Guide assembly and polishing machine table

Abstract

The utility model provides a guide assembly and a polishing machine table. The guide assembly comprises a guide column and a shell. The guide column is arranged on the base, the guide column is provided with a containing cavity formed in the axial direction of the guide column, and the containing cavity is used for allowing a positioning piece on the tray to penetrate in or out in the axial direction of the guide column so as to position the relative position between the base and the tray; the shell is arranged on the outer side of the guide column in a sleeving mode, located at the end close to the tray and used for reducing abrasion of the guide column in the using process. According to the configuration, the shell is arranged on the guide column in a sleeving mode, abrasion of the guide column is reduced, meanwhile, only the shell needs to be detached during replacement, the replacement step is simplified, and meanwhile the yield of the polishing machine table and the yield of produced products can be further improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a guide component and a polishing machine. Background Art

[0002] Polishing is the best way to flatten the wafer surface, and the most commonly used polishing process is chemical mechanical planarization (CMP). The CMP process is to grind the wafer to the target thickness by adsorbing the wafer on the grinding head, rotating the grinding pad and applying a certain pressure.

[0003] In the CMP process, the up and down movement of the HCLU (Head Clean Load / Unload) device will cause wear on the guide components, resulting in abnormal wafer placement and pick-up of the polishing head. Since the guide component is a columnar component, the entire HCLU tray needs to be removed for subsequent replacement. The operation is complicated and the downtime is long, affecting the product yield and yield.

[0004] Based on this, how to increase the speed of replacing guide components, optimize maintenance operations, and reduce maintenance time have become technical problems that technical personnel in this field need to solve. Utility Model Content

[0005] The utility model aims to provide a guide assembly and a polishing machine to solve the problems in the prior art of guide parts being worn, complicated to replace, long downtime, and affecting the productivity and yield of products.

[0006] In order to achieve the above-mentioned object, the utility model provides a guide assembly, comprising: a guide column and a housing;

[0007] The guide column is arranged on the base, and the guide column has a receiving cavity opened along its own axial direction, and the receiving cavity is used for allowing the positioning member on the tray to penetrate into or out along the axial direction of the guide column to locate the relative position between the base and the tray;

[0008] The shell is sleeved on the outer side of the guide column and is located near one end of the tray, so as to reduce the wear of the guide column during use.

[0009] Optionally, the shell has a notch, which is adapted to the opening of the accommodating cavity. When the shell is sleeved on the guide column, the notch is located on the side of the guide column close to the tray. The notch and the opening of the accommodating cavity overlap in the axial direction of the guide column for the positioning piece to pass through.

[0010] Optionally, the shell has a side wall, and when the shell is sleeved on the guide column, the side wall at least covers a portion of the guide column.

[0011] Optionally, the guide assembly further includes a fixing member, which is disposed around the outer circumference of the side wall and is used to fix the shell and the guide column.

[0012] Optionally, the fixing member includes a fastening nut and a fastening hole, the fastening hole passes through the side wall, and the fastening nut passes through the fastening hole and abuts against the outer wall of the guide column.

[0013] Optionally, the fixing member includes a plurality of the fastening nuts, and the plurality of the fastening nuts are evenly arranged around the outer circumference of the side wall.

[0014] Optionally, the fixing member is provided with an outer convex section, the outer convex section is arranged around the outer circumference of the side wall, the outer convex section protrudes outward in the radial direction of the guide column, and the fastening hole is arranged on the outer convex section.

[0015] Optionally, the minimum distance between the side wall and the guide column is S, then 0.8 mm ≤ S ≤ 1.2 mm is satisfied.

[0016] In order to achieve the above object, the utility model also provides a polishing machine, comprising: a base, a tray and the guide assembly as described above;

[0017] The guide assembly is arranged on the base;

[0018] The tray is used to carry wafers. The tray is detachably connected to the base. A positioning member is provided on a side of the tray close to the base. The positioning member is inserted into the accommodating cavity during the process of the tray and the base approaching each other.

[0019] Optionally, the polishing machine further comprises a driving member, wherein the driving member is connected to the tray and is used to drive the tray to approach or move away from the base along the axial direction of the guide column.

[0020] Compared with the existing guide structure, the guide assembly and polishing machine provided by the present application have the following advantages:

[0021] The guide assembly provided by the present application reduces the wear between the positioning part and the guide post due to circumferential offset during the lifting of the tray by mounting the shell on the guide post. At the same time, due to the corresponding positional relationship between the existing guide post and the positioning part, the tray and the guide post need to be removed together during the replacement of the guide post, and then installed together and calibrated, which is time-consuming and labor-intensive, and seriously affects the productivity and product yield of the polishing machine. However, when using the guide assembly provided by the present application, it is only necessary to remove the shell during replacement, which simplifies the replacement steps and can also further improve the productivity of the polishing machine and the yield of the output products.

[0022] Furthermore, by leaving a gap between the side wall and the guide column, and limiting the size of the gap to between 0.8 mm and 1.2 mm, when wear occurs on the guide column during actual use, the positioning can be fine-tuned by adjusting the distance between the side wall and the guide column, thereby extending the service life of the guide column and reducing the replacement frequency of the guide column.

[0023] The polishing machine provided in the present application reduces the wear of the guide column during operation by using the above-mentioned guide assembly. When replacing, only the shell needs to be replaced, without the need to remove the entire guide column and tray and reposition them. This simplifies the replacement steps, reduces the time and economic costs of subsequent maintenance, and further improves the output of the polishing machine, while also improving the yield of the products produced by the polishing machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A three-dimensional diagram of a guide assembly provided in an embodiment of the utility model;

[0025] Figure 2 A cross-sectional view of a guide assembly provided in an embodiment of the utility model;

[0026] Figure 3 A three-dimensional surface of a housing provided in an embodiment of the utility model;

[0027] The description of each reference numeral is as follows:

[0028] 1-guide column; 11-accommodating cavity; 111-opening;

[0029] 2-shell; 21-notch; 22-side wall;

[0030] 3-fixing member; 31-fastening nut; 32-external convex section;

[0031] X-axial direction; Y-radial direction; Z-circumferential direction. DETAILED DESCRIPTION

[0032] In order to make the purpose, advantages and features of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the drawings is often a part of the actual structure. In particular, the emphasis of each drawing is different, and sometimes different scales are used.

[0033] As used in this specification, the singular forms "a", "an" and "the" include plural objects, the term "or" is generally used to include the meaning of "and / or", the term "several" is generally used to include the meaning of "at least one", and the term "at least two" is generally used to include the meaning of "two or more". In addition, the terms "first", "second" and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" and "third" may explicitly or implicitly include one or at least two of the features, "one end" and "the other end" and "the proximal end" and "the distal end" generally refer to two corresponding parts, which include not only the endpoints, and the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. In addition, as used in this specification, an element disposed on another element generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements may be direct or indirect through an intermediate element, and it cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element may be in any orientation such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. The terms "upper", "lower", "top" and "bottom" are generally relative position relationships arranged in the direction of gravity; the terms "vertical, vertical direction" generally refer to the direction of gravity, which is generally perpendicular to the ground, and "horizontal, horizontal plane direction" generally refers to the direction parallel to the ground; for ordinary technicians in this field, the specific meanings of the above terms in this specification can be understood according to specific circumstances.

[0034] The utility model aims to provide a guide assembly and a polishing machine to solve the problems in the prior art of guide parts being worn, complicated to replace, long downtime, and affecting the productivity and yield of products.

[0035] As can be understood by those skilled in the art, the CMP (Chemical Mechanical Planarization) process is the most commonly used polishing technology, which is to absorb the wafer on the grinding head and apply a certain pressure to press the wafer on the rotating grinding pad for grinding until the wafer is ground to the target thickness. The CMP machine usually includes a HCLU (Head Clean Load / Unload, grinding head cleaning and wafer loading and unloading device) device, and the HCLU device is often configured in a tray shape for wafer loading and unloading transfer, and for cleaning the grinding head and the wafer placed on the tray. The existing tray needs to be raised and lowered during the process of loading and unloading the wafer, and in order to ensure that the grinding head does not damage the wafer during the process of adsorbing the wafer, the relative position of the tray and the machine base needs to be fixed. Therefore, a guide structure is provided on the machine base, and a positioning structure is provided at the bottom of the tray. In the process of the tray moving downward and approaching the machine base, the guide structure is inserted in the positioning structure to ensure that the grinding head can adsorb the wafer at a suitable position, reducing unnecessary damage to the wafer during loading and unloading. However, the guide structure in the prior art is designed as a columnar structure. When it needs to be replaced, the guide structure and the tray need to be disassembled together, and the replaced guide structure and the tray need to be installed together, and then the relative position is calibrated, which makes the entire replacement process very long, greatly reducing the productivity of the polishing machine. Based on this, the present embodiment reduces the wear of the guide column by sleeve-arranging a shell at one end of the guide column close to the tray. At the same time, only the shell needs to be replaced during replacement, which improves the replacement efficiency, and at the same time improves the productivity of the polishing machine and the yield of the output product.

[0036] Please refer to Figures 1 to 3The utility model provides a guide assembly, including: a guide column 1 and a shell 2; the guide column 1 is arranged on a base (not shown in the figure), and the guide column 1 has an accommodating cavity 11 opened along its own axial direction X, and the accommodating cavity 11 is used for a positioning piece (not shown in the figure) on a tray (not shown in the figure) to penetrate into or out of the axial direction X of the guide column 1, so as to locate the relative position between the base and the tray; the shell 2 is sleeved on the outer side of the guide column 1 and is located at one end close to the tray, so as to reduce the wear of the guide column 1 during use. Those skilled in the art can understand that the guide column 1 is a hollow columnar structure, which has a receiving cavity 11 at the end away from the base along its own axial direction X, for the positioning member to pass through to achieve positioning, wherein the positioning member is arranged on the surface of the tray close to the base, and in order to facilitate insertion into the receiving cavity 11, the end of the positioning member close to the base is pointed, which also leads to the collision of the sharp corner with the side wall 22 of the guide column 1 during the movement of the tray once a circumferential Z deviation occurs, thereby aggravating the wear of the guide column 1, thereby making the positioning between the base and the tray inaccurate, and increasing the possibility of unnecessary damage to the wafer during transportation. Configured in this way, the present embodiment sleeves the shell 2 on the end of the guide column 1 close to the tray, so that the positioning member first contacts the shell 2 during the process of being inserted into the accommodating cavity 11, thereby reducing the wear of the guide column 1 during use. At the same time, when replacement is needed, it is no longer necessary to replace the entire guide column 1, and only the shell 2 needs to be disassembled and replaced, which eliminates the step of positioning and calibration after replacing the guide column 1 in the prior art, thereby improving the replacement efficiency, reducing the downtime of the machine, and improving the production efficiency of the machine and the yield of the output products.

[0037] For further information, please continue to refer to Figures 1 to 3 The housing 2 has a notch 21, which matches the opening 111 of the accommodating cavity 11. When the housing 2 is sleeved on the guide column 1, the notch 21 is located on the side of the guide column 1 close to the tray. The notch 21 overlaps with the opening 111 of the accommodating cavity 11 in the axial direction X of the guide column 1, and is used for the positioning member to pass through. It should be noted that Figures 1 to 3 In the illustrated example, the notch 21 and the opening 111 of the accommodating chamber 11 are both circular, and accordingly, the cross-sectional shape of the positioning member is also circular. At the same time, the sizes of the notch 21 and the opening 111 of the accommodating chamber 11 are adapted to each other and are slightly larger than the size of the positioning member. Of course, in other embodiments, the notch 21 and the opening 111 of the accommodating chamber 11 may also be in other shapes (such as rectangles, triangles or other irregular shapes), and accordingly, the positioning member should also be in a shape adapted thereto, which is not limited in the present embodiment.

[0038] Furthermore, the housing 2 has a side wall 22. When the housing 2 is sleeved on the guide post 1, the side wall 22 at least covers a portion of the guide post 1. Figures 1 to 3In the illustrated example, the guide post 1 is a cylindrical member, and accordingly, the side wall 22 of the shell 2 is curved and matched with the curvature of the side wall 22 of the guide post 1 so as to be completely sleeved on the outside of the guide post 1. As an optional embodiment, the shell 2 may only cover a portion of the guide post 1 to reduce the wear of the positioning member on the guide post 1 when the positioning member is inserted into the accommodating cavity 11. At the same time, the covering range of the shell 2 is preferably larger than the range in which the tray can contact the guide post 1 along the axial direction X of the guide post 1, thereby avoiding the wear of the guide post 1 by the tray during movement, thereby reducing the impact on the service life of the guide post 1.

[0039] In an optional embodiment, the guide assembly further includes a fixing member 3, which is arranged around the outer periphery of the side wall 22, and is used to fix the housing 2 to the guide column 1. Further, the fixing member 3 includes a fastening nut 31 and a fastening hole (not shown in the figure), the fastening hole passes through the side wall 22, the fastening nut 31 passes through the fastening hole, and abuts against the outer wall of the guide column 1. Furthermore, the fixing member 3 includes a plurality of fastening nuts 31, and the plurality of fastening nuts 31 are evenly arranged around the outer periphery of the side wall 22. It should be noted that in Figures 1 to 3 In the embodiment, the fixing member 3 is an annular member, which is arranged around the circumference Z of the guide column 1. Four fastening nuts 31 and fastening holes are arranged on the fixing member 3. The size of the fastening nuts 31 is adapted to the size of the fastening holes. The outer periphery of the fastening nuts 31 has a threaded section. Correspondingly, the fastening hole can also be a threaded hole. The four fastening nuts 31 are evenly distributed around the circumference Z of the guide column 1, and are arranged opposite to each other in pairs. The connecting line between the two fastening nuts 31 arranged opposite to each other is perpendicular to the connecting line between the other two fastening nuts 31 arranged opposite to each other. At the same time, since the gap between the fixing member 3 and the guide column 1 is relatively small, the fixing between the fixing member 3 and the guide column 1 can be achieved by relying on the abutment between the fastening nuts 31 and the guide column 1. When the fixing is fixed in the above manner, when the housing 2 needs to be replaced, the disassembly and installation can be completed relatively easily, which further improves the maintenance efficiency.

[0040] As an alternative embodiment, the fixing member 3 is provided with an outer convex section 32, which is arranged around the outer periphery of the side wall 22, and the outer convex section 32 protrudes outward along the radial direction Y of the guide column 1, and the fastening hole is arranged on the outer convex section 32. It should be noted that the outer convex section 32 can increase the thickness of the side wall 22, and at the same time increase the contact area between the fastening hole and the fastening nut 31, thereby further improving the fixing effect of the fixing member 3. Of course, in other embodiments, the fixing member 3 can also improve the fixing effect by adding other structures, and those skilled in the art can configure this according to actual conditions, and this embodiment does not limit this.

[0041] As a preferred embodiment, the minimum distance between the side wall 22 and the guide column 1 is S, which satisfies 0.8mm≤S≤1.2mm. With such configuration, in this embodiment, a gap is left between the side wall 22 of the housing 2 and the guide column 1. Although the housing 2 can protect the guide column 1 from wear during the insertion of the positioning piece, it cannot prevent the guide column 1 from aging and wear during use. At this time, the operator can use the fastening nut 31 to adjust the distance between the side wall 22 and the guide column 1, thereby adjusting the insertion position of the positioning piece to protect the aging and worn parts of the guide column 1 from further deterioration, thereby further extending the service life of the guide column 1. It should be noted that in this embodiment, the minimum distance between the side wall 22 and the guide column 1 is S, S≥0.8mm, which can ensure that the fastening screw has a certain adjustment range to achieve fine adjustment, S≤1.2mm, which can ensure that the fastening screw and the guide column 1 abut against each other to achieve fixation between the fixing member 3 and the guide column 1. In other embodiments, S can also be other reasonable values, and those skilled in the art can configure it according to actual conditions.

[0042] In another embodiment, the utility model also provides a polishing machine, including: a base (not shown in the figure), a tray (not shown in the figure) and the guide assembly as described above; the guide assembly is arranged on the base; the tray is used to carry a wafer (not shown in the figure), the tray is detachably connected to the base, and a positioning member (not shown in the figure) is arranged on the side of the tray close to the base, and the positioning member is inserted into the accommodating cavity 11 during the process of the tray and the base approaching each other. It should be noted that in this embodiment, the polishing machine can be a CMP machine or other machines with a polishing function; the base, the tray, and the positioning member are all metal components; the guide column 1 and the shell 2 are consumables, and in order to facilitate disassembly and installation, they are all plastic components. Of course, in some other embodiments, the base, the tray, the positioning member, the guide column 1 and the shell 2 can also be other reasonable materials, and this embodiment does not limit this.

[0043] With such a configuration, by using the above-mentioned guide assembly, the wear of the guide column 1 during operation is reduced, and when replacing, only the shell 2 needs to be replaced, without the need to remove the entire guide column 1 and the tray and reposition them, which simplifies the replacement steps, reduces the time cost and economic cost of subsequent maintenance, and further improves the output of the polishing machine, while also improving the yield of the products produced by the polishing machine.

[0044] Furthermore, the polishing machine also includes a driving member (not shown in the figure), which is connected to the tray and is used to drive the tray to approach or move away from the base along the axial direction X of the guide column 1. It should be noted that the driving member can move along the axial direction X of the guide column 1, and the driving member can be a cylinder or other components with the same function, which is not limited in this embodiment.

[0045] In summary, in the guide assembly and polishing machine provided in the embodiments of the utility model, the guide assembly includes: a guide column and a shell; the guide column is arranged on the base, and the guide column has a receiving cavity opened along its own axial direction, and the receiving cavity is used for allowing the positioning piece on the tray to penetrate into or out along the axial direction of the guide column to locate the relative position between the base and the tray; the shell is sleeved on the outside of the guide column and is located at one end close to the tray, so as to reduce the wear of the guide column during use.

[0046] Such a configuration, by sleeve-mounting the shell on the guide column, reduces the wear between the positioning piece and the guide column due to the circumferential offset during the lifting of the tray. At the same time, due to the corresponding positional relationship between the existing guide column and the positioning piece, the tray and the guide column need to be removed together during the replacement of the guide column, and then installed together and calibrated, which is time-consuming and labor-intensive, and seriously affects the productivity and product yield of the polishing machine. However, when using the guide assembly provided in the present application, it is only necessary to remove the shell during replacement, which simplifies the replacement steps and can further improve the productivity of the polishing machine and the yield of the output products.

[0047] Furthermore, by leaving a gap between the side wall and the guide column, and limiting the size of the gap to between 0.8 mm and 1.2 mm, when wear occurs on the guide column during actual use, the positioning can be fine-tuned by adjusting the distance between the side wall and the guide column, thereby extending the service life of the guide column and reducing the replacement frequency of the guide column.

[0048] Furthermore, by using the above-mentioned guide assembly, the wear of the guide column during operation is reduced, and when replacing, only the shell needs to be replaced, without the need to remove the entire guide column and tray and reposition them, which simplifies the replacement steps, reduces the time and economic costs of subsequent maintenance, and further improves the output of the polishing machine, while also improving the yield of the products produced by the polishing machine.

[0049] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A guide assembly, characterized in that: Comprising: a guide column and a housing; The guide column is arranged on the base, and the guide column has a receiving cavity opened along its own axial direction, and the receiving cavity is used for allowing the positioning member on the tray to penetrate into or out along the axial direction of the guide column to locate the relative position between the base and the tray; The shell is sleeved on the outer side of the guide column and is located close to one end of the tray, so as to reduce the wear of the guide column during use.

2. The guide assembly according to claim 1, characterized in that The shell has a notch, which is matched with the opening of the accommodating cavity. When the shell is sleeved on the guide column, the notch is located on the side of the guide column close to the tray. The notch and the opening of the accommodating cavity overlap in the axial direction of the guide column for the positioning piece to pass through.

3. The guide assembly according to claim 1, characterized in that The shell has a side wall, and when the shell is sleeved on the guide post, the side wall at least covers a portion of the guide post.

4. The guide assembly according to claim 3, characterized in that The guide assembly further comprises a fixing member, which is arranged around the outer circumference of the side wall and is used to fix the housing and the guide column.

5. The guide assembly according to claim 4, characterized in that The fixing member comprises a fastening nut and a fastening hole, wherein the fastening hole penetrates the side wall, and the fastening nut passes through the fastening hole and abuts against the outer wall of the guide column.

6. The guide assembly according to claim 5, characterized in that The fixing member includes a plurality of fastening nuts, and the plurality of fastening nuts are evenly arranged around the outer circumference of the side wall.

7. The guide assembly according to claim 5, characterized in that The fixing member is provided with an outer convex section, the outer convex section is arranged around the outer circumference of the side wall, the outer convex section protrudes outward along the radial direction of the guide column, and the fastening hole is arranged on the outer convex section.

8. The guide assembly according to claim 3, characterized in that: The minimum distance between the side wall and the guide column is S, which satisfies the condition that 0.8 mm ≤ S ≤ 1.2 mm.

9. A polishing machine, characterized in that: include: A base, a tray, and a guide assembly as claimed in any one of claims 1 to 8; The guide assembly is arranged on the base; The tray is used to carry wafers. The tray is detachably connected to the base. A positioning member is provided on a side of the tray close to the base. The positioning member is inserted into the accommodating cavity during the process of the tray and the base approaching each other.

10. The polishing machine according to claim 9, characterized in that: The polishing machine table also includes a driving member, which is connected to the tray and is used to drive the tray to approach or move away from the base along the axial direction of the guide column.

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