Cleaning tool for auxiliary chamber of single crystal furnace
By designing a single crystal furnace sub-chamber cleaning tool with retractable hollow drag rod and elastic annular member, the existing tools are solved by solving the problems of large weight and incomplete cleaning, and automatic synchronous cleaning and purging are realized, gas saving and cleaning are improved Effect.
Patent Information
- Application Number
- CN202323579230.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-27
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2033-12-27
AI Technical Summary
The existing single-crystal furnace sub-room cleaning tools are heavy, inconvenient to use, small contact surfaces, and cannot be cleaned and purged simultaneously, resulting in the incomplete cleaning of pollutants, which increases the amount of argon gas usage and cost.
A cleaning tool including a tow bar, an annular member and an airflow duct assembly is designed. The tow bar is hollow and retractable. The annular member is composed of elastic material, equipped with a radial nozzle and an adjustable switch to achieve synchronous cleaning and Purge function enhances cleaning effect and saves gas use.
Automatic cleaning is achieved, enhanced cleaning effect, reduced labor demand, saved inert gas use, and ensured uniformity and thoroughness of cleaning through elastic materials and adjustable switches.
Smart Images
Figure CN222153262U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of single crystal furnaces, and in particular to a cleaning tool for a sub-chamber of a single crystal furnace. Background Art
[0002] The single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas environment (mainly including nitrogen and helium) and grows single crystals without dislocation using the Czochralski method. The reaction volatiles will deposit on the inner wall of the single crystal furnace's auxiliary chamber. Long-term deposition tends to fall on the polycrystalline materials in the single crystal furnace's main chamber, causing the polycrystalline materials to be contaminated, thereby affecting the purity of the produced seed crystal rods.
[0003] At present, the commonly used cleaning tool for the auxiliary chamber of the single crystal furnace is to manually use an extended stainless steel rod tied with fiber paper for repeated cleaning, and then open the argon gas to blow away the remaining fiber paper scraps. The tool is heavy, and the contact surface with the inner wall of the auxiliary chamber is small and insufficient. After using it for a period of time, the contact surface becomes skewed and can only be cleaned. There is no synchronous purge function, and argon gas needs to be opened to blow away the remaining fiber paper scraps inside, which increases the usage and cost of argon gas. Utility Model Content
[0004] In order to overcome at least one of the defects described in the above-mentioned prior art, the purpose of the present application is to provide a cleaning tool for a single crystal furnace sub-chamber, comprising a drag rod, an annular component and an airflow duct assembly, characterized in that the airflow duct assembly comprises an air supply pipe and an annular duct component connected to the top end of the air supply pipe, the annular duct component having a plurality of nozzles facing radially outward; the drag rod is hollow, and the air supply pipe is placed inside the drag rod; the annular component is fixed to the top end of the drag rod, and in the vertical direction, the annular duct component is higher than the annular component.
[0005] According to one embodiment, the annular component is in the shape of a wheel rim and has an inner cylindrical surface, an outer cylindrical surface, and a plurality of connecting members connecting the inner cylindrical surface and the outer cylindrical surface.
[0006] According to another embodiment, the annular member is made of an elastic material, or a plurality of the connecting members and / or the outer cylindrical surface are made of an elastic material.
[0007] According to yet another embodiment, the inner cylindrical surface is fixed to the top end of the tow bar.
[0008] According to yet another embodiment, the outer side surface of the outer cylindrical surface has an attachment device for attaching the cleaning material.
[0009] According to yet another embodiment, the cleaning material comprises fiber paper.
[0010] According to yet another embodiment, the nozzle protrudes outwardly from the annular duct member in a radial direction thereof.
[0011] According to yet another embodiment, the nozzles correspond to the connecting members one by one, and the nozzles are placed above the connecting members.
[0012] According to yet another embodiment, the airflow duct assembly further comprises an adjustable switch for adjusting flow rates of a plurality of the nozzles.
[0013] According to yet another embodiment, the tow bar is telescopic.
[0014] The cleaning tool of the present application adopts a drag rod with adjustable length, and there is no need to manually push and pull the drag rod repeatedly to wipe the inner wall of the single crystal furnace sub-chamber, saving manpower. Moreover, the cleaning tool of the present application realizes the means of cleaning and using gas purging at the same time, improves the cleaning effect, and saves the use of inert gas (for example, argon). In addition, the annular member, or at least the connector and / or the outer cylindrical surface is made of elastic material, so that the annular member has elastic characteristics, and when it contacts the inner wall of the single crystal furnace sub-chamber, it can increase the pressure and even friction between each other, and finally cause the cleaning material to wipe the inner wall of the single crystal furnace sub-chamber more forcefully. Further, an adjustable switch is configured for the airflow duct assembly, so that the operator can adjust the use of the purge gas as needed, and in this way ensure that the cleaning effect of the purge means is uniform and thorough. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 A top view of a cleaning tool for a sub-chamber of a single crystal furnace according to an embodiment of the present application is shown;
[0016] Figure 2 Shows Figure 1 A front view of the cleaning tool shown; and
[0017] Figure 3 Shows Figure 1 A perspective view of a cleaning tool is shown. DETAILED DESCRIPTION
[0018] Reference Figure 1-3 The cleaning tool 1 includes a drag rod 2, an annular component 3 and an airflow duct assembly. In this embodiment, the drag rod 2 is retractable and hollow. The airflow duct assembly includes a gas delivery pipe (not shown) and an annular duct component 4 connected to the top of the gas delivery pipe, wherein the gas delivery pipe is placed in the hollow drag rod 2 and extends to the top of the annular component 3 together with the drag rod 2. The annular duct component 4 has a plurality of nozzles 5 facing outward in its radial direction, and the compressed gas supplied by the gas delivery pipe is blown to the inner wall of the auxiliary chamber of the single crystal furnace through the nozzles 5.
[0019] The annular member 3 is in the shape of a wheel rim and has an inner cylindrical surface 31, an outer cylindrical surface 32, and a plurality of connectors 33 connecting the inner cylindrical surface 31 and the outer cylindrical surface 32. The annular member 3 is fixed to the top end of the drag rod 2, and preferably, the top end of the drag rod 2 is attached to the inner cylindrical surface 31. More preferably, the top end surface of the drag rod 2 is flush with the top end surface of the annular member 3. In this way, the gas delivery pipe extends through the drag rod 2, and the annular pipe member 4 connected to the top end of the gas delivery pipe is higher than the annular member 3 in the vertical direction, thereby ensuring that the nozzle 5 will not be shielded by the outer cylindrical surface 32, which means that the compressed gas ejected from the nozzle 5 can reach the inner wall of the single crystal furnace sub-chamber.
[0020] In a preferred embodiment, the annular member 3 is completely made of elastic material, or at least some of the connecting members 33 and / or the outer cylindrical surface 32 are made of elastic material. In contrast, the outer surface of the outer cylindrical surface 32 has an attachment device for attaching cleaning materials, such as fiber paper, and further, for example, fiber paper soaked in anhydrous ethanol. This configuration increases the pressure and even friction between the outer cylindrical surface 32 and the inner wall surface when the cleaning tool 1 moves in the single crystal furnace sub-chamber, which ultimately causes the cleaning material to wipe the inner wall of the single crystal furnace sub-chamber more forcefully.
[0021] As mentioned above, the annular duct member 4 is higher than the annular member 3 in the vertical direction. Preferably, the nozzle 5 extends outward from the annular duct member 4 in the radial direction thereof, and the nozzle 5 corresponds to the connector 33 one by one, so that the nozzle 5 can be placed alone above the connector 33. With the support of the connector 33, the nozzle 5 will not easily change its orientation, ensuring that the compressed gas is sprayed onto the inner wall of the single crystal furnace sub-chamber.
[0022] In a preferred embodiment, the air flow duct assembly further includes an adjustable switch (not shown) for adjusting the flow rate of the compressed gas sprayed from the nozzle 5 .
[0023] During cleaning, first, the cleaning tool 1 is extended into the single crystal furnace sub-chamber until it reaches the top of the sub-chamber. At this time, the adjustable switch is activated to adjust the jet volume of the nozzle 5. Next, the drag rod 2 is retracted so that the annular member 3 and the annular pipe member 4 move from top to bottom. Due to the close contact between the outer cylindrical surface 32 and the inner wall surface, the cleaning material attached to the outer cylindrical surface 32 vigorously wipes the inner wall surface. After the cleaning material is wiped, the wiped inner wall surface immediately faces the nozzle 5, thereby receiving the purge of the inert gas (for example, argon), which ensures that the deposits on the inner wall surface that have not been wiped off by the cleaning material are further cleaned.
Claims
1. A cleaning tool for a single crystal furnace auxiliary chamber, comprising a drag rod, an annular component and an airflow duct assembly, characterized in that: The airflow duct assembly includes an air delivery pipe and an annular duct component connected to the top end of the air delivery pipe, the annular duct component has a plurality of nozzles facing radially outward; the drag rod is hollow, and the air delivery pipe is placed inside the drag rod; the annular component is fixed to the top end of the drag rod, and in the vertical direction, the annular duct component is higher than the annular component.
2. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that: The annular component is in the shape of a wheel rim and has an inner cylindrical surface, an outer cylindrical surface and a plurality of connecting pieces connecting the inner cylindrical surface and the outer cylindrical surface.
3. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 2, characterized in that: The annular component is made of elastic material, or the plurality of connecting members and / or the outer cylindrical surface are made of elastic material.
4. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 3, characterized in that: The inner cylindrical surface is fixed to the top end of the towing rod.
5. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 4, characterized in that: The outer side surface of the outer cylindrical surface is provided with an attachment device for attaching the cleaning material.
6. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 5, characterized in that: The cleaning material includes fiber paper.
7. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 6, characterized in that: The nozzle protrudes outwardly from the annular duct member in a radial direction thereof.
8. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 7, characterized in that: The nozzles correspond to the connecting pieces one by one, and the nozzles are placed above the connecting pieces.
9. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that: The airflow duct assembly also includes an adjustable switch for adjusting the flow rates of the plurality of nozzles.
10. The cleaning tool for the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that: The tow bar is retractable.