Carrying table device for cleaning etching disc

Abstract

The utility model belongs to the technical field of semiconductor manufacturing, and particularly relates to a platform deck device for cleaning an etching disc, which comprises a base, two groups of grooves are arranged on the upper side of the base, the two groups of grooves are symmetrically arranged by taking the center line of the base as a symmetry axis, an adjusting bearing assembly is arranged above the base, and the adjusting bearing assembly is arranged on the base. An adjusting bearing assembly is arranged in the base, an etching disc is placed on the adjusting bearing assembly, a liquid collecting drawer is slidably connected in the base, the adjusting bearing assembly comprises a bidirectional screw rod, and the bidirectional screw rod is rotatably connected in the groove. According to the carrying table device for cleaning the etching disc, by using the adjusting bearing assembly, the etching discs of different sizes can be borne, meanwhile, in the process of stabilizing the etching discs, the etching discs extrude pressing rods, then under the action of hinge rods, stabilizing rods are made to rotate and extrude the etching discs, and through the combined action of the four sets of stabilizing rods, the etching discs can be cleaned more stably. And the bearing stability of the etching discs with different sizes is ensured, the subsequent cleaning of the etching discs is ensured, and the application range is wide.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a stage device for cleaning an etching disc. Background Art

[0002] The etching plate is used to hold wafers during the wafer etching process, and then placed in the etching chamber of the etcher for etching. During the etching, the etching gas acts on the wafer from above to complete the etching of the wafer. After long-term use, there will be deposits on the plate, so the etching plate needs to be cleaned.

[0003] At present, a Chinese patent with announcement number CN216937589U in the prior art discloses a carrier device for cleaning ICP silicon carbide etching disks. The device places the etching disk on the carrier device for cleaning to prevent it from falling and bumping when cleaning by hand, and a top card slot and a bottom card slot are arranged on the base and the support plate. The upper and lower ends of the etching disk are clamped in the top card slot and the bottom card slot when it is tilted to form a triangular support, so that the etching disk can be placed on the carrier device more stably, is not prone to shaking, and the cleaning efficiency is improved. However, during actual use, the device is affected by the top card slot and the bottom card slot, and can only place etching disks of a specific size, resulting in a limited scope of use of the device. In view of this, a carrier device for cleaning etching disks is proposed. Utility Model Content

[0004] The main purpose of the utility model is to provide a stage device for cleaning an etching disc, which can solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides a stage device for cleaning an etching disk, comprising a base, two groups of grooves are provided on the upper side of the base, the two groups of grooves are symmetrically arranged with the center line of the base as the symmetry axis, an adjustment bearing assembly is provided above the base, an etching disk is placed on the adjustment bearing assembly, a liquid collection drawer is slidably connected in the base, and the adjustment bearing assembly comprises:

[0006] A bidirectional screw rod, the bidirectional screw rod is rotatably connected in the groove, and the bidirectional screw rod is threadedly connected with a thread block;

[0007] A bearing bar, the bearing bar is fixedly connected to the upper side of the threaded block, one end of the bearing bar away from the threaded block is fixedly connected to a guide block, the guide block is penetrated by the guide rod and is slidably connected to the guide rod;

[0008] and a stabilizing component, wherein the stabilizing component is arranged on the bearing bar.

[0009] Preferably, the stabilizing assembly includes a pressure rod, which passes through the load-bearing bar and is slidably connected to the load-bearing bar. The end of the pressure rod away from the load-bearing bar is fixedly connected to a fixing ring. The fixing ring is elastically connected to the outer wall of the load-bearing bar via a reset spring. By using the reset spring, the pressure rod drives the fixing ring to move and stretch the reset spring, which facilitates the subsequent reset of the pressure rod.

[0010] Preferably, a hinged rod is hinged on the outer wall of the fixing ring, a stabilizing rod is hinged on the end of the hinged rod away from the fixing ring, the stabilizing rod is penetrated by the positioning shaft, the stabilizing rod and the positioning shaft are elastically connected by a torsion spring, and the use of the torsion spring allows the stabilizing rod to be reset after rotation.

[0011] Preferably, a placement groove is provided on the upper side of the supporting bar for placing the etching disk.

[0012] Preferably, a collecting groove is provided on the upper side of the base, and the collecting groove is conical in shape. The cleaning waste liquid is collected through the collecting groove, so as to facilitate the subsequent centralized treatment of the cleaning waste liquid.

[0013] Preferably, the end of the bidirectional screw rod is fixedly connected with a rotating handle, and the rotating handle passes through the inner wall of the base and is rotatably connected to the inner wall of the base.

[0014] The utility model provides a stage device for cleaning an etching disk, which has the following beneficial effects:

[0015] (1) The stage device for cleaning the etching disk can carry etching disks of different sizes by adjusting the use of the carrying components. At the same time, in the process of stabilizing the etching disk, the etching disk squeezes the pressure rod, and then under the action of the hinge rod, the stabilizing rod rotates to squeeze the etching disk. Through the joint action of four groups of stabilizing rods, the stability of the carrying of etching disks of different sizes is guaranteed, and the subsequent cleaning of the etching disk is guaranteed, and the scope of use is wide.

[0016] (2) The use of the collecting tank and the liquid collecting drawer of the stage device for cleaning the etching disk allows the waste liquid from cleaning the etching disk to slide from the collecting tank into the liquid collecting drawer, thereby completing the collection of the cleaning waste liquid and facilitating the subsequent centralized treatment of the cleaning waste liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0018] Figure 1It is a schematic diagram of the overall three-dimensional structure of the utility model;

[0019] Figure 2 It is a schematic diagram of a partial three-dimensional structure of the utility model;

[0020] Figure 3 For this utility model Figure 2 Schematic diagram of the structure of A.

[0021] Description of Figure Numbers:

[0022] 1. Base; 2. Groove; 3. Adjustment bearing assembly; 4. Etching disk; 5. Liquid collecting drawer; 31. Bidirectional screw; 32. Threaded block; 33. Bearing bar; 34. Stabilizing assembly; 35. Guide block; 36. Guide rod; 101. Collecting trough; 331. Placement groove; 341. Pressure rod; 342. Fixing ring; 343. Reset spring; 344. Articulated rod; 345. Stabilizing rod; 346. Positioning shaft.

[0023] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-Figure 3 The utility model proposes a carrier device for cleaning an etching disk, comprising a base 1, two groups of grooves 2 are opened on the upper side of the base 1, and the two groups of grooves 2 are symmetrically arranged with the center line of the base 1 as the symmetry axis. An adjustable bearing assembly 3 is arranged above the base 1, and an etching disk 4 is placed on the adjustable bearing assembly 3. A liquid collecting drawer 5 is slidably connected in the base 1 for collecting the cleaning waste liquid of cleaning the etching disk 4.

[0026] The two-way screw rod 31 is fixedly connected to the groove 2, and the two-way screw rod 31 is threadedly connected to the thread block 32. The upper side of the thread block 32 is fixedly connected to a bearing bar 33. A placement groove 331 is provided on the upper side of the bearing bar 33. The end of the bearing bar 33 away from the thread block 32 is fixedly connected to a guide block 35. The guide block 35 is penetrated by a guide rod 36 and is slidably connected to the guide rod 36. A stabilizing component 34 is provided on the bearing bar 33. By rotating the rotating handle, the two-way screw rod 31 is rotated, driving the thread block 32 to slide, and then driving the two groups of bearing bars 33 to approach each other. After the two groups of bearing bars 33 are close, the etching disk 4 is placed on the placement groove 331 to achieve the placement of etching disks 4 of different sizes.

[0027] Further, in order to ensure the stable bearing of etching disks 4 of different sizes, specifically, the stabilizing assembly 34 includes a pressure rod 341, the pressure rod 341 penetrates the bearing bar 33 and is slidably connected to the bearing bar 33, the end of the pressure rod 341 away from the bearing bar 33 is fixedly connected to a fixing ring 342, the fixing ring 342 is elastically connected to the outer wall of the bearing bar 33 through a return spring 343, a hinge rod 344 is hinged on the outer wall of the fixing ring 342, and a stabilizing rod 345 is hinged on the end of the hinge rod 344 away from the fixing ring 342, the stabilizing rod 345 is penetrated by a positioning shaft 346, and the stabilizing rod 345 and the positioning shaft 346 are connected. Through the elastic connection of the torsion spring, the stabilizing rod 345 can be reset after rotation through the use of the torsion spring. After the etching disk 4 is placed on the placement groove 331, the rotating handle is continued to be rotated to make the bearing bars 33 continue to approach each other. At this time, the etching disk 4 squeezes the pressure rod 341, the reset spring 343 is stretched, and the fixing ring 342 drives the hinged rod 344 to move, thereby making the stabilizing rod 345 rotate around the positioning axis 346 to squeeze the etching disk 4. Through the joint action of four groups of stabilizing rods 345, the stability of the bearing of etching disks 4 of different sizes is guaranteed, and the subsequent cleaning of the etching disk 4 is guaranteed, and the practical range is wide.

[0028] In addition, in order to collect the waste liquid after cleaning and centrally treat it, a collection groove 101 is opened on the upper side of the base 1. The collection groove 101 is conical. The waste liquid cleaned on the etching disk 4 can slide from the collection groove 101 to the liquid collection drawer 5 to complete the collection of the cleaning waste liquid.

[0029] When in use, first turn the handle to rotate the bidirectional screw rod 31, drive the threaded block 32 to slide, and then drive the two groups of supporting bars 33 to approach each other. After the two groups of supporting bars 33 are close to each other, place the etching disk 4 on the placement groove 331, and continue to turn the handle to make the supporting bars 33 continue to approach each other. At this time, the etching disk 4 squeezes the pressure rod 341, the reset spring 343 is stretched, and the fixing ring 342 drives the hinge rod 344 to move, thereby making the stabilizing rod 345 rotate around the positioning axis 346, squeezing the etching disk 4 to achieve stability of the etching disk 4, and then the etching disk 4 can be cleaned, and the cleaning waste liquid can slide from the collection tank 101 to the liquid collection drawer 5.

[0030] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A stage device for cleaning an etching disc, comprising a base (1), Features: Two groups of grooves (2) are provided on the upper side of the base (1), and the two groups of grooves (2) are symmetrically arranged with the center line of the base (1) as the symmetry axis. An adjustable bearing assembly (3) is provided above the base (1), and an etching disk (4) is placed on the adjustable bearing assembly (3). A liquid collecting drawer (5) is slidably connected to the base (1), and the adjustable bearing assembly (3) comprises: A bidirectional screw rod (31), the bidirectional screw rod (31) is rotatably connected in the groove (2), and the bidirectional screw rod (31) is threadedly connected to a thread block (32); A bearing bar (33), the bearing bar (33) being fixedly connected to the upper side of the threaded block (32), one end of the bearing bar (33) away from the threaded block (32) being fixedly connected to a guide block (35), the guide block (35) being penetrated by a guide rod (36) and being slidably connected to the guide rod (36); and a stabilizing component (34), wherein the stabilizing component (34) is arranged on the bearing bar (33).

2. A stage device for cleaning an etching disc according to claim 1, Features: The stabilizing assembly (34) comprises a pressure rod (341), the pressure rod (341) passes through the load-bearing bar (33) and is slidably connected to the load-bearing bar (33), one end of the pressure rod (341) away from the load-bearing bar (33) is fixedly connected to a fixing ring (342), and the fixing ring (342) is elastically connected to the outer wall of the load-bearing bar (33) via a return spring (343).

3. A stage device for cleaning an etching disk according to claim 2, Features: A hinged rod (344) is hinged on the outer wall of the fixing ring (342), and a stabilizing rod (345) is hinged on one end of the hinged rod (344) away from the fixing ring (342). The stabilizing rod (345) is penetrated by a positioning shaft (346), and the stabilizing rod (345) and the positioning shaft (346) are elastically connected via a torsion spring.

4. A stage device for cleaning an etching disk according to claim 1, Features: A placement groove (331) is provided on the upper side of the bearing bar (33).

5. A stage device for cleaning an etching disk according to claim 1, Features: A collecting groove (101) is provided on the upper side of the base (1), and the collecting groove (101) is conical.

6. A stage device for cleaning an etching disk according to claim 1, Features: The end of the bidirectional screw rod (31) is fixedly connected to a rotating handle, and the rotating handle penetrates the inner wall of the base (1) and is rotatably connected to the inner wall of the base (1).

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