Feeding mechanism and machining equipment

Abstract

The utility model provides a feeding mechanism and machining equipment, the feeding mechanism comprises a mounting frame, a clamping piece and an adsorption piece, and the mounting frame is movably arranged; the clamping piece and / or the adsorption piece are / is movably arranged on the mounting frame, the clamping piece can clamp a workpiece, the adsorption piece can adsorb the workpiece, and the adsorption piece and the clamping piece can relatively avoid each other, so that the clamping piece can independently clamp the workpiece or the adsorption piece can independently adsorb the workpiece; after the clamping piece independently clamps the workpiece, the mounting frame is moved to move the workpiece from the material box to a bearing piece, then the adsorption piece is switched to independently adsorb the workpiece located on the bearing piece, and then the mounting frame is moved to move the workpiece to a machining station. The clamping pieces can clamp the edges of the workpieces, the problem that the workpieces in the material box are relatively dense and are difficult to take can be solved, the adsorption stability of the adsorption pieces is high, the problem of how to safely transfer the workpieces after the workpieces are taken out of the material box can be solved, and therefore large-size wafers can be safely moved to a machining station from the material box.

Description

Technical Field

[0001] The present application belongs to the technical field of feeding equipment, and more specifically, to a feeding mechanism and processing equipment. Background Art

[0002] Wafers are generally placed on sheet iron rings and then stacked in a material box for storage. When the wafers need to be processed, the iron rings are moved by a loading mechanism to take the wafers out of the material box and place them in a processing station.

[0003] The related technology discloses a wafer loading mechanism, which takes the wafer by clamping an edge of an iron ring that carries the wafer. However, when the wafer size is large, the edge of the iron ring clamped by the loading mechanism is small relative to the structural width of the wafer, while the width of the unclamped area of ​​the iron ring is relatively large, and it will fall relatively due to the gravity of the wafer. In this way, the loading mechanism may cause the wafer to break due to vibration during the transportation of the wafer, or the unclamped part of the iron ring may fall and deform after carrying the wafer, and collide and interfere with other structures in the transportation path.

[0004] Therefore, how to safely move larger wafers from the material box to the processing station remains to be solved. Utility Model Content

[0005] The present application provides a loading mechanism that can safely move larger-sized wafers from a material box to a processing station.

[0006] The technical solution adopted in the present application is: to provide a loading mechanism that can be used to transfer a sheet workpiece from a material box to a processing station, comprising a mounting frame, a clamping member and an adsorbing member, wherein the mounting frame is movably arranged; the clamping member and / or the adsorbing member are movably arranged on the mounting frame, the clamping member can clamp the workpiece, the adsorbing member can adsorb the workpiece, and the adsorbing member and the clamping member can be relatively avoidable, so that the clamping member can clamp the workpiece alone or the adsorbing member can adsorb the workpiece alone; after the clamping member clamps the workpiece alone, the mounting frame is moved to move the workpiece from the material box to a carrier, and then the adsorbing member is switched to adsorb the workpiece located on the carrier alone, and then the mounting frame is moved to move the workpiece to the processing station.

[0007] Further, the state of cooperation between the clamping member and the adsorption member corresponding to the time when the clamping member is capable of clamping the workpiece alone is defined as a first state, and when the adsorption member and the clamping member are relatively movable and adjusted to the first state, the clamping action end of the clamping member protrudes from the adsorption member along the direction close to the discharge port of the material box; the state of cooperation between the clamping member and the adsorption member corresponding to the time when the adsorption member is capable of adsorbing the workpiece alone is defined as a second state, and when the adsorption member and the clamping member are relatively movable and adjusted to the second state, the adsorption action end of the adsorption member protrudes from the clamping member along the adsorption direction.

[0008] Furthermore, the workpiece is defined as being placed in the material box in a horizontal state and stacked along the vertical direction, a first direction parallel to the horizontal plane is defined, the discharge port of the material box is arranged toward the first direction, the mounting frame is movably arranged along the first direction, the clamping member clamps the first direction edge of the workpiece, and the adsorbing member adsorbs the upper surface of the workpiece along the vertical direction; the clamping member is rotatably arranged on the mounting frame within the plane formed by the first direction and the vertical direction, and the clamping member can be rotated to the corresponding first state or the second state.

[0009] Furthermore, the feeding mechanism also includes a first sensing member and a first sensor member corresponding to the first sensing member, the first sensing member is arranged on the clamping member, and the first sensor member is arranged on the mounting frame; when the first sensing member and the first sensor member cooperate with each other by induction, the clamping member rotates to correspond to the first state.

[0010] Furthermore, the feeding mechanism also includes a second sensing member and a corresponding second sensing member that can sense the second sensing member, the second sensing member is arranged on the clamping member, and the second sensing member is arranged on the mounting frame; when the second sensing member and the second sensing member are inductively matched, the clamping member rotates to the corresponding second state.

[0011] Furthermore, the direction in which the bearing member carries the workpiece is the same as the direction in which the material box carries the workpiece, and the bearing member and the material box are relatively movably arranged along the direction in which the workpiece is carried.

[0012] Furthermore, the carrier is arranged near the discharge port side of the material box and is adjacent to the material box.

[0013] Furthermore, the mounting frame includes a supporting portion and a mounting portion, the supporting portion is movably arranged, the mounting portion is movably connected to the supporting portion along the direction in which the supporting member carries the workpiece, and the clamping member and the adsorption member are arranged on the mounting portion.

[0014] Furthermore, the material box, the supporting member and the processing station are arranged in sequence along the first direction, and the discharge port of the material box is arranged close to the supporting member side facing the first direction and adjacent to the supporting member; the direction in which the supporting member carries the workpiece and the direction in which the material box carries the workpiece are along the vertical direction, and the supporting member and the material box are relatively movably arranged along the vertical direction; the mounting frame includes a supporting part and a mounting part, the supporting part is movably arranged along the first direction, the mounting part is liftable on the supporting part along the vertical direction, and the clamping member and the adsorption member are arranged on the mounting part.

[0015] The present application also provides a processing device, including a machine base, a processing mechanism and a loading mechanism as described above, wherein the processing mechanism and the material box are arranged on the machine base, the mounting frame of the loading mechanism can be movably arranged on the machine base, and the processing mechanism is configured to process a workpiece placed on the processing station.

[0016] In the feeding mechanism provided by the present application, the mounting frame serves as a carrier for the clamping member and the adsorbing member. When the clamping member clamps the workpiece or the adsorbing member adsorbs the workpiece, the positions of the clamping member and the adsorbing member can be synchronously adjusted by moving the mounting frame to transfer the workpiece. The clamping member and the adsorbing member are relatively movable to avoid the arrangement, so that the clamping member and the adsorbing member can be relatively movable and adjusted to achieve the avoidance effect, so as to achieve the ability to act on the workpiece separately. When the clamping member and the adsorbing member hand over the workpiece, the carrier serves as a transfer bearing structure for the workpiece being handed over. The carrier is arranged on one side of the material box and satisfies that the workpiece can be transferred from the material box to the carrier, that is, the clamping member clamps and fixes the workpiece in the material box and cooperates with the mounting frame to transfer it to the carrier, and then relatively movably adjusts the clamping member and the adsorbing member to the state where the adsorbing member works alone, and uses the adsorbing member to transfer the workpiece from the carrier and cooperates with the mounting frame to the processing station.

[0017] Among them, the clamping member and the adsorbing member are both arranged on the mounting frame. Compared with the solution in which the clamping member and the adsorbing member are separately movable and arranged, the arrangement of the present application can effectively reduce the space occupied by the structure and contribute to structural optimization; the relatively movable avoidance arrangement of the clamping member and the adsorbing member can be any arrangement that satisfies the requirement of enabling the clamping member and the adsorbing member to act on the workpiece separately. In specific use, the clamping member can clamp the edge of the workpiece and take the workpiece out of the material box without extending into the material box, which can solve the problem that the workpieces in the material box are relatively dense and difficult to take out; and the adsorbing member can adsorb the surface of the workpiece as a whole, and the adsorbing member can absorb the workpiece. The attachment has high stability and the workpiece structure has high force stability, which can solve the problem of how to safely transport the workpiece after it is taken out of the material box. The clamping part makes up for the deficiency of the large working space required for the adsorption part, and the adsorption part solves the problem of the small working area of ​​the clamping part resulting in poor force stability of the workpiece structure. When used in the wafer loading process, the loading mechanism of the present application first uses the clamping part to clamp one edge of the iron ring supporting the wafer, moves it to the carrier, and then uses the adsorption part to adsorb multiple edges of the iron ring, so that the force on the iron ring is more balanced, thereby moving the iron ring and the wafer it carries from the carrier to the processing station more safely. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0019] Figure 1 A schematic diagram of the structure of the relative arrangement of the feeding mechanism, the material box and the processing station provided in the embodiment of the present application;

[0020] Figure 2 A schematic diagram of the three-dimensional structure of the feeding mechanism provided in the embodiment of the present application, in which the clamping member and the adsorption member act on the workpiece in the first state of cooperation;

[0021] Figure 3 A schematic diagram of the three-dimensional structure of the feeding mechanism provided in the embodiment of the present application, in which the clamping member and the adsorption member cooperate with each other in the second state and act on the workpiece;

[0022] Figure 4 for Figure 3 A local enlarged schematic diagram at point A;

[0023] Figure 5 This is a schematic diagram of the structure of the processing equipment used in the embodiments of the present application.

[0024] Among them, the reference numerals in the figure are:

[0025] 10. Feeding mechanism; 101. Mounting frame; 1011. Supporting part; 1012. Mounting part; 102. Clamping member; 103. Adsorption member; 1031. Spacing area; 104. Carrying member; 105. First sensing member; 106. First sensing member; 107. Second sensing member; 108. Second sensing member; 20. Material box; 30. Processing equipment; 301. Processing mechanism; 302. Machine base; 303. Processing station. DETAILED DESCRIPTION

[0026] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0027] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0028] It should be understood that the orientation or position relationship indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0029] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0030] See also Figure 1, the feeding mechanism 10 provided in the embodiment of the present application is now described. The feeding mechanism 10 provided in the embodiment of the present application includes a mounting frame 101, a clamping member 102 and an adsorbing member 103, the mounting frame 101 is movably arranged; the clamping member 102 and / or the adsorbing member 103 are movably arranged on the mounting frame 101, the clamping member 102 can clamp the workpiece, the adsorbing member 103 can adsorb the workpiece, and the adsorbing member 103 and the clamping member 102 can be relatively avoidable, so that the clamping member 102 can clamp the workpiece alone or the adsorbing member 103 can adsorb the workpiece alone; after the clamping member 102 clamps the workpiece alone, the moving mounting frame 101 moves the workpiece from the material box 20 to a carrier 104, and then switches to the adsorbing member 103 to adsorb the workpiece located on the carrier 104 alone, and then the moving mounting frame 101 moves the workpiece to the processing station 303.

[0031] In the loading mechanism 10 provided in the embodiment of the present application, the mounting frame 101 serves as a supporting frame for the clamping member 102 and the adsorption member 103. When the clamping member 102 clamps the workpiece or the adsorption member 103 adsorbs the workpiece, the positions of the clamping member 102 and the adsorption member 103 can be synchronously adjusted by moving the mounting frame 101 for transferring the workpiece.

[0032] The clamping member 102 and the adsorption member 103 are relatively movable to avoid each other, so that the clamping member 102 and the adsorption member 103 can be relatively movable and adjusted to achieve an avoidance effect, thereby achieving the ability to act on the workpiece separately.

[0033] When the clamping member 102 and the adsorption member 103 hand over the workpiece, the carrier 104 serves as a transfer and supporting structure for the workpiece being handed over. The carrier 104 is arranged on one side of the material box 20 and satisfies the requirement that the workpiece can be transferred from the material box 20 to the carrier 104, that is, the clamping member 102 clamps and fixes the workpiece in the material box 20 and cooperates with the mounting frame 101 to transfer it to the carrier 104, and then the clamping member 102 and the adsorption member 103 are relatively adjusted to a state where the adsorption member 103 works alone, and the adsorption member 103 is used to transfer the workpiece from the carrier 104 and cooperate with the mounting frame 101 to the processing station 303.

[0034] Among them, the clamping member 102 and the adsorption member 103 are both arranged on the mounting frame 101. Compared with the solution in which the clamping member 102 and the adsorption member 103 are separately and independently moved, the setting of the embodiment of the present application can effectively reduce the space occupied by the structure and contribute to structural optimization; the relatively movable avoidance setting of the clamping member 102 and the adsorption member 103 can be any setting that can enable the clamping member 102 and the adsorption member 103 to act on the workpiece separately.

[0035] In specific use, the clamping member 102 can clamp the edge of the workpiece, and the workpiece can be taken out of the material box 20 without extending into the material box 20, which can solve the problem that the workpieces in the material box 20 are relatively dense and difficult to take out, and the adsorption member 103 can adsorb the surface of the workpiece as a whole, with high adsorption stability and high workpiece structure force stability, which can solve the problem of how to safely transport the workpiece after it is taken out of the material box 20. The clamping member 102 makes up for the lack of a large working space required by the adsorption member 103, and the adsorption member 103 solves the problem that the clamping member 102 has a small working area, resulting in poor workpiece structure force stability. Therefore, when used in the wafer loading process, the loading mechanism 10 of the embodiment of the present application first uses the clamping member 102 to clamp an edge of the iron ring that carries the wafer, and moves it to the carrier 104, and then uses the adsorption member 103 to adsorb multiple edges of the iron ring, so that the force on the iron ring is more balanced, thereby moving the iron ring and the wafer carried from the carrier 104 to the processing station 303 more safely.

[0036] It should be noted that, in the embodiment of the present application, the movement of the mounting frame 101 is a controllable setting, and the specific moving direction is not limited, and any setting that can meet the actual workpiece transportation is sufficient; in this field, the structural setting scheme in which only the clamping member 102 is provided for clamping the sheet workpiece alone can be understood as a conventional setting in this field, and therefore the structure of the clamping member 102 is not described in detail here; and the structural setting scheme in this field in which only the adsorption member 103 is provided for adsorbing the sheet workpiece alone can also be understood as a conventional setting in this field, and therefore the structure of the adsorption member 103 is not described in detail here; and the setting in which the adsorption member 103 and the clamping member 102 are relatively movable and avoidable can specifically be a setting in which a relative rotation method is adopted and an avoidance effect can be achieved, or a setting in which a relative movement method is adopted and an avoidance effect can be achieved, and of course, a setting in which a composite method of rotation combined with movement is adopted and an avoidance effect can be achieved, and any setting that can meet the avoidance effect is sufficient; the bearing member 104 can be understood as any structure having a bearing function, such as a carrier, and the like.

[0037] See also Figure 2 and Figure 3 Further, it is defined that when the clamping member 102 is capable of clamping the workpiece alone, the corresponding state of cooperation between the clamping member 102 and the adsorption member 103 is the first state. When the adsorption member 103 and the clamping member 102 are relatively movable and adjusted to the first state, the clamping action end of the clamping member 102 protrudes from the adsorption member 103 along the direction close to the discharge port of the material box 20; it is defined that when the adsorption member 103 is capable of adsorbing the workpiece alone, the corresponding state of cooperation between the clamping member 102 and the adsorption member 103 is the second state. When the adsorption member 103 and the clamping member 102 are relatively movable and adjusted to the second state, the adsorption action end of the adsorption member 103 protrudes from the clamping member 102 along the adsorption direction.

[0038] In the embodiment of the present application, the workpieces are in a horizontal state and are stacked in the material box 20 along the vertical direction as an example, and the vertical direction is denoted by Z; a first direction parallel to the horizontal plane is defined, and the first direction is denoted by X, and the outlet of the material box 20 is set in the first direction as an example; the mounting frame 101 is movably set along the first direction as an example; the clamping member 102 clamps the edge of the workpiece in the first direction as an example; the adsorption member 103 adsorbs the upper surface of the workpiece along the vertical direction as an example; the supporting member 104 supports the workpiece along the vertical direction as an example.

[0039] See also Figure 2 , then when the adsorption member 103 and the clamping member 102 are adjusted to the first state in relative movement, that is, the clamping member 102 is in a state that can be used alone, and relatively, the adsorption member 103 is in a state of avoiding the clamping member 102. The specific state is the state when the clamping action end of the clamping member 102 protrudes from the adsorption member 103 along the first direction toward the discharge port side close to the material box 20. The clamping action end of the clamping member 102 is a part with a clamping function, which can also be understood as a conventional clamping setting. In this state, when the clamping action end clamps the workpiece in the material box 20 along the first direction, the adsorption member 103 will not contact the material box 20 and the workpiece along the first direction, and will not interfere with the clamping member 102 clamping the workpiece process, so that the clamping member 102 can successfully complete the material picking process alone.

[0040] See also Figure 3 Similarly, when the adsorption member 103 and the clamping member 102 are adjusted to the second state in relative movement, that is, the adsorption member 103 is in a state where it can be used alone, and correspondingly, the clamping member 102 is in a state of avoiding the adsorption member 103. The specific state is the state where the adsorption action end of the adsorption member 103 protrudes downward from the clamping member 102 in the vertical direction. The adsorption action end of the adsorption member 103 is a part with adsorption function, which can also be understood as a conventional adsorption setting. In this state, when the adsorption action end adsorbs the workpiece carried on the carrier 104 in the vertical direction, the clamping member 102 will not contact the carrier 104 and the workpiece in the vertical direction, and will not interfere with the adsorption process of the adsorption member 103 on the workpiece, so that the adsorption member 103 can successfully complete the process of adsorbing the workpiece and transferring it alone.

[0041] The workpieces are in a horizontal state and stacked in the vertical direction in the material box 20, which is also a conventional storage state for sheet workpieces. Therefore, the feeding mechanism 10 of the embodiment of the present application is also a conventional implementation state. The discharge port of the material box 20 can be understood as an opening for the workpiece to enter and exit, which is a conventional setting of the material box 20. The carrier 104 is arranged to carry along the vertical direction, that is, the workpiece is placed horizontally on the carrier 104. In this way, the workpiece does not need to adjust the state during the process from the material box 20 to the carrier 104, which also reduces the requirements for the clamping member 102, which helps to maintain the structural stability of the workpiece during the process from the material box 20 to the carrier 104.

[0042] It should be noted that the movable arrangement of the mounting frame 101 along the first direction is not limited to being arranged only along the first direction. It can be understood that the movable direction of the mounting frame 101 includes but is not limited to the first direction.

[0043] Of course, in the embodiment of the present application, a supporting member can also be provided between the carrier 104 and the discharge port of the material box 20. When the clamping member 102 clamps the workpiece, the workpiece is moved by dragging. After the workpiece comes out of the discharge port, it overlaps the supporting member. The supporting member provides a bearing function for the moving workpiece to protect the workpiece from bending due to its own weight. Specifically, in the embodiment of the present application, the material box 20, the carrier 104 and the processing station 303 are arranged in sequence along the first direction as an example, and the discharge port of the material box 20 is arranged near the side of the carrier 104 in the first direction and is adjacent to the carrier 104. In this way, the workpiece can be directly carried by the carrier 104 when it is taken out of the material box 20, which is more efficient. The processing station 303 is arranged in a straight line with the material box 20 and the carrier 104, which relatively optimizes the workpiece transfer path and can also help improve the workpiece transfer efficiency.

[0044] See also Figure 2 and Figure 3 Furthermore, the supporting member 104 and the material box 20 are relatively movably arranged in the vertical direction; the mounting frame 101 includes a supporting portion 1011 and a mounting portion 1012, the supporting portion 1011 is movably arranged in a first direction, the mounting portion 1012 is liftable in the vertical direction on the supporting portion 1011, and the clamping member 102 and the adsorption member 103 are arranged on the mounting portion 1012.

[0045] The carrier 104 and the material box 20 are arranged to be relatively movable in the vertical direction, so that the workpiece can be taken out of the material box 20 without being interfered with horizontally by the carrier 104, and it can also help the carrier 104 to stably receive the workpiece. Specifically, when the clamping member 102 clamps the workpiece of the target layer in the material box 20, the material box 20 and the carrier 104 are controlled to move relative to each other in the vertical direction, and the workpiece of the target layer can be taken out by the clamping member 102 along the first direction without being hindered by the carrier 104. At the same time, the height of the carrier 104 can be adjusted to be slightly lower than the height of the workpiece of the target layer, and of course it can also be the same height, so that the workpiece can be transferred to the carrier 104 more smoothly.

[0046] Similarly, the mounting portion 1012 of the mounting frame 101 serves as a supporting structure for the clamping member 102 and the adsorbing member 103. The mounting portion 1012 can be raised and lowered relative to the supporting portion 1011 in the vertical direction, and can be used to adjust the height of the clamping member 102 and the adsorbing member 103 in the vertical direction, so that the clamping member 102 can be used to clamp workpieces at different layers in the material box 20, and the adsorbing member 103 can also adsorb workpieces on the supporting member 104. The supporting portion 1011 is movably arranged along a first direction, and is used to adjust the mounting frame 101 to move and transfer the workpiece to which the clamping member 102 or the adsorbing member 103 acts.

[0047] Furthermore, in the above-mentioned embodiment, the clamping member 102 is rotatably arranged on the mounting frame 101 in the plane formed by the first direction and the vertical direction as an example, and the clamping member 102 can be rotated to the corresponding first state or second state. It can be understood that the clamping member 102 and the adsorbent 103 of the embodiment of the present application are avoided in a relatively rotatable manner. Of course, in the plane formed by the first direction and the vertical direction, within the rotation range of the clamping member 102, the adsorbent 103 and the clamping member 102 are arranged to avoid each other to avoid interference during the adjustment process. Taking the adsorbent 103 as an example, the clamping member 102 can pass through the spacer 1031 during the rotation process in the plane formed by the first direction and the vertical direction. The structure of the clamping member 102 relative to the adsorbent 103 occupies a small space, so the space required for the rotatable setting of the clamping member 102 is also smaller and more flexible. The rotation setting control is more convenient, and it only needs to be rotated and controlled according to the set rotation center.

[0048] When it is necessary to use the clamping member 102 alone, the clamping member 102 is controlled to rotate relative to the adsorption member 103 until the clamping end of the clamping member 102 protrudes from the adsorption member 103 along the first direction toward the discharge port side close to the material box 20; when it is necessary to use the adsorption member 103 alone, the clamping member 102 is controlled to rotate relative to the adsorption member 103 until the adsorption end of the adsorption member 103 protrudes downward from the clamping member 102 along the vertical direction. There is no specific restriction on the rotation angle of the clamping member 102, and any requirements for the realization of the first state and the second state mentioned above are acceptable. In the embodiment of the present application, the rotation angle of the clamping member 102 is 90° as an example. In the first state, the corresponding clamping member 102 rotates to a horizontal state where the clamping end protrudes from the adsorption member 103 along the first direction, and in the second state, the corresponding clamping member 102 rotates to a state vertically above the adsorption end of the adsorption member 103.

[0049] See also Figure 3 and Figure 4Furthermore, the feeding mechanism 10 in the above embodiment may also include a first sensing member 105 and a first sensing member 106 corresponding to the first sensing member 105, the first sensing member 105 is arranged on the clamping member 102, and the first sensing member 106 is arranged on the mounting frame 101; when the first sensing member 105 and the first sensing member 106 are inductively matched, the clamping member 102 rotates to the corresponding first state.

[0050] The embodiment of the present application utilizes the sensing cooperation between the first sensing member 105 and the first sensing member 106 to sense and feedback whether the rotation of the clamping member 102 reaches the target state. Of course, the operation of the feeding mechanism 10 in the embodiment of the present application is controlled by an automated control system as an example, that is, the clamping effect of the clamping member 102 in the feeding mechanism 10, the rotation of the clamping member 102, the adsorption effect of the adsorption member 103, the movement of the mounting frame 101, and the relative movement of the carrier 104 and the material box 20 can be controlled automatically.

[0051] The embodiment of the present application takes the case where the sensing clamping member 102 rotates to the first state as an example. When the clamping member 102 rotates, the first sensing member 105 rotates synchronously. When the first sensing member 105 and the first sensor member 106 are inductively matched, the first sensor member 106 feeds back the sensing signal to the control system, and the control system stops driving the clamping member 102 to rotate, and can carry out subsequent clamping operations. It is understandable that if the control system does not receive the signal from the first sensor member 106 sensing the first sensing member 105 during the process of controlling the clamping member 102 to rotate to the corresponding first state, then the subsequent clamping work of the clamping member 102 will never be carried out, or the control system will report an error and shut down. Therefore, the corresponding setting of the first sensing member 105 and the first sensor member 106 can protect the safe operation of the feeding mechanism 10 and determine that the clamping member 102 is accurately rotated to the corresponding first state.

[0052] See also Figure 3 and Figure 4 Furthermore, the feeding mechanism 10 may also include a second sensing member 107 and a second sensing member 108 that can sense the second sensing member 107. The second sensing member 107 is disposed on the clamping member 102, and the second sensing member 108 is disposed on the mounting frame 101. When the second sensing member 107 and the second sensing member 108 sense and cooperate, the clamping member 102 rotates to the corresponding second state.

[0053] The arrangement of the second sensing element 107 in cooperation with the second sensing element 108 is identical to the arrangement of the first sensing element 105 in cooperation with the first sensing element 106 , except that the second sensing element 107 in cooperation with the second sensing element 108 is used to sense when the clamping element 102 rotates to the corresponding second state, which will not be elaborated here.

[0054] It should be noted that in the embodiment of the present application, a sensing member may be provided to cooperate with two sensing members, that is, when the clamping member 102 rotates to the first state, the sensing member provided on the clamping member 102 cooperates with the first sensing member 106 for sensing, and when the clamping member 102 rotates to the second state, the sensing member provided on the clamping member 102 cooperates with the second sensing member 108 for sensing; equivalently, two sensing members may be provided to cooperate with one sensing member, which will not be elaborated on.

[0055] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

[0056] See also Figure 1 and Figure 5 The embodiment of the present application also provides a processing device 30, including a machine base 302, a processing mechanism 301 and the feeding mechanism 10 in any of the above embodiments, the processing mechanism 301 and the material box 20 are arranged on the machine base 302, the mounting frame 101 of the feeding mechanism 10 is movably arranged on the machine base 302, and the processing mechanism 301 is configured to process a workpiece placed in a processing station 303.

[0057] Since the processing equipment 30 of the embodiment of the present application includes the feeding mechanism 10 in any of the above embodiments, it has the beneficial effects brought by the feeding mechanism 10 in any of the above embodiments, which will not be described in detail here.

[0058] The working principle of the processing device 30 provided in the embodiment of the present application is as follows:

[0059] The clamping member 102 and the adsorbing member 103 are relatively movable and adjusted to make the clamping member 102 work alone, and then the mounting frame 101 is moved until the clamping end of the clamping member 102 extends into the material box 20, and the clamping member 102 is controlled to clamp the target workpiece, and then the mounting frame 101 is controlled to move away from the material box 20 to take the target workpiece out of the material box 20 and transfer it to the carrier 104, and then the clamping member 102 is controlled to place the target workpiece on the carrier 104; then, the clamping member is relatively movable and adjusted again 102 and the adsorption member 103, so that the adsorption member 103 is in a state of working alone, and the adsorption member 103 is controlled to adsorb the target workpiece on the carrier 104, and then the mounting frame 101 is moved to transfer the target workpiece to the processing station 303 of the processing mechanism 301, and then the adsorption member 103 is controlled to place the target workpiece on the processing station 303; and then the processing mechanism 301 is controlled to process the target workpiece located at the processing station 303, thus completing the complete process of a workpiece from loading to processing.

[0060] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A feeding mechanism for transferring sheet workpieces from a material box to a processing station, characterized in that: The feeding mechanism comprises a mounting frame, a clamping member and an adsorbing member, wherein the mounting frame is movably arranged; the clamping member and / or the adsorbing member are movably arranged on the mounting frame, the clamping member can clamp the workpiece, the adsorbing member can adsorb the workpiece, and the adsorbing member and the clamping member can be relatively avoidable, so that the clamping member can clamp the workpiece alone or the adsorbing member can adsorb the workpiece alone; After the clamping member clamps the workpiece independently, the mounting frame is moved to move the workpiece from the material box to a carrier, and then the adsorption member is switched to independently adsorb the workpiece located on the carrier, and then the mounting frame is moved to move the workpiece to the processing station.

2. The feeding mechanism according to claim 1, characterized in that: The first state is defined as the state in which the clamping member and the adsorbing member cooperate when the clamping member is capable of clamping the workpiece alone. When the adsorbing member and the clamping member are relatively movable and adjusted to the first state, the clamping end of the clamping member protrudes from the adsorbing member in a direction close to the material outlet of the material box. The second state is defined as the state in which the adsorption member and the clamping member cooperate when the adsorption member is capable of adsorbing the workpiece alone. When the adsorption member and the clamping member are relatively movable and adjusted to the second state, the adsorption action end of the adsorption member protrudes from the clamping member along the adsorption direction.

3. The feeding mechanism according to claim 2, characterized in that: The workpieces are defined to be placed in the material box in a horizontal state and stacked in a vertical direction, a first direction parallel to the horizontal plane is defined, the material box outlet is arranged toward the first direction, the mounting frame is movably arranged along the first direction, the clamping member clamps the edge of the workpiece in the first direction, and the adsorbing member adsorbs the upper surface of the workpiece in the vertical direction; The clamping member is rotatably disposed on the mounting frame within a plane formed by the first direction and the vertical direction, and the clamping member can be rotated to the corresponding first state or the second state.

4. The feeding mechanism according to claim 3, characterized in that: The feeding mechanism further includes a first induction member and a first sensing member corresponding to and capable of sensing the first induction member, wherein the first induction member is disposed on the clamping member, and the first sensing member is disposed on the mounting frame; When the first sensing member and the first sensing member are inductively matched, the clamping member rotates to correspond to the first state.

5. The feeding mechanism according to claim 4, characterized in that: The feeding mechanism further includes a second sensing member and a second sensing member corresponding to and capable of sensing the second sensing member, wherein the second sensing member is disposed on the clamping member, and the second sensing member is disposed on the mounting frame; When the second sensing member is inductively matched with the second sensing member, the clamping member rotates to correspond to the second state.

6. The feeding mechanism according to any one of claims 1 to 5, characterized in that: The direction in which the bearing member carries the workpiece is the same as the direction in which the material box carries the workpiece, and the bearing member and the material box are relatively movably arranged along the direction in which the workpiece is carried.

7. The feeding mechanism according to claim 6, characterized in that: The carrier is arranged near the discharge port side of the material box and is adjacent to the material box.

8. The feeding mechanism according to claim 6, characterized in that: The mounting frame includes a supporting portion and a mounting portion, the supporting portion is movably arranged, the mounting portion is movably connected to the supporting portion along the direction in which the bearing member carries the workpiece, and the clamping member and the adsorption member are arranged on the mounting portion.

9. The feeding mechanism according to claim 5, characterized in that: The material box, the carrier and the processing station are arranged in sequence along the first direction, and the material outlet of the material box is arranged close to the carrier side in the first direction and adjacent to the carrier; The direction in which the bearing member bears the workpiece and the direction in which the material box bears the workpiece are along the vertical direction, and the bearing member and the material box are relatively movably arranged along the vertical direction; The mounting frame includes a supporting portion and a mounting portion, the supporting portion is movably arranged along the first direction, the mounting portion is liftable on the supporting portion along a vertical direction, and the clamping member and the adsorption member are arranged on the mounting portion.

10. A processing equipment, characterized in that: The processing equipment includes a machine base, a processing mechanism and a feeding mechanism as described in any one of claims 1 to 9, the processing mechanism and the material box are arranged on the machine base, the mounting frame of the feeding mechanism is movably arranged on the machine base, and the processing mechanism is configured to process the workpiece placed at the processing station.

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