Crystal taking vehicle tray anti-falling device

Abstract

The utility model discloses a crystal taking vehicle tray anti-falling device which comprises a tray linear guide rail, an anti-falling device is fixedly arranged on the rear side wall of the tray linear guide rail, an anti-falling tray is arranged on the front side wall of the tray linear guide rail in a sliding mode, and an adjustable damper is arranged on the rear side wall of the anti-falling tray. By means of the structure, the tray linear guide rail plays a role in guiding the anti-falling tray, so that the anti-falling tray can slide up and down, the adjustable damper installed on the anti-falling tray is used for adjusting the sliding resistance of the anti-falling tray so as to prevent the anti-falling tray from automatically sliding down due to the dead weight, and the falling protector is connected to the anti-falling tray through the steel cable. When the anti-falling tray falls suddenly and quickly, the anti-falling tray is automatically locked, so that the impact of the falling of the silicon crystal bar on the structure of the crystal taking vehicle is effectively reduced, the anti-falling effect is achieved, the damage of vehicle body parts caused by the falling of the silicon crystal bar due to the breakage of the silicon crystal bar, misoperation and the like is avoided, and the safety is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of a multifunctional crystal retrieval vehicle, in particular to a crystal retrieval vehicle tray anti-falling device. Background Art

[0002] In the field of semiconductor manufacturing, a wafer handling vehicle usually refers to a device used to transfer the crystal rod from one place to another during the single crystal silicon pulling process.

[0003] In existing crystal retrieval vehicles, the tray is generally fixed in the ground and cannot move upward with the crystal rod. Once the crystal rod breaks during transportation, it will directly fall to the ground and break the ground, causing damage to the vehicle body parts. Utility Model Content

[0004] The utility model aims to provide a crystal retrieval vehicle tray anti-falling device, the tray linear guide rail guides the anti-falling tray so that it can slide up and down, and the sliding resistance of the anti-falling tray is adjusted by an adjustable damper installed on the anti-falling tray to prevent the anti-falling tray from sliding down due to its own weight. The anti-falling device is connected to the anti-falling tray by a steel cable, and is automatically locked when the anti-falling tray falls suddenly and quickly, effectively reducing the impact of the falling silicon crystal rods on the structure of the crystal retrieval vehicle, thereby achieving an anti-falling effect, avoiding damage to vehicle body parts caused by the falling of silicon crystal rods due to reasons such as silicon crystal rod breakage and operational errors, and improving safety.

[0005] In order to achieve the above-mentioned purpose, a crystal retrieval vehicle pallet anti-falling device is provided, comprising: a pallet linear guide rail, a fall arrester is fixedly arranged on the rear side wall of the pallet linear guide rail, an anti-falling tray is slidably arranged on the front side wall of the pallet linear guide rail, an adjustable damper is arranged on the rear side wall of the anti-falling tray, a clamping arm is slidably arranged on the rear side wall of the pallet linear guide rail, a silicon crystal rod is clamped inside the clamping arm, and a fixed block group is fixedly connected to the rear side wall of the pallet linear guide rail.

[0006] According to the crystal retrieval vehicle tray anti-falling device, the rear side wall of the clamping arm is fixedly connected to the crystal retrieval vehicle.

[0007] According to the crystal retrieval vehicle tray anti-falling device, the silicon crystal rod is located above the anti-falling tray.

[0008] According to the crystal retrieval vehicle tray anti-falling device, the fixed block group is located below the anti-falling device and is fixedly connected to the anti-falling device.

[0009] According to the crystal retrieval vehicle pallet anti-falling device, the anti-falling device is fixedly connected to the anti-falling pallet via a steel cable.

[0010] The above scheme has the beneficial effects: by arranging the linear guide rail of the pallet, the fall arrester, the fall prevention type pallet, the adjustable damper, the cable wheel, the clamping arm and the silicon crystal rod, the linear guide rail of the pallet guides the fall prevention type pallet so that it can slide up and down, and the adjustable damper installed on the fall prevention type pallet is used to adjust the sliding resistance of the fall prevention type pallet to prevent the fall prevention type pallet from sliding down due to its own weight. The fall arrester is connected to the fall prevention type pallet through a steel cable, and is automatically locked when the fall prevention type pallet suddenly falls quickly, effectively reducing the impact of the falling silicon crystal rod on the structure of the crystal retrieval vehicle, thereby achieving the fall prevention effect, avoiding damage to the vehicle body parts caused by the falling of the silicon crystal rod due to reasons such as silicon crystal rod breakage and operational errors, and improving safety.

[0011] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The utility model is further described below in conjunction with the accompanying drawings and embodiments;

[0013] Figure 1 This is a front view of the crystal retrieval vehicle tray anti-falling device of the utility model;

[0014] Figure 2 This is a top structural diagram of the tray linear guide rail of the crystal retrieval vehicle tray anti-fall device of the utility model;

[0015] Figure 3 This is a bottom structural diagram of the tray linear guide rail of the crystal retrieval vehicle tray anti-fall device of the utility model;

[0016] Figure 4 This is a structural diagram of the crystal retrieval vehicle tray anti-falling device during clamping of the utility model.

[0017] Legend:

[0018] 1. Pallet linear guide; 2. Anti-fall device; 3. Anti-fall pallet; 4. Adjustable damper; 5. Cable wheel; 6. Clamp arm; 7. Silicon crystal rod; 8. Fixed block group. DETAILED DESCRIPTION

[0019] This section will describe in detail the specific embodiments of the utility model. The preferred embodiments of the utility model are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the utility model, but it cannot be understood as a limitation on the protection scope of the utility model.

[0020] Reference Figure 1-4The embodiment of the utility model is a device for preventing a wafer retrieval vehicle from falling. The device comprises a linear guide rail 1 for a tray. A fall arrester 2 is fixedly arranged on the rear side wall of the linear guide rail 1 for a tray. The fall arrester 2 is a conventional component. The fall arrester can be a common style on the market. The structure disclosed in other patents can also be used for reference, such as patents with publication numbers CN114377314B and CN114733100A. The fall arrester 3 is automatically locked when the fall arrester 3 falls suddenly and quickly. The fall arrester 3 is slidably arranged on the front side wall of the linear guide rail 1 for a tray. The fall arrester 2 is a conventional component. The fall arrester 2 can be a common style on the market. The structure disclosed in other patents can also be used for reference, such as patents with publication numbers CN114377314B and CN114733100A. The fall arrester 3 is automatically locked when the fall arrester 3 falls suddenly and quickly. An adjustable damper 4 is provided on the rear side wall for buffering the falling force. A cable wheel 5 is rotatably provided on the top of the pallet linear guide 1. The anti-fall device 2 is fixedly connected to the anti-fall type pallet 3 by a steel cable. A clamping arm 6 is slidably provided on the rear side wall of the pallet linear guide 1. A silicon crystal rod 7 is clamped inside the clamping arm 6. The rear side wall of the clamping arm 6 is fixedly connected to the crystal retrieval vehicle. The silicon crystal rod 7 is located above the anti-fall type pallet 3. A fixed block group 8 is fixedly connected to the rear side wall of the pallet linear guide 1. The fixed block group 8 is located below the anti-fall device 2 and is fixedly connected to the anti-fall device 2.

[0021] Working principle: The tray linear guide 1 guides the anti-fall tray 3 so that it can slide up and down. The adjustable damper 4 installed on the anti-fall tray 3 is used to adjust the sliding resistance of the anti-fall tray 3 to prevent the anti-fall tray 3 from sliding down due to its own weight. The anti-fall device 2 is connected to the anti-fall tray 3 by a steel cable bypassing the cable wheel 5. It is automatically locked when the anti-fall tray 3 falls suddenly and quickly, which effectively reduces the impact of the falling silicon crystal rod 7 on the structure of the crystal retrieval vehicle, thereby achieving an anti-fall effect, avoiding damage to the vehicle body parts caused by the falling of the silicon crystal rod 7 due to reasons such as breakage of the silicon crystal rod 7 and operational errors, thereby improving safety.

[0022] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. The crystal retrieval vehicle tray anti-fall device is characterized by: include: A pallet linear guide (1), a fall arrester (2) is fixedly arranged on the rear side wall of the pallet linear guide (1), an anti-fall type pallet (3) is slidably arranged on the front side wall of the pallet linear guide (1), an adjustable damper (4) is arranged on the rear side wall of the anti-fall type pallet (3), a cable wheel (5) is rotatably arranged on the top of the pallet linear guide (1), a clamping arm (6) is slidably arranged on the rear side wall of the pallet linear guide (1), a silicon crystal rod (7) is clamped inside the clamping arm (6), and a fixed block group (8) is fixedly connected to the rear side wall of the pallet linear guide (1).

2. The crystal retrieval vehicle tray anti-falling device according to claim 1, characterized in that: The rear side wall of the clamping arm (6) is fixedly connected to the crystal retrieval vehicle.

3. The crystal retrieval vehicle tray anti-falling device according to claim 1, characterized in that: The silicon crystal rod (7) is located above the anti-falling tray (3).

4. The crystal retrieval vehicle tray anti-falling device according to claim 1, characterized in that: The fixed block group (8) is located below the fall arrester (2) and is fixedly connected to the fall arrester (2).

5. The crystal retrieval vehicle tray anti-falling device according to claim 1, characterized in that: The anti-fall device (2) is fixedly connected to the anti-fall type tray (3) via a steel cable.

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