Connecting structure between groove bodies and etching equipment
By setting up a connection structure between the cover plates between the wet etching grooves, the etching liquid drips into the surrounding grooves by using the convex and concave surface design, the pollution and corrosion problems caused by the dripping of liquid in the wet etching machine are solved. , realizes safe and efficient cleaning of equipment and saving consumption.
Patent Information
- Application Number
- CN202420867758.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-24
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-04-24
AI Technical Summary
In wet tank machines, the robot can easily drip the etching liquid when it moves between different tanks, resulting in contamination or corrosion of the equipment sheet. Existing solutions such as small hole inflow method cannot completely eliminate pollution, and there is safety during the cleaning process. Hidden dangers and high consumption problems.
Design a connecting structure between grooves and bodies, using a cover plate as an arched structure with high middle and low sides. The first surface of the cover plate is a convex surface and the second surface is a concave surface, which is used to drip between adjacent etching grooves. Liquid flows into the surrounding tank under gravity to avoid contamination or damage, and can be detached for easy cleaning.
Effectively prevent etching liquid from falling and contaminating adjacent tank bodies, reduce the risk of equipment corrosion, simplify the cleaning process, improve safety and save safety supplies such as acid-absorbing cotton.
Smart Images
Figure CN222139352U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor product manufacturing, in particular to a connection structure between slots and etching equipment. Background Art
[0002] Most of the single crystal silicon rods are manufactured by the Czochralski method, also known as the direct pulling method. During the wafer processing and testing process, the silicon wafer thinning wet etching process, the silicon wafer defect wet etching process and the silicon wafer cleaning process are indispensable. The requirements for the design of the tank wet etcher and the tank wet cleaning machine are diverse, so the convenience of the connection design between the tanks is particularly important.
[0003] The tank body design of the wet tank machine mainly includes different types of high-concentration mixed acid tanks, low-concentration acid and alkali tanks, water tanks, drying tanks, etc. High-concentration mixed acid tanks include Secco high-concentration mixed acid tanks, Bright high-concentration mixed acid tanks, Wright high-concentration mixed acid tanks, etc.; low-concentration acid and alkali tanks include HF tanks, SC-1 tanks, SC-2 tanks, etc.; water tanks are generally QDR tanks and Rinse tanks; drying tanks include hot water slow pull tanks, IR drying tanks, spin drying tanks and gas drying tanks, etc. During the use of the wet tank machine, the manipulator moves between different tanks, which will bring out part of the liquid between the previous tanks and drip on the moving path. After the dripping liquid accumulates and dries, it is difficult to clean it, and it will cause certain pollution to the equipment plate (especially the cavity connection). When it comes to high-concentration mixed acid tanks, the high-concentration mixed acid liquid will have certain corrosive and destructive properties to the equipment plate (especially the cavity connection), which seriously affects the service life of the equipment. During the subsequent cleaning process, personnel will enter the equipment, which has certain safety hazards and will consume a large amount of safety supplies such as acid absorbent cotton. At present, the connection of the wet tank machine cavity is mostly processed by punching, and the liquid dripping from the robot flows into the corresponding cavity through the small hole and then discharged through the cavity. This method cannot completely eliminate the pollution of the cavity connection, and the residual liquid in the small hole is more difficult to clean. It also consumes a certain amount of safety supplies such as acid-absorbing cotton, and personnel will enter the equipment during the cleaning process, which poses a safety hazard. The optimization design of the connection between tanks is currently a point that is generally ignored by technicians in this field. Utility Model Content
[0004] In order to solve the above technical problems, the utility model provides a connection structure between grooves and an etching device, which solves the problem that etching liquid easily drips between adjacent etching grooves, causing equipment plates to be contaminated or corroded.
[0005] In order to achieve the above purpose, the technical solution adopted by the embodiment of the utility model is: a connecting structure between grooves, used to prevent etching liquid from dripping on the plate between wet etching grooves, including a cover plate, which is an arched structure with a high middle and low sides.
[0006] Optionally, the cover plate has a triangular structure, and includes a first inclined surface portion, a second inclined surface portion, and a curved surface portion connected between the first inclined surface portion and the second inclined surface portion.
[0007] Optionally, the cover plate has an isosceles triangle structure.
[0008] Optionally, the cover plate has an arc-shaped structure.
[0009] Optionally, the cover plate includes a concave surface, and the inter-trough connection structure also includes two support plates connected to the concave surface, and the two support plates are arranged opposite to each other and at a distance.
[0010] Optionally, stoppers are provided at opposite ends of the cover plate.
[0011] Optionally, the cover plate completely covers the stopper.
[0012] Optionally, the cover plate is made of PVC or PP material.
[0013] The utility model also provides an etching device, comprising a plurality of etching grooves, wherein the above-mentioned groove body connection structure is provided between two adjacent etching grooves.
[0014] Optionally, the inter-groove connection structure is detachably connected between two adjacent etching grooves.
[0015] The beneficial effect of the utility model is as follows: the utility model provides a connecting structure between grooves, which is covered between adjacent etching grooves when in use, and the connecting structure between grooves includes a cover plate, a first surface of the cover plate is a convex surface, and a second surface of the cover plate is a concave surface. When in use, the concave surface faces the etching groove, and when etching liquid droplets fall on the cover plate, most of the droplets will flow into the two surrounding etching grooves under the action of gravity along the convex structure of the cover plate, thereby avoiding contamination or damage to the area between the etching grooves. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 A partial schematic diagram showing an etching device in the related art;
[0017] Figure 2 A partial schematic diagram showing an etching device in the related art;
[0018] Figure 3 A schematic diagram showing the connection structure between the tanks in the embodiment of the utility model;
[0019] Figure 4 A schematic diagram showing the connection structure between the tanks in the embodiment of the utility model;
[0020] Figure 5 A schematic diagram showing the use state of the connection structure between the tanks in the embodiment of the utility model;
[0021] Figure 6 A schematic diagram showing the use state of the connection structure between the tanks in the embodiment of the utility model;
[0022] Figure 7 A schematic diagram showing the use state of the connection structure between the tanks in the embodiment of the utility model;
[0023] Figure 8 A schematic diagram showing the use state of the connection structure between the tanks in the embodiment of the utility model;
[0024] Fig. 9 A schematic diagram showing the connection structure between the tanks in an embodiment of the utility model.
[0025] 1 cover plate; 11 first inclined portion; 12 second inclined portion; 2 support plate; 3 stopper; 10 baffle; 20 first portion. DETAILED DESCRIPTION
[0026] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.
[0027] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.
[0028] In the related art, most etching equipment does not have any structure to prevent dripping between two adjacent etching grooves. Figure 1 It is a schematic diagram of a part of the structure of an etching device in the related art. Figure 1Only the connection part between two adjacent etching grooves is shown. The etching groove includes a cavity and an open end face located at the periphery of the outlet of the cavity. The open end face of each etching groove includes a first portion 20 close to the etching groove adjacent thereto. A baffle 10 is provided at the connection between the two open end faces. However, the baffle cannot prevent the etching liquid from contaminating the etching equipment. Figure 2 It is a partial structural schematic diagram of an etching device in the related art. Figure 2 Only the connecting portion between two adjacent etching grooves is shown. The etching groove includes a cavity and an opening end surface located at the periphery of the outlet of the cavity. The opening end surface is a planar structure and is easily corroded by dripping etching liquid.
[0029] refer to Figure 3-Figure 7 In response to the above problems, this embodiment provides a connection structure between grooves, which is used to prevent etching liquid from dripping onto the plate between wet etching grooves, including a cover plate, wherein the cover plate includes a first surface and a second surface arranged opposite to each other, the first surface is a convex surface, and the second surface is a concave surface.
[0030] The utility model provides a connection structure between grooves, which is arranged between adjacent etching grooves when in use, and the connection structure between grooves includes a cover plate 1, which is an arched structure with a high middle and low sides. That is, the cover plate 1 includes a first surface and a second surface arranged opposite to each other, the first surface is a convex surface, and the second surface is a concave surface. When in use, the concave surface faces the etching groove, and when etching liquid drops on the cover plate 1, most of the droplets will flow into the two surrounding etching grooves under the action of gravity along the convex surface structure of the cover plate 1, thereby avoiding contamination or damage to the part between the etching grooves.
[0031] It should be noted that the inter-slot connection structure in this embodiment can be detachably connected between two adjacent etching grooves when in use, so that the inter-slot connection structure is easy to disassemble and wash. Since the first surface of the cover plate 1 is a convex surface and the second surface of the cover plate 1 is a concave surface, when the etching liquid drops on the cover plate 1, most of the etching liquid will flow into the two surrounding etching grooves under the action of gravity along the convex structure of the cover plate 1, but a small part of the etching liquid will remain on the cover plate 1. The above-mentioned detachable connection method is used to facilitate the cleaning of the cover plate 1.
[0032] The inter-tank connection structure in this embodiment also has the following advantages: it does not take up space, has low construction cost, is simple and convenient to disassemble and clean, personnel do not need to enter the interior of the equipment for cleaning, is safe and efficient, and effectively saves safety supplies such as acid-absorbing cotton.
[0033] It should be noted that, in use, the open end face of each etching groove includes a first portion 20 close to another etching groove, and the area of the positive projection of the cover plate 1 in the plane where the open end face of the etching groove is located is greater than or equal to the area of the first portion 20 of the two adjacent etching grooves, that is, the cover plate 1 completely covers the area between the two etching grooves to effectively protect the area between the two adjacent etching grooves.
[0034] It should be noted that each etching groove includes a cavity and an opening end surface surrounding the opening of the cavity, and the opening end surface of each etching groove includes a first portion 20 close to another etching groove. The first portion 20 of two adjacent etching grooves is the area between the two adjacent etching grooves, which is also the area to be protected by the cover plate 1.
[0035] The specific structural forms of the cover plate 1 can be various, as long as the convex structure allows the liquid to slide freely into the corresponding etching groove under the action of gravity to avoid contamination or corrosion of the parts between adjacent etching grooves. The following introduces several structural forms of the cover plate 1 in this embodiment.
[0036] refer to Figure 7 In an exemplary embodiment, the cover plate 1 has a triangular structure, and the cover plate 1 includes a first inclined surface 11 and a second inclined surface 12 .
[0037] refer to Fig. 9 In an exemplary embodiment, the cover plate 1 has a triangular structure, and includes a first inclined surface portion 11 and a second inclined surface portion 12 , and a curved surface portion 13 connected between the first inclined surface portion 11 and the second inclined surface portion 12 .
[0038] The curved surface 13 is provided to ensure a smooth transition between the first inclined surface 11 and the second inclined surface 12, thereby avoiding the residual etching solution.
[0039] It should be noted that the curved portion 13 is convexly arranged in a direction away from the etching groove, which is conducive to the sliding of the liquid.
[0040] refer to Fig. 9 In an exemplary embodiment, one end of the first bevel portion 11 away from the second bevel portion 12 is a plane portion 14, and one end of the second bevel portion 12 away from the first bevel portion 11 is a plane portion 14. After the plane portion 14 is assembled with the etching groove, the plane portion 14 is arranged parallel to the opening end face of the etching groove (i.e., the end face located on the periphery of the opening of the etching groove). The arrangement of the plane portion 14 improves the connection stability between the cover plate 1 and the etching groove and prevents the cover plate from being offset.
[0041] Exemplarily, the surface of the planar portion 14 used for connecting with the open end surface of the etched groove is a rough surface, which increases the friction between the planar portion 14 and the open end surface of the etched groove, thereby increasing the connection stability with the open end surface of the etched groove.
[0042] It should be noted that the first surface of the cover plate 1 is smooth to reduce friction and facilitate the sliding of the liquid.
[0043] In an exemplary embodiment, the cover plate 1 is in an isosceles triangle structure, but is not limited thereto.
[0044] Generally, the structures of the etching grooves are the same, and the cover plate 1 is arranged in an isosceles triangle, which is beneficial to the connection stability between the cover plate 1 and the etching grooves and prevents the cover plate 1 from deviating toward one of the etching grooves.
[0045] In an exemplary embodiment, the cover plate 1 is in an arc-shaped structure.
[0046] The arc-shaped structure may be a part of a circular structure or a part of an elliptical structure.
[0047] It should be noted that the greater the curvature of the arc-shaped structure, the more conducive it is to the sliding of the liquid, thereby preventing the liquid from remaining on the cover plate 1 .
[0048] In an exemplary embodiment, the cover plate 1 includes a concave surface, and the inter-trough connection structure further includes two support plates 2 connected to the concave surface, and the two support plates 2 are arranged opposite to each other and at a distance.
[0049] When in use, the cover plate 1 is placed between two etching grooves, and the support plate 2 can be supported on the open end surface between the etching grooves, thereby increasing the connection stability between the groove body connection structure and the etching grooves, and effectively protecting the portion between two adjacent etching grooves. In addition, the support plate 2 can support the cover plate 1, increase the strength of the cover plate 1, and prevent the cover plate 1 from deforming during long-term use.
[0050] Exemplarily, the two support plates 2 are symmetrically arranged relative to the center point of the cover plate 1 to ensure the support stability of the cover plate 1 .
[0051] exist Figure 1 In the etching device shown, two support plates 2 can be located on opposite sides of the baffle plate 10 to clamp the baffle plate 10, enhance the connection stability between the groove body connection structure and the etching groove, and prevent the cover plate 1 from deviating and sliding into the etching groove during use.
[0052] It should be noted that the connection structure between the tanks is applied to Figure 1In the etching device shown in the figure, the height of the support plate 2 is greater than or equal to the height of the baffle 10 .
[0053] refer to Figure 4 , Figure 7 and Figure 8 In an exemplary embodiment, stoppers 3 are provided at opposite ends of the cover plate 1 .
[0054] exist Figure 2 In the etching device shown, no baffle plate 10 is arranged between two adjacent etching grooves. At this time, the baffle block 3 can be connected to the inner wall of the etching groove, so that the two relatively arranged baffle blocks 3 are clamped on the inner wall of the cavity of two adjacent etching grooves, thereby fixing the cover plate 1 and preventing the cover plate 1 from sliding into the cavity of the etching groove.
[0055] Exemplarily, a groove may be provided on the inner side wall of the cavity, and a protrusion that can be inserted into the groove may be provided on the stopper 3, so as to increase the connection stability of the cover plate 1.
[0056] Exemplarily, the stopper 3 and the cover plate 1 may be an integral structure or a separate structure.
[0057] In an exemplary embodiment, the cover plate 1 completely covers the stopper 3 .
[0058] Regardless of whether the structure of the cover plate 1 is triangular or arc-shaped, the cover plate 1 is covered on the stopper 3, so that the etching liquid dripping from the outer surface of the cover plate 1 can directly flow back into the etching groove to avoid residue between the cover plate 1 and the stopper 3.
[0059] Exemplarily, the cover plate 1 is made of PVC (polyvinyl chloride) or PP (polypropylene), but is not limited thereto.
[0060] The utility model also provides an etching device, comprising a plurality of etching grooves, wherein the above-mentioned groove body connection structure is provided between two adjacent etching grooves.
[0061] Each of the etching grooves includes a cavity and an open end face located at the periphery of the opening of the cavity, the open end face of one of the etching grooves includes a first portion 20 close to another adjacent etching groove, the first portion 20 of the two adjacent etching grooves is a connecting area between the two adjacent etching grooves, the cover plate 1 is covered on the connecting area, and the cover plate 1 completely covers the connecting area.
[0062] The tank body connection structure is detachably connected to the connection area, for example, by a snap-on method, but the present invention is not limited thereto.
[0063] Exemplarily, the concave surface of the cover plate 1 is provided with a support plate 2. When in use, a groove may be provided on the connection area, and the support plate 2 is inserted into the groove.
[0064] There are a few points to note:
[0065] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.
[0066] (2) For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced, that is, these drawings are not drawn according to the actual scale. It is understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or there may be intermediate elements.
[0067] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.
[0068] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.
Claims
1. A connection structure between grooves, used to prevent etching liquid from dripping on the plate between wet etching grooves, characterized in that: The utility model comprises a cover plate, and the cover plate is an arched structure with a high middle and low sides.
2. The inter-tank connection structure according to claim 1, characterized in that: The cover plate has a triangular structure and includes a first inclined surface portion, a second inclined surface portion, and a curved surface portion connected between the first inclined surface portion and the second inclined surface portion.
3. The inter-tank connection structure according to claim 2, characterized in that: The cover plate is in an isosceles triangle structure.
4. The inter-tank connection structure according to claim 1, characterized in that: The cover plate is in an arc-shaped structure.
5. The inter-tank connection structure according to claim 1, characterized in that: The cover plate includes a concave surface, and the inter-trough connection structure also includes two support plates connected to the concave surface, and the two support plates are arranged opposite to each other and at a distance.
6. The inter-tank connection structure according to claim 1, characterized in that: Stop blocks are arranged at opposite ends of the cover plate.
7. The inter-tank connection structure according to claim 6, characterized in that: The cover plate completely covers the stopper.
8. The inter-tank connection structure according to claim 1, characterized in that: The cover plate is made of PVC or PP material.
9. An etching device, characterized in that: It comprises a plurality of etching grooves, and a groove body connecting structure as claimed in any one of claims 1 to 8 is provided between two adjacent etching grooves.
10. The etching device according to claim 9, characterized in that: The inter-slot connection structure is detachably connected between two adjacent etching slots.