Arc source capable of being spirally adjusted

Abstract

The utility model belongs to the technical field of arc sources, and particularly relates to an arc source capable of being spirally adjusted, which comprises a shell, an arc source main body is slidably connected in the shell, the lower end of the arc source main body is fixedly connected with a mounting sleeve, the interior of the mounting sleeve is connected with a threaded rod through a bearing, and the lower end of the shell is in contact with a mounting plate. A threaded sleeve is fixedly connected to the mounting plate, a threaded rod is connected to the interior of the threaded sleeve through threads, a connecting plate is fixedly connected to the mounting plate, and a sliding block is slidably connected to the interior of the connecting plate. By arranging the supporting plate, the threaded rod, the threaded sleeve, the mounting sleeve and the like, the threaded rod and the threaded sleeve can perform threaded motion by rotating the threaded rod, so that the threaded rod drives the arc source main body to move, and the position between the arc source main body and the arc target can be adjusted more conveniently; the problem that the distance between the arc source and the arc target is inconvenient to adjust is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of arc sources, in particular to an arc source which can be spirally adjusted. Background Art

[0002] The working principle of the arc source of the vacuum coating machine is to use low voltage and high current arc discharge technology under vacuum conditions, and use gas discharge to evaporate the target material and ionize both the evaporated material and the gas. In the ion plating device, a large planar arc source and a small arc source are generally used for multi-arc ion plating. The large planar arc source basically adopts a coil structure, and generates a controllable magnetic field through electromagnetic induction. The bound ions bombard the surface of the target material to form a molten pool and complete the coating process. Most small arc sources use a magnetic field generated by a single cylindrical magnet to complete the above process. However, it is not convenient to adjust the distance between the arc source and the arc target, and it is not convenient to disassemble and repair the arc source body. Utility Model Content

[0003] The utility model aims to provide an arc source which can be adjusted spirally, so as to solve the problems that it is inconvenient to adjust the distance between the arc source and the arc target and it is inconvenient to disassemble and overhaul the arc source body.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an arc source that can be spirally adjusted comprises a shell, an arc source body is slidably connected inside the shell, a mounting sleeve is fixedly connected to the lower end of the arc source body, a threaded rod is connected inside the mounting sleeve via a bearing, a mounting plate is contacted at the lower end of the shell, a threaded sleeve is fixedly connected to the mounting plate, a threaded rod is connected inside the threaded sleeve via a thread, a connecting plate is fixedly connected to the mounting plate, a slider is slidably connected inside the connecting plate, one end of the slider is fixedly connected to a support plate, a threaded rod is connected inside the support plate via a bearing, a knob is fixedly connected to the threaded rod, the knob contacts the support plate, a mounting block is fixedly connected to the shell, a limiting mechanism is provided on the mounting block.

[0005] Preferably, the limiting mechanism includes a guide block, a guide rod, a spring, a clamping block, a clamping slot, and a push block. The guide block is slidably connected to the inside of the mounting block, the guide block is fixedly connected to the guide rod, the mounting block is slidably connected to the inside of the mounting block, a spring is provided on the outside of the guide rod, the lower end of the guide block is fixedly connected to the clamping block, the clamping block is in contact with the mounting block, and the design of the limiting mechanism can facilitate the disassembly of the outer shell.

[0006] Preferably, one end of the spring contacts the guide block, and the other end of the spring contacts the mounting block. The design of the spring can drive the clamping block to limit the mounting block.

[0007] Preferably, a card slot is provided on the mounting plate, and a card block is slidably connected inside the card slot. The design of the card block can limit the mounting block.

[0008] Preferably, one end of the guide block is fixedly connected with a push block, and the push block is in contact with the mounting block. The design of the push block can facilitate the movement of the guide block.

[0009] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0010] 1. The utility model is provided with a support plate, a threaded rod, a threaded sleeve, a mounting sleeve and other components. The threaded rod can be rotated to make the threaded rod and the threaded sleeve to have a threaded motion, so that the threaded rod drives the arc source body to move, which can make it more convenient to adjust the position between the arc source body and the arc target, and solves the problem that it is not convenient to adjust the distance between the arc source and the arc target.

[0011] 2. The utility model is provided with a mounting block, a mounting plate, a clamping block, a spring and other components. By moving the guide block, the guide block drives the clamping block to slide in the clamping groove on the mounting plate, so that the clamping block is no longer clamped with the mounting plate, the limit on the mounting block can be released, and the shell can be separated from the mounting plate, thereby solving the problem of inconvenience in disassembling and repairing the arc source body. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a three-dimensional diagram of the overall structure of the utility model;

[0013] Figure 2 For the utility model Figure 1 A front cross-sectional view of

[0014] Figure 3 For the utility model Figure 1 A side cross-sectional view of

[0015] Figure 4 For the utility model Figure 3 A magnified view of the structure of section A.

[0016] In the figure: 1. outer shell; 2. arc source body; 3. mounting sleeve; 4. threaded rod; 5. mounting plate; 51. threaded sleeve; 52. connecting plate; 53. slider; 54. fixing rod; 55. supporting plate; 6. knob; 7. mounting block; 8. limiting mechanism; 81. guide block; 82. guide rod; 83. spring; 84. clamping block; 85. clamping slot; 86. push block. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] See also Figure 1-4 , an arc source that can be spirally adjusted, including a shell 1, an arc source body 2 is slidably connected inside the shell 1, a mounting sleeve 3 is fixedly connected to the lower end of the arc source body 2, a threaded rod 4 is connected to the inside of the mounting sleeve 3 through a bearing, a mounting plate 5 is contacted at the lower end of the shell 1, a threaded sleeve 51 is fixedly connected to the mounting plate 5, a threaded rod 4 is connected to the inside of the threaded sleeve 51 through a thread, a connecting plate 52 is fixedly connected to the mounting plate 5, a slider 53 is slidably connected to the inside of the connecting plate 52, one end of the slider 53 is fixedly connected to a support plate 55, a threaded rod 4 is connected to the inside of the support plate 55 through a bearing, a knob 6 is fixedly connected to the threaded rod 4, and the knob 6 contacts the support plate 55, use When the arc source body 2 is moved, the position of the arc source body 2 can be adjusted by rotating the knob 6 so that the knob 6 drives the threaded rod 4 to rotate, so that the threaded rod 4 and the threaded sleeve 51 have a threaded motion, and the threaded rod 4 drives the arc source body 2 to move. By providing components such as the support plate 55, the threaded rod 4, the threaded sleeve 51, and the mounting sleeve 3, the threaded rod 4 can be rotated so that the threaded rod 4 and the threaded sleeve 51 have a threaded motion, so that the threaded rod 4 drives the arc source body 2 to move, which can make it more convenient to adjust the position between the arc source body 2 and the arc target, and solves the problem that it is not convenient to adjust the distance between the arc source and the arc target. A mounting block 7 is fixedly connected to the housing 1, and a limiting mechanism 8 is provided on the mounting block 7.

[0019] See also Figure 2-4 The limiting mechanism 8 includes a guide block 81, a guide rod 82, a spring 83, a clamping block 84, a clamping groove 85, and a push block 86. The guide block 81 is slidably connected to the inside of the mounting block 7, and the guide rod 82 is fixedly connected to the guide block 81. The guide rod 82 is slidably connected to the inside of the mounting block 7, and a spring 83 is arranged on the outside of the guide rod 82. One end of the spring 83 contacts the guide block 81, and the other end of the spring 83 contacts the mounting block 7. Through the design of the spring 83, the clamping block 84 can be driven to limit the mounting block 7.

[0020] See also Figure 2-4The lower end of the guide block 81 is fixedly connected with a clamping block 84, which contacts the mounting block 7. A clamping groove 85 is provided on the mounting plate 5, and the clamping block 84 is slidably connected inside the clamping groove 85. The design of the clamping block 84 can limit the mounting block 7. One end of the guide block 81 is fixedly connected with a push block 86, which contacts the mounting block 7. The design of the push block 86 can facilitate the movement of the guide block 81. The design of the limiting mechanism 8 can facilitate the disassembly of the housing 1. By moving the two push blocks 86 in opposite directions, the push block 86 drives the guide block 81 to slide in the mounting block 7, so that the mounting block 7 squeezes the spring 83, and at the same time, the guide block 81 drives the clamping block 84 The block 84 is then released from the mounting plate 5 and the housing 1 is then disassembled. The mounting plate 5 is provided with the mounting block 7, the mounting plate 5, the block 84 and the spring 83. The guide block 81 is moved so that the guide block 81 drives the block 84 to slide in the slot 85 on the mounting plate 5. The block 84 is no longer engaged with the mounting plate 5. The limit on the mounting block 7 can be released. The housing 1 can be separated from the mounting plate 5, thereby solving the problem of inconvenience in disassembling and repairing the arc source body 2.

[0021] The specific implementation process of the utility model is as follows: when in use, by rotating the knob 6, the knob 6 drives the threaded rod 4 to rotate, the threaded rod 4 and the threaded sleeve 51 to generate threaded motion, and the threaded rod 4 drives the arc source body 2 to move, so that the position of the arc source body 2 can be adjusted. By moving the two push blocks 86 in opposite directions, the push blocks 86 drive the guide block 81 to slide in the mounting block 7, so that the mounting block 7 squeezes the spring 83, and at the same time, the guide block 81 drives the clamping block 84 to slide in the clamping groove 85, so that the clamping block 84 is no longer clamped with the mounting plate 5, so that the limit of the mounting block 7 can be released, and then the housing 1 is moved in the direction away from the mounting plate 5, so that the housing 1 drives the clamping block 84 on the mounting block 7 to slide out of the clamping groove 85 on the mounting plate 5, and the housing 1 can be disassembled.

[0022] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A spirally adjustable arc source, comprising a housing (1), characterized in that: The arc source body (2) is slidably connected to the interior of the shell (1), the lower end of the arc source body (2) is fixedly connected to a mounting sleeve (3), the interior of the mounting sleeve (3) is connected to a threaded rod (4) via a bearing, the lower end of the shell (1) contacts a mounting plate (5), the mounting plate (5) is fixedly connected to a threaded sleeve (51), the interior of the threaded sleeve (51) is connected to a threaded rod (4) via a thread, the mounting plate (5) is fixedly connected to a connecting plate (52), the interior of the connecting plate (52) is slidably connected to a slider (53), one end of the slider (53) is fixedly connected to a support plate (55), the interior of the support plate (55) is connected to a threaded rod (4) via a bearing, the threaded rod (4) is fixedly connected to a knob (6), the knob (6) contacts the support plate (55), the shell (1) is fixedly connected to a mounting block (7), and a limiting mechanism (8) is provided on the mounting block (7).

2. The spirally adjustable arc source according to claim 1, characterized in that: The limiting mechanism (8) comprises a guide block (81), a guide rod (82), a spring (83), a clamping block (84), a clamping groove (85), and a push block (86); the guide block (81) is slidably connected inside the mounting block (7); the guide rod (82) is fixedly connected to the guide block (81); the guide rod (82) is slidably connected inside the mounting block (7); a spring (83) is arranged on the outer side of the guide rod (82); the clamping block (84) is fixedly connected to the lower end of the guide block (81); and the clamping block (84) contacts the mounting block (7).

3. The spirally adjustable arc source according to claim 2, characterized in that: One end of the spring (83) contacts the guide block (81), and the other end of the spring (83) contacts the mounting block (7).

4. The spirally adjustable arc source according to claim 2, characterized in that: The mounting plate (5) is provided with a card slot (85), and a card block (84) is slidably connected inside the card slot (85).

5. The spirally adjustable arc source according to claim 2, characterized in that: One end of the guide block (81) is fixedly connected to a push block (86), and the push block (86) is in contact with the mounting block (7).

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