Clamp for target material processing

Abstract

The utility model discloses a clamp for target material processing, which comprises a box body and a base, a first sliding groove is arranged in the side wall of the box body, a first sliding block is arranged in the first sliding groove, a first air cylinder is arranged on the base, the first air cylinder is connected with a first piston rod, a support plate is fixed on the first piston rod, and a second sliding groove and a third sliding groove are arranged on the support plate. The two sides of the top of the supporting plate are provided with a second air cylinder and a third air cylinder respectively, the second air cylinder is connected with a second piston rod, the third air cylinder is connected with a third piston rod, the end of the second piston rod and the end of the third piston rod are connected with a clamping device, the clamping device is provided with a first clamping block and a second clamping block, and the two clamping blocks are detachable. The target clamping device is simple in structure and diverse in function, two sets of target materials can be clamped at the same time, the clamping blocks in the corresponding shapes can be selected for installation according to the shapes of the target materials, and adaptability is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of target materials, in particular to a clamp for processing target materials. Background Art

[0002] The target material is a sputtering source that forms various functional films on the substrate under appropriate process conditions through magnetron sputtering, multi-arc ion plating or other types of coating systems. Simply put, the target material is the target material bombarded by high-speed energetic particles. When lasers of different power densities, different output waveforms, and different wavelengths interact with different target materials in high-energy laser weapons, different killing and destructive effects will be produced. For example: evaporation magnetron sputtering coating is heated evaporation coating, aluminum film, etc. By replacing different target materials (such as aluminum, copper, stainless steel, titanium, nickel targets, etc.), different film systems (such as superhard, wear-resistant, corrosion-resistant alloy films, etc.) can be obtained.

[0003] Target material processing fixtures are indispensable in the target material production and processing process. Existing target material production fixtures can only clamp one target material at a time, with low clamping efficiency. Moreover, the fixtures do not have a matching anti-slip design, which can easily cause slipping and deformation, affecting production and processing, and cannot adapt to targets of various shapes. Summary of the invention

[0004] The purpose of the utility model is to provide a fixture for target material processing to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a clamp for target material processing, comprising a base and a box body, a first slide groove is opened on two opposite side walls of the box body, a first slide groove is arranged in the first slide groove, a first cylinder is fixedly installed at the central position of the base, a first piston rod is connected to the top of the first cylinder, a support plate is fixedly connected to the end of the first piston rod, a second slide groove and a third slide groove are opened on the support plate, a second cylinder is arranged on the side of the top of the support plate, the second cylinder is connected to the second piston rod, the second piston rod is connected to a clamping device, a third cylinder is arranged on the side opposite to the second cylinder, the third cylinder is connected to the third piston rod, and the third piston rod is connected to the clamping device.

[0006] Preferably, the clamping device includes a second slider, which is connected to the third slide groove at the bottom, a second rack is provided at the bottom of the second slider, a mounting rod is connected to the top of the second slider, a third slider is provided slightly away from the second slider, a mounting rod is connected to the top of the third slider, and a second rack is provided at the bottom of the third slider.

[0007] Preferably, the mounting rod comprises a screw rod, a thread is provided on the top of the screw rod and the screw rod is fixed by a nut, a limiting ring is provided under the screw rod, and a first clamping block or a second clamping block is installed between the limiting ring and the nut.

[0008] Preferably, the first rack and the second rack are respectively meshed with gears.

[0009] Preferably, the first clamping block and the second clamping block are provided with fixing holes, the size of the fixing holes matches the screw rod, and a plurality of rubber beads are provided at the edges of the first clamping block and the second clamping block that are close to each other.

[0010] Preferably, the support plate and the first sliding block are fixedly connected.

[0011] Compared with the prior art, the beneficial effects of the utility model are as follows: the utility model is a clamp for target material processing, which can clamp one or two target materials at a time. The clamping device has different shapes and can clamp targets of different shapes. The target materials are convenient to clamp, which improves work efficiency. The setting of rubber beads can increase friction, better prevent shaking during the target material production and processing process, and improve the accuracy and efficiency of target material processing. The height can be adjusted up and down by the cylinder and the slider, which is convenient for processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is the main view of the overall structure of the utility model;

[0013] Figure 2 It is a top view of the internal structure of the utility model;

[0014] Figure 3 This is a top view of the internal structure of the utility model;

[0015] Figure 4 This is the front view of the mounting rod structure of the utility model;

[0016] Figure 5 This is a schematic diagram of a clamp block in the first embodiment of the utility model;

[0017] Figure 6 This is a schematic diagram of a clamp block according to a second embodiment of the utility model;

[0018] Figure 7 This is a schematic diagram of a clamp block in the third embodiment of the utility model;

[0019] In the figure: 1. base; 2. box body; 3. first slide groove; 4. first slider; 5. first cylinder; 6. first piston rod; 7. support plate; 8. second cylinder; 9. second piston rod; 10. clamping device; 101. second slider; 102. mounting rod; 103. first clamping block; 104. second clamping block; 105. third slider; 106. first rack; 107. second rack; 108. gear; 109. second slide groove; 110. third slide groove; 111. screw; 112. nut; 113. limit ring; 114. fixing hole; 115. rubber bead; 11. third cylinder; 12. third piston rod. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1-7 The utility model provides a technical solution: a fixture for target material processing, comprising a base and a box body, a first slide groove is provided in the side wall of the box body, a first slide groove is provided in the first slide groove, a first cylinder is fixed at the top center position of the base, a first piston rod is provided on the top of the first cylinder, the end of the first piston rod is fixedly connected to a support plate, a second cylinder is provided on the top of the support plate, the second cylinder is fixedly connected to the second piston rod, a clamping device is fixed to the end of the second piston rod, a third cylinder is provided on the opposite side of the second cylinder, the third cylinder is connected to the third piston rod, a clamping device is fixed to the end of the third piston rod, and a second slide groove and a third slide groove are provided on the support plate.

[0022] As an embodiment of the utility model, the clamping device includes a second slider, the bottom of the second slider is connected to the third slide groove, the bottom of the second slider is connected to the second rack, the top of the second slider is connected to the mounting rod, and the first clamping block is installed on the mounting rod; a third slider is provided at the far end of the second slider, the bottom of the third slider is connected to the third slide groove, the bottom of the third slider is connected to the first rack, the first rack and the second rack are respectively meshed with the gears, and the top of the third slider is also connected to the mounting rod, and the second clamping block is installed on the mounting rod.

[0023] As an embodiment of the utility model, the mounting rod includes a screw rod, a thread is provided on the top of the screw rod, a nut is placed through the thread, a limiting ring is provided below the screw rod, and the first clamp block or the second clamp block is placed between the limiting ring and the nut.

[0024] As an implementation mode of the utility model, fixing holes are opened on the first clamp block and the second clamp block, and the screw rod passes through the fixing hole and is fixed by a nut. A plurality of rubber beads are respectively arranged on the two sides close to each other of the first clamp block and the second clamp block, and an anti-slip setting is performed by the rubber beads contacting with the target material.

[0025] As an implementation manner of the present utility model, the support plate and the first sliding block are fixedly connected. Embodiment 1

[0026] refer to Figure 5As shown, the clamping parts of the first clamping block and the second clamping block are arc-shaped, which can clamp the arc-shaped target material. Embodiment 2

[0027] refer to Figure 6 As shown, the clamping parts of the first clamping block and the second clamping block are planar and can clamp a planar target. Embodiment 3

[0028] refer to Figure 7 As shown, the clamping parts of the first clamping block and the second clamping block are angled, and can clamp multi-angle targets.

[0029] The working principle of the utility model is as follows: a clamping block of corresponding shape is selected according to the shape of the target material. After the clamping block is installed, the slider is pushed by the second cylinder and the third cylinder to drive the clamping device to clamp the target material, and then the support plate is pushed by the first cylinder to adjust the upper and lower heights, so as to facilitate the processing of the target material.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A fixture for target material processing, comprising a base (1) and a box (2), wherein a first slide groove (3) is provided in a side wall of the box (2), a first slide groove (3) is provided in the first slide groove (3), a first cylinder (5) is fixed at the top center position of the base (1), a first piston rod (6) is provided at the top of the first cylinder (5), and a support plate (7) is fixedly connected to the end of the first piston rod (6), Features: A second cylinder (8) is provided on the top of the support plate (7), the second cylinder (8) is fixedly connected to a second piston rod (9), a clamping device (10) is fixed to the end of the second piston rod (9), a third cylinder (11) is provided on the opposite side of the second cylinder (8), the third cylinder (11) is connected to a third piston rod (12), a clamping device (10) is fixed to the end of the third piston rod (12), and a second slide groove (109) and a third slide groove (110) are provided on the support plate (7).

2. A target material processing fixture according to claim 1, Features: The clamping device (10) comprises a second slider (101), the lower part of the second slider (101) is connected to the third slide groove (110), the bottom of the second slider (101) is connected to a second rack (107), the top of the second slider (101) is connected to a mounting rod (102), and the mounting rod (102) is mounted with a first clamping block (103); a third slider (105) is provided at the far end of the second slider (101), the lower part of the third slider (105) is connected to the third slide groove (110), the bottom of the third slider (105) is connected to a first rack (106), the first rack (106) and the second rack (107) are respectively meshed with a gear (108), the top of the third slider (105) is also connected to the mounting rod (102), and the mounting rod (102) is mounted with a second clamping block (104).

3. A target material processing fixture according to claim 2, Features: The mounting rod (102) comprises a screw rod (111), a nut (112) is provided above the screw rod (111), and a limiting ring (113) is provided below the screw rod (111).

4. A target material processing fixture according to claim 2, Features: The first clamping block (103) and the second clamping block (104) are both provided with fixing holes (114), the screw rod (111) passes through the fixing holes (114) and is fixed by a nut (112), and a plurality of rubber beads (115) are respectively provided on two sides of the first clamping block (103) and the second clamping block (104) adjacent to each other.

5. A target material processing fixture according to claim 1, Features: The support plate (7) and the first sliding block (4) are fixedly connected.

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