Furnace cavity exhaust structure and pressure container

Abstract

The utility model discloses a furnace chamber exhaust structure and a pressure vessel, the furnace chamber exhaust structure comprises a furnace body and an exhaust device, the side wall of the furnace body is provided with a plurality of exhaust holes, and the lowest positions of the exhaust holes and the highest position of a crucible are on the same horizontal line; the exhaust device comprises a mounting part, an exhaust pipe and a flash tank, the mounting part is provided with a plurality of first mounting holes, and the first mounting holes axially penetrate through the mounting part; and the other end of the exhaust pipe is movably connected with the flash tank. According to the furnace cavity exhaust structure, the exhaust hole is formed in the same horizontal line as the crucible outlet, condensate such as silicides can be rapidly extracted out of the furnace body, the condensate is prevented from being condensed on a product or other parts of the furnace body, the flash tank is further arranged, the condensate can be condensed in the flash tank under the action of flash, and the effect of the flash tank is improved. Condensate is prevented from blocking other pipelines, so that the blockage of the exhaust hole can be reduced, and the crystal pulling speed and quality are ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure vessels, in particular to a furnace cavity exhaust structure and a pressure vessel. Background Art

[0002] A pressure vessel is a closed container that can withstand pressure. In the chemical and petrochemical fields, it is mainly used in processes such as heat transfer, mass transfer, reaction, and storage and transportation of pressurized gas or liquefied gas. It is also widely used in other industrial and civil fields, such as air compressors. Various special compressors and auxiliary machines of refrigeration compressors (coolers, buffers, oil-water separators, gas storage tanks, evaporators, liquid coolant storage tanks, etc.), boilers, etc. are all pressure vessels. In the new energy industry, equipment in some fields such as single crystal silicon furnaces, double crystal silicon furnaces, sapphire furnaces, hydrogen tanks, etc. are also pressure vessels.

[0003] In the production process of pressure vessels such as single crystal silicon furnaces, dual crystal silicon furnaces, and sapphire furnaces, if the direct pull process is used, argon gas needs to be introduced into the furnace body for cooling and to take away the waste gas generated in the production process. Since the waste gas contains silicides and other impurities, the silicides will condense during the exhaust process and condense in the pipes or exhaust holes, causing blockage over time, thereby affecting the production speed and quality of the product.

[0004] In the prior art, a bushing is installed in the exhaust hole, and the bushing is used as a deposition platform for silicide. After each crystal pulling, the bushing can be replaced. However, in the above technology, if the silicide deposition is serious, the exhaust hole will be blocked during the production process, which will affect the production speed of crystalline silicon. In other technologies, the following technology is also used: an exhaust pipe is installed in the exhaust hole, and the position of the exhaust hole is changed to place the exhaust hole at the bottom, and it is placed between the heater and the heat preservation cover to facilitate the rapid discharge of exhaust gas to reduce the blockage of the exhaust hole. However, if the exhaust hole is placed at the bottom, it will take away the heat of the heater, and when the exhaust gas flows to the bottom, the temperature will drop significantly due to the temperature drop or the smaller aperture, so that part of the exhaust gas will condense, which will also cause the exhaust hole to be blocked. Utility Model Content

[0005] In order to overcome the deficiencies of the prior art, one of the purposes of the present invention is to provide a furnace cavity exhaust structure to solve the above-mentioned traditional problems.

[0006] The second object of the utility model is to provide a pressure vessel adopting the furnace cavity exhaust structure, such as a single crystal silicon furnace, a double crystal silicon furnace, a sapphire furnace, etc.

[0007] One of the purposes of the utility model is achieved by the following technical solution:

[0008] A furnace cavity exhaust structure comprises a furnace body and an exhaust device installed on the furnace body, the side wall of the furnace body is provided with a plurality of exhaust holes, the lowest position of the exhaust holes is on the same horizontal line as the highest position of the crucible; the exhaust device comprises a mounting member, an exhaust pipe installed on the mounting member and a flash tank connected to the exhaust pipe, the mounting member is used to be accommodated in the exhaust hole, the mounting member is provided with a plurality of first mounting holes, and the first mounting holes axially penetrate the mounting member; one end of the exhaust pipe is used to be installed in the first mounting hole, the other end of the exhaust pipe is movably connected to the flash tank, and the flash tank is provided with an exhaust pipe connected to a vacuum pump.

[0009] Preferably, the mounting member is connected to the exhaust hole via threads.

[0010] Preferably, the exhaust hole is circular.

[0011] Preferably, the mounting member is cylindrical.

[0012] Preferably, the flash tank comprises an upper flash evaporation portion and a lower sedimentation collection portion, and the gas outlet pipe is arranged above the flash evaporation portion.

[0013] Preferably, the precipitation collection part is threadably connected to the flash evaporation part.

[0014] Preferably, the exhaust device also includes an electric heater installed on the mounting member, and the mounting member also includes a second mounting hole, the second mounting hole is located in the middle of the mounting member, the electric heater is used to be installed in the second mounting hole, and each of the first mounting holes is arranged around the second mounting hole.

[0015] Preferably, one end of the second mounting hole facing the furnace body is a closed end.

[0016] The second purpose of the utility model is achieved by the following technical solution:

[0017] A pressure vessel, which is one of a single crystal silicon furnace, a double crystal silicon furnace, and a sapphire furnace, and the pressure vessel comprises the furnace cavity exhaust structure described above.

[0018] Compared with the prior art, the beneficial effects of the present invention are:

[0019] 1. The furnace cavity exhaust structure of the utility model can quickly extract condensates such as silicides out of the furnace body by setting the exhaust holes on the same horizontal line as the crucible outlet, thereby preventing the condensates from condensing on the product or other parts of the furnace body. At the same time, when the exhaust gas is discharged, the temperature is still at a relatively high temperature and generally will not condense on the exhaust pipe of the exhaust device. However, when the condensate is blocked, the exhaust device can be simply replaced, thereby greatly extending the service life of the furnace body. A flash tank is also provided on the exhaust device, which can condense the condensate in the flash tank through the effect of flash evaporation to avoid clogging other pipelines by the condensate, thereby reducing the blockage of the exhaust holes and ensuring the crystal pulling speed and quality.

[0020] 2. In the present invention, an electric heater is provided to heat the installation part in cooperation with the exhaust device to avoid the problem of part of the condensate condensing on the exhaust pipe due to the change in diameter of the installation part. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the furnace cavity exhaust structure of the utility model;

[0022] Figure 2 for Figure 1 An enlarged view of point A is shown;

[0023] Figure 3 for Figure 1 A schematic structural diagram of the end surface of the mounting member facing the interior of the furnace body;

[0024] Figure 4 for Figure 1 The schematic diagram of the structure of the end surface of the mounting member facing away from the interior of the furnace body is shown.

[0025] In the figure: 10, furnace body; 11, crucible; 12, heating coil; 13, insulation sleeve; 14, exhaust hole; 20, exhaust device; 21, mounting part; 210, first mounting hole; 211, second mounting hole; 22, electric heater; 23, exhaust pipe; 24, flash tank; 240, exhaust pipe. DETAILED DESCRIPTION

[0026] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0027] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0028] In the description of the present utility model, it is necessary to understand that when an element is considered to be "connected" to another element, it may be directly connected to another element or there may be intermediate elements at the same time. On the contrary, when an element is said to be "directly" connected to another element, there are no intermediate elements.

[0029] See also Figure 1-Figure 4 , which is a furnace cavity exhaust structure of a preferred embodiment of the utility model, is used to discharge the gas in the furnace cavity, especially the exhaust gas that will produce solid condensation during the discharge process. Specifically, the furnace cavity exhaust structure includes a furnace body 10 and an exhaust device 20 installed on the furnace body 10.

[0030] A crucible 11, a heating coil 12 and an insulation sleeve 13 are installed in the furnace body 10. The crucible 11 is filled with materials to be refined. A crystal rod (which can be a formed crystal rod or a straight-pull guide crystal rod) is arranged on the upper part of the crucible 11. The side wall of the furnace body 10 is also provided with a plurality of exhaust holes 14. The lowest horizontal position of the exhaust hole 14 is flush with the highest horizontal position of the crucible 11. It can be understood that the lowest position of the exhaust hole 14 is on the same horizontal line as the highest position of the crucible 11, which can effectively extract the exhaust gas emitted from the boiler and absorb the argon gas on the crystal rod, so that the crystal pulling process can proceed smoothly and reduce the accumulation of impurities on the crystal rod. In one embodiment, the exhaust hole 14 is circular.

[0031] The exhaust device 20 is used to be installed on the exhaust hole 14 of the furnace body 10. Specifically, the exhaust device 20 includes a mounting member 21, an electric heater 22 mounted on the mounting member 21, an exhaust pipe 23, and a flash tank 24 connected to the exhaust pipe 23. The mounting member 21 is used to be accommodated in the exhaust hole 14 and extend to the top of the insulation sleeve 13. The mounting member 21 is connected to the exhaust hole 14 by threads, and can also be sealed or fixed by a sealing ring, or installed by other fixing methods. In this embodiment, as Figure 3 and Figure 4As shown, the mounting member 21 is roughly cylindrical, and the mounting member 21 is provided with a plurality of first mounting holes 210 and a second mounting hole 211. The second mounting hole 211 is located in the middle of the mounting member 21, and each first mounting hole 210 is arranged around the second mounting hole 211. One end of the second mounting hole 211 is an open end, and the other end thereof (i.e., the end facing the furnace body 10) is a closed end. The first mounting hole 210 is arranged axially through the mounting member 21, and the electric heater 22 is used to be installed in the second mounting hole 211, and is used to heat it to ensure that the exhaust gas does not condense when it flows therein, thereby avoiding clogging the exhaust pipe 23. Among them, the heating temperature of the electric heater 22 needs to ensure that silicide and other easily condensable gases do not condense in the exhaust pipe 23. The specific temperature needs to be determined according to the specific purpose and the type of exhaust gas, which will not be repeated here. Since a plurality of first mounting holes 210 are provided, when one of the mounting holes is blocked, it can also be ensured that the exhaust pipes 23 on other mounting holes can be evacuated to avoid affecting the overall production.

[0032] Please refer again Figure 2 The exhaust pipe 23 is used to be installed in the first mounting hole 210. The number of the exhaust pipes 23 corresponds to the number of the first mounting holes 210. The diameter of each exhaust pipe 23 needs to be set according to the specific exhaust volume requirements, which will not be repeated here. The exhaust pipe 23 is inserted into the first mounting hole 210 and extends into the furnace body 10. The exhaust pipe 23 and the first mounting hole 210 can be sealed by a sealing ring or a threaded connection. The corresponding sealing structure is set according to the specific sealing requirements. The other end of the exhaust pipe 23 is movably connected to the flash tank 24, or is connected by a quick plug-in type, so that it can be quickly disassembled and assembled with the flash tank 24.

[0033] The flash tank 24 includes an upper flash evaporation part and a lower sedimentation collection part. An air outlet pipe 240 is provided above the flash evaporation part. The air outlet pipe 240 is used to be connected to a vacuum pump to continuously extract exhaust gas from the furnace body 10 through the exhaust device 20, and to prevent condensate from blocking the pipeline or affecting the operation of the vacuum pump. The sedimentation collection part is located below the flash evaporation part and is used to collect condensate precipitated after flash evaporation. The sedimentation collection part is threadedly connected to the flash evaporation part, so that the condensate can be cleaned by replacing the sedimentation collection part, so as to extend the working life of the furnace body 10 or the parts affected by the condensate. In other embodiments, the size of the flash tank 24 is determined according to the specific furnace body 10 and the condensate, which will not be described in detail here.

[0034] In the above embodiments, the mounting member 21, the exhaust pipe 23, the flash tank 24 and other components are all made of high temperature resistant materials, such as quartz material.

[0035] The utility model also provides a pressure vessel, which adopts the furnace cavity exhaust structure of the above embodiment, and by setting the exhaust hole 14 at the same level as the outlet of the crucible 11, condensates such as silicide can be quickly extracted from the furnace body 10, avoiding condensation on the product or other parts of the furnace body 10. At the same time, when the exhaust gas is discharged, since the temperature is still at a relatively high temperature, it generally does not condense on the exhaust pipe 23 of the exhaust device 20. However, when the condensate is blocked, the exhaust device 20 can be simply replaced, thereby greatly extending the service life of the furnace body 10. The exhaust device 20 is also provided with a flash tank 24, which can condense the condensate in the flash tank 24 through the effect of flash evaporation, avoiding condensation on other pipelines, thereby reducing the blockage of the exhaust hole 14 and ensuring the crystal pulling speed and quality. Wherein, the pressure vessel is one of a single crystal silicon furnace, a double crystal silicon furnace, and a sapphire furnace.

[0036] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0037] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A furnace cavity exhaust structure, characterized in that: It comprises a furnace body and an exhaust device installed on the furnace body, the side wall of the furnace body is provided with a plurality of exhaust holes, the lowest position of the exhaust holes is on the same horizontal line as the highest position of the crucible; the exhaust device comprises a mounting member, an exhaust pipe installed on the mounting member and a flash tank connected to the exhaust pipe, the mounting member is used to be accommodated in the exhaust hole, the mounting member is provided with a plurality of first mounting holes, and the first mounting holes axially penetrate the mounting member; one end of the exhaust pipe is used to be installed in the first mounting hole, the other end of the exhaust pipe is movably connected to the flash tank, and the flash tank is provided with an exhaust pipe connected to a vacuum pump.

2. The furnace cavity exhaust structure according to claim 1, characterized in that: The mounting piece is connected to the exhaust hole via threads.

3. The furnace cavity exhaust structure according to claim 1, characterized in that: The exhaust hole is circular in shape.

4. The furnace cavity exhaust structure according to claim 1, characterized in that: The mounting piece is cylindrical.

5. The furnace cavity exhaust structure according to claim 1, characterized in that: The flash tank comprises an upper flash evaporation part and a lower sedimentation collection part, and the gas outlet pipe is arranged above the flash evaporation part.

6. The furnace cavity exhaust structure according to claim 5, characterized in that: The precipitation collection part is connected to the flash evaporation part by threads.

7. The furnace cavity exhaust structure according to claim 1, characterized in that: The exhaust device also includes an electric heater installed on the mounting member, and the mounting member also includes a second mounting hole, the second mounting hole is located in the middle of the mounting member, the electric heater is used to be installed in the second mounting hole, and each of the first mounting holes is arranged around the second mounting hole.

8. The furnace cavity exhaust structure according to claim 7, characterized in that: One end of the second mounting hole facing the furnace body is a closed end.

9. A pressure vessel, the pressure vessel being one of a single crystal silicon furnace, a double crystal silicon furnace, and a sapphire furnace, characterized in that: The pressure vessel comprises the furnace cavity exhaust structure according to any one of claims 1-8.

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