Single crystal furnace water-cooling heat shield with hydrophilic layer heat exchange structure
By introducing a hydrophilic layer structure into the water-cooling and cooling liquid, the problem of low heat exchange efficiency between the inner shell and the cooling liquid is solved, the heat exchange effect is improved, the production efficiency and product quality of the single crystal furnace are improved, and the cost and Corrosion risk.
Patent Information
- Application Number
- CN202420907506.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-28
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-04-28
AI Technical Summary
The existing water-cooling and hot-shower screens have low heat exchange efficiency between the inner shell and the cooling liquid under special ambient temperatures, resulting in poor heat exchange effect and may even be reduced.
The annular inner shell and annular outer shell structure are adopted with a hydrophilic layer. The hydrophilic layer material is the same or more hydrophilic materials, with a thickness of ≥0.01mm and a roughness range of Ra0-3.2. It is chemically deposition and ion sputtering. Made by injection, physical compounding or physical smelting, enhance the hydrophilicity of the inner shell to the cooling liquid, reduce contact angle, and increase the heat exchange area.
It improves the heat exchange efficiency between the inner shell and the cooling liquid, improves the production efficiency and quality of the single crystal furnace, reduces the production cost, and reduces the corrosion effect of the cooling liquid on the inner shell material, and improves the durability of the product.
Smart Images
Figure CN222294255U_ABST
Abstract
Description
[Technical field]
[0001] The utility model relates to the technical field of single crystal furnace auxiliary equipment, in particular to a single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure. [Background technology]
[0002] As an important component of the single crystal furnace, the water-cooled heat shield is mainly used to control and adjust the temperature distribution during the growth of single crystal silicon to ensure the growth rate and quality of single crystal silicon. The choice of water-cooled heat shield shell material has a significant impact on the heat exchange efficiency and overall performance of the product.
[0003] Most of the existing water-cooled heat shield shells are made of stainless steel, and copper alloys or other materials with higher thermal conductivity than stainless steel are used as inner shell materials. The heat exchange effect of the product is improved by improving the heat exchange efficiency between the inner shell of the water-cooled heat shield and the single crystal furnace. However, under special ambient temperatures, simply improving the thermal conductivity of the product shell material cannot improve the heat exchange effect of the product, and may even reduce its heat exchange effect. This is because during the heat exchange process between the water-cooled heat shield and the single crystal furnace, there is a large temperature difference between the inner shell and the cooling liquid, which will affect the heat exchange efficiency between the inner shell and the cooling liquid. [Contents of the utility model]
[0004] The utility model aims to provide a single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure to solve the problem of low heat exchange efficiency between the inner shell and the cooling liquid.
[0005] The utility model is realized by the following technical solutions:
[0006] A water-cooled heat shield for a single crystal furnace with a hydrophilic layer heat exchange structure comprises a working chamber, the working chamber is formed by an annular inner shell for transferring heat, an annular outer shell is arranged outside the annular inner shell, the annular outer shell and the annular inner shell form a heat exchange space for exchanging heat with the single crystal furnace, and a hydrophilic layer is arranged between the annular inner shell and the heat exchange space for improving the heat exchange efficiency.
[0007] As described above, in the single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure, the material of the hydrophilic layer is the same or multiple hydrophilic materials.
[0008] As described above, in the single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure, the thickness of the hydrophilic layer is ≥0.01 mm.
[0009] As described above, a single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure, the roughness range of the hydrophilic layer is Ra0-3.2.
[0010] As described above, a single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure, the hydrophilic layer is made by a method of chemical deposition, ion sputtering, physical composite method, or physical smelting method.
[0011] In the single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure as described above, the shell is a cylinder with upper and lower openings, and the inner diameter of the annular inner shell gradually decreases from top to bottom and then remains unchanged.
[0012] In the single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure as described above, the cross-sectional area of the heat exchange space gradually increases from top to bottom, then gradually decreases, and then remains unchanged.
[0013] In the single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure as described above, the inner diameter of the annular shell first remains unchanged from top to bottom, then gradually decreases, and then remains unchanged.
[0014] In the water-cooled heat shield for a single crystal furnace with a hydrophilic layer heat exchange structure as described above, the material of the annular inner shell and the annular outer shell is the same or multiple metal materials.
[0015] In the water-cooled heat shield for a single crystal furnace with a hydrophilic layer heat exchange structure as described above, the working chamber is a cylinder with upper and lower openings, and liquid inlets and outlets for connecting the heat exchange space are provided on both sides of the working chamber.
[0016] Compared with the prior art, the utility model has the following advantages:
[0017] The utility model proposes a water-cooled heat shield for a single crystal furnace with a hydrophilic layer heat exchange structure. First, a hydrophilic layer is provided between the annular inner shell and the annular outer shell, and the hydrophilic layer and the annular inner shell form a composite material structure. Since there is a large temperature difference between the cooling liquid circulating in the heat exchange space and the annular inner shell, and the hydrophilicity of the annular inner shell is poor, the cooling liquid forms a layer of airflow film on the surface of the inner shell, which inhibits the heat exchange process between the inner shell and the cooling liquid to a certain extent, thereby affecting the heat exchange efficiency between the inner shell and the cooling liquid. The hydrophilic layer can improve the hydrophilicity of the inner shell to the cooling liquid, reduce the contact angle between the inner shell and the cooling liquid, increase the heat exchange area when the two are in contact, and improve the heat exchange efficiency between the inner shell and the cooling liquid, thereby improving the production efficiency and quality of the entire single crystal furnace and reducing the production cost; it can inhibit the formation of an airflow film on the surface of the inner shell, reduce the influence of the airflow film on the heat exchange efficiency between the inner shell and the cooling liquid, thereby improving the heat exchange efficiency.
[0018] Second, the hydrophilic layer is composed of the same or multiple hydrophilic materials. The diversity of the hydrophilic material selection can better meet the needs of users and product requirements, can better cooperate with different heat exchange media, and better adapt to the changing ambient temperature. The selection of a suitable hydrophilic layer can also reduce the corrosion of water or other cooling liquids on the inner shell material, thereby improving the durability of the product. Finally, according to user needs or product requirements, the appropriate hydrophilic layer material, thickness, roughness and manufacturing method can be selected to improve the hydrophilicity of the inner shell to ensure that the product has a good heat exchange effect.
[0019] The utility model of the single crystal furnace water cooling heat shield with a hydrophilic layer heat exchange structure adopts a hydrophilic layer, selects appropriate materials, thickness, and roughness according to user needs and product requirements, and selects an appropriate manufacturing method to manufacture the hydrophilic layer to improve the hydrophilicity of the annular inner shell, improve the heat exchange efficiency between the annular inner shell and the cooling liquid, thereby improving the heat exchange effect of the product. The utility model solves the problem of low heat exchange efficiency between the inner shell and the cooling liquid.
Brief Description of the Drawings
[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following briefly introduces the drawings required for describing the embodiments.
[0021] Figure 1 It is a schematic diagram of the structure of the utility model;
[0022] Figure 2 It is a top view schematic diagram of the utility model;
[0023] Figure 3 For the utility model Figure 2 Schematic diagram of the cross section at AA;
[0024] Figure 4 It is an enlarged schematic diagram of the annular inner shell and the hydrophilic layer of the utility model. [Specific implementation method]
[0025] The following is combined with Figure 1-4 , Examples 1-2 and Comparative Examples 1-3, further illustrate the utility model in detail. It should be understood that the specific embodiments described herein are only used to explain the utility model, and are not used to limit the utility model.
[0026] Embodiment 1:
[0027] Figure 1-4A water-cooled heat shield for a single crystal furnace with a hydrophilic layer heat exchange structure is shown, comprising a working chamber 1, wherein the working chamber 1 is formed by an annular inner shell 2 for transferring heat, an annular outer shell 3 is arranged outside the annular inner shell 2, and the annular outer shell 3 and the annular inner shell 2 form a heat exchange space 4 for heat exchange with the single crystal furnace, characterized in that a hydrophilic layer 5 for improving heat exchange efficiency is arranged between the annular inner shell 2 and the heat exchange space 4. The annular inner shell 2 transfers the heat generated by the single crystal furnace to the cooling liquid through the hydrophilic layer 5, and the cooling liquid then transfers the heat to the outside. By changing the structure of the shell and adopting a hydrophilic layer structure, the hydrophilicity of the inner shell surface to the cooling liquid can be improved, the contact angle between the inner shell and the cooling liquid can be reduced, so that the cooling liquid can spread on the inner shell surface, the heat exchange area when the two are in contact is increased, and the heat exchange efficiency between the inner shell and the cooling liquid is improved, thereby improving the production efficiency and quality of the entire single crystal furnace and reducing production costs.
[0028] Furthermore, the material of the hydrophilic layer 5 is the same or multiple hydrophilic materials. The hydrophilic material can be a metal or metal oxide material, a polymer material, or a carbon material, etc. It can improve the wettability of the inner shell surface, making it easier for water or other cooling liquids to spread to form a thin layer, thereby improving the heat exchange efficiency between the inner shell and the cooling liquid. The same or multiple hydrophilic materials are selected to form the hydrophilic layer, which can better meet the needs of users and product requirements, can better cooperate with different heat exchange media, and better adapt to changing ambient temperatures. In addition, due to the presence of the hydrophilic layer, the corrosion of water or other cooling liquids on the inner shell material can be reduced, thereby improving the durability of the product.
[0029] Furthermore, the hydrophilic material is a metal material of the same kind, and the metal material is tungsten. Tungsten has high thermal conductivity, high melting point, low thermal expansion coefficient and good corrosion resistance. As a hydrophilic material, its material properties are not easy to change in a high temperature environment, and it can maintain good chemical stability and good hydrophilic properties.
[0030] Furthermore, the thickness of the hydrophilic layer 5 is ≥0.01mm. Furthermore, the thickness of the hydrophilic layer 5 is 0.15-2mm. The thickness of the hydrophilic layer has a significant effect on the material properties. Hydrophilic layers of different thicknesses have different degrees of influence on the heat exchange efficiency, mechanical strength, durability and other properties of the material. Therefore, it is necessary to select a suitable hydrophilic layer thickness according to user needs, product requirements and actual application conditions. For example, a hydrophilic layer of a certain thickness can provide better wear resistance and impact resistance. The thickness of the hydrophilic layer 5 in this embodiment is 0.15mm.
[0031] Furthermore, the roughness of the hydrophilic layer 5 is in the range of Ra0-3.2. The roughness of the hydrophilic layer has a significant impact on the material properties. Hydrophilic layers of different roughness have different degrees of influence on the heat exchange efficiency, mechanical strength, anti-fouling and other properties of the material. Therefore, it is necessary to select a suitable roughness of the hydrophilic layer according to user needs, product requirements and actual application conditions. For example, a hydrophilic layer of a certain roughness can enhance the anti-fouling ability of the inner shell and reduce the dirt remaining during the liquid circulation process. The roughness of the hydrophilic layer 5 in this embodiment is Ra3.2.
[0032] Furthermore, the hydrophilic layer 5 is prepared by a method of chemical deposition, ion sputtering, physical composite method, or physical smelting method.
[0033] Furthermore, the inner diameter of the annular inner shell 2 gradually decreases from top to bottom and then remains unchanged.
[0034] Furthermore, the cross-sectional area of the heat exchange space 4 gradually increases from top to bottom, then gradually decreases, and then remains unchanged.
[0035] Furthermore, the inner diameter of the annular housing 3 from top to bottom first remains constant, then gradually decreases, and then remains constant.
[0036] Furthermore, the materials of the annular inner shell 2 and the annular outer shell 3 are the same or multiple metal materials. In this embodiment, the annular inner shell and the annular outer shell are made of the same stainless steel material. The annular inner shell and the annular outer shell can be made of the same stainless steel material or the same copper alloy material, or the annular inner shell is made of the copper alloy material and the annular outer shell is made of the stainless steel material. When multiple materials are selected for the shell, a material with a high thermal conductivity is usually selected for the annular inner shell, and a material with a low thermal conductivity is selected for the annular outer shell.
[0037] Furthermore, the working chamber 1 is a cylinder with openings at the top and the bottom, and a liquid inlet 6 and a liquid outlet 7 for communicating with the heat exchange space 4 are provided on both sides of the working chamber 1 .
[0038] When the utility model is used:
[0039] First, the cooling liquid enters the heat exchange space 4 from the liquid inlet 2 and circulates. Then, the single crystal furnace transfers the heat generated in the furnace to the cooling liquid through the annular inner shell 2 and the hydrophilic layer 7 in turn. Finally, the cooling liquid flows out from the liquid outlet 3, takes the absorbed heat out of the heat exchange space 4 and transfers it to the outside.
[0040] Embodiment 2:
[0041] The difference between Example 2 and Example 1 is that:
[0042] Furthermore, the hydrophilic material is a metal material of the same kind, and the metal material is chromium. Chromium has a high melting point, good chemical stability and corrosion resistance, and can show good hydrophilicity by treating its surface. As a hydrophilic material, it can maintain good chemical stability and good hydrophilicity in a high temperature environment.
[0043] Comparative Example 1:
[0044] The difference between Comparative Example 1 and Examples 1-2 is that:
[0045] Furthermore, no hydrophilic layer 7 is provided between the annular inner shell 2 and the annular outer shell 3 .
[0046] Furthermore, the roughness of the annular inner shell 2 is Ra3.2.
[0047] Comparative Example 2:
[0048] The difference between Comparative Example 2 and Example 1 is that:
[0049] Furthermore, no hydrophilic layer 7 is provided between the annular inner shell 2 and the annular outer shell 3 .
[0050] Comparative Example 3:
[0051] The difference between Comparative Example 3 and Example 2 is that:
[0052] Furthermore, no hydrophilic layer 7 is provided between the annular inner shell 2 and the annular outer shell 3 .
[0053] Table 1: Hydrophilic layer material conditions of Examples 1-3 and Comparative Examples 1-2
[0054] Material condition Example 1 Example 2 Comparative Example 1 Comparative Example 2 Comparative Example 3 Hydrophilic layer material Tungsten chromium none none none thickness 0.15mm 0.15mm / / / Roughness Ra 3.2 Ra 3.2 Ra 3.2 / /
[0055] The water-cooled heat shields described in Examples 1-3 and Comparative Examples 1-2 were placed on the same single crystal furnace for crystal growth testing, and the temperatures of the liquid inlet and outlet were measured. Specific test data are shown in Table 2.
[0056] Table 2: Test data of Examples 1-3 and Comparative Examples 1-2
[0057]
[0058] It can be seen from the test data in Table 2 that compared with the comparative examples 1-2 without a hydrophilic layer, the water-cooled heat shields of the embodiments 1-3 with a hydrophilic layer have a larger temperature difference between the inlet and outlet of the liquid, that is, the cooling liquid carries away more heat, and the heat exchange efficiency is significantly improved.
[0059] The utility model of the single crystal furnace water cooling heat shield with a hydrophilic layer heat exchange structure adopts a hydrophilic layer, selects appropriate materials, thickness, and roughness according to user needs and product requirements, and selects an appropriate manufacturing method to manufacture the hydrophilic layer to improve the hydrophilicity of the annular inner shell, improve the heat exchange efficiency between the annular inner shell and the cooling liquid, thereby improving the heat exchange effect of the product. The utility model solves the problem of low heat exchange efficiency between the inner shell and the cooling liquid.
[0060] The above are implementation methods provided in combination with specific content, and it is not considered that the specific implementation of the utility model is limited to these descriptions. At the same time, due to different industry names, it is not limited to the above names, nor is it limited to English names. Any method, structure, etc. similar to or identical to the method, structure, etc. of the utility model, or a number of technical deductions or replacements made on the premise of the concept of the utility model, shall be regarded as the protection scope of the utility model.
Claims
1. A water-cooled heat shield for a single crystal furnace with a hydrophilic layer heat exchange structure, comprising a working chamber (1), the working chamber (1) being formed by an annular inner shell (2) for transferring heat, an annular outer shell (3) being arranged outside the annular inner shell (2), the annular outer shell (3) and the annular inner shell (2) forming a heat exchange space (4) for heat exchange with the single crystal furnace, characterized in that: A hydrophilic layer (5) for improving heat exchange efficiency is provided between the annular inner shell (2) and the heat exchange space (4).
2. A single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure according to claim 1, characterized in that: The material of the hydrophilic layer (5) is the same or multiple hydrophilic materials.
3. The single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure according to claim 1, characterized in that: The thickness of the hydrophilic layer (5) is ≥0.01 mm.
4. The single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure according to claim 1, characterized in that: The roughness range of the hydrophilic layer (5) is Ra0-3.
2.
5. The single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure according to claim 1, characterized in that: The method for preparing the hydrophilic layer (5) is one of a chemical deposition method, an ion sputtering method, a physical composite method, and a physical smelting method.
6. The single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure according to claim 1, characterized in that: The inner diameter of the annular inner shell (2) gradually decreases from top to bottom and then remains unchanged.
7. The single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure according to claim 1, characterized in that: The cross-sectional area of the heat exchange space (4) gradually increases from top to bottom, then gradually decreases and then remains unchanged.
8. The single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure according to claim 1, characterized in that: The inner diameter of the annular housing (3) first remains constant from top to bottom, then gradually decreases and then remains constant.
9. The single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure according to claim 1, characterized in that: The annular inner shell (2) and the annular outer shell (3) are made of the same or multiple metal materials.
10. The single crystal furnace water-cooled heat shield with a hydrophilic layer heat exchange structure according to claim 1, characterized in that: The working chamber (1) is a cylindrical body with upper and lower openings, and a liquid inlet (6) and a liquid outlet (7) for communicating with the heat exchange space (4) are provided on both sides of the working chamber (1).