Purification table and processing equipment

Abstract

The utility model discloses a purification table and processing equipment, the purification table comprises a rack, a transportation device and a boat carrying device, the rack comprises a first side and a second side which are oppositely arranged, the transportation device is installed on the rack and is used for transporting a boat structure along a first direction, and the boat carrying device is arranged between the first side and the second side; the boat carrying device comprises a paddle supporting mechanism and a paddle carrying mechanism, the paddle supporting mechanism is used for supporting the boat structure and is mounted on the paddle carrying mechanism, and the paddle carrying mechanism is used for transferring the boat structure between the high-temperature reaction cavity and the transportation device. In the actual process, the load on the rack is the transportation device and the boat structure transported by the transportation device, and the load of the boat carrying device is the boat structure, so that the transportation of the large-loading-capacity boat structure is realized, the number of sheets entering the high-temperature reaction cavity at one time is increased, and the productivity is favorably improved; the boat carrying device can be directly and integrally replaced after being damaged, does not need to be disassembled, and is simple and rapid.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a clean bench and processing equipment. Background Art

[0002] Clean bench is a general term for the components of certain process equipment in the semiconductor production process. It can cool and purify high-temperature products and is widely used in the production of integrated circuits, power electronics, solar cells and other industries. In the manufacturing equipment of semiconductors and solar cells, diffusion equipment, oxidation equipment, coating equipment, etc. all contain clean bench equipment, which can cool and purify high-temperature products.

[0003] At present, new batteries have higher and higher requirements for process quality. Some of them change the original vertical insertion process to horizontal insertion. After the conversion, the amount of wafers carried by a boat of the same size will be greatly reduced; in order to maintain production, the size of the boat or the boat support will be increased, and the weight will increase accordingly. In the existing clean bench, a boat moving device, a lifting device and a boat pushing device are usually set. The boat moving device is used to carry and transport the boat or the boat support. The boat pushing device is used to push the boat or the boat support into the hot furnace. The lifting device is connected to the boat pushing device and is used to drive the boat pushing device to lift and lower. The lifting device is installed on the bracket of the clean bench so that the weight of all the structures inside the clean bench is borne by the frame of the clean bench. In the prior art, the size and load capacity of the boat or the boat support are limited to ensure that the frame will not be deformed too much, which is not conducive to the improvement of equipment production capacity.

[0004] Based on the above, there is an urgent need for a method of transporting a boat structure with a large carrying capacity, which is conducive to improving the production capacity of the equipment. Utility Model Content

[0005] The first purpose of the utility model is to provide a clean bench, which can realize the transportation of a boat structure with a relatively large weight, thereby facilitating the improvement of equipment production capacity.

[0006] The second purpose of the utility model is to provide a processing device, which can realize the transportation of a heavy boat structure, which is conducive to improving the equipment production capacity.

[0007] In order to achieve the above technical effects, the technical solution of the utility model is as follows:

[0008] The utility model discloses a clean bench, comprising: a frame, the frame comprising a first side and a second side arranged opposite to each other; a transport device, installed on the frame and used to transport a boat structure along a first direction; a boat moving device, arranged inside the frame and between the first side and the second side, the boat moving device comprising a paddle supporting mechanism and a paddle transporting mechanism, the paddle supporting mechanism being installed on the paddle transporting mechanism and used to support the boat structure, and the paddle transporting mechanism being used to realize the transfer of the boat structure between a high-temperature reaction chamber and the transport device.

[0009] The beneficial effects of the clean bench of the utility model are as follows: since the transport device is arranged on the frame, and the boat moving device is arranged between the first side and the second side of the frame, the boat moving device and the transport device are not connected. In the actual process, the load on the frame is the transport device and the boat structure transported by the transport device, and the load of the boat moving device is the boat structure. In this way, the carrying capacity of the boat structure can be increased, the transportation of a large-load boat structure can be realized, and the number of sheets entering the high-temperature reaction chamber at one time is increased, which is beneficial to improving production capacity. At the same time, since the boat moving device is separately arranged inside the frame and is not connected to the frame, the boat moving device can be directly replaced as a whole after being damaged without disassembly, which is simple and quick.

[0010] In some embodiments, the transport device includes an input assembly line and an output assembly line, and the input assembly line and the output assembly line are installed on the first side and the second side, respectively; wherein: the input assembly line is used to receive the boat structure transported from the outside, and transport the boat structure to a position corresponding to the boat moving device; the output assembly line is used to receive the boat structure output by the boat moving device, and output the rack.

[0011] In some specific embodiments, the input assembly line includes a first transport bracket, a first drive module and a first support frame, the first transport bracket is installed on the frame, the first drive module is installed on the first transport bracket, and is used to drive the first support frame to move along the first direction on the first transport bracket, and the first support frame is used to support the boat structure; and / or: the output assembly line includes a second transport bracket, a second drive module and a second support frame, the second transport bracket is installed on the frame, the second drive module is installed on the second transport bracket, and is used to drive the second support frame to move along the first direction on the second transport bracket, and the second support frame is used to support the boat structure.

[0012] In some embodiments, the paddle support mechanism includes: a translation module, which is in transmission cooperation with the paddle support mechanism and is used to drive the paddle support mechanism to move in a second direction, and the second direction is perpendicular to the transport direction of the transport device; a lifting module, which is in transmission cooperation with the translation module and is used to drive the translation module to rise and fall in a vertical direction; and a boat pushing module, which is in transmission cooperation with the lifting module and is used to drive the lifting module to move on the boat pushing module in a first direction.

[0013] In some specific embodiments, the lifting module includes: a lifting bracket, which is in transmission cooperation with the boat pushing module; a lifting drive assembly, which is arranged on the lifting bracket and is used to drive the translation module to lift and lower; a load assembly, which includes a counterweight load, a fixed pulley and a load rope, one end of the load rope is connected to the counterweight load, and the other end is connected to the translation module.

[0014] In some specific embodiments, the boat pushing module includes: a boat pushing bracket, which is installed at the bottom of the frame; a boat pushing drive, which is installed on the boat pushing bracket; and a boat pushing transmission assembly, whose power input end is connected to the boat pushing drive, and whose power output end is connected to the lifting module.

[0015] In some specific embodiments, the translation module includes: a translation bracket, which is in transmission cooperation with the lifting module; a translation drive, which is installed on the translation bracket; and a translation transmission assembly, wherein the power input end of the translation transmission assembly is connected to the translation drive, and the power output end is connected to the paddle support mechanism.

[0016] In some specific embodiments, the paddle support mechanism includes: a paddle head frame, which is in transmission cooperation with the translation module; a paddle barrel, which is connected to the paddle head frame; and a paddle shaft unit, which is connected to one end of the paddle barrel away from the paddle head frame and is used to support the boat structure.

[0017] In some more specific embodiments, the paddle shaft unit includes: a plurality of supporting paddles; a paddle fixing plate, wherein the paddle fixing plate is connected to one end of the plurality of supporting paddles and is connected to the paddle tube; and a paddle clamp, wherein the paddle clamp is connected to one end of the supporting paddle away from the paddle fixing plate and fixes the ends of the plurality of supporting paddles together.

[0018] In some embodiments, the clean bench further includes: at least one cache station, which is connected to the rack and located above the transport device, and is capable of receiving the boat structure transported by the boat moving device; a cooling device, which is connected to the rack and / or the cache station, and is used to cool the boat structure placed on the cache station.

[0019] The utility model also discloses a processing equipment, including the above-mentioned clean bench and high-temperature reaction chamber, wherein the clean bench is used to transport the boat structure to the high-temperature reaction chamber and receive the boat structure that has completed the process in the high-temperature reaction chamber.

[0020] The processing equipment of the present invention, because it has the above-mentioned clean bench, can realize the transportation of a boat structure with a relatively large weight, which is beneficial to improving the production capacity of the equipment.

[0021] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the structure of the clean bench of an embodiment of the utility model;

[0023] Figure 2 This is a schematic diagram of the structure of the clean bench in the embodiment of the utility model with the frame removed;

[0024] Figure 3 It is a structural schematic diagram of a boat moving device according to an embodiment of the utility model;

[0025] Figure 4 It is a schematic diagram of the structure of the input pipeline of the embodiment of the utility model;

[0026] Figure 5 It is a schematic diagram of the output pipeline of the embodiment of the utility model;

[0027] Figure 6 This is a simplified structural diagram of a boat pusher module according to an embodiment of the utility model;

[0028] Figure 7 This is a simplified structural diagram of a translation template of an embodiment of the utility model;

[0029] Figure 8 It is a structural schematic diagram of a paddle support mechanism of an embodiment of the utility model;

[0030] Fig. 9 It is a structural block diagram of the processing equipment of the embodiment of the utility model.

[0031] Reference numerals:

[0032] 1. Processing equipment;

[0033] 10. Purification station;

[0034] 100, rack;

[0035] 200, transport device; 210, input assembly line; 211, first transport bracket; 212, first drive module; 2121, first drive motor; 2122, first transmission belt assembly; 213, first support frame; 2131, first connecting plate; 2132, first support fork; 220, output assembly line; 221, second transport bracket; 222, second drive module; 2221, second drive motor; 2222, second transmission belt assembly; 223, second support frame; 2231, second connecting plate; 2232, second support fork;

[0036] 300, boat moving device; 310, paddle support mechanism; 311, paddle head frame; 312, paddle barrel; 313, paddle shaft unit; 3131, paddle support; 3132, paddle fixing plate; 3133, paddle clamp; 320, paddle transport mechanism; 321, translation module; 3211, translation bracket; 3212, translation drive member; 3213, translation transmission assembly; 322, lifting module; 3221, lifting bracket; 3222, load assembly; 32221, counterweight load; 32222, fixed pulley; 32223, load rope; 323, boat pushing module; 3231, boat pushing bracket; 3232, boat pushing drive member; 3233, boat pushing transmission assembly;

[0037] 400, cache table; 500, cooling device; 600, boat structure;

[0038] 20. High temperature reaction chamber. DETAILED DESCRIPTION

[0039] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clearly, the technical solutions of the present invention are further explained below with reference to the accompanying drawings and through specific implementation methods.

[0040] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0041] In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of the features, and are used to distinguish and describe features, without distinction of order or importance. In the description of the present utility model, unless otherwise specified, "plurality" means two or more.

[0042] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0043] Reference below Figure 1-Figure 8 The specific structure of the clean bench 10 according to the embodiment of the present invention is described.

[0044] The utility model discloses a clean bench 10, such as Figure 1As shown, the clean bench 10 of this embodiment includes a frame 100, a transport device 200 and a boat moving device 300, the frame 100 has a first side and a second side arranged opposite to each other, the transport device 200 is installed on the frame 100 and is used to transport the boat structure 600 along a first direction, the boat moving device 300 is arranged inside the frame 100 and is located between the first side and the second side, the boat moving device 300 includes a paddle supporting mechanism 310 and a paddle transporting mechanism 320, the paddle supporting mechanism 310 is installed on the paddle transporting mechanism 320 and is used to support the boat structure 600, and the paddle transporting mechanism is used to realize the transfer of the boat structure 600 between the high-temperature reaction chamber 20 and the transport device 200. It can be understood that in the actual working process, the external transport structure can transport the boat structure 600 loaded with sheets to the transport device 200, and the transport device 200 moves the boat structure 600 to the position corresponding to the paddle support mechanism 310. After the paddle transport mechanism 320 takes over the boat structure 600 from the transport device 200, it can transport the boat structure 600 to the high-temperature reaction chamber 20 for processing. After the processing is completed, the paddle transport mechanism 320 moves the boat structure 600 out of the high-temperature reaction chamber 20 and transfers it back to the transport device 200, and finally the transport device 200 outputs it to the external transport structure, thereby completing a complete process cycle. Since the transport device 200 of the present embodiment is arranged on the frame 100, and the boat moving device 300 is arranged between the first side and the second side of the frame 100, during the actual process, the boat moving device 300 is not connected to the transport device 200, and the load on the frame 100 is the transport device 200 and the boat structure 600 transported by the transport device 200, and the load of the boat moving device 300 is the boat structure 600, so that the carrying capacity of the boat structure 600 can be increased, and the transportation of large-load boat structures 600 can be realized, and the number of sheets entering the high-temperature reaction chamber 20 at one time is increased, which is beneficial to improving production capacity. At the same time, since the boat moving device 300 is separately arranged inside the frame 100 and is not connected to the frame 100, the boat moving device 300 can be directly replaced as a whole after being damaged without disassembly, which is simple and quick.

[0045] refer to Figure 2 As shown, the transport device 200 includes an input assembly line 210 and an output assembly line 220, which are installed on the first side and the second side, respectively. The input assembly line 210 is used to receive the boat structure 600 transported from the outside, and transport the boat structure 600 to a position corresponding to the paddle support mechanism 310; the output assembly line 220 is used to receive the boat structure 600 output by the boat moving device 300, and output the frame 100. It can be understood that in the actual working process, when the input assembly line 210 inputs the boat structure 600, the output assembly line 220 can output the boat structure 600 at the same time, so that the two-way flow of the boat structure 600 in the process is realized, the waiting time of the equipment is shortened, and it is conducive to improving the process efficiency.

[0046] refer to Figure 4 As shown, the input assembly line 210 includes a first transport bracket 211, a first driving module 212 and a first support frame 213. The first transport bracket 211 is installed on the frame 100. The first driving module 212 is installed on the first transport bracket 211 and is used to drive the first support frame 213 to move along the first direction on the first transport bracket 211. The first support frame 213 is used to support the boat structure 600. It can be understood that in the actual working process, when the boat structure 600 is placed on the first support frame 213 by the external transport structure, the first driving module 212 drives the boat structure 600 to move along the first direction, so that the boat structure 600 is transported to the position corresponding to the paddle support mechanism 310, and the automatic transportation of the boat structure 600 is realized.

[0047] Furthermore, the first driving module 212 includes a first driving motor 2121 and a first transmission belt assembly 2122. The first transmission belt assembly 2122 includes a first driving wheel, a first driven wheel and a first conveyor belt. The first driving wheel and the first driven wheel are arranged on the first transport bracket 211 at intervals. The first driving wheel is connected to the driving shaft of the first driving motor 2121. The first support frame 213 includes a first connecting plate 2131 and a plurality of first supporting forks 2132 connected to the first connecting plate 2131. The plurality of first supporting forks 2132 are used to support the boat structure 600. The connecting plate is fixed to the first conveyor belt through a first fixing block. Therefore, in the actual working process, the first driving motor 2121 drives the first driving wheel to rotate, so that the first transmission belt moves, thereby driving the connecting plate connected to the first conveyor belt to move, so as to realize the transportation of the boat structure 600. A plurality of first support forks 2132 are used to support the boat structure 600, so that the boat moving device 300 can avoid the boat structure 600 on the first support frame 213 when moving the boat structure 600 away, thereby ensuring that the boat moving device 300 can stably move the boat structure 600. The structure in which the motor drives the conveyor belt to move is relatively stable and has a low cost, thereby ensuring that the first support frame 213 is stably driven to move while reducing the manufacturing cost of the first translation drive module 212.

[0048] In an alternative embodiment, the first drive module 212 is a structure in which a motor drives a lead screw nut, and the nut is connected to the first support bracket. In another alternative embodiment, the first drive module 212 is a structure in which a motor drives a gear rack, and the rack is connected to the first support bracket. In the present utility model, the specific type of the first drive module 212 can be adjusted according to actual needs.

[0049] refer to Figure 4As shown, the output assembly line 220 includes a second transport bracket 221, a second driving module 222 and a second support frame 223. The second transport bracket 221 is installed on the frame 100, and the second driving module 222 is installed on the second transport bracket 221, and is used to drive the second support frame 223 to move along the first direction on the second transport bracket 221. The second support frame 223 is used to support the boat structure 600. It can be understood that in the actual working process, when the boat structure 600 is output from the high-temperature reaction chamber 2020 to the second support frame 223, the second driving module 222 drives the boat structure 600 to move along the first direction, so that the boat structure 600 is transported to the position corresponding to the paddle support mechanism 310, and the automatic transportation of the boat structure 600 is realized.

[0050] Furthermore, the second driving module 222 includes a second driving motor 2221 and a second transmission belt assembly 2222, the second transmission belt assembly 2222 includes a second driving wheel, a second driven wheel and a second conveyor belt, the second driving wheel and the second driven wheel are arranged on the second transport bracket 221 at intervals, and the second driving wheel is connected to the driving shaft of the second driving motor 2221. The second support frame 223 includes a second connecting plate 2231 and a plurality of second supporting forks 2232 connected to the second connecting plate 2231, the plurality of second supporting forks 2232 are used to support the boat structure 600, and the connecting plate is fixed to the second conveyor belt through a second fixing block. Therefore, in the actual working process, the second driving motor 2221 drives the second driving wheel to rotate, so that the second transmission belt moves, thereby driving the connecting plate connected to the second conveyor belt to move, and realizing the transportation of the boat structure 600. A plurality of second support forks 2232 are used to support the boat structure 600, so that the boat moving device 300 can avoid the boat structure 600 on the second support frame 223 when moving the boat structure 600 away, thereby ensuring that the boat moving device 300 can stably move the boat structure 600. The structure in which the motor drives the conveyor belt to move is relatively stable and has a low cost, thereby ensuring that the second support frame 223 is stably driven to move while reducing the manufacturing cost of the second translation drive module 222.

[0051] In an alternative embodiment, the second drive module 222 is a structure in which a motor drives a lead screw nut, and the nut is connected to the second support bracket. In another alternative embodiment, the second drive module 222 is a structure in which a motor drives a gear rack, and the rack is connected to the second support bracket. In the present utility model, the specific type of the second drive module 222 can be adjusted according to actual needs.

[0052] In an alternative embodiment of the present invention, the transport device 200 may include only one transport assembly line. In the actual working process, the input and output of the boat structure 600 may also be achieved through one transport assembly line.

[0053] refer to Figure 3As shown, the paddle transporting mechanism 320 of the present embodiment includes a translation module 3211, a lifting module 322 and a boat pushing module 323, the paddle supporting mechanism 310 is used to support the boat structure 600, the translation module 3211 is transmission-coordinated with the paddle supporting mechanism 310, and is used to drive the paddle supporting mechanism 310 to move in a second direction, and the second direction is perpendicular to the first direction, the lifting module 322 is transmission-coordinated with the translation module 3211, and is used to drive the translation module 3211 to rise and fall in the vertical direction, and the boat pushing module 323 is transmission-coordinated with the lifting module 322, and is used to drive the lifting module 322 to move on the boat pushing module 323 in the first direction. It can be understood that in the actual working process, when the input assembly line 210 or the output assembly line 220 transports the boat structure 600 to the position corresponding to the paddle support mechanism 310, the lifting module 322 drives the translation module 3211 to move to a lower position, and then the translation module 3211 drives the paddle support mechanism 310 to move to below the first support bracket or the second support bracket, and then the lifting module 322 drives the translation module 3211 to move to a higher position, so that the paddle support mechanism 310 can support the boat structure 600 and make the boat structure 600 detach from the first support fork 2132 or the second support fork 2232, and then the translation module 3211 drives the paddle support mechanism 310 to move along the second direction to the position corresponding to the high-temperature reaction chamber 20, and finally the boat pushing module 323 pushes the lifting module 322 to move along the first direction, so that the boat structure 600 enters the high-temperature reaction chamber 20. The movement process of the boat structure 600 carrying the clean bench 10 out of the high temperature reaction chamber 20 can be deduced from the above description, which will not be repeated here.

[0054] refer to Figure 6 As shown, the boat push module 323 includes a boat push bracket 3231, a boat push driving member 3232, and a boat push transmission assembly 3233. The boat push bracket 3231 is installed at the bottom of the frame 100, the boat push driving member 3232 is installed on the boat push bracket 3231, the power input end of the boat push transmission assembly 3233 is connected to the boat push driving member 3232, and the power output end is connected to the lifting module 322. It can be understood that in the actual working process, the boat push driving member 3232 starts to drive the boat push transmission assembly 3233 to move, thereby driving the lifting module 322 to move along the first direction.

[0055] Furthermore, the boat push drive member 3232 includes a third drive motor, and the boat push transmission assembly 3233 includes a first drive screw and a first drive nut, the first drive screw is connected to the output shaft of the third drive motor, the first drive nut cooperates with the first drive screw, and is connected to the lifting module 322 through the third mounting block. Thus, in the actual working process, the first drive screw rotates under the drive of the third drive motor, so that the first drive nut moves along the axial direction of the first drive screw, thereby realizing the driving of the lifting module 322. In an alternative embodiment, the boat push transmission assembly 3233 is a transmission belt assembly, and the transmission belt of the transmission belt assembly is connected to the lifting module 322. In another alternative embodiment, the boat push transmission assembly 3233 is a gear rack structure, and the rack is connected to the lifting module 322. In the present utility model, the specific type of the boat push transmission assembly 3233 can be adjusted according to actual needs.

[0056] refer to Figure 3 and Figure 6 As shown, the lifting module 322 includes a lifting bracket 3221, a lifting drive assembly and a load assembly 3222. The lifting bracket 3221 is connected to the power output end of the boat pushing transmission assembly 3233 of the boat pushing module 323. The lifting drive assembly is arranged on the lifting bracket 3221 and is used to drive the translation module 3211 to lift and lower. The load assembly 3222 includes a counterweight load 32221, a fixed pulley 32222 and a load rope 32223. One end of the load rope 32223 is connected to the counterweight load 32221, and the other end is connected to the translation module 3211. It can be understood that in the actual working process, when the lifting drive assembly drives the translation module 3211 to rise, the counterweight load 32221 descends under the action of its own gravity. Since one end of the load rope 32223 is connected to the translation module 3211, during the rising process of the translation module 3211, the lifting drive assembly and the counterweight load 32221 are used as driving sources at the same time, which can reduce the output load of the lifting drive assembly and help reduce the support cost of the lifting drive assembly.

[0057] Furthermore, the lifting drive assembly includes a fourth drive motor, a second drive screw and a second drive nut, the fourth drive motor is connected to the second drive screw, the second drive nut cooperates with the second drive screw, and is connected to the translation module 3211 through the fourth fixed block. Thus, in the actual working process, the second drive screw rotates under the drive of the fourth drive motor, and the second drive nut drives the fourth fixed block and the translation module 3211 to be connected. In an alternative embodiment, the second drive module 222 is a structure in which the motor drives the conveyor belt assembly, and the transmission belt of the conveyor belt assembly is connected to the translation module 3211. In another alternative embodiment, the lifting drive assembly is a structure in which the motor drives the gear rack, and the rack is connected to the translation module 3211. In the utility model, the specific type of the second drive module 222 can be adjusted according to actual needs.

[0058] Further, refer to Figure 3 and Figure 7 As shown, the translation module 3211 includes a translation bracket 3211, a translation drive 3212 and a translation transmission assembly 3213. The translation bracket 3211 is in transmission cooperation with the lifting drive assembly and is connected to the load rope 32223. The translation drive 3212 is installed on the translation bracket 3211, the power input end of the translation transmission assembly 3213 is connected to the translation drive 3212, and the power output end is connected to the paddle support mechanism 310. It can be understood that in the actual working process, when the translation drive 3212 drives the translation transmission assembly 3213 to move, the translation module 3211 can drive the paddle support mechanism 310 to translate.

[0059] Furthermore, the translation drive member 3212 includes a fifth drive motor, and the translation transmission assembly 3213 includes a third driving wheel, a third driven wheel and a third conveyor belt. The third driving wheel and the third driven wheel are arranged on the translation bracket 3211 at intervals, and the third driving wheel is connected to the driving shaft of the fifth drive motor. The third transmission belt is connected to the paddle support mechanism 310 through the fifth fixed block. Therefore, in the actual working process, when the fifth drive motor drives the third driving wheel to rotate, the third transmission belt can drive the fifth fixed block to move, thereby driving the paddle support mechanism 310 to translate. The structure of the motor-driven conveyor belt movement is relatively stable and the cost is reduced, ensuring stable driving of the paddle support mechanism 310 to translate while reducing the manufacturing cost of the translation drive member 3212. In an alternative embodiment, the translation transmission assembly 3213 is a screw nut, and the nut is connected to the paddle support mechanism 310. In another alternative embodiment, the translation transmission assembly 3213 is a gear rack structure, and the rack is connected to the paddle support mechanism 310. In the utility model, the specific type of the translation transmission assembly 3213 can be adjusted according to actual needs.

[0060] refer to Figure 8 As shown, the paddle support mechanism 310 includes a paddle head frame 311, a paddle barrel 312 and a paddle shaft unit 313. The paddle head frame 311 is in transmission cooperation with the translation module 3211, the paddle barrel 312 is connected to the paddle head frame 311, and the paddle shaft unit 313 is connected to one end of the paddle barrel 312 away from the paddle head frame 311, and is used to support the boat structure 600. It can be understood that the paddle head frame 311 is connected to the translation transmission assembly 3213 of the translation module 3211, the paddle barrel 312 is used as a connecting structure between the paddle shaft unit 313 and the paddle head frame 311, and the paddle shaft unit 313 is used to support the structure, ensuring that the entire paddle support mechanism 310 can stably support the boat structure 600 and can stably move under the drive of the translation module 3211.

[0061] Further, refer to Figure 8As shown, the paddle unit 313 includes a plurality of supporting paddles 3131, a paddle fixing plate 3132 and a paddle clamp 3133. The paddle fixing plate 3132 is connected to one end of the plurality of supporting paddles 3131 and is connected to the paddle barrel 312. The paddle clamp 3133 is connected to one end of the supporting paddle 3131 away from the paddle fixing plate 3132 and fixes the ends of the plurality of supporting paddles 3131 together. It can be understood that the supporting capacity of the boat structure 600 can be improved by the plurality of supporting paddles 3131, and the stability of the boat structure 600 can be ensured. The paddle fixing plate 3132 and the paddle clamp 3133 can fix the plurality of supporting paddles 3131 together, and improve the structural strength of the paddle support mechanism 310.

[0062] refer to Figure 2 As shown, the purification station 10 also includes at least one buffer station 400 and a cooling device 500. The buffer station 400 is connected to the rack 100 and is located above the transport device 200. The buffer station 400 can receive the boat structure 600 transported by the boat moving device 300. The cooling device 500 is connected to the rack 100 and / or the buffer station 400, and the cooling device 500 is used to cool the boat structure 600 placed on the buffer station 400. The structure of the buffer station 400 is similar to the structure of the first support bracket and the second support bracket 223, which will not be repeated here. The cooling device 500 can select a liquid cooling structure and / or an air cooling structure according to actual needs. The liquid cooling structure and the air cooling structure are both prior arts and will not be repeated here.

[0063] The utility model also discloses a processing device 1. Fig. 9 As shown, the clean bench 10 and the high temperature reaction chamber 20 are included. The clean bench 10 is used to transport the boat structure 600 to the high temperature reaction chamber 20 and receive the boat structure 600 after the process is completed in the high temperature reaction chamber 20 .

[0064] The processing equipment 1 of the present invention, because it has the aforementioned clean bench 10, can carry a boat structure 600 with a relatively large weight, which is beneficial to improving the equipment production capacity.

[0065] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0066] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.

Claims

1. A clean bench, characterized in that: include: A frame having a first side and a second side arranged opposite to each other; a transport device mounted on the frame and used to transport the boat structure along a first direction; A boat moving device is arranged inside the frame and located between the first side and the second side. The boat moving device includes a paddle supporting mechanism and a paddle transporting mechanism. The paddle supporting mechanism is installed on the paddle transporting mechanism and is used to support the boat structure. The paddle transporting mechanism is used to realize the transfer of the boat structure between the high-temperature reaction chamber and the transport device.

2. The clean bench according to claim 1, characterized in that: The transport device comprises an input assembly line and an output assembly line, wherein the input assembly line and the output assembly line are installed on the first side and the second side respectively; wherein: The input assembly line is used to receive the boat structure transported from the outside and transport the boat structure to a position corresponding to the boat moving device; The output assembly line is used to receive the boat structure output by the boat moving device and output the rack.

3. The clean bench according to claim 2, characterized in that: The input assembly line comprises a first transport bracket, a first driving module and a first support frame, wherein the first transport bracket is mounted on the frame, the first driving module is mounted on the first transport bracket and is used to drive the first support frame to move along the first direction on the first transport bracket, and the first support frame is used to support the boat structure; and / or: The output assembly line includes a second transport bracket, a second driving module and a second support frame, the second transport bracket is installed on the frame, the second driving module is installed on the second transport bracket and is used to drive the second support frame to move along the first direction on the second transport bracket, and the second support frame is used to support the boat structure.

4. The clean bench according to claim 1, characterized in that: The paddle transport mechanism comprises: a translation module, the translation module being in transmission cooperation with the paddle support mechanism and being used to drive the paddle support mechanism to move along a second direction, the second direction being arranged perpendicular to the first direction; A lifting module, which is in transmission cooperation with the translation module and is used to drive the translation module to lift and lower in a vertical direction; The boat pushing module is in transmission cooperation with the lifting module and is used to drive the lifting module to move along the first direction on the boat pushing module.

5. The clean bench according to claim 4, characterized in that: The lifting module comprises: A lifting bracket, the lifting bracket is in transmission cooperation with the boat pushing module; A lifting drive assembly, which is disposed on the lifting bracket and is used to drive the translation module to lift; A load assembly, wherein the load assembly comprises a counterweight load, a fixed pulley and a load rope, wherein one end of the load rope is connected to the counterweight load, and the other end is connected to the translation module.

6. The clean bench according to claim 4, characterized in that: The boat pushing module comprises: A boat pusher bracket, the boat pusher bracket is installed at the bottom of the frame; A boat pusher driving member, the boat pusher driving member is mounted on the boat pusher bracket; A boat-pushing transmission assembly, wherein a power input end of the boat-pushing transmission assembly is connected to the boat-pushing driving member, and a power output end is connected to the lifting module.

7. The clean bench according to claim 4, characterized in that: The translation module comprises: A translation bracket, the translation bracket is in transmission cooperation with the lifting module; A translation driving member, wherein the translation driving member is mounted on the translation bracket; A translation transmission assembly, wherein a power input end of the translation transmission assembly is connected to the translation drive member, and a power output end is connected to the propeller support mechanism.

8. The clean bench according to claim 4, characterized in that: The paddle supporting mechanism comprises: A propeller head frame, the propeller head frame is in transmission cooperation with the translation module; A paddle barrel, the paddle barrel being connected to the paddle head frame; A paddle unit, the paddle unit is connected to an end of the paddle barrel away from the paddle head frame and is used to support the boat structure; wherein: the paddle unit includes: Multiple support paddles; A paddle fixing plate, the paddle fixing plate is connected to one end of the plurality of supporting paddles and is connected to the paddle barrel; The paddle clamp is connected to one end of the supporting paddle away from the paddle fixing plate and fixes the ends of a plurality of supporting paddles together.

9. The clean bench according to any one of claims 1 to 8, characterized in that: The clean bench also includes: at least one buffering station connected to the frame and located above the transport device, the buffering station being capable of receiving the boat structure transported by the boat moving device; A cooling device is connected to the rack and / or the buffer table, and is used to cool the boat structure placed on the buffer table.

10. A processing equipment, characterized in that: The method comprises a clean bench and a high-temperature reaction chamber as claimed in any one of claims 1 to 9, wherein the clean bench is used to transport the boat structure to the high-temperature reaction chamber and receive the boat structure after completing a process in the high-temperature reaction chamber.

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