Parylene film lamination reaction chamber

Abstract

The utility model discloses a parylene film lamination reaction chamber, and belongs to the technical field of parylene films. The reaction chamber comprises a reaction cylinder for reaction, a mounting frame arranged below the reaction cylinder and used for supporting the reaction cylinder, a compression mechanism longitudinally moving in the reaction cylinder and used for compressing gas, and a sealing base screwed in the reaction cylinder, the compression mechanism comprises a compression cylinder longitudinally moving in the reaction cylinder, a fixing rod fixedly mounted on the compression cylinder and penetrating through the sealing base, a conical block slidably mounted on the fixing rod and a jacking spring sleeving the fixing rod and used for supporting the conical block, and a transmission mechanism used for driving the compression cylinder to longitudinally move is arranged on the mounting frame; through cooperative use of all the devices, when the compression cylinder compresses gas in the reaction cylinder, the fixed cylinder and the sliding cylinder are driven to move downwards, the gas needing to be added is added into the reaction cylinder through the sliding cylinder, the gas secondary adding step is completed, and use is convenient and fast.

Description

Technical Field

[0001] The utility model relates to the technical field of parylene film layers, in particular to a parylene film layer stacking reaction chamber. Background Art

[0002] Parylene membrane is prepared by a unique vacuum vapor deposition process. Active small molecules "grow" a fully conformed polymer film coating on the surface of the substrate. It has performance advantages that are difficult to match with other coatings. It can be applied to surfaces of various shapes, including sharp edges, cracks and inner surfaces. With the development of science and technology, people pay more and more attention to the preparation of parylene membrane. The existing method for preparing parylene film layer is roughly in a vacuum environment. The solid parylene raw material is heated in the evaporation chamber and sublimates into gas. Under the action of the pressure difference, the vaporized parylene raw material moves toward the cracking chamber and undergoes a cracking reaction. The cracked parylene gas enters the coating chamber and undergoes a polymerization reaction to form a waterproof film layer.

[0003] Upon investigation, a Chinese utility model patent discloses a high-efficiency deposition reaction chamber for a parylene film (publication number: CN216378386U), comprising a support plate, a reaction cylinder is fixedly connected to the upper surface of the support plate, a sliding opening is provided on the inner wall of the reaction cylinder, an electric telescopic rod is fixedly connected to the upper surface of the reaction cylinder, one end of the electric telescopic rod passes through the reaction cylinder and is fixedly connected to a compression plate, two sliding seats are fixedly connected to the outer side of the compression plate, and the sliding seats are slidably connected to the sliding opening, an air outlet is provided on the upper surface of the compression plate, a guide rod is fixedly connected to the top inner wall of the reaction cylinder, and the guide rod passes through the air outlet, and the bottom end of the guide rod is fixedly connected to a limiting plate.

[0004] Although the above patent can improve the efficiency of gas deposition and improve the quality of the waterproof film layer formed by Parylene, after the compression plate compresses the gas, the compression plate drops to a certain position, and the air inlet hole and the air inlet pipe therein cannot be released, which makes it impossible to add gas therein for the second time, causing inconvenience in use.

[0005] Therefore, the utility model provides a parylene film stacking reaction chamber to solve the above problems. Utility Model Content

[0006] 1. Technical issues to be resolved

[0007] The utility model provides a parylene film deposition reaction chamber, aiming to solve the problem in the prior art that it is inconvenient to add gas to the reaction chamber for a second time when compressing gas in the existing deposition reaction chamber.

[0008] (II) Technical solution

[0009] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a parylene membrane stacking reaction chamber, which comprises a reaction cylinder for reaction, a mounting frame arranged below the reaction cylinder for supporting the reaction cylinder, a compression mechanism longitudinally moving inside the reaction cylinder for compressing gas, and a sealing base screwed inside the reaction cylinder.

[0010] The compression mechanism includes a compression cylinder which moves longitudinally inside the reaction cylinder, a fixing rod which is fixedly mounted on the compression cylinder and passes through the sealing base, a conical block which is slidably mounted on the fixing rod, and a pressing spring which is sleeved on the fixing rod and used to support the conical block.

[0011] The mounting frame is provided with a transmission mechanism for driving the compression cylinder to move longitudinally, so that the compression cylinder can compress the gas inside the reaction cylinder during the downward pressing process, thereby completing the coating process.

[0012] As a preferred technical solution of the present application, the transmission mechanism includes a threaded rod screwed on the compression cylinder and a first motor arranged on the mounting frame for driving the threaded rod to rotate. An adding mechanism for adding gas to the interior of the reaction cylinder is arranged inside the compression cylinder, so that the compression cylinder moves longitudinally under the control of the first motor.

[0013] As a preferred technical solution of the present application, the adding mechanism includes a fixed cylinder fixedly installed on the compression cylinder, a sliding cylinder slidably installed inside the fixed cylinder, a fixed block fixedly installed on the sliding cylinder, a return spring sleeved on the sliding cylinder for pressing the fixed block, and an accommodating chamber opened in the sliding cylinder. When the compression cylinder compresses the gas inside the reaction cylinder, the operator adds gas to the interior of the reaction cylinder for a second time through the sliding cylinder.

[0014] As a preferred technical solution of the present application, bolts are threaded on the outer side of the reaction tube, and the bolts pass through the reaction tube and the sealing base in sequence, so that the sealing base is firmly installed on the bottom end of the reaction tube.

[0015] As a preferred technical solution of the present application, the inner cavity of the reaction cylinder is connected to the outside through the inner cavity of the fixed cylinder and the accommodating cavity, so that the operator can easily add gas into the reaction cylinder.

[0016] As a preferred technical solution of the present application, a sealing gasket is provided on the outer surface of the conical block for increasing the sealing of the inner cavity of the compression cylinder, thereby increasing the sealing of the interior of the reaction cylinder and preventing the compressed gas from leaking.

[0017] (III) Beneficial effects

[0018] The utility model has a simple structure and is easy to use. Through the arrangement of the reaction cylinder, the compression cylinder, the fixed cylinder and the sliding cylinder, the compression cylinder drives the fixed cylinder and the sliding cylinder to move downward when compressing the gas inside the reaction cylinder, and the required added gas is added to the inside of the reaction cylinder through the sliding cylinder, completing the secondary gas adding step. The utility model is easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the structure of a parylene membrane stacking reaction chamber;

[0020] Figure 2 A cross-sectional view of a reaction tube in a Parylene membrane stacking reaction chamber;

[0021] Figure 3 It is a schematic diagram of the structure of a compression cylinder in a Parylene membrane stacking reaction chamber;

[0022] Figure 4 for Figure 3 A is an enlarged schematic diagram.

[0023] In the figure:

[0024] 1. Reaction tube; 11. Mounting frame;

[0025] 2. Compression mechanism; 21. Compression cylinder; 22. Fixed rod; 23. Conical block; 24. Pressing spring;

[0026] 3. Transmission mechanism; 31. First motor; 32. Threaded rod;

[0027] 4. Adding mechanism; 41. Fixed cylinder; 42. Sliding cylinder; 43. Fixed block; 44. Return spring; 45. Accommodating chamber;

[0028] 5. Seal the base;

[0029] 6. Bolts. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] The utility model provides a parylene film stacking reaction chamber, such as Figure 1 , Figure 2 and Figure 3 As shown, the reaction chamber includes a reaction cylinder 1 for reaction, a mounting frame 11 arranged below the reaction cylinder 1 for supporting the reaction cylinder 1, a compression mechanism 2 longitudinally moving inside the reaction cylinder 1 for compressing gas, and a sealing base 5 screwed inside the reaction cylinder 1.

[0032] The compression mechanism 2 includes a compression cylinder 21 that moves longitudinally inside the reaction cylinder 1, a fixing rod 22 that is fixedly mounted on the compression cylinder 21 and passes through the sealing base 5, a conical block 23 that is slidably mounted on the fixing rod 22, and a pressure spring 24 that is sleeved on the fixing rod 22 and is used to support the conical block 23.

[0033] The mounting frame 11 is provided with a transmission mechanism 3 for driving the compression cylinder 21 to move longitudinally.

[0034] The reaction cylinder 1 is mounted on the mounting frame 11. When the gas needs to be compressed, the solid parylene and the required coating parts are placed on the sealing base 5. The sealing base 5 is screwed on the bottom end of the reaction cylinder 1, and then the compression cylinder 21 is pressed downward into the reaction cylinder 1 to squeeze the gas inside the reaction cylinder 1. When the compression cylinder 21 slides downward, it contacts the conical block 23. The compression cylinder 21 compresses the top pressure spring 24 through the conical block 23, so that the conical block 23 always has a tendency to move toward the compression cylinder 21, so as to maintain the sealing of the inner cavity of the reaction cylinder 1. After the solid parylene is compressed and vaporized, it is coated on the workpiece to complete the coating process.

[0035] Furthermore, in order to facilitate the operator to control the longitudinal movement of the compression cylinder 21, as Figure 2 As shown, the transmission mechanism 3 includes a threaded rod 32 screwed on the compression cylinder 21 and a first motor 31 arranged on the mounting frame 11 for driving the threaded rod 32 to rotate. The compression cylinder 21 is provided with an adding mechanism 4 for adding gas into the reaction cylinder 1.

[0036] When it is necessary to control the compression cylinder 21 to move longitudinally, the first motor 31 is started, and the first motor 31 drives the threaded rod 32 to rotate, thereby driving the compression cylinder 21 to move longitudinally.

[0037] Furthermore, in order to facilitate the addition of gas into the compressed gas, e.g. Figure 3 and Figure 4 As shown, the adding mechanism 4 includes a fixed cylinder 41 fixedly mounted on the compression cylinder 21, a sliding cylinder 42 slidably mounted inside the fixed cylinder 41, a fixed block 43 fixedly mounted on the sliding cylinder 42, a return spring 44 sleeved on the sliding cylinder 42 for pressing the fixed block 43, and an accommodating chamber 45 opened in the sliding cylinder 42.

[0038] The inner cavity of the reaction cylinder 1 is connected to the outside through the inner cavity of the fixing cylinder 41 and the accommodating cavity 45 .

[0039] When the compression cylinder 21 compresses the gas inside the reaction cylinder 1 and needs to add gas therein for a second time, first connect the gas outlet end of the required added gas to the end of the sliding cylinder 42 away from the reaction cylinder 1, press down the sliding cylinder 42 to make the inner cavity of the reaction cylinder 1 communicate with the outside through the accommodating chamber 45, and at the same time, the reset spring 44 is compressed by the fixed block 43, which has the tendency to push the sliding cylinder 42 to reset in real time, and then fill the required added gas into the accommodating chamber 45 and then enter the interior of the reaction cylinder 1 to complete the adding step, and then the reset spring 44 pushes the sliding cylinder 42 to reset through the fixed block 43 and pushes it upward, and the accommodating chamber 45 shrinks into the interior of the fixed cylinder 41 to complete the blocking, so that the interior of the reaction cylinder 1 remains airtight.

[0040] In order to improve the installation stability of the sealing base 5, as Figure 3 As shown, the outer side of the reaction tube 1 is threaded with a bolt 6, and the bolt 6 passes through the reaction tube 1 and the sealing base 5 in sequence.

[0041] After the sealing base 5 is installed, take the bolt 6 and screw it into the reaction tube 1 and the sealing base 5 in sequence, so that the sealing base 5 is firmly installed on the bottom end of the reaction tube 1 .

[0042] Furthermore, in order to improve the sealing performance of the inner cavity of the reaction tube 1, Figure 3 As shown, the outer surface of the conical block 23 is provided with a sealing gasket for increasing the sealing performance of the inner cavity of the compression cylinder 21 .

[0043] By setting the sealing gasket, the force exerted on the conical block 23 by the compression cylinder 21 when it is pressed down is increased, thereby increasing the friction between the conical block 23 and the compression cylinder 21 and improving the sealing performance of the reaction cylinder 1.

[0044] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A parylene film stacking reaction chamber, characterized in that: The reaction chamber comprises a reaction cylinder (1) for reaction, a mounting frame (11) arranged below the reaction cylinder (1) for supporting the reaction cylinder (1), a compression mechanism (2) moving longitudinally inside the reaction cylinder (1) for compressing gas, and a sealing base (5) screwed inside the reaction cylinder (1); The compression mechanism (2) comprises a compression cylinder (21) that moves longitudinally inside the reaction cylinder (1), a fixing rod (22) that is fixedly mounted on the compression cylinder (21) and passes through the sealing base (5), a conical block (23) that is slidably mounted on the fixing rod (22), and a pressure spring (24) that is sleeved on the fixing rod (22) and is used to support the conical block (23); The mounting frame (11) is provided with a transmission mechanism (3) for driving the compression cylinder (21) to move longitudinally; The transmission mechanism (3) comprises a threaded rod (32) screwed onto the compression cylinder (21) and a first motor (31) arranged on the mounting frame (11) for driving the threaded rod (32) to rotate; an adding mechanism (4) for adding gas into the reaction cylinder (1) is arranged inside the compression cylinder (21); The adding mechanism (4) comprises a fixed cylinder (41) fixedly mounted on the compression cylinder (21), a sliding cylinder (42) slidably mounted inside the fixed cylinder (41), a fixed block (43) fixedly mounted on the sliding cylinder (42), a return spring (44) sleeved on the sliding cylinder (42) for pressing the fixed block (43), and an accommodating chamber (45) provided in the sliding cylinder (42).

2. A Parylene membrane stacking reaction chamber according to claim 1, characterized in that: The outer side of the reaction tube (1) is threaded with a bolt (6), and the bolt (6) passes through the reaction tube (1) and the sealing base (5) in sequence.

3. The Parylene film stacking reaction chamber according to claim 1, characterized in that: The inner cavity of the reaction cylinder (1) is in communication with the outside through the inner cavity of the fixing cylinder (41) and the accommodating cavity (45).

4. A Parylene film stacking reaction chamber according to claim 1, characterized in that: The outer surface of the conical block (23) is provided with a sealing gasket for increasing the sealing performance of the inner cavity of the compression cylinder (21).

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