Auxiliary tool for vacuum chuck machining

Abstract

The utility model discloses an auxiliary tool for processing a vacuum sucker, which relates to the technical field of sucker processing and comprises a base, a vacuum sucker positioning mechanism, a sucker blanking mechanism and a flatness detection mechanism. The suction cup bearing and positioning mechanism comprises a rotating ring, a bearing groove, an operation channel and an annular handle; the rotating ring is rotationally arranged at the top of the base in a nested mode through a bearing, the multiple bearing grooves are evenly formed in the top of the rotating ring, the multiple operation channels are evenly formed in the outer side of the rotating ring, and any operation channel communicates with the adjacent bearing groove; the annular handle is fixedly arranged in the middle of the outer side of the rotating ring in a sleeving manner; and a sucker discharging mechanism. According to the utility model, the to-be-detected sucker can be positioned after blanking, the operation difficulty is reduced, the positioning speed is improved, and the detection efficiency of the to-be-detected sucker is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of suction cup processing, in particular to an auxiliary tooling for vacuum suction cup processing. Background Art

[0002] Silicon carbide vacuum ceramic chucks are widely used in semiconductor lithography machine etching, wafer thinning, wafer inspection, laser processing and other processing procedures. Since the processed objects have high precision requirements, the surface flatness requirements for silicon carbide chucks are also high.

[0003] The utility model patent with patent authorization announcement number CN 218329747 U discloses an auxiliary tooling for vacuum suction cup processing, including a base, a movable plate is provided above the base, the upper slide groove corresponds to the lower slide groove, the upper slide groove and the inner wall of the lower slide groove are slidably connected with a detection column, the outer wall of the detection column matches the upper slide groove and the inner wall of the lower slide groove, a push rod is provided in the detection column, the outer wall of the push rod is fixedly connected to a support block, a spring is provided at the bottom of the support block, and the other end of the spring is fixedly connected to the inner wall of the detection column.

[0004] However, the above device still has some shortcomings in actual use. The most obvious one is that each time a detection operation is performed, the suction cup to be tested needs to be placed directly under the movable plate and the silicon carbide suction cup needs to be clamped and fixed using two sets of connecting blocks and threaded rods. After the detection is completed, the threaded rod needs to be rotated in the opposite direction to release the clamping. The operation is cumbersome and the operating space is small, which leads to great difficulty in operation. In addition, it also has a great impact on the detection efficiency.

[0005] Therefore, it is necessary to invent an auxiliary tooling for vacuum suction cup processing to solve the above problems. Utility Model Content

[0006] The utility model aims to provide an auxiliary tooling for vacuum suction cup processing, which is provided with a suction cup bearing and positioning mechanism so that the rotating ring can be rotated through the annular handle, so that the rotating ring drives multiple bearing slots to pass through the unloading station, the detection station and the discharging station in sequence. When the bearing slot arrives at the unloading station, the suction cup unloading mechanism inputs the suction cup to be tested into the inner side of the bearing slot, and the bearing slot positions the suction cup to be tested. When the bearing slot arrives at the detection station, the flatness detection mechanism detects the positioned suction cup to be tested on the inner side of the bearing slot. When the bearing slot arrives at the discharging station, the operator extends his hand into the inner side of the bearing slot through the operation channel, and then takes out the detected suction cup upward, and then classifies it according to the detection result, so as to solve the problem proposed in the above background technology that each time the detection operation is performed, the suction cup to be tested needs to be placed directly under the movable plate and the silicon carbide suction cup is clamped and fixed by two sets of connecting blocks and threaded rods. After the detection is completed, the threaded rod needs to be rotated in the opposite direction to release the clamping. The operation is cumbersome and the operating space is small, which has great difficulty in operation. In addition, the detection efficiency is also greatly affected.

[0007] According to one aspect of the present disclosure, the following technical solution is provided: an auxiliary tooling for vacuum chuck processing, comprising:

[0008] A base, the base is used to install a suction cup bearing positioning mechanism, a suction cup unloading mechanism and a leveling detection mechanism;

[0009] A suction cup bearing and positioning mechanism, the suction cup bearing and positioning mechanism comprising a rotating ring, a bearing groove, an operating channel and a ring handle;

[0010] The rotating ring is rotatably nested on the top of the base through a bearing, and a plurality of the bearing grooves and the operating channels are provided. The plurality of bearing grooves are evenly arranged on the top of the rotating ring, and the plurality of operating channels are evenly arranged on the outside of the rotating ring. Any of the operating channels is connected to the adjacent bearing grooves, and the annular handle is fixedly sleeved and arranged in the middle of the outside of the rotating ring;

[0011] A suction cup unloading mechanism, which is used to transport the suction cup to be tested to the inner side of an adjacent bearing groove in a vertical direction; and

[0012] A flatness detection mechanism is used to detect and mark the suction cups to be tested that are positioned in adjacent bearing slots.

[0013] According to the auxiliary tooling for vacuum suction cup processing of at least one embodiment of the present disclosure, the suction cup unloading mechanism includes an L-shaped fixing plate, a barrel and an observation window.

[0014] According to at least one embodiment of the auxiliary tooling for vacuum suction cup processing disclosed herein, the L-shaped fixing plate is fixedly arranged on the top right side of the base, the barrel is fixedly arranged on the end of the L-shaped fixing plate, the bottom of the barrel is slidably fitted with the top of the rotating ring, and the observation window is opened on the front of the barrel.

[0015] According to the auxiliary tooling for vacuum suction cup processing of at least one embodiment of the present disclosure, the flatness detection mechanism includes a hydraulic cylinder, a load-bearing plate and multiple groups of detection components, and any group of the detection components includes a lifting cylinder, a limit ring, a sliding column, a reset spring and a coating block.

[0016] According to at least one embodiment of the auxiliary tooling for vacuum suction cup processing disclosed herein, the hydraulic cylinder is fixedly arranged on the left side of the top of the base, the bearing plate is fixedly arranged on the top of the output shaft of the hydraulic cylinder, the lifting cylinder is slidably penetrated and arranged on the top of the hydraulic cylinder, the limiting ring is fixedly sleeved and arranged on the top of the outer side of the lifting cylinder, the sliding column is slidably arranged on the inner side of the lifting cylinder, the return spring is sleeved and arranged on the outer side of the sliding column and fixedly connected between the lifting cylinder and the sliding column, and the coating block is fixedly arranged on the bottom end of the sliding column.

[0017] Technical effects and advantages of the utility model:

[0018] The utility model is provided with a suction cup bearing and positioning mechanism, so that the rotating ring can be rotated through the annular handle, and then the rotating ring drives multiple bearing slots to pass through the unloading station, the detection station and the discharging station in sequence. When the bearing slot arrives at the unloading station, the suction cup unloading mechanism inputs the suction cup to be tested into the inner side of the bearing slot, and the bearing slot positions the suction cup to be tested. When the bearing slot arrives at the detection station, the flatness detection mechanism detects the positioned suction cup to be tested on the inner side of the bearing slot. When the bearing slot arrives at the discharging station, the operator extends his hand into the inner side of the bearing slot through the operating channel, and then takes out the detected suction cup upwards, and then classifies it according to the detection result. Compared with the same type of device in the prior art, the utility model can realize the positioning of the suction cup to be tested after unloading, reduces the operation difficulty and improves the positioning speed, thereby improving the detection efficiency of the suction cup to be tested. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings illustrate exemplary embodiments of the present disclosure and together with the description serve to explain the principles of the present disclosure. These drawings are included to provide a further understanding of the present disclosure and are incorporated in and constitute a part of this specification.

[0020] Figure 1 It is a schematic diagram of the overall structure of an auxiliary tooling for vacuum suction cup processing according to an embodiment of the present disclosure.

[0021] Figure 2It is a schematic structural diagram of a suction cup carrying and positioning mechanism and a suction cup unloading mechanism of an auxiliary tooling for vacuum suction cup processing according to an embodiment of the present disclosure.

[0022] Figure 3 It is a schematic diagram of the structure of a flatness detection mechanism of an auxiliary tooling for vacuum suction cup processing according to an embodiment of the present disclosure.

[0023] The specific reference numerals in the figure are:

[0024] 1. Base;

[0025] 2. Suction cup bearing and positioning mechanism; 21. Rotating ring; 22. Bearing slot; 23. Operation channel; 24. Ring handle;

[0026] 3. Suction cup unloading mechanism; 31. L-shaped fixing plate; 32. Material barrel; 33. Observation window;

[0027] 4. Leveling detection mechanism; 41. Hydraulic cylinder; 42. Loading plate; 43. Lifting cylinder; 44. Limiting ring; 45. Sliding column; 46. Reset spring; 47. Coating block. DETAILED DESCRIPTION

[0028] For descriptive purposes, the present disclosure may use spatially relative terms such as "under," "beneath," "under," "above," "on," "higher," and "side (e.g., as in "sidewall")," to describe the relationship of one component to another (other) component as shown in the accompanying drawings. The spatially relative terms are intended to encompass different orientations of the device in use, operation, and / or manufacture in addition to the orientation depicted in the accompanying drawings. For example, if the device in the accompanying drawings is turned over, components described as "under" or "beneath" other components or features would then be positioned "above" the other components or features. Thus, the exemplary term "under" can encompass both the "above" and "below" orientations. Furthermore, the device may be otherwise oriented (e.g., rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0029] Figure 1 It is a schematic diagram of the overall structure of an auxiliary tooling for vacuum suction cup processing according to an embodiment of the present disclosure.

[0030] like Figure 1-Figure 3 As shown, the auxiliary tooling for vacuum suction cup processing disclosed in the present invention may include: a base 1, a suction cup bearing and positioning mechanism 2, a suction cup unloading mechanism 3 and other components.

[0031] Figure 2 It is a structural schematic diagram of a suction cup carrying and positioning mechanism 2 and a suction cup unloading mechanism 3 of an auxiliary tooling for vacuum suction cup processing according to an embodiment of the present disclosure.

[0032] like Figure 2 As shown, in a preferred embodiment, the suction cup bearing and positioning mechanism 2 includes a rotating ring 21, a bearing groove 22, an operating channel 23 and an annular handle 24, wherein the rotating ring 21 is rotatably nested on the top of the base 1 through a bearing, and a plurality of the bearing grooves 22 and the operating channels 23 are provided, and a plurality of the bearing grooves 22 are evenly opened on the top of the rotating ring 21, and a plurality of the operating channels 23 are evenly opened on the outside of the rotating ring 21, and any one of the operating channels 23 is connected to the adjacent bearing grooves 22, and the annular handle 24 is fixedly sleeved and arranged in the middle of the outer side of the rotating ring 21.

[0033] In this way, the rotating ring 21 can be rotated by the annular handle 24, so that the rotating ring 21 drives multiple carrying slots 22 to pass through the unloading station, the detection station and the discharging station in sequence. When the carrying slot 22 arrives at the unloading station, the suction cup unloading mechanism 3 inputs the suction cup to be tested into the inner side of the carrying slot 22, and the carrying slot 22 positions the suction cup to be tested. When the carrying slot 22 arrives at the detection station, the flatness detection mechanism 4 detects the positioned suction cup to be tested on the inner side of the carrying slot 22. When the carrying slot 22 arrives at the discharging station, the operator extends his hand into the inner side of the carrying slot 22 through the operating channel 23, and then takes the detected suction cup out upwards, and then classifies it according to the detection results.

[0034] like Figure 2 As shown, in the present disclosure, the suction cup unloading mechanism 3 includes an L-shaped fixing plate 31, a barrel 32 and an observation window 33, wherein the L-shaped fixing plate 31 is fixedly arranged on the top right side of the base 1, the barrel 32 is fixedly arranged on the end of the L-shaped fixing plate 31, the bottom of the barrel 32 is slidably fitted with the top of the rotating ring 21, and the observation window 33 is opened on the front of the barrel 32.

[0035] In this way, multiple suction cups to be tested can be stacked and placed inside the barrel 32. During the subsequent rotation of the rotating ring 21 driving the multiple supporting grooves 22, when the supporting groove 22 moves to the bottom of the barrel 32, the suction cup to be tested at the bottom of the barrel 32 falls into the inside of the supporting groove 22, and the supporting groove 22 positions the suction cup.

[0036] Figure 3 It is a structural schematic diagram of a flatness detection mechanism 4 of an auxiliary tooling for vacuum chuck processing according to an embodiment of the present disclosure.

[0037] like Figure 3As shown, in the present disclosure, the leveling detection mechanism 4 includes a hydraulic cylinder 41, a bearing plate 42 and multiple groups of detection components, and any group of the detection components includes a lifting cylinder 43, a limiting ring 44, a sliding column 45, a reset spring 46 and a coating block 47, wherein the hydraulic cylinder 41 is fixedly arranged on the left side of the top of the base 1, the bearing plate 42 is fixedly arranged on the top of the output shaft of the hydraulic cylinder 41, the lifting cylinder 43 is slidably penetrated and arranged on the top of the hydraulic cylinder 41, the limiting ring 44 is fixedly sleeved and arranged on the top of the outer side of the lifting cylinder 43, the sliding column 45 is slidably arranged on the inner side of the lifting cylinder 43, the reset spring 46 is sleeved and arranged on the outer side of the sliding column 45 and is fixedly connected between the lifting cylinder 43 and the sliding column 45, and the coating block 47 is fixedly arranged at the bottom end of the sliding column 45.

[0038] Therefore, when the rotating ring 21 drives the positioned suction cup to be tested to move to the detection station through the bearing groove 22, the hydraulic cylinder 41 drives the bearing plate 42 to descend, and then the multiple lifting cylinders 43 contact the top surface of the suction cup to be tested. At this time, observe whether the top surfaces of the multiple sliding columns 45 are flat. If there are raised or recessed sliding columns 45, the sliding columns 45 are pressed, and the sliding columns 45 compress the reset spring 46, and at the same time drive the coating block 47 to press on the top of the suction cup to be tested to form a mark.

[0039] In the description of this specification, the description with reference to the terms "one embodiment / method", "some embodiments / methods", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment / method or example are included in at least one embodiment / method or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment / method or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments / methods or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments / methods or examples described in this specification and the features of different embodiments / methods or examples, unless they are contradictory.

[0040] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0041] Those skilled in the art should understand that the above embodiments are only for the purpose of clearly illustrating the present disclosure, and are not intended to limit the scope of the present disclosure. For those skilled in the art, other changes or modifications may be made based on the above disclosure, and these changes or modifications are still within the scope of the present disclosure.

Claims

1. An auxiliary tooling for vacuum suction cup processing, characterized in that: include: A base, the base is used to install a suction cup bearing positioning mechanism, a suction cup unloading mechanism and a leveling detection mechanism; A suction cup bearing and positioning mechanism, the suction cup bearing and positioning mechanism comprising a rotating ring, a bearing groove, an operating channel and a ring handle; The rotating ring is rotatably nested on the top of the base through a bearing, and a plurality of the bearing grooves and the operating channels are provided. The plurality of bearing grooves are evenly arranged on the top of the rotating ring, and the plurality of operating channels are evenly arranged on the outside of the rotating ring. Any of the operating channels is connected to the adjacent bearing grooves, and the annular handle is fixedly sleeved and arranged in the middle of the outside of the rotating ring; A suction cup unloading mechanism, which is used to transport the suction cup to be tested to the inner side of an adjacent bearing groove in a vertical direction; and A flatness detection mechanism is used to detect and mark the suction cups to be tested that are positioned in adjacent bearing slots.

2. The auxiliary tooling for vacuum chuck processing according to claim 1, characterized in that: The suction cup unloading mechanism comprises an L-shaped fixing plate, a material barrel and an observation window.

3. The auxiliary tooling for vacuum chuck processing according to claim 2, characterized in that: The L-shaped fixing plate is fixedly arranged on the top right side of the base, the barrel is fixedly arranged on the end of the L-shaped fixing plate, the bottom of the barrel is slidably fitted with the top of the rotating ring, and the observation window is opened on the front side of the barrel.

4. The auxiliary tooling for vacuum chuck processing according to claim 3 is characterized in that: The leveling detection mechanism comprises a hydraulic cylinder, a bearing plate and a plurality of detection components, and any one of the detection components comprises a lifting cylinder, a limit ring, a sliding column, a reset spring and a coating block.

5. The auxiliary tooling for vacuum chuck processing according to claim 4, characterized in that: The hydraulic cylinder is fixedly arranged on the left side of the top of the base, the bearing plate is fixedly arranged on the top of the output shaft of the hydraulic cylinder, the lifting cylinder is slidably penetrated and arranged on the top of the hydraulic cylinder, the limiting ring is fixedly sleeved and arranged on the top of the outer side of the lifting cylinder, the sliding column is slidably arranged on the inner side of the lifting cylinder, the return spring is sleeved and arranged on the outer side of the sliding column and fixedly connected between the lifting cylinder and the sliding column, and the coating block is fixedly arranged on the bottom end of the sliding column.

Images