SEM sample table floating dust blowing device

Abstract

The utility model belongs to the technical field of dust removal equipment, and particularly relates to an SEM (scanning electron microscope) sample table floating dust blowing device which comprises a base, a mounting frame and a mounting plate, supporting foot stools are arranged at four corners of the bottom of the base, a box body is arranged at the top of the base, a box door is arranged on the front surface of the box body, and a positioning seat is arranged at the bottom of an inner cavity of the box body; the mounting frames are arranged on the side wall of an inner cavity of the box body, a lead screw is arranged between the mounting frames, a first motor is arranged on one side of each mounting frame, the output end of each first motor is connected with the corresponding lead screw, a sliding block is arranged on the surface of each lead screw, a second motor is arranged on one side of each sliding block, and a cleaning roller is arranged at the output end of each second motor; the mounting plates are arranged on the two sides of the box body; the dust removal device is reasonable in structure, in the using process, the surface of a workpiece can be wiped firstly, then blowing dust removal is conducted on the surface of the workpiece, floating dust can be prevented from adhering to the surface of the workpiece, and the dust removal quality can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of dust removal equipment, in particular to a floating dust blowing device for a SEM sample stage. Background Art

[0002] The SEM sample stage (i.e., scanning electron microscope sample positioning stage) is used to carry SEM samples. When scanning, the SEM sample is placed on the SEM sample stage, and then the SEM sample stage is placed into the hatch of the scanning electron microscope, and then the electron microscope is used for observation. There is often floating dust on the SEM sample stage. When the floating dust enters the electron microscope, it will cause damage to the electron microscope. Therefore, before scanning, it is necessary to remove the floating dust on the surface of the SEM sample stage.

[0003] In the prior art, the application number is CN202321786869.4, and the application name is SEM sample stage floating dust purging device. The technical scheme recorded includes a shell with a closed inner cavity, a positioning seat is arranged inside the shell, and a positioning mechanism for positioning the SEM sample stage is arranged on the positioning seat. A blow pipe is arranged on the top of the shell, and the lower end of the blow pipe faces the positioning seat; the upper end of the blow pipe is connected to the blow mechanism through a first pipeline, and a negative ion inert gas supply mechanism is connected through a second pipeline, and valves are arranged on the first pipeline and the second pipeline; an exhaust mechanism is arranged at the bottom of the shell, and the exhaust mechanism is connected to a floating dust filtering mechanism. The utility model purges the SEM sample stage in a closed cavity to prevent floating dust from entering the outside air, and two kinds of air are used to purge the SEM sample stage successively, so that the dust removal effect is good.

[0004] However, there are still some shortcomings in the actual use process. For example, some dust is easy to adhere to the surface of the workpiece, and it is not effective to remove the dust just by blowing. For this reason, we have made further improvements to it. Utility Model Content

[0005] The purpose of this section is to summarize some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract of the specification and the name of the utility model of this application to avoid blurring the purpose of this section, the abstract of the specification and the name of the utility model, and such simplifications or omissions cannot be used to limit the scope of the utility model.

[0006] In view of the problems existing in the prior art, the present utility model is proposed.

[0007] Therefore, the purpose of the utility model is to provide a SEM sample stage dust blowing device. During use, the surface of the workpiece can be wiped first, and then the workpiece surface can be blown to remove dust, which can prevent floating dust from adhering to the workpiece surface and help improve the dust removal quality.

[0008] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0009] A SEM sample stage dust blowing device, comprising a base, a mounting frame and a mounting plate;

[0010] in,

[0011] The four corners of the bottom of the base are provided with supporting legs, the top of the base is provided with a box body, the front surface of the box body is provided with a box door, and the bottom of the inner cavity of the box body is provided with a positioning seat;

[0012] The mounting frame is arranged on the inner cavity side wall of the box body, a screw rod is arranged between the mounting frames, a first motor is arranged on one side of the mounting frame, and the output end of the first motor is connected to the screw rod, a slider is arranged on the surface of the screw rod, a second motor is arranged on one side of the slider, and a cleaning roller is arranged on the output end of the second motor;

[0013] The mounting plates are arranged on both sides of the box body, and a blowing mechanism is arranged on one mounting plate, an air inlet pipe is arranged on one side of the blowing mechanism, and the other end of the blowing mechanism extends to the inner cavity of the box body and is provided with an air blowing port, and an exhaust mechanism is arranged on the other mounting plate, an exhaust pipe is arranged on one side of the exhaust mechanism, and the other side of the exhaust mechanism extends to the inner cavity of the box body and is provided with an air intake port.

[0014] As a preferred solution of the SEM sample stage dust blowing device described in the utility model, wherein: the bottom of the supporting footrest is provided with an anti-skid pad, and the surface of the anti-skid pad is provided with anti-skid convex patterns.

[0015] As a preferred solution of the SEM sample stage floating dust blowing device described in the utility model, wherein: the front surface of the box door is provided with a door handle and an observation window.

[0016] As a preferred solution of the SEM sample stage dust blowing device described in the utility model, a positioning mechanism is provided on the positioning seat.

[0017] As a preferred solution of the SEM sample stage dust blowing device described in the utility model, wherein: the cleaning roller is located above the positioning seat.

[0018] As a preferred solution of the SEM sample stage floating dust blowing device described in the utility model, one end of the air inlet pipe is connected to a negative ion inert gas storage tank.

[0019] As a preferred solution of the SEM sample stage dust cleaning device described in the utility model, one end of the exhaust pipe is connected to the exhaust gas collection box.

[0020] Compared with the prior art, the beneficial effects of the utility model are: through the cooperation of the mounting frame, the screw rod, the first motor and the slider, the cleaning roller can be conveniently driven to move left and right, and through the second motor, the cleaning roller can be conveniently driven to rotate, and in the process of moving and rotating the cleaning roller, the surface of the workpiece is wiped, and dust can be prevented from adhering to the surface of the workpiece; in addition, the blowing mechanism and the blowing port are first used to blow negative ion inert gas to the workpiece to remove most of the floating dust, and the exhaust mechanism and the suction port are used to continuously extract the gas inside the box together with the floating dust, which helps to improve the dust removal quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solution of the implementation of the utility model, the utility model will be described in detail below in combination with the drawings and detailed implementation. Obviously, the drawings described below are only some implementations of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0022] Figure 1 It is a schematic diagram of the structure of the utility model;

[0023] Figure 2 This is a schematic diagram of the internal structure of the utility model;

[0024] Figure 3 It is a schematic diagram of the internal top view structure of the utility model.

[0025] In the figure; 100 base, 110 supporting foot frame, 120 box body, 130 box door, 140 observation window, 150 positioning seat, 200 mounting frame, 210 screw rod, 220 first motor, 230 slider, 240 second motor, 250 cleaning roller, 300 mounting plate, 310 blowing mechanism, 320 air inlet pipe, 330 blowing port, 340 exhaust mechanism, 350 exhaust pipe, 360 air intake port. DETAILED DESCRIPTION

[0026] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

[0027] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific implementation methods disclosed below.

[0028] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the implementation of the present invention, for the sake of convenience, the cross-sectional diagram showing the device structure will not be partially enlarged according to the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0029] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0030] The utility model provides the following technical solutions: a SEM sample stage dust blowing device, during use, can first wipe the surface of the workpiece, and then blow air to remove dust from the workpiece surface, which can prevent floating dust from adhering to the workpiece surface and help improve the dust removal quality;

[0031] Figures 1 to 3 The structure diagram of an embodiment of a SEM sample stage dust blowing device of the utility model is shown, and the main part thereof includes a base 100, a mounting frame 200 and a mounting plate 300;

[0032] Please refer again Figures 1 to 3 : Supporting legs 110 are installed at the four corners of the bottom of the base 100, and a non-slip pad is bonded to the bottom of the supporting legs 110, and the surface of the non-slip pad is provided with non-slip convex patterns, a box body 120 is installed on the top of the base 100, a box door 130 is installed on the front surface of the box body 120, a door handle and an observation window 140 are installed on the front surface of the box door 130, a positioning seat 150 is installed at the bottom of the inner cavity of the box body 120, and a positioning mechanism is installed on the positioning seat 150, further, the base 100 and the supporting legs 110 are used to support the box body 120, the box body 120 carries the mounting frame 200 and the mounting plate 300, the box door 130 is used to seal the box body 120, and the observation window 140 is used to facilitate observation;

[0033] Please refer again Figures 1 to 3 : The mounting frame 200 is mounted on the inner cavity side wall of the box body 120, a screw rod 210 is installed between the mounting frames 200, a first motor 220 is installed on one side of the mounting frame 200, and the output end of the first motor 220 is connected to the screw rod 210, a slider 230 is installed on the surface of the screw rod 210, a second motor 240 is installed on one side of the slider 230, a cleaning roller 250 is installed on the output end of the second motor 240, and the cleaning roller 250 is located above the positioning seat 150. Further, the mounting frame 200, the screw rod 210, the first motor 220 and the slider 230 are used to drive the cleaning roller 250 to move left and right, the second motor 240 is used to drive the cleaning roller 250 to rotate, and the cleaning roller 250 is used to wipe and clean the surface of the workpiece;

[0034] Please refer again Figures 1 to 3 : The mounting plate 300 is mounted on both sides of the box body 120, and a blowing mechanism 310 is mounted on one side of the mounting plate 300, and an air inlet pipe 320 is mounted on one side of the blowing mechanism 310, and the other end of the blowing mechanism 310 extends to the inner cavity of the box body 120 and is equipped with a blowing port 330, and an exhaust mechanism 340 is mounted on the other side of the mounting plate 300, and an exhaust pipe 350 is mounted on one side of the exhaust mechanism 340, and the other side of the exhaust mechanism 340 extends to the inner cavity of the box body 120 and is equipped with an air intake port 360, one end of the air inlet pipe 320 is connected to the negative ion inert gas storage tank, and one end of the exhaust pipe 350 is connected to the exhaust gas collection box, further, the blowing mechanism 310, the air inlet pipe 320 and the air outlet 330 are used to blow negative ion inert gas to the workpiece to remove most of the floating dust, and the exhaust mechanism 340, the air intake port 360 and the exhaust pipe 350 are used to continuously extract the gas inside the box body 120 together with the floating dust.

[0035] Working principle: During the use of the utility model, the cleaning roller 250 is conveniently driven to move left and right through the cooperation of the mounting frame 200, the screw rod 210, the first motor 220 and the slider 230, and the cleaning roller 250 is conveniently driven to rotate through the second motor 240. During the movement and rotation of the cleaning roller 250, the surface of the workpiece is wiped to prevent dust from adhering to the surface of the workpiece. In addition, the blowing mechanism 310 and the blowing port 330 are first used to blow negative ion inert gas to the workpiece to remove most of the floating dust, and the exhaust mechanism 340 and the suction port 360 are used to continuously extract the gas inside the box 120 together with the floating dust, which helps to improve the dust removal quality.

[0036] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A SEM sample stage dust blowing device, characterized in that: It comprises a base (100), a mounting frame (200) and a mounting plate (300); in, The four corners of the bottom of the base (100) are provided with supporting legs (110), the top of the base (100) is provided with a box body (120), the front surface of the box body (120) is provided with a box door (130), and the bottom of the inner cavity of the box body (120) is provided with a positioning seat (150); The mounting frame (200) is arranged on the inner cavity side wall of the box body (120), a screw rod (210) is arranged between the mounting frames (200), a first motor (220) is arranged on one side of the mounting frame (200), and the output end of the first motor (220) is connected to the screw rod (210), a slider (230) is arranged on the surface of the screw rod (210), a second motor (240) is arranged on one side of the slider (230), and a cleaning roller (250) is arranged at the output end of the second motor (240); The mounting plate (300) is arranged on both sides of the box body (120); a blowing mechanism (310) is arranged on one side of the mounting plate (300); an air inlet pipe (320) is arranged on one side of the blowing mechanism (310); the other end of the blowing mechanism (310) extends to the inner cavity of the box body (120) and is provided with a blowing port (330); and a suction mechanism (340) is arranged on the other side of the mounting plate (300); an exhaust pipe (350) is arranged on one side of the suction mechanism (340); and the other side of the suction mechanism (340) extends to the inner cavity of the box body (120) and is provided with an air intake port (360).

2. The SEM sample stage dust blowing device according to claim 1, characterized in that: The bottom of the supporting foot frame (110) is provided with an anti-skid pad, and the surface of the anti-skid pad is provided with anti-skid convex patterns.

3. The SEM sample stage dust blowing device according to claim 1, characterized in that: The front surface of the box door (130) is provided with a door handle and an observation window (140).

4. The SEM sample stage dust blowing device according to claim 1, characterized in that: The positioning seat (150) is provided with a positioning mechanism.

5. The SEM sample stage dust blowing device according to claim 1, characterized in that: The cleaning roller (250) is located above the positioning seat (150).

6. The SEM sample stage dust blowing device according to claim 1, characterized in that: One end of the air inlet pipe (320) is connected to a negative ion inert gas storage tank.

7. The SEM sample stage dust blowing device according to claim 1, characterized in that: One end of the exhaust pipe (350) is connected to an exhaust gas collecting box.

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