sealing ring 605 are arranged in the two sealing ring installation grooves respectively, and the lips of the first sealing ring 603 and the second sealing ring 605 are installed opposite to each other.

[0047] In an optional embodiment, if Figure 3 and Figure 6 As shown, the conical adsorption nozzle 604 is threadedly connected to the conical portion 5011; the outer side surface of the conical air guide portion 6041 is a conical surface, and the end of the conical adsorption nozzle 604 away from the conical air guide portion 6041 is provided with a adsorption end surface 6042, and the workpiece to be sliced ​​is adsorbed on the adsorption end surface 6042 of the conical adsorption nozzle 604; a plurality of adsorption holes 6043 are evenly arranged on the adsorption end surface 6042.

[0048] The principle is that the conical suction nozzle 604 is threadedly connected to the conical part 5011. After the high-speed compressed gas enters the air guide gap from the compressed gas inlet, the high-speed compressed gas is blown out from the plurality of vents 5012 on the conical part 5011 to the conical surface of the conical air guide part 6041 due to the sealing of the first sealing ring 603 and the second sealing ring 605, and is discharged from the tail of the rotary exhaust pipe 501 under the guidance of the conical surface. When the high-speed compressed gas is discharged, the air in the cavity of the conical suction nozzle 604 is taken away, thereby forming a negative pressure on the suction end face 6042, and the workpiece to be sliced ​​is adsorbed through the plurality of suction holes 6043.

[0049] It is worth noting that, since the workpieces to be sliced ​​have a variety of thickness and diameter specifications, and different specifications of workpieces to be sliced ​​require different adsorption forces, although a larger adsorption force can improve adsorption reliability, it will also increase the risk of cracking for thinner and hard and brittle workpieces to be sliced, so it is necessary to adjust the adsorption force. For example, on the one hand, the adsorption force can be adjusted by adjusting the pressure and flow rate of high-speed compressed gas; on the other hand, since the conical adsorption nozzle 604 and the rotary exhaust pipe 501 are screwed together by threads, the gap between the conical air guide portion 6041 and the conical portion 5011 is changed by adjusting the axial screwing length of the conical air guide portion 6041 and the conical portion 5011, and then the flow rate of the high-speed compressed gas blown on the conical surface of the conical air guide portion 6041 through the vent hole 5012 can be changed, thereby adjusting the adsorption force.

[0050] It can be understood that the self-priming rotary slicing device for water-guided laser of this embodiment can be implemented as an integral module and added to existing equipment through modification; it can also be integrally embedded in the equipment during design and development.

[0051] The working principle of the self-priming rotary slicing device for water-guided laser of this embodiment is that the rotary mechanism 5 is integrally arranged on the hinge mechanism 2, the driving mechanism 4 is suspended and fixed on the outer side of the rotary mechanism 5 through the motor support 401, the driving mechanism 4 outputs through the rotating motor 402, and drives the rotary exhaust pipe 501 to rotate through the transmission system composed of the first gear 403, the synchronous belt 404 and the second gear 502; one end of the rotary exhaust pipe 501 is connected to the conical suction nozzle 604 of the negative pressure generating mechanism 6, and the negative pressure generating mechanism 6 is connected to the external air supply equipment through the air pipe joint 602, and the external air supply equipment supplies high-speed compressed gas, which is blown in through the plurality of vents 5012 of the conical part 5011, and the blown high-speed compressed gas is discharged through the exhaust channel inside the rotary exhaust pipe 501 under the guidance of the conical surface of the conical air guide part 6041. At the same time, when the high-speed compressed gas is discharged, the high-speed compressed gas will also take away the air in the inner cavity of the conical air guide 6041, thereby forming a negative pressure on the adsorption end surface 6042, and then adsorb the workpiece to be sliced ​​through a plurality of adsorption holes 6043 evenly arranged on the adsorption end surface 6042. The workpiece to be sliced ​​can rotate synchronously with the rotary exhaust pipe 501 and be sliced ​​by the water-guided laser.

[0052] In order to ensure the quality of slicing, it is necessary to adjust the direction of the adsorption end face 6042 through several adjustment mechanisms 3 before slicing processing. The bearing seat 510 is rotated around the central axis of the ball head connecting rod 203 through the first adjustment mechanism 31 and the second adjustment mechanism 32, and the micrometer is used to detect until the adsorption end face 6042 is parallel to a certain movement axis of the machine tool, that is, parallel to the feed direction of the water-guided laser; then the third adjustment mechanism 33, the fourth adjustment mechanism 34 and the fifth adjustment mechanism 35 are adjusted respectively, so that the adsorption end face 6042 always remains parallel to the water-guided laser during the rotational motion.

[0053] The utility model is a self-priming rotary slicing device for water-guided laser. The rotary exhaust pipe of the rotary mechanism serves as the rotary main axis of the slicing device, and the rotary exhaust pipe is driven by a driving mechanism. The negative pressure generating mechanism is provided with a conical suction nozzle, which rotates synchronously with the rotary exhaust pipe, and is supplied with gas through an external gas supply device. The gas passes through the conical gas guide end of the conical suction nozzle and is discharged from the rotary exhaust pipe, thereby forming a negative pressure on the suction end face of the conical suction nozzle to adsorb the workpiece to be sliced, so that the device for clamping the workpiece to be processed has good clamping reliability. The rotary mechanism is arranged on the hinge mechanism as a whole, and spherical contact is adopted between the hinge mechanism and the base. Then, the adjustment of the adjustment mechanism ensures that the suction end face of the conical suction nozzle is parallel to the water-guided laser and the feeding direction of the water-guided laser, so that the device for clamping the workpiece to be processed has good adjustment accuracy, and improves the processing accuracy and processing quality of the workpiece to be sliced.

[0054] It should be noted that, in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the term "include", "comprise" or any other variant is intended to cover non-exclusive inclusion, so that the article or device including a series of elements includes not only those elements, but also other elements that are not explicitly listed. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the article or device including the elements. "Connect" or "connected" and similar words are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The orientation or position relationship indicated by "up", "down", "left", "right", etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the utility model.

[0055] The above contents are further detailed descriptions of the present invention in combination with specific preferred implementations, and the specific implementation of the present invention cannot be considered to be limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, several simple deductions or substitutions can be made without departing from the concept of the present invention, which should be regarded as falling within the protection scope of the present invention.

Claims

1. A self-priming rotary slicing device for water-guided laser, characterized in that: include: A base (1), a hinge mechanism (2), an adjustment mechanism (3), a driving mechanism (4), a rotating mechanism (5) and a negative pressure generating mechanism (6); The hinge mechanism (2) is arranged on the base (1) and is in spherical contact with the base (1); the rotary mechanism (5) is arranged on the hinge mechanism (2); the driving mechanism (4) is connected to the rotary mechanism (5) in a transmission manner and is used to drive the rotary exhaust pipe (501) of the rotary mechanism (5) to rotate; The negative pressure generating mechanism (6) is connected to an external air supply device via a compressed air inlet; the negative pressure generating mechanism (6) comprises: a conical adsorption nozzle (604), the conical adsorption nozzle (604) is coaxially connected to the rotary exhaust pipe (501), the compressed air inlet, the exhaust passage inside the rotary exhaust pipe (501) and the conical air guide portion (6041) of the conical adsorption nozzle (604) are connected; the outer side surface of the conical air guide portion (6041) is a conical surface, and the end of the conical adsorption nozzle (604) away from the conical air guide portion (6041) is provided with a suction end surface (6042), and the workpiece to be sliced ​​is adsorbed on the suction end surface (6042) of the conical adsorption nozzle (604); A plurality of the adjusting mechanisms (3) are respectively arranged in the vertical direction and the horizontal direction, and are used to push the rotating mechanism (5) to adjust the direction of the adsorption end surface (6042).

2. The self-priming rotary slicing device for water-guided laser according to claim 1, characterized in that: The base (1) comprises: a first panel (101) and a second panel (102); The first panel (101) is fixedly connected to the machine tool, the hinge mechanism (2) is in spherical contact with the first panel (101), and the second panel (102) is vertically connected to the first panel (101).

3. The self-priming rotary slicing device for water-guided laser according to claim 2, characterized in that: The articulated mechanism (2) comprises: an articulated bracket (201), a clamping cylinder (202), a ball head connecting rod (203) and a clamping ball head (204); The hinged bracket (201) is fixedly connected to the base (1); a through hole is provided in the middle of the hinged bracket (201); a ball head is provided at one end of the ball head connecting rod (203); the ball head is arranged in the through hole and is in spherical contact with the base (1); the slewing mechanism (5) is fixedly connected to the other end of the ball head connecting rod (203); The two clamping cylinders (202) are symmetrically arranged on both sides of the ball head connecting rod (203), and the end of the piston rod of each clamping cylinder (202) is provided with a clamping ball head (204), and each clamping ball head (204) is in contact with the upper part of the ball head.

4. The self-priming rotary slicing device for water-guided laser according to claim 3, characterized in that: The driving mechanism (4) comprises: a motor support (401), a rotating motor (402), a first gear (403) and a synchronous belt (404); The motor support (401) is fixedly connected to the rotating mechanism (5), the rotating motor (402) is fixedly connected to the motor support (401), the output shaft of the rotating motor (402) is connected to the first gear (403), and the first gear (403) is connected to the rotating mechanism (5) through the synchronous belt (404).

5. The self-priming rotary slicing device for water-guided laser according to claim 4, characterized in that: The rotary mechanism (5) comprises: a rotary exhaust pipe (501), a second gear (502), a first angular contact bearing (506), a second angular contact bearing (509) and a bearing seat (510); The bearing seat (510) is fixedly connected to the hinged bracket (201), and the first angular contact bearing (506) and the second angular contact bearing (509) are respectively matched with the bearing seat (510); the rotary exhaust pipe (501) is coaxially connected to the second gear (502), the first angular contact bearing (506) and the second angular contact bearing (509) in sequence, and the wide end faces of the first angular contact bearing (506) and the second angular contact bearing (509) are arranged opposite to each other; the second gear (502) is connected to the synchronous belt (404).

6. The self-priming rotary slicing device for water-guided laser according to claim 5, characterized in that: One end of the rotary exhaust pipe (501) is coaxially connected to the second gear (502), and the other end of the rotary exhaust pipe (501) is provided with a conical portion (5011), and a plurality of vent holes (5012) are evenly arranged on the conical portion (5011); the conical air guide portion (6041) of the conical adsorption nozzle (604) is arranged on the inner side of the conical portion (5011).

7. The self-priming rotary slicing device for water-guided laser according to claim 5, characterized in that: Each of the adjustment mechanisms (3) comprises: an adjustment screw (301) and a locking nut (302); one end of each of the adjustment screws (301) is provided with a spherical surface, and the other end of each of the adjustment screws (301) is provided with a hexagon socket; The plurality of adjusting screws (301) are respectively connected to the second panel (102) or the bearing seat (510), and the plurality of adjusting screws (301) are threadedly connected to the plurality of locking nuts (302) in a one-to-one correspondence.

8. The self-priming rotary slicing device for water-guided laser according to claim 7, characterized in that: At least two of the adjusting screws (301) are arranged in a horizontal direction and are respectively connected to the second panel (102), and the spherical surfaces of the at least two adjusting screws (301) are both in contact with the surface of the bearing seat (510); All the remaining adjusting screws (301) are arranged in the vertical direction and are respectively connected to the bearing seats (510), and the spherical surfaces of all the remaining adjusting screws (301) are in contact with the surface of the hinged bracket (201).

9. The self-priming rotary slicing device for water-guided laser according to claim 6, characterized in that: The negative pressure generating mechanism (6) further comprises: a housing (601), a trachea joint (602), a first sealing ring (603) and a second sealing ring (605); In which, the shell (601) is fixedly connected to the bearing seat (510); an air guide gap is arranged between the shell (601) and the conical portion (5011) of the rotary exhaust pipe (501), and the air guide gap is respectively connected to the compressed air inlet and a plurality of air vents (5012) of the conical portion (5011), and both ends of the air guide gap are sealed by the first sealing ring (603) and the second sealing ring (605); the air pipe joint (602) is arranged on the shell (601), and is respectively connected to the external air supply equipment and the compressed air inlet.

10. The self-priming rotary slicing device for water-guided laser according to claim 6, characterized in that: The conical adsorption nozzle (604) is threadedly connected to the conical portion (5011); and a plurality of adsorption holes (6043) are evenly arranged on the adsorption end surface (6042).

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