Constant temperature device for chemical reagent

Abstract

A constant temperature device for a chemical reagent comprises a first shell, a heat exchanger and a temperature controller, the heat exchanger is detachably installed in the center of the top end of a base plate, the heat exchanger is formed by stacking a refrigeration sheet, a top layer, a bottom layer and a plurality of interlayers, a through groove is formed in the middle of the first layer, close to the top layer, of the interlayers, and the refrigeration sheet is arranged in the through groove; the second layer, close to the top layer, of the multiple interlayers is provided with an S-shaped water channel, the S-shaped water channel is used for containing a cooling pipe, the top end of the cooling pipe makes contact with the hot end of the refrigeration piece, the two ends of the cooling pipe are communicated with an ice water machine, and the two ends of each liquid conveying pipe are communicated with a chemical liquid tank. And a temperature controller is detachably mounted at the top end of the heat exchanger. The refrigeration sheet and the S-shaped water channel are arranged in the interlayer of the heat exchanger, so that the refrigeration speed can be effectively increased, the number of times that chemical liquid needs to circulate in the starting process is reduced, and meanwhile regulation and control in the temperature constant process are facilitated.

Description

Technical Field

[0001] The utility model relates to chemical liquid, in particular to an automatic constant temperature device for chemical liquid. Background Art

[0002] Most of the chemical liquids used in industry need to be used at a set temperature to achieve the corresponding effect. Thermostat is a temperature control device widely used in the field of modern science and technology. It uses the characteristics of thermocouples, thermal resistors or semiconductor materials to control the working state of the heater or cooler by changing the current size, and can achieve precise control of the temperature of chemical liquids. Chemical liquid thermostats are widely used in semiconductor manufacturing fields such as wafers and chips. The working principle of chemical liquid thermostats is simple and effective, and has made important contributions to the development of modern science and technology.

[0003] At present, a Chinese patent with the authorization announcement number CN218878235U discloses an automatic constant temperature device for chemical liquid, which belongs to the field of chemical liquid storage technology, including a work table and a heating belt, a liquid tank is arranged in the middle of the top of the work table, agitators are arranged on both sides of the top of the liquid tank, a partition is arranged between the inner walls of the liquid tank, and insulation materials and electric heating plates are arranged in the inner walls of the liquid tank and the partition, suction pumps are arranged on both sides of the bottom of the work table, a discharge platform is arranged at the bottom of the suction pump, and a transfer elbow is arranged inside the discharge platform. The utility model can achieve sufficient constant temperature storage of the stored chemical liquid, constant temperature transportation of the circulating chemical liquid, and keep the temperature of the chemical liquid in use in accordance with the requirements to ensure industrial use by arranging components such as agitators, a discharge platform, a suction pump, a transfer elbow, a heating belt and a second temperature controller on the traditional chemical liquid constant temperature storage device.

[0004] The above-mentioned prior art solution has the following defects: although the resistance heating used in the design is relatively low in cost, the heating speed is slow, it takes a longer time, and consumes more energy. Utility Model Content

[0005] The purpose of the utility model is to provide a constant temperature device for chemical reagents to solve the problems existing in the above-mentioned prior art.

[0006] The above technical objectives of the utility model are achieved through the following technical solutions:

[0007] A constant temperature device for chemical reagents, comprising a first shell, a heat exchanger and a temperature controller, wherein the first shell is assembled from a first front plate, a first side plate, a second side plate, a first bottom plate and a first top plate, and the rear side of the first shell is completely open;

[0008] The heat exchanger is detachably mounted at the center of the top of the chassis. The heat exchanger is composed of a cooling plate, a top layer, a bottom layer and multiple interlayers. Multiple through holes are evenly arranged on the heat exchanger. The top layer, the bottom layer and the multiple interlayers are connected by bolts.

[0009] A through groove is provided in the middle position of the first layer close to the top layer among the multiple interlayers, a cooling plate is provided in the through groove, the cold end of the cooling plate is arranged upward, and infusion tubes are provided on the left and right sides of the cold end; an S-shaped water channel is provided on the second layer close to the top layer among the multiple interlayers, the S-shaped water channel is used to accommodate a cooling tube, the top end of the cooling tube is in contact with the hot end of the cooling plate, and the multiple interlayers are alternately provided with cooling plates and S-shaped water channels;

[0010] Both ends of the cooling pipe are connected to the ice water machine, and both ends of the infusion pipe are connected to the chemical liquid tank;

[0011] A temperature controller is detachably mounted on the top of the heat exchanger, and the temperature controller includes a second housing, a temperature sensor and a single chip microcomputer;

[0012] The second housing is formed by splicing a second front plate, a second rear plate, a second top plate and a second bottom plate;

[0013] The second front plate is provided with a receiving groove, a display screen is embedded in the receiving groove, a plurality of indicator lights are arranged at equal intervals on the right side of the display screen, and a current knob is arranged between the indicator lights and the right end through groove;

[0014] A power interface is provided at the left end of the second rear plate, a power switch is provided below the power interface, and a plurality of heat dissipation ports are provided on the right side of the power switch;

[0015] A single chip microcomputer is arranged at the middle position of the top of the chassis, and a temperature sensor is arranged on one side of the single chip microcomputer, and the temperature sensor includes PT100;

[0016] The PT100 includes a platinum resistor, a shielded wire and a plurality of lead wires, wherein the plurality of lead wires are sleeved in the shielded wire, the platinum resistor is electrically connected to the single-chip computer through the shielded wire, and the cooling plate, display screen, indicator light, current knob, power switch and power interface are all electrically connected to the single-chip computer through wires;

[0017] The platinum resistor is arranged in the infusion tube.

[0018] By adopting the above technical solution, the heat exchanger and the temperature controller are integrated into a whole. The temperature sensor is set in the infusion tube. The accuracy of PT100 is usually between 0.1℃ and 0.01℃, which can provide high-precision temperature measurement, has good stability and reliability, and has a faster response speed than sensors such as thermocouples or thermistors. It can measure temperature changes in real time, and according to the data of the temperature sensor, the single-chip microcomputer can quickly adjust the power of the refrigeration plate to make the temperature of the chemical liquid always stable within the range of ±0.1℃. The refrigeration plate does not require any refrigerant and can work continuously. There is no vibration or noise during operation, and the service life is long. It is very suitable for constant temperature devices that need to work for a long time.

[0019] In a further embodiment, a heat dissipation device corresponding to the multiple heat dissipation ports is provided on the second rear panel, and the heat dissipation device includes a mesh cover, a fan and a motor. The mesh cover is screwed on the heat dissipation port, and a fan is coaxially provided in the heat dissipation port. The fan is sleeved on the rotating shaft of the motor, and the motor is fixedly connected to the top of the second chassis.

[0020] By adopting the above technical solution, although the temperature controller is in contact with the cold end of the refrigeration plate of the heat exchanger, it is still necessary to pay attention to keeping its own temperature in a safe state, so a heat dissipation device is set at the heat dissipation port, and the mesh cover can protect the safety of personnel and fan operation and provide air cooling for the temperature controller.

[0021] In a further embodiment, the cold end of the refrigeration fin is provided with thermal insulation cotton.

[0022] By adopting the above technical solution, since a small amount of moisture in the air may condense into water droplets at the cold end of the refrigeration plate, in order to avoid the impact of these condensed water on the refrigeration plate and the heat exchanger during long-term operation, thermal insulation cotton is set at the cold end to avoid the accumulation of condensed water.

[0023] In a further embodiment, a plurality of heat dissipation slots are disposed on the first side plate and the second side plate of the first housing, and the heat dissipation slots are evenly distributed.

[0024] By adopting the above technical solution, the heat dissipation performance of the thermostatic device can be improved, the air flow can be accelerated, and the heat of the heat exchanger can be prevented from affecting the temperature controller.

[0025] In a further embodiment, a plate taking slot is provided on the second top plate.

[0026] By adopting the above technical solution, after unscrewing the screws on the second top plate, the second top plate can be easily removed by using the plate removal slot, so as to overhaul the temperature controller or replace some parts thereof.

[0027] In a further embodiment, the infusion tube is made of PFA.

[0028] By adopting the above technical solution, it can be ensured that the infusion tube will not be corroded by chemical liquids such as sulfuric acid, hydrofluoric acid, and hydrochloric acid, thereby improving the safety of the operation of the device.

[0029] In summary, the utility model has the following beneficial effects:

[0030] 1. Through the setting of integrated temperature controller and heat exchanger, it can achieve the effect of constant adjustment of chemical liquid temperature while detecting temperature;

[0031] 2. The setting of cooling fins and S-shaped water channels can reduce noise and vibration during refrigeration, and achieve the effect of efficiently regulating the temperature of the chemical liquid;

[0032] 3. Through the setting of PT100, the temperature of the chemical liquid in the infusion tube can be accurately detected. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0034] Figure 2 It is a schematic diagram of the structure of the heat exchanger in the utility model;

[0035] Figure 3 It is a schematic diagram of the structure of the temperature controller used in the present utility model;

[0036] Figure 4 It is a schematic diagram for reflecting the position relationship of the power interface, the power switch and the heat dissipation port in the utility model;

[0037] Figure 5 It is a structural schematic diagram used to embody the heat dissipation device in the utility model;

[0038] Figure 6 It is a structural schematic diagram for embodying the temperature sensor in the utility model.

[0039] In the figure, 1, first shell; 11, first front plate; 12, first side plate; 13, second side plate; 14, first bottom plate; 15, first top plate; 2, heat exchanger; 21, refrigeration plate; 211, thermal insulation cotton; 22, top layer; 23, bottom layer; 24, interlayer; 241, through groove; 242, S-shaped water channel; 3, temperature controller; 31, second shell; 311, second front plate; 3111, display screen; 3112, Indicator light; 3113, current knob; 312, second rear panel; 3121, power interface; 3122, power switch; 3123, heat dissipation device; 31231, mesh cover; 31232, fan; 31233, motor; 313, second top panel; 3131, board removal slot; 314, second chassis; 32, temperature sensor; 321, platinum resistor; 322, shielding wire; 323, lead wire; 33, single-chip microcomputer. DETAILED DESCRIPTION

[0040] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0041] The same parts are denoted by the same reference numerals. It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to the attached Figure 1 In the description of this specification, the words "bottom" and "top", "inside" and "outside" refer to directions toward or away from a particular component geometry, respectively. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this specification, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0042] Example:

[0043] like Figure 1-3As shown, a constant temperature device for chemical reagents includes a first shell 1, a heat exchanger 2 and a temperature controller 3, characterized in that: the first shell 1 is assembled from a first front plate 11, a first side plate 12, a second side plate 13, a first bottom plate 14 and a first top plate 15, the rear side of the first shell 1 is completely open, the heat exchanger 2 is detachably mounted at the center of the top of the bottom plate, the heat exchanger 2 is stacked by a cooling plate 21, a top layer 22, a bottom layer 23 and a plurality of interlayers 24, a plurality of through holes are evenly arranged on the heat exchanger 2, and the The top layer 22, the bottom layer 23 and the multiple interlayers 24 are connected by bolts. A through groove 241 is provided in the middle position of the first layer near the top layer 22 of the multiple interlayers 24. A cooling plate 21 is provided in the through groove 241. The cold end of the cooling plate 21 is provided with a heat preservation cotton 211. The cold end of the cooling plate 21 is arranged upward. The cold end of the cooling plate 21 is provided with a heat preservation cotton 211. Infusion tubes are provided on both sides of the cold end. An S-shaped water channel 242 is provided on the second layer near the top layer 22 of the multiple interlayers 24. The S-shaped water channel 24 2 is used to accommodate a cooling pipe, the top end of the cooling pipe contacts the hot end of the refrigeration plate 21, the multiple interlayers 24 are alternately provided with refrigeration plates 21 and S-shaped water channels 242, the material of the infusion pipe is PFA, the first side plate 12 and the second side plate 13 of the first shell 1 are provided with multiple heat dissipation grooves, the heat dissipation grooves are evenly distributed, the two ends of the cooling pipe are connected to the ice water machine, the two ends of the infusion pipe are connected to the chemical liquid tank, the temperature adjustment effect of the chemical liquid constant temperature device is achieved through the heat exchanger 2, the infusion pipe arranged on the cold end of the refrigeration plate 21 One end of the tube is connected to the pump, and the other end is connected to the chemical liquid tank. Through the operation of the refrigeration plate 21, the chemical liquid is continuously pumped out of the tank body, and then transported back into the tank body after cooling. The thermal insulation cotton 211 at the cold end of the refrigeration plate 21 is mainly to prevent the continuous accumulation of condensed water during long-term operation, affecting the overall safety of the equipment, and the infusion tube made of PFA material can effectively prevent the leakage of sulfuric acid or hydrofluoric acid. Although the heat exchanger 2 is provided with a refrigeration plate 21 and a cooling tube, its own temperature still needs attention. The heat dissipation tank can provide auxiliary heat dissipation to avoid temperature accumulation.

[0044] like Figure 1-3As shown, a temperature controller 3 is detachably mounted on the top of the heat exchanger 2, and the temperature controller 3 includes a second housing 31, a temperature sensor 32 and a single-chip computer 33. The second housing 31 is composed of a second front plate 311, a second rear plate 312, a second top plate 313 and a second bottom plate 314. A receiving groove is provided on the second front plate 311, and a display screen 3111 is embedded in the receiving groove. A plurality of indicator lights 3112 are evenly spaced on the right side of the display screen 3111, and a current knob 3113 is provided between the indicator light 3112 and the right end through groove 241. A power interface 3121 is provided on the left end of the second rear plate 312, and the power interface 312 1 is provided with a power switch 3122, and a plurality of heat dissipation ports are provided on the right side of the power switch 3122. A single chip computer 33 is provided in the middle position of the top of the chassis, and a plate taking slot 3131 is provided on the second top plate 313. The chemical liquid needs to maintain a stable temperature. The temperature controller 3 is responsible for adjusting the efficiency of the refrigeration plate 21. It mainly affects the refrigeration efficiency by adjusting the current. The refrigeration plate 21 does not make noise or vibrate, is easy to maintain, and has a faster startup speed than resistance heating. When the temperature sensor 3 reports an abnormal error, the plate taking slot 3131 provided on the second top plate 313 also makes maintenance more convenient, and there is no need to disassemble the entire first shell 1.

[0045] like Figure 1-6 A temperature sensor 32 is provided on one side of the single-chip computer 33. The temperature sensor 32 includes PT100. The PT100 includes a platinum resistor 321, a shielding wire 322 and multiple leads 323. The multiple leads 323 are sleeved in the shielding wire 322. The platinum resistor 321 is electrically connected to the single-chip computer 33 through the shielding wire 322. The refrigeration plate 21, the display screen 3111, the indicator light 3112, the current knob 3113, the power switch 3122 and the power interface 3121 are all electrically connected to the single-chip computer 33 through wires. The platinum resistor 321 is set in the infusion tube. The temperature sensor 3 adopts PT100. This sensor has high detection accuracy and can adapt to a temperature range that also meets the temperature range of chemical liquids in semiconductor production. One end of its platinum resistor 321 is set in the infusion tube to detect the liquid temperature in the infusion tube that flows back to the chemical liquid tank. The material of the shielding wire is generally resistant to strong acids and alkalis to avoid being damaged by chemical liquids.

[0046] Specific implementation process:

[0047] First, press the power switch, the thermostat starts, and the pump connected to the chemical liquid tank starts to run, transporting the chemical liquid from the PFA infusion tube to the cold ends of the refrigeration plate of the heat exchanger. In the process of these chemical liquids flowing back from the infusion tube to the chemical liquid tank, they come into contact with the temperature sensor of the temperature controller, and the platinum resistor transmits the temperature back to the single-chip microcomputer. After analyzing the temperature, the single-chip microcomputer adjusts the efficiency of the refrigeration plate. After running for a period of time, the temperature of the chemical liquid is maintained at a constant temperature of industrial production. In this process, the heat conducted to the temperature controller can be reduced by the heat dissipation device on the temperature controller, and then the production can be officially started. Under normal circumstances, the thermostat will not be easily shut down unless there is damage or abnormality. When it needs to be shut down, first stop the pump to ensure that the chemical liquid is completely discharged, and then turn off the power switch.

[0048] In the embodiments disclosed in the present invention, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense. For example, "connect" can be a fixed connection, a detachable connection, or an integral connection; "connect" can be a direct connection or an indirect connection through an intermediate medium. For those skilled in the art, the specific meanings of the above terms in the embodiments disclosed in the present invention can be understood according to specific circumstances.

[0049] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A thermostatic device for chemical reagents, comprising a first housing (1), a heat exchanger (2) and a temperature controller (3), characterized in that: The first housing (1) is assembled from a first front panel (11), a first side panel (12), a second side panel (13), a first bottom panel (14) and a first top panel (15), and the rear side of the first housing (1) is completely open; The heat exchanger (2) is detachably mounted at the central position of the top of the chassis. The heat exchanger (2) is composed of a cooling plate (21), a top layer (22), a bottom layer (23) and a plurality of interlayers (24) stacked together. A plurality of through holes are evenly arranged on the heat exchanger (2). The top layer (22), the bottom layer (23) and the plurality of interlayers (24) are connected by bolts. A through groove is provided at the middle position of the first layer of the plurality of interlayers (24) close to the top layer (22), a cooling plate (21) is provided in the through groove, the cold end of the cooling plate (21) is arranged upward, and liquid infusion tubes are provided on both the left and right sides of the cold end; an S-shaped water channel (242) is provided on the second layer of the plurality of interlayers (24) close to the top layer (22), the S-shaped water channel (242) is used to accommodate a cooling tube, the top end of the cooling tube is in contact with the hot end of the cooling plate (21), and the plurality of interlayers (24) are alternately provided with cooling plates (21) and S-shaped water channels (242); Both ends of the cooling pipe are connected to the ice water machine, and both ends of the infusion pipe are connected to the chemical liquid tank; A temperature controller (3) is detachably mounted on the top of the heat exchanger (2), and the temperature controller (3) comprises a second housing (31), a temperature sensor (32) and a single-chip microcomputer (33); The second housing (31) is formed by splicing a second front plate (311), a second rear plate (312), a second top plate (313) and a second bottom plate (314); The second front plate (311) is provided with a receiving groove, a display screen (3111) is embedded in the receiving groove, a plurality of indicator lights (3112) are arranged at equal intervals on the right side of the display screen (3111), and a current knob (3113) is arranged between the indicator lights (3112) and the right end through groove; A power interface (3121) is provided at the left end of the second rear plate (312), a power switch (3122) is provided below the power interface (3121), and a plurality of heat dissipation ports (3123) are provided on the right side of the power switch (3122); A single chip microcomputer (33) is arranged at the middle position of the top of the chassis, a temperature sensor (32) is arranged on one side of the single chip microcomputer (33), and the temperature sensor (32) comprises a PT100; The PT100 comprises a platinum resistor (321), a shielding wire (322) and a plurality of lead wires (323), wherein the plurality of lead wires (323) are sleeved in the shielding wire (322), the platinum resistor (321) is electrically connected to the single-chip computer (33) via the shielding wire (322), and the cooling plate (21), the display screen (3111), the indicator light (3112), the current knob (3113), the power switch (3122) and the power interface (3121) are all electrically connected to the single-chip computer (33) via wires; The platinum resistor (321) is arranged in the infusion tube.

2. A constant temperature device for chemical reagents according to claim 1, characterized in that: The second rear plate (312) is provided with a heat dissipation device corresponding to the plurality of heat dissipation ports (3123) one by one, the heat dissipation device comprising a mesh cover (31231), a fan (31232) and a motor (31233); the mesh cover (31231) is screwed on the heat dissipation port (3123); a fan (31232) is coaxially arranged in the heat dissipation port (3123); the fan (31232) is sleeved on the rotating shaft of the motor (31233); and the motor (31233) is fixedly connected to the top end of the second chassis (314).

3. A constant temperature device for chemical reagents according to claim 1, characterized in that: The cold end of the refrigeration fin (21) is provided with thermal insulation cotton (211).

4. A constant temperature device for chemical reagents according to claim 1, characterized in that: A plurality of heat dissipation slots are provided on the first side plate (12) and the second side plate (13) of the first housing (1), and the heat dissipation slots are evenly distributed.

5. A constant temperature device for chemical reagents according to claim 1, characterized in that: The second top plate (313) is provided with a plate taking slot (3131).

6. A constant temperature device for chemical reagents according to claim 1, characterized in that: The material of the infusion tube is PFA.

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