Target rotating structure
The worm drives the transmission mechanism to rotate the target through the servo motor and transports cooling water through the hollow coupling shaft, which solves the problems of bellows bend and the hose deflation rate when the target rotates in the vacuum magnetron sputtering coating machine, and extends the equipment Lifespan and improve film quality.
Patent Information
- Application Number
- CN202420754214.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-12
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-04-12
AI Technical Summary
In the prior art, when the target rotates in a vacuum magnetron sputtering coating machine, cooling water is usually used to pass through metal corrugated pipes or hoses, resulting in short service life of bends and high deflation rate of hoses, affecting the quality of the film layer. .
A rotating structure of the target is designed, and a servo motor drives the worm drive transmission mechanism is used to transport cooling water through a hollow connecting shaft to ensure that the connecting shaft does not rotate, avoid bending, and effectively transporting the cooling water through the cooling assembly.
It extends the service life of the connecting shaft, reduces the cost of use, improves the quality of the film layer, ensures the consistency of the base distance during the rotation of the target, and achieves efficient coating.
Smart Images
Figure CN222182421U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a vacuum magnetron sputtering coating machine, in particular to a rotating structure of a target. Background Art
[0002] Vacuum evaporation coating, vacuum sputtering coating and vacuum ion coating have developed rapidly in the past decade and have become one of the most advanced surface treatment methods today. Vacuum coating production is to achieve the adhesion of the film layer to the surface of the workpiece to obtain the required surface characteristics of the workpiece. Vacuum sputtering coating uses the target material to sputter, so that the sputtered material adheres to the surface of the workpiece to form a film layer, that is, to achieve coating. As an important component of the vacuum magnetron sputtering coating machine, the distance from the target to the substrate is particularly important during coating. When the substrate shape is an arc or anisotropic, in order to ensure that the target-substrate distance is basically the same, the target needs to be rotated. Since the target will generate high temperature during the magnetron sputtering process, the target needs to be cooled.
[0003] Cooling water is required to cool the target, but in the prior art, metal bellows or hoses are usually used to pass cooling water. When the target rotates, the bellows will bend repeatedly, have a short service life, and are inconvenient to replace. If the hose deflation rate is too high, it will affect the quality of the film layer. Utility Model Content
[0004] The utility model aims to provide a rotating structure of a target, which solves the problems in the prior art that a metal bellows or a hose is usually used to introduce cooling water, the bellows will bend repeatedly when the target rotates, the service life is very short, and replacement is inconvenient; and the hose has a too high deflation rate, which will affect the quality of the film layer.
[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:
[0006] A target rotation structure comprises a servo motor arranged on the outer wall of a vacuum box body, the output shaft of the servo motor passes through the vacuum box body through a movable hole and is arranged toward the inside of the vacuum box body, the output shaft is connected with a worm through a coupling; the worm is arranged inside the vacuum box body and is connected with a transmission mechanism through a supporting mechanism, and the bottom of the transmission mechanism is fixedly connected with a target; a hollow coupling shaft for conveying cooling water is fixedly arranged on the supporting mechanism, the transmission mechanism is movably sleeved on the outer wall of the coupling shaft, and one end of the coupling shaft away from the supporting mechanism passes through the transmission mechanism and is fixedly connected with a water outlet; the coupling shaft is connected with the inside of the target through a cooling component.
[0007] A further technical solution is that the supporting mechanism includes a mounting base and an end cover, the mounting base is connected to the inner wall of the vacuum box through a connecting flange, a mounting bin is provided inside the mounting base, the mounting bin is provided with a bin opening, the end cover is fixedly arranged on a side of the mounting base away from the bin opening, both ends of the connecting shaft pass through the mounting bin and are respectively arranged toward the bin opening and are fixedly connected to the end cover, one end of the connecting shaft passes through the end cover and is connected to a water inlet; one end of the worm gear passes through the inside of the connecting flange and movably passes through the mounting bin and is connected to the transmission mechanism for transmission.
[0008] A further technical solution is that the transmission mechanism includes a rotating disk and a water jacket. One end of the rotating disk is rotatably arranged in the installation bin through the bin opening and is connected to the worm gear transmission, and the other end is fixedly connected to the water jacket. A turbine that meshes with the worm gear is fixedly sleeved on the outer wall of the rotating disk. Support bearings are fixedly sleeved on the outer walls of the rotating disk located at both ends of the turbine, and the outer ring of the support bearing is connected to the inner wall of the installation bin.
[0009] A further technical solution is that the rotating disk and the water jacket are movably mounted on the outer wall of the coupling shaft, a rotating hole is opened in the water jacket and passes through the interior thereof, rotating bearings are respectively provided on the inner walls at both ends of the rotating hole, and when the water jacket is rotatably mounted on the outer wall of the coupling shaft, the outer wall of the coupling shaft is fixedly connected to the inner ring of the rotating bearing.
[0010] A further technical solution is that a cooling component is arranged between two rotating bearings, the cooling component includes a water inlet pipe and a water outlet pipe, the connecting shaft is divided into a water inlet end and a water outlet end, and the water inlet end and the water outlet end are fixedly connected by a shaft seal; the water inlet end and the water outlet end are respectively provided with an inlet and an outlet near the shaft seal, and the inside of the water jacket is respectively provided with an inlet cavity and an outflow cavity at the inlet and the outlet, and sealing gaskets for sealing the inlet cavity and the outflow cavity are provided on the water inlet end and the water outlet end; the water inlet pipe and the water outlet pipe are respectively fixed in the water jacket, and the two ends of the water inlet pipe are respectively connected to the inlet cavity and the target, and the two ends of the water outlet pipe are respectively connected to the outflow cavity and the target.
[0011] A further technical solution is that the servo motor is arranged outside the vacuum box through a mounting flange.
[0012] Compared with the prior art, the utility model has the following beneficial effects: by setting a servo motor, a supporting mechanism, a transmission mechanism, a connecting shaft and a cooling assembly, the servo motor drives the worm to rotate, drives the transmission mechanism to rotate, and then drives the target to rotate. When the substrate is in an arc or anisotropic shape, the target-substrate distance is basically the same by rotating the target, so as to achieve efficient film coating. At the same time, the transmission mechanism is movably mounted on the connecting shaft, and cooling water is transported through the connecting shaft. When the transmission mechanism drives the target to rotate under the operation of the servo motor, the connecting shaft will not rotate, so the connecting shaft will not bend, so that the service life of the connecting shaft is extended, and the problem of using a metal bellows or a hose to pass cooling water in the prior art is solved. When the target rotates, the bellows will bend repeatedly, the service life is very short, and it is not convenient to replace. The problem that the hose deflation rate is too high will affect the quality of the film layer, and the use cost is greatly reduced. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 This is a three-dimensional diagram of the rotating structure of a target of the utility model.
[0014] Figure 2 This is a cross-sectional view of a rotating structure of a target of the utility model.
[0015] Figure 3 This is a cross-sectional view of the connection flange, mounting base, rotating disk and water jacket of the utility model.
[0016] Figure 4 This is a cross-sectional view of the installation base, rotating disk, water jacket and target connection of the utility model.
[0017] Icons: 1-servo motor, 2-coupling, 3-worm, 4-target, 5-coupling, 6-water outlet, 7-mounting base, 8-end cover, 9-connecting flange, 10-mounting chamber, 12-water inlet, 13-rotating disk, 14-water jacket, 15-turbine, 16-support bearing, 18-rotating bearing, 19-water inlet pipe, 20-water outlet pipe, 21-water inlet end, 22-water outlet end, 23-shaft seal, 24-inlet, 25-outlet, 26-inflow chamber, 27-outflow chamber, 28-sealing gasket, 29-mounting flange, 30-vacuum box. DETAILED DESCRIPTION
[0018] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0019] Example:
[0020] refer to Figures 1 to 4It is shown that a target rotation structure comprises a servo motor 1 arranged on the outer wall of a vacuum box 30, the output shaft of the servo motor 1 passes through the vacuum box 30 through a movable hole and is arranged toward the inside of the vacuum box 30, and the output shaft is connected to a worm 3 through a coupling 2; the worm 3 is placed inside the vacuum box 30 and is connected to a transmission mechanism through a support mechanism, and a target 4 is fixedly connected to the bottom of the transmission mechanism; a hollow coupling 5 for conveying cooling water is fixedly provided on the support mechanism, and the transmission mechanism is movably sleeved on the outer wall of the coupling 5, and one end of the coupling 5 away from the support mechanism passes through the transmission mechanism and is fixedly connected to a water outlet 6; the coupling 5 is connected to the inside of the target 4 through a cooling assembly, In actual use, the servo motor 1 drives the worm 3 to rotate, drives the transmission mechanism to rotate, and then drives the target 4 to rotate. When the substrate shape is an arc or an anisotropic shape, the target 4 is rotated to ensure that the base distance of the target 4 is basically the same, so as to achieve efficient coating. The transmission mechanism is movably sleeved on the connecting shaft 5, and cooling water is transported through the connecting shaft 5. When the transmission mechanism drives the target 4 to rotate under the operation of the servo motor 1, the connecting shaft 5 will not rotate, so the connecting shaft 5 will not bend, so that the service life of the connecting shaft 5 is extended, which solves the problem of using metal bellows or hoses to pass cooling water in the prior art. When the target 4 rotates, the bellows will bend repeatedly, the service life is very short, and it is not convenient to replace. The problem that the hose deflation rate is too high will affect the quality of the film layer, which greatly reduces the cost of use.
[0021] refer to Figures 1 to 4As shown, the supporting mechanism includes a mounting base 7 and an end cover 8, the mounting base 7 is connected to the inner wall of the vacuum box 30 through a connecting flange 9, a mounting chamber 10 is provided inside the mounting base 7, the mounting chamber 10 is provided with a chamber opening, the end cover 8 is fixedly arranged on the side of the mounting base 7 away from the chamber opening, the two ends of the connecting shaft 5 pass through the mounting chamber 10 and are respectively arranged toward the chamber opening and are fixedly connected to the end cover 8, and the end of the connecting shaft 5 that passes through the end cover 8 is connected and provided with a water inlet 12; one end of the worm 3 passes through the interior of the connecting flange 9 and movably passes through the mounting chamber 10 and is connected to the transmission mechanism; the transmission mechanism includes a rotating disk 13 and a water jacket 14, one end of the rotating disk 13 is rotatably arranged in the mounting chamber 10 through the chamber opening and is connected to the worm 3, and the other end is fixedly connected to the water jacket 14, a turbine 15 meshing with the worm 3 is fixedly sleeved on the outer wall of the rotating disk 13, and support bearings 16 are fixedly sleeved on the outer walls of the rotating disk 13 located at both ends of the turbine 15, and the outer ring of the support bearing 16 is connected to the inner wall of the mounting chamber 10; the rotating disk 13 and The water jacket 14 is movably mounted on the outer wall of the coupling shaft 5. A rotating hole is provided in the water jacket 14, and rotating bearings 18 are provided on the inner walls at both ends of the rotating hole. When the coupling shaft 5 is movably mounted to penetrate the water jacket 14, the outer wall of the coupling shaft 5 is fixedly connected to the inner ring of the rotating bearing 18. The cooling assembly is arranged between the two rotating bearings 18. The cooling assembly includes a water inlet pipe 19 and a water outlet pipe 20. The coupling shaft 5 is divided into a water inlet end 21 and a water outlet end 22. The water inlet end 21 and the water outlet end 22 are fixedly connected via a shaft seal 23. The moving plate 13 and the water jacket 14 are movably sleeved on the outer wall of the connecting shaft 5. A rotating hole penetrating the inside of the water jacket 14 is opened, and rotating bearings 18 are respectively arranged on the inner walls at both ends of the rotating hole. When the water jacket 14 is rotatably sleeved on the outer wall of the connecting shaft 5, the outer wall of the connecting shaft 5 is fixedly connected to the inner ring of the rotating bearing 18; the water inlet pipe 19 and the water outlet pipe 20 are respectively fixedly arranged in the water jacket 14, and the two ends of the water inlet pipe 19 are respectively connected to the inflow cavity 26 and the target 4, and the two ends of the water outlet pipe 20 are respectively connected to the outflow cavity 27 and the target 4;In actual use, the servo motor 1 works, driving the worm 3 to rotate, the worm 3 meshes with the turbine 15, and the rotating disk 13 rotates under the support of the support bearing 16, thereby driving the water jacket 14 to rotate on the outer wall of the connecting shaft 5 under the action of the rotating bearing 18, and the target 4 installed on the water jacket 14 rotates, ensuring the stability of the rotation of the target 4. When cooling the target 4, cooling water is injected through the water inlet 12, and the cooling water flows into the inflow cavity 26 through the inlet 24 of the water inlet end 21. The cooling water inside the inflow cavity 26 flows into the target 4 through the water inlet pipe 19 to cool the target 4. The cooling water inside the target 4 flows into the outflow cavity 27 through the outlet pipe 20, and the cooling water inside the outflow cavity 27 flows into the water outlet end 22 through the outlet 25, and then is discharged through the outlet 6. By dividing the connecting shaft 5 into the water inlet and the water outlet, the cooling water inside the target 4 flows into the outflow cavity 27 through the outlet pipe 20. The end 21 and the water outlet end 22 are provided with an inflow cavity 26 and an outflow cavity 27 to ensure that the cooling water flows smoothly through the target 4, cools the target 4, and ensures the normal operation of the target 4. The water outlet end 22 and the water inlet end 21 are fixedly connected by the shaft seal 23, which can ensure that the cooling water in the inflow cavity 26 and the outflow cavity 27 will not flow alternately and affect the cooling effect. By providing a sealing gasket 28, it can be ensured that the cooling water of the water inlet end 21 can only flow into the water inlet pipe 19 through the inflow port 24 and the inflow cavity 26, and the cooling water of the water outlet pipe 20 can only flow into the water outlet end 22 through the outflow port 25 and the outflow cavity 27, and then be discharged through the water outlet 6, so as to prevent the cooling water from flowing into the rotating hole and affecting the equipment, thereby affecting the smooth progress of the coating; by providing a support bearing 16 and a rotating bearing 18, it can be ensured that the transmission mechanism rotates stably on the outer wall of the connecting shaft 5. ;
[0022] refer to Figure 1 , Figure 2 As shown, the servo motor 1 is arranged outside the vacuum box 30 through the mounting flange 29; by mounting the servo motor 1 through the mounting flange 29, it is possible to prevent the air outside the vacuum box 30 from passing through the servo motor 1 and entering the inside of the vacuum box 30, thereby affecting the coating effect.
[0023] Although the utility model is described herein with reference to a plurality of illustrative embodiments of the utility model, it should be understood that those skilled in the art may devise many other modifications and implementations that fall within the scope and spirit of the principles disclosed herein. More specifically, within the scope of the disclosure, drawings, and claims of the present application, various modifications and improvements may be made to the components and / or layout of the subject combination layout. In addition to the modifications and improvements made to the components and / or layout, other uses will also be apparent to those skilled in the art.
Claims
1. A target rotating structure, characterized in that: The invention comprises a servo motor (1) arranged on the outer wall of a vacuum box (30), the output shaft of the servo motor (1) passing through the vacuum box (30) through a movable hole and being arranged toward the inside of the vacuum box (30), the output shaft being connected to a worm (3) through a coupling (2); the worm (3) being arranged inside the vacuum box (30) and being connected to a transmission mechanism through a supporting mechanism, the bottom of the transmission mechanism being fixedly connected to a target (4); a hollow coupling shaft (5) for conveying cooling water being fixedly arranged on the supporting mechanism, the transmission mechanism being movably sleeved on the outer wall of the coupling shaft (5), the end of the coupling shaft (5) away from the supporting mechanism passing through the transmission mechanism and being fixedly connected to a water outlet (6); the coupling shaft (5) is connected to the inside of the target (4) through a cooling assembly.
2. A target rotating structure according to claim 1, characterized in that: The support mechanism comprises a mounting base (7) and an end cover (8), the mounting base (7) being connected to the inner wall of the vacuum box (30) via a connecting flange (9), a mounting chamber (10) being provided inside the mounting base (7), the mounting chamber (10) being provided with a chamber opening, the end cover (8) being fixedly arranged on a side of the mounting base (7) away from the chamber opening, the two ends of the connecting shaft (5) passing through the mounting chamber (10) being respectively arranged towards the chamber opening and being fixedly connected to the end cover (8), the end of the connecting shaft (5) passing through the end cover (8) being connected to a water inlet (12); the end of the worm (3) passing through the interior of the connecting flange (9) being movably passed through the mounting chamber (10), and being transmission-connected to the transmission mechanism.
3. A target rotating structure according to claim 2, characterized in that: The transmission mechanism comprises a rotating disk (13) and a water jacket (14); one end of the rotating disk (13) is rotatably arranged in the installation bin (10) through a bin opening and is transmission-connected to the worm (3); the other end is fixedly connected to the water jacket (14); a turbine (15) meshing and matching with the worm (3) is fixedly sleeved on the outer wall of the rotating disk (13); support bearings (16) are fixedly sleeved on the outer walls of the rotating disk (13) at both ends of the turbine (15); and the outer ring of the support bearing (16) is connected to the inner wall of the installation bin (10).
4. A target rotating structure according to claim 3, characterized in that: The rotating disk (13) and the water jacket (14) are movably sleeved on the outer wall of the connecting shaft (5); a rotating hole penetrating the water jacket (14) is provided in the water jacket (14); rotating bearings (18) are provided on the inner walls at both ends of the rotating hole; when the water jacket (14) is rotatably sleeved on the outer wall of the connecting shaft (5), the outer wall of the connecting shaft (5) is fixedly connected to the inner ring of the rotating bearing (18).
5. A target rotating structure according to claim 4, characterized in that: The cooling assembly is arranged between the two rotating bearings (18), and comprises a water inlet pipe (19) and a water outlet pipe (20). The coupling (5) is divided into a water inlet end (21) and a water outlet end (22), and the water inlet end (21) and the water outlet end (22) are fixedly connected via a shaft seal (23). The water inlet end (21) and the water outlet end (22) are respectively provided with an inlet (24) and an outlet (25) near the shaft seal (23). The interior of the water jacket (14) is located between the inlet (24) and the outlet (25). An inflow chamber (26) and an outflow chamber (27) are respectively provided at the outlet (25), and a sealing gasket (28) for sealing the inflow chamber (26) and the outflow chamber (27) is provided on the water inlet end (21) and the water outlet end (22); the water inlet pipe (19) and the water outlet pipe (20) are respectively fixed in the water jacket (14), and the two ends of the water inlet pipe (19) are respectively connected to the inflow chamber (26) and the target (4), and the two ends of the water outlet pipe (20) are respectively connected to the outflow chamber (27) and the target (4).
6. The target rotating structure according to claim 1, characterized in that: The servo motor (1) is arranged on the outside of the vacuum box (30) via a mounting flange (29).