Vacuum coating machine with cleaning function

Abstract

The vacuum coating machine with the cleaning function comprises a coating machine body and a sealing cover, the bottom end of one side of the coating machine body is fixedly connected with an air suction pipe, the bottom end of the coating machine body is fixedly connected with a base, an air suction pump is fixedly installed in the base, and the air suction pump is fixedly connected with the sealing cover. And one side of the sucking pump is fixedly connected with a first exhaust pipe, the other side of the sucking pump is fixedly connected with a sucking pipe, and one side of the sucking pipe penetrates through the interior of one side of the base and is fixedly connected with one side of the coating machine body. According to the vacuum coating machine with the cleaning function, parts such as the fixed seat are arranged, an external pipe is communicated with a water injection pipe through the water injection pipe, clear water is injected into a water storage pipe, and the clear water can be sprayed into the coating machine body through nozzles distributed at equal intervals, so that the interior of the coating machine body is conveniently cleaned; the problem that the interior of the coating machine body is inconvenient to clean is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating machines, in particular to a vacuum coating machine with a cleaning function. Background Art

[0002] A vacuum coating machine is a coating equipment that needs to be operated under a relatively high vacuum degree. It includes vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering and other types. Its working principle is to place the substrate and target material into a vacuum chamber and form a thin film through evaporation and sputtering processes.

[0003] According to the design of the existing vacuum coating machine with a cleaning function, it is not convenient to clean the inside of the coating machine body after use, which makes the later internal cleaning more troublesome.

[0004] Now, a new vacuum coating machine with cleaning function is proposed to solve the above problems. Utility Model Content

[0005] The utility model aims to provide a vacuum coating machine with a cleaning function, so as to solve the problem in the above-mentioned background technology that it is inconvenient to clean the inside of the coating machine body.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vacuum coating machine with a cleaning function, comprising a coating machine body and a sealing cover, wherein the bottom end of one side of the coating machine body is fixedly connected with an exhaust pipe, the bottom end of the coating machine body is fixedly connected with a base, an exhaust pump is fixedly installed inside the base, one side of the exhaust pump is fixedly connected with a first exhaust pipe, the other side of the exhaust pump is fixedly connected with an exhaust pipe, one side of the exhaust pipe passes through the interior of one side of the base and is fixedly connected to one side of the coating machine body, a first valve is fixedly installed on the outside of the exhaust pipe, and one end of the coating machine body is movable A sealing cover is hingedly connected, one end of the sealing cover is provided with a reserved groove, one side of one end of the coating machine body is fixedly connected with a connecting block, the top of the coating machine body is fixedly connected with a fixed shell, the top of the fixed shell is fixedly installed with a vacuum pump, one side of the vacuum pump is fixedly connected with a connecting pipe, the other side of the vacuum pump is fixedly connected with a second exhaust pipe, the outside of the second exhaust pipe is fixedly installed with a second valve, the inside of the fixed shell is provided with a water storage pipe, one side of the top of the water storage pipe is fixedly connected with a water injection pipe, the outside of the water storage pipe is sleeved with a fixed seat, and the bottom of the water storage pipe is fixedly connected with a nozzle.

[0007] Preferably, eleven groups of nozzles are provided, and the nozzles are evenly spaced and distributed at the bottom end of the water storage pipe.

[0008] Preferably, one end of the sealing cover is fixedly connected to a connecting seat, and the outside of the connecting seat is fixedly connected to a sealing rubber pad.

[0009] Preferably, a fixing buckle is movably hinged at the top end of the connecting block, and the fixing buckle passes through the interior of the reserved groove and is detachably clamped on the exterior of the fixing block.

[0010] Preferably, a protrusion is fixedly connected to one side of the base, a fixing frame is clamped on the outside of the protrusion, and an exhaust groove is provided on one side of the protrusion.

[0011] Preferably, a filter screen is fixedly connected between the fixing frames, and the fixing frames are detachably snapped onto the outside of the filter screen.

[0012] Preferably, the top end of the fixing seat is fixedly connected to the top end inside the fixing shell.

[0013] Preferably, the bottom end of the second exhaust pipe is connected to the interior of the fixed shell, and the fixed shell is connected to the interior of the coating machine body.

[0014] Compared with the prior art, the utility model has the following beneficial effects: the vacuum coating machine with cleaning function not only facilitates cleaning of the interior of the coating machine body and facilitates quick access, but also facilitates filtering of the exhausted gas and replacement of the filter screen;

[0015] (1) A fixing seat, a water storage pipe, a second exhaust pipe, a second valve, a connecting pipe, a water injection pipe, and a nozzle are provided. The external pipe is connected to the water injection pipe by using the water injection pipe, and clean water is injected into the water storage pipe. The clean water can be sprayed into the interior of the coating machine body by using nozzles distributed at equal intervals, thereby facilitating the cleaning of the interior of the coating machine body;

[0016] (2) By providing a sealing cover, a fixing block, a fixing buckle, a connecting block, a reserved groove, a connecting seat, and a sealing rubber pad, when taking out the material, the fixing buckle is opened, and the fixing block can be separated from the fixing block, and then the fixing buckle is turned over to be flush with the connecting block, and then the sealing cover is opened, and then the connecting seat is separated from the inside of the coating machine body, making it more convenient and easy to take out;

[0017] (3) By providing a base, a protrusion, a fixing frame, a filter screen, and an exhaust groove, the fixing frame can be opened when exhausting, and the filter screen between the fixing frames can be used to filter the gas discharged from the exhaust groove, so that the exhausted gas is clean and non-toxic. When the filter screen needs to be replaced later, the fixing frame can be directly removed and replaced, making the replacement more convenient and applicable. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a front view cross-sectional structural schematic diagram of the utility model;

[0019] Figure 2It is a side view structural diagram of the connection method between the fixing frame and the protrusion of the utility model;

[0020] Figure 3 This is a front view structural diagram of the connection method between the sealing cover and the coating machine body of the utility model;

[0021] Figure 4 It is a bottom view structural schematic diagram of the connection mode between the water storage pipe and the fixed shell of the utility model.

[0022] In the figure: 1. Coating machine body; 2. Sealing cover; 3. Fixing block; 4. Fixing buckle; 5. Connecting block; 6. Reserved groove; 7. Connecting seat; 8. Sealing rubber pad; 9. Base; 10. Bump; 11. Fixing frame; 12. Filter; 13. First exhaust pipe; 14. Vacuum pump; 15. Exhaust pipe; 16. First valve; 17. Fixing shell; 18. Fixing seat; 19. Water storage pipe; 20. Second exhaust pipe; 21. Second valve; 22. Vacuum pump; 23. Connecting pipe; 24. Water injection pipe; 25. Nozzle; 26. Exhaust groove. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1: Please refer to Figure 1-4A vacuum coating machine with a cleaning function comprises a coating machine body 1 and a sealing cover 2, a vacuum pipe 15 is fixedly connected to the bottom end of one side of the coating machine body 1, a base 9 is fixedly connected to the bottom end of the coating machine body 1, a vacuum pump 14 is fixedly installed inside the base 9, a first exhaust pipe 13 is fixedly connected to one side of the vacuum pump 14, a vacuum pipe 15 is fixedly connected to the other side of the vacuum pump 14, one side of the vacuum pipe 15 passes through the inside of one side of the base 9 and is fixedly connected to one side of the coating machine body 1, a first valve 16 is fixedly installed outside the vacuum pipe 15, a sealing cover 2 is movably hinged at one end of the coating machine body 1, and a first valve 16 is fixedly installed on the outside of the vacuum pipe 15. A reserved groove 6 is provided at one end, a connecting block 5 is fixedly connected to one side of one end of the coating machine body 1, a fixed shell 17 is fixedly connected to the top of the coating machine body 1, a vacuum pump 22 is fixedly installed on the top of the fixed shell 17, a connecting pipe 23 is fixedly connected to one side of the vacuum pump 22, a second exhaust pipe 20 is fixedly connected to the other side of the vacuum pump 22, a second valve 21 is fixedly installed on the outside of the second exhaust pipe 20, a water storage pipe 19 is provided inside the fixed shell 17, a water injection pipe 24 is fixedly connected to one side of the top of the water storage pipe 19, a fixed seat 18 is sleeved on the outside of the water storage pipe 19, and a nozzle 25 is fixedly connected to the bottom of the water storage pipe 19;

[0025] There are eleven groups of nozzles 25, which are evenly spaced at the bottom end of the water storage pipe 19; the top end of the fixing seat 18 is fixedly connected to the top end of the inside of the fixing shell 17; the bottom end of the second exhaust pipe 20 is connected to the inside of the fixing shell 17, and the fixing shell 17 is connected to the inside of the coating machine body 1;

[0026] Specifically, Figure 1 and Figure 4 As shown, the external pipe is connected to the water injection pipe 24 by using the water injection pipe 24, and clean water is injected into the water storage pipe 19. The clean water can be sprayed into the interior of the coating machine body 1 by using the nozzles 25 distributed at equal intervals, thereby facilitating the cleaning of the interior of the coating machine body 1.

[0027] Embodiment 2: One end of the sealing cover 2 is fixedly connected to a connecting seat 7, and the outside of the connecting seat 7 is fixedly connected to a sealing rubber pad 8; the top of the connecting block 5 is movably hinged with a fixing buckle 4, which passes through the inside of the reserved groove 6 and is snap-fitted to the outside of the fixing block 3 for detachable operation;

[0028] Specifically, Figure 1 and Figure 3 As shown, when taking materials, open the fixing buckle 4, then the fixing buckle 4 can be separated from the fixing block 3, then flip the fixing buckle 4 to be flush with the connecting block 5, then open the sealing cover 2, then the connecting seat 7 is separated from the inside of the coating machine body 1, making it more convenient and easy to take.

[0029] Embodiment 3: A protrusion 10 is fixedly connected to one side of the base 9, a fixing frame 11 is clamped to the outside of the protrusion 10, and an exhaust groove 26 is provided on one side of the protrusion 10; a filter screen 12 is fixedly connected between the fixing frames 11, and the fixing frame 11 is clamped to the outside of the filter screen 12 and can be detached;

[0030] Specifically, Figure 1 and Figure 2 As shown, when exhausting, the fixed frame 11 can be opened, and the filter screen 12 between the fixed frames 11 can be used to filter the gas discharged from the exhaust groove 26, so that the exhausted gas is clean and non-toxic. When the filter screen 12 needs to be replaced later, the fixed frame 11 can be directly removed and replaced, which makes replacement more convenient and applicable.

[0031] Working principle: When the utility model is in use, first, the workpiece is placed into the interior of the coating machine body 1. When exhausting, the fixed frame 11 can be opened, and the filter screen 12 between the fixed frames 11 can be used to filter the gas discharged from the exhaust groove 26, so that the exhausted gas is clean and non-toxic. When the filter screen 12 needs to be replaced, the fixed frame 11 can be directly removed and replaced. Then, when taking materials, the fixing buckle 4 is opened. At this time, the fixing buckle 4 can be disengaged from the fixing block 3, and then the fixing buckle 4 is turned over to be flush with the connecting block 5, and then the sealing cover 2 is opened. At this time, the connecting seat 7 is disengaged from the interior of the coating machine body 1. Finally, the water injection pipe 24 is used to connect the external pipe with the water injection pipe 24, and clean water is injected into the water storage pipe 19. The clean water can be sprayed into the interior of the coating machine body 1 using the nozzles 25 distributed at equal intervals, so as to facilitate the cleaning of the interior of the coating machine body 1.

[0032] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A vacuum coating machine with a cleaning function, comprising a coating machine body (1) and a sealing cover (2), characterized in that: The bottom end of one side of the coating machine body (1) is fixedly connected to an exhaust pipe (15), the bottom end of the coating machine body (1) is fixedly connected to a base (9), an exhaust pump (14) is fixedly installed inside the base (9), one side of the exhaust pump (14) is fixedly connected to a first exhaust pipe (13), the other side of the exhaust pump (14) is fixedly connected to an exhaust pipe (15), one side of the exhaust pipe (15) passes through the inside of one side of the base (9) and is fixedly connected to one side of the coating machine body (1), a first valve (16) is fixedly installed outside the exhaust pipe (15), one end of the coating machine body (1) is movably hinged with a sealing cover (2), one end of the sealing cover (2) is provided with a reserved groove (6), the coating machine body (1) A connecting block (5) is fixedly connected to one side of one end, a fixed shell (17) is fixedly connected to the top of the coating machine body (1), a vacuum pump (22) is fixedly installed on the top of the fixed shell (17), a connecting pipe (23) is fixedly connected to one side of the vacuum pump (22), a second exhaust pipe (20) is fixedly connected to the other side of the vacuum pump (22), a second valve (21) is fixedly installed on the outside of the second exhaust pipe (20), a water storage pipe (19) is arranged inside the fixed shell (17), a water injection pipe (24) is fixedly connected to one side of the top of the water storage pipe (19), a fixed seat (18) is sleeved on the outside of the water storage pipe (19), and a nozzle (25) is fixedly connected to the bottom of the water storage pipe (19).

2. The vacuum coating machine with cleaning function according to claim 1, characterized in that: Eleven groups of the nozzles (25) are provided, and the nozzles (25) are distributed at equal intervals at the bottom end of the water storage pipe (19).

3. The vacuum coating machine with cleaning function according to claim 1, characterized in that: One end of the sealing cover (2) is fixedly connected to a connecting seat (7), and the outside of the connecting seat (7) is fixedly connected to a sealing rubber pad (8).

4. The vacuum coating machine with cleaning function according to claim 1, characterized in that: A fixing buckle (4) is movably hinged at the top end of the connection block (5); the fixing buckle (4) penetrates the interior of the reserved groove (6) and is detachably clamped on the exterior of the fixing block (3).

5. The vacuum coating machine with cleaning function according to claim 1, characterized in that: A protrusion (10) is fixedly connected to one side of the base (9), a fixing frame (11) is clamped on the outside of the protrusion (10), and an exhaust groove (26) is provided on one side of the protrusion (10).

6. The vacuum coating machine with cleaning function according to claim 5, characterized in that: A filter screen (12) is fixedly connected between the fixing frames (11), and the fixing frames (11) are detachably snap-fitted to the outside of the filter screen (12).

7. The vacuum coating machine with cleaning function according to claim 1, characterized in that: The top end of the fixing seat (18) is fixedly connected to the top end inside the fixing shell (17).

8. The vacuum coating machine with cleaning function according to claim 1, characterized in that: The bottom end of the second exhaust pipe (20) is connected to the interior of the fixed shell (17), and the fixed shell (17) is connected to the interior of the coating machine body (1).

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