Lining plate and coating system

Abstract

The utility model belongs to the technical field of thin film deposition, and discloses a lining plate and a coating system. The lining plate comprises a first annular plate, an annular vertical plate and a second annular plate. The first annular plate is used for being annularly arranged on the periphery of a base plate. The annular vertical plate extends in the circumferential direction of the inner side of the first annular plate and forms an angle with the first annular plate. The second annular plate extends inwards along the side, away from the first annular plate, of the annular vertical plate. The second annular plate and the base plate are arranged in a spaced mode. The sides, close to the base plate, of the annular vertical plate and the second annular plate are provided with insulating coatings. According to the lining plate, the problem that the lining plate and the coating substrate are broken down by discharge of equipment is effectively avoided, the yield of products can be improved, and cost waste is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film deposition, in particular to a lining plate and a film coating system. Background Art

[0002] Physical vapor deposition (PVD) is a commonly used thin film deposition technology. It heats the material to a high temperature in a vacuum environment to evaporate or sputter it into a gas phase, and then deposits it into a thin film on the substrate surface.

[0003] In sputtering coating, the coating chamber needs to be installed with a liner to absorb excess sputtered material, usually called a MASK.

[0004] During the production process, as the production and processing proceeds, please refer to the attached Figure 1 , is the specific structure of the existing liner 10 and the layout of the existing liner 10 and the existing coated substrate 20. The gap between the existing liner 10 and the existing coated substrate 20 is prone to short circuit, resulting in abnormal discharge between the existing liner 10 and the existing coated substrate 20, and even causing lightning patterns on the existing coated substrate 20. The reason for the short circuit and lightning patterns is that part of the existing coated substrate 20 is deformed due to temperature rise during coating, and the existing coated substrate 20 and the existing liner 10 cross the protective gap, and the equipment discharge causes the existing liner 10 and the existing coated substrate 20 to be broken down. When this discharge problem occurs, it is necessary to stop the machine for processing, otherwise it is very easy to cause the product to be scrapped. Utility Model Content

[0005] The utility model aims to provide a lining plate and a coating system, which are used to solve the technical problem of equipment discharge breakdown between the existing lining plate and the coating substrate, thereby improving the product yield and avoiding cost waste.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] Liner, including:

[0008] A first annular plate, used to be arranged around the outer periphery of the base plate;

[0009] an annular vertical plate extending along the inner circumference of the first annular plate and at an angle to the first annular plate;

[0010] A second annular plate extending inwardly along a side of the annular vertical plate away from the first annular plate, and a gap is set between the second annular plate and the base plate;

[0011] An insulating coating is provided on one side of the annular vertical plate and the second annular plate close to the substrate.

[0012] As an optional solution for a lining plate, the annular vertical plate is arranged at an angle of ° with the first annular plate.

[0013] As an optional solution for a lining plate, the second annular plate is parallel to the plane where the base plate is located.

[0014] As an optional solution for a lining plate, the first annular plate coincides with the plane where the base plate is located.

[0015] As an optional solution for a lining plate, the first annular plate and the second annular plate are respectively located on two sides of the plane where the base plate is located.

[0016] As an optional solution for a lining plate, the first annular plate, the annular vertical plate and the second annular plate are an integrated structure.

[0017] As an optional solution for a lining plate, the first annular plate, the annular vertical plate and the second annular plate are made of heat insulating materials.

[0018] As an optional solution for a lining plate, the connection between the first annular plate and the annular vertical plate is transitioned through a rounded corner.

[0019] As an optional solution for a lining plate, the connection between the annular vertical plate and the second annular plate is transitioned through a rounded corner.

[0020] Coating system, including:

[0021] a carrier; and,

[0022] In the liner as described in any of the above schemes, the substrate is arranged on the carrier.

[0023] Beneficial effects:

[0024] On the first aspect, the distance between the second annular plate and the substrate can be controlled by the annular vertical plate between the first annular plate and the second annular plate. At the same time, the annular vertical plate and the second annular plate form an annular cavity, which is spaced apart and covers the outer periphery of the substrate. While effectively increasing the gap between the lining plate and the second annular plate, it can also further prevent the sputtered particles from diffusing to the outside of the lining plate, thereby ensuring the quality of the sputtering coating. In addition, an insulating coating is provided on the side of the annular vertical plate and the second annular plate close to the substrate, thereby further enhancing the anti-puncture capability between the lining plate and the substrate, thereby improving the product yield and avoiding cost waste.

[0025] Secondly, the coating system using the above liner can reduce the system equipment downtime caused by short circuit between the liner and the substrate, and improve the coating efficiency and yield rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the structure of the lining plate and the base plate in the prior art;

[0027] Figure 2 It is a schematic structural diagram of the cooperation between the lining plate and the base plate provided in an embodiment of the utility model.

[0028] In the figure:

[0029] 10. Existing lining board; 20. Existing coated substrate;

[0030] 100. Substrate; 200. Carrier;

[0031] 1. First annular plate; 2. Annular vertical plate; 3. Second annular plate. DETAILED DESCRIPTION

[0032] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0033] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0035] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0036] Please refer to the attached Figure 2 The first aspect of the present embodiment relates to a liner, which includes a first annular plate 1, an annular vertical plate 2 and a second annular plate 3. The first annular plate 1 is used to be arranged around the outer periphery of a substrate 100; the annular vertical plate 2 extends along the inner circumference of the first annular plate 1 and at an angle to the first annular plate 1; the second annular plate 3 extends inward along a side of the annular vertical plate 2 away from the first annular plate 1, and a gap is set between the second annular plate 3 and the substrate 100; an insulating coating is provided on the side of the annular vertical plate 2 and the second annular plate 3 close to the substrate 100.

[0037] In this embodiment, the annular vertical plate 2 between the first annular plate 1 and the second annular plate 3 can be used to control the second annular plate 3 to adaptively adjust the distance from the substrate 100. At the same time, the annular vertical plate 2 and the second annular plate 3 form an annular cavity, which is spaced apart and covers the outer periphery of the substrate 100, thereby effectively increasing the gap between the lining plate and the second annular plate 3 while further preventing the sputtered particles from diffusing to the outside of the lining plate, thereby ensuring the quality of the sputtering coating; further, an insulating coating is provided on the side of the annular vertical plate 2 and the second annular plate 3 close to the substrate 100, thereby further enhancing the anti-puncture capability between the lining plate and the substrate 100, thereby improving the product yield and avoiding cost waste.

[0038] Optionally, the annular vertical plate 2 and the first annular plate 1 are arranged at an angle of 90°.

[0039] In this embodiment, the annular vertical plate 2 is arranged at an angle of 90° with the first annular plate 1, so that the annular vertical plate 2 is perpendicular to the base plate 100, and can gradually move away from the base plate 100 along the end of the annular vertical plate 2 connected to the first annular plate 1, further improving the anti-puncture capability. Furthermore, in other embodiments, the annular vertical plate 2 can also be trumpet-shaped and gradually extend outward along the side close to the base plate 100.

[0040] Optionally, the second annular plate 3 is parallel to the plane where the base plate 100 is located.

[0041] The second annular plate 3 is parallel to the plane where the substrate 100 is located, and the middle through hole of the second annular plate 3 is used for sputtering ions to pass through, and other invalid sputtering ions are blocked by the second annular plate 3 to ensure the uniformity of sputtering and prevent the sputtering ions from damaging other structures.

[0042] Optionally, the first annular plate 1 coincides with the plane where the base plate 100 is located.

[0043] The first annular plate 1 coincides with the plane of the substrate 100 , so that the outer periphery of the substrate 100 is located inside the isolation chamber formed by the liner except for the channel area through which the sputtering ions pass, thereby preventing the sputtering ions from damaging other structures.

[0044] Optionally, the first annular plate 1 and the second annular plate 3 are respectively located on two sides of the plane where the substrate 100 is located.

[0045] Of course, the first annular plate 1 and the plane where the substrate 100 is located can also be relatively offset, but it is necessary to ensure that the outer periphery of the substrate 100 is still inside the isolation chamber formed by the liner. Therefore, in this embodiment, the first annular plate 1 and the second annular plate 3 are respectively located on both sides of the plane where the substrate 100 is located.

[0046] Optionally, the first annular plate 1, the annular vertical plate 2 and the second annular plate 3 are an integrated structure.

[0047] In this embodiment, the entire lining plate is an integrated structure, which is realized through an integrated molding process, thereby effectively reducing the cost while also ensuring the rigidity and strength of the entire lining plate itself.

[0048] Optionally, the first annular plate 1 , the annular vertical plate 2 and the second annular plate 3 are made of heat insulating materials.

[0049] In this embodiment, the first annular plate 1, the annular vertical plate 2 and the second annular plate 3 are close to the substrate 100, and the surrounding temperature is relatively high. In order to prevent heat from entering through the first annular plate 1, the annular vertical plate 2 and the second annular plate 3 to affect the substrate 100 and cause the substrate 100 to deform due to heat, the first annular plate 1, the annular vertical plate 2 and the second annular plate 3 or the entire lining plate are made of heat-insulating material.

[0050] Optionally, the connection between the first annular plate 1 and the annular vertical plate 2 is transitioned through a rounded corner; the connection between the annular vertical plate 2 and the second annular plate 3 is transitioned through a rounded corner.

[0051] In this embodiment, a rounded transition is adopted at the connection part, which can ensure that the sharp-angle connection part of the liner will not be affected by thermal stress under the continuous influence of the temperature field, thereby improving the service life of the entire liner.

[0052] The second aspect of the present embodiment also relates to a coating system, which includes a stage 200 and a backing plate, and the substrate 100 is disposed on the stage 200. The stage 200 is used to carry and position the substrate 100, and the relative position between the backing plate and the substrate 100 is adjusted by adjusting the position of the backing plate relative to the stage 200.

[0053] The coating system using the above liner can reduce the equipment downtime caused by the short circuit between the liner and the substrate 100, thereby improving the coating efficiency and yield rate.

[0054] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. Lining plate, characterized in that: include: A first annular plate (1), used to be arranged around the outer circumference of the base plate (100); an annular vertical plate (2), extending along the inner circumference of the first annular plate (1) and at an angle to the first annular plate (1); A second annular plate (3) extending inwardly along a side of the annular vertical plate (2) away from the first annular plate (1), and a gap is provided between the second annular plate (3) and the base plate (100); An insulating coating is provided on one side of the annular vertical plate (2) and the second annular plate (3) close to the base plate (100).

2. The lining plate according to claim 1, characterized in that: The annular vertical plate (2) and the first annular plate (1) are arranged at an angle of 90°.

3. The lining plate according to claim 1, characterized in that: The second annular plate (3) is parallel to the plane where the base plate (100) is located.

4. The lining plate according to claim 1, characterized in that: The first annular plate (1) coincides with the plane where the base plate (100) is located.

5. The lining plate according to claim 1, characterized in that: The first annular plate (1) and the second annular plate (3) are respectively located on two sides of the plane where the base plate (100) is located.

6. The lining plate according to claim 1, characterized in that: The first annular plate (1), the annular vertical plate (2) and the second annular plate (3) are an integrated structure.

7. The lining plate according to claim 1, characterized in that: The first annular plate (1), the annular vertical plate (2) and the second annular plate (3) are made of heat-insulating materials.

8. The lining plate according to claim 1, characterized in that: The connection between the first annular plate (1) and the annular vertical plate (2) is transitioned through a rounded corner.

9. The lining plate according to claim 1, characterized in that: The connection between the annular vertical plate (2) and the second annular plate (3) is transitioned through a rounded corner.

10. A coating system, characterized in that: include: A carrier (200); as well as, The liner plate according to any one of claims 1 to 9, wherein the substrate (100) is disposed on the carrier (200).

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