Wafer feeding mechanism

Abstract

The utility model relates to the technical field of wafer processing, and discloses a wafer feeding mechanism which comprises a bottom plate, a linear motion assembly, guide rails, a liquid medicine box and a material box, the linear motion assembly is fixed on the bottom plate, the guide rails are symmetrically arranged on the two sides of the linear motion assembly, and the liquid medicine box is fixed on the bottom plate. The output end of the linear motion assembly and a sliding block on the guide rail are both fixed to the liquid medicine box, the upper end of the liquid medicine box is open, a liquid medicine cavity is formed in the liquid medicine box, a liquid inlet pipeline and a liquid outlet pipeline are arranged at the bottom of the liquid medicine cavity, and the liquid inlet pipeline and the liquid outlet pipeline are communicated with an external liquid supply device. The material box is located in the liquid medicine cavity, a containing cavity used for containing wafers is formed in the material box, and a liquid passing opening communicated with the liquid medicine cavity is formed in the bottom of the material box. The beneficial effects of the utility model are that the production safety risk is reduced, and the wafer is prevented from being polluted by dust due to long-time contact with the external environment; the wafer is prevented from being exposed in air for a long time to be oxidized, and the processing quality of the wafer is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a wafer loading mechanism. Background Art

[0002] The wafer loading mechanism on the existing wafer processing equipment is generally fixed inside the equipment or outside the equipment. The former is convenient for the wafer processing equipment to take out the wafer by the wafer taking robot, but when replacing the wafer box, it is necessary to manually reach into the equipment and place the wafer box on the wafer material box fixing mechanism inside the equipment. This may easily cause the wafer taking robot inside the equipment to come over to take the wafer when the personnel replace the wafer box, causing harm to the personnel; the latter sets the wafer loading mechanism outside the equipment, allowing the wafer taking robot of the wafer processing equipment to extend outside the equipment to take the wafer. The robot extending outside the equipment may easily cause harm to the personnel, and the wafer is placed outside the equipment and is in contact with the external environment for a long time, and is easily contaminated by dust in the external environment. In addition, the existing wafer box is generally placed in the air. For processing occasions with special requirements, the wafer is required to be immersed in the liquid medicine to prevent the wafer from being exposed to the air for a long time and being oxidized. For such occasions, the existing wafer loading mechanism is difficult to meet this processing requirement. Utility Model Content

[0003] The purpose of the utility model is to provide a wafer loading mechanism to avoid the robot arm causing harm to personnel during the robot arm taking wafers and the staff loading process, thereby reducing production safety risks and, at the same time, avoiding the wafers from being contaminated by dust due to long-term contact with the external environment. In addition, liquid medicine can be added to the liquid medicine box so that the wafers in the material box are immersed in the liquid medicine, thereby avoiding the wafers from being exposed to the air for a long time and being oxidized, thereby improving the processing quality of the wafers.

[0004] In order to achieve the above-mentioned purpose, the utility model provides a wafer loading mechanism, including: a base plate, a linear motion component, a guide rail, a medicine liquid box and a material box, the linear motion component is fixed on the base plate, the guide rails are symmetrically arranged on both sides of the linear motion component, the output end of the linear motion component and the slider on the guide rail are fixed to the medicine liquid box, the upper end of the medicine liquid box is open and a medicine liquid cavity is arranged inside, a liquid inlet pipe and a liquid outlet pipe are arranged at the bottom of the medicine liquid cavity, the liquid inlet pipe and the liquid outlet pipe are connected with an external liquid supply device, the material box is located in the medicine liquid cavity, a accommodating cavity for placing wafers is arranged in the material box, and a liquid outlet connected to the medicine liquid cavity is arranged at the bottom of the material box.

[0005] Furthermore, a high liquid level sensor and a low liquid level sensor are sequentially arranged on the side wall of the medicine liquid box from top to bottom.

[0006] Furthermore, the liquid inlet pipe and the liquid outlet pipe are both provided with control valves.

[0007] Furthermore, the bottom surface of the liquid medicine chamber is evenly distributed with limiting bosses around the circumference for limiting the installation of the material box.

[0008] Furthermore, the height of the material box is smaller than the depth of the medicine liquid chamber.

[0009] Furthermore, partitions are evenly distributed in the material box, and the partitions divide the accommodating cavity into a plurality of accommodating units.

[0010] Furthermore, a limiting groove for mounting and positioning the sliding block on the guide rail is provided at the bottom of the medicine liquid box.

[0011] Furthermore, a positioning groove for limiting the installation of the guide rail is provided on the bottom plate.

[0012] Furthermore, the linear motion assembly adopts a magnetically coupled cylinder.

[0013] Furthermore, the liquid inlet pipe and the liquid outlet pipe are both made of flexible hoses.

[0014] Compared with the prior art, the wafer loading mechanism of the utility model has the following beneficial effects: the material box can be transported into the equipment through the linear motion component, which can prevent the wafers from being contaminated by dust due to long-term contact with the external environment; when manual loading of wafers is required, the linear motion component can transport the material box to the outside of the equipment, which can prevent the robot from causing harm to personnel during the process of taking the wafers by the robot and the process of staff loading the wafers, thereby reducing production safety risks; in addition, by connecting the liquid inlet pipe and the external liquid supply pipe, liquid medicine can be added to the liquid medicine box so that the wafers in the material box are immersed in the liquid medicine, which can prevent the wafers from being exposed to the air for a long time and being oxidized, thereby improving the processing quality of the wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a reference diagram of the first use state of the wafer loading mechanism of the embodiment of the utility model;

[0016] Figure 2 This is a reference diagram of the second use state of the wafer loading mechanism of the embodiment of the utility model;

[0017] Figure 3 It is a cross-sectional view of a wafer loading mechanism according to an embodiment of the utility model;

[0018] Figure 4 It is a cross-sectional view of the wafer loading mechanism of the embodiment of the utility model from another perspective;

[0019] Figure 5 It is a top view of the wafer loading mechanism of the embodiment of the utility model;

[0020] Figure 6It is a schematic diagram of the pipeline of the liquid medicine box of the wafer loading mechanism according to the embodiment of the utility model.

[0021] In the figure, 1, bottom plate; 11, positioning groove; 2, linear motion component; 3, guide rail; 4, medicine liquid box; 41, medicine liquid cavity; 411, limiting boss; 42, limiting groove; 5, material box; 51, accommodating cavity; 511, accommodating unit; 52, liquid outlet; 53, partition; 6, liquid inlet pipe; 7, liquid outlet pipe; 8, high liquid level sensor; 9, low liquid level sensor; 10, control valve; a-processing equipment; b-chip-taking robot; c-wafer. DETAILED DESCRIPTION

[0022] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0023] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. used in the present invention to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred devices and elements must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] See also Figures 1 to 4A wafer loading mechanism according to a preferred embodiment of the utility model, wherein a is a processing equipment, b is a wafer picking robot on the processing equipment, and c is a wafer. The wafer loading mechanism according to the utility model comprises a base plate 1, a linear motion component 2, a guide rail 3, a medicine liquid box 4 and a material box 5, wherein the base plate 1 is used as a mounting carrier for mounting other parts, and the linear motion component 2 is used to drive the medicine liquid box 4 and the material box 5 to move synchronously into the processing equipment a to facilitate the wafer picking robot b to pick up materials, or to drive the medicine liquid box 4 and the material box 5 to move synchronously outside the processing equipment a to facilitate manual replacement of the material box 5 for loading materials, thereby avoiding contact between the wafer picking robot b and the staff during work, and reducing production safety risks. Specifically, the linear motion component 2 is fixed on the base plate 1, and guide rails 3 are symmetrically provided on both sides of the linear motion component 2. The output end of the linear motion component 2 and the slider on the guide rail 3 are fixed to the liquid medicine box 4. The linear motion component 2 can drive the liquid medicine box 4 to move in and out of the processing equipment a along the length direction of the guide rail 3. In order to prevent the wafer from being exposed to the air for a long time and being oxidized, the upper end of the liquid medicine box 4 is open and a liquid medicine cavity 41 is provided inside. In order to facilitate the addition of liquid medicine into the liquid medicine cavity 41, a liquid inlet pipe 6 and a liquid outlet pipe 7 are provided at the bottom of the liquid medicine cavity 41, and the liquid inlet pipe 6 and the liquid outlet pipe 7 are connected to the external liquid supply device. The material box 5 is located in the liquid medicine cavity 41. In order to facilitate the placement of wafers, a storage cavity 51 is provided in the material box 5, and, in order to facilitate the immersion of the wafer in the liquid medicine, a liquid outlet 52 connected to the liquid medicine cavity 41 is provided at the bottom of the material box 5.

[0025] Further, in order to facilitate the addition of liquid medicine and monitor the liquid medicine height in the liquid medicine chamber 41, refer to Figure 6 A high liquid level sensor 8 and a low liquid level sensor 9 are arranged on the side wall of the drug liquid box 4 from top to bottom. In order to facilitate the timed replacement of the drug liquid in the drug liquid chamber 41 and prevent the drug liquid from failing to protect the wafer, a control valve 10 is arranged on both the liquid inlet pipe 6 and the liquid outlet pipe 7. When the drug liquid needs to be replaced, the control valve 10 on the liquid outlet pipe 7 is opened to release the drug liquid in the drug liquid chamber 41, and then the control valve 10 on the liquid outlet pipe 7 is closed, and the control valve 10 on the liquid inlet pipe 6 is opened to inject the drug liquid to achieve the replacement of the drug liquid.

[0026] Further, in order to facilitate the operator to replace the material box 5, the material box 5 is installed and positioned. Figure 3 , Figure 4 and Figure 5 , the bottom surface of the liquid medicine chamber 41 is evenly distributed with limiting bosses 411 for the installation of the material box 5, and the outer wall of the material box 5 is clamped between the limiting bosses 411. Furthermore, in order to completely immerse the wafers in the liquid medicine, the height of the material box 5 needs to be less than the depth of the liquid medicine chamber 41. Furthermore, in order to facilitate the separation and placement of the wafers, refer to Figure 3Partitions 53 are evenly distributed in the material box 5. The partitions 53 divide the accommodating cavity 51 into a plurality of accommodating units 511. Each accommodating unit 511 can hold a wafer separately to prevent the wafers from contacting and colliding with each other.

[0027] In some embodiments, in order to facilitate the positioning of the liquid medicine box 4 during installation, refer to Figure 4 , a limiting groove 42 for installing and positioning the slider on the guide rail 3 is provided at the bottom of the medicine liquid box 4, the slider is clamped in the limiting groove 42, and the slider box medicine liquid box 4 is fixedly connected by screws. Similarly, in order to facilitate the limiting of the installation of the guide rail 3, a positioning groove 11 for the installation and limiting of the guide rail 3 is provided on the bottom plate 1. Further, the linear motion component 2 can drive the medicine liquid box 4 and the material box 5 to move linearly synchronously. In this embodiment, in order to simplify the structure, the linear motion component 2 adopts a magnetic coupling cylinder, and standard linear motion elements such as linear modules can also be selected according to the conveying accuracy. Since the liquid inlet pipe 6 and the liquid outlet pipe 7 are synchronously extended and retracted when the linear motion component 2 drives the medicine liquid box 4 and the material box 5 to move synchronously, the liquid inlet pipe 6 and the liquid outlet pipe 7 need to have a certain flexibility to avoid the liquid inlet pipe 6 and the liquid outlet pipe 7 from breaking during the linear motion process. In this embodiment, the liquid inlet pipe 6 and the liquid outlet pipe 7 are both made of flexible hoses.

[0028] The working process of the utility model is as follows: when it is necessary to manually load the wafers, the linear motion component 2 drives the liquid medicine box 4 to move outside the processing equipment a, and the liquid medicine in the liquid medicine chamber 41 flows out through the liquid outlet pipe 7. After there is no liquid medicine in the liquid medicine chamber 41, the operator replaces the empty material box 5 in the liquid medicine box 4, and places the material box 5 loaded with wafers into the liquid medicine chamber 41. Then, new liquid medicine is injected into the liquid medicine chamber 41 to completely immerse the wafers. Finally, the linear motion component 2 drives the liquid medicine box 4 to move into the processing equipment a to process the wafers.

[0029] In summary, the embodiment of the utility model provides a wafer loading mechanism, which can transport the material box 5 into the equipment through the linear motion component 2, so as to avoid the wafers from being in contact with the external environment for a long time and being contaminated by dust. When the wafers need to be loaded manually, the linear motion component 2 can transport the material box 5 to the outside of the equipment, so as to avoid the robot from causing harm to personnel during the robot taking the wafers and the staff loading the wafers, thereby reducing the production safety risk. In addition, by connecting the liquid inlet pipe 6 with the external liquid supply pipe, liquid medicine can be added to the liquid medicine box 4, so that the wafers in the material box 5 are immersed in the liquid medicine, which can avoid the wafers from being exposed to the air for a long time and being oxidized, thereby improving the processing quality of the wafers.

[0030] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A wafer loading mechanism, characterized in that: include: A base plate, a linear motion component, a guide rail, a medicine liquid box and a material box, the linear motion component is fixed on the base plate, the guide rails are symmetrically arranged on both sides of the linear motion component, the output end of the linear motion component and the sliders on the guide rails are fixed to the medicine liquid box, the upper end of the medicine liquid box is open and a medicine liquid cavity is arranged inside, a liquid inlet pipe and a liquid outlet pipe are arranged at the bottom of the medicine liquid cavity, the liquid inlet pipe and the liquid outlet pipe are connected with an external liquid supply device, the material box is located in the medicine liquid cavity, a accommodating cavity for placing wafers is arranged in the material box, and a liquid outlet connected to the medicine liquid cavity is arranged at the bottom of the material box.

2. The wafer loading mechanism according to claim 1, characterized in that: The side wall of the medicine liquid box is provided with a high liquid level sensor and a low liquid level sensor in sequence from top to bottom.

3. The wafer loading mechanism according to claim 1, characterized in that: The liquid inlet pipeline and the liquid outlet pipeline are both provided with control valves.

4. The wafer loading mechanism according to claim 1, characterized in that: The bottom surface of the liquid medicine chamber is evenly distributed with limiting bosses for limiting the installation of the material box in the circumferential direction.

5. The wafer loading mechanism according to claim 1, characterized in that: The height of the material box is smaller than the depth of the liquid medicine chamber.

6. The wafer loading mechanism according to claim 1, characterized in that: Partitions are evenly distributed in the material box, and the partitions divide the accommodating cavity into a plurality of accommodating units.

7. The wafer loading mechanism according to claim 1, characterized in that: A limiting groove for mounting and positioning the sliding block on the guide rail is provided at the bottom of the medicine liquid box.

8. The wafer loading mechanism according to claim 1, characterized in that: The bottom plate is provided with a positioning groove for limiting the installation of the guide rail.

9. The wafer loading mechanism according to claim 1, characterized in that: The linear motion component adopts a magnetic coupling cylinder.

10. The wafer loading mechanism according to claim 1, characterized in that: The liquid inlet pipeline and the liquid outlet pipeline are both made of flexible hoses.

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