Horizontal adjusting device of chemical vapor deposition equipment
By designing screws, handles, scale bars and other components in chemical vapor deposition equipment, more intuitive horizontal observation and accurate adjustment are achieved, and dust is cleaned through the motor-driven brush block, which solves the inaccurate adjustment and dust of existing equipment. The accumulated problems have improved the flexibility and cleanliness of the equipment.
Patent Information
- Application Number
- CN202421168995.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-27
- Publication Date
- 2025-01-07
- Estimated Expiration
- 2034-05-27
AI Technical Summary
The existing level adjustment device of chemical vapor deposition equipment is not convenient for precise observation of adjustment quantities, and staff cannot intuitively observe the level of the equipment, resulting in insufficient accuracy and poor practicality.
A device including a screw, a rotary handle, a scale bar, a pad, a fixed rod and a scale mark is designed. The pad height is adjusted by rotating the handle and observing the position of the scale mark to achieve more intuitive horizontal observation; at the same time, a fixed The structure of bolts, slots, card blocks and support seats is easy to disassemble and assemble, and dust cleaning is achieved through the combination of motors, screws, movable blocks and brush blocks.
It realizes more accurate horizontal adjustment and convenient device disassembly and assembly, while avoiding the accumulation of dust under the equipment, improving the flexibility and cleanliness of the equipment.
Smart Images
Figure CN222313291U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field related to chemical vapor deposition equipment, in particular to a level regulating device for chemical vapor deposition equipment. Background Art
[0002] Chemical vapor deposition equipment is a device specially used to deposit thin film materials on the surface of a heated substrate. Its working principle is mainly based on chemical reactions in the gas phase to deposit solid thin films. This equipment has the advantages of high purity, good uniformity, and low cost. Therefore, it has a wide range of applications in many fields, including composite material preparation, microelectronics technology, semiconductor optoelectronic technology, solar energy utilization, optical fiber communications, superconducting technology, and protective coating preparation. When using chemical vapor deposition equipment, an adjustment device is required to adjust the horizontal position of the equipment.
[0003] However, the existing horizontal position adjustment device is not convenient for accurately observing the size of the adjustment amount during the adjustment process, and the staff cannot intuitively observe the horizontality of the equipment, which is not practical. Therefore, the present application provides a chemical vapor deposition equipment horizontal adjustment device to meet the needs. Utility Model Content
[0004] The purpose of the utility model is to provide a level adjustment device for chemical vapor deposition equipment to solve the problems raised in the above background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a horizontal adjustment device for chemical vapor deposition equipment, comprising a connecting plate, fixing bolts penetrate both sides of the upper part of the connecting plate, card slots are opened on both sides of the connecting plate, card blocks are installed inside the card slots, a support seat is fixed on one side of the card block, screws penetrate both sides of the upper part of the support seat, a turning handle is fixed above the screw rod, a scale bar is arranged on the outer side of the turning handle, a cushion block is installed below the screw rod, a fixing rod is arranged on one side of the cushion block, a scale mark is fixed above the fixing rod, and a reinforcement rod is fixed to the inner side of the connecting plate.
[0006] Preferably, the support seat is threadedly connected to the connecting plate via fixing bolts, and the support seat is symmetrically arranged with respect to the central axis of the connecting plate.
[0007] Preferably, the cushion block forms a lifting structure with a support seat through a screw rod, and the center axis of the cushion block coincides with the center axis of the screw rod.
[0008] Preferably, the scale mark and the scale bar are arranged correspondingly, and the scale mark and the fixing rod are arranged as an integrally formed structure.
[0009] Preferably, a motor is installed on one side of the connecting plate, a screw is installed on one output end of the motor, a movable block is sleeved on the outer side of the screw, sliding sleeves are fixed on both sides of the movable block, and a brush block is installed above the sliding sleeve.
[0010] Preferably, the shape of the sliding sleeve is consistent with the shape of the reinforcement rod, and the sliding sleeve is symmetrically arranged with respect to the central axis of the brush block.
[0011] Preferably, the brush block forms a sliding structure through a movable block and a screw rod, and the inner side of the movable block is arranged in a threaded shape.
[0012] Compared with the prior art, the beneficial effects of the utility model are:
[0013] 1. A chemical vapor deposition equipment level adjustment device, which is used in conjunction with a screw, a handle, a scale bar, a pad, a fixed rod and a scale mark. When in use, the chemical vapor deposition equipment is installed above a support seat, and a worker turns the handle to raise or lower the pad, and adjusts the height of the pad by observing the corresponding position of the scale mark on the outside of the scale bar, so that the worker can more intuitively observe the level of the chemical vapor deposition equipment, and the level adjustment result is more accurate;
[0014] 2. The horizontal adjustment device of the chemical vapor deposition equipment is provided with fixing bolts, a slot, a block and a support seat, the block is clamped inside the slot, and then the fixing bolt is inserted to connect and fix the support seat with the connecting plate, so that the device can be easily disassembled and assembled, and the structure is more flexible;
[0015] 3. The horizontal adjustment device for chemical vapor deposition equipment is provided with a reinforcing rod, a motor, a screw, a movable block, a sliding sleeve and a brush block. After the chemical vapor deposition equipment is installed on the support seat, the motor switch is turned on to drive the screw to rotate, thereby driving the brush block to slide under the chemical vapor deposition equipment. The brush block can clean the dust on the surface below the chemical vapor deposition equipment to avoid dust accumulation under the chemical vapor deposition equipment during long-term use. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0017] Figure 2 This is a schematic diagram of the structure of the support seat of the utility model;
[0018] Figure 3 This is a schematic diagram of the structure of the cushion block of the utility model;
[0019] Figure 4 It is a structural schematic diagram of the brush block of the utility model.
[0020] In the figure: 1. connecting plate; 2. fixing bolt; 3. slot; 4. clamping block; 5. supporting seat; 6. screw rod; 7. turning handle; 8. scale bar; 9. cushion block; 10. fixing rod; 11. scale mark; 12. reinforcement rod; 13. motor; 14. screw rod; 15. movable block; 16. sliding sleeve; 17. brush block. DETAILED DESCRIPTION
[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0022] See also Figure 1-3 The utility model provides a technical solution: a chemical vapor deposition equipment horizontal adjustment device, including a connecting plate 1, fixing bolts 2 are passed through both sides of the upper part of the connecting plate 1, and slots 3 are opened on both sides of the connecting plate 1. A clamping block 4 is installed inside the clamping slot 3, and a support seat 5 is fixed to one side of the clamping block 4. The support seat 5 is threadedly connected to the connecting plate 1 through the fixing bolts 2. The support seat 5 is symmetrically arranged with the central axis of the connecting plate 1. The clamping block 4 is clamped inside the clamping slot 3, and then the fixing bolts 2 are inserted to connect and fix the support seat 5 to the connecting plate 1, so that the device can be easily disassembled and assembled, and screws 6 are passed through both sides of the upper part of the support seat 5, and a turning handle 7 is fixed above the screw 6. The outer side of the turning handle 7 A scale bar 8 is arranged on the side, a cushion block 9 is installed under the screw rod 6, and the cushion block 9 forms a lifting structure with the support seat 5 through the screw rod 6. The cushion block 9 coincides with the central axis of the screw rod 6. The staff raises and lowers the cushion block 9 by turning the handle 7, so as to adjust the height of the chemical vapor deposition equipment. A fixing rod 10 is arranged on one side of the cushion block 9, and a scale mark 11 is fixed on the top of the fixing rod 10. The scale mark 11 is arranged corresponding to the scale bar 8, and the scale mark 11 and the fixing rod 10 are an integrally formed structure. The height of the cushion block 9 is adjusted by observing the corresponding position of the scale mark 11 on the outside of the scale bar 8, so that the staff can observe the horizontality of the chemical vapor deposition equipment more intuitively;
[0023] See also Figure 2 and Figure 4A reinforcing rod 12 is fixed to the inner side of the connecting plate 1, a motor 13 is installed on one side of the connecting plate 1, a screw 14 is installed on one output end of the motor 13, a movable block 15 is sleeved on the outer side of the screw 14, and sliding sleeves 16 are fixed on both sides of the movable block 15. A brush block 17 is installed above the sliding sleeve 16 to avoid dust accumulation under the chemical vapor deposition equipment during long-term use. The shape of the sliding sleeve 16 is consistent with the shape of the reinforcing rod 12, and the sliding sleeve 16 is symmetrically arranged with the central axis of the brush block 17. The sliding sleeve 16 slides on the outer side of the reinforcing rod 12 to limit the movement of the brush block 17, and the stability is high. The brush block 17 forms a sliding structure with the screw 14 through the movable block 15, and the inner side of the movable block 15 is threaded. By turning on the switch of the motor 13, the screw 14 is driven to rotate, thereby driving the brush block 17 to slide under the chemical vapor deposition equipment, and the brush block 17 can clean the dust on the surface below the chemical vapor deposition equipment.
[0024] Working principle: When using the chemical vapor deposition equipment level adjustment device, first turn on the external power supply, then clamp the block 4 in the slot 3, and then insert the fixing bolt 2 to connect and fix the support seat 5 to the connecting plate 1. Secondly, install the chemical vapor deposition equipment on the top of the support seat 5. The staff turns the handle 7 to raise and lower the cushion block 9, and adjusts the height of the cushion block 9 by observing the corresponding position of the scale mark 11 on the outside of the scale bar 8. In this way, the staff can observe the horizontality of the chemical vapor deposition equipment more intuitively. Finally, turn on the switch of the motor 13 and drive the screw rod 14 to rotate, thereby driving the brush block 17 to slide under the chemical vapor deposition equipment. The brush block 17 can clean the dust on the surface below the chemical vapor deposition equipment. When the device is not used, the external power supply of the device is cut off. The model of the motor 13 is ZD-2HD542. In this way, the use process of the chemical vapor deposition equipment level adjustment device is completed.
[0025] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A chemical vapor deposition equipment level adjustment device, comprising a connecting plate (1), characterized in that: Fixing bolts (2) are passed through both sides of the upper part of the connecting plate (1), and slots (3) are provided on both sides of the connecting plate (1). A clamping block (4) is installed inside the slot (3), and a support seat (5) is fixed on one side of the clamping block (4). Screws (6) are passed through both sides of the upper part of the support seat (5), and a turning handle (7) is fixed above the screw rod (6). A scale bar (8) is arranged on the outer side of the turning handle (7). A cushion block (9) is installed below the screw rod (6), and a fixing rod (10) is arranged on one side of the cushion block (9). A scale mark (11) is fixed above the fixing rod (10), and a reinforcement rod (12) is fixed on the inner side of the connecting plate (1).
2. The chemical vapor deposition equipment level adjustment device according to claim 1, characterized in that: The support seat (5) is threadedly connected to the connecting plate (1) via fixing bolts (2), and the support seat (5) is symmetrically arranged with respect to the central axis of the connecting plate (1).
3. The chemical vapor deposition equipment level adjustment device according to claim 1, characterized in that: The cushion block (9) forms a lifting structure with the support seat (5) through the screw rod (6), and the center axis of the cushion block (9) coincides with that of the screw rod (6).
4. The chemical vapor deposition equipment level adjustment device according to claim 1, characterized in that: The scale mark (11) is arranged corresponding to the scale bar (8), and the scale mark (11) and the fixing rod (10) are arranged as an integrally formed structure.
5. The chemical vapor deposition equipment level adjustment device according to claim 1, characterized in that: A motor (13) is installed on one side of the connecting plate (1), a screw rod (14) is installed on one output end of the motor (13), a movable block (15) is sleeved on the outer side of the screw rod (14), sliding sleeves (16) are fixed on both sides of the movable block (15), and a brush block (17) is installed above the sliding sleeve (16).
6. The chemical vapor deposition equipment level adjustment device according to claim 5, characterized in that: The shape of the sliding sleeve (16) is consistent with the shape of the reinforcing rod (12), and the sliding sleeve (16) is symmetrically arranged with respect to the central axis of the brush block (17).
7. The chemical vapor deposition equipment level adjustment device according to claim 5, characterized in that: The brush block (17) forms a sliding structure with the screw rod (14) through the movable block (15), and the inner side of the movable block (15) is arranged in a threaded shape.