Fan speed measuring device

Abstract

The utility model discloses a fan speed measuring device, which relates to the technical field of heat treatment and comprises a bottom plate, a fan motor is arranged at the upper end of the bottom plate, a vertical plate is fixedly arranged at the upper end of the bottom plate, one end of the vertical plate is connected with the fan motor in a matched manner through a bolt, a control line is arranged at one end of the fan motor, and the control line is connected with the fan motor through a bolt. A frequency converter is arranged at one end of the control line, a control panel is arranged at one end of the frequency converter, parameters are adjusted through the control panel, a supporting disc is fixedly arranged at the upper end of the bottom plate, a monitoring piece is arranged at the upper end of the supporting disc, a data line is arranged at one end of the monitoring piece, a display screen is arranged at one end of the data line, and an alarm line is arranged at one end of the display screen. According to the fan speed measuring device, the speed measuring device is arranged, normal operation of a fan can be effectively protected, the quality of machined products is improved, a monitoring structure is convenient to install, and the universality is high.

Description

Technical Field

[0001] The utility model relates to the technical field of heat treatment, in particular to a fan speed measuring device. Background Art

[0002] An annealing furnace is a process used in the manufacture of semiconductor devices. It involves heating multiple semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects. The wafers can be heated to activate dopants, convert thin films into thin films or convert thin films into wafer substrate interfaces, make densely deposited films, change the state of growing films, repair implanted damage, move dopants or transfer dopants from one film to another or from a film into a wafer substrate. A fan is used in the use of an annealing furnace, and a fan speed measuring device is required at this time.

[0003] However, the prior art still has the following problems:

[0004] First, the annealing furnace fan of the prior art has no speed measuring device. The frequency converter controls the motor speed to drive the fan to rotate. If the fan speed decreases or the belt breaks, the staff on the ground cannot know it immediately.

[0005] Secondly, the speed measuring device of the prior art is not convenient for installing the monitoring structure. Since the motor driving the fan is placed in different positions, if it is not convenient for installation, the monitoring structure cannot be applied to most annealing furnace fans, which has limitations.

[0006] In view of the above problems, the inventor proposes a fan speed measuring device to solve the above problems. Utility Model Content

[0007] In order to solve the problem of no speed measuring device and inconvenience in installing the monitoring structure, the utility model aims to provide a fan speed measuring device.

[0008] In order to solve the above technical problems, the utility model adopts the following technical solutions: a fan speed measuring device, comprising a base plate, a fan motor is provided at the upper end of the base plate, a vertical plate is fixedly provided at the upper end of the base plate, one end of the vertical plate is connected to the fan motor by bolts, a control line is provided at one end of the fan motor, a frequency converter is provided at one end of the frequency converter, a control board is provided at one end of the frequency converter, and parameters are adjusted by the control board, a support plate is fixedly provided at the upper end of the base plate, a monitoring device is provided at the upper end of the support plate, a data line is provided at one end of the monitoring device, a display screen is provided at one end of the data line, an alarm line is provided at one end of the display screen, and an alarm is provided at one end of the alarm line.

[0009] Preferably, a driving column is rotatably provided at the upper end of the fan motor, and four first limiting disks are sleeved on the outer surface of the driving column, and a driving disk is fixedly provided between two adjacent first limiting disks, and the first limiting disks and the driving disks are alternately distributed. A driven shaft is rotatably provided at the upper end of the support disk, and four second limiting disks are sleeved on the outer surface of the driven shaft, and the radius of the second limiting disk is two or three times the radius of the first limiting disk, and a driven disk is fixedly provided between two adjacent second limiting disks, and a transmission belt is jointly sleeved between the driven disk and the driving disk located at the same height, and three transmission belts are provided, and the three transmission belts are evenly spaced up and down, and a detection component is fixedly provided on one side of the upper end of the second limiting disk located at the top, and the detection component is used in conjunction with a monitoring component.

[0010] Preferably, one side of the outer surface of the support plate is connected to a connecting plate by bolts, the upper end of the connecting plate is fixedly provided with a mounting plate, the inner wall of the mounting plate is connected to a placement plate by bolts, the mounting plate and the placement plate are L-shaped, and the inner walls on both sides of the placement plate are provided with four threaded grooves that are evenly spaced up and down, the detection member is connected through the placement plate, the outer surface of the detection member is sleeved with a fixing plate, and the fixing plate is fixedly connected to the inner wall of one side of the placement plate.

[0011] Compared with the prior art, the beneficial effects of the utility model are:

[0012] 1. The utility model uses the monitoring part, under the action of the detection part and the alarm, the bottom plate is used as a carrier for placing and connecting various structures. The fan motor drives the fan of the annealing furnace to rotate. The frequency converter controls the speed of the fan motor through the control line to drive the fan to rotate. The monitoring part on the support plate can measure the speed and display it on the newly installed display screen, and connect the alarm through the alarm line. When the speed is lower than a certain value, the alarm will be triggered and the situation can be observed intuitively on the display screen, reducing the workload of the staff, and can judge the problem in the first time, ensuring the normal progress of the annealing process, which is very important for the optimization and control of product quality. The detection part continuously makes a circular motion, cooperates with the monitoring part to monitor the speed, and is equipped with a speed measuring device, which can effectively protect the normal operation of the fan, thereby achieving the effect of improving the quality of the processed products;

[0013] 2. The utility model uses a connecting plate, in which the detection part is installed on the placement plate under the action of the mounting plate and the placement plate, and the placement plate is fixed to the connecting plate through the mounting plate, and the connecting plate is fixedly connected to the support plate by bolts, thus achieving the convenience and firmness of the installation of the detection part, and the height of the detection part can be easily adjusted through multiple threaded grooves, and the installation firmness of the detection part is improved through the fixing plate, and the monitoring structure is easy to install, thereby achieving a high versatility effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 It is a schematic diagram of the structure of the utility model.

[0016] Figure 2 This is an exploded view of the fan motor and the upper structure of the support plate of the utility model.

[0017] Figure 3 This is a schematic diagram of the connection structure of the monitoring component of the utility model.

[0018] In the figure: 1. bottom plate; 2. fan motor; 21. driving column; 22. first limiting plate; 23. driving plate; 24. transmission belt; 25. vertical plate; 3. frequency converter; 31. control board; 32. control line; 4. support plate; 41. driven shaft; 42. second limiting plate; 43. driven plate; 5. monitoring part; 51. detection part; 52. connecting plate; 53. mounting plate; 54. placement plate; 55. threaded groove; 56. fixing plate; 6. display screen; 61. data line; 7. alarm; 71. alarm line. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] Embodiment 1: Figure 1-2As shown, the utility model provides a fan speed measuring device, including a base plate 1, a fan motor 2 is provided at the upper end of the base plate 1, a control line 32 is provided at one end of the fan motor 2, a frequency converter 3 is provided at one end of the control line 32, a control board 31 is provided at one end of the frequency converter 3, a support plate 4 is fixedly provided at the upper end of the base plate 1, a monitoring member 5 is provided at the upper end of the support plate 4, a data line 61 is provided at one end of the monitoring member 5, a display screen 6 is provided at one end of the data line 61, an alarm line 71 is provided at one end of the display screen 6, an alarm 71 is provided at one end of the alarm line 71, and the base plate 1 is used for placing and connecting various The fan motor 2 drives the fan of the annealing furnace to rotate, and the frequency converter 3 controls the speed of the fan motor 2 through the control line 32 to drive the fan to rotate. The monitoring component 5 on the support plate 4 can measure the speed and display it on the newly installed display screen 6, and is connected to the alarm 7 through the alarm line 71. When the speed is lower than a certain value, the alarm 7 will be triggered and the situation can be observed intuitively on the display screen 6, which reduces the workload of the staff, and can judge the problem in the first time, ensuring the normal progress of the annealing process, which is very important for the optimization and control of product quality.

[0021] A driving column 21 is rotatably provided at the upper end of the fan motor 2, and four first limiting plates 22 are sleeved on the outer surface of the driving column 21, and a driving plate 23 is fixedly provided between two adjacent first limiting plates 22. A driven shaft 41 is rotatably provided at the upper end of the support plate 4, and four second limiting plates 42 are sleeved on the outer surface of the driven shaft 41, and a driven plate 43 is fixedly provided between two adjacent second limiting plates 42. A transmission belt 24 is jointly sleeved between the driven plate 43 and the driving plate 23 located at the same height, and a detection member 51 is fixedly provided on one side of the upper end of the second limiting plate 42 located at the top. The detection member 51 is used in conjunction with the monitoring member 5. The driving column 21 on the fan motor 2 has the same speed as that of the fan. When the driving column 21 rotates, the driven plate 43 of the second limiting plate 42 is driven by the driving plate 23 between the first limiting plates 22 through the transmission belt 24, and the second limiting plate 42 rotates on the support plate 4 through the driven shaft 41, so that the detection member 51 continuously performs a circular motion, and cooperates with the monitoring member 5 to monitor the speed.

[0022] By adopting the above technical solution, the transmission can be carried out stably and the rotation speed of the fan can be monitored.

[0023] A vertical plate 25 is fixedly provided on the upper end of the bottom plate 1 , and one end of the vertical plate 25 is connected to the fan motor 2 by bolts.

[0024] By adopting the above technical solution, the supporting strength of the fan motor 2 is improved, thereby improving the stability of the device.

[0025] There are three transmission belts 24 , and the three transmission belts 24 are evenly spaced vertically.

[0026] By adopting the above technical solution, the effect of the transmission connection is improved.

[0027] The radius of the second limiting disk 42 is two to three times the radius of the first limiting disk 22 .

[0028] By adopting the above technical solution, the transmission is made more stable and labor-saving.

[0029] Embodiment 2: Figure 3 As shown, one side of the outer surface of the support plate 4 is connected to a connecting plate 52 by bolts, a mounting plate 53 is fixed to the upper end of the connecting plate 52, the inner wall of the mounting plate 53 is connected to a placement plate 54 by bolts, the detection member 51 is connected through the placement plate 54, the detection member 51 is installed on the placement plate 54, and the placement plate 54 is fixed to the connecting plate 52 by the mounting plate 53, and the connecting plate 52 is fixed to the support plate 4 by bolts, thereby achieving the convenience and firmness of the installation of the detection member 51.

[0030] By adopting the above technical solution, the detection member 51 is installed.

[0031] The inner walls of both sides of the placement plate 54 are provided with four thread grooves 55 which are evenly spaced vertically.

[0032] By adopting the above technical solution, the height of the detection member 51 can be conveniently adjusted.

[0033] A fixing plate 56 is sleeved on the outer surface of the detection member 51 , and the fixing plate 56 is fixedly connected to an inner wall of one side of the placement plate 54 .

[0034] By adopting the above technical solution, the installation firmness of the detection member 51 is improved.

[0035] Working principle: the bottom plate 1 is used as a carrier for placing and connecting various structures. The fan motor 2 drives the fan of the annealing furnace to rotate. The frequency converter 3 controls the speed of the fan motor 2 through the control line 32, thereby driving the fan to rotate. The monitoring component 5 on the support plate 4 can measure the speed and display it on the newly installed display screen 6, and is connected to the alarm 7 through the alarm line 71. When the speed is lower than a certain value, the alarm 7 will be triggered and the situation can be observed intuitively on the display screen 6, which reduces the workload of the staff and can judge the problem in the first time, ensuring the normal progress of the annealing process, which is very important for the optimization and control of product quality. The driving column 21 on the fan motor 2 has the same speed as the fan. The driving column 21 rotates and passes through the transmission belt 24 on the first limiting plate 2 Driven by the driving disk 23 between the two, the driven disk 43 of the second limiting disk 42 is transmitted, and the second limiting disk 42 rotates on the support disk 4 through the driven shaft 41, so that the detection member 51 continuously makes a circular motion, and cooperates with the monitoring member 5 to monitor the rotation speed. The vertical plate 25 improves the supporting strength of the fan motor 2, thereby improving the stability of the device. The detection member 51 is installed on the placement plate 54, and the placement plate 54 is fixed to the connecting plate 52 through the mounting plate 53, and the connecting plate 52 is fixed to the support disk 4 by bolts, thus realizing the convenience and firmness of the installation of the detection member 51. The plurality of threaded grooves 55 make it convenient to adjust the height of the detection member 51, and the fixing plate 56 improves the installation firmness of the detection member 51.

[0036] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A fan speed measuring device, comprising a base plate (1), characterized in that: A fan motor (2) is provided at the upper end of the base plate (1), a control line (32) is provided at one end of the fan motor (2), a frequency converter (3) is provided at one end of the control line (32), a control panel (31) is provided at one end of the frequency converter (3), a support plate (4) is fixedly provided at the upper end of the base plate (1), a monitoring component (5) is provided at the upper end of the support plate (4), a data line (61) is provided at one end of the monitoring component (5), a display screen (6) is provided at one end of the data line (61), an alarm line (71) is provided at one end of the display screen (6), and an alarm device (7) is provided at one end of the alarm line (71).

2. A fan speed measuring device according to claim 1, characterized in that: A driving column (21) is rotatably provided at the upper end of the fan motor (2), four first limiting disks (22) are sleeved on the outer surface of the driving column (21), and a driving disk (23) is fixedly provided between two adjacent first limiting disks (22); a driven shaft (41) is rotatably provided at the upper end of the support disk (4), four second limiting disks (42) are sleeved on the outer surface of the driven shaft (41), and a driven disk (43) is fixedly provided between two adjacent second limiting disks (42); a transmission belt (24) is sleeved between the driven disk (43) and the driving disk (23) located at the same height; a detection component (51) is fixedly provided on one side of the upper end of the second limiting disk (42) located at the top, and the detection component (51) is used in conjunction with the monitoring component (5).

3. A fan speed measuring device according to claim 2, characterized in that: A connecting plate (52) is connected to one side of the outer surface of the support plate (4) by means of bolts, a mounting plate (53) is fixedly provided on the upper end of the connecting plate (52), a placement plate (54) is connected to the inner wall of the mounting plate (53) by means of bolts, and the detection member (51) is connected to the placement plate (54) through-and-through.

4. A fan speed measuring device according to claim 1, characterized in that: A vertical plate (25) is fixedly provided on the upper end of the bottom plate (1), and one end of the vertical plate (25) is connected to the fan motor (2) by means of bolts.

5. A fan speed measuring device according to claim 2, characterized in that: The transmission belts (24) are provided with three, and the three transmission belts (24) are distributed at equal intervals up and down.

6. A fan speed measuring device according to claim 2, characterized in that: The radius of the second limiting disk (42) is two to three times the radius of the first limiting disk (22).

7. A fan speed measuring device according to claim 3, characterized in that: The inner walls on both sides of the placement plate (54) are provided with four thread grooves (55) distributed at equal intervals in the upper and lower directions.

8. A fan speed measuring device as claimed in claim 3, characterized in that: A fixing plate (56) is sleeved on the outer surface of the detection member (51), and the fixing plate (56) is fixedly connected to an inner wall of one side of the placement plate (54).

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