Vacuum sample transfer device and vacuum processing system

Abstract

The utility model relates to the technical field of vacuum devices, and discloses a vacuum sample transfer device which comprises a vacuum cavity, a transmission assembly, a driving mechanism and a sample transfer table. The transmission assembly is at least partially arranged in the vacuum cavity and comprises a rotating shaft assembly at least partially arranged in the vacuum cavity, and the rotating shaft assembly comprises a rotating shaft capable of rotating in the axial direction. The driving mechanism comprises a rotary driving mechanism which is in sealing connection with the vacuum cavity and used for driving the rotary shaft assembly. The sample transfer table is connected with the transmission assembly, and the driving mechanism drives the transmission assembly to drive the sample transfer table to move.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum devices, and in particular to a vacuum sample transfer device and a vacuum processing system. Background Art

[0002] Existing vacuum sample transfer devices mainly transfer the movement inside and outside the vacuum through magnetic coupling, thereby realizing, for example, the movement of the substrate tray. However, magnetic coupling drive is not suitable for heavy substrate trays, and during processing, the roundness and straightness of the sleeve are particularly high; during high-temperature baking, the sleeve is easily deformed, affecting the stable sample transfer of the sample transfer device. In addition, the magnetic coupling drive has low precision and is relatively large in size. Utility Model Content

[0003] The present disclosure provides a vacuum sample transfer device, comprising:

[0004] Vacuum chamber;

[0005] A transmission assembly is at least partially disposed in the vacuum chamber, the transmission assembly includes a rotating shaft assembly, at least partially disposed in the vacuum chamber, the rotating shaft assembly includes a rotating shaft, and is capable of rotating around an axial direction;

[0006] A driving mechanism, including a rotary driving mechanism, the rotary driving mechanism is sealed and connected to the vacuum chamber and is used to drive the rotary shaft assembly; and

[0007] The sample transfer platform is connected to the transmission component, and the driving mechanism drives the transmission component to drive the sample transfer platform to move.

[0008] In some embodiments of the present disclosure, the rotating shaft assembly further includes:

[0009] The sleeve is rotatably arranged in the vacuum chamber, the rotating shaft is passed through the sleeve and is slidably connected with the sleeve, and the sleeve can drive the rotating shaft to rotate around the axial direction.

[0010] In some embodiments of the present disclosure, the rotating shaft assembly further includes:

[0011] a rotation drive gear connected to the rotation drive mechanism; and

[0012] The transmission gear is fixedly connected to the sleeve and meshes with the rotary drive gear, and is used for driving the sleeve to rotate under the drive of the rotary drive gear to drive the rotary shaft to rotate around the axial direction.

[0013] In some embodiments of the present disclosure, the cross-section of the rotating shaft is polygonal, and the sleeve includes a tube body and at least one support bearing rotatably arranged on the tube body, and the outer wall of the at least one support bearing abuts against at least one surface of the rotating shaft, so as to support and drive the rotating shaft to rotate axially and allow the rotating shaft to slide along the axial direction.

[0014] In some embodiments of the present disclosure, the tubular body of the sleeve includes a protruding structure, and the protruding structure includes at least one mounting hole for mounting at least one support bearing.

[0015] In some embodiments of the present disclosure, the vacuum sample transfer device further comprises:

[0016] At least one fixed plate, fixedly disposed in the vacuum chamber, the sleeve being rotatably connected to the fixed plate; and / or

[0017] A proximal support seat is fixedly disposed at the proximal end of the vacuum chamber, and the rotating shaft is rotatably connected to the proximal support seat; and / or

[0018] The distal support seat is fixedly arranged at the distal end of the vacuum chamber, and the rotating shaft is rotatably connected to the distal support seat.

[0019] In some embodiments of the present disclosure, the drive mechanism further comprises a linear drive mechanism;

[0020] The transmission assembly also includes a linear motion assembly, which is at least partially disposed in the vacuum chamber, and the linear motion assembly includes:

[0021] a linear drive gear connected to the linear drive mechanism; and

[0022] The rack is meshed with the linear drive gear, and the far end of the rack is connected to the sample transfer platform, and the rack is driven to move linearly under the drive of the linear drive gear.

[0023] In some embodiments of the present disclosure, the rack includes at least two flanges extending axially along the rack;

[0024] The vacuum sample transfer device further includes at least one set of rack limiter components, which are fixedly connected to the vacuum chamber and slidably connected to the rack. The rack limiter components include:

[0025] At least two horizontally arranged rollers, the outer walls of which are respectively in contact with the left and right outer walls of one of the two flanges to limit the rack in the left and right directions; and

[0026] At least one vertically arranged roller is arranged between at least two flanges extending axially along the rack to limit the rack in the up and down directions.

[0027] In some embodiments of the present disclosure, the rotary drive mechanism or the linear drive mechanism includes:

[0028] An eccentric rotating shaft, comprising an eccentric section and a central section;

[0029] A rotating pendulum block is sleeved outside the eccentric section of the eccentric shaft and can drive the eccentric shaft to rotate around its own rotation axis; and

[0030] The driving device is connected to the rotating pendulum block and can drive the rotating pendulum block to rotate around the rotation axis of the eccentric rotating shaft, so as to drive the eccentric rotating shaft to rotate around the rotation axis.

[0031] In some embodiments of the present disclosure, the rotary drive mechanism or the linear drive mechanism further includes a bellows assembly, and the bellows assembly includes:

[0032] A bellows, sleeved outside the eccentric shaft; and

[0033] The proximal shaft has its distal end fixedly connected to the proximal seal of the bellows, and the proximal shaft includes a rotating chamber for being rotatably connected to the proximal end of the eccentric section of the eccentric rotating shaft, and a rotating pendulum block is sleeved outside the proximal shaft to drive the proximal shaft to rotate and swing, thereby driving the eccentric rotating shaft to rotate around the rotation axis.

[0034] The present disclosure provides a vacuum processing system, comprising:

[0035] a vacuum processing chamber, and

[0036] The vacuum sample transfer device according to any one of the embodiments of the present disclosure is used to transfer samples in a vacuum processing chamber.

[0037] According to some implementations of the present disclosure, the vacuum sample transfer device and vacuum processing system can bring beneficial technical effects. For example, according to some implementations of the vacuum sample transfer device and vacuum processing system, the rotary motion is converted into the lifting motion of the sample transfer table in the sample transfer device through gear meshing, and the structure is simple and reliable. For another example, according to some implementations of the vacuum sample transfer device and vacuum processing system, the rotary motion is converted into the linear motion of the sample transfer table in the sample transfer device through gear rack meshing, the impact caused by high temperature baking is small, and it can withstand heavier loads. For another example, according to some implementations of the vacuum sample transfer device and vacuum processing system, the use of the sample transfer device can be switched manually and automatically to realize the transportation and placement of samples in a vacuum. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0039] Figure 1 A schematic structural diagram of a vacuum sample transfer device according to some embodiments of the present disclosure is shown;

[0040] Figure 2 A schematic structural diagram of a rotating shaft assembly according to some embodiments of the present disclosure is shown;

[0041] Figure 3 A schematic diagram showing the structure of a rack according to some embodiments of the present disclosure is shown;

[0042] Figure 4 A partial cross-sectional structural schematic diagram of a driving mechanism according to some embodiments of the present disclosure is shown;

[0043] Figure 5 A schematic structural diagram of an eccentric transmission seat according to some embodiments of the present disclosure is shown;

[0044] Figure 6 A schematic structural diagram of a one-way self-locking assembly according to some embodiments of the present disclosure is shown;

[0045] Figure 7 A schematic structural diagram of a vacuum processing system according to some embodiments of the present disclosure is shown;

[0046] In the above drawings, the reference numerals represent:

[0047] 10000-Vacuum Processing Chamber System

[0048] 1000-Vacuum Sample Transfer Device

[0049] 1- Vacuum chamber

[0050] 2- Transmission components

[0051] 21-rotating shaft assembly, 211-rotating shaft, 212-sleeve, 21201-tube body, 21202-support bearing, 21203-rotating shaft, 213-transmission gear, 214-rotating drive gear, 215-coupling, 216-through, 217-support seat, 218-fixing ring

[0052] 22-Linear motion assembly, 221-Rack, 22101a, 22101b-Flange, 222-Linear drive gear

[0053] 3-driving mechanism, 31-rotating driving mechanism, 311-eccentric rotating shaft, 31101-eccentric section, 31102-central section, 312-rotating pendulum block, 31201-locating pin, 313-driving device, 31301-rotating block, 31302-rotating drive, 314-bellows assembly, 31401-bellows, 31402-proximal shaft, 314021-rotating chamber, 31403-distal shaft, 31404-flange, 315-eccentric transmission seat, 31501-eccentric accommodating chamber, 316-fixed seat, 317-one-way self-locking assembly, 31701-ratchet, 31702-pawl, 31703-block, 317031-first limiting groove, 317032-second limiting groove, 31704-biasing mechanism, 317041-support seat, 317042-button, 317043-telescopic positioning rod, 317044-shaft, 32-linear drive mechanism

[0054] 4-Sample transfer station

[0055] 5a, 5b-Fixed plate

[0056] 6a-proximal support seat, 6b-distal support seat

[0057] 7, 7a, 7b- rack limit assembly, 71a, 71b- horizontally arranged rollers, 72- longitudinally arranged rollers

[0058] 8-Tail sleeve

[0059] 9-Reducing straight through

[0060] 2000-Vacuum Processing Chamber DETAILED DESCRIPTION

[0061] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0062] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the distal end or the distal side refers to an end or a side that penetrates into a vacuum environment (e.g., a vacuum chamber), and the proximal end or the proximal side refers to an end or a side opposite to the distal end or the distal side (e.g., an end or a side that is away from the vacuum chamber, or an end or a side that is close to the vacuum chamber wall in the vacuum chamber, etc.). For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0063] Figure 1 A schematic structural diagram of a vacuum sample transfer device 1000 according to some embodiments of the present disclosure is shown.

[0064] Figure 2 A schematic structural diagram of a rotating shaft assembly 21 according to some embodiments of the present disclosure is shown.

[0065] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the vacuum sample transfer device 1000 may include a vacuum chamber 1 (part of the vacuum chamber is hidden in the figure), a transmission assembly 2, a driving mechanism 3 and a sample transfer table 4. The transmission assembly 2 is at least partially disposed in the vacuum chamber 1, and the transmission assembly 2 includes a rotating shaft assembly 21, which is at least partially disposed in the vacuum chamber 1. The rotating shaft assembly 21 includes a rotating shaft 211, which can rotate around the axis. The driving mechanism 3 includes a rotating driving mechanism 31, which is sealed and connected to the vacuum chamber 1 and is used to drive the rotating shaft assembly 21. The sample transfer table 4 is connected to the transmission assembly 2, and the driving mechanism 3 drives the transmission assembly 2 to drive the sample transfer table 4 to move.

[0066] like Figure 1As shown, the sample transfer table 4 is connected to the distal end of the rotating shaft 211 of the rotating shaft assembly 21, and the power is transmitted to the sample transfer table 4 through the rotation of the rotating shaft 211, thereby driving the sample transfer table 4 to move. For example, in some embodiments, the sample transfer table 4 may include a fixed seat, a lifting seat, a sample transfer table gear, and a sample transfer table rack. The lifting seat can be lifted up and down along the fixed seat. The gear shaft of the sample transfer table gear is connected to the rotating shaft 211, and the sample transfer table gear is driven to rotate through the rotating shaft 211. The back of the sample transfer table rack is fixedly connected to the lifting seat, and the sample transfer table rack is meshed with the sample transfer table gear, thereby driving the lifting seat to lift and lower, realizing, for example, the lifting and lowering movement of the grabbing head.

[0067] like Figure 1 and Figure 2 As shown, in some embodiments of the present disclosure, the rotating shaft assembly 21 may further include a sleeve 212. The sleeve 212 is rotatably disposed in the vacuum chamber 1, and the rotating shaft 211 is passed through the sleeve 212 and slidably connected to the sleeve 212. The sleeve 212 can drive the rotating shaft 211 to rotate around the axial direction.

[0068] The rotating shaft assembly 21 may further include a rotating drive gear 214 and a transmission gear 213. The rotating drive gear 214 is connected to the rotating drive mechanism 31. The transmission gear 213 is fixedly connected to the sleeve 212 and meshes with the rotating drive gear 214, and is used to drive the sleeve 212 to rotate under the drive of the rotating drive gear 214, so as to drive the rotating shaft 211 to rotate around the axial direction.

[0069] like Figure 2 As shown, in some embodiments of the present disclosure, the cross section of the rotating shaft 211 is polygonal, and the sleeve 212 may include a tube body 21201 and at least one supporting bearing 21202 rotatably disposed on the tube body 21201. The outer wall of the at least one supporting bearing 21202 abuts against at least one surface of the rotating shaft 211, and is used to support and drive the rotating shaft 211 to rotate around the axial direction, and allow the rotating shaft 211 to slide along the axial direction.

[0070] like Figure 2 As shown, in some embodiments of the present disclosure, the cross section of the rotating shaft 211 is hexagonal. Six support bearings 21202 are arranged on the tube body 21201 of the sleeve 212, and the outer wall of each support bearing 21202 abuts against one surface of the rotating shaft 211, respectively, for supporting and driving the rotating shaft 211 to rotate around the axial direction, and allowing the rotating shaft 211 to slide along the axial direction.

[0071] Those skilled in the art will appreciate that although Figure 2The cross section of the rotating shaft 211 is shown to be hexagonal, and six support bearings 21202 are provided on the tube body 21201 of the sleeve 212, but this is only exemplary, and the cross section of the rotating shaft 211 may also be other polygons or other suitable shapes, such as triangles, heptagons, octagons, etc. In addition, the number of support bearings 21202 may be more or less than the number of sides of the cross section of the rotating shaft 211, but it is necessary to ensure that the support bearings 21202 can drive the rotating shaft 211 to rotate as the sleeve 212 rotates.

[0072] like Figure 2 As shown, in some embodiments of the present disclosure, the tube body 21201 includes a protruding structure, and the protruding structure includes at least one mounting hole for mounting the support bearing 21202, for example, the protruding structure is a tube body with a diameter larger than other parts of the tube body 21201. In addition, the sleeve 212 may further include at least one rotating shaft 21203 mounted on the sleeve 212 (for example, in at least one mounting hole of the protruding structure) for mounting at least one support bearing 21202.

[0073] like Figure 2 As shown, in some embodiments of the present disclosure, the vacuum sample transfer device 1000 may further include at least one fixing plate (e.g. Figure 2 The fixed plate 5a or the fixed plate 5b) shown is fixedly arranged in the vacuum chamber 1, and the sleeve 212 is rotatably connected to the fixed plate.

[0074] like Figure 2 As shown, in some embodiments of the present disclosure, at least one fixed plate includes a fixed plate 5a and a fixed plate 5b, which are fixedly arranged in the vacuum chamber 1, and both ends of the sleeve 212 are rotatably connected to the fixed plate 5a and the fixed plate 5b through bearings.

[0075] Those skilled in the art will appreciate that although Figure 2 Two fixing plates are shown in the figure, but this is only exemplary, and the vacuum sample transfer device 1000 may also include other numbers of fixing plates. Figure 2 The installation position of the fixing plate 5a or the fixing plate 5b) shown can also be adjusted, for example, it can be set in the middle of the sleeve.

[0076] like Figure 2 As shown, in some embodiments of the present disclosure, the vacuum sample transfer device 1000 may further include a proximal support seat 6a and / or a distal support seat 6b. The proximal support seat 6a is fixedly disposed at the proximal end of the vacuum chamber 1, and the rotating shaft 211 is rotatably connected to the proximal support seat 6a, for example, by a bearing. The distal support seat 6b is fixedly disposed at the distal end of the vacuum chamber 1, and the rotating shaft 211 is rotatably connected to the distal support seat 6b, for example, by a bearing.

[0077] like Figure 2 As shown, in some embodiments of the present disclosure, the rotating shaft assembly 21 may further include a fixing ring 218. The fixing ring 218 may be respectively disposed at the proximal end and the distal end of the rotating shaft 211 (the fixing ring 218 at the distal end is not shown in the figure) to limit the axial displacement of the rotating shaft.

[0078] like Figure 1 As shown, in some embodiments of the present disclosure, the driving mechanism 3 further includes a linear driving mechanism 32. The transmission assembly 2 includes a linear motion assembly 22, which is at least partially disposed in the vacuum chamber 1. The linear motion assembly 22 may include a linear driving gear 222 and a rack 221. The linear driving gear 222 is connected to the linear driving mechanism 32. The rack 221 is meshed with the linear driving gear 222, and the distal end of the rack 221 is fixedly connected to the sample transfer stage 4, and the rack 221 is driven by the linear driving gear 222 to drive the linear motion of the sample transfer stage 4.

[0079] Figure 3 A schematic structural diagram of a rack according to some embodiments of the present disclosure is shown.

[0080] like Figure 3 As shown, in some embodiments of the present disclosure, the rack 221 includes at least two flanges extending axially along the rack 221 and arranged up and down, for example, Figure 3 The vacuum sample transfer device 1000 may also include at least one set of rack limit assemblies (e.g., Figure 3 The rack stop assembly 7a or rack stop assembly 7b shown in the figure is fixedly connected to the vacuum chamber 1 and slidably connected to the rack 221. At least one set of rack stop assemblies may include at least two horizontally arranged rollers (e.g. Figure 3 The at least two horizontal rollers 71a and the horizontal rollers 71b are shown and at least one vertical roller 72 is provided. The outer walls of the at least two horizontal rollers 71 are respectively in contact with the outer walls of both sides of one of the at least two flanges 22101 to limit the rack 221 in the left and right directions. The at least one vertical roller 72 is provided on at least two flanges extending axially along the rack 221, such as Figure 3 Between the flange 22101a and the flange 22101b shown, the rack 221 is limited in the up and down directions.

[0081] Those skilled in the art will appreciate that although Figure 3 Two sets of rack limit assemblies 7a and 7b are shown, but this is only exemplary, and the vacuum sample transfer device 1000 may also include other numbers of rack limit assemblies.

[0082] In some embodiments of the present disclosure, the rack limit assembly can be connected to the fixed plate, for example, the rack limit assembly 7a is connected to the fixed plate. Figure 2 The fixed plate 5a is connected to the rack limit assembly 7b as shown. Figure 2 The fixing plate 5b is shown connected.

[0083] like Figure 3 As shown, in some embodiments of the present disclosure, the cross section of the rack 221 is a dry structure, that is, the flange 22101a located at the top and the flange 22101b located at the bottom extend to both the left and right sides to match the rack 221 with the rack 221. Figure 3 The rack stop assembly 7a or the rack stop assembly 7b shown in the figure is matched, but this is only exemplary. Those skilled in the art can understand that the rack 221 can also adopt other structures, such as a cross-section of an upper structure. In addition, in some embodiments, the rack 221 can adopt a dry structure rack 221. Driven by the linear drive gear 222, the dry structure rack 221 performs linear motion under the drive of the gear shaft, can withstand heavier loads, and has relatively small deformation.

[0084] like Figure 1 As shown, in some embodiments of the present disclosure, the vacuum sample transfer device 1000 may further include a tail sleeve 8 and a reducer 9. The tail sleeve 8 is fixedly connected to the proximal end of the vacuum chamber 1 by sealing, for example, by a flange vacuum seal. The reducer 9 is fixedly connected to the distal end of the vacuum chamber 1 by sealing, for example, by a flange vacuum seal.

[0085] Figure 4 A partial cross-sectional structural schematic diagram of the drive mechanism 3 according to some embodiments of the present disclosure is shown. Those skilled in the art may understand that for convenience, the following description takes the rotary drive mechanism 31 as an example, and the linear drive mechanism 32 may have a similar structure, which will not be described separately.

[0086] like Figure 4 As shown, in some embodiments of the present disclosure, the rotation drive mechanism 31 may include an eccentric rotating shaft 311, a rotating pendulum 312 and a driving device 313. The eccentric rotating shaft 311 may include an eccentric section 31101 and a central section 31102. In the present disclosure, the eccentric section 31101 refers to a portion extending away from the rotation axis, and the central section 31102 refers to a portion extending along the rotation axis. It can be understood by those skilled in the art that the eccentric rotating shaft 311 may also include a transition section arranged between the eccentric section 31101 and the central section 31102, but for simplicity of description, the transition section is not described in detail in the present disclosure.

[0087] like Figure 4As shown, the rotating pendulum block 312 is sleeved outside the eccentric section 31101 of the eccentric shaft 311 and can drive the eccentric shaft 311 to rotate around its own rotation axis. The driving device 313 is connected to the rotating pendulum block 312 and can drive the rotating pendulum block 312 to rotate around the rotation axis of the eccentric shaft 311, so as to drive the eccentric shaft 311 to rotate around the rotation axis.

[0088] like Figure 4 As shown, in some embodiments of the present disclosure, the rotary drive mechanism 31 may further include a bellows assembly 314. The bellows assembly 314 may include a bellows 31401 and a proximal shaft 31402. The bellows 31401 is sleeved outside the eccentric shaft 311. The distal end of the proximal shaft 31402 is sealed and fixedly connected to the proximal end of the bellows 31401, and the proximal shaft 31402 includes a rotating chamber 314021 for rotationally connecting with the proximal end of the eccentric section 31101 of the eccentric shaft 311. The rotating pendulum block 312 is sleeved outside the proximal shaft 31402 to drive the proximal shaft 31402 to rotate and swing, thereby driving the eccentric shaft 311 to rotate around the rotation axis 211 line.

[0089] like Figure 4 As shown, in some embodiments of the present disclosure, the bellows assembly 314 may further include a distal shaft 31403 and a flange 31404. The distal shaft 31403 passes through the flange hole of the flange 31404 and is sealed and fixedly connected to the flange 31404.

[0090] like Figure 4 As shown, in some embodiments of the present disclosure, the rotating pendulum block 312 is sleeved outside the proximal shaft 31402 and is slidably connected to the proximal shaft 31402, and the rotating pendulum block 312 and the proximal shaft 31402 of the bellows assembly 314 slide relative to each other. When the rotating pendulum block 312 rotates an angle, the proximal shaft 31402 of the bellows assembly 314 drives the bellows 31401 to swing to a corresponding angle, and at the same time drives the eccentric rotating shaft 311 to rotate, thereby realizing the transmission of rotational motion.

[0091] Figure 5 A schematic structural diagram of an eccentric transmission seat according to some embodiments of the present disclosure is shown;

[0092] like Figure 5 As shown, in some embodiments of the present disclosure, the rotation drive mechanism 31 may further include an eccentric transmission seat 315. The eccentric transmission seat 315 may include an eccentric accommodation cavity 31501 for accommodating the rotating pendulum block 312 to drive the rotating pendulum block 312 to rotate around the rotation axis 211.

[0093] In some embodiments of the present disclosure, the eccentric accommodating cavity 31501 includes a hole with a flat cross section, such as a truncated ellipse. The cross section of the outer peripheral surface of the rotating pendulum block 312 is a flat shape, such as a truncated ellipse, which cooperates with the flat hole of the eccentric accommodating cavity 31501. The rotating pendulum block 312 and the eccentric accommodating cavity 31501 are matched through the flat shaft hole to achieve rotation prevention and guidance.

[0094] Those skilled in the art will understand that, in the present disclosure, a flattened shape refers to a non-circular shape, which may include a rectangle, a polygon, an ellipse, a truncated ellipse, and any other suitable shape, as long as the rotating pendulum block 312 cooperates with the eccentric accommodating cavity 31501 and can rotate with the rotation of the eccentric accommodating cavity 31501 and cannot rotate on its own.

[0095] like Figure 4 As shown, in some embodiments of the present disclosure, the driving device 313 may include a rotating block 31301 and a rotating drive 31302. The rotating block 31301 is fixedly connected to the eccentric transmission seat 315. For example, Figure 4 As shown, the rotating block 13101 can be a hollow cover, fixedly connected to the eccentric transmission seat 315, covering the eccentric transmission seat 315, for example, covering the eccentric accommodating cavity 31501. The rotation drive 31302 is connected to the rotating block 31301, and is used to drive the rotating block 31301 to rotate, so as to drive the rotating pendulum block 312 to rotate around the rotation axis.

[0096] Those skilled in the art will appreciate that although Figure 4 The rotary drive 31302 is shown as a handle, which can be driven by hand cranking, but this is merely exemplary, and the rotary drive 31302 can also be other types of driving mechanisms, such as a motor, an engine, and the like.

[0097] like Figure 4 As shown, in some embodiments of the present disclosure, the rotation drive mechanism 31 may further include a fixed seat 316, which is sleeved on the outside of at least a portion of the bellows assembly 314, the proximal end of the fixed seat 316 is rotatably connected to the eccentric transmission seat 315, and the distal end of the fixed seat 316 is fixedly connected to the distal shaft 31403 or the flange 31404 of the bellows assembly 314. For example, in some embodiments of the present disclosure, a circumferential groove (for example, a circumferential V-shaped groove) is provided on the distal shaft 31403 of the bellows assembly 314, and at least two through holes are provided on the distal end of the fixed seat 316, and at least two screws are respectively passed through the at least two through holes of the fixed seat 316 and abut against the circumferential groove, so as to realize the fixed connection between the distal end of the fixed seat 316 and the distal shaft 31403 of the bellows assembly 314.

[0098] like Figure 4As shown, in some embodiments of the present disclosure, the rotating pendulum block 312 may further include at least one protrusion or positioning pin 31201 disposed on the outer surface. The inner side of the eccentric transmission seat 315 may include an inwardly protruding flange or an outwardly recessed groove, and the at least one protrusion or positioning pin 31201 cooperates with the inner flange or groove of the eccentric transmission seat 315 to limit the rotating pendulum block 312.

[0099] Figure 6 A schematic structural diagram of a one-way self-locking assembly 317 according to some embodiments of the present disclosure is shown.

[0100] like Figure 4 and Figure 6 As shown, in some embodiments of the present disclosure, the rotary drive mechanism 31 may further include a one-way self-locking assembly 317. The one-way self-locking assembly 317 may include a ratchet 31701, a pawl 31702, a stopper 31703 and a biasing mechanism 31704. The ratchet 31701 is fixedly connected to the eccentric transmission seat 315. The pawl 31702 can partially engage with the ratchet 31701. The stopper 31703 is arranged at the back of the pawl 31702, and the first limiting groove 317031 and the second limiting groove 317032 are respectively arranged at both ends of the stopper 31703. The biasing mechanism 31704 is fixedly connected to the fixed seat 316. The biasing mechanism 31704 can abut against the first limiting groove 317031 or the second limiting groove 317032 so that the biasing mechanism 31704 is locked in the first limiting groove 317031 or the second limiting groove 317032, so that one end of the pawl 31702 located in the second limiting groove 317032 or the first limiting groove 317031 is separated from the ratchet 31701, so that the ratchet 31701 can only rotate in one direction.

[0101] like Figure 6 As shown, in some embodiments of the present disclosure, the biasing mechanism 31704 may further include a support seat 317041, a button 317042, and a telescopic positioning rod 317043. The support seat 317041 is fixedly connected to the fixing seat 316. The button 317042 is rotatably connected to the support seat 317041. The telescopic positioning rod 317043 is connected to the button 317042 and can move synchronously with the button 317042 so that the telescopic positioning rod 317043 is locked in the first limiting groove 317031 or the second limiting groove 317032.

[0102] like Figure 6As shown, in some embodiments of the present disclosure, the biasing mechanism 31704 may further include a shaft 317044. The button 317042 is provided with a longitudinal through hole for accommodating the shaft 317044 so that the button 317042 can rotate relative to the shaft 317044. The telescopic positioning rod 317043 may include a spring and a pin. The front end of the button 317042 is provided with a transverse through hole for accommodating at least part of the spring and / or the pin so that the spring can move synchronously with the button 317042 so that the telescopic positioning rod 317043 is locked in the first limiting groove 317031 or the second limiting groove 317032. One end of the pin is connected to the spring or at least partially sleeved on the outside of the spring, and the other end of the pin can abut against the first limiting groove 317031 or the second limiting groove 317032.

[0103] like Figure 6 As shown, in some embodiments of the present disclosure, the button 317042 can be V-shaped, L-shaped, U-shaped, etc. When the button 317042 is pressed to the left, the button 317042 rotates as an axis until the pin abuts against the first limiting groove 317031. At this time, the right end of the pawl 31702 engages with the ratchet 31701, and the right end of the pawl 31702 abuts against the inner edge of the support seat 317041, so that the ratchet 31701 can only rotate clockwise.

[0104] like Figure 4 As shown, in some embodiments of the present disclosure, the distal end of the eccentric transmission seat 315 is sleeved outside the proximal end of the fixed seat 316 and is rotatably connected via at least one bearing.

[0105] In some embodiments of the present disclosure, the proximal end of the fixed seat 316 is rotatably connected to the eccentric transmission seat 315 via a bearing, and the inner ring of the ratchet 31701 presses the outer ring of the bearing to fix the bearing. In some embodiments, the proximal end of the fixed seat 316 is rotatably connected to the eccentric transmission seat 315 via two bearings, and a bearing spacer is provided between the two bearings.

[0106] like Figure 4 As shown, in some embodiments of the present disclosure, the eccentric shaft 311 is rotatably connected to the bellows assembly 314 through at least one bearing. In some embodiments of the present disclosure, the proximal end of the eccentric shaft 311 is rotatably connected to the proximal shaft 31402 of the bellows assembly 314 through a proximal bearing. The middle of the eccentric shaft 311 is rotatably connected to the proximal end of the distal shaft 31403 of the bellows assembly 314 through a middle bearing. The distal end of the eccentric shaft 311 is rotatably connected to the distal end of the distal shaft 31403 of the bellows assembly 314 through a distal bearing.

[0107] In some embodiments of the present disclosure, the interior of the bellows assembly 314 is a vacuum environment, and the exterior is an atmospheric environment. For example, the rotating block 31301 can be driven to rotate by manually shaking the driving mechanism 3, thereby driving the eccentric transmission seat 315 to rotate. The eccentric transmission seat 315 drives the rotating pendulum block 312 to rotate. When the rotating pendulum block 312 rotates an angle, the proximal shaft 31402 of the bellows assembly 314140 drives the bellows 31401 to swing to the corresponding angle, and at the same time drives the eccentric shaft 311 to rotate, thereby realizing the transmission of the rotational motion.

[0108] Those skilled in the art will understand that Figure 4 The drive mechanism 3 shown in some embodiments of the present disclosure can be used for Figure 1 A vacuum sample transfer device 1000 according to some embodiments of the present disclosure is shown.

[0109] In some embodiments of the present disclosure, Figure 4 The driving mechanism 3 according to some embodiments of the present disclosure is shown as a rotary driving mechanism 31. The distal end of the eccentric rotating shaft 311 of the rotary driving mechanism 31 can be connected to the gear shaft of the rotary driving gear 214, for example, after being connected through a coupling 215, the eccentric rotating shaft 311 of the rotary driving mechanism 31 drives the rotary driving gear 214 to rotate, thereby driving the transmission gear 213 and the rotary shaft 211 to rotate.

[0110] like Figure 1 As shown, in some embodiments of the present disclosure, the vacuum chamber 1 may include a rotation drive mechanism installation port, and the rotation drive mechanism 31 is sealedly connected to the rotation drive mechanism installation port, for example, by Figure 4 The flange 31404 of the bellows assembly 314 is shown to be sealed and connected to the vacuum chamber 1 through the flange of the rotary drive mechanism installation port. In some embodiments, a support seat 217 may be provided in the rotary drive mechanism installation port, and the support seat 217 may be fixedly connected to, for example, a flange on the rotary drive mechanism installation port, and the gear shaft of the rotary drive gear 214 is provided in the support seat 217. In some embodiments, the rotary drive mechanism installation port may also be connected to a through hole 216, and both ends of the through hole 216 are sealed and fixedly connected to the vacuum chamber 1 and the rotary drive mechanism 31 through flanges.

[0111] In some embodiments of the present disclosure, Figure 4The driving mechanism 3 shown in some embodiments of the present disclosure can be used as a linear driving mechanism 32. The distal end of the eccentric shaft 311 of the linear driving mechanism 32 can be connected to the gear shaft (not shown) of the linear driving gear 222. For example, after the distal end of the eccentric shaft 311 is connected to the gear shaft of the linear driving gear 222 through a coupling, the eccentric shaft 311 of the linear driving mechanism 32 drives the linear driving gear 222 to rotate, thereby driving the transmission gear 221 to move linearly.

[0112] like Figure 1 As shown, in some embodiments of the present disclosure, the vacuum chamber 1 may include a linear drive structure mounting port, and the linear drive mechanism 32 is sealed and connected to the linear drive mechanism mounting port, for example, the flange 31404 of the bellows assembly 314 may be sealed and connected to the linear drive mechanism mounting port through a flange. In some embodiments, a support seat 217 is further provided in the linear drive structure mounting port, and the support seat 217 may be fixedly connected to, for example, a flange on the linear drive structure mounting port, and the gear shaft of the linear drive gear 222 is provided in the support seat 217. In some embodiments, the linear drive structure mounting port may also be connected to a through-hole 216, and both ends of the through-hole 216 are respectively sealed and fixedly connected to the vacuum chamber 1 and the rotary drive structure through flanges.

[0113] Figure 7 FIG. 1 is a schematic structural diagram of a vacuum processing system 10000 according to some embodiments of the present disclosure.

[0114] like Figure 7 As shown, in some embodiments of the present disclosure, a vacuum processing system 10000 may include a vacuum processing chamber 2000 and a vacuum sample transfer device 1000 according to any embodiment of the present disclosure, for transferring samples in the vacuum processing chamber 2000 .

[0115] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A vacuum sample transfer device, characterized in that: include: Vacuum chamber; A transmission assembly, at least partially disposed in the vacuum chamber, the transmission assembly comprising a rotating shaft assembly, at least partially disposed in the vacuum chamber, the rotating shaft assembly comprising a rotating shaft capable of rotating about an axial direction; A driving mechanism, comprising a rotary driving mechanism, wherein the rotary driving mechanism is sealed and connected to the vacuum chamber and is used to drive the rotary shaft assembly; as well as The sample transfer platform is connected to the transmission assembly, and the driving mechanism drives the transmission assembly to drive the sample transfer platform to move.

2. The vacuum sample transfer device according to claim 1, characterized in that: The rotating shaft assembly also includes: The sleeve is rotatably arranged in the vacuum chamber, the rotating shaft is passed through the sleeve and is slidably connected with the sleeve, and the sleeve can drive the rotating shaft to rotate around the axial direction.

3. The vacuum sample transfer device according to claim 2, characterized in that: The rotating shaft assembly also includes: a rotation drive gear connected to the rotation drive mechanism; and The transmission gear is fixedly connected to the sleeve and meshes with the rotary drive gear, and is used for driving the sleeve to rotate under the drive of the rotary drive gear so as to drive the rotary shaft to rotate around the axial direction.

4. The vacuum sample transfer device according to claim 2, characterized in that: The cross-section of the rotating shaft is polygonal, and the sleeve includes a tube body and at least one support bearing rotatably arranged on the tube body. The outer wall of the at least one support bearing abuts against at least one surface of the rotating shaft, and is used to support and drive the rotating shaft to rotate axially and allow the rotating shaft to slide along the axial direction.

5. The vacuum sample transfer device according to claim 4, characterized in that: The tubular body of the sleeve comprises a protruding structure, and the protruding structure comprises at least one mounting hole for mounting the at least one support bearing.

6. The vacuum sample transfer device according to claim 2, characterized in that: Also includes: At least one fixed plate, fixedly disposed in the vacuum chamber, the sleeve being rotatably connected to the fixed plate; and / or A proximal support seat is fixedly disposed at the proximal end of the vacuum chamber, and the rotating shaft is rotatably connected to the proximal support seat; and / or The distal support seat is fixedly arranged at the distal end of the vacuum chamber, and the rotating shaft is rotatably connected to the distal support seat.

7. The vacuum sample transfer device according to claim 1, characterized in that: The driving mechanism also includes a linear driving mechanism; The transmission assembly further includes a linear motion assembly, which is at least partially disposed in the vacuum chamber, and the linear motion assembly includes: a linear drive gear connected to the linear drive mechanism; and The rack is meshed with the linear drive gear, and the distal end of the rack is connected to the sample transfer platform, and the rack is driven to move linearly under the drive of the linear drive gear.

8. The vacuum sample transfer device according to claim 7, characterized in that: The rack includes at least two flanges extending axially along the rack; The vacuum sample transfer device further comprises at least one set of rack limiter components, which are fixedly connected to the vacuum chamber and slidably connected to the rack, and the rack limiter components comprise: at least two horizontally arranged rollers, the outer walls of which are respectively in contact with the left and right outer walls of one of the two flanges, so as to limit the rack in the left and right directions; and At least one vertically arranged roller is arranged between at least two flanges extending axially along the rack to limit the rack in the up and down directions.

9. The vacuum sample transfer device according to claim 7, characterized in that: The rotary drive mechanism or the linear drive mechanism comprises: An eccentric rotating shaft, comprising an eccentric section and a central section; A rotating pendulum block is sleeved on the outside of the eccentric section of the eccentric shaft and can drive the eccentric shaft to rotate around its own rotation axis; and A driving device is connected to the rotating pendulum block and can drive the rotating pendulum block to rotate around the rotation axis of the eccentric shaft, so as to drive the eccentric shaft to rotate around the rotation axis.

10. The vacuum sample transfer device according to claim 9, characterized in that: The rotary drive mechanism or the linear drive mechanism further includes a bellows assembly, wherein the bellows assembly includes: A bellows, sleeved outside the eccentric shaft; and A proximal shaft, the distal end of which is fixedly connected to the proximal seal of the bellows, the proximal shaft comprising a rotating chamber for rotationally connecting to the proximal end of the eccentric section of the eccentric shaft, the rotating pendulum block being sleeved outside the proximal shaft to drive the proximal shaft to rotate and swing, thereby driving the eccentric shaft to rotate around the rotation axis.

11. A vacuum processing system, characterized in that: include: a vacuum processing chamber, and The vacuum sample transfer device according to any one of claims 1 to 10 is used to transfer samples in a vacuum processing chamber.

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