Auxiliary mechanism for quartz boat polishing

Abstract

The utility model provides an auxiliary mechanism for quartz boat polishing, which comprises a machine frame, a polishing mechanism is arranged on the machine frame, the polishing mechanism comprises a polishing wheel, and the auxiliary mechanism is characterized in that the machine frame is connected with one end of a multi-section mechanical arm, the other end of the multi-section mechanical arm is connected with a working frame through a connecting handle, and the other end of the multi-section mechanical arm is connected with the working frame. One end of the working frame is connected with a fixed cross rod, the other end of the working frame is provided with a movable cross rod, the movable cross rod is connected with a driving air cylinder capable of enabling the movable cross rod to move back and forth, clamping strips are fixed on the movable cross rod and the fixed cross rod, one of the clamping strips is provided with a concave part, and the other clamping strip is provided with a convex part. Wherein the other clamping strip is provided with a convex part matched with the concave part, and the convex part is provided with a non-slip mat.

Description

Technical Field

[0001] The utility model belongs to the technical field of machinery and relates to an auxiliary mechanism for polishing a quartz boat. Background Art

[0002] Wafer refers to the silicon wafer used in the manufacture of silicon semiconductor integrated circuits. It is round in shape and can be processed into various circuit component structures on the silicon wafer to become an IC product with specific electrical functions. The diffusion process in the wafer manufacturing process requires the wafer to be placed in a quartz boat, and the quartz boat and the wafer are placed in a diffusion furnace for related production processes. During the production process of the quartz boat, after welding, both sides of the quartz boat need to be polished. In the prior art, the operator holds the quartz boat in his hand and moves it to the rotating polishing wheel for operation, which is inconvenient. Therefore, it is necessary to design an auxiliary mechanism for polishing the quartz boat. Summary of the invention

[0003] The utility model aims to solve the above problems in the prior art and proposes an auxiliary mechanism for polishing a quartz boat.

[0004] The purpose of the utility model can be achieved through the following technical solutions: an auxiliary mechanism for polishing a quartz boat, comprising a frame, a polishing mechanism on the frame, and the polishing mechanism including a polishing wheel, characterized in that the frame is connected to one end of a multi-section mechanical arm, the other end of the multi-section mechanical arm is connected to a working frame through a connecting handle, one end of the working frame is connected to a fixed cross bar, and the other end of the working frame is provided with a movable cross bar, the movable cross bar is connected to a driving cylinder that can make it move back and forth, the movable cross bar and the fixed cross bar are both fixed with clamping bars, one of which has a recessed portion, and the other clamping bar has a convex portion that matches the recessed portion, and an anti-slip pad is installed on the convex portion.

[0005] A guide rail is horizontally installed at the other end of the working frame, a slider is slidably connected to the guide rail, and the movable cross bar is connected to the slider.

[0006] A placing table is also installed on the frame, and the placing table has a placing groove for vertically placing the quartz boat.

[0007] Both sides of the working frame are provided with gripping handles.

[0008] The polishing mechanism also includes a machine base, a main shaft and a power motor. The machine base is fixed on the frame, the main shaft is vertically rotatably installed on the machine base, the upper end of the main shaft is connected to the polishing wheel, the lower end of the main shaft is connected to the first pulley, the power motor is installed on the machine base, the output shaft of the power motor is vertically downward, the output shaft end of the power motor is connected to the second pulley, and a belt is provided between the second pulley and the first pulley.

[0009] A protective shell is also installed on the machine base, a dust hood is installed in the protective shell, and the dust hood is connected to an external dust collector through a pipeline.

[0010] An electric control box is also installed on the placement table, and the power motor and the driving cylinder are electrically connected to the electric control box through lines.

[0011] Compared with the prior art, the auxiliary mechanism for polishing a quartz boat has the following advantages:

[0012] In the utility model, the quartz boat is clamped by the clamping bar, and with the cooperation of the multi-section mechanical arm, it is convenient to move it to the polishing wheel for polishing, so that it is not necessary to directly hold the quartz boat manually during polishing, and the operation is convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the plane structure of the utility model;

[0014] Figure 2 This is a schematic diagram of the three-dimensional structure of the utility model with the removed part Figure 1 ;

[0015] Figure 3 This is a schematic diagram of the three-dimensional structure of the utility model with the removed part Figure 2 ;

[0016] Figure 4 It is a schematic diagram of the planar structure of the utility model with the removed part;

[0017] Figure 5 It is a three-dimensional structural schematic diagram of the quartz boat in the utility model;

[0018] In the figure, 1. frame; 2. multi-section robotic arm; 3. electric control box; 4. placement table; 4a. placement slot; 5. polishing wheel; 6. working frame; 7. connecting handle; 8. driving cylinder; 9. movable cross bar; 10. slider; 11. guide rail; 12. holding handle; 13. fixed cross bar; 14. clamping strip; 14a. recess; 14b. convex part; 15. anti-slip pad; 16. machine base; 17. protective shell; 18. main shaft; 19. pulley one; 20. belt; 21. pulley two; 22. power motor; 23. dust hood; 24. pipeline. DETAILED DESCRIPTION

[0019] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0020] like Figure 1-Figure 4As shown, the auxiliary mechanism for polishing a quartz boat comprises a frame 1, on which a polishing mechanism is provided, the polishing mechanism comprises a polishing wheel 5, and the polishing wheel 5 is an existing product; the frame 1 is connected to one end of a multi-section mechanical arm 2, and the other end of the multi-section mechanical arm 2 is connected to a working frame 6 through a connecting handle 7, and the multi-section mechanical arm 2 is an existing product; one end of the working frame 6 is connected to a fixed cross bar 13, and the other end of the working frame 6 is provided with a movable cross bar 9, and the movable cross bar 9 is connected to a driving cylinder 8 that can make it move back and forth, and clamping bars 14 are fixed on the movable cross bar 9 and the fixed cross bar 13, one of the clamping bars 14 has a recessed portion 14a, and the other clamping bar 14 has a convex portion 14b that matches the recessed portion 14a, and an anti-slip pad 15 is installed on the convex portion 14b.

[0021] A guide rail 11 is horizontally installed at the other end of the working frame 6, and a slider 10 is slidably connected to the guide rail 11. The movable cross bar 9 is connected to the slider 10. With this structure, with the cooperation of the guide rail 11 and the slider 10, the movement of the movable cross bar 9 can be made more stable and reliable.

[0022] A placement table 4 is also installed on the frame 1. The placement table 4 has a placement groove 4a for vertically placing the quartz boat. With this structure, during the polishing operation, the quartz boat can be vertically placed in the placement groove 4a in advance.

[0023] There are gripping handles 12 on both sides of the working frame 6. With this structure, the entire working frame 6 can be moved by gripping the handles 12.

[0024] The polishing mechanism also includes a machine base 16, a main shaft 18 and a power motor 22. The machine base 16 is fixed on the frame 1, and the main shaft 18 is vertically rotatably installed on the machine base 16. The upper end of the main shaft 18 is connected to the polishing wheel 5, and the lower end of the main shaft 18 is connected to the pulley 19. The power motor 22 is installed on the machine base 16, and the output shaft of the power motor 22 is vertically downward. The output shaft end of the power motor 22 is connected to the pulley 21, and a belt 20 is provided between the pulley 21 and the pulley 19. With this structure, the power motor 22 drives the pulley 21 to rotate, the pulley 21 drives the pulley 19 to rotate through the belt 20, the pulley 19 drives the main shaft 18 to rotate, and the main shaft 18 drives the polishing wheel 5 to rotate.

[0025] A protective shell 17 is also installed on the machine base 16, and a dust hood 23 is installed in the protective shell 17. The dust hood 23 is connected to an external dust collector through a pipeline 24. With this structure, the dust generated by polishing can be sucked away through the dust hood 23.

[0026] An electric control box 3 is also installed on the placement table 4. The power motor 22 and the driving cylinder 8 are electrically connected to the electric control box 3 through lines. This adopts the existing technology and its circuits do not need to be redesigned.

[0027] In the utility model, the quartz boat is vertically placed on the placement table 4, the working frame 6 is moved to the placement table 4, the driving cylinder 8 is controlled to move, the quartz boat is clamped by the clamping bar 14, and the quartz boat is moved to the polishing wheel 5 for polishing by the gripping handle 12 under the cooperation of the multi-section mechanical arm 2. In this process, there is no need for manual direct holding of the quartz boat. In this embodiment, the structure of the quartz boat is as follows Figure 5 shown.

[0028] The above components are all common standard parts or components known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or conventional experimental methods.

[0029] The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art may make various modifications or additions to the specific embodiments described or replace them in similar ways, but they will not deviate from the spirit of the present invention or exceed the scope defined by the appended claims.

Claims

1. A quartz boat polishing auxiliary mechanism, comprising a frame (1), the frame (1) having a polishing mechanism, the polishing mechanism comprising a polishing wheel (5), characterized in that: The frame (1) is connected to one end of a multi-section mechanical arm (2), and the other end of the multi-section mechanical arm (2) is connected to a working frame (6) via a connecting handle (7). One end of the working frame (6) is connected to a fixed cross bar (13), and the other end of the working frame (6) is provided with a movable cross bar (9). The movable cross bar (9) is connected to a driving cylinder (8) that enables it to move back and forth. Clamping bars (14) are fixed to the movable cross bar (9) and the fixed cross bar (13), one of the clamping bars (14) has a concave portion (14a), and the other clamping bar (14) has a convex portion (14b) that matches the concave portion (14a), and an anti-slip pad (15) is installed on the convex portion (14b).

2. The auxiliary mechanism for polishing a quartz boat according to claim 1, characterized in that: A guide rail (11) is horizontally mounted on the other end of the working frame (6), a slider (10) is slidably connected to the guide rail (11), and the movable cross bar (9) is connected to the slider (10).

3. The auxiliary mechanism for polishing a quartz boat according to claim 1, characterized in that: A placement table (4) is also installed on the frame (1), and the placement table (4) has a placement groove (4a) for vertically placing the quartz boat.

4. The auxiliary mechanism for polishing a quartz boat according to claim 1, characterized in that: Both sides of the working frame (6) are provided with gripping handles (12).

5. The auxiliary mechanism for polishing a quartz boat according to claim 3, characterized in that: The polishing mechanism further comprises a machine base (16), a main shaft (18) and a power motor (22); the machine base (16) is fixed on the frame (1); the main shaft (18) is vertically rotatably mounted on the machine base (16); the upper end of the main shaft (18) is connected to the polishing wheel (5); the lower end of the main shaft (18) is connected to a first pulley (19); the power motor (22) is mounted on the machine base (16); the output shaft of the power motor (22) is vertically downward; the end of the output shaft of the power motor (22) is connected to a second pulley (21); and a belt (20) is provided between the second pulley (21) and the first pulley (19).

6. The auxiliary mechanism for polishing a quartz boat according to claim 5, characterized in that: A protective shell (17) is also installed on the machine base (16), a dust hood (23) is installed inside the protective shell (17), and the dust hood (23) is connected to an external dust collector via a pipeline (24).

7. The auxiliary mechanism for polishing a quartz boat according to claim 6, characterized in that: An electric control box (3) is also installed on the placement table (4), and the power motor (22) and the driving cylinder (8) are both electrically connected to the electric control box (3) via lines.

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