Valve cleaning device for crystal furnace

Abstract

A valve cleaning device for a crystal furnace relates to the technical field of artificial crystal furnaces, and is characterized in that a gas shunting ring (8) is arranged on a feeding mechanism lower flange (2) or a valve main body (3), a gas inlet cavity (7) is arranged on the gas shunting ring, a plurality of gas blowing ports are arranged at the bottom of the gas inlet cavity, and gas in a gas source enters the gas inlet cavity through a pipeline; the air at the blowing position can clean accumulated dust and crushed aggregates at the valve sealing ring (9) on the valve main body, so that the sealing performance of the valve main body can be effectively improved, the failure rate of equipment can be reduced, the operation stability of the equipment can be ensured and the like, and the valve has the advantages of simple and convenient structure, high working efficiency, reasonable structural design and the like, and is suitable for popularization and application. The device is especially suitable for popularization and application on crystal equipment.

Description

Technical Field

[0001] The utility model relates to the technical field of artificial crystal furnaces, in particular to a valve cleaning device for a crystal furnace. Background Art

[0002] Taking poly / single crystal silicon as an example, during the entire production process of poly / single crystal silicon, it is limited by the capacity of the crucible. After the raw materials in the crucible are pulled, the furnace must be stopped (gradually reduce the heating power of the heater, and when the temperature in the furnace drops to room temperature, open the furnace chamber), take out the pulled crystal rod, and then put the raw materials back into the crucible. After the raw materials are put in, start the power supply to reheat the crucible. When the raw materials in the crucible are melted, a new round of crystal rod pulling begins, which greatly reduces the production efficiency. In order to further improve the production efficiency of the crystal furnace, the applicant has proposed a feeding device for an artificial crystal furnace (application number 202322659033.4). This application arranges a lifting mechanism and a rotating mechanism on the column, and drives the lifting and rotation of the feeding barrel by the lifting mechanism and the rotating mechanism, so as to realize the addition of raw materials to the crucible without stopping the furnace, thereby effectively improving the production efficiency.

[0003] In actual application, it was found in the above patent application that during the feeding process, the crushed materials flowed into the crucible through the gap between the quartz support and the quartz tube. Since the crushed materials had a small particle size and were in the hot field, some of the dust would rise and fall from above onto the sealing ring of the valve, and the sealing ring was sealed by the rotary vane valve. The presence of dust would affect the sealing performance of the rotary vane valve to a certain extent, thereby increasing the failure rate of the equipment.

[0004] Therefore, how to provide a valve cleaning device for a crystal furnace has become a long-term technical demand of those skilled in the art. Summary of the invention

[0005] In order to overcome the shortcomings of the background technology, the utility model discloses a valve cleaning device for a crystal furnace. The utility model arranges a gas diversion ring on the lower flange of the feeding mechanism or the valve body to clean the dust accumulated on the valve sealing ring on the valve body, thereby effectively improving the sealing performance of the valve body, reducing the failure rate of the equipment, and ensuring the operating stability of the equipment.

[0006] In order to achieve the above-mentioned purpose of the invention, the utility model adopts the following technical solutions:

[0007] A valve cleaning device for a crystal furnace comprises a feeding mechanism, a valve body and a gas diverter ring. A gas diverter ring is provided at the lower end of the feeding mechanism or the upper end of the valve body. An air inlet cavity is provided in the middle of the gas diverter ring. A plurality of air blowing ports are provided at intervals below the air inlet cavity. The air outlet end of each air blowing port corresponds to the valve sealing ring on the valve body, and the air inlet cavity is connected to an external air source.

[0008] The valve cleaning device for a crystal furnace is provided with a blowing nozzle at the air outlet end of each air outlet.

[0009] The valve cleaning device for a crystal furnace is provided with a blowing pipe at the air outlet end of each air outlet.

[0010] In the valve cleaning device for a crystal furnace, a blowing pipe is provided between the air outlet end of each blowing port and the blowing nozzle.

[0011] The valve cleaning device for a crystal furnace is described, when the gas diverter ring is arranged at the lower end of the feeding mechanism, the upper end face of the gas diverter ring is connected to the lower side of the lower flange of the feeding mechanism on the feeding mechanism, and the first structure of the gas diverter ring is that the gas diverter ring is an annular structure, and a downwardly recessed annular groove is provided on the upper side of the gas diverter ring, and a cover plate is provided at the open end of the annular groove so that the annular groove forms a closed cavity, and the closed cavity is an air inlet cavity, and a plurality of air ports are provided at intervals on the lower bottom surface of the air inlet cavity, and an air inlet hole is provided on the side wall of the air inlet cavity and passes through the outer edge surface of the lower flange of the feeding mechanism, and the outer end of the air inlet hole is connected to the air inlet port, and the air inlet port is connected to the air source.

[0012] The valve cleaning device for the crystal furnace, the second structure of the gas diverter ring is that the gas diverter ring is an annular structure, a downwardly recessed annular groove is provided on the top of the gas diverter ring, the open end of the annular groove is fitted with the bottom of the lower flange of the feeding mechanism to form a closed cavity, the closed cavity is an air inlet cavity, a plurality of blowing ports are spaced apart on the lower bottom surface of the air inlet cavity, an air inlet hole is provided on the side wall of the air inlet cavity and passes through to the outer edge surface of the lower flange of the feeding mechanism, the outer end of the air inlet hole is connected to the air inlet port, and the air inlet port is connected to the air source.

[0013] The valve cleaning device for a crystal furnace described above, when the gas diverter ring is arranged at the upper end of the valve body, the third structure of the gas diverter ring is that the gas diverter ring is an annular structure, the outer edge surface of the gas diverter ring is connected to the inner edge surface of the upper flange in the valve body, a downwardly recessed annular groove is provided on the upper surface of the gas diverter ring, a cover plate is provided at the open end of the annular groove so that the annular groove forms a closed cavity, the closed cavity is an air inlet cavity, a plurality of air ports are provided at intervals on the lower bottom surface of the air inlet cavity, an air inlet hole is provided on the side wall of the air inlet cavity and passes through to the outer edge surface of the upper flange in the valve body, the outer end of the air inlet hole is connected to the air inlet port, and the air inlet port is connected to the air source.

[0014] The valve cleaning device for a crystal furnace, wherein the air inlet is connected to an air inlet pipe via a quick-connect lock, and the air inlet pipe is connected to an air source.

[0015] The valve cleaning device for the crystal furnace has an electromagnetic valve on the air inlet pipe.

[0016] The gas flow dividing ring is arranged between the feeding mechanism and the valve body.

[0017] By adopting the above technical solution, the beneficial effects of the utility model are:

[0018] The utility model arranges a gas diverter ring on the lower flange of the feeding mechanism or the valve body, arranges an air inlet cavity on the gas diverter ring, and arranges a plurality of air blowing ports at the bottom of the air inlet cavity. The gas in the air source enters the air inlet cavity through a pipeline and is then blown out through the air blowing ports. The gas blown can clean up the dust and debris at the valve sealing ring on the valve body, which can effectively improve the sealing performance of the valve body, reduce the failure rate of the equipment, ensure the operating stability of the equipment, etc. The utility model has the advantages of simple structure, high working efficiency, reasonable structural design, etc., and is particularly suitable for promotion and application on crystal equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the utility model;

[0020] Figure 2 yes Figure 1 A schematic diagram of a top view structure;

[0021] Figure 3 yes Figure 1 AA cross-sectional structural diagram;

[0022] Figure 4 yes Figure 2 BB cross-sectional structure diagram;

[0023] Figure 5 yes Figure 4 A schematic diagram of a local enlarged structure;

[0024] In the figure: 1. feeding mechanism; 2. lower flange of feeding mechanism; 3. valve body; 4. quick-connect lock; 5. air inlet; 6. solenoid valve; 7. air inlet cavity; 8. gas diverter ring; 9. valve sealing ring; 10. air blowing pipe; 11. air blowing nozzle. DETAILED DESCRIPTION

[0025] The present invention will be explained in more detail with reference to the following embodiments, but the present invention is not limited to these embodiments.

[0026] In the description of the present invention, it should be understood that the terms "center", "lateral", "length", "width", "height", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "side" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0027] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0028] The main innovation of the utility model is that a gas diverter ring 8 is arranged above the valve sealing ring 9, and the gas blown out by the gas diverter ring 8 blows away the dust and debris of the valve sealing ring 9, thereby improving the sealing performance of the valve.

[0029] During implementation, the gas diverter ring 8 can be set on the lower flange of the feeding mechanism, or on the valve body 3, or between the lower flange of the feeding mechanism and the valve body 3, that is, the lower flange 2 of the feeding mechanism, the gas diverter ring 8 and the valve body 3 form a three-layer stacked structure.

[0030] The first embodiment of the utility model is as follows:

[0031] Combined with Figures 1 to 5The utility model discloses a valve cleaning device for a crystal furnace, comprising a feeding mechanism 1, a valve body 3 and a gas diverter ring 8. A gas diverter ring 8 is provided at the lower end of the feeding mechanism 1 or the upper end of the valve body 3. An air inlet cavity 7 is provided in the middle of the gas diverter ring 8. A plurality of air blowing ports are provided at intervals below the air inlet cavity 7. The air outlet end of each air blowing port corresponds to a valve sealing ring 9 on the valve body 3, and the air inlet cavity 7 is connected to an external air source.

[0032] During implementation, the air inlet 5 is connected to the air inlet pipe via the quick-connect lock 4, and the air inlet pipe is connected to the air source.

[0033] Furthermore, in order to improve the automation level of the equipment, a solenoid valve 6 is provided on the air intake pipe.

[0034] The second embodiment of the utility model is as follows:

[0035] Combined with Figures 1 to 5 The utility model discloses a valve cleaning device for a crystal furnace, comprising a feeding mechanism 1, a valve body 3 and a gas diverter ring 8. A gas diverter ring 8 is provided at the lower end of the feeding mechanism 1 or the upper end of the valve body 3. An air inlet cavity 7 is provided in the middle of the gas diverter ring 8. A plurality of air blowing ports are provided at intervals below the air inlet cavity 7. An air blowing nozzle 11 is provided at the air outlet end of each air blowing port. The air outlet end of each air blowing nozzle 11 corresponds to the valve sealing ring 9 on the valve body 3. The air inlet cavity 7 is connected to an external air source.

[0036] During implementation, the air inlet 5 is connected to the air inlet pipe via the quick-connect lock 4, and the air inlet pipe is connected to the air source.

[0037] Furthermore, in order to improve the automation level of the equipment, a solenoid valve 6 is provided on the air intake pipe.

[0038] The third embodiment of the present utility model is as follows:

[0039] Combined with Figures 1 to 5 The utility model discloses a valve cleaning device for a crystal furnace, comprising a feeding mechanism 1, a valve body 3 and a gas diverter ring 8. A gas diverter ring 8 is provided at the lower end of the feeding mechanism 1 or the upper end of the valve body 3. An air inlet cavity 7 is provided in the middle of the gas diverter ring 8. A plurality of air blowing ports are provided at intervals below the air inlet cavity 7. An air blowing pipe 10 is provided at the air outlet end of each air blowing port. The air outlet end of each air blowing pipe 10 corresponds to the valve sealing ring 9 on the valve body 3. The air inlet cavity 7 is connected to an external air source.

[0040] During implementation, the air inlet 5 is connected to the air inlet pipe via the quick-connect lock 4, and the air inlet pipe is connected to the air source.

[0041] Furthermore, in order to improve the automation level of the equipment, a solenoid valve 6 is provided on the air intake pipe.

[0042] The fourth embodiment of the present utility model is as follows:

[0043] Combined with Figures 1 to 5 The utility model discloses a valve cleaning device for a crystal furnace, comprising a feeding mechanism 1, a valve body 3 and a gas diverter ring 8. A gas diverter ring 8 is provided at the lower end of the feeding mechanism 1 or the upper end of the valve body 3. An air inlet cavity 7 is provided in the middle of the gas diverter ring 8. A plurality of air blowing ports are provided at intervals below the air inlet cavity 7. An air blowing nozzle 11 is provided at the air outlet end of each air blowing port. An air blowing pipe 10 is provided between the air outlet end of each air blowing port and the air blowing nozzle 11. The air outlet end of each air blowing nozzle 11 corresponds to the valve sealing ring 9 on the valve body 3, and the air inlet cavity 7 is connected to an external air source.

[0044] During implementation, the air inlet 5 is connected to the air inlet pipe via the quick-connect lock 4, and the air inlet pipe is connected to the air source.

[0045] Furthermore, in order to improve the automation level of the equipment, a solenoid valve 6 is provided on the air intake pipe.

[0046] The fifth embodiment of the present utility model is as follows:

[0047] Combined with Figures 1 to 5 The utility model discloses a valve cleaning device for a crystal furnace, comprising a feeding mechanism 1, a valve body 3 and a gas diverter ring 8, wherein the gas diverter ring 8 is arranged between the feeding mechanism 1 and the valve body 3, that is, the feeding mechanism 1, the gas diverter ring 8 and the valve body 3 form a three-layer stacked structure, an air inlet cavity 7 is arranged in the middle of the gas diverter ring 8, a plurality of air blowing ports are arranged at intervals below the air inlet cavity 7, an air outlet end of each air blowing port is respectively provided with an air blowing nozzle 11, an air blowing pipe 10 is respectively arranged between the air outlet end of each air blowing port and the air blowing nozzle 11, the air outlet end of each air blowing nozzle 11 corresponds to the valve sealing ring 9 on the valve body 3, and the air inlet cavity 7 is connected to an external air source.

[0048] When the above embodiment is implemented, the gas diverter ring 8 is arranged at the lower end of the feeding mechanism 1, and the upper end face of the gas diverter ring 8 is connected to the lower side of the lower flange 2 of the feeding mechanism on the feeding mechanism 1. The first structure of the gas diverter ring 8 is that the gas diverter ring 8 is an annular structure, and a downwardly recessed annular groove is provided on the upper side of the gas diverter ring 8. A cover plate is provided at the open end of the annular groove so that the annular groove forms a closed cavity. The closed cavity is an air inlet cavity 7, and a plurality of air ports are provided at intervals on the lower bottom surface of the air inlet cavity 7. An air inlet hole is provided on the side wall of the air inlet cavity 7 and passes through the outer edge surface of the lower flange 2 of the feeding mechanism. The outer end of the air inlet hole is connected to the air inlet port 5, and the air inlet port 5 is connected to the air source.

[0049] Furthermore, the second structure of the gas diverter ring 8 is that the gas diverter ring 8 is an annular structure, and a downwardly recessed annular groove is provided on the top of the gas diverter ring 8, and the open end of the annular groove fits with the bottom of the lower flange 2 of the feeding mechanism to form a closed cavity. The closed cavity is an air inlet cavity 7, and a plurality of air ports are spaced apart on the lower bottom surface of the air inlet cavity 7, and an air inlet hole is provided on the side wall of the air inlet cavity 7 and passes through the outer edge surface of the lower flange 2 of the feeding mechanism, and the outer end of the air inlet hole is connected to the air inlet port 5, and the air inlet port 5 is connected to the air source.

[0050] Further, when the gas diverter ring 8 is arranged at the upper end of the valve body 3, the third structure of the gas diverter ring 8 is that the gas diverter ring 8 is an annular structure, the outer edge surface of the gas diverter ring 8 is connected to the inner edge surface of the upper flange in the valve body 3, and a downwardly recessed annular groove is provided on the gas diverter ring 8, and a cover plate is provided at the open end of the annular groove to form a closed cavity in the annular groove, and the closed cavity is an air inlet cavity 7, and a plurality of blowing ports are provided at intervals on the lower bottom surface of the air inlet cavity 7, and an air inlet hole is provided on the side wall of the air inlet cavity 7 to penetrate to the outer edge surface of the upper flange in the valve body 3, and the outer end of the air inlet hole is connected to the air inlet port 5, and the air inlet port 5 is connected to the air source.

[0051] Furthermore, it should be noted that the feeding mechanism 1 (the applicant has separately applied for a patent and will not be described again here) and the valve body 3 are both public technical solutions, and their specific structures will not be described again here.

[0052] Furthermore, the valve body 3 is a gate valve or a rotary valve.

[0053] When the utility model is implemented, the preferred embodiments are as follows:

[0054] A feeding mechanism 1 is arranged above the valve body 3, and a gas diverter ring 8 is arranged below the lower flange 2 of the feeding mechanism. An air inlet cavity 7 is arranged on the gas diverter ring 8, and a row of threaded holes (i.e., blowing holes) are arranged at the bottom of the air inlet cavity 7 for fixedly connecting an air blowing pipe 10. Air blowing nozzles 11 are respectively connected to the lower ends of the air blowing pipe 10. During implementation, the air blowing pipe 10 and the air blowing nozzles 11 are connected by threads; then, air is ventilated into the air inlet cavity 7 through the air inlet port 5 arranged on the lower flange 2 of the feeding mechanism, and the gas blows away the dust attached to the vicinity of the valve sealing ring 9 through the air blowing nozzle 11, thereby improving the locking stability of the rotary valve.

[0055] During implementation, as long as the thickness of the gas diverter ring 8 is large, the air blowing pipe 10 can be eliminated.

[0056] The utility model arranges a gas diverter ring 8 on the lower flange 2 of the feeding mechanism below the feeding mechanism 1, the gas diverter ring 8 is provided with an air inlet cavity 7, a plurality of air blowing holes are arranged on the bottom surface of the air inlet cavity 7, an air blowing nozzle 11 capable of spraying gas can be installed on the air blowing hole, the gas sprayed by the air blowing nozzle 11 can cover the entire valve sealing ring 9 on the valve body 3, the valve sealing ring 9 can blow away dust and debris after being purged by the air blowing nozzle 11, and then the valve cover of the valve body 3 is sealed, thereby improving the sealing performance and operation stability of the equipment.

[0057] Furthermore, after the feeding is completed, the utility model blows away the dust near the valve sealing ring 9, which can effectively improve the stability of the equipment, reduce the damage of the dust to the valve sealing ring 9, and increase the service life of the valve sealing ring 9.

[0058] The parts not described in detail in the above content are prior art, so they are not described in detail.

[0059] The embodiments selected in this article for the purpose of disclosing the present invention are currently considered to be suitable, but it should be understood that the present invention is intended to include all changes and improvements of the embodiments that belong to the present concept and the scope of the present invention.

Claims

1. A valve cleaning device for a crystal furnace, comprising a feeding mechanism (1), a valve body (3) and a gas diverter ring (8), wherein: The lower end of the feeding mechanism (1) or the upper end of the valve body (3) is provided with a gas diverter ring (8), the middle of the gas diverter ring (8) is provided with an air inlet cavity (7), a plurality of air blowing ports are provided below the air inlet cavity (7), the air outlet end of each air blowing port corresponds to a valve sealing ring (9) on the valve body (3), and the air inlet cavity (7) is connected to an external air source.

2. The valve cleaning device for a crystal furnace according to claim 1, characterized in that: The air outlet end of each air outlet is respectively provided with an air blowing nozzle (11).

3. The valve cleaning device for a crystal furnace according to claim 1, characterized in that: An air outlet end of each air outlet is provided with an air blowing pipe (10).

4. The valve cleaning device for a crystal furnace according to any one of claims 1 or 2, characterized in that: An air blowing pipe (10) is provided between the air outlet end of each air blowing port and the air blowing nozzle (11).

5. The valve cleaning device for a crystal furnace according to claim 1, characterized in that: When the gas diverter ring (8) is arranged at the lower end of the feeding mechanism (1), the upper end face of the gas diverter ring (8) is connected to the lower side of the feeding mechanism lower flange (2) on the feeding mechanism (1). The first structure of the gas diverter ring (8) is that the gas diverter ring (8) is an annular structure, a downwardly recessed annular groove is provided on the upper side of the gas diverter ring (8), a cover plate is provided at the open end of the annular groove so that the annular groove forms a closed cavity, the closed cavity is an air intake cavity (7), a plurality of air ports are provided at intervals on the lower bottom surface of the air intake cavity (7), an air intake hole is provided on the side wall of the air intake cavity (7) and passes through to the outer edge surface of the feeding mechanism lower flange (2), the outer end of the air intake hole is connected to the air intake port (5), and the air intake port (5) is connected to the gas source.

6. The valve cleaning device for a crystal furnace according to claim 1, characterized in that: The second structure of the gas diverter ring (8) is that the gas diverter ring (8) is an annular structure, and a downwardly recessed annular groove is provided on the upper surface of the gas diverter ring (8), and the open end of the annular groove fits with the lower surface of the lower flange (2) of the feeding mechanism so that the annular groove forms a closed cavity, and the closed cavity is an air intake cavity (7), and a plurality of air blowing ports are provided at intervals on the lower bottom surface of the air intake cavity (7), and an air intake hole is provided on the side wall of the air intake cavity (7) and passes through the outer edge surface of the lower flange (2) of the feeding mechanism, and the outer end of the air intake hole is connected to the air intake port (5), and the air intake port (5) is connected to the gas source.

7. The valve cleaning device for a crystal furnace according to claim 1, characterized in that: When the gas diverter ring (8) is arranged at the upper end of the valve body (3), the third structure of the gas diverter ring (8) is that the gas diverter ring (8) is an annular structure, the outer edge surface of the gas diverter ring (8) is connected to the inner edge surface of the upper flange of the valve body (3), a downwardly recessed annular groove is provided on the upper surface of the gas diverter ring (8), a cover plate is provided at the open end of the annular groove so that the annular groove forms a closed cavity, the closed cavity is an air inlet cavity (7), a plurality of air ports are provided at intervals on the lower bottom surface of the air inlet cavity (7), an air inlet hole is provided on the side wall of the air inlet cavity (7) and passes through the outer edge surface of the upper flange of the valve body (3), the outer end of the air inlet hole is connected to the air inlet port (5), and the air inlet port (5) is connected to the air source.

8. The valve cleaning device for a crystal furnace according to any one of claims 5, 6 or 7, characterized in that: The air inlet (5) is connected to an air inlet pipe via a quick-connect lock (4), and the air inlet pipe is connected to an air source.

9. The valve cleaning device for a crystal furnace according to claim 8, characterized in that: The air intake pipe is provided with a solenoid valve (6).

10. The valve cleaning device for a crystal furnace according to claim 1, characterized in that: The gas flow splitter ring (8) is arranged between the feeding mechanism (1) and the valve body (3).

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