Evaporation boat clamping device

Abstract

The utility model discloses an evaporation boat clamping device which comprises an evaporation tank, an electrode, a baffle arranged on one side of the evaporation tank and a spacer sleeve, and the baffle is provided with an electrode hole penetrating through the thickness of the baffle; the electrode comprises a positive electrode seat and a negative electrode seat, the positive electrode seat penetrates through the electrode hole and extends into the evaporation tank, the positive electrode seat and the negative electrode seat are matched to form a placing opening for placing the evaporation boat, and the placing opening is communicated with the evaporation tank; the blocking sleeve is sleeved on the positive electrode seat, and at least one part of the blocking sleeve is located in the electrode hole to seal the gap between the electrode hole and the positive electrode seat, so that the probability that aluminum slag is deposited in the gap is reduced, electric conduction between the positive electrode seat and the blocking plate can be prevented, and the phenomenon that holes appear in a film is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of conductive films, and more specifically to an evaporation boat clamping device. Background Art

[0002] Conductive film is a polymer material with metal coated on the surface. It is widely used in lithium-ion batteries, and is mainly used as a battery current collector in lithium-ion batteries. Vacuum coating is to place the film material in a vacuum coating chamber and heat it with an evaporation source to evaporate it. The evaporated particles escape from the surface of the evaporation source and condense on the surface of the substrate to form a thin film. Vacuum coating is usually resistive heating. The evaporation boat is clamped between the positive and negative electrodes, and the material to be evaporated is placed in the evaporation boat. Current is passed through the electrodes, and the current flows through the evaporation boat. The evaporation boat heats up to evaporate the material to be evaporated.

[0003] On the one hand, in the existing evaporation boat clamping device, the installation and disassembly of the evaporation boat is inconvenient due to the need to frequently replace the evaporation boat, which will waste a lot of time in the process and reduce production efficiency. At the same time, when the evaporation boat working at high voltage and current is not in good contact with the electrode, it is very easy to damage the evaporation boat, thereby shortening the life of the evaporation boat. On the other hand, the existing evaporation electrode is installed on the electrode hole of the cooling plate, and there is a gap between the evaporation electrode and the electrode hole. During the evaporation process, part of the evaporation material will condense in the gap. For example, during the evaporation of aluminum, aluminum slag is deposited in the gap between the evaporation electrode and the electrode hole of the cooling plate. If it is not cleaned in time, the deposited aluminum slag will cause the electrode and the cooling plate to be conductive, thereby causing holes in the evaporated aluminum film, affecting product quality. Therefore, after a period of evaporation, the evaporation electrode needs to be disassembled and the inside of the hole needs to be knocked to clean the aluminum slag. It can be seen that the existing cleaning method requires the evaporation electrode to be disassembled every time, and the operation of disassembling and installing the evaporation electrode is cumbersome, which seriously affects the production efficiency. Utility Model Content

[0004] In order to overcome the deficiencies of the prior art, the utility model provides an evaporation boat clamping device to solve the problem that aluminum slag is easily deposited in the gap between the evaporation electrode and the electrode hole of the cooling plate.

[0005] The technical solution of the utility model is as follows: an evaporation boat clamping device, comprising an evaporation tank, an electrode, a baffle plate arranged on one side of the evaporation tank, and a baffle sleeve, the baffle plate is provided with an electrode hole that penetrates the thickness of the baffle plate; the electrode comprises a positive electrode seat and a negative electrode seat, the positive electrode seat passes through the electrode hole and extends into the evaporation tank, the positive electrode seat and the negative electrode seat cooperate to form a placement opening for placing the evaporation boat, and the placement opening is connected to the evaporation tank; the baffle sleeve is sleeved on the positive electrode seat, and at least a portion of the baffle sleeve is located in the electrode hole to seal the gap between the electrode hole and the positive electrode seat.

[0006] Furthermore, the baffle sleeve includes a sleeve body and a baffle portion formed by the sleeve body extending radially outward, the sleeve body and the baffle portion are both sleeved on the positive electrode seat, and the sleeve body passes through the electrode hole to be connected to the baffle portion, and the baffle portion abuts against the end surface of the baffle plate facing the evaporation tank.

[0007] Furthermore, it also includes a clamping assembly, which is arranged on one side of the baffle, and the clamping assembly includes a base, a pressure cap, a compression spring, a first limit member and a second limit member, one end of the base is connected to the baffle, and the other end of the base has a threaded hole, at least a portion of the pressure cap is screwed into the threaded hole, the base and the pressure cap cooperate to form a accommodating cavity for allowing the positive electrode seat to pass through, the first limit member and the second limit member are both mounted on the positive electrode seat and located in the accommodating cavity, and the compression spring is arranged between the first limit member and the second limit member.

[0008] Furthermore, an annular protrusion is provided on the outer wall of the positive electrode seat, and the annular protrusion abuts against the first limiting member to limit the position of the first limiting member.

[0009] Furthermore, the second limiting member includes a base and a first latching protrusion formed by the base extending radially outward, and the pressing cap is provided with a second latching protrusion, the second latching protrusion and the first latching protrusion are staggered with each other, and the side wall of the second latching protrusion abuts against the side wall of the first latching protrusion.

[0010] Furthermore, it also includes a first nut, which is sleeved on an end of the retaining sleeve away from the evaporation tank.

[0011] Furthermore, it also includes a bottom plate, and the baffle and the negative electrode seat are both arranged on the bottom plate.

[0012] Furthermore, one end of the positive electrode seat facing the placement port is recessed inward to form a first recess, and one end of the negative electrode seat facing the placement port is recessed inward to form a second recess, and the first recess and the second recess are correspondingly arranged to respectively clamp the two ends of the evaporation boat.

[0013] Furthermore, one end of the positive electrode seat is connected to a cooling water channel, and the cooling water channel is used to cool the positive electrode seat.

[0014] Furthermore, the pressing cap is provided with an external thread, and the external thread is screwed with a second nut.

[0015] The utility model according to the above scheme has the beneficial effects that: the utility model provides an evaporation boat clamping device, including an evaporation tank, an electrode, a baffle plate arranged on one side of the evaporation tank, and a baffle sleeve, the baffle plate is provided with an electrode hole that penetrates the thickness of the baffle plate; the electrode includes a positive electrode seat and a negative electrode seat, the positive electrode seat passes through the electrode hole and extends into the evaporation tank, the positive electrode seat and the negative electrode seat cooperate to form a placement opening for placing the evaporation boat, and the placement opening is connected to the evaporation tank; the baffle sleeve is arranged on the positive electrode seat, and at least a part of the baffle sleeve is located in the electrode hole to seal the gap between the electrode hole and the positive electrode seat, thereby reducing the probability of aluminum slag being deposited in the gap, thereby preventing conduction between the positive electrode seat and the baffle plate, and reducing the phenomenon of holes in the film. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 A cross-sectional view of an evaporation boat clamping device in an embodiment of the utility model;

[0018] Figure 2 for Figure 1 A local enlarged schematic diagram;

[0019] Figure 3 This is a front view of an evaporation boat clamping device in an embodiment of the utility model;

[0020] Figure 4 This is one of the three-dimensional structural schematic diagrams of an evaporation boat clamping device in an embodiment of the utility model;

[0021] Figure 5 This is a second schematic diagram of the three-dimensional structure of an evaporation boat clamping device in an embodiment of the utility model.

[0022] In the figure, 1, evaporation tank; 2, electrode; 21, positive electrode seat; 211, annular protrusion; 212, first recess; 22, negative electrode seat; 221, second recess; 3, baffle; 4, baffle sleeve; 41, sleeve body; 42, baffle; 5, clamping assembly; 51, base; 52, pressure cap; 521, second clamping protrusion; 53, compression spring; 54, first limit member; 55, second limit member; 551, base; 552, first clamping protrusion; 61, first nut; 62, second nut; 7, bottom plate; 8, cooling water channel; 9, evaporation boat. DETAILED DESCRIPTION

[0023] The following detailed description and drawings of the embodiments of the present invention are used to illustrate the principle of the present invention, but cannot be used to limit the scope of the present invention, that is, the present invention is not limited to the embodiments described.

[0024] In the description of the present invention, it should be noted that, unless otherwise specified, "multiple" means two or more than two; the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating directions or positional relationships, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc., are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0025] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0026] In order to better understand the present invention, the present invention is further described below in conjunction with the accompanying drawings and embodiments:

[0027] See also Figure 1-2 As shown, an embodiment of the utility model provides an evaporation boat clamping device, including an evaporation tank 1, an electrode 2, a baffle 3 arranged on one side of the evaporation tank 1, a baffle sleeve 4, a clamping assembly 5 and a bottom plate 7.

[0028] Specifically, the baffle 3 is provided with an electrode hole that penetrates the thickness of the baffle 3, and the electrode 2 includes a positive electrode seat 21 and a negative electrode seat 22. The positive electrode seat 21 and the negative electrode seat 22 are arranged opposite to each other, and the negative electrode seat 22 and the baffle 3 are respectively installed on the bottom plate 7. The positive electrode seat 21 passes through the electrode hole of the baffle 3 and extends into the evaporation tank 1. The positive electrode seat 21 and the negative electrode seat 22 cooperate to form a placement opening for placing the evaporation boat 9, and the placement opening is connected to the evaporation tank 1; the evaporation boat 9 is set in the placement opening. In this embodiment, the baffle 4 is sleeved on the positive electrode seat 21, and at least a part of the baffle 4 is located in the electrode hole to seal the gap between the electrode hole and the positive electrode seat 21, thereby reducing the probability of aluminum slag being deposited in the gap, thereby preventing the positive electrode seat 21 and the baffle 3 from conducting electricity and reducing the phenomenon of holes in the film.

[0029] See also Figure 1As shown, the blocking sleeve 4 includes a sleeve body 41 and a blocking portion 42 formed by the sleeve body 41 extending outward in the radial direction thereof, the sleeve body 41 and the blocking portion 42 are both sleeved on the positive electrode seat 21, and the sleeve body 41 passes through the electrode hole and is connected to the blocking portion 42, and the blocking portion 42 abuts against the end surface of the baffle 3 facing the evaporation tank 1. Specifically, in this embodiment, the blocking sleeve 4 is an umbrella-shaped structure, and such a design enables the blocking sleeve 4 to completely cover the port of the electrode hole, and a portion of the blocking sleeve 4 extends into the electrode hole to seal the gap between the electrode hole and the positive electrode seat 21, thereby preventing metal dust from accumulating in the gap.

[0030] See also Figures 1 to 5 As shown, the clamping assembly 5 is arranged on one side of the baffle 3, and the clamping assembly 5 includes a base 51, a pressure cap 52, a compression spring 53, a first limit member 54 and a second limit member 55. The base 51, the pressure cap 52, the compression spring 53, the first limit member 54 and the second limit member 55 are all coaxially arranged.

[0031] Specifically, one end of the base 51 is detachably connected to the baffle 3 by screws, and the other end of the base 51 has a threaded hole. At least a portion of the pressure cap 52 is screwed into the threaded hole. The base 51 and the pressure cap 52 cooperate to form an accommodating cavity for allowing the positive electrode seat 21 to pass through. The first limit member 54 and the second limit member 55 are both mounted on the positive electrode seat 21 and located in the accommodating cavity, and the compression spring 53 is arranged between the first limit member 54 and the second limit member 55. When the pressure cap 52 is screwed into the base 51, the compression spring 53 contracts to generate a reaction force, thereby pushing the positive electrode seat 21 to move to the right to approach the negative electrode seat 22, so that the evaporation boat 9 can be clamped between the positive electrode seat 21 and the negative electrode seat 22. When the pressure cap 52 is screwed out from the base 51, the compression spring 53 extends, so that the deformation of the compression spring 53 is reduced, thereby weakening the elastic force of the spring, and the positive electrode seat 21 moves to the left to move away from the negative electrode seat 22, thereby releasing the limit on the evaporation boat 9. This design makes it easy for the staff to quickly replace the evaporation boat 9, making the installation and disassembly of the evaporation boat 9 more convenient, reducing production costs and improving production efficiency.

[0032] See also Figure 1-2 As shown, in this embodiment, an annular protrusion 211 is provided on the outer wall of the positive electrode seat 21, and under the action of the compression spring 53, the side wall of the first limiter 54 can be abutted against the side wall of the annular protrusion 211, thereby limiting the first limiter 54 from sliding on the positive electrode seat 21. Specifically, the annular protrusion 211 is fixedly connected to the positive electrode seat 21, and the diameter of the annular protrusion 211 is greater than the diameter of the positive electrode seat 21.

[0033] Preferably, the first limit member 54 has a T-shaped structure. Such a design can, on the one hand, increase the contact area between the first limit member 54 and the annular protrusion 211 to avoid deformation of the end face of the first limit member 54 due to too small a force-bearing area; on the other hand, it can guide the compression spring 53 to avoid end displacement of the compression spring 53 when it contracts or extends.

[0034] See also Figure 1-2 As shown, the second stopper 55 includes a base 551 and a first clamping protrusion 552 formed by the base 551 extending radially outward, and the pressure cap 52 is provided with a second clamping protrusion 521, the second clamping protrusion 521 and the first clamping protrusion 552 are staggered, and the side wall of the second clamping protrusion 521 abuts against the side wall of the first clamping protrusion 552. Specifically, the first clamping portion is provided at the middle position of the base 551, so that the end of the compression spring 53 away from the first stopper 54 is sleeved on the base 551. Such a design can not only make the pressure cap 52 and the second stopper 55 fit closely, but also play a guiding role for the compression spring 53, so as to avoid the end of the compression spring 53 from being offset during the compression or extension process.

[0035] In this embodiment, the evaporation boat clamping device further includes a first nut 61 , and the first nut 61 is sleeved on an end of the retaining sleeve 4 away from the evaporation tank 1 .

[0036] Preferably, one end of the positive electrode seat 21 facing the placement port is recessed inward to form a first recessed portion 212, and one end of the negative electrode seat 22 facing the placement port is recessed inward to form a second recessed portion 221, and the first recessed portion 212 and the second recessed portion 221 are correspondingly arranged to respectively clamp the two ends of the evaporation boat 9. Specifically, graphite paper is arranged in the first recessed portion 212 and the second recessed portion 221, and the graphite paper is used to enhance the conductivity between the positive electrode seat 21, the evaporation boat 9 and the negative electrode seat 22, thereby accelerating the evaporation efficiency.

[0037] In this embodiment, one end of the positive electrode seat 21 is connected to a cooling water channel 8 , and the cooling water channel 8 is used to cool the positive electrode seat 21 .

[0038] See also Figure 1-2 As shown, the pressure cap 52 is provided with an external thread, and the external thread is screwed with a second nut 62. With this design, the position of the pressure cap 52 can be adjusted by the second nut 62, thereby adjusting the elastic force of the compression spring 53, so that the compression spring 53 can better push the positive electrode seat 21 to clamp the evaporation boat 9.

[0039] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0040] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. An evaporation boat clamping device, characterized in that: include: An evaporation tank (1), an electrode (2), a baffle (3) arranged on one side of the evaporation tank (1), and a baffle sleeve (4), wherein the baffle (3) is provided with an electrode hole penetrating the thickness of the baffle (3); The electrode (2) comprises a positive electrode seat (21) and a negative electrode seat (22), the positive electrode seat (21) passes through the electrode hole and extends into the evaporation tank (1), the positive electrode seat (21) and the negative electrode seat (22) cooperate to form a placement opening for placing an evaporation boat (9), and the placement opening is connected to the evaporation tank (1); The blocking sleeve (4) is sleeved on the positive electrode seat (21), and at least a portion of the blocking sleeve (4) is located in the electrode hole to seal the gap between the electrode hole and the positive electrode seat (21).

2. The evaporation boat clamping device according to claim 1, characterized in that: The stopper sleeve (4) comprises a sleeve body (41) and a stopper portion (42) formed by the sleeve body (41) extending outwardly in a radial direction; the sleeve body (41) and the stopper portion (42) are both sleeved on the positive electrode seat (21); the sleeve body (41) passes through the electrode hole to be connected to the stopper portion (42); and the stopper portion (42) abuts against the end surface of the baffle plate (3) facing the evaporation tank (1).

3. The evaporation boat clamping device according to claim 1, characterized in that: The invention also comprises a clamping assembly (5), wherein the clamping assembly (5) is arranged on one side of the baffle (3), and the clamping assembly (5) comprises a base (51), a pressure cap (52), a compression spring (53), a first limiting member (54) and a second limiting member (55); one end of the base (51) is connected to the baffle (3), the other end of the base (51) has a threaded hole, at least a part of the pressure cap (52) is screwed into the threaded hole, the base (51) and the pressure cap (52) cooperate to form an accommodating cavity for allowing the positive electrode seat (21) to pass through, the first limiting member (54) and the second limiting member (55) are both sleeved on the positive electrode seat (21) and located in the accommodating cavity, and the compression spring (53) is arranged between the first limiting member (54) and the second limiting member (55).

4. The evaporation boat clamping device according to claim 3, characterized in that: An annular protrusion (211) is provided on the outer wall of the positive electrode seat (21), and the annular protrusion (211) abuts against the first limiting member (54) to limit the position of the first limiting member (54).

5. The evaporation boat clamping device according to claim 3, characterized in that: The second limiting member (55) comprises a base (551) and a first locking protrusion (552) formed by the base (551) extending radially outward, and the pressing cap (52) is provided with a second locking protrusion (521), the second locking protrusion (521) and the first locking protrusion (552) are staggered with each other, and the side wall of the second locking protrusion (521) is in contact with the side wall of the first locking protrusion (552).

6. The evaporation boat clamping device according to any one of claims 1 to 5, characterized in that: It also comprises a first nut (61), wherein the first nut (61) is sleeved on an end of the retaining sleeve (4) away from the evaporation tank (1).

7. The evaporation boat clamping device according to any one of claims 1 to 5, characterized in that: It also comprises a bottom plate (7), and the baffle (3) and the negative electrode seat (22) are both arranged on the bottom plate (7).

8. The evaporation boat clamping device according to any one of claims 1 to 5, characterized in that: One end of the positive electrode seat (21) facing the placement opening is recessed inward to form a first recess (212), and one end of the negative electrode seat (22) facing the placement opening is recessed inward to form a second recess (221), and the first recess (212) and the second recess (221) are correspondingly arranged to respectively clamp the two ends of the evaporation boat (9).

9. The evaporation boat clamping device according to any one of claims 1 to 5, characterized in that: One end of the positive electrode seat (21) is connected to a cooling water channel (8), and the cooling water channel (8) is used to cool the positive electrode seat (21).

10. The evaporation boat clamping device according to any one of claims 3 to 5, characterized in that: The pressing cap (52) is provided with an external thread, and the external thread is screwed with a second nut (62).

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