Improved electrostatic chuck

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, and discloses an improved electrostatic chuck which comprises a base assembly, the top of the base assembly is provided with an electrostatic adsorption assembly, the outer wall of the electrostatic adsorption assembly is in threaded connection with a sealing assembly, and the lower end of the outer wall of the sealing assembly is in threaded connection with the inner wall of the base assembly. The base assembly comprises a base, a ceramic panel is fixedly installed on the outer wall of the base, a first protective layer is fixedly installed on the outer wall of the ceramic panel, the electrostatic adsorption assembly comprises an electrostatic chuck body, the base assembly, the electrostatic adsorption assembly and the sealing assembly are arranged, and the electrostatic adsorption assembly is arranged at the top of the base assembly; the outer wall of the electrostatic adsorption assembly is in threaded connection with a sealing assembly, and the lower end of the outer wall of the sealing assembly is in threaded connection with the inner wall of the base assembly, so that the problem of pollution to the interior of the electrostatic chuck caused by inner leakage of the side edge of the electrostatic chuck due to side wall cracks caused by particle splashing is effectively avoided, and the service life of the electrostatic chuck is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to an improved electrostatic chuck. Background Art

[0002] In the semiconductor process, how to ensure the normal and stable operation of each component during the operation of the machine is an important point that cannot be ignored in the production process. Electrostatic chuck is a general term for ultra-clean thin film carriers and gripping and handling equipment suitable for atmospheric or vacuum environments. The electrostatic adsorption technology used by electrostatic chuck is an advantageous technology that replaces traditional mechanical clamping and vacuum adsorption methods, and is widely used in semiconductors, panel displays, optics and other fields.

[0003] Since the size of the wafer is larger than that of the electrostatic chuck (ESC), after the wafer is bombarded by plasma, the particles generated splash onto the edge and side walls of the ESC. Since the ESC is composed of an aluminum base with a ceramic surface bonded to its surface through an adhesive, the adhesive material on the side walls of the ESC will be corroded by chemical gases and plasma to produce cracks, resulting in internal leakage on the side of the ESC, causing pollution to the inside of the electrostatic chuck and affecting the service life of the electrostatic chuck.

[0004] To this end, we propose an improved electrostatic chuck. Utility Model Content

[0005] The utility model mainly solves the technical problems existing in the above-mentioned prior art and provides an improved electrostatic chuck.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an improved electrostatic suction cup, comprising a base assembly, an electrostatic adsorption assembly is arranged on the top of the base assembly, the outer wall of the electrostatic adsorption assembly is threadedly connected with a sealing assembly, and the lower end of the outer wall of the sealing assembly is threadedly connected to the inner wall of the base assembly, the base assembly comprises a base, a ceramic panel is fixedly installed on the outer wall of the base, a first protective layer is fixedly installed on the outer wall of the ceramic panel, the electrostatic adsorption assembly comprises an electrostatic suction cup body, a high-voltage power supply is arranged inside the electrostatic suction cup body, the high-voltage power supply is connected to an electrode plate through an electrical signal, a second protective layer is fixedly installed on the outer wall of the electrostatic suction cup body, the sealing assembly comprises a connecting sealing cover, and the upper end of the inner wall of the connecting sealing cover is threadedly connected to the outer wall of the electrostatic adsorption assembly, and the lower end of the outer wall of the connecting sealing cover is threadedly connected to the upper end of the inner wall of the base assembly.

[0007] Preferably, a sealing ring is movably mounted on the upper end of the inner wall of the connecting sealing cover, and the inner wall of the sealing ring is movably connected to the outer wall of the electrostatic adsorption component.

[0008] Preferably, a sealing gasket is movably mounted on the bottom of the connecting sealing cover, and the bottom of the sealing gasket is movably connected to the top of the base assembly.

[0009] Preferably, the material of the first protective layer is metal oxide.

[0010] Preferably, the high voltage power supply is an AC power supply.

[0011] Preferably, the electrode plate is made of copper.

[0012] Preferably, the material of the second protective layer is carbide.

[0013] Preferably, the sealing ring is made of silicone rubber.

[0014] Preferably, the sealing gasket is made of fluororubber.

[0015] Beneficial Effects

[0016] The utility model provides an improved electrostatic chuck, which has the following beneficial effects:

[0017] (1) The improved electrostatic chuck comprises a base assembly, an electrostatic adsorption assembly and a sealing assembly. The electrostatic adsorption assembly is arranged on the top of the base assembly, the outer wall of the electrostatic adsorption assembly is threadedly connected to the sealing assembly, and the lower end of the outer wall of the sealing assembly is threadedly connected to the inner wall of the base assembly, thereby effectively avoiding the problem of internal leakage on the side of the electrostatic chuck caused by particle splashing, thereby improving the service life of the electrostatic chuck.

[0018] (2) The improved electrostatic chuck has a second protective layer made of carbide, which has excellent wear resistance and corrosion resistance and can effectively protect the electrostatic chuck body from corrosion by chemical gases and ions.

[0019] (3) The improved electrostatic suction cup ensures the sealing performance between the electrostatic adsorption component and the sealing component by setting a sealing ring, and the sealing ring is made of silicone rubber, which has good high temperature resistance and corrosion resistance.

[0020] (4) The improved electrostatic chuck has enhanced sealing performance by providing a sealing gasket, and the sealing gasket is made of fluororubber, which has excellent wear resistance and corrosion resistance.

[0021] (5) The improved electrostatic chuck has a first protective layer made of metal oxide, which has high hardness and wear resistance and can effectively protect the ceramic panel from erosion caused by particle splashing. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the front side of the utility model;

[0023] Figure 2 It is a schematic diagram of the top structure of the utility model;

[0024] Figure 3 It is a front structural perspective view of the utility model.

[0025] Legend: 10. Base assembly; 11. Electrostatic adsorption assembly; 12. Sealing assembly; 13. Base; 14. Ceramic panel; 15. First protective layer; 16. Electrostatic suction cup body; 17. High voltage power supply; 18. Electrode plate; 19. Second protective layer; 20. Connecting sealing cover; 21. Sealing ring; 22. Sealing gasket. DETAILED DESCRIPTION

[0026] Embodiment 1: Improved electrostatic chuck, such as Figure 1 - Figure 2 As shown, it includes a base component 10, an electrostatic adsorption component 11 is arranged on the top of the base component 10, the outer wall of the electrostatic adsorption component 11 is threadedly connected with a sealing component 12, and the lower end of the outer wall of the sealing component 12 is threadedly connected to the inner wall of the base component 10, the base component 10 includes a base 13, the outer wall of the base 13 is fixedly installed with a ceramic panel 14, the outer wall of the ceramic panel 14 is fixedly installed with a first protective layer 15, the electrostatic adsorption component 11 includes an electrostatic suction cup body 16, a high-voltage power supply 17 is arranged inside the electrostatic suction cup body 16, the high-voltage power supply 17 is connected to an electrode plate 18 through an electrical signal, the outer wall of the electrostatic suction cup body 16 is fixedly installed with a second protective layer 19, the sealing component 12 includes a connecting sealing cover 20, and the upper end of the inner wall of the connecting sealing cover 20 is threadedly connected to the outer wall of the electrostatic adsorption component 11, and the connecting sealing cover 2 0 is threadedly connected to the upper end of the inner wall of the base assembly 10, a sealing ring 21 is movably installed on the upper end of the inner wall of the sealing cover 20, and the inner wall of the sealing ring 21 is movably connected to the outer wall of the electrostatic adsorption assembly 11, a sealing gasket 22 is movably installed on the bottom of the sealing cover 20, and the bottom of the sealing gasket 22 is movably connected to the top of the base assembly 10. By setting the base assembly 10, the electrostatic adsorption assembly 11 and the sealing assembly 12, the electrostatic adsorption assembly 11 is arranged on the top of the base assembly 10, the outer wall of the electrostatic adsorption assembly 11 is threadedly connected to the sealing assembly 12, and the lower end of the outer wall of the sealing assembly 12 is threadedly connected to the inner wall of the base assembly 10, which effectively avoids the problem of internal leakage on the side of the electrostatic suction cup caused by side wall cracks caused by particle splashing, thereby improving the service life of the electrostatic suction cup.

[0027] Embodiment 2: Based on embodiment 1, Figure 3As shown, the base assembly 10 includes a base 13, a ceramic panel 14 is fixedly installed on the outer wall of the base 13, a first protective layer 15 is fixedly installed on the outer wall of the ceramic panel 14, the electrostatic adsorption assembly 11 includes an electrostatic chuck body 16, a high-voltage power supply 17 is arranged inside the electrostatic chuck body 16, the high-voltage power supply 17 is connected to an electrode plate 18 through an electrical signal, a second protective layer 19 is fixedly installed on the outer wall of the electrostatic chuck body 16, and the sealing assembly 12 includes a connecting sealing cover 20, and the upper end of the inner wall of the connecting sealing cover 20 is threadedly connected to the outer wall of the electrostatic adsorption assembly 11, the lower end of the outer wall of the connecting sealing cover 20 is threadedly connected to the upper end of the inner wall of the base assembly 10, and the connecting sealing cover 20 is threadedly connected to the upper end of the inner wall of the base assembly 10. 0 is movably mounted with a sealing ring 21 on the upper end of the inner wall, and the inner wall of the sealing ring 21 is movably connected to the outer wall of the electrostatic adsorption component 11, and a sealing gasket 22 is movably mounted on the bottom of the sealing cover 20, and the bottom of the sealing gasket 22 is movably connected to the top of the base component 10, and a second protective layer 19 is provided, and the material of the second protective layer 19 is carbide, which has excellent wear resistance and corrosion resistance, and can effectively protect the electrostatic suction cup body 16 from corrosion by chemical gases and ions. By providing the sealing ring 21, the sealing performance between the electrostatic adsorption component 11 and the sealing component 12 is guaranteed, and the material of the sealing ring 21 is silicone rubber, which has good high temperature resistance and corrosion resistance.

[0028] Embodiment 3: Based on Embodiment 1 and Embodiment 2, Figure 3 As shown, the material of the first protective layer 15 is metal oxide, the high-voltage power supply 17 adopts an AC power supply, the material of the electrode plate 18 is copper, the material of the second protective layer 19 is carbide, the material of the sealing ring 21 is silicone rubber, and the material of the sealing gasket 22 is fluororubber. By setting the sealing gasket 22, the sealing performance of the electrostatic suction cup is enhanced, and the material of the sealing gasket 22 is fluororubber, which has excellent wear resistance and corrosion resistance. By setting the first protective layer 15, the material of the first protective layer 15 is metal oxide, which has high hardness and wear resistance, and can effectively protect the ceramic panel 14 from erosion by particle splashing.

[0029] The working principle of the utility model is as follows: the electrostatic adsorption component 11 supplies power to the electrode plate 18 through the high-voltage power supply 17, thereby generating an electrostatic field. The electrostatic field generates an adsorption force on the surrounding particles, so that the particles are adsorbed to the surface of the electrostatic suction cup body 16. The sealing component 12 plays a sealing role to prevent the particles from entering the interior of the electrostatic suction cup body. The sealing ring 21 and the sealing gasket 22 ensure the sealing performance of the sealing component 12. The first protective layer 15 and the second protective layer 19 respectively protect the electrostatic suction cup body 16 and the electrostatic adsorption component 11 from particle splashing and corrosion by chemical gases and ions. The base 13 and the ceramic panel 14 provide stable support and protection for the electrostatic suction cup. The connecting sealing cover 20 movably connects the electrostatic adsorption component 11 and the sealing component 12, so that the sealing performance between the electrostatic adsorption component 11 and the sealing component 12 is guaranteed. The improved electrostatic suction cup provided by the utility model improves the service life while maintaining good adsorption performance. It has good wear resistance, corrosion resistance and sealing performance, and can be widely used in various particle adsorption, transportation and processing scenarios.

[0030] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. An improved electrostatic chuck, comprising a base assembly (10), characterized in that: The top of the base component (10) is provided with an electrostatic adsorption component (11), the outer wall of the electrostatic adsorption component (11) is threadedly connected to a sealing component (12), and the lower end of the outer wall of the sealing component (12) is threadedly connected to the inner wall of the base component (10), the base component (10) includes a base (13), the outer wall of the base (13) is fixedly mounted with a ceramic panel (14), the outer wall of the ceramic panel (14) is fixedly mounted with a first protective layer (15), and the electrostatic adsorption component (11) includes an electrostatic suction cup. The electrostatic suction cup body (16) is provided with a high-voltage power supply (17) inside, and the high-voltage power supply (17) is connected to an electrode plate (18) through an electrical signal. The outer wall of the electrostatic suction cup body (16) is fixedly installed with a second protective layer (19). The sealing component (12) includes a connecting sealing cover (20), and the upper end of the inner wall of the connecting sealing cover (20) is threadedly connected to the outer wall of the electrostatic adsorption component (11), and the lower end of the outer wall of the connecting sealing cover (20) is threadedly connected to the upper end of the inner wall of the base component (10).

2. The improved electrostatic chuck according to claim 1, characterized in that: A sealing ring (21) is movably mounted on the upper end of the inner wall of the connecting sealing cover (20), and the inner wall of the sealing ring (21) is movably connected to the outer wall of the electrostatic adsorption component (11).

3. The improved electrostatic chuck according to claim 1, characterized in that: A sealing gasket (22) is movably mounted on the bottom of the connection sealing cover (20), and the bottom of the sealing gasket (22) is movably connected to the top of the base assembly (10).

4. The improved electrostatic chuck according to claim 1, characterized in that: The material of the first protective layer (15) is metal oxide.

5. The improved electrostatic chuck according to claim 1, characterized in that: The high voltage power supply (17) adopts an alternating current power supply.

6. The improved electrostatic chuck according to claim 1, characterized in that: The material of the electrode plate (18) is copper.

7. The improved electrostatic chuck according to claim 1, characterized in that: The material of the second protective layer (19) is carbide.

8. The improved electrostatic chuck according to claim 2, characterized in that: The material of the sealing ring (21) is silicone rubber.

9. The improved electrostatic chuck according to claim 3, characterized in that: The material of the sealing gasket (22) is fluororubber.

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