Polycrystalline silicon sample wafer cutting equipment

Abstract

The utility model relates to the technical field of cutting equipment, and provides polycrystalline silicon sample cutting equipment, which comprises a box body, a cutting device and a cutting device, the clamping device is arranged in the cutting area and is used for clamping a polycrystalline silicon sample rod; the cutter is arranged in the cutting area, and a cutting head of the cutter can be fed in the radial direction of the polycrystalline silicon sample rod so as to cut the polycrystalline silicon sample rod to obtain a sample piece; wherein the holder mainly comprises a three-tooth clamping jaw and a stabilizer which can move relatively, the three-tooth clamping jaw is used for clamping one end of the polycrystalline silicon sample rod, and the stabilizer is used for supporting the other end of the polycrystalline silicon sample rod. The two ends of the polycrystalline silicon sample rod are fixed through the three-tooth clamping jaw, the stabilizer and the relative movement of the three-tooth clamping jaw and the stabilizer, the stability is high, the sample rod is not prone to breakage, meanwhile, a sample piece can be prevented from being broken when the sample piece is cut for the second time, and therefore it is guaranteed that the sample piece has neat edges, and the appearance quality of the sample piece is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of cutting equipment, in particular to a polysilicon sample cutting device. Background Art

[0002] At present, the sample rod of the polysilicon sample cutting machine used is clamped on a perforated tooling that is locked radially along the sample rod with screws. Then, the switch is pressed and the diamond saw blade starts to cut the sample rod. After two cuts, a sample with a thickness of 2 to 3 mm in the middle can be obtained.

[0003] However, the above process of cutting the sample stick to obtain the sample piece has the following problems:

[0004] 1. The sample rod is locked radially with screws, and the fixing point is relatively single and not stable enough. If the screws are tightened too hard, the sample rod is prone to breakage;

[0005] 2. When cutting the second knife, because the sample is thin, the sample is prone to breakage when cutting to the bottom, resulting in uneven bottom edges;

[0006] 3. The diamond saw blade used will leave obvious cutting marks on the surface of both sides of the sample, which is not smooth and beautiful;

[0007] 4. The existing cutting machine can only cut one sample piece at a time (two cutters), and cannot cut multiple samples at the same time, so the efficiency is low. Utility Model Content

[0008] In view of the deficiencies of the prior art, the utility model provides a polysilicon sample cutting device to solve the problems that the existing sample rods are easy to break after clamping, the edges of the sample are uneven, there are obvious cutting marks on the surfaces of both sides, and the cutting efficiency is slow.

[0009] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0010] A polysilicon sample cutting device, comprising:

[0011] The box has a sunken cutting area;

[0012] A clamp, disposed in the cutting area, for clamping the polysilicon sample rod; and

[0013] A cutter, arranged in the cutting area, whose cutting head can be fed along the radial direction of the polycrystalline silicon sample rod to cut the polycrystalline silicon sample rod to obtain a sample;

[0014] The clamp is mainly composed of a relatively movable three-tooth clamp and a stabilizer, wherein the three-tooth clamp is used to clamp one end of the polysilicon sample rod, and the stabilizer is used to support the other end of the polysilicon sample rod.

[0015] In one embodiment disclosed in the present application, the three-tooth clamp includes a clamp body and a first telescopic cylinder, the cylinder body of the first telescopic cylinder is fixedly connected to the box body on one side of the cutting area, and the piston rod is connected to the clamp body;

[0016] The stabilizer comprises a disc and a second telescopic cylinder, wherein the cylinder body of the second telescopic cylinder is fixedly connected to the box body on the other side of the cutting area, and the piston rod is connected to the disc;

[0017] The box body is internally provided with a control module containing a numerical control program, which is used to control the actions of the clamp body, the first telescopic cylinder and the second telescopic cylinder respectively.

[0018] In one embodiment disclosed in the present application, the clamp body is lined with a polyurethane cushion, and the side of the disc in contact with the polysilicon sample rod is also affixed with a polyurethane cushion.

[0019] In one embodiment disclosed in the present application, a plurality of sets of the clamps are arranged in parallel at equal intervals along the feeding direction of the cutting head.

[0020] In one embodiment disclosed in the present application, the cutter includes a linear stepper motor fixedly mounted in a box body of the cutting area;

[0021] The working end of the linear stepping motor is connected to the cutting head to drive the cutting head to feed along the radial direction of the polysilicon sample rod.

[0022] In one embodiment disclosed in the present application, the cutting head includes a U-shaped frame, a driving wheel, a tensioning wheel and a pair of passive cutting wheels;

[0023] The U-shaped frame is connected to the working end of the linear stepping motor;

[0024] The driving wheel, the tensioning wheel and a pair of passive cutting wheels are respectively rotatably connected to the U-shaped frame and are connected through a ring-shaped diamond wire.

[0025] The driving wheel and the tensioning wheel are far away from the cut polysilicon sample rod and the driving wheel is located below the tensioning wheel;

[0026] The pair of passive cutting wheels are closer to the polysilicon sample rod being cut.

[0027] In one embodiment disclosed in the present application, the U-shaped frame is equipped with a spray pipe with an outlet facing the cutting position of the polysilicon sample rod, and the spray pipe is connected to a water pump built into the box through a telescopic hose, and the water pump is connected to an external water storage tank;

[0028] A drainage filter is provided at the bottom of the cutting area.

[0029] In one embodiment disclosed in the present application, the upper cover of the cutting area is provided with a protective cover connected to the box body via a hinge;

[0030] The protective cover is provided with a transparent observation window and a handle.

[0031] In one embodiment disclosed in the present application, a display screen and a plurality of control buttons located on the right side of the display screen are installed on the inclined front side of the box;

[0032] The display screen is used to display the operating status of the device;

[0033] The control buttons are respectively used to control the extension and retraction of the first telescopic cylinder and the second telescopic cylinder, the start and stop of the driving wheel and the water pump, and the feeding of the linear stepping motor.

[0034] In one embodiment disclosed in the present application, the box is provided with an identification plate which is magnetically attached to the front side thereof, for indicating that the device has been started and is in operation.

[0035] Compared with the prior art, the beneficial effects of the utility model are:

[0036] 1. The two ends of the polysilicon sample rod are fixed by the three-tooth clamp and the stabilizer and their relative movement. The stability is high and the sample rod is not easy to break. At the same time, the sample can be prevented from breaking when cutting the second knife, thereby ensuring that the sample has a neat edge and improving the appearance quality of the sample.

[0037] 2. Multiple sets of clamps can clamp a polysilicon sample rod respectively, so that the cutting head can feed and cut multiple polysilicon sample rods at one time, and then cut multiple samples with two knives, which effectively improves work efficiency.

[0038] 3. Using diamond wire instead of the existing diamond saw blade to perform wire cutting on the polysilicon sample rod can run smoothly and further avoid the sample from breaking when cutting the second time, ensuring that the edge of the sample is neat, the side is flat and beautiful, and effectively solving the problem of leaving obvious marks on the cutting surface of the sample. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0040] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0041] Figure 2 It is a left-side structural schematic diagram of the utility model;

[0042] Figure 3 This is a schematic diagram of the structure of the utility model from a top view after the protective cover is removed;

[0043] Figure 4 for Figure 3 Schematic diagram of the enlarged structure in the A direction. DETAILED DESCRIPTION

[0044] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0045] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0046] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0047] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0048] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0049] The disclosure below provides many different embodiments or examples to implement different structures of the present invention. In order to simplify the disclosure of the present invention, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention.

[0050] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0051] See also Figure 1 to Figure 4 As shown, the utility model provides a polysilicon sample cutting device, comprising:

[0052] The box body 100 has a sunken cutting area 110;

[0053] The clamp 200 is provided in the cutting area 110 and is used to clamp the polysilicon sample rod ( Figure 3 The portion indicated by a dotted line in (a); and

[0054] The cutter 300 is disposed in the cutting area 110, and its cutting head 310 can be fed along the radial direction of the polycrystalline silicon sample rod to cut the polycrystalline silicon sample rod to obtain a sample;

[0055] The clamp 200 is mainly composed of a relatively movable three-tooth clamp 210 and a stabilizer 220. The three-tooth clamp 210 is used to clamp one end of the polysilicon sample rod, and the stabilizer 220 is used to support the other end of the polysilicon sample rod.

[0056] When in use, one end of the polysilicon sample rod is inserted into the three-tooth clamp 210 and fixed by it, and the stabilizer 220 supports the polysilicon sample rod from the other end, and the cutter 300 is started, and the cutting head 310 is driven to feed along the radial direction of the polysilicon sample rod to cut the polysilicon sample rod. After the first cut, a section of the polysilicon sample rod that contacts the stabilizer 220 falls off, and the cutting head 310 retreats, and the three-tooth clamp 210 and the stabilizer 220 move closer to each other along the axial direction of the polysilicon sample rod (the three-tooth clamp 210 moves 2 to 3 mm to ensure the thickness of the sample), so that the stabilizer 220 is again pressed against the first cut surface of the section of the polysilicon sample rod clamped by the three-tooth clamp 210, and at this time the cutting head 310 is fed again to cut the polysilicon sample rod for the second time. After completion, a sample with a thickness of 2 to 3 mm can be obtained. That is to say, the two ends of the polysilicon sample rod are fixed by the three-tooth clamp 210 and the stabilizer 220 and their relative movement, which has high stability and prevents the sample rod from breaking. At the same time, the sample can be prevented from breaking during the second cutting, thereby ensuring that the sample has neat edges and improving the appearance quality of the sample.

[0057] See also Figure 3 As shown, the three-toothed clamp 210 includes a clamp body 211 and a first telescopic cylinder 212, the cylinder body of the first telescopic cylinder 212 is fixedly connected to the box body 100 on one side of the cutting area 110, and the piston rod is connected to the clamp body 211; the stabilizer 220 includes a disc 221 and a second telescopic cylinder 222, the cylinder body of the second telescopic cylinder 222 is fixedly connected to the box body 100 on the other side of the cutting area 110, and the piston rod is connected to the disc 221; the box body 100 is built with a control module containing a numerical control program, which is used to control the actions of the clamp body 211, the first telescopic cylinder 212 and the second telescopic cylinder 222. Through the telescopic action of the first telescopic cylinder 212 and the second telescopic cylinder 222, polysilicon sample rods of different lengths can be clamped; the side of the disc 221 is a plane, which can support the polysilicon sample rod with any shape at the other end.

[0058] The clamp body 211 is lined with a polyurethane cushion, and the side of the disc 221 that contacts the polysilicon sample rod is also affixed with a polyurethane cushion. In this way, the contamination of the polysilicon sample rod by metal impurities in the clamp body 211 and the disc 221 itself can be effectively reduced.

[0059] Multiple sets (three sets in this embodiment) of the clamps 200 are arranged in parallel at equal intervals along the feeding direction of the cutting head 310. Multiple sets of clamps 200 can clamp a polysilicon sample rod respectively, so that the cutting head 310 can feed and cut multiple polysilicon sample rods at one time, and then cut multiple samples with two knives, which effectively improves work efficiency.

[0060] The cutter 300 includes a linear stepper motor 320 fixedly installed in the box 100 of the cutting area 110. The working end of the linear stepper motor 320 is connected to the cutting head 310 to drive the cutting head 310 to feed radially along the polysilicon sample rod.

[0061] See also Figure 4 As shown, the cutting head 310 includes a U-shaped frame 311, a driving wheel 312, a tensioning wheel 313 and a pair of passive cutting wheels 314. The U-shaped frame 311 is connected to the working end of the linear stepping motor 320. The driving wheel 312, the tensioning wheel 313 and the pair of passive cutting wheels 314 are respectively rotatably connected to the U-shaped frame 311 and are connected by a ring-shaped diamond wire 315. The driving wheel 312 and the tensioning wheel 313 are far from the polysilicon sample rod to be cut and the driving wheel 312 is located below the tensioning wheel 313. The pair of passive cutting wheels 314 are close to the polysilicon sample rod to be cut. The driving wheel 312 provides power for the ring-shaped movement of the diamond wire 315 to cut the polysilicon sample rod in a wire cutting manner; as the cutting proceeds, the polysilicon sample rod will enter the U-shaped frame 311. That is to say, using diamond wire 315 instead of the existing diamond saw blade to perform wire cutting on the polysilicon sample rod can run smoothly, further avoid the sample from breaking when cutting the second time, ensure that the sample edge is neat, the side is flat and beautiful, and effectively solve the problem of leaving obvious marks on the cutting surface of the sample.

[0062] The U-shaped frame 311 is provided with a spray pipe 316 with its outlet facing the cutting position of the polysilicon sample rod. The spray pipe 316 is connected to a water pump (not shown) built into the box 100 through a telescopic hose, and the water pump is connected to an external water storage tank. A drainage filter 111 ( Figure 3 The cooling water in the water tank can be sprayed out from the spray pipe 316 through the water pump to cool the diamond wire 315 at the cutting position of the polysilicon sample rod, and the cuttings are left on the drainage filter 111. The cooling water is discharged from the box body 100 through the drainage filter 111.

[0063] The cutting area 110 is covered with a protective cover 120 connected to the box body 100 through a hinge, and the protective cover 120 is provided with a transparent observation window 121 and a handle 122. Holding the handle 122, the protective cover 120 can be flipped upwards to place the polysilicon sample rod and take the cut sample.

[0064] A display screen 130 and a plurality of control buttons 140 located on the right side of the display screen 130 are installed on the inclined front side of the box body 100. The display screen 130 is used to display the operating status of the device, and the control buttons 140 are used to control the extension and retraction of the first telescopic cylinder 212 and the second telescopic cylinder 222, the start and stop of the driving wheel 312 and the water pump, and the feeding of the linear stepping motor 320. When the corresponding control button 140 is pressed, the control module receives the instruction, thereby controlling the corresponding component action.

[0065] The box body 100 is provided with an identification plate 150 which is adsorbed on the front side thereof by magnetic force, and is used to indicate that the device has been started and is in operation.

[0066] The above embodiments are only preferred embodiments of the present utility model and are not limitations on the technical solutions of the present utility model. Any technical solution that can be implemented on the basis of the above embodiments without creative work should be deemed to fall within the scope of protection of the patent of the present utility model.

Claims

1. A polysilicon sample cutting device, characterized in that: include: The box has a sunken cutting area; A clamper, disposed in the cutting area, for clamping the polysilicon sample rod; and A cutter, arranged in the cutting area, whose cutting head can be fed along the radial direction of the polycrystalline silicon sample rod to cut the polycrystalline silicon sample rod to obtain a sample; The clamp is mainly composed of a relatively movable three-tooth clamp and a stabilizer, wherein the three-tooth clamp is used to clamp one end of the polysilicon sample rod, and the stabilizer is used to support the other end of the polysilicon sample rod.

2. The polysilicon sample cutting device according to claim 1, characterized in that: The three-tooth clamp includes a clamp body and a first telescopic cylinder, wherein the cylinder body of the first telescopic cylinder is fixedly connected to the box body on one side of the cutting area, and the piston rod is connected to the clamp body; The stabilizer comprises a disc and a second telescopic cylinder, wherein the cylinder body of the second telescopic cylinder is fixedly connected to the box body on the other side of the cutting area, and the piston rod is connected to the disc; The box body is internally provided with a control module containing a numerical control program, which is used to control the actions of the clamp body, the first telescopic cylinder and the second telescopic cylinder respectively.

3. The polysilicon sample cutting device according to claim 2, characterized in that: The clamp body is lined with a polyurethane soft pad, and the side of the disc that contacts the polycrystalline silicon sample rod is affixed with a polyurethane soft pad.

4. The polysilicon sample cutting device according to claim 2 or 3, characterized in that: The clamps are arranged in parallel in multiple sets at equal intervals along the feeding direction of the cutting head.

5. The polysilicon sample cutting device according to claim 4, characterized in that: The cutter comprises a linear stepper motor fixedly mounted in a box body of the cutting area; The working end of the linear stepping motor is connected to the cutting head to drive the cutting head to feed along the radial direction of the polysilicon sample rod.

6. The polysilicon sample cutting device according to claim 5, characterized in that: The cutting head comprises a U-shaped frame, a driving wheel, a tensioning wheel and a pair of passive cutting wheels; The U-shaped frame is connected to the working end of the linear stepping motor; The driving wheel, the tensioning wheel and a pair of passive cutting wheels are respectively rotatably connected to the U-shaped frame and are connected through a ring-shaped diamond wire. The driving wheel and the tensioning wheel are far away from the cut polysilicon sample rod and the driving wheel is located below the tensioning wheel; The pair of passive cutting wheels are closer to the polysilicon sample rod being cut.

7. The polysilicon sample cutting device according to claim 6, characterized in that: The U-shaped frame is equipped with a spray pipe with an outlet facing the cutting position of the polysilicon sample rod, and the spray pipe is connected to a water pump built into the box through a telescopic hose, and the water pump is connected to an external water storage tank; A drainage filter is provided at the bottom of the cutting area.

8. The polysilicon sample cutting device according to claim 1 or 7, characterized in that: The upper cover of the cutting area is provided with a protective cover connected to the box body through a hinge; The protective cover is provided with a transparent observation window and a handle.

9. The polysilicon sample cutting device according to claim 7, characterized in that: A display screen and a plurality of control buttons located on the right side of the display screen are installed on the inclined front side of the box; The display screen is used to display the operating status of the device; The control buttons are respectively used to control the extension and retraction of the first telescopic cylinder and the second telescopic cylinder, the start and stop of the driving wheel and the water pump, and the feeding of the linear stepping motor.

10. The polycrystalline silicon sample cutting device according to claim 1 or 9, characterized in that: The box body is provided with an identification plate which is adsorbed on the front side thereof by magnetic force and is used for indicating that the equipment has been started and is in operation.

Images