Cleaning device for test probe and chip test system

Abstract

The utility model provides a cleaning device for a test probe and a chip test system, and relates to the technical field of semiconductor test. The cleaning device for the test probe comprises a rotary table and at least one first cleaning part, the rotary table is provided with at least one mounting position and is controlled to rotate, the first cleaning part is mounted at the mounting position and is arranged to rotate along with the rotary table, and each first cleaning part is provided with at least one brush head. The brush head rotates to the probe seat along with the rotating disc and then rotates back and forth along with the rotating disc, so that the test probe on the probe seat is cleaned, automation of cleaning of the test probe is achieved, labor cost is saved, the situation that manual cleaning is not in place or the test probe is damaged can be avoided, the brush head is used for replacing a cleaning piece, and the cleaning efficiency is improved. And the test probe can be effectively cleaned.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor testing, in particular to a cleaning device for testing probes and a chip testing system. Background Art

[0002] When conducting electrical property tests on silicon carbide grains, the test probes may become dirty, which may increase the contact impedance of the test probes and even cause the test probes to fail. Therefore, the test probes need to be cleaned.

[0003] In the prior art, the conventional cleaning method is to manually clean the probe with a cleaning sheet, which contacts the probe surface, sticks or grinds the dirty surface of the probe, and removes the dirt on the probe surface. Although the cleaning sheet can clean conventional probes from foreign matter such as tinning and carbon deposits, during dynamic tests such as avalanche and short circuit, due to sudden changes in input voltage, power startup and short circuit, the local temperature of the silicon carbide grains is too high, causing the probe to melt or oxidize locally. The cleaning sheet cannot effectively clean the probe, and the dirt on the probe can easily stain the cleaning sheet, causing the cleaning sheet to become ineffective.

[0004] Another cleaning method is to use a wire brush for manual cleaning. The tiny diameter wire rubs against the probe to separate the dirt on the probe surface, and then blow or suck away the dirt manually. When using a brush for manual cleaning, it is limited by the professionalism of the personnel, and the force, speed, and angle of cleaning by different operators cannot be consistent, resulting in the inability to effectively control the cleaning effect. Even if too much force is used, the probe will be damaged. Utility Model Content

[0005] One purpose of the utility model is to provide a cleaning device for testing probes and a chip testing system, so as to solve the technical problem that the probes cannot be cleaned automatically in the prior art.

[0006] A further object of the utility model is to improve the cleaning effect of the probe.

[0007] Another object of the present invention is to provide a chip testing system having the cleaning device.

[0008] In particular, the utility model provides a cleaning device for a test probe, comprising:

[0009] A turntable, configured to rotate in a controlled manner and having at least one mounting position;

[0010] At least one first cleaning component is installed at the installation position and is configured to rotate with the turntable. Each of the first cleaning components has at least one brush head, which is configured to rotate with the turntable to the probe seat and then rotate back and forth with the turntable to clean the test probe on the probe seat.

[0011] Optionally, the first cleaning component includes a plurality of brush heads arranged side by side, and the plurality of brush heads are configured to rotate along with the turntable and sequentially clean the test probes on the probe seat.

[0012] Optionally, the first cleaning component includes at least one first driving member, each of the first driving members is connected to one of the brush heads, and the first driving member is configured to controllably drive the brush head to move vertically to adjust the height of the brush head.

[0013] Optionally, the first cleaning component further includes at least one angle adjustment component, each of which is connected to one of the first driving members and one of the brush heads, and is used to adjust the angle of the brush head.

[0014] Optionally, the angle adjustment component includes:

[0015] A first adjusting member, mounted on the first driving member, wherein the first adjusting member is provided with at least one group of mounting holes, each group of the mounting holes comprising a plurality of mounting holes spaced apart and arranged in an arc shape;

[0016] The second adjusting member has at least one arc-shaped mounting groove and is connected to the brush head, each mounting groove corresponds to a group of mounting holes, and the second adjusting member is configured to rotate relative to the first adjusting member and is connected to the first adjusting member by a bolt passing through the mounting groove and the mounting hole.

[0017] Optionally, each of the first cleaning components is installed at one of the installation positions.

[0018] Optionally, the rotating disk has a plurality of the mounting positions spaced apart in the circumferential direction, and the cleaning device further comprises:

[0019] At least one second cleaning component, each of which is installed at one of the installation positions and is configured to rotate with the turntable, and each of the second cleaning components has at least one suction cup, which is configured to suck or blow air to the test probe when rotating with the turntable to a position opposite to the probe seat.

[0020] Optionally, the second cleaning component includes at least one second driving member, each of the second driving members is connected to one of the suction cups, and the second driving member is configured to controllably drive the suction cup to move vertically to adjust the height of the suction cup.

[0021] Optionally, it also includes:

[0022] At least one visual inspection component is provided, each of the visual inspection components is installed at one of the installation positions, and the visual inspection component is configured to rotate with the turntable to perform visual inspection on the corresponding test probe.

[0023] In particular, the utility model also provides a chip testing system, comprising the above-mentioned cleaning device.

[0024] According to the solution of the utility model, a turntable is provided to drive the brush head of the first cleaning component to rotate to the probe seat, and then the brush head rotates back and forth with the turntable, thereby cleaning the test probe on the probe seat, thereby realizing the automation of test probe cleaning, saving labor costs, and avoiding the situation where manual cleaning is not in place or damage to the test probe. In addition, the brush head is used instead of the cleaning sheet to effectively clean the test probe.

[0025] Furthermore, the first cleaning component of the utility model includes a plurality of brush heads arranged side by side, and the plurality of brush heads are configured to rotate with the turntable and sequentially clean the test probes on the probe holder. The above technical solution uses a plurality of brush heads to sequentially clean the test probes, which can improve the cleaning effect of the test probes.

[0026] Based on the detailed description of the specific embodiments of the present invention in combination with the accompanying drawings below, those skilled in the art will become more aware of the above and other purposes, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0028] Figure 1 is a schematic structural diagram of a cleaning device for a test probe according to an embodiment of the utility model;

[0029] Figure 2 is a schematic structural diagram of a probe seat according to an embodiment of the utility model;

[0030] Figure 3 yes Figure 1 A schematic structural diagram of a first cleaning component in the cleaning device shown;

[0031] Figure 4 yes Figure 1 A schematic front view of a second cleaning component in the cleaning device;

[0032] Figure 5 yes Figure 1 A schematic side view of a second cleaning component in the cleaning device shown;

[0033] Figure 6 yes Figure 1 A schematic structural diagram of the visual detection component in the cleaning device shown.

[0034] Reference numerals:

[0035] 100-cleaning device, 200-probe holder, 210-test probe, 10-turntable, 11-motor, 12-mounting position, 20-first cleaning component, 30-second cleaning component, 40-visual detection component, 21-brush head, 22-first driving member, 23-angle adjustment assembly, 231-first adjusting member, 232-second adjusting member, 233-mounting hole, 234-mounting groove, 31-suction cup, 32-second driving member, 33-air pipe, 41-light source, 42-lens, 43-camera. DETAILED DESCRIPTION

[0036] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0037] In the description of the present invention, it should be understood that the terms "up", "down", "left", "right", etc., indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0038] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features, that is, include one or more of the features. In the description of the present utility model, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. When a feature "includes or contains" one or some of the features it covers, unless otherwise specifically described, this indicates that other features are not excluded and may further include other features.

[0039] Unless otherwise clearly specified and limited, the terms "connection", "installation" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. A person skilled in the art should be able to understand the specific meanings of the above terms in the present utility model according to the specific circumstances.

[0040] Unless otherwise defined, all terms (including technical terms and scientific terms) used in the description of this embodiment have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0041] Figure 1 is a schematic structural diagram of a cleaning device 100 for a test probe 210 according to an embodiment of the present utility model. Figure 2 FIG. 2 is a schematic structural diagram of a probe seat 200 according to an embodiment of the present invention. Figure 1 and Figure 2 As shown, in a specific embodiment, the cleaning device 100 for cleaning the test probe 210 includes a turntable 10 and at least one first cleaning component 20, the turntable 10 is configured to rotate in a controlled manner, and has at least one mounting position 12. The first cleaning component 20 is installed at the mounting position 12 and is configured to rotate with the turntable 10. Each first cleaning component 20 has at least one brush head 21, and the brush head 21 is configured to rotate with the turntable 10 to the probe seat 200, and then rotate back and forth with the turntable 10, so as to clean the test probe 210 on the probe seat 200. Here, the probe seat 200 is located below the turntable 10. The brush head 21 can be understood as a brush, and the turntable 10 is connected to the motor 11 and rotates under the drive of the motor 11. When the brush head 21 rotates with the turntable 10 to a position relative to the test seat, the turntable 10 rotates back and forth, thereby driving the brush head 21 to move back and forth to achieve cleaning of the test probe 210. In this embodiment, the cleaning speed of the brush head 21 can be controlled by controlling the rotation speed of the turntable 10 .

[0042] In this embodiment, a turntable 10 is arranged to drive the brush head 21 of the first cleaning component 20 to rotate to the probe seat 200. Then, the brush head 21 rotates back and forth following the turntable 10, thereby cleaning the test probe 210 on the probe seat 200. This realizes the automation of cleaning the test probe 210, saves labor costs, and avoids the situation where manual cleaning is not in place or damages the test probe. The brush head 21 is used instead of a cleaning sheet to effectively clean the test probe 210.

[0043] Figure 3 yes Figure 1 Schematic diagram of the structure of the first cleaning component 20 in the cleaning device 100. Figure 3 As shown, in this embodiment, the first cleaning component 20 includes a plurality of brush heads 21 arranged side by side, and the plurality of brush heads 21 are arranged to rotate with the turntable 10, and sequentially clean the test probe 210 on the probe seat 200. That is to say, there are a plurality of brush heads 21 on each first cleaning component 20, which can be set to two. The turntable 10 first drives one of the brush heads 21 of the first cleaning component 20 to move to the probe seat 200, and then rotates back and forth to drive the brush head 21 to move back and forth, thereby cleaning the test probe 210. After that, another brush head 21 of the first cleaning component 20 is driven to move to a position opposite to the probe seat 200, and then rotates back and forth to drive the brush head 21 to clean the test probe 210. Here, one of the brush heads 21 performs forward cleaning and the other brush head 21 performs reverse cleaning, which can improve the cleaning effect of the test probe 210. In other embodiments, the number of brush heads 21 can also be set according to specific design requirements.

[0044] In this embodiment, the first cleaning component 20 includes at least one first driving member 22, each first driving member 22 is connected to a brush head 21, and the first driving member 22 is configured to drive the brush head 21 to move vertically in a controlled manner to adjust the height of the brush head 21. Specifically, when the brush head 21 follows the turntable 10 to move to the probe seat 200, the brush head 21 is located above the probe seat 200, and the first driving member 22 is required to drive the brush head 21 to move downward to the position in contact with the test probe 210, and then the turntable 10 rotates back and forth, thereby driving the brush head 21 to move back and forth. This embodiment can adjust the height of the brush head 21 according to the height of different probe seats 200 by setting the first driving member 22, and can meet the cleaning requirements of probe seats 200 of different heights. Here, if the first driving member 22 is not provided, the brush head 21 directly contacts the test probe 210 on the probe seat 200 after following the turntable 10 rotation, and there is no need to adjust the position of the brush head 21 up and down. The first driving member 22 is a cylinder.

[0045] In a preferred embodiment, the first cleaning component 20 further includes at least one angle adjustment component 23, each of which is connected to a first driving member 22 and a brush head 21, and is used to adjust the angle of the brush head 21. This embodiment can adjust the angle of the brush head 21 according to the cleaning requirements, making the cleaning of the test probe 210 more convenient.

[0046] In this embodiment, the angle adjustment assembly 23 includes a first adjustment member 231 and a second adjustment member 232. The first adjustment member 231 is mounted on the first driving member 22. The first adjustment member 231 is provided with at least one group of mounting holes, each group of mounting holes includes a plurality of mounting holes 233 arranged in an arc shape and spaced apart. The second adjustment member 232 has at least one arc-shaped mounting groove 234 and is connected to the brush head 21. Each mounting groove 234 corresponds to a group of mounting holes. The second adjustment member 232 is arranged to rotate relative to the first adjustment member 231 and is connected to the first adjustment member 231 by passing a bolt through the mounting groove 234 and the mounting hole 233. Figure 3 , the first adjusting member 231 has two groups of mounting holes relatively arranged on the left and right sides of the brush head 21, each group of mounting holes has three mounting holes 233, and all mounting holes 233 on each first adjusting member 231 are located on the same circle. The second adjusting member 232 has two mounting grooves 234 relatively arranged on the left and right sides of the brush head 21, and the two mounting grooves 234 are located on the same circle. In other embodiments, the number of mounting holes 233 can also be set according to specific design requirements. In this embodiment, the second adjusting member 232 can be manually adjusted so that the second adjusting member 232 rotates relative to the first adjusting member 231. After rotating the target angle, the second adjusting member 232 and the first adjusting member 231 can be connected by bolts. Since the brush head 21 is connected to the second adjusting member 232, the angle of the brush head 21 can be adjusted while the second adjusting member 232 rotates.

[0047] In this embodiment, each first cleaning component 20 is installed at a mounting position 12. Here, the turntable 10 has multiple mounting positions 12, and multiple first cleaning components 20 can be installed on the turntable 10 according to needs. It is only necessary to correspond the multiple first cleaning components 20 to the multiple probe seats 200 one by one, so as to meet the need of cleaning the test probes 210 on the multiple probe seats 200 at the same time, thereby improving the cleaning efficiency.

[0048] Figure 4 yes Figure 1 A schematic front view of the second cleaning component 30 in the cleaning device 100 is shown. Figure 5 yes Figure 1 FIG. 1 is a schematic side view of the second cleaning component 30 in the cleaning device 100. Figure 4 and Figure 5As shown, in this embodiment, the turntable 10 has a plurality of mounting positions 12 arranged at intervals along the circumferential direction, and the cleaning device 100 further includes at least one second cleaning component 30, each second cleaning component 30 is mounted at a mounting position 12, and is configured to rotate with the turntable 10, and each second cleaning component 30 has at least one suction cup 31, and the suction cup 31 is configured to suck or blow air to the test probe 210 when the turntable 10 rotates to a position relative to the probe seat 200. Here, an air pipe 33 is provided inside the suction cup 31, and the air pipe 33 is connected to an external air supply device, and the cleaning force can be controlled by controlling the pressure of the air pipe 33. The second cleaning component 30 is cleaned after the brush head 21 cleans the test probe 210. When the brush head 21 of the first cleaning component 20 completes cleaning, the turntable 10 rotates to drive the second cleaning component 30 to move to the probe seat 200, and the air supply device uses the air pipe 33 to perform positive pressure blowing and negative pressure absorption of cleaned foreign matter, thereby preventing foreign matter cleaned by the brush head 21 from remaining on the test probe 210, which can further improve the cleaning effect.

[0049] In this embodiment, the second cleaning component 30 includes at least one second driving member 32, each second driving member 32 is connected to a suction cup 31, and the second driving member 32 is arranged to drive the suction cup 31 to move vertically in a controlled manner to adjust the height of the suction cup 31. Here, when the turntable 10 drives the second cleaning component 30 to rotate to the probe seat 200, the second driving member 32 drives the suction cup 31 to move downward, and then blows or sucks. On the one hand, the second driving member 32 can drive the suction cup 31 to move downward to a position closer to the probe seat 200, and foreign matter can be effectively blown away or absorbed, thereby improving the cleaning effect. On the other hand, the second driving member 32 can adjust the height of the suction cup 31 according to the height of different probe seats 200, can meet the cleaning requirements of different height probe seats 200, and realize the generalization of the cleaning device 100. The second driving member 32 is a cylinder.

[0050] Figure 6 yes Figure 1 Schematic diagram of the structure of the visual detection component 40 in the cleaning device 100. Figure 6 As shown, in this embodiment, the cleaning device 100 further includes at least one visual detection component 40, each visual detection component 40 is installed at a mounting position 12, and the visual detection component 40 is configured to rotate with the turntable 10 to perform visual detection on the corresponding test probe 210. The visual detection component 40 can observe the dirtiness of the test probe 210 before cleaning the test probe 210, and observe the test probe 210 again after the first cleaning component 20 and the second cleaning component 30 clean the test probe 210 to observe the cleaning effect. Here, the visual detection component 40 includes a light source 41, a lens 42, and a camera 43.

[0051] This embodiment further includes a controller, which is connected to the turntable 10 , the first driving member 22 , the second driving member 32 , the air supply device and the visual detection component 40 .

[0052] This embodiment further provides a chip testing system, which includes the cleaning device 100 in any of the above embodiments. The cleaning device 100 will not be described in detail here.

[0053] Before cleaning the test probe 210, the embodiment manually adjusts the angle of the brush head 21 and sets the moving height of the brush head 21, the rotation speed of the turntable 10, and the pressure of the air pipe 33. After the above parameters are determined, the consistency of the cleaning effect of the test probe 210 can be guaranteed. The controller first controls the turntable 10 to rotate, driving the first cleaning component 20 to move above the probe holder 200, and making one of the brush heads 21 face the test probe 210, and then controls the first driving member 22 to drive the brush head 21 to descend to a position where it contacts the test probe 210, and then controls the turntable 10 to rotate back and forth at a set speed, so that the brush head 21 performs forward cleaning of the test probe 210, and then controls the first driving member 22 to drive the brush head 21 to reset, and the turntable 10 continues to drive the first cleaning component 20 to rotate, so that the other brush head 21 faces the test probe 210, and then controls the first driving member 22 to drive the brush head 21 to descend to a position where it contacts the test probe 210, and then controls the turntable 10 to rotate back and forth at a set speed, so that the brush head 21 performs reverse cleaning of the test probe 210. Then the first driving member 22 is controlled to drive the brush head 21 to reset, and then the turntable 10 rotates to drive the second cleaning member 30 to be located above the test probe 210, and the second driving member 32 is controlled to drive the suction cup 31 to descend, perform positive pressure blowing and negative pressure suction of foreign matter, and finally the second driving member 32 is reset and the turntable 10 is reset. Before and after the test probe 210 is cleaned, the turntable 10 drives the visual inspection device to rotate to observe the cleaning status of the test probe 210.

[0054] At this point, those skilled in the art should recognize that, although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present invention can still be directly determined or derived from the contents disclosed in the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A cleaning device for a test probe, characterized in that: include: A turntable, configured to rotate in a controlled manner and having at least one mounting position; At least one first cleaning component is installed at the installation position and is configured to rotate with the turntable. Each of the first cleaning components has at least one brush head, which is configured to rotate with the turntable to the probe seat and then rotate back and forth with the turntable to clean the test probe on the probe seat.

2. The cleaning device according to claim 1, characterized in that The first cleaning component includes a plurality of brush heads arranged side by side, and the plurality of brush heads are configured to rotate along with the turntable and sequentially clean the test probes on the probe seat.

3. The cleaning device according to claim 2, characterized in that: The first cleaning component includes at least one first driving member, each of which is connected to one of the brush heads, and the first driving member is configured to controllably drive the brush head to move vertically to adjust the height of the brush head.

4. The cleaning device according to claim 3, characterized in that: The first cleaning component further includes at least one angle adjustment component, each of which is connected to one of the first driving members and one of the brush heads, and is used to adjust the angle of the brush head.

5. The cleaning device according to claim 4, characterized in that: The angle adjustment component comprises: A first adjusting member is mounted on the first driving member, the first adjusting member is provided with at least one group of mounting holes, each group of the mounting holes comprises a plurality of mounting holes spaced apart and arranged in an arc shape; The second adjusting member has at least one arc-shaped mounting groove and is connected to the brush head, each mounting groove corresponds to a group of mounting holes, and the second adjusting member is configured to rotate relative to the first adjusting member and is connected to the first adjusting member by a bolt passing through the mounting groove and the mounting hole.

6. The cleaning device according to any one of claims 1 to 5, characterized in that: Each of the first cleaning components is installed at one of the installation positions.

7. The cleaning device according to any one of claims 1 to 5, characterized in that: The rotating disk has a plurality of mounting positions spaced apart in the circumferential direction, and the cleaning device further comprises: At least one second cleaning component, each of which is installed at one of the installation positions and is configured to rotate with the turntable, and each of the second cleaning components has at least one suction cup, which is configured to suck or blow air to the test probe when rotating with the turntable to a position opposite to the probe seat.

8. The cleaning device according to claim 7, characterized in that: The second cleaning component comprises at least one second driving member, each of which is connected to one of the suction cups, and the second driving member is configured to controllably drive the suction cup to move vertically to adjust the height of the suction cup.

9. The cleaning device according to claim 7, characterized in that: Also includes: At least one visual inspection component is provided, each of the visual inspection components is installed at one of the installation positions, and the visual inspection component is configured to rotate with the turntable to perform visual inspection on the corresponding test probe.

10. A chip testing system, characterized in that: The cleaning device comprises the cleaning device as claimed in any one of claims 1 to 9.

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