Vacuum coating machine cavity cooling device
By using a combination of condenser tubes and fans in the cavity cooling device of the vacuum coating machine, the problem of poor water flow cooling is solved, and more efficient cavity cooling is achieved to ensure the stability and efficiency of the coating process.
Patent Information
- Application Number
- CN202420848819.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-23
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-04-23
AI Technical Summary
The water flow cooling effect in the cavity cooling device of the existing vacuum coating machine is poor, which makes it difficult to quickly reduce the heat during the sublimation or evaporation of the coating material, affecting the efficiency of the coating process.
The design of a combination of condenser tube and fan is adopted. The condenser tube cools down in the water flow and drives the air flow to further cool down through the fan. The filter plate prevents dust from entering the fan, making it convenient for the cleaning and maintenance of the filter plate.
It effectively improves the cooling effect of water flow, prevents the temperature from rising during long-term work, improves the cooling efficiency of the coating machine cavity, and facilitates the maintenance and maintenance of condenser tubes and fans.
Smart Images

Figure CN222139233U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of processing equipment, in particular to a cavity cooling device for a vacuum coating machine. Background Art
[0002] A vacuum coating machine is a device used to coat thin films on the surface of an object in a vacuum environment. This technology is widely used in many fields, including electronics, optics, medical equipment, automobiles, decoration, etc. During the vacuum coating process, the reaction chamber needs to be cooled to prevent excessive heat generated by the sublimation or evaporation of the coating material and to keep the substrate within a suitable temperature range.
[0003] After searching, Chinese Patent Publication No.: CN211972429U discloses a vacuum coating machine cavity cooling device, including a base plate, a coating machine body is fixedly installed at the center position of the upper end of the base plate, a door panel is movably installed at the center position of the front end of the coating machine body, a shell is vertically fixedly installed at the upper end of the base plate at both side ends of the coating machine body, a first serpentine tube is fixedly installed on the inner wall of the coating machine body, a water tank is fixedly installed at the center position of the upper end of the coating machine body, a water pump is fixedly installed at the center position of the bottom end of the water tank, a second serpentine tube is fixedly installed at the center position of the right end of the water pump, and a third serpentine tube is fixedly installed at the upper left end of the water tank. The utility model starts a water pump and a cooling fan. The water pump pumps water from the water tank into the second serpentine tube and then flows into the first serpentine tube through the right shell. The inflowing water flow is used to quickly cool down the inside of the coating machine body. However, the device uses a single fan to cool down the water flow. The temperature of the water flow is not easy to drop quickly when cooling down the inside of the coating machine body. Therefore, the cooling effect of the water flow is reduced. Therefore, a vacuum coating machine cavity cooling device is proposed to solve the above problem. Utility Model Content
[0004] In order to make up for the above deficiencies, the utility model provides a vacuum coating machine cavity cooling device, which aims to improve the problem in the prior art that the single water flow cooling method leads to reduced cooling effect of the water flow.
[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a vacuum coating machine cavity cooling device, including a coating bin, the bottom of the coating bin is fixedly connected to a bottom plate, the left and right sides of the coating bin are fixedly connected to cooling bins, a filter assembly is arranged inside the cooling bin, a water pump is fixedly connected to the front side of the top of the coating bin, the input and output ends of the water pump are fixedly connected to two water pipes, one end of one of the two water pipes is fixedly connected to a connecting pipe, the connecting pipe is slidably fixedly connected to a condensing pipe, the other end of the condensing pipe is slidably connected to the inside of another connecting pipe, and one end of the other connecting pipe is fixedly connected to A water pipe, a slider is slidably connected to the outer periphery of the connecting pipe, a limiting ring is fixedly connected to the outer periphery of the connecting pipe, a spring is sleeved on the outer periphery of the connecting pipe, one end of the spring abuts against the inside of the slider, and the other end of the spring abuts against one side of the limiting ring, a plurality of evenly distributed limiting balls are slidably connected to the inside of the connecting pipe, one side of the limiting ball is slidably connected to the inside of one end of the condenser, the water pipe runs through the two cooling bins, the middle part of the water pipe is fixedly connected to the inside of the coating bin, the top of the coating bin is fixedly connected to a water storage bin, and one end of the water pipe is fixedly connected to the inside of the top side of the water storage bin.
[0006] As a further description of the above technical solution:
[0007] The two filter assemblies each include a filter plate, and the two filter plates are respectively slidably connected inside the two cooling bins. Two mounting blocks are fixedly connected on the front and rear sides of the filter plate, and two clamping blocks are slidably connected inside the plurality of mounting blocks. A second spring is fixedly connected to one side of the clamping block, and one end of the second spring is fixedly connected inside the mounting block.
[0008] As a further description of the above technical solution:
[0009] A mounting frame is fixedly connected to the top of the coating chamber, and the condenser is arranged inside the mounting frame.
[0010] As a further description of the above technical solution:
[0011] One end of the clamping block is slidably connected to one side of the mounting block, and one end of the clamping block is slidably connected to the inside of the cooling bin.
[0012] As a further description of the above technical solution:
[0013] One end of another water pipe 2 passes through the bottom of the water storage bin, and one end of another water pipe 2 is fixedly connected to the inner side of the bottom of the water storage bin.
[0014] As a further description of the above technical solution:
[0015] Two fans are fixedly connected inside the cooling bin, and the two fans are arranged on one side of the filter plate.
[0016] As a further description of the above technical solution:
[0017] A plurality of evenly distributed air outlet holes are provided inside the front and rear sides of the cooling bin.
[0018] As a further description of the above technical solution:
[0019] A sealing door is rotatably connected to the front side of the coating chamber.
[0020] The utility model has the following beneficial effects:
[0021] 1. In the utility model, the condenser is installed between the first infusion tube and the second infusion tube to cool the water flow, preventing the water flow from increasing in temperature during long-term operation and causing the cooling effect to decrease. The condenser can be quickly installed by inserting it into the connecting tube, which is convenient for the maintenance and replacement of the condenser.
[0022] 2. In the utility model, the rotation of the fan can drive the air flow, and the air flow cools the water flow. The filter plate can prevent dust from entering the fan with the air flow, causing the fan to not work normally. When the filter plate needs to be cleaned, the block can be pressed to remove the filter plate from the cooling chamber. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 This is a three-dimensional schematic diagram of a vacuum coating machine cavity cooling device proposed by the utility model;
[0024] Figure 2 This is a schematic structural diagram of a water delivery pipe 1 of a vacuum coating machine cavity cooling device proposed by the utility model;
[0025] Figure 3 This is a schematic diagram of the structure of a cooling chamber of a vacuum coating machine cavity cooling device proposed by the utility model;
[0026] Figure 4 This is a structural schematic diagram of a slider of a vacuum coating machine cavity cooling device proposed by the utility model;
[0027] Figure 5 This is a structural schematic diagram of a mounting block of a cavity cooling device for a vacuum coating machine proposed by the utility model.
[0028] Legend:
[0029] 1. Water pump; 2. Water pipe 1; 3. Coating chamber; 4. Sealing door; 5. Bottom plate; 6. Filter plate; 7. Cooling chamber; 8. Mounting frame; 9. Condenser; 10. Water storage chamber; 11. Water pipe 2; 12. Air outlet; 13. Fan; 14. Limiting ball; 15. Slider; 16. Limiting ring; 17. Mounting block; 18. Spring 1; 19. Connecting pipe; 20. Block; 21. Spring 2. DETAILED DESCRIPTION
[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0031] Reference Figure 1 , Figure 2 and Figure 4 , the utility model provides an embodiment: a vacuum coating machine cavity cooling device, including a coating bin 3, a sealing door 4 is rotatably connected to the front side of the coating bin 3, a bottom plate 5 is fixedly connected to the bottom of the coating bin 3, cooling bins 7 are fixedly connected to the left and right sides of the coating bin 3, a filter assembly is arranged inside the cooling bin 7, a water pump 1 is fixedly connected to the front side of the top of the coating bin 3, the input and output ends of the water pump 1 are fixedly connected to water pipes 11, one end of one water pipe 11 is fixedly connected to a connecting pipe 19, another end of the other water pipe 11 passes through the bottom of a water storage bin 10, another end of the other water pipe 11 is fixedly connected to the inner side of the bottom of the water storage bin 10, the connecting pipe 19 is slidably fixedly connected to a condensing pipe 9, the top of the coating bin 3 is fixedly connected to a mounting frame 8, and the condensing pipe 9 is arranged inside the mounting frame 8, the other end of the condensing tube 9 is slidably connected to the inside of another connecting tube 19, one end of the other connecting tube 19 is fixedly connected to a water supply pipe 2, a sliding block 15 is slidably connected to the outer periphery of the connecting tube 19, a limiting ring 16 is fixedly connected to the outer periphery of the connecting tube 19, a spring 18 is sleeved on the outer periphery of the connecting tube 19, one end of the spring 18 abuts against the inside of the sliding block 15, and the other end of the spring 18 abuts against one side of the limiting ring 16, a plurality of evenly distributed limiting balls 14 are slidably connected to the inside of the connecting tube 19, one side of the limiting ball 14 is slidably connected to the inside of one end of the condensing tube 9, the middle part of the water supply pipe 2 is fixedly connected to the inside of the coating bin 3, the top of the coating bin 3 is fixedly connected to the water storage bin 10, and one end of the water supply pipe 2 is fixedly connected to the top side of the water storage bin 10.
[0032] Specifically, the coating bin 3 is used to provide space for coating, the sealing door 4 is used to seal the coating bin 3, the bottom plate 5 is used to install and fix other structures, the cooling bin 7 is used to provide space for cooling water flow, the water pump 1 plays a role in driving the flow of water, the water pipe 1 2 and the water pipe 2 11 are used to transport the water flow, the connecting pipe 19 is used to connect the condenser 9 with the water pipe 1 2 and the water pipe 2 11, the condenser 9 can cool the water flow, the mounting frame 8 is used to install and fix the condenser 9, the slider 15 is used to fix the limiting ball 14 inside the connecting pipe 19 and the condenser 9, the limiting ball 14 can connect the connecting pipe 19 and the condenser 9, the spring 18 can push the slider 15 to move, and the water storage bin 10 is used to store water flow.
[0033] Reference Figure 1 and Figure 5 The two filter assemblies each include a filter plate 6, and the two filter plates 6 are respectively slidably connected inside the two cooling bins 7. Two mounting blocks 17 are fixedly connected on both sides of the filter plate 6, and two clamping blocks 20 are slidably connected inside the multiple mounting blocks 17. A spring 21 is fixedly connected to one side of the clamping block 20, and one end of the spring 21 is fixedly connected to the inside of the mounting block 17. One end of the clamping block 20 is slidably connected to one side of the mounting block 17, and one end of the clamping block 20 is slidably connected to the inside of the cooling bin 7.
[0034] Specifically, the filter plate 6 can prevent dust from entering the fan 13 along with the air flow. The mounting block 17 is used to mount the clamping block 20 . The clamping block 20 can be pushed by the spring 21 to connect the filter plate 6 and the cooling chamber 7 to each other.
[0035] Reference Figure 1 and Figure 3 The water pipe 2 passes through two cooling bins 7, and two fans 13 are fixedly connected inside the cooling bins 7. The two fans 13 are arranged on one side of the filter plate 6, and a plurality of evenly distributed air outlet holes 12 are opened inside the front and rear sides of the cooling bins 7.
[0036] Specifically, the rotation of the fan 13 can drive the air flow to cool the water flow inside the water pipe 2, and the air outlet 12 can enable the air flow.
[0037] Working principle: During the coating process, the water pump 1 is started, and the water pump 1 drives the water to flow inside the water pipe 2. The water absorbs the heat inside the coating chamber 3 to reduce the temperature inside the coating chamber 3. The condenser 9 is installed between the water pipe 1 2 and the water pipe 2 11 to cool the water flow, preventing the water flow from absorbing heat for a long time and raising the temperature, resulting in a decrease in the cooling effect. When the condenser 9 needs to be replaced, the slider 15 can be slid to squeeze the spring 18. After the slider 15 moves, it no longer restricts the movement of the limit ball 14, and then one end of the condenser 9 can be pulled out of the water pipe 1. 2, after inserting a new condenser 9, release the slider 15, the slider 15 is pushed back by the spring 18 to squeeze the limiting ball 14 again so that the limiting ball 14 connects one end of the condenser 9 with the water pipe 2, the fan 13 rotates to drive the air flow, the air flow cools the water flow, the filter plate 6 can prevent dust from entering the fan 13 with the air flow, causing the fan 13 to malfunction, when the filter plate 6 needs to be cleaned, the block 20 can be pressed to move so that the block 20 is no longer inserted into the cooling bin 7, and then the filter plate 6 can be taken out from the cooling bin 7.
[0038] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. A vacuum coating machine cavity cooling device, comprising a coating chamber (3), Features: The bottom of the coating bin (3) is fixedly connected to a bottom plate (5), the left and right sides of the coating bin (3) are fixedly connected to cooling bins (7), a filter assembly is arranged inside the cooling bin (7), the top front side of the coating bin (3) is fixedly connected to a water pump (1), the input and output ends of the water pump (1) are fixedly connected to water pipe 2 (11), one end of one of the water pipes 2 (11) is fixedly connected to a connecting pipe (19), the connecting pipe (19) is slidably fixedly connected to a condensing pipe (9), the other end of the condensing pipe (9) is slidably connected to the inside of another connecting pipe (19), one end of the other connecting pipe (19) is fixedly connected to a water pipe 1 (2), the outer periphery of the connecting pipe (19) is slidably connected to a slider (15), the connecting pipe (19) is fixedly connected to a limiting ring (16) on the periphery, a spring (18) is sleeved on the periphery of the connecting tube (19), one end of the spring (18) abuts against the inside of the slider (15), and the other end of the spring (18) abuts against one side of the limiting ring (16), a plurality of evenly distributed limiting balls (14) are slidably connected inside the connecting tube (19), one side of the limiting balls (14) is slidably connected to the inside of one end of the condensing tube (9), the water supply pipe (2) passes through the two cooling bins (7), the middle part of the water supply pipe (2) is fixedly connected to the inside of the coating bin (3), the top of the coating bin (3) is fixedly connected to a water storage bin (10), and one end of the water supply pipe (2) is fixedly connected to the inside of the top side of the water storage bin (10).
2. A vacuum coating machine cavity cooling device according to claim 1, Features: The two filter assemblies each comprise a filter plate (6), the two filter plates (6) being slidably connected inside the two cooling bins (7) respectively, the filter plates (6) being fixedly connected to two mounting blocks (17) on both the front and rear sides, the mounting blocks (17) being slidably connected to two clamping blocks (20), one side of the clamping block (20) being fixedly connected to a second spring (21), one end of the second spring (21) being fixedly connected inside the mounting block (17).
3. A vacuum coating machine cavity cooling device according to claim 1, Features: A mounting frame (8) is fixedly connected to the top of the coating chamber (3), and the condensation pipe (9) is arranged inside the mounting frame (8).
4. A vacuum coating machine cavity cooling device according to claim 2, Features: One end of the clamping block (20) is slidably connected to one side of the mounting block (17), and one end of the clamping block (20) is slidably connected to the inside of the cooling bin (7).
5. The vacuum coating machine cavity cooling device according to claim 1, Features: One end of the other water pipe 2 (11) passes through the bottom of the water storage bin (10), and one end of the other water pipe 2 (11) is fixedly connected to the inner side of the bottom of the water storage bin (10).
6. A vacuum coating machine cavity cooling device according to claim 2, Features: Two fans (13) are fixedly connected inside the cooling bin (7), and the two fans (13) are arranged on one side of the filter plate (6).
7. The vacuum coating machine cavity cooling device according to claim 1, Features: A plurality of evenly distributed air outlet holes (12) are provided inside the front and rear sides of the cooling bin (7).
8. The vacuum coating machine cavity cooling device according to claim 1, Features: A sealing door (4) is rotatably connected to the front side of the coating chamber (3).
Citation Information
Patent Citations
Cavity cooling device of vacuum coating machine
CN211972429U
